CN107092120B - Array substrate, display panel and display device - Google Patents

Array substrate, display panel and display device Download PDF

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Publication number
CN107092120B
CN107092120B CN201710523760.4A CN201710523760A CN107092120B CN 107092120 B CN107092120 B CN 107092120B CN 201710523760 A CN201710523760 A CN 201710523760A CN 107092120 B CN107092120 B CN 107092120B
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array substrate
pressure sensor
pressure
control electrode
substrate
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CN107092120A (en
Inventor
卢峰
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Shanghai Tianma Microelectronics Co Ltd
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Shanghai Tianma Microelectronics Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/13338Input devices, e.g. touch panels
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position

Abstract

The embodiment of the invention discloses an array substrate, a display panel and a display device. The array substrate comprises a pressure sensor, the pressure sensor comprises an extension part, and the extension part is located at least one of the following positions: the first induction signal measuring end is connected with the third edge, and the second induction signal measuring end is connected with the fourth edge; a channel region is arranged on the extension part; and the control electrode layer comprises a control electrode, the orthographic projection of the control electrode on the substrate is at least partially overlapped with the orthographic projection of the channel region on the substrate, and the control electrode and the channel region are electrically insulated from each other so as to control the conduction of the channel region. The array substrate provided by the embodiment of the invention can enable the pressure sensor to have the function of allowing or forbidding the input of the bias voltage signal or the function of allowing or forbidding the output of the pressure sensing signal under the condition of not increasing the area of the non-display area of the array substrate.

Description

Array substrate, display panel and display device
Technical Field
The embodiment of the invention relates to a touch pressure detection technology, in particular to an array substrate, a display panel and a display device.
Background
At present, display panels integrated with touch electrodes are widely used in electronic devices such as mobile phones, tablet computers, and information query machines in public halls. Therefore, the user can operate the electronic equipment by touching the mark on the electronic equipment with fingers, dependence of the user on other input equipment (such as a keyboard, a mouse and the like) is eliminated, and man-machine interaction is simpler.
In order to better meet the user requirement, a pressure sensor for detecting the magnitude of touch pressure when a user touches the display panel is generally further disposed on the array substrate of the display panel, so as to enrich the application range of the touch technology. In the existing array substrate, a plurality of pressure sensors are often arranged in a non-display area, but the pressure sensors do not have functions of allowing or prohibiting input of bias voltage signals and allowing or prohibiting output of pressure sensing detection signals, so that a control switch for controlling the working state of the pressure sensors is often required to be additionally arranged in the non-display area of the array substrate besides the pressure sensors.
However, the non-display area of the existing array substrate is very narrow, the space for placing the pressure sensor and the wiring is very limited, and an independent control switch is difficult to be arranged in the space. If a control switch matched with the pressure sensor needs to be arranged on the array substrate, the area of the non-display area of the array substrate needs to be increased, which is contrary to the development trend of narrowing the frame.
Disclosure of Invention
The invention provides an array substrate, a display panel and a display device, aiming at realizing the purposes that a pressure sensor has the function of allowing or forbidding the input of a bias voltage signal and the function of allowing or forbidding the output of a pressure sensing detection signal under the condition of not increasing the area of a non-display area of the array substrate.
In a first aspect, an embodiment of the present invention provides an array substrate, including:
a substrate including a display area and a non-display area surrounding the display area;
at least one pressure sensor formed in the non-display area of the substrate, the pressure sensor being made of a semiconductor material, the pressure sensor including a sensor body, a first power signal input terminal, a second power signal input terminal, a first sensing signal measurement terminal, and a second sensing signal measurement terminal; the sensor body is in a polygonal structure comprising at least four sides, and comprises a first side and a second side which are oppositely arranged, and a third side and a fourth side which are oppositely arranged; the first power signal input end is electrically connected with the first edge, and the second power signal input end is electrically connected with the second edge and is used for inputting a bias voltage signal to the pressure sensor; the first sensing signal measuring end is electrically connected with the third edge, and the second sensing signal measuring end is electrically connected with the fourth edge and used for outputting a pressure sensing detection signal from the pressure sensor; the pressure sensor further includes an extension located at least one of: the first inductive signal measuring terminal is connected to the first side, the second inductive signal measuring terminal is connected to the second side, and the third inductive signal measuring terminal is connected to the fourth side; a channel region is arranged on the extension part;
a control electrode layer formed in the non-display region of the substrate, the control electrode layer including at least one control electrode, an orthographic projection of the control electrode on the substrate and an orthographic projection of the channel region on the substrate at least partially coincide, the control electrode and the channel region being electrically insulated from each other to control conduction of the channel region.
In a second aspect, an embodiment of the present invention further provides a display panel, where the display panel includes any one of the array substrates provided in the embodiments of the present invention.
In a third aspect, an embodiment of the present invention further provides a display device, where the display device includes any one of the display panels provided in the embodiments of the present invention.
In the embodiment of the invention, the pressure sensor further comprises an extension part, a channel region is arranged on the extension part, the array substrate further comprises a control electrode layer formed in the non-display region of the substrate, the control electrode layer comprises at least one control electrode, the orthographic projection of the control electrode on the substrate is at least partially overlapped with the orthographic projection of the channel region on the substrate, and the control electrode and the channel region are electrically insulated from each other to control the conduction of the channel region, so that the pressure sensor has the functions of allowing or forbidding the input of the bias voltage signal and allowing or forbidding the output of the pressure sensing signal, the problem that an independent control switch cannot be arranged due to the fact that the area of the non-display region is too narrow in the existing array substrate is solved, and the pressure sensor has the function of allowing or forbidding the input of the bias voltage signal under the condition that the area of the non-display region of the array substrate is not increased, and a function of enabling or disabling the output of the pressure-sensitive detection signal.
Drawings
Fig. 1 is a schematic structural diagram of an array substrate according to an embodiment of the present invention;
FIG. 2 is an enlarged view of the dashed area of FIG. 1;
FIG. 3 is a schematic cross-sectional view taken along line A1-A2 in FIG. 2;
fig. 4 is a schematic partial cross-sectional view of another array substrate according to an embodiment of the invention;
fig. 5 is a schematic structural diagram of another array substrate according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of another array substrate according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of the pressure sensor of FIG. 2;
FIG. 8 is an equivalent circuit diagram of the pressure sensor of FIG. 7;
FIG. 9 is a schematic structural diagram of another pressure sensor provided in accordance with an embodiment of the present invention;
fig. 10 is a schematic partial structure diagram of another array substrate according to an embodiment of the present invention;
fig. 11 is a schematic partial structure diagram of another array substrate according to an embodiment of the present invention;
FIG. 12 is an enlarged view of the dashed area of FIG. 11;
fig. 13 is a schematic partial structure diagram of another array substrate according to an embodiment of the invention;
fig. 14 is a schematic partial structure diagram of another array substrate according to an embodiment of the invention;
fig. 15 is a schematic structural diagram of another array substrate according to an embodiment of the invention;
fig. 16 is a schematic structural diagram of a display panel according to an embodiment of the present invention;
fig. 17 is a schematic structural diagram of a display device according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The embodiment of the invention provides an array substrate. The array substrate includes: a substrate including a display area and a non-display area surrounding the display area; at least one pressure sensor formed in a non-display area of the substrate, the pressure sensor being made of a semiconductor material, the pressure sensor including a sensor body, a first power signal input terminal, a second power signal input terminal, a first sensing signal measuring terminal, and a second sensing signal measuring terminal; the sensor body is in a polygonal structure comprising at least four sides, and comprises a first side and a second side which are oppositely arranged, and a third side and a fourth side which are oppositely arranged; the first power supply signal input end is electrically connected with the first edge, and the second power supply signal input end is electrically connected with the second edge and used for inputting a bias voltage signal to the pressure sensor; the first induction signal measuring end is electrically connected with the third edge, and the second induction signal measuring end is electrically connected with the fourth edge and used for outputting a pressure sensing detection signal from the pressure sensor; the pressure sensor further includes an extension located at least one of: the first induction signal measuring end is connected with the third edge, and the second induction signal measuring end is connected with the fourth edge; a channel region is arranged on the extension part; and the control electrode layer comprises at least one control electrode, the orthographic projection of the control electrode on the substrate is at least partially overlapped with the orthographic projection of the channel region on the substrate, and the control electrode and the channel region are electrically insulated from each other so as to control the conduction of the channel region.
When the thin film transistor works, the control electrode is equivalent to a grid electrode of the thin film transistor, and when the voltage on the control electrode is increased to a certain degree, a channel region is conducted. If the extension part is arranged between the first power signal input end and the first edge and/or between the second power signal input end and the second edge, the purpose of allowing or forbidding the sensor main body to receive the bias voltage signal through the first power signal input end and the second power signal input end can be achieved by controlling the voltage on the control electrode. If the extension portion is disposed between the first sensing signal measuring terminal and the third side and/or between the second sensing signal measuring terminal and the fourth side, it is possible to allow or prohibit the pressure sensing signal formed on the sensor main body to be output through the first sensing signal measuring terminal and the second sensing signal measuring terminal by controlling the voltage on the control electrode, that is, the pressure sensor has a function of allowing or prohibiting the input of the bias voltage signal and a function of allowing or prohibiting the output of the pressure sensing signal.
Optionally, the above functions may be used to adjust the operating state of each pressure sensor during the touch pressure detection process, for example, only turn on some pressure sensors related to the touch position, and turn off other pressure sensors, so as to achieve the purpose of reducing the power consumption of the array substrate. Here, the partial pressure sensor related to the touch position may be a pressure sensor whose distance from the touch position is smaller than a set value, or may be a pressure sensor satisfying a preset correspondence relationship with the touch position.
The embodiment of the invention solves the problem that an independent control switch cannot be arranged in the existing array substrate due to the fact that the area of the non-display area is too narrow, and realizes that the pressure sensor has the function of allowing or forbidding the input of the bias voltage signal under the condition that the area of the non-display area of the array substrate is not increased, and a function of enabling or disabling the output of the pressure-sensitive detection signal.
Fig. 1 is a schematic structural view of an array substrate according to an embodiment of the present invention, fig. 2 is an enlarged view of a dotted line region in fig. 1, and fig. 3 is a schematic sectional view taken along a line a1-a2 in fig. 2. Referring to fig. 1 and 2, the array substrate includes: a substrate 10 including a display region 11 and a non-display region 12 surrounding the display region 11; at least one pressure sensor 13 formed in the non-display area 12 of the substrate 10 (exemplarily, four pressure sensors 13 are disposed in the non-display area 12 of the substrate 10 in fig. 1), and the pressure sensors 13 are made of a semiconductor material. Referring to fig. 2, the pressure sensor 13 includes a sensor body 130, a first power signal input terminal Vin1, a second power signal input terminal Vin2, a first sensing signal measurement terminal Vout1, and a second sensing signal measurement terminal Vout 2; the sensor body 130 has a polygonal shape including at least four sides (for example, the sensor body 130 has a quadrangular shape in fig. 1), the sensor body 130 includes first and second sides 131 and 132 disposed opposite to each other, and third and fourth sides 133 and 134 disposed opposite to each other; the first power signal input terminal Vin1 is electrically connected to the first side 131, and the second power signal input terminal Vin2 is electrically connected to the second side 132, for inputting a bias voltage signal to the pressure sensor 13; the first sensing signal measuring terminal Vout1 is electrically connected to the third side 133, and the second sensing signal measuring terminal Vout2 is electrically connected to the fourth side 134, for outputting a pressure sensing signal from the pressure sensor 13; pressure sensor 13 also includes an extension 135. In fig. 2, for example, only the extension portions 135 are respectively provided between the first power signal input terminal Vin1 and the first side 131 and between the second power signal input terminal Vin2 and the second side 132. A channel region 1351 is disposed on the extension 135; and a control electrode layer formed in the non-display region 12 of the substrate 10, the control electrode layer including at least one control electrode 151, an orthogonal projection of the control electrode 151 on the substrate 10 at least partially overlapping an orthogonal projection of the channel region 1351 on the substrate 10, the control electrode 151 and the channel region 1351 being electrically insulated from each other to control the channel region 1351 to be conductive.
With continued reference to fig. 2 and 3, the control electrode 151 is equivalent to a gate of a thin film transistor, and when the voltage on the control electrode 151 increases to a certain level, which turns on the channel region 1351, the sensor body 130 can receive the bias voltage signals from the first power signal input terminal Vin1 and the second power signal input terminal Vin 2; otherwise, the channel region is in a non-conducting state, and the sensor body 130 cannot receive the bias voltage signals from the first power signal input terminal Vin1 and the second power signal input terminal Vin 2.
Thus, the pressure sensor 13 can have the function of allowing or prohibiting the input of the bias voltage signal by controlling the voltage on the control electrode 151, the problem that an independent control switch cannot be arranged due to the excessively narrow area of the non-display area in the conventional array substrate is solved, and the purpose of allowing or prohibiting the input of the bias voltage signal by the pressure sensor 13 is achieved under the condition that the area of the non-display area of the array substrate is not increased.
Referring to fig. 3, in the array substrate, the control electrode 151 is located on a side of the channel region 1351 opposite to the substrate 10, and at this time, the thin film transistor formed by the control electrode 151 and the channel region 1351 is a thin film transistor with a top gate structure. This is only one specific example of the invention and is not meant to be a limitation of the invention. Fig. 4 is a schematic partial cross-sectional view of another array substrate according to an embodiment of the invention. Referring to fig. 4, the control electrode 151 is optionally located between the channel region 1351 and the substrate 10, and at this time, the thin film transistor formed by the control electrode 151 and the channel region 1351 is a thin film transistor of a bottom gate structure.
In the above technical solution, optionally, the material of the pressure sensor 13 is an amorphous silicon material or a polysilicon material. Further, the pressure sensor 13 is doped P-type or N-type.
In actual operation, the channel region 1351 utilizes semiconductor characteristics, and if the doping concentration is too high, the channel region cannot be turned off. The sensor body 130 utilizes the resistance characteristics, and the higher doping concentration reduces the noise problem caused by the contact resistance. Thus, optionally, the face doping concentration of the sensor body 130 of the pressure sensor 13 is greater than the face doping concentration of the channel region 1351. This can prevent the channel region 1351 from being undesirably turned off, and can prevent the pressure-sensitive detection signal output from the sensor body 130 from being undesirably noisy and having a low sensitivity for pressure detection.
Optionally, the face doping concentration of the sensor body 130 is greater than or equal to 1013/cm2And is less than or equal to 1015/cm2The surface doping concentration of the channel region 1351 is less than or equal to 1010/cm2. Those skilled in the art will appreciate that there are two main factors that affect the piezoresistive effect of silicon materials: one is the geometrical deformation of the silicon pattern as a whole on a macroscopic scale, and the other is the stress of the crystal lattice of the silicon crystal on a microscopic scale. The resistance change caused by the stress of the crystal lattice is far larger than the influence caused by the geometric deformation of the whole silicon pattern, and the pressure sensor 13 in the technical scheme provided by the embodiment of the invention is mainly beneficial toThe purpose of sensing the touch pressure is achieved by using the resistance change caused by the stress of the crystal lattice, and the sensor body 130 and the channel region 1351 with the above surface doping concentration can enable the sensor body 130 and the channel region 1351 to be in an optimal working state.
