CN1071028A - Rotary anode type x-ray tube - Google Patents
Rotary anode type x-ray tube Download PDFInfo
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- CN1071028A CN1071028A CN91109593A CN91109593A CN1071028A CN 1071028 A CN1071028 A CN 1071028A CN 91109593 A CN91109593 A CN 91109593A CN 91109593 A CN91109593 A CN 91109593A CN 1071028 A CN1071028 A CN 1071028A
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Abstract
A kind of rotary anode type x-ray tube, it is by rotary body 12 and the part of fixed body 15 at least one square shaft bearing surface the 22, the 25th of being provided with sliding bearing 21 at it, with the IV beyond the dechromisation
aFamily, Va family or VIa family and be positioned at around the, the 5th or at least a material of nitride, boride or the carbide group of at least a transition metal of period 6 constitute as the pottery of principal component.It is fine and can suppress the erosion of this lubricant to the purpose of this invention is to provide the wettability of a kind of bearing surface and liquid metal lubricant, thereby can keep the rotary anode type x-ray tube of bearing steady operation.
Description
The present invention relates to a kind of rotary anode type x-ray tube, the particularly relevant improvement of supporting the rotating mechanism of plate target.
As everyone knows, rotary anode type x-ray tube is the plate target that comes the support disk shape with rotary body that is provided with bearing portion and fixed body, when being used in the outer energising solenoid that is provided with of vacuum tank and making above-mentioned plate target high speed rotating, bump against on the electron beam that goes out from cathode emission and the surface of plate target, thereby radiate X ray.Bearing portion is by the rolling bearing resemble the ball bearing or when bearing surface forms spiral grooves, use resembles gallium (Ga) or gallium-indium-Xi (Ga-In-Sn) alloy, and the dynamic pressure type sliding bearing that becomes aqueous metallic lubricant when work constitutes.Use the latter sliding bearing be that for example special public clear 60-21463, spy open clear 60-97536, spy and open clear 60-113817, spy and open that clear 60-117531, spy open clear 61-2914, the spy opens clear 62-287555 and the special disclosed rotary anode type x-ray tube of Japan Patent of opening flat 2-227947.
Yet, support the rotary body of plate target to comprise usually: to be fixed on the rotating shaft of being supported on the plate target, constitute by refractory metal; The cylinder core that links to each other, works with this rotating shaft, constitutes by ferromagnetism body resemble iron as the induction motor rotor and with the fixing outside cylindrical that conducts electricity very well of the chimeric back soldering of above-mentioned cylinder core resemble copper.In the inboard of above-mentioned rotary body, be provided with the fixed body of column by bearing.And the outer stator of pipe revolves the effect of rotate magnetic field that adds to rotary body, and according to the induction motor principle and the energy high speed rotating.
In above-mentioned patent gazette, in the disclosed rotary anode type x-ray tube, all use molybdenum (MO) or molybdenum alloy or tungsten (W) or tungsten alloy material as sliding bearing.Yet, if use above-mentioned material to constitute bearing, on the process middle (center) bearing surface of making X-ray tube acidifying taking place easily, and damages the wettability with liquid metals so possibly.In addition, because high-temperature heat treatment and because of the high temperature that action reached of X-ray tube is soaked into thereby produces between these bearing surfaces and liquid metal lubricant, mutually so take place easily slightly to be pickled with grains or in wine or change in size at bearing surface.And the gap size of bearing surface is changed, probably can not continue to keep the bearing working stability.
Purpose of the present invention overcomes above all shortcomings exactly, can suppress the etch of bearing components and can keep the more inexpensive rotary anode type x-ray tube of bearing steady running by this lubricant when providing a kind of wettability at bearing surface and liquid metals lubricant good.
Rotating cathode type cathode type X-ray tube provided by the invention is to constitute like this, at least one side's of the sliding bearing that is provided with on the part of this rotary body and fixed body bearing surface is IV a family, V a family or the V 1a family that removes dechromise (Cr), and with at least one pottery as main composition of carbide, boride or the nitride group of at least one transition metal of being positioned at for 4,5 or 6 cycles.
In the present invention, the bearing surface that is made of above-mentioned pottery is because good with the wettability of liquid metal lubricant, and melting point is very high, so and the reaction of lubricant less, and bearing surface is difficult to be subjected to etch.Also can use inexpensive bearing mother metal again.Further, because these potteries have the conductivity of the anode current circuit that is enough to constitute X-ray tube, thereby can under the situation that does not make structure complicated, constitute hydrodynamic sliding bearing.Thereby can keep bearing movable stable for a long time.
