CN107065433B - Drying device - Google Patents
Drying device Download PDFInfo
- Publication number
- CN107065433B CN107065433B CN201710316370.XA CN201710316370A CN107065433B CN 107065433 B CN107065433 B CN 107065433B CN 201710316370 A CN201710316370 A CN 201710316370A CN 107065433 B CN107065433 B CN 107065433B
- Authority
- CN
- China
- Prior art keywords
- drying chamber
- drying
- airflow
- air outlet
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention relates to a drying device which is used for drying a mask plate and comprises a drying chamber, wherein an air knife is arranged at the port of the drying chamber, and air outlets for discharging airflow generated by the air knife are arranged at positions, close to the bottom of the drying chamber, of the side wall of the drying chamber. The invention has the beneficial effects that: the air outlet is arranged to reduce the generation of rebound airflow, so that the influence of dust brought by the rebound airflow on the mask plate is reduced, and the evaporation yield of the product is improved.
Description
Technical Field
The invention relates to the technical field of liquid crystal product manufacturing, in particular to a drying device.
Background
In the fine metal Mask (FMM Mask) mode, an OLED (organic light-emitting diode) material is evaporated onto an LTPS (low temperature polysilicon) backplane according to a predetermined procedure by an evaporation method, and red, green, and blue organic substances are evaporated onto a predetermined position by using a pattern on the Mask. The bottom of the current Dry Bath (drying chamber) 3 is a closed structure (only one hole for discharging liquid), as shown in fig. 1 and fig. 2, when the Air Knife (AK)2 blows air downwards to Dry the mask plate 1, because of the almost closed structure of the lower part of the drying chamber 3, the air 20 blown downwards by the air knife 2 is saturated, an upward air flow 10 is formed, the upward air flow 10 drives particles (dust) deposited at the bottom of the drying chamber 3, the dust driven by the upward air flow 10 is deposited on the surface of the mask plate 1, and when the mask plate 1 deposited with dust is placed in the evaporation chamber for evaporation, the quality of the evaporation product is affected.
Disclosure of Invention
In order to solve the technical problem, the invention provides a drying device which reduces the generation of rebound airflow so as to reduce the influence of dust brought up by the rebound airflow on a mask plate.
In order to achieve the purpose, the invention adopts the technical scheme that: a drying device is used for drying a mask plate and comprises a drying chamber, wherein an air knife is arranged at the port of the drying chamber,
and an air outlet for discharging airflow generated by the air knife is formed in the side wall of the drying chamber, which is close to the bottom of the drying chamber.
Further, the air outlet is connected with the vacuum adsorption structure through a pipeline.
Furthermore, the shape of the end of the pipeline connected with the air outlet is funnel-shaped, and the area of the end of the pipeline connected with the air outlet is larger than that of the end of the pipeline far away from the inside of the drying chamber.
Furthermore, the air knives are arranged on two opposite side walls of the drying chamber and corresponding to ports of the drying chamber, the length of the pipeline close to one end inside the drying chamber in the first direction is equal to the width of the side wall corresponding to the drying chamber, and the first direction is the width direction of the side wall corresponding to the pipeline.
Furthermore, the pipeline is obliquely arranged, one end, far away from the air outlet, of the pipeline is higher than one end, connected with the air outlet, of the pipeline, and the inner surface, close to the bottom of the drying chamber, of the pipeline is in a step shape.
Furthermore, a one-way blocking structure which enables airflow of the air knife to pass through and blocks airflow rebounding from the bottom of the drying chamber to pass through is arranged in the drying chamber, and the one-way blocking structure is arranged between the air outlet and the air knife.
Furthermore, the one-way blocking structure comprises a plurality of layers of filter screens which are arranged in an overlapping mode.
Further, the drying chamber comprises two opposite side walls, the air knife is arranged at a port of each side wall corresponding to the drying chamber, the air outlet is arranged at the position, close to the bottom of the drying chamber, of the inner surface of each side wall, a first partition plate is arranged on the inner surface of each side wall, and the first partition plate is obliquely arranged towards the bottom of the drying chamber;
the bottom of the drying chamber is provided with a second partition board which is matched with the first partition boards to control the airflow direction of the air knife so that the airflow of the air knife is discharged from the air outlet, the second partition board is positioned between the two first partition boards, and the section of the second partition board is in an inverted V shape.