Fig. 5 is a schematic structural diagram of another array substrate according to an embodiment of the present invention. Referring to fig. 5, the array substrate includes at least one thin film transistor 21, the thin film transistor 21 including an active layer 22; the pressure sensor 13 is disposed in the same layer as the active layer 22. The advantage of this arrangement is that the pressure sensor 13 and the active layer 22 can be formed in the same manufacturing process, thereby saving the manufacturing process, simplifying the manufacturing process and reducing the production cost.
Further, the thin film transistor 22 in the array substrate further includes a gate layer 23 or a source drain layer 24, and optionally, the control electrode layer and the gate layer 23 or the source drain layer 24 are disposed in the same layer, so that the advantage of the arrangement is that the control electrode layer and the gate layer 23 or the source drain layer 24 can be formed in the same manufacturing process, thereby saving the manufacturing process, simplifying the manufacturing process, and reducing the production cost
It should be noted that, in fig. 5, the thin film transistor 21 is disposed in the display area 11, and is mainly used for controlling the operation state of each pixel unit, which is only a specific example of the present invention and is not a limitation to the present invention. Fig. 6 is a schematic structural diagram of another array substrate according to an embodiment of the present invention. Optionally, as shown in fig. 6, the array substrate further includes a thin film transistor (not shown in fig. 6) integrated in the shift register VSR in the non-display area 12, and the thin film transistor is configured to generate a scan signal. The pressure sensor 13 and the active layer of the thin film transistor integrated in the shift register VSR in the non-display region 12 are disposed on the same layer, which can save the manufacturing process, simplify the manufacturing process, and reduce the production cost. Also alternatively, the control electrode layer may be provided in the same layer as the gate layer or the source/drain layer in the thin film transistor integrated in the shift register VSR in the non-display region 12.
Fig. 7 is a schematic structural diagram of the pressure sensor in fig. 2, and fig. 8 is an equivalent circuit diagram of the pressure sensor in fig. 7. Referring to fig. 7 and 8, the pressure sensor may be equivalent to a wheatstone bridge, which includes four equivalent resistors, namely, an equivalent resistor Ra, an equivalent resistor Rb, an equivalent resistor Rc and an equivalent resistor Rd, wherein the region between the second power signal input terminal Vin2 and the first sensing signal measurement terminal Vout1 is the equivalent resistor Ra, the region between the second power signal input terminal Vin2 and the second sensing signal measurement terminal Vout2 is the equivalent resistor Rb, the region between the first power signal input terminal Vin1 and the first sensing signal measurement terminal Vout1 is the equivalent resistor Rd, and the region between the first power signal input terminal Vin1 and the second sensing signal measurement terminal Vout2 is the equivalent resistor Rc. When the bias voltage signals are input to the first power signal input terminal Vin1 and the second power signal input terminal Vin2, current flows through each branch of the wheatstone bridge. At this time, when the array substrate is pressed, the entire array substrate is deformed, and the pressure sensor 13 is subjected to a shearing force from a position corresponding to the array substrate, so that the impedance of at least one of the internal equivalent resistance Ra, the equivalent resistance Rb, the equivalent resistance Rc, and the equivalent resistance Rd of the pressure sensor 13 is changed, and thus, the pressure sensing signals output by the first sensing signal measuring terminal Vout1 and the second sensing signal measuring terminal Vout2 of the pressure sensor 13 are different from the pressure sensing signals output by the first sensing signal measuring terminal Vout1 and the second sensing signal measuring terminal Vout2 of the pressure sensor 13 when no pressure is applied, and accordingly, the magnitude of the touch pressure can be determined.
It should be noted that the sensor body 130 in fig. 7 has a quadrilateral structure, which is only a specific example of the present invention, and is not a limitation of the present invention. In practical arrangement, the sensor body 130 may have a polygonal structure with at least four sides, for example, the sensor body 130 may have a pentagonal structure or a hexagonal structure. In fig. 7, the sensor body 130 has a quadrangular structure; the first, fourth, second and third sides 131, 134, 132, 133 and four sides that are end-to-end for the sensor body 130. The advantage of this arrangement is that the pressure sensor 13 is simple in construction and easy to manufacture.
Further, a hollow area may be disposed on the sensor body 130. The hollowed-out area can increase the relative independence of the equivalent resistor Ra, the equivalent resistor Rb, the equivalent resistor Rc and the equivalent resistor Rd in the actual pressure detection process, and increase the sensitivity of the Wheatstone bridge to pressure, so that the pressure detection precision is improved. In addition, by arranging the hollow-out area, the heat dissipation performance of the sensor body 130 can be improved, and the influence of temperature on pressure detection is reduced.
The shape, size and position of the hollowed-out area can be arbitrary when specifically arranged. Fig. 9 is a schematic structural diagram of another pressure sensor according to an embodiment of the present invention. Illustratively, referring to fig. 9, the sensor body 130 has an octagonal structure, and the first, second, third, and fourth sides 131, 132, 133, and 134 are four sides spaced apart from each other; the sensor body 130 is provided with a hollow area 135, the shape of the hollow area 135 is octagonal, and the geometric centers of the hollow area 135 and the sensor body 130 are overlapped. This configuration has the advantage that since the hollow area 135 and the sensor body 130 have the same shape and the geometric centers are coincident, the equivalent resistances Ra, Rb, Rc and Rd can be made to have the same values. When the touch pressure is detected, the pressure sensing detection signal output by the pressure sensor after the touch pressure is applied is often compared with the pressure sensing detection signal output by the pressure sensor before the touch pressure is applied, so as to obtain the variation of the pressure sensing detection signal, and then the magnitude of the touch pressure is obtained based on the variation of the pressure sensing detection signal. When the equivalent resistance Ra, the equivalent resistance Rb, the equivalent resistance Rc, and the equivalent resistance Rd have the same resistance value, the pressure sensing signal output by the pressure sensor before the touch pressure is applied is 0, and the pressure sensing signal output by the pressure sensor after the touch pressure is applied is equal to the variation of the pressure sensing signal output by the pressure sensor before and after the touch pressure is applied. Therefore, the calculation process of calculating the touch pressure according to the pressure detection signal can be simplified, the response time length of the electronic equipment provided with the array substrate for executing corresponding operation according to the touch pressure is shortened, and the user experience is improved.
Fig. 10 is a schematic structural diagram of another array substrate according to an embodiment of the invention. Referring to fig. 10, the array substrate further includes signal lines and a driving chip 14. The signal lines include a first signal input line 1311, a second signal input line 1312, a first signal output line 1321, and a second signal output line 1322. The first power signal input terminal Vin1 is electrically connected to the driver chip 14 through a first signal input line 1311, the second power signal input terminal Vin2 is electrically connected to the driver chip 14 through a second signal input line 1312, the first sensing signal measurement terminal Vout1 is electrically connected to the driver chip 14 through a first signal output line 1321, and the second sensing signal measurement terminal Vout2 is electrically connected to the driver chip 14 through a second signal output line 1322.
In the actual process, if the resistance of the sensor body 130 is too small, even reaching the first signal input line 1311, the resistance of the second signal input line 1312 can be compared with the resistance of the sensor body 130, and since the first signal input line 1311 and the second signal input line 1312 share a part of the voltage, the voltage actually input to the sensor body 130 is very small. When the voltage value input to the sensor main body 130 is too small, the pressure-sensitive detection signal output from the sensor main body 130 is also small, so that the pressure-sensitive detection signal is buried in a noise signal, which obviously lowers the pressure detection sensitivity of the pressure sensor 13. Under the condition that the total area (including the area of the semiconductor material part and the area of the hollow-out region 135) of the sensor main body 130 (including the hollow-out region 135) is not changed, the resistances of the equivalent resistor Ra, the equivalent resistor Rb, the equivalent resistor Rc and the equivalent resistor Rd can be increased by arranging the hollow-out region 135, so that the voltage division on the sensor main body 130 is increased, and the pressure detection precision is improved.
Further, it is considered that in practice, the array substrate often includes a counter substrate opposite to the array substrate in addition to the array substrate, and the array substrate and the counter substrate are bonded by a frame sealing adhesive. When the frame sealing adhesive is cured, ultraviolet light (UV) is often used to irradiate the frame sealing adhesive from one side of the array substrate, so that the frame sealing adhesive is hardened. If the vertical projection of the frame sealing glue on the array substrate is partially overlapped with the sensor main body, the hollow area is arranged in the sensor main body, the shielding of the sensor main body on ultraviolet light can be reduced, the transmittance of the ultraviolet light is improved, the full curing of the frame sealing glue is facilitated, and the adverse phenomena of liquid crystal leakage and the like caused by the insufficient curing of the frame sealing glue are avoided.
With reference to fig. 10, in the above-mentioned technical solution, the control electrode 151 is electrically connected to the driving chip 14 integrated on the array substrate, which is only a specific example of the present invention and is not a limitation of the present invention. Alternatively, the control electrode 151 may also be electrically connected to other control circuits inside or outside the array substrate to control the bias voltage signal input and the pressure sensing detection signal output. Fig. 11 is a schematic structural diagram of another array substrate according to an embodiment of the present invention. Fig. 12 is an enlarged view of the dashed area in fig. 11. Alternatively, referring to fig. 11 and 12, in the array substrate, the display region 11 of the substrate 10 further includes at least one gate line 20; the non-display region 12 of the substrate 10 includes a plurality of cascaded shift registers VSR including a gate signal output terminal Gn electrically connected to the gate line 20 and the control electrode 151. The advantage of this arrangement is that it is not necessary to add a control circuit for transmitting a control signal to the control electrode 151, thereby reducing the production cost of the array substrate.
With continued reference to fig. 12, since in fig. 12, the extension portions 135 are exemplarily provided only between the first power signal input terminal Vin1 and the first side 131 and between the second power signal input terminal Vin2 and the second side 132, respectively. The offset voltage signal input of the pressure sensor 13 can be controlled by using the shift register VSR according to a certain time sequence, so as to control the on or off of the pressure sensor 13.
It should be noted that, in fig. 11 and 12, only two shift registers VSR and two pressure sensors 13 are exemplarily provided, and the shift registers VSR and the pressure sensors 13 are provided at intervals, which is only a specific example of the present invention and is not a limitation of the present invention. In actual arrangement, each scanning line needs a corresponding shift register VSR, and a good pressure detection effect can be achieved by only arranging a plurality of pressure sensors 13 on the array substrate. Therefore, in practical design, the number of the shift registers VSR is often much larger than the number of the pressure sensors 13, a plurality of shift registers VSR may be disposed between two adjacent pressure sensors 13, and the control electrode corresponding to the pressure sensor 13 may be electrically connected to the shift register VSR adjacent thereto.
Fig. 13 is a schematic partial structure diagram of another array substrate according to an embodiment of the invention. Referring to fig. 13, in comparison with the array substrate provided in fig. 12, only one first power signal input line 1311 and one second power signal input line 1312 are disposed on the same side of the display region in the array substrate provided in fig. 13. Referring to fig. 13, the first power signal input terminal Vin1 of each pressure sensor 13 located on the same side of the display area is connected to the first power signal input line 1311; the second power signal input terminal Vin2 of each pressure sensor 13 located on the same side of the display area is connected to the second power signal input line 1312. The arrangement has the advantages that a first signal input line 1311 and a second signal input line 1312 do not need to be configured for each pressure sensor 13, the requirement for inputting bias voltage signals by all the pressure sensors 13 on the same side can be met by only arranging one first signal input line 1311 and one second signal input line 1312 on the same side of the display area, the arrangement number of the first signal input lines 1311 and the second signal input lines 1312 can be effectively reduced, the wiring space of the non-display area is not excessively occupied, and the arrangement trend is consistent with the development trend of narrow frame.
Fig. 14 is a partial schematic structural view of another array substrate according to an embodiment of the invention. Compared to the array substrate provided in fig. 13, the array substrate provided in fig. 14 has only one first pressure sensing detection line 1321 and one second pressure sensing detection line 1322 disposed on the same side of the display region. Specifically, referring to fig. 14, the first sensing signal measuring terminal Vout1 of each pressure sensor 13 located on the same side of the display area is connected to the first pressure sensing detecting line 1321; the second sensing signal measuring terminal Vout2 of each pressure sensor 13 located on the same side of the display area is connected to the second pressure sensing line 1322. The advantage of such an arrangement is that it is not necessary to configure a first pressure sensing detection line 1321 and a second pressure sensing detection line 1322 for each pressure sensor 13, and only one first pressure sensing detection line 1321 and one second pressure sensing detection line 1322 need be disposed on the same side of the display area 11, so that the requirement of outputting pressure sensing detection signals by all the pressure sensors 13 on that side can be met, the number of the first pressure sensing detection line 1321 and the second pressure sensing detection line 1322 can be effectively reduced, the wiring space of the non-display area is not excessively occupied, and the trend of the development of the narrow frame is consistent.
Fig. 15 is a schematic structural diagram of another array substrate according to an embodiment of the invention. Referring to fig. 15, the array substrate further includes a touch electrode 30, and the touch electrode 30 may be a self-capacitance touch electrode or a mutual capacitance touch electrode for detecting a touch position.
For example, if the touch electrode 30 is a self-capacitance touch electrode, optionally, as shown in fig. 15, a plurality of self-capacitance touch electrodes 30 are disposed on the touch panel, the touch electrode 30 is a block electrode, each touch electrode 30 corresponds to a certain coordinate position, and the touch electrodes 30 respectively form capacitance with the ground. When a finger touches the array substrate, the capacitance of the finger is superimposed on the touch electrode 30 touched by the finger, so that the capacitance to ground of the touch electrode 30 touched by the finger changes. The change of the signal of each touch electrode 30 reflects the change of the capacitance of the touch electrode 30 to the ground. By detecting the signal change condition of each touch electrode 30, it is determined which touch electrode 30 has a signal change, and further, the touch position of the finger can be determined according to the coordinate value corresponding to the touch electrode 30 with the signal change.
In the actual working process, optionally, the array substrate comprises a touch position detection stage and a touch pressure detection stage; in the touch position detection stage, optionally, the pressure sensor is in an off state or a low current operation state, the voltage signal input to the pressure sensor is 0, and the touch electrode 30 performs touch position detection to determine the current touch position; in the stage of detecting the touch pressure, the working state of each pressure sensor 13 is adjusted according to the current touch position, so that some pressure sensors 13 are in the working state (the bias voltage signal input thereto), and the rest of the pressure sensors are in the off state (the voltage signal input thereto is 0), so as to detect the touch pressure.