Description of drawings:
Fig. 1 is the longitudinal sectional view of one embodiment of the present of invention;
Fig. 2 is the longitudinal sectional view of amplification of the major part of Fig. 1;
Fig. 3 is the longitudinal section of another embodiment of the present invention;
Fig. 4 is the longitudinal section of the major part of Fig. 3;
Fig. 5 is the top view of the critical piece of Fig. 3;
Fig. 6 is the longitudinal section of major part of the parts of Fig. 3 equally;
Fig. 7 is the top view of the 7-7 section of Fig. 6;
Fig. 8 is the half sectional view of decomposition of major part of the parts of Fig. 3;
Fig. 9 is the longitudinal section of another other embodiment of the present invention;
Figure 10 is the longitudinal section of another other embodiment of the present invention; And
Figure 11 is the longitudinal section of other embodiments of the invention.
Embodiments of the invention are described with reference to the accompanying drawings.Still use prosign to represent with a part.
Example 1: as shown in Figures 1 and 2, the discoid plate target 11 that is made of heavy metal is to be fixed on the outstanding rotating shaft 13 that is provided with in an end place of the rotation 12 that roughly becomes to have the round-ended cylinder shape by nut 14.In the inboard of rotary body 12, the chimeric fixed body 15 that the substantial cylindrical shape is arranged.The point of fixed body 15 is formed with path part 15a.On the stepped position of this fixed body, thrust bearing disk 16 is fixed on the opening portion of rotary body.Bottom at fixed body minor diameter part 15a is connected with anode supporting ring 17, and this anode supporting ring 17 seals link to each other (airtight joint) with glass evacuated container 18.Again, the core of this fixed body 15 has the coolant path 19 that hollows out, insertion tube 20, and the circulation that can set up the coolant of direction as shown by arrow C in this path.The telescoping part of rotary body 12 and fixed body 15 constitutes the dynamic pressure type sliding bearing portion 21 as above-mentioned patent gazette disclosed.For this reason, on the outside of fixed body 15 plain bearing surfaces 22, be formed with two groups of journal bearing by the chevron shaped helicla flute that constitutes 23,23.And, on the plain bearing surfaces at the both ends of fixed body 15, be formed with the spiral goove 24,24 that the garden shape herringbone by thrust bearing constitutes respectively.The degree of depth of these spiral gooves 23,24 is approximately 20 microns.The plain bearing surfaces 25 on a rotating body surface is an even surface, yet also can form corresponding helicla flute as required.Two bearing surfaces 22,25 of rotary body and fixed body are relative approaching with about 20 microns bearing clearance g.In work the time be aqueous metallic lubricant (not shown) in filling in this bearing clearance g and the helicla flute.
Therefore, rotary body 12 and fixed body 15 have the bearing surface 22,25 that ceramic membrane 26,27 is arranged in the surface adhesion of metal bearing mother metal.The bearing mother metal of above-mentioned rotary body 12 and fixed body 15 is by ferroalloy like iron (Fe), the stainless steel or high-speed steel for example the ordinary tool steel SK4 or the alloy tool steel SKD of Japanese Industrial Standards (JIS) regulation
11Such steel that contain small amount of carbon element (being that weight ratio is 0.5-2.5%) are made.And, on the surface of each the bearing mother metal that constitutes bearing surface, adhere to and be formed with ceramic membrane the 26, the 27th, by V a family, the transition metal of period 4, promptly the carbide of this film vanadium constitutes.The method that forms ceramic membrane 26,27 is that the part that at first will become beyond the bearing surface of bearing mother metal suitably covers, then it is placed in the temperature range that keeps 500 ℃-1250 ℃ in the electric furnace, contain vanadium (V) dissolve in the agent dipping between a few hours.Thereby all bearing surfaces have all covered the film of the vanadium carbide (VC) about about 10 micron thickness, they are heat-treated again.