Furthermore, one end of the first partition board close to the bottom of the drying chamber is provided with a folded edge bent towards the corresponding side wall.
Furthermore, the joint of the folded edge and the first clapboard is an arc.
The invention has the beneficial effects that: the air outlet is arranged to reduce the generation of rebound airflow, so that the influence of dust brought by the rebound airflow on the mask plate is reduced, and the evaporation yield of the product is improved.
Drawings
FIG. 1 is a schematic view showing a structure of a drying apparatus according to the prior art;
FIG. 2 is a schematic view of the flow of air in a drying chamber according to the prior art;
FIG. 3 is a schematic view showing the structure of a drying apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an end of the duct connected to the outlet according to an embodiment of the present invention;
FIG. 5 is a schematic view of a portion of the inner surface of a duct near the bottom of the drying chamber according to an embodiment of the present invention;
FIG. 6 is a schematic view showing a drying apparatus according to another embodiment of the present invention;
FIG. 7 is a schematic view of a unidirectional barrier structure according to an embodiment of the present invention;
FIG. 8 is a schematic view showing the structure of a drying apparatus according to a third embodiment in an example of the present invention;
fig. 9 is a schematic view showing the flow direction of the air flow inside the drying chamber in the structure of the drying apparatus according to the third embodiment of the example of the present invention.
Detailed Description
The features and principles of the present invention will be described in detail below with reference to the accompanying drawings, which are provided for illustration only and are not intended to limit the scope of the invention.
As shown in fig. 3, the embodiment provides a drying device for drying a mask plate, which includes a drying chamber 3, and an air knife 2 is disposed at a port of the drying chamber 3.
An air outlet 11 for discharging airflow generated by the air knife 2 is arranged on the side wall of the drying chamber 3 and close to the bottom of the drying chamber 3.
Set up air outlet 11 in drying chamber 3's bottom, utilize the effect of breathing in of air outlet 11, make the air current flow direction change (change original bounce-back air current) for the air current flows from the air outlet 11 that sets up, and the arrow direction in figure 3 is the flow direction of air current, reduces the influence that the dust that the bounce-back air current was taken produced the mask plate, improves off-the-shelf coating by vaporization yield.
The size of the air outlet 11 and the specific arrangement position of the air outlet 11 can be set according to actual needs, and only the air flow generated by the air knife 2 is exhausted, so that the generation of rebound air flow is reduced.
In order to further effectively reduce the generation of the rebound airflow in this embodiment, the air outlet 11 is connected to the vacuum adsorption structure through the pipe 7. The flow direction of the air flow is further changed by utilizing the suction force generated by the vacuum adsorption structure, so that the air flow generated by the air knife 2 flows out of the air outlet 11 after entering the drying chamber 3, the generation of rebound air flow is reduced, and the influence of dust brought by the air flow on the mask plate is reduced.
In this embodiment, the shape of the end of the pipe 7 connected to the air outlet 11 is funnel-shaped, and the area of the end of the pipe 7 connected to the air outlet 11 is larger than the end of the pipe 11 far away from the inside of the drying chamber 3. The change of the airflow direction is facilitated.
The concrete shape of drying chamber 3 can have the multiple, can be cylinder, cuboid etc. in this embodiment, drying chamber 3 is a cuboid structure, on two relative lateral walls of drying chamber 3, correspond to drying chamber 3's port department is equipped with air knife 2, pipeline 7 is close to drying chamber 3 inside one end, length (dotted line marks in figure 4) on the first direction equals the width of the corresponding lateral wall of drying chamber 3, the first direction is pipeline 7 corresponds the width direction of drying chamber 3's lateral wall.
