CN107101629B - Silicon micromechanical graphene beam resonant gyroscope - Google Patents
Silicon micromechanical graphene beam resonant gyroscope Download PDFInfo
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- CN107101629B CN107101629B CN201710324290.9A CN201710324290A CN107101629B CN 107101629 B CN107101629 B CN 107101629B CN 201710324290 A CN201710324290 A CN 201710324290A CN 107101629 B CN107101629 B CN 107101629B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- Engineering & Computer Science (AREA)
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Abstract
The invention discloses a silicon micromechanical graphene beam resonant gyroscope which comprises a glass substrate, a transfer beam, a lever transfer part, fixed mass block driving comb teeth, a gyroscope mass block, a first graphene resonant beam, a second graphene resonant beam and a frame. The graphene resonance beam is used as a secondary sensitive structure for indirectly sensing the change of the axial stress acting on the transfer beam. The graphene resonance beams are used as resonance sensitive structures, one graphene resonance beam in an axial symmetry position is in an axial tension state, the other graphene resonance beam is in an axial compression state (in a resonance frequency range) in the process of sensing the change of an axial Goldson force, and the two graphene resonance beams have the same sensitivity to temperature fields and the like. The characteristics of small volume, flexible structure, large breaking strength and high mechanical quality factor of the graphene resonance beam can be fully exerted through the close combination of the two symmetrical graphene resonance beams and the silicon micromechanical gyroscope, and the differential measurement, high sensitivity and high measurement precision of the silicon micromechanical graphene beam resonance gyroscope are realized.
Description
Technical Field
The invention belongs to the technical field of micro/nano electromechanical systems, and particularly relates to a silicon micromechanical graphene beam resonant gyroscope.
Background
The gyroscope is used as a sensor for measuring the angular velocity of a measured object, can be used for identifying the rotating angle of an object in unit time, and has very important function in the fields of attitude control and navigation positioning. Because the traditional mechanical gyroscope has the adverse factors of large volume, high cost, unsuitability for batch production and the like, the silicon micromechanical gyroscope is made to stand out from the manufacture of a plurality of gyroscopes due to the advantages of small volume, light weight, low cost, low power consumption, high reliability, large measurement range and the like, and is widely applied to the civil and military fields. In 1988, the first silicon micromachined gyroscope was designed and manufactured by the Draper laboratory in the united states, and the gyroscope was capable of obtaining angular velocity by measuring the differential capacitance variation of a pair of capacitive collector plates, with accuracy significantly higher than that of a conventional gyroscope. The capacitance detection method used by the gyroscope has the characteristics of small temperature drift, high sensitivity and good reliability. However, with the continuous optimization of the structure size of the silicon micromechanical inertia device, the method steps into the micro-nano level field, so that the signal to noise ratio of signals output by capacitance detection is very low. Thus, Seshia et al, Berkeley, university of California, 2002, proposed the concept of silicon micromechanical resonator gyroscopes and made a proof-of-principle prototype. Noise interference generated in capacitance detection can be effectively avoided by converting a change in coriolis force generated by an input angular velocity into a change in a double clamped tuning fork (DEFT) resonant frequency. The resonance sensitive unit adopted in the method has the excellent characteristics of good repeatability, high resolution and strong stability, so that the silicon micromechanical resonance gyroscope becomes the key point of research of people.
The theoretical research on graphene has been started since 1947. Andre geom and Konstatin Novoselov, physicists of Manchester university, England in 2004, successfully separated single-layer graphene from graphite using a micromechanical exfoliation method. The independent two-dimensional graphene crystal is widely applied to the fields of high-performance nano electronic devices, composite materials, resonant sensors and the like. As the theoretical thickness of the graphene monolayer is 0.335nm, the breaking strength is 40N/m and is close to the theoretical limit, the Young modulus at room temperature is 1.0TPa, the elastic extensibility can reach 20 percent, and the material overload capacity is far better than that of materials such as silicon, carbon nano tubes and the like.
for the silicon micro-resonance type gyroscope, the variation of resonance frequency caused by the difference of sensitive materials on environmental factors such as temperature, vibration and the like has important influence on the measurement precision and the working stability of the sensor. Therefore, the graphene resonance beam can be used as a sensitive material in the silicon micromechanical gyroscope to fully exert the characteristics of small volume, flexible structure, high breaking strength and high mechanical quality factor. The fundamental theory research and key technical breakthrough of the graphene beam resonant gyroscope are mainly based on experimental theory, particularly, the graphene is used as a sensitive structure to research the resonance characteristics, and the resonant gyroscope with differential composite sensitive output is still in the blank of research.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the silicon micromechanical graphene beam resonant gyroscope overcomes the technical defects of the existing silicon micromechanical resonant gyroscope, fully utilizes the high-quality characteristics of graphene materials, is small in size, flexible in structure, strong in anti-interference capability and large in measurement range, and realizes tight coupling of the graphene resonant beam and the silicon micromechanical gyroscope.
The technical scheme adopted by the invention for solving the technical problems is as follows: a silicon micromechanical graphene beam resonant gyroscope comprises a glass substrate, a transfer beam, a lever transfer part, fixed mass block driving comb teeth, a gyroscope mass block, a first graphene resonant beam, a second graphene resonant beam and a frame, wherein the lever transfer part, the fixed mass block driving comb teeth and the gyroscope mass block are fixed on the glass substrate; the fixed base of the gyroscope mass block can allow the gyroscope mass block to have displacement in the normal direction; the lever transmission part is connected with the gyroscope mass block, and the left part and the right part are in a symmetrical structure; the first graphene resonance beam and the second graphene resonance beam are arranged on the transmission beam and positioned between the lever transmission part and the frame to form a double-end fixed support resonance beam, and the first graphene resonance beam and the second graphene resonance beam of the two graphene resonance beams have the same geometric dimension and are completely in a vacuum environment.
The transmission beam, the lever transmission part, the fixed mass block driving comb teeth and the gyroscope mass block are made of the same material and are fixed on the glass substrate, and the first graphene resonance beam and the second graphene resonance beam are made of the same material and are fixed on the transmission beam and located between the lever transmission part and the frame, so that a whole is formed.
The transmission beam, the lever transmission part, the fixed mass block driving comb teeth and the gyroscope mass block can be formed by material etching; the materials used by the first graphene resonance beam and the second graphene resonance beam can be obtained by stripping and growing.
the lever transmission part, the fixed mass block driving comb teeth and the gyroscope mass block are on the same horizontal plane, and the fixed mass block driving comb teeth in the normal direction of the placement structure and the lever transmission part in the axial direction are completely symmetrical; first graphite alkene resonance beam and second graphite alkene resonance beam are on same horizontal plane, place on same water flat line and along the normal direction complete symmetry, can experience the influence of being surveyed pressure and environment simultaneously.
The excitation-vibration pickup mode and related parameters adopted by the first graphene resonance beam and the second graphene resonance beam are consistent;
When the excitation-vibration pickup mode is an electrical mode, the metal electrodes are respectively positioned at the centers of the two rectangular short sides of the first graphene resonance beam and the second graphene resonance beam, and the metal electrodes are respectively welded with conducting wires;
When the excitation-vibration pickup mode is an optical mode, the laser light spot is aligned to the centers of the first graphene resonance beam and the second graphene resonance beam.
Compared with the prior art, the invention has the advantages that:
According to the invention, the graphene resonance beam is used as a sensitive structure in the key technology of the silicon micromechanical gyroscope, so that the strict requirements of high precision, low cost, small volume, fast reaction, large dynamic range and adaptation to severe environment of the graphene resonance beam sensitive structure are met, the gyroscope has the performances of good linearity, high zero stability, low drift rate and strong impact resistance, and the characteristics of high reliability, high mechanical quality factor and symmetrical measurement in the resonance type sensor are realized. Can be widely applied in the fields of biology, medical treatment, industrial machinery, aerospace and safety protection.
Drawings
fig. 1 is a top view of a silicon micromechanical graphene beam resonant gyroscope according to the present invention.
Fig. 2 is an exploded view of a three-dimensional structure of a silicon micromechanical graphene beam resonant gyroscope according to the present invention.
Fig. 3 is a cross-sectional view of a sensitive structure of a silicon micromechanical graphene beam resonant gyroscope according to the present invention.
Detailed Description
the invention is further described with reference to the following figures and detailed description.
As shown in fig. 1 to 3, a silicon micromechanical graphene beam resonant gyroscope angular velocity sensor includes a glass substrate 1, a transfer beam 2, a lever transfer portion 3, a fixed mass block driving comb 4, a gyroscope mass block 5, a first graphene resonant beam 6, a second graphene resonant beam 7, and a frame 8.
The gyroscope is simple in structural shape, and the thicknesses of the four parts of the transmission beam 2, the lever transmission part 3, the fixed mass block driving comb teeth 4 and the gyroscope mass block 5 on the glass substrate 1 have no influence on the natural frequency of the whole structure, so that a domestic mature bulk silicon processing technology is selected. By utilizing the silicon-glass anodic bonding and silicon deep etching process technology, a large-scale production mode can be realized.
selecting N-type silicon or P-type silicon, cleaning, oxidizing the two sides of the silicon wafer, and performing a photoetching process on the front side (marking the front side of the silicon wafer). And after photoetching, etching to remove the silicon dioxide at the development position. After the photoresist is removed, the front silicon surface is etched down to 3 μm to 0.5 μm with KOH solution using silicon dioxide as a mask. And a bond is formed at the anchor points of the fixed mass block driving comb teeth 4 and the frame 8. Phosphorus or boron is implanted and diffused in the front side of the silicon to wait for electrostatic bonding.
and photoetching a concave pattern on the surface of the glass substrate 1 with the thermal expansion coefficient similar to that of silicon, and sputtering an Au electrode to form an electrode and a lead wire to wait for electrostatic bonding.
The glass substrate 1 with the thermal expansion coefficient similar to that of the silicon wafer can effectively reduce the thermal stress generated in the bonding process, and the anode/electrostatic bonding under the action of an electric field avoids stronger thermal stress change generated in the traditional heating bonding process. In the electric field formed on the silicon-glass contact surface, positive sodium ions in the glass drift towards the negative electrode, so that the silicon-glass contact surfaces are tightly combined together.
The silicon chip is turned over and bonded with a glass substrate 1 to enable a boss on the front side of the silicon chip to be a fixed structure, the boss comprises a transmission beam 2, a lever transmission part 3, fixed mass block driving comb teeth 4 and a gyroscope mass block 5, the transmission beam, the lever transmission part, the fixed mass block driving comb teeth and the gyroscope mass block are connected with electrodes through leads, and the transmission beam is continuously corroded and thinned by KOH solution to form a structure layer of the silicon micromechanical gyroscope. And carrying out secondary photoetching on the silicon wafer, photoetching to form two grooves in the normal direction on the transfer beam 2, the lever transfer part 3, the fixed mass block driving comb teeth 4, the gyroscope mass block 5 and the two transfer beams 2, wherein the grooves are used for building two graphene beams in the axial direction.
the first graphene resonance beam 6 and the second graphene resonance beam 7 are on the same horizontal plane, and the placing directions are horizontally consistent along the axial direction, and the first graphene resonance beam and the second graphene resonance beam can be obtained by a mechanical stripping method and a chemical vapor deposition method. The thickness of the single-layer graphene film is 0.335nm, the first graphene resonance beam 6 and the second graphene resonance beam 7 form a double-end fixed-support resonance beam, the thickness of the double-end fixed-support resonance beam is 1-1000 layers, the length of the groove is 100-10000 times of the thickness of the graphene resonance beam, and the double-end fixed-support resonance beam and the groove are both in a vacuum environment, as shown in fig. 3.
the excitation-vibration pickup modes adopted by the first graphene resonance beam 6 and the second graphene resonance beam 7 are completely the same, and the metal electrodes are respectively positioned at the centers of the short edges of the two resonance beams.
And the driving force and the damping force coupled to the detection shaft are reduced by adopting full vacuum packaging, so that the quality factor of the gyroscope is greatly improved, and the performance of the gyroscope is improved.
The principle and the working process of the invention are as follows: in the working process of the micro-mechanical gyroscope, two vibration modes are provided, one is a normal vibration mode, namely a driving vibration mode, which is generally called as a reference vibration mode, and the micro-mechanical gyroscope is in a resonance state and can generate additional motion under the action of the Coriolis force; the other is an axial vibration mode, i.e., a mode of sensitive vibration, and angular velocity information contained in the coriolis force is obtained by detection of an additional motion reflecting the coriolis force.
In the present invention, the fixed mass drive comb teeth 4 provide a resonant state in the normal direction for the gyroscope. When the angular velocity is input into the gyroscope, the gyroscope mass block 5 is used for sensing the change of the angular velocity, and the lever transfer part 3 is used for amplifying the Coriolis force, so that the transfer beam 2 generates the change of the internal stress in the axial direction. Since the axial internal stress changes are the same at each position in the transfer beam 2, the two graphene resonance beams (the first graphene resonance beam 6 and the second graphene resonance beam 7) placed at the groove on the transfer beam 2 can sense the internal stress changes on the transfer beam 2. The gyroscope mass block is output to the axial Coriolis force of the gyroscope mass block to be converted into corresponding frequency output through the change of internal stress of the first graphene resonant beam 6 and the second graphene resonant beam 7 which are in a stretching state and a compressing state, and the corresponding axial Coriolis force can be obtained through the change of the resonant frequency of the graphene resonant beam in an initial state and the resonant frequency of the graphene resonant beam when the graphene resonant beam is subjected to the axial Coriolis force, so that the input angular speed change can be obtained.
Claims (1)
1. The utility model provides a silicon micromechanical graphene beam resonant gyroscope, includes glass substrate (1), transmission beam (2), lever transmission part (3), fixed quality piece drive broach (4), top quality piece (5), first graphene resonance beam (6), second graphene resonance beam (7) and frame (8), its characterized in that: the lever transmission part (3), the fixed mass block driving comb teeth (4) and the gyroscope mass block (5) are fixed on the glass substrate (1); the fixed base of the gyroscope mass block (5) can allow the gyroscope mass block (5) to have displacement in the normal direction; the lever transmission part (3) is connected with the gyro mass block (5), and the left part and the right part are in a symmetrical structure; the first graphene resonance beam (6) and the second graphene resonance beam (7) are placed on the transmission beam (2) and located between the lever transmission part (3) and the frame (8) to form a double-end fixed support resonance beam, and the first graphene resonance beam (6) and the second graphene resonance beam (7) of the two graphene resonance beams are identical in geometric dimension and completely located in a vacuum environment;
The transmission beam (2), the lever transmission part (3), the fixed mass block driving comb teeth (4) and the gyroscope mass block (5) are made of the same material and are fixed on the glass substrate (1), and the first graphene resonance beam (6) and the second graphene resonance beam (7) are made of the same material and are fixed on the transmission beam (2) and are positioned between the lever transmission part (3) and the frame (8), so that a whole is formed;
the materials of the transmission beam (2), the lever transmission part (3), the fixed mass block driving comb teeth (4) and the gyroscope mass block (5) can be formed in a material etching mode; the materials of the first graphene resonance beam (6) and the second graphene resonance beam (7) can be obtained by stripping and growing;
The lever transfer part (3), the fixed mass block driving comb teeth (4) and the gyro mass block (5) are positioned on the same horizontal plane, and the fixed mass block driving comb teeth (4) in the normal direction of the placement structure and the lever transfer part (3) in the axial direction are completely symmetrical; the first graphene resonance beam (6) and the second graphene resonance beam (7) are arranged on the same horizontal plane, are placed on the same horizontal line and are completely symmetrical along the normal direction, and can simultaneously sense the influence of the pressure to be measured and the environment;
The excitation-vibration pickup mode and related parameters adopted by the first graphene resonance beam (6) and the second graphene resonance beam (7) are consistent;
When the excitation-vibration pickup mode is an electrical mode, the metal electrodes are respectively positioned at the centers of two short rectangular edges of the first graphene resonance beam (6) and the second graphene resonance beam (7), and the metal electrodes are respectively welded with conducting wires;
When the excitation-vibration pickup mode is an optical mode, the laser light spots are aligned to the centers of the first graphene resonance beam (6) and the second graphene resonance beam (7).
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| CN108413953B (en) * | 2018-02-27 | 2020-03-10 | 郑州轻工业学院 | Gain-adjustable surface acoustic wave micro gyroscope based on graphene film |
| CN112444239A (en) * | 2019-08-30 | 2021-03-05 | 北京大学 | Geometric compensation type (100) silicon micro-mechanical ring-shaped resonant gyroscope |
| CN116907463B (en) * | 2023-09-08 | 2023-12-15 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
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