The melting point of the pottery of vanadium carbide (VC) is about 2850 ℃.And because their thermal coefficient of expansions between 20-200 ℃ are 7.2-6.5 * 10
-6/ ℃, thereby be more or less the same with the coefficient of thermal expansion of bearing mother metal, probably phenomenons such as fracture take place in not conference.The ceramic membrane that constitutes by this vanadium carbide (being carbide vanadium vc) particularly and since diffusion-bonded the carbon in the steel of a part of mother metal, thereby adhesion strength height, elevated temperature strength and resistance to wear are also very remarkable.And because to resemble the wettability of the liquid metal lubricant gallium (Ga) or the gallium alloy also good especially, and melting point height, thus lessly react with lubricant, thereby be difficult for lubricated dose of etch.Because this ceramic membrane has conductivity, so it can constitute the part of anode current circuit with liquid metal lubricant.Again, in fixed body 15, helicla flute 23,24th, preformed, the also almost equal equal thickness of ceramic membrane also covers the groove inner surface.As mentioned above, this ceramic membrane is suitable for the hydrodynamic sliding bearing face as the liquid metals lubricating type of X-ray tube.In addition, be above-mentioned ferroalloy and the stainless steel or the carbon tool steel etc. of bearing mother metal, more cheap than molybdenum (Mo) or tungsten (W), and processing is also convenient especially.Moreover, owing to the elevated temperature strength height of this bearing surface, at high temperature be difficult for lubricated dose of erosion, thereby the working temperature of bearing surface can be brought up to for example 500 ℃ degree, therefore, the working temperature of plate target can be improved, in other words, the cooling rate of plate target can be improved.Thereby the mean value of the input electric power of plate target can strengthen relatively.So just, can easily obtain the rotary anode type x-ray tube that has the stable bearing service behaviour and have high cooling rate.
Example 2 forms vanadium boride (VB on the surface of the bearing mother metal that is made of metal
2) ceramic membrane, as bearing surface.This vanadium boride (VB
2) the melting point of ceramic membrane be about 2400 ℃, the thermal coefficient of expansion between 20 ℃ of-200 ℃ of temperature is about 7.6 * 10
-6/ ℃.This film is equally also suitable as the hydrodynamic sliding bearing face of the liquid metals lubricating type of X-ray tube.
Example 3 on the surface of bearing mother metal, forms the ceramic membrane of vanadium nitride (VN) on the surface of bearing mother metal, and with it as bearing surface.The thermal coefficient of expansion that the melting point of the ceramic membrane of this vanadium nitride (VN) is about between 2050 ℃, 20-200 ℃ is about 8.1 * 10
-6/ ℃.Because the melting point of this film is more lower slightly, therefore, suppresses lowlyer a little by manufacture process and working temperature with X-ray tube, same, the liquid metals lubricating type hydrodynamic sliding bearing face that can be used as X-ray tube uses.
Example 4, to shown in Figure 8, the bush(ing) bearing face 22 of the periphery of fixed body 15 (side) and most advanced and sophisticated thrust bearing surface thereof form helicla flute 23,24 respectively as Fig. 3.At the core of fixed body, be formed with the storage and the dead eye 28 of circulating fluid metallic lubricant and therefrom 4 radiation of mind-set (radially) direction penetrate and in radiation direction (radially) hole 30 of fixed body minor diameter part 29 openings.And, form circle-shaped groove 31 at the ladder of fixed body minor diameter part 15a.This fixed body will be become that part beyond the zone of bearing surface is suitably sheltered and by chemical evapn method (CVD) will by the ceramic membrane 27 of nitride (TiN) formation of IV a family, the transition metals Ti of period 4 (Ti) with the thickness range of 0.5-10 micron for example 5 micron thickness cover on this bearing surface.And, the helicla flute that on the fixed body mother metal, forms part as Fig. 2 amplify represented, the top corner 23a place between adjacent slot is shaped as circular-arc or coniform in order to avoid produce the sharp keen projection of tunicle because of LVD in advance.
On the other hand, in order to constitute rotary body 12, need to be ready to show in it (week) face with component form in advance and will constitute the bearing cylinder 32 of thrust bearing surface, the fixed body bearing disk 33 that is connected with its upper opening and the bearer ring 16 that combines with lower openings.These bearing mother metals can be made with above-mentioned (example 1) described metal.The upper opening of bearing cylinder 32 partly be formed with chimeric used ladder of disk and welding usefulness welding bead 34, on its periphery wall, be formed with and keep the used a plurality of ledges 35 in gap.In addition, lower openings periphery wall on be formed with used step portion 39 and a plurality of female screw 40 of welding bead 38, chimeric bearer ring of keeping the used ladder 37 of the used ladder in gap 36 and chimeric rotor, welding usefulness.Use the CVD(method at the inner surface of this bearing cylinder 32) form the ceramic membrane 26 that the nitride by titanium (Ti) (TiN) of 5 micron thickness of having an appointment constitutes.In this occasion, because being pure cylinder, CVD reacting gass, bearing cylinder 32 can go over total inner surface, so can form the consistency of thickness of All Ranges and superior in quality tunicle.On the other hand, outer surface at bearing disk 33 forms notch portion 41 and welding welding bead 42, and becoming the inner surface of thrust bearing surface, and in advance with the state of single part, the ceramic membrane 26 that the same nitride by titanium (Ti) (TiN) that forms 10 micron thickness of having an appointment constitutes.When the inner surface that becomes bearing surface around the centre bore 16a of bearer ring 16 is pre-formed helicla flute 24, with single unit status, the ceramic membrane 26 that constitutes at the same nitride by titanium (Ti) (TiN) that forms about 5 micron thickness of this face.Be formed with the through hole 16b of a plurality of connection usefulness at the flange section of its periphery again.Because these bearing disks 33 and bearer ring 16 form ceramic membrane on tabular surface, therefore still change places and form the film of the even and uniform quality of thickness by methods such as LVD.And, also can form the chevron shaped helicla flute of the circle of thrust bearing at the inner surface of bearing disk 33.
To each parts behind such formation film, at first that bearing disk 33 is chimeric with the ladder of the chimeric usefulness of disk of bearing cylinder 32, be combined as a whole by the welding bead of nitrogen arc welding two welding usefulness.This molten solder joint is represented with symbol 43.This welding is owing to be to carry out localized heating in the position away from bearing surface, thereby the ceramic membrane quality of bearing surface can be not influenced.Then, with the assembly of the rotating cylinder of making by kicker magnet 45 fixing rotating shaft 13 and fixing copper coin tube 44 in the outside chimeric insertion bearing cylinder 32 and bearing disk 33 above the circle, up to till cascaded surface 37 contacts.And with the welding bead 38 of the lower end welding bead 46 of rotating cylinder and bearing cylinder by heliarc welding, weld together, represent with symbol 47.In this case, between rotating cylinder and bearing cylinder, be formed with gap 48 by keeping the ledge used in the gap 35 and keeping the heat insulation usefulness that the ladder 36 used in the gap keeping.Because the gap 48 of this heat insulation usefulness, the heat conduction circuit from the plate target to the sliding bearing is longer, and therefore the heat that can suppress to produce on the target passes to the sliding bearing part.And this heat insulation usefulness between 48 radial dimension from practicality consider expectation be set in more than the 0.1mm, below the 1mm.In addition, top weld part 43 is positioned at the upper gap 49 of accepting rotating shaft, keeps not contact condition with the inner surface of the shoulder 45a of rotating cylinder.And line up high vacuum in order in exhaust process, to contain gapped 48,49 space, in rotating shaft 13, be formed with the 13a that ventilated.
Secondly, the revolving body 12 that is assembled into like this is placed in the vacuum furnace with gyroaxis 13 downward states, make each parts emit built-in gas, under this state, in the inner space of bearing cylinder 32, inject a certain amount of liquid metal lubricant (not shown) that resembles gallium (Ga)-indium (In)-Xi (Sn) alloy.Afterwards, slowly insert in the inboard of bearing cylinder 32 fixed body, embed bearer ring 16 and fastening with a plurality of screw 50.Owing between the bearing surface of the rotary body that assembles like this and the bearing surface of fixed body, be set with about 20 microns bearing clearance, thus will be in this bearing clearance, helicla flute and in the centre bore full of liquid metallic lubricant.At last, at fixed body minor diameter part 15a with anode-supported ring 17 and its seal welding, and then with thin thickness sealing ring and vacuum tank 18 sealing the ring seal welding.To after the exhaust of true appearance container, X-ray tube has just been made then.
Constitute bearing surface and the ceramic membrane that is made of the nitride (TiN) of titanium melting point is about 3080 ℃, and the thermal coefficient of expansion between 20-200 ℃ is 9.8-9.2 * 10
-6/ ℃, these values are all bigger.Therefore, if as the bearing mother metal as using iron, stainless steel ferroalloy or the coefficient of thermal expansion of high-speed steel etc. be 9.0-14.0 * 10
-6The metal of/℃ scope, then particularly the bearing surface of ceramic membrane is difficult for taking place crack and stripping layer, is well suited for using.Like this, the adhesive bonding strengths height of this ceramic membrane and mother metal, elevated temperature strength and resistance to wear are also very outstanding.And the good and lubricant of the wettability of liquid metal lubricant is difficult to by etch.Therefore, can guarantee that hydrodynamic sliding bearing works steadily in the long term.