The shape of the end of the duct 7 connected to the air outlet 11 may be various as long as the duct 7 is close to the end inside the drying chamber 3, the length in the first direction (indicated by a dotted line in fig. 4) is equal to the width of the side wall corresponding to the drying chamber 3, so as to effectively prevent the generation of the rebound airflow, and avoid a dead angle, in this embodiment, the shape of the end of the duct 7 connected to the air outlet 11 is a flat funnel shape, so as to save the space occupied by the duct 7 on the side wall corresponding to the drying chamber 3, (the shape of the end of the duct 7 connected to the air outlet 11 corresponds to the shape of the air outlet 11) the end of the duct 7 close to the inside of the drying chamber 3 is an ellipse (not limited to an ellipse), and the length of the long side of the end of the duct 7 close to the inside of the drying chamber 3 (a long axis of an ellipse, indicated by a dashed line in fig. 4) is equal to the width of the corresponding side wall of the drying chamber 3. The suction effect of the vacuum adsorption structure is matched, the flow direction of the airflow in the drying chamber is changed more effectively, the generation of rebound airflow is reduced, and the thick arrows in the figure 4 show the flow direction of the airflow.
The duct 7 may be disposed obliquely or horizontally, in this embodiment, preferably, the duct 7 is disposed obliquely, and when large-volume dust is encountered and one time of air suction cannot completely adsorb and remove the large-volume dust, especially when one end of the duct 7 far away from the air outlet 11 is higher than one end of the duct 7 connected with the air outlet 11 (that is, the duct 7 is disposed obliquely upward), in order to prevent the dust from falling on the bottom of the drying chamber 3, an inner surface of the duct 7 near the bottom of the drying chamber 3 is stepped, as shown in fig. 5. The stepped structure will catch the dust carried up by the airflow and prevent the dust from sliding down into the drying chamber 3, which results in the large dust not being removed.
As shown in fig. 6, in another embodiment of the present invention, a one-way blocking structure 4 is disposed in the drying chamber 3, and the one-way blocking structure 4 allows the airflow of the air knife 2 to pass through and blocks the airflow rebounding from the bottom of the drying chamber 3 from passing through, and the one-way blocking structure 4 is disposed between the air outlet and the air knife 2.
When the air flows downwards through the one-way blocking structure 4, the dust brought down by the air flow (generated by the air knife 2) above the one-way blocking structure 4 (on the side of the one-way blocking structure 4 close to the air knife 2) and the dust deposited on the surface of the one-way blocking structure 4 can completely enter the bottom of the drying chamber 3 through the one-way blocking structure 4 under the action of large air force, and most of the air flow can be exhausted through the air outlet, but residual straight upward rebound airflow can drive a small amount of dust, when the rebound airflow meets the one-way blocking structure 4, the filtering and blocking effects can be achieved, meanwhile, under the combined action of large airflow with high wind power above the one-way blocking structure 4, dust basically cannot pass through the one-way blocking structure 4, and then the attached dust on the surface of the mask plate is reduced.
The concrete structural style of one-way blocking structure 4 can have the multiple, the concrete position of one-way blocking structure 4 is set for and also can be set for according to actual need, as long as the realization is right the blocking of the dust of one-way blocking structure 4 below can, in this embodiment, one-way blocking structure 4 includes the filter screen that the multilayer stack set up.
As shown in fig. 7, the one-way blocking structure includes three layers of filtering nets: first filter screen 41, second filter screen 42, third filter screen 43, in order to guarantee the dust of one-way blocking structure below is blockked, the grid structure of first filter screen 41, second filter screen 42, third filter screen 43 can set up for staggering each other, and the grid size of first filter screen 41, second filter screen 42, third filter screen 43 also can be different.
The one-way blocking structure further comprises a spacing adjusting structure which enables the spacing between every two of the first filter screen 41, the second filter screen 42 and the third filter screen 43 to be adjustable, the spacing between adjacent filter screens is adjusted to enhance the filtering effect of the filter screens, and the setting of specific spacing can be set according to actual needs, for example, in the first filter screen 41, the second filter screen 42 and the third filter screen 43, the spacing between adjacent filter screens can be zero, the same spacing can be set between adjacent filter screens, and the spacing between the first filter screen 41 and the second filter screen 42 can be different from the spacing between the second filter screen 42 and the third filter screen 43 (when the one-way blocking structure comprises more than 3 layers of filter screens, the spacing between the adjacent two layers of filter screens is sequentially increased or sequentially reduced from the port of the drying chamber to the bottom direction).