In the above technical solution, by arranging the touch electrode 30 on the array substrate, only part of the pressure sensors can be specifically turned on the premise of ensuring the accuracy of touch pressure detection, so as to achieve the purposes of reducing the power consumption of the array substrate during touch pressure detection and reducing the heat generated by the array substrate during touch pressure detection.
The embodiment of the invention also provides a display panel. Fig. 16 is a schematic structural diagram of a display panel according to an embodiment of the present invention. Referring to fig. 16, the display panel 300 includes an array substrate 100 and an opposite substrate 200 opposite to the array substrate. The display panel 300 may be a liquid crystal display panel or an organic light emitting display panel. If the display panel 300 is a liquid crystal display panel, the opposite substrate 200 is a color film substrate. If the display panel is an OLED (organic light emitting) display panel, the opposite substrate 200 is an encapsulation cover plate.
The display panel provided by the embodiment of the invention has the advantages that the pressure sensor further comprises an extension part, the extension part is provided with a channel region, the array substrate further comprises a control electrode layer formed in the non-display region of the substrate, the control electrode layer comprises at least one control electrode, the orthographic projection of the control electrode on the substrate is at least partially overlapped with the orthographic projection of the channel region on the substrate, the control electrode and the channel region are electrically insulated with each other to control the conduction of the channel region, so that the pressure sensor has the functions of allowing or forbidding the input of a bias voltage signal and allowing or forbidding the output of a pressure sensing detection signal, the problem that an independent control switch cannot be arranged due to the fact that the area of the non-display region is too narrow in the existing array substrate is solved, and under the condition that the area of the non-display region of the array substrate is not increased, the pressure sensor is made to have the purpose of enabling or disabling the input of the bias voltage signal and enabling or disabling the output of the pressure-sensitive detection signal.
The embodiment of the invention also provides a display device. Fig. 17 is a schematic structural diagram of a display device according to an embodiment of the present invention. Referring to fig. 17, the display device 101 includes any one of the display panels 201 provided in the embodiments of the present invention, and the display device 101 may be a mobile phone, a tablet computer, a smart wearable device, and the like.
In the display device provided by the embodiment of the invention, by arranging the pressure sensor and the extension part, the extension part is provided with the channel region, the array substrate further comprises the control electrode layer formed in the non-display region of the substrate, the control electrode layer comprises at least one control electrode, the orthographic projection of the control electrode on the substrate is at least partially overlapped with the orthographic projection of the channel region on the substrate, and the control electrode and the channel region are electrically insulated from each other to control the conduction of the channel region, so that the pressure sensor has the functions of allowing or forbidding the input of the bias voltage signal and allowing or forbidding the output of the pressure sensing detection signal, the problem that an independent control switch cannot be arranged due to the excessively narrow area of the non-display region in the existing array substrate is solved, and under the condition that the area of the non-display region of the array substrate is not increased, the pressure sensor is made to have the purpose of enabling or disabling the input of the bias voltage signal and enabling or disabling the output of the pressure-sensitive detection signal.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (16)

1. An array substrate, comprising:
a substrate including a display area and a non-display area surrounding the display area;
at least one pressure sensor formed in the non-display area of the substrate, the pressure sensor being made of a semiconductor material, the pressure sensor including a sensor body, a first power signal input terminal, a second power signal input terminal, a first sensing signal measurement terminal, and a second sensing signal measurement terminal; the sensor body is in a polygonal structure comprising at least four sides, and comprises a first side and a second side which are oppositely arranged, and a third side and a fourth side which are oppositely arranged; the first power signal input end is electrically connected with the first edge, and the second power signal input end is electrically connected with the second edge and is used for inputting a bias voltage signal to the pressure sensor; the first sensing signal measuring end is electrically connected with the third edge, and the second sensing signal measuring end is electrically connected with the fourth edge and used for outputting a pressure sensing detection signal from the pressure sensor; the pressure sensor further includes an extension located at least one of: the first inductive signal measuring terminal is connected to the first side, the second inductive signal measuring terminal is connected to the second side, and the third inductive signal measuring terminal is connected to the fourth side; a channel region is arranged on the extension part;
a control electrode layer formed in the non-display region of the substrate, the control electrode layer including at least one control electrode, an orthographic projection of the control electrode on the substrate and an orthographic projection of the channel region on the substrate at least partially coincide, the control electrode and the channel region being electrically insulated from each other, the channel region being turned on when a voltage on the control electrode increases to a certain extent.
2. The array substrate of claim 1,
the control electrode is positioned between the channel region and the substrate; alternatively, the first and second electrodes may be,
the control electrode is positioned on one side of the channel region, which is far away from the substrate.
3. The array substrate of claim 1, wherein the pressure sensor is made of an amorphous silicon material or a polysilicon material.
4. The array substrate of claim 3, wherein the pressure sensor is P-doped or N-doped.
5. The array substrate of claim 4, wherein a face doping concentration of the sensor body of the pressure sensor is greater than a face doping concentration of the channel region.
6. The array substrate of claim 5, wherein the sensor body has a face doping concentration greater than or equal to 1013/cm2And is less than or equal to 1015/cm2The surface doping concentration of the channel region is less than or equal to 1010/cm2
7. The array substrate of claim 3, wherein the array substrate comprises at least one thin film transistor comprising an active layer;
the pressure sensor and the active layer are arranged on the same layer.
8. The array substrate of claim 7, wherein the thin film transistor further comprises a gate layer or a source drain layer;
the control electrode layer and the grid layer or the source drain electrode layer are arranged on the same layer.
9. The array substrate of claim 1, wherein the sensor body has a quadrilateral configuration;
the first edge, the second edge, the third edge and the fourth edge are four edges of the sensor main body which are connected end to end.
10. The array substrate of claim 1, wherein the sensor body has an octagonal structure, and the first, second, third, and fourth sides are four sides spaced apart from each other;
the sensor comprises a sensor body and is characterized in that a hollowed-out area is arranged on the sensor body, the shape of the hollowed-out area is octagonal, and the geometric center of the hollowed-out area coincides with that of the sensor body.
11. The array substrate of claim 1,
the display area of the substrate includes at least one gate line;
the non-display region of the substrate includes a plurality of cascaded shift registers including a gate signal output terminal electrically connected with the gate line and the control electrode.
12. The array substrate of claim 1, further comprising a first power signal input line and a second power signal input line;
the first power supply signal input end of each pressure sensor positioned on the same side of the display area is connected with the first power supply signal input line;
the second power signal input end of each pressure sensor positioned on the same side of the display area is connected with the second power signal input line.
13. The array substrate of claim 1, wherein the array substrate further comprises a first pressure sensing detection line and a second pressure sensing detection line;
the first sensing signal measuring ends of the pressure sensors positioned on the same side of the display area are connected with the first pressure sensing detection line;
and the second sensing signal measuring ends of the pressure sensors positioned on the same side of the display area are connected with the second pressure sensing detection line.
14. The array substrate of claim 1, further comprising a touch electrode, wherein the touch electrode is a self-capacitance touch electrode or a mutual capacitance touch electrode for touch position detection.
15. A display panel comprising the array substrate according to any one of claims 1 to 14.
16. A display device characterized by comprising the display panel according to claim 15.
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Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107331300B (en) * 2017-07-21 2019-09-27 上海天马微电子有限公司 A kind of flexible display panels and flexible display apparatus
CN107393497A (en) * 2017-08-30 2017-11-24 上海天马微电子有限公司 Display panel and display device
CN107463020B (en) * 2017-08-30 2020-07-07 厦门天马微电子有限公司 Display substrate, display panel and display device
CN107562276B (en) * 2017-09-06 2020-08-25 厦门天马微电子有限公司 Array substrate, display panel and display device
CN107632734B (en) * 2017-09-21 2020-09-22 厦门天马微电子有限公司 Display panel, display device and display panel control method
CN107526480B (en) * 2017-09-22 2020-04-28 厦门天马微电子有限公司 Display panel and display device
CN107643852B (en) * 2017-10-17 2021-02-19 厦门天马微电子有限公司 Display panel and display device
CN107844217A (en) * 2017-10-26 2018-03-27 厦门天马微电子有限公司 A kind of display panel and display device
CN107861654B (en) * 2017-10-26 2020-12-18 武汉天马微电子有限公司 Display panel and display device
CN107665662B (en) * 2017-10-31 2020-11-13 厦门天马微电子有限公司 Array substrate, display panel and driving method of array substrate
CN109003990B (en) * 2018-07-27 2020-11-03 上海中航光电子有限公司 Array substrate, manufacturing method thereof, display panel and display device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1343009A (en) * 2001-10-31 2002-04-03 清华大学 Force-sensitive operational amplifier for integrated MOS pressure sensor
JP2003214967A (en) * 2002-01-22 2003-07-30 Hitachi Unisia Automotive Ltd Bridge circuit type sensor element
CN105511679A (en) * 2015-12-25 2016-04-20 上海天马微电子有限公司 Glass substrate, touch control display screen and touch control pressure calculation method
CN105677111A (en) * 2016-01-29 2016-06-15 上海天马微电子有限公司 Array substrate and display panel
CN106020563A (en) * 2016-08-09 2016-10-12 上海天马微电子有限公司 Display panel and display device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258018B2 (en) * 2005-10-26 2007-08-21 Kulite Semiconductor Products, Inc. High accuracy, high temperature, redundant media protected differential transducers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1343009A (en) * 2001-10-31 2002-04-03 清华大学 Force-sensitive operational amplifier for integrated MOS pressure sensor
JP2003214967A (en) * 2002-01-22 2003-07-30 Hitachi Unisia Automotive Ltd Bridge circuit type sensor element
CN105511679A (en) * 2015-12-25 2016-04-20 上海天马微电子有限公司 Glass substrate, touch control display screen and touch control pressure calculation method
CN105677111A (en) * 2016-01-29 2016-06-15 上海天马微电子有限公司 Array substrate and display panel
CN106020563A (en) * 2016-08-09 2016-10-12 上海天马微电子有限公司 Display panel and display device

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