Example 5 forms by the ceramic membrane of titanium carbide (Tic) formation and as bearing surface on the bearing mother metal surface that is made of metal.The melting point of the ceramic membrane of this titanium carbide (Tic) is that the thermal coefficient of expansion between 3150 ℃, 20-200 ℃ is about 8.3-7.6 * 10
-6/ ℃.This film is suitable as the liquid metals lubricating type hydrodynamic sliding bearing face of X-ray tube equally.
Example 6 forms titanium boride (TiB on the bearing mother metal surface that is made of metal
2) ceramic membrane and as bearing surface.The melting point of this ceramic membrane is that the thermal coefficient of expansion between 2920 ℃, 20-200 ℃ is about 4.6-4.8 * 10
-6/ ℃.This film is suitable as the liquid metals lubricating type hydrodynamic sliding bearing face of X-ray tube equally.
Example 7 forms the carbide (Mo of molybdenum (Mo) of transition metal of the period 5 of VI a family on the bearing mother metal that is made of metal surface
2C) ceramic membrane and as bearing surface.The melting point of this ceramic membrane is that the thermal coefficient of expansion between 2586 ℃, 20-200 ℃ is about 7.8 * 10
-6/ ℃.This film is suitable as the liquid metals lubricating type hydrodynamic sliding bearing face of X-ray tube equally.
Example 8 is at the surperficial boride (MoB that forms the transition metal molybdenum (Mo) of the period 5 that belongs to VI a family of the bearing mother metal that is made of metal
2) or ceramic membrane (MoB) and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 2200 or 2550 ℃, 20 ℃-200 ℃ is about 8.6 * 10
-6/ ℃.This film is suitable as the liquid metals lubricating type hydrodynamic sliding bearing face of X-ray tube equally.
Example 9 forms the carbide (Nb of the transition metal niobium (Nb) of the period 5 that belongs to V a family on the surface of the bearing mother metal that is made of metal
2C or NbC) ceramic membrane, and as bearing surface.The thermal coefficient of expansion that the melting point of this niobium carbide ceramic membrane is about between 3080 ℃ or 3600 ℃, 20-200 ℃ is about 7.0-6.5 * 10
-6/ ℃.This film is suitable as the liquid metals lubricating type hydrodynamic sliding bearing face of X-ray tube equally.
Example 10 forms niobium (Nb) boride (NbB on the surface of the bearing mother metal that is made of metal
2) ceramic membrane, and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 3000 ℃, 20-200 ℃ is about 8.0 * 10
-6This film is suitable as the liquid metals lubricating type hydrodynamic sliding bearing face of X-ray tube equally.
Example 11 forms the ceramic membrane of niobium nitride (NbN) and as bearing surface on the surface of the bearing mother metal that is made of metal.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 2100 ℃, 20-200 ℃ is about 10.1 * 10
-6/ ℃.The melting point of this film is a little low a little, therefore suppresses the manufacture process and the working temperature of X-ray tube slightly, and the liquid metals lubricating type hydrodynamic sliding bearing face that just is suitable as X-ray tube equally uses.
Example 12 forms the ceramic membrane of the carbide (ZrC) of the zirconium (Zr) that belongs to IV a family, the transition metal of period 5 on the surface of the bearing mother metal that is made of metal, and as bearing surface.The melting point of this zirconium carbide ceramics film is that the thermal coefficient of expansion between 3420 ℃, 20-200 ℃ is about 6.9 * 10
-6/ ℃.The liquid metals lubricating type hydrodynamic sliding bearing face that this film is suitable as X-ray tube equally uses.
Example 13 forms the ceramic membrane of zirconium boride (ZrBz) on the surface of the bearing mother metal that is made of metal, and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 3040 ℃, 20-200 ℃ is about 5.9 * 10
-6/ ℃.This film is suitable as liquid metals lubricating type hydrodynamic sliding bearing face equally and uses.
Example 14 forms the ceramic membrane of zirconium nitride (ZrN) and as bearing surface on the surface of the bearing mother metal that is made of metal.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 2980 ℃, 20-200 ℃ is about 7.9 * 10
-6/ ℃.This film is suitable as liquid metals lubricating type dynamic pressure slip equally and holds the axial plane use.
Example 15 forms the carbide (W of the transition metal tungsten (W) of the period 6 that belongs to VI a family on the surface of the bearing mother metal that is made of metal
2C or WC) ceramic membrane, and as bearing surface.The thermal coefficient of expansion that the melting point of this tungsten carbide ceramics film is about between 2795 ℃ or 2785 ℃, 20-200 ℃ is about 6.2-5.2 * 10
-6/ ℃.The hydrodynamic sliding bearing face that this film is suitable as the liquid metals lubricating type of X-ray tube equally uses.
Example 16 forms tungsten boride (WB on the surface of the bearing mother metal that is made of metal
2Or WB) ceramic membrane and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 2370 ℃ or 2800 ℃, 20-200 ℃ is about 7.8-8.6 * 10
-6/ ℃.The hydrodynamic sliding bearing face that this film is suitable as the liquid metals lubricating type of X-ray tube equally uses.
Example 17 forms the carbide (Ta of the transition metal tantalum (Ta) of the period 6 that belongs to V a family on the surface of the bearing mother metal that is made of metal
2C or TaC) ceramic membrane and as bearing surface.Thermal coefficient of expansion between 3400 ℃ of the melting points of the ceramic membrane of this ramet or 3880 ℃, 20-200 ℃ is about 8.3-6.6 * 10
-6/ ℃.This film is suitable as the hydrodynamic sliding bearing face of the liquid metals lubricating type of X-ray tube equally.
Example 18 forms tantalum boride (TaB on the surface of the bearing mother metal that is made of metal
2) ceramic membrane and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 3100 ℃, 20-200 ℃ is about 8.2-7.1 * 10
-6/ ℃.The hydrodynamic sliding bearing face that this film is suitable as the liquid metals lubricating type of X-ray tube equally uses.
Example 19 on the surface of the bearing mother metal that is made of metal, forms the ceramic membrane of tantalum nitride (TaN), and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 3090 ℃, 20-200 ℃ is about 5.0 * 10
-6/ ℃.The liquid metals lubricating type hydrodynamic sliding bearing face that this film can be used as X-ray tube equally uses.
Example 20, on the surface of the bearing mother metal that constitutes by metal, form to belong to IV a family period 6 hafnium transition metal (Hf) carbide (HfC) ceramic membrane and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 3700 ℃, 20-200 ℃ is about 7.0-6.7 * 10
-6/ ℃.This film is suitable as the hydrodynamic sliding bearing face of the liquid metals lubricating type of X-ray tube equally.
Example 21 on the surface of the bearing mother metal that is made of metal, forms hafnium boride (HfB
2) ceramic membrane, and as bearing surface.The thermal coefficient of expansion that the melting point of this film is about between 3250 ℃, 20-200 ℃ is about 6.3 * 10
-6/ ℃.The hydrodynamic sliding bearing face that this film is suitable as the liquid metals lubricating type of X-ray tube equally uses.
Example 22 on the surface of the bearing mother metal that is made of metal, forms the ceramic membrane of hafnium nitride (HfN), and as bearing surface.The thermal coefficient of expansion that the melting point of this ceramic membrane is about between 3310 ℃, 20-200 ℃ is about 7.4-6.9 * 10
-6/ ℃.The hydrodynamic sliding bearing face that this film can be used as the liquid metals lubricating type of X-ray tube equally uses.
Embodiment shown in Figure 9 is an anode type X-ray tube of being arranged to the rotating cylindrical 51 of one plate target rotation at core.If illustrate, then be on each bearing surface of the inner surface of the fixed body cylinder 52 of the both ends open of fixed body 15, upper and lower fixed body disk 53,54, to form ceramic membrane in advance according to desirable installation step.The mother metal of these parts all situation with previous embodiment is the same.Then, be pre-formed the helicla flute 24 of thrust bearing at the inner surface of bottom fixed body disk 54.In addition, also be pre-formed ceramic membrane at the bearing surface of the swivel bearing cylinder 55 of the inboard of rotary body 12 and the bottom end bearing face of rotating cylindrical 51.And outer surface and upper surface at swivel bearing cylinder 55 form helicla flute 23,24.The outer peripheral face of the rotating cylindrical 51 that swivel bearing cylinder 55 and rotating shaft 13 solderings are fixing is chimeric, and bottom 56 is fused by soldering.On the other hand, fixed body cylinder 52 is welded to connect at welding portion 56 places with following fixed body disk 54.And then the assembly of this fixed body cylinder 52 and following fixed body disk 54 is placed on and carries out gas in the vacuum furnace and emit and handle and gallium alloy is injected in the space to the inside lubricant.Rotating cylindrical 51 assembly with swivel bearing cylinder 55 is inserted in the assembly of above-mentioned heating, and with a plurality of double-screw bolts (or screw) 50 with 53 fixed thereon in fixed body disk.Then be packed with the rotating cylinder 45 of copper coin tube 44 in its outside, the top 45 and the rotating shaft 13 of cylinder then interfix by pin.Then, target 11 is fixed on the rotating shaft 13.Afterwards, by making X-ray tube with the same assembling process of previous embodiment.
Again, form the method for foregoing ceramic membrane as surface at the metal bearing mother metal, not only be confined to CVD(chemical evapn method), also can utilize PVD(physical vapor method) adhere to into the thickness of regulation, and carry out necessary heat treatment, and form the molten infusion process of method, molten salt of above-mentioned film or the hot nitriding that carries out adheres in the nitrogen aerosol.
Embodiment as shown in figure 10, the bearing cylinder 61 of rotary body 12 and roughly columned fixed body 15 itself is identical with ceramic membrane among previously described all embodiment, be by the IV a family except chromium, V a family or VI a family be positioned at the 4th, the 5th or transition metal nitride, boride or the carbide of period 6 constitute as the pottery of main composition.The bearing surface of rotary body 12 and fixed body 15 itself is made of this pottery.And fixed body minor diameter part 15a that is made of pottery and the silver-colored pricker soldering of anode holding components 17 usefulness made of iron are with machinery and electrically couple together.Thereby, also be made in the anode current circuit.
In the embodiment shown in fig. 11, fixed body 15 itself is with resembling silicon nitride composition (Si
3N
4) such insulating ceramics constitutes, and be that bearing surface forms foregoing ceramic membrane on the surface of this fixed body.Again, rotary body 12 equally also can be made of insulating ceramics, or is made of the foregoing pottery that conductivity is arranged.Then, in order to constitute the anode current circuit, make the end face 13a of the rotating shaft of making by molybdenum (Mo) 13 that links to each other with plate target 11 be exposed to thrust bearing surface on same plane, with constitute can with electric contact of liquid metal lubricant of fillings in this bearing surface and the centre bore 28.And, electric conductor rod 62 is passed the other end of fixed body 15 and is provided with, and its an end 62a is electrically connected by soldering and anode support 17 made of iron.He end 62b extends in the medium pore 28 and electrically contacts with liquid metal lubricant.Like this, just constituted anode line from plate target to anode support 17.
In addition, also the either party who constitutes cylindrical shell or cylindrical bearing surface part can be made of for example molybdenum (Mo) or tungsten (W), use under the situation that does not form ceramic membrane on the bearing surface, its other party then is made of above-mentioned ceramic shaft bearing surface.Moreover, cover the occasion of above-mentioned ceramic membrane at bearing surface, as the bearing mother metal, also can use molybdenum (Mo) and tungsten (W).
In addition, from the pottery that constitutes bearing surface, why belong to IV a family, V a family or VI a family and be arranged in the 4th, the 5th or the transition metal of the period 6 reason of having got rid of chromium (Cv) especially be because the melting point of carbide, boride or the nitride of chromium is quite low, and the liquid metal lubricant with the alloy that resembles gallium or gallium significantly reacts, thereby impracticable.
And,, be particularly suitable for using the carbide ceramics of vanadium (V) or molybdenum (Mo) than making X-ray tube under the higher temperatures or making the occasion of its work.Perhaps, the carbide of niobium or tungsten or boride ceramics are because more can be high temperature resistant thereby be well suited for using.Equally, the carbide of titanium, zirconium, hafnium or tantalum, boride or nitride ceramics are because higher temperature thereby also suitable use of ability.They at melting point more than 2610 ℃ and also good to the decay resistance of liquid metal lubricant.
Moreover, also can be carbide, boride or nitride a kind of as main composition with above-mentioned each transition metal, add at least one in carbide, boride or the nitride of (sneaking into) other transition metal more therein and mix the pottery of composition.The carbonitride of titanium (Ti(C, N)) pottery or the like for example wherein.
In addition, also can between bearing mother metal and above-mentioned thin layers of ceramic, form an intermediate layer in addition at least again.The intermediate layer of this moment also can be that the composition of its coefficient of thermal expansion between the coefficient of thermal expansion of bearing mother metal and thin layers of ceramic maybe can improve the composition of the conjugation of bearing mother metal and ceramic layer.
Also have, liquid metal lubricant not only is confined to gallium (Ga), gallium-indium (Ga-In) alloy or the sort of material based on gallium of gallium-indium-Xi (Ga-In-Sn) alloy, also can use bismuth-indium-lead-Xi (Bi-In-Pb-tin) alloy that for example bismuth-containing (Bi) is many relatively or contain indium many relatively indium-bismuth (In-Bi) alloy or indium-bismuth-Xi (In-Bi-Sn) alloy.Because their melting point more than room temperature, therefore wished before making the plate target rotation lubricant is preheating to the temperature more than its melting point, make it to become and make it again to be rotated after aqueous.
As mentioned above, can obtain a kind of plain bearing surfaces that constitutes by pottery according to the present invention, not only the wettability with liquid metal lubricant is good, and almost unlubricated dose of bearing surface that causes weather, and has the rotary anode type x-ray tube of bearing performance that can long-time steady operation.And, also can use comparatively cheap bearing mother metal.
Claims (4)
1, a kind of rotary anode type x-ray tube comprise rotary body that a part interfixes with plate target, keep fixed body that this rotary body might rotate, at bearing surface set on the part of above-mentioned rotary body and fixed body and form spiral fluted and slide and hold between parts and the bearing and be aqueous metallic lubricant at least at work at this parts of bearings, at least one bearing surface that it is characterized in that above-mentioned plain bearing element is with dechromisation genus IV in addition
aFamily, V
aFamily or VI
aFamily and be positioned at the 4th, the 5th or at least a material of carbide, boride or the nitride group of at least a transition metal of period 6 constitute as the pottery of main composition.
2, rotary anode type x-ray tube as claimed in claim 1 is characterized in that the above-mentioned ceramic membrane that is being covered on the bearing surface that is made of metal.
3, rotary anode type x-ray tube as claimed in claim 2 is characterized in that described bearing mother metal is iron or ferroalloy.
4, rotary anode type x-ray tube as claimed in claim 2, it is characterized in that a side among rotary body or the fixed body both sides is the outside the opposing party, it disposes the disc parts that inner peripheral surface becomes the cylinder part of bearing surface and in fact opening portion sealed, and the ceramic membrane that is being covered on interior all bearing surfaces of above-mentioned cylinder part.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26333590A JP2856531B2 (en) | 1990-10-01 | 1990-10-01 | Rotating anode X-ray tube |
| JP263335/90 | 1990-10-01 | ||
| JP017578/91 | 1991-02-08 | ||
| JP20940691 | 1991-08-21 | ||
| JP209406/91 | 1991-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1071028A true CN1071028A (en) | 1993-04-14 |
| CN1030807C CN1030807C (en) | 1996-01-24 |
Family
ID=26517433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91109593 Expired - Fee Related CN1030807C (en) | 1990-10-01 | 1991-09-28 | X-ray tube with rotary positive electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1030807C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105006415A (en) * | 2015-08-18 | 2015-10-28 | 上海宏精医疗器械有限公司 | Novel X-ray tube rotating anode device |
| CN105097393A (en) * | 2014-04-23 | 2015-11-25 | 西门子爱克斯射线真空技术(无锡)有限公司 | Anode module and ray tube device |
| CN106438678A (en) * | 2015-08-11 | 2017-02-22 | 西门子医疗有限公司 | Liquid metal plain bearing |
| CN107420428A (en) * | 2017-06-06 | 2017-12-01 | 珠海瑞能真空电子有限公司 | A kind of liquid metal bearings and its processing technology for medical diagnosis X radial pipe |
| CN109148240A (en) * | 2018-07-06 | 2019-01-04 | 健康力（北京）医疗科技有限公司 | Cermet shell and tube and preparation method thereof for CT bulb |
-
1991
- 1991-09-28 CN CN 91109593 patent/CN1030807C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105097393A (en) * | 2014-04-23 | 2015-11-25 | 西门子爱克斯射线真空技术(无锡)有限公司 | Anode module and ray tube device |
| CN106438678A (en) * | 2015-08-11 | 2017-02-22 | 西门子医疗有限公司 | Liquid metal plain bearing |
| CN105006415A (en) * | 2015-08-18 | 2015-10-28 | 上海宏精医疗器械有限公司 | Novel X-ray tube rotating anode device |
| CN105006415B (en) * | 2015-08-18 | 2017-04-05 | 上海宏精医疗器械有限公司 | A kind of X ray tube rotary anode device |
| CN107420428A (en) * | 2017-06-06 | 2017-12-01 | 珠海瑞能真空电子有限公司 | A kind of liquid metal bearings and its processing technology for medical diagnosis X radial pipe |
| CN109148240A (en) * | 2018-07-06 | 2019-01-04 | 健康力（北京）医疗科技有限公司 | Cermet shell and tube and preparation method thereof for CT bulb |
| CN109148240B (en) * | 2018-07-06 | 2020-05-01 | 健康力（北京）医疗科技有限公司 | Metal ceramic tube shell for CT bulb tube and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1030807C (en) | 1996-01-24 |
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