The mesh density of the first filter 41, the second filter 42 and the third filter 43 may be sequentially increased or sequentially decreased or alternately arranged in a density cross manner from the port of the drying chamber 3 to the bottom (the mesh of the first filter 41 is relatively sparse, the mesh of the second filter 42 is relatively dense, and the mesh of the third filter 43 is relatively sparse), which is preferable in this embodiment, the mesh density of the first filter 41, the second filter 42 and the third filter 43 is sequentially increased from the port of the drying chamber 3 to the bottom.
It should be noted that the number of the filter screens may be set according to the requirement, and is not limited to the three layers.
In the third embodiment of this example. As shown in fig. 8 and 9, arrows indicate the flow direction of the air flow, the drying chamber 3 includes two opposite side walls, a port of each side wall corresponding to the drying chamber 3 is provided with the air knife 2, an inner surface of each side wall is provided with the air outlet at a position close to the bottom of the drying chamber 3, the inner surface of each side wall is provided with a first partition plate 5, and the first partition plate 5 is arranged obliquely towards the bottom of the drying chamber 3;
the bottom of the drying chamber 3 is provided with a second partition plate 6 which is matched with the first partition plate 5 to control the airflow direction of the air knife 2 so that the airflow of the air knife 2 is discharged from the air outlet, the second partition plate 6 is positioned between the two first partition plates 5, and the cross section of the second partition plate 6 is in an inverted V shape.
The first partition 5 and the second partition 6 are used to control the direction of the air flow, so as to reduce the residual air flow, as shown by the arrows in the figure, the direction of the air flow in the drying chamber 3, so that the air flow can more easily drive the dust to be discharged out of the drying chamber 3.
In this embodiment, one end of the first partition 5 near the bottom of the drying chamber 3 has a folded edge 51 bent toward the corresponding side wall. The arrangement of the folded edge 51 plays a guiding role, and is beneficial to the cooperation of the first partition board 5 and the second partition board 6 so as to enable the airflow to flow in a whirling manner and finally be discharged from the air outlet.
In order to make the airflow more easily swirl, the joint of the folded edge 51 and the first partition plate 5 is a circular arc.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (8)
1. A drying device is used for drying a mask plate and comprises a drying chamber, wherein an air knife is arranged at the port of the drying chamber,
an air outlet for discharging airflow generated by the air knife is formed in the side wall of the drying chamber, which is close to the bottom of the drying chamber;
a one-way blocking structure which enables airflow of the air knife and dust brought down by the airflow to pass through and blocks airflow rebounded from the bottom of the drying chamber and dust driven by the rebounded airflow to pass through is arranged in the drying chamber, and the one-way blocking structure is arranged between the air outlet and the air knife;
the one-way blocking structure comprises multiple layers of overlapped filter screens, the grid structures of the multiple layers of overlapped filter screens are arranged in a mutually staggered mode, and the grids are different in size.
2. Drying apparatus according to claim 1 in which the outlet is connected to the vacuum suction structure by a conduit.
3. The drying apparatus according to claim 2, wherein an end of the duct connected to the air outlet is shaped like a funnel, and an area of the end of the duct connected to the air outlet is larger than an area of an end of the duct away from an inside of the drying chamber.
4. The drying device according to claim 3, wherein the air knives are disposed on two opposite side walls of the drying chamber at ports corresponding to the drying chamber, and the length of the duct near one end inside the drying chamber in a first direction is equal to the width of the corresponding side wall of the drying chamber, and the first direction is the width direction of the corresponding side wall of the drying chamber.
5. The drying apparatus as claimed in claim 3, wherein the duct is disposed in an inclined manner, and an end of the duct away from the air outlet is higher than an end of the duct connected to the air outlet, and an inner surface of the duct near a bottom of the drying chamber is stepped.
6. The drying device according to claim 1, wherein the drying chamber comprises two opposite side walls, a port of each side wall corresponding to the drying chamber is provided with the air knife, an inner surface of each side wall is provided with the air outlet at a position close to the bottom of the drying chamber, the inner surface of each side wall is provided with a first partition plate, and the first partition plate is obliquely arranged towards the bottom of the drying chamber;
the bottom of the drying chamber is provided with a second partition board which is matched with the first partition boards to control the airflow direction of the air knife so that the airflow of the air knife is discharged from the air outlet, the second partition board is positioned between the two first partition boards, and the section of the second partition board is in an inverted V shape.
7. Drying apparatus according to claim 6, in which the end of the first partition adjacent the bottom of the drying chamber has a fold towards the corresponding side wall.
8. Drying apparatus according to claim 7 in which the junction of the flap and the first partition is an arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710316370.XA CN107065433B (en) | 2017-05-08 | 2017-05-08 | Drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710316370.XA CN107065433B (en) | 2017-05-08 | 2017-05-08 | Drying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107065433A CN107065433A (en) | 2017-08-18 |
| CN107065433B true CN107065433B (en) | 2021-01-26 |
Family
ID=59597765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710316370.XA Active CN107065433B (en) | 2017-05-08 | 2017-05-08 | Drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107065433B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006226A (en) * | 2019-04-09 | 2019-07-12 | 北京七星华创集成电路装备有限公司 | Drying device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006003036A (en) * | 2004-06-18 | 2006-01-05 | Shimada Phys & Chem Ind Co Ltd | Drying device |
| JP4494269B2 (en) * | 2005-03-30 | 2010-06-30 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| WO2012008783A2 (en) * | 2010-07-14 | 2012-01-19 | 주식회사 엘지화학 | Air knife chamber having shield member |
| JP2013045877A (en) * | 2011-08-24 | 2013-03-04 | Tokyo Electron Ltd | Substrate processing apparatus |
| KR102180040B1 (en) * | 2014-06-16 | 2020-11-18 | 삼성디스플레이 주식회사 | Apparatus for drying substrate |
| CN104438226B (en) * | 2014-12-02 | 2016-07-27 | 京东方科技集团股份有限公司 | Mask plate cleaning systems |
| JP6209572B2 (en) * | 2015-01-28 | 2017-10-04 | 芝浦メカトロニクス株式会社 | Substrate processing equipment |
| CN204523639U (en) * | 2015-03-18 | 2015-08-05 | 深圳市龙图光电有限公司 | A kind of cleaning device of mask |
| CN105605909B (en) * | 2016-01-15 | 2018-01-30 | 武汉华星光电技术有限公司 | Substrate-cleaning method |
-
2017
- 2017-05-08 CN CN201710316370.XA patent/CN107065433B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN107065433A (en) | 2017-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11333111B2 (en) | Air filter including a scavenging shutter | |
| CN103447236B (en) | Chip and film separation device | |
| CN101829848A (en) | Laser recticle dedusting plant and dedusting method | |
| CN107065433B (en) | Drying device | |
| EP0501540B1 (en) | Separator for separating water from a flow of air | |
| CN102728469B (en) | Vertical type wet process electric dust collector flow field optimizing device | |
| CN110342112B (en) | Storage device is used in rice processing | |
| CN106440127A (en) | Cold air type air cooling device | |
| CN103657855A (en) | Energy-efficient electrostatic dust collector | |
| CN205913916U (en) | A venturi jetting pipe for dust remover | |
| JP2008063192A (en) | Aggregate fine powder removing device | |
| CN105032761A (en) | Solid mixture separation device and egg and adult insect scale powder separator | |
| CN206207617U (en) | A kind of cold air type air cooling-down device | |
| CN108339668A (en) | Environmental-protection dust removal device | |
| TWI717077B (en) | Non-contact dust removal device | |
| US11808240B2 (en) | Air filter including a scavenging system | |
| CN202942779U (en) | Airflow short circuit preventing energy-saving efficient deduster | |
| JP2007311285A (en) | Air cleaning device | |
| CN113007981A (en) | Drying room with dry and wet gas separation function | |
| CN204220299U (en) | A kind of wet cottrell anode system baffle plate | |
| KR200480173Y1 (en) | Multi-functional electric fan | |
| CN208502828U (en) | A kind of tunnel ventilation dust-extraction unit | |
| CN104741235A (en) | Electric dust collector capable of remarkably improving dust collection efficiency | |
| CN109759228B (en) | Iron-based powder collection device | |
| CN108993937A (en) | A kind of double array integral type blow gun of round mouth |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |