CN107052570A - A kind of laser precision machining device - Google Patents
A kind of laser precision machining device Download PDFInfo
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- CN107052570A CN107052570A CN201710002019.3A CN201710002019A CN107052570A CN 107052570 A CN107052570 A CN 107052570A CN 201710002019 A CN201710002019 A CN 201710002019A CN 107052570 A CN107052570 A CN 107052570A
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- laser
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- light beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of laser precision machining device, it is related to technical field of laser processing, described device includes：Laser, the laser launches first laser；Collimator and extender unit, the collimator and extender unit receives the first laser, while adjusting the focal length of the first laser, forms second laser；First speculum, first speculum receives the second laser, while the second laser is transmitted through into Laser Processing unit, forms the 3rd laser；Unit is laser machined, the Laser Processing unit receives the 3rd laser；Simultaneously by the 3rd laser action in exemplar, solve laser precise processing device of the prior art processing ultra-thin materials during, cause because defocusing amount is excessive process in uniformity it is difficult to ensure that the problem of.
Description
Technical field
The present invention relates to technical field of laser processing, more particularly to a kind of laser precision machining device.
Background technology
Laser Processing is to reach very high energy density in focus after lens focus using the energy of light, by photo-thermal
Effect is processed.Laser Processing does not need that instrument, process velocity be fast, areal deformation is small, can process various materials.It can use and swash
Light beam carries out various processing, such as punching, cutting, scribing, welding, heat treatment to material.
Laser precise processing device of the prior art is most of by rotating microscope base, constantly switches lens so that incident
Laser is focused by the lens and then realization of different focal.
But present inventor is during inventive technique scheme in realizing the embodiment of the present application, above-mentioned technology is found extremely
There is following technical problem less：
Laser precise processing device of the prior art causes processing because defocusing amount is excessive during processing ultra-thin materials
Middle uniformity it is difficult to ensure that the problem of.
The content of the invention
The embodiments of the invention provide a kind of laser precision machining device, add to solve laser accurate of the prior art
Construction equipment causes in processing it cannot be guaranteed that the uniformity of laser, so that shadow during processing ultra-thin materials because defocusing amount is excessive
Ring the technical problem of crudy.
The invention provides a kind of laser precision machining device, described device includes：Laser, laser transmitting the
One laser；Collimator and extender unit, the collimator and extender unit receives the first laser, while adjusting Jiao of the first laser
Away from formation second laser；First speculum, first speculum receives the second laser, while by the second laser
Laser Processing unit is transmitted through, the 3rd laser is formed；Unit is laser machined, the Laser Processing unit receives the described 3rd and swashed
Light；Simultaneously by the 3rd laser action in exemplar.
It is preferred that, described device also includes：Second speculum, second speculum is located at the lower section of the laser,
The first laser is incident to the collimator and extender unit；3rd speculum, the 3rd speculum is located at the collimation and expanded
Shu Danyuan rears, first speculum is incident to by the second laser；Wherein, second speculum and described 3rd anti-
Penetrating mirror is used to change optical path direction.
It is preferred that, the collimator and extender unit includes：Negative lens, the negative lens receives the first laser, and to institute
State first laser to be dissipated, the 4th laser is formed, by the 4th laser light incident to positive lens；Positive lens, the positive lens
The 4th laser is received, and enters line convergence to the 4th laser, second laser is formed, while the second laser is incident
To first speculum；Voice coil motor, the voice coil motor is connected with the lower end of the negative lens, saturating for being born described in fine tuning
The distance between mirror and the positive lens；Linear slide platform, the Linear slide platform is connected with the lower end of the positive lens, for coarse adjustment
The distance between the negative lens and the positive lens.Wherein, according to adjust between the negative lens and the positive lens away from
From, and then adjust the focal length of the first laser.
It is preferred that, the Laser Processing unit includes：Track；Linear electric motors, the side of the linear electric motors and the rail
Road is connected, with elevating function, for the distance between accurate adjustment laser head and described exemplar；Laser head, the one of the laser head
Side is connected with the opposite side of the linear electric motors, for receiving the 3rd laser, while by the 3rd laser action in institute
Exemplar is stated, the exemplar is processed；Altimeter, the side of the altimeter is connected with the opposite side of the laser head, is used
In the position of the fixed print.
It is preferred that, described device also includes image unit, wherein, the image unit includes：Spot light, the spot light
Launch the first light beam, wherein, first light beam is used for illuminating the exemplar；Laser head, the laser head is used to receive second
Light beam, while second light beam is incident to first speculum, wherein, second light beam is what the exemplar reflected
Light beam；First speculum, first speculum is used for second light beam for receiving the laser head outgoing, reflexes to simultaneously
Spectroscope；Spectroscope, the spectroscope is used for second light beam for receiving the second speculum outgoing, while being incident to institute
State ccd image sensor；Ccd image sensor, the ccd image sensor is used to receiving incident described the of the spectroscope
Two light beams, Real Time Observation and shooting are carried out to the print process.
It is preferred that, second speculum has high-transmission rate to the laser, has high reflectance to the spot light.
It is preferred that, the laser head can be one kind in lens, object lens, galvanometer.
It is preferred that, the adjustable range of the voice coil motor is 1mm.
It is preferred that, the adjustable range of the Linear slide platform is 50mm.
It is preferred that, the adjustable range of the linear electric motors is 100mm.
Said one or multiple technical schemes in the embodiment of the present invention, are at least imitated with following one or more technologies
Really：
1. in device provided in an embodiment of the present invention, launching first laser by laser first, then pass through collimation
Expand unit receives the first laser, while adjusting the focal length of the first laser, forms second laser, then anti-by first
Penetrate mirror and receive the second laser, while the second laser is transmitted through into Laser Processing unit, form the 3rd laser；Finally lead to
Cross laser machining cell and receive the 3rd laser, while the 3rd laser action is passed through into above-mentioned technical proposal in exemplar
Solve causes because defocusing amount is excessive in processing it cannot be guaranteed that the uniformity of laser in the prior art, so as to influence crudy
Technical problem, having reached makes the defocusing amount in laser processing procedure be less than 5 μm, it is ensured that the technology of the uniformity of laser processing procedure
Effect.
2. the embodiment of the present application launches the first light beam by spot light, wherein, first light beam is used for illuminating the sample
Part；Second light beam is received by laser head, while second light beam is incident into first speculum, wherein, described the
Two light beams are the light beam that the exemplar reflects, then by second light beam of the first speculum reception laser head outgoing,
Spectroscope is reflexed to simultaneously, second light beam of the first speculum outgoing is then being received by spectroscope, is being entered simultaneously
The ccd image sensor is incident upon, incident second light beam of the spectroscope is received finally by ccd image sensor,
Real Time Observation and shooting are carried out to the print process, being solved by above-mentioned technological means in the prior art can not be timely
The technical problem observed laser processing procedure and cause crudy to decline, reached to be carried out to laser processing procedure in real time
Monitoring and the technique effect shot.
3. the laser head that the embodiment of the present application is used can be one kind in lens, object lens, galvanometer, so as to solve existing
There is the processing that single lens are only limitted in technology, processing mode is more single, the not strong technical problem of versatility, having reached can
Provide the user more processing mode selectivity.
Having reached can preferentially be laid in the precipitation station of limited quantity in the higher region of demand weight, effectively increase
The utilization rate of limit observation resource and the technique effect of monitoring efficiency.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, and in order to allow above and other objects of the present invention, feature and advantage can
Become apparent, below especially exemplified by the embodiment of the present invention.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are this hairs
Some bright embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can be with root
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of laser precision machining apparatus structure schematic diagram in the embodiment of the present invention；
Fig. 2 is another laser precision machining apparatus structure schematic diagram in the embodiment of the present invention.
Description of reference numerals：Laser 1, the second speculum 14, negative lens 2, voice coil motor 3, Linear slide platform 4, positive lens
5, the first speculum 6, spectroscope 7, ccd image sensor 8, spot light 9, the 3rd speculum 15, altimeter 10, laser head 11,
Linear electric motors 12, guide rail 13.
Embodiment
The embodiments of the invention provide a kind of laser precision machining device, laser precision machining of the prior art is solved
Equipment causes in processing it cannot be guaranteed that the uniformity of laser, so as to influence during processing ultra-thin materials because defocusing amount is excessive
The technical problem of crudy.
Technical scheme in the embodiment of the present invention, general thought is as follows：Swashed first by laser emission element transmitting first
Light, then receives the first laser by collimator and extender unit, while adjusting the focal length of the first laser, forms second and swashs
Light, then the second laser is received by the first speculum, while the second laser is transmitted through into Laser Processing unit, formed
3rd laser；The 3rd laser is received finally by Laser Processing unit, while by the 3rd laser action in exemplar, from
And realize and the exemplar is processed.
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
Embodiment one
The present embodiment provides a kind of laser precision machining device, refer to Fig. 1, described device includes：
Laser 1, during the laser that the laser 1 is launched can be near-infrared laser, green laser and Ultra-Violet Laser
It is a kind of.
Collimator and extender unit, the collimator and extender unit receives the first laser, while adjusting the first laser
Focal length, forms second laser.The collimator and extender unit includes negative lens 2, voice coil motor 3, Linear slide platform 4, positive lens 5, institute
The rear that negative lens 2 is located at the laser 1 is stated, the lower end of the voice coil motor 3 and the negative lens 2 is linked, described just saturating
Mirror 5 is located at the rear of the negative lens 2, and the lower end of the Linear slide platform 4 and the positive lens 5 is linked, and passes through voice coil loudspeaker voice coil electricity
Machine 3, the Linear slide platform 4 adjust the distance between the negative lens 2 and described positive lens 5, reach the regulation first laser
Focal length effect, form the second laser.
First speculum 6, first speculum 6 is located at the rear of the positive lens 5, and first speculum 6 is received
The second laser, while the second laser is transmitted through into Laser Processing unit, forms the 3rd laser, first speculum
6 be arranged on can one-dimensional translational adjustment and two dimension angular adjustment adjustment frame on, can change according to actual needs with it is described just saturating
The distance between mirror 5 and angle.
Unit is laser machined, the Laser Processing unit receives the 3rd laser；Simultaneously by the 3rd laser action
In exemplar.The Laser Processing unit includes altimeter 10, laser head 11, linear electric motors 12, guide rail 13, the linear electric motors 12
Side be connected with the side of the track 13, the side of the laser head 11 is connected with the opposite side of the linear electric motors 12,
The side of the altimeter 10 and the opposite side of the laser head 11 are linked, by the 3rd laser action in the exemplar, from
And realize the effect being processed to the exemplar.
Structure and the effect of the collimator and extender unit are specifically described first, refer to Fig. 1, the collimator and extender unit bag
Include：Negative lens 2, the negative lens 2 is the thick lens in intermediate thin periphery, i.e., recessed
Mirror, the ability with diverging light, also known as " divergent lens ", the negative lens 2 are located at the rear of the laser 1,
Dissipated by receiving the first laser, and to the first laser, form the 4th laser, the 4th laser is described
Laser after first laser diverging, then by the 4th laser light incident to positive lens.Positive lens 5, the positive lens 5 is centre
The thin lens in thick periphery, i.e. convex lens, the ability with converging light, the positive lens 5 receive the 4th laser, and to described
4th laser enters line convergence, forms second laser, the second laser is the laser after the 4th laser is converged, then by institute
State second laser and be incident to first speculum.Voice coil motor 3, the lower end of the voice coil motor 3 and the negative lens 2 connects
Connect, and can slide, the adjustable range of the voice coil motor 3 is 1mm, for negative lens described in fine tuning 2 and the positive lens 5
The distance between.Linear slide platform 4, the Linear slide platform 4 is connected with the lower end of the positive lens 5, and can be slided, the line
Property slide unit 4 adjustable range be 50mm, for the distance between negative lens described in coarse adjustment 2 and described positive lens 5, pass through the sound
Motor 3, the fine tuning and accurate adjustment of the Linear slide platform 4 are enclosed, so that change the distance between the negative lens 2 and described positive lens 5,
Change the angle of divergence of the second laser, and then the focal length of the first laser can be continuously adjusted.
Then structure and the effect of the Laser Processing unit are specifically described, the Laser Processing unit includes：Track 13,
Linear electric motors 12, the side of the linear electric motors 12 is connected with the track 13, with elevating function, the linear electric motors 12
Adjustable range is 100mm, and for the distance between accurate adjustment laser head and described exemplar, specifically, the linear electric motors 12 can
With the material of the print according to actual conditions, the difference of the characteristic such as thickness is adjusted between the exemplar and the laser head
Distance so as to fit processing conditions；Laser head 11, the laser head can be one kind in lens, object lens, galvanometer, can be with
Changed according to the characteristic of the print so that the application of described device is more extensive, the side of the laser head 11
It is connected with the opposite side of the linear electric motors 12, for receiving the 3rd laser, the 3rd laser is the described first reflection
The incident laser of mirror 6, while by the 3rd laser action in the exemplar, be cut to the exemplar, is polished etc. and being processed,
The exemplar can be the ultra-thin materials such as wafer, ito thin film or FPC flexible boards, and the embodiment of the present application is not entered to the exemplar
Row concrete restriction；Altimeter 10, the side of the altimeter 10 is connected with the opposite side of the laser head 11, for fixed described
The position of print, and exemplar positional information is fed back into control system, and then continuously focused by the voice coil motor 3, finally
Suitable laser is obtained, the exemplar is processed.
Secondly structure and the effect of the image unit are specifically described, the image unit includes：Spot light, described light
The first light beam is launched in source, wherein, first light beam is transmitted through first speculum 6, Ran Houtong by the spectroscope 7
The reflection of first speculum 6 is crossed, the laser head 11 is incident to, finally illuminates the exemplar, reach and illuminate the exemplar
Purpose；Laser head 11, the laser head 11 is used to receive the second light beam, while second light beam is incident into described first
Speculum 6, wherein, second light beam is the light beam that the exemplar reflects；First speculum 6, first speculum 6 is received
Second light beam of the outgoing of laser head 11, while second light beam is reflexed into spectroscope 7, second speculum
For there is high-transmission rate to the laser, there is the speculum of high reflectance to the spot light；Spectroscope 7, the spectroscope 7
For receiving second light beam of the second speculum outgoing, while being incident to the ccd image sensor 8；Ccd image
Sensor 8, the ccd image sensor 8 is used to receive incident second light beam of the spectroscope 7, and the print is added
Work process carries out Real Time Observation and shooting, what the ccd image sensor 8 can be processed in described device to the exemplar
During, process is monitored in real time, problem and processing progress etc. present in process are found in time.
Embodiment two
A kind of laser precision machining device that the present embodiment is also provided, refer to Fig. 2, described device includes：
Laser 1, the laser 1 launches first laser, and the laser that the laser 1 is launched can be that near-infrared swashs
One kind in light, green laser and Ultra-Violet Laser.
Second speculum 14, the 3rd speculum 15, second speculum 14 are located at the lower section of the laser 1, described
3rd speculum 15 is located at the collimator and extender unit rear, and second speculum 14, the 3rd speculum 15 are pacified respectively
Mounted in can be on the adjustment frame (not shown) of one-dimensional translational adjustment and two dimension angular regulation, thus it is possible to vary what the laser 1 was launched
The optical path direction of first laser, makes overall light path formation Z-shaped structure, so as to reach that Z axis is significantly focused while can make described
The need for the structure of device preferably adapts to actual conditions.
Collimator and extender unit, the collimator and extender unit receives the first laser, while adjusting the first laser
Focal length, forms second laser.The collimator and extender unit includes negative lens 2, voice coil motor 3, Linear slide platform 4, positive lens 5, institute
The rear that negative lens 2 is located at second speculum 14 is stated, the lower end of the voice coil motor 3 and the negative lens 2 is linked, described
Positive lens 5 is located at the rear of the negative lens 2, and the lower end of the Linear slide platform 4 and the positive lens 5 is linked, and passes through the sound
Circle motor 3, the Linear slide platform 4 adjust the distance between the negative lens 2 and described positive lens 5, reach regulation described first
The effect of the focal length of laser.
First speculum 6, first speculum 6 receives the second laser, while the second laser is transmitted through
Unit is laser machined, the 3rd laser is formed, first speculum 6 is located at the lower section of the 3rd speculum 15, the described 3rd
Speculum 15, the first speculum 6 be installed in can one-dimensional translational adjustment and two dimension angular adjustment adjustment frame on, can be according to reality
Border needs the distance between change and described positive lens 5 and angle.
Unit is laser machined, the Laser Processing unit receives the 3rd laser；Simultaneously by the 3rd laser action
In exemplar.The Laser Processing unit includes altimeter 10, laser head 11, linear electric motors 12, guide rail 13, the linear electric motors 12
Side be connected with the side of the track 13, the side of the laser head 11 is connected with the opposite side of the linear electric motors 12,
The side of the altimeter 10 and the opposite side of the laser head 11 are linked, by the 3rd laser action in the exemplar, from
And realize the effect being processed to the exemplar.
Structure and the effect of the collimator and extender unit are specifically described first, refer to Fig. 1, the collimator and extender unit bag
Include：Negative lens 2, the negative lens 2 is the thick lens in intermediate thin periphery, i.e. concavees lens, the also known as ability with diverging light, " hair
Dissipate lens ", the negative lens 2 is located at the rear of the 3rd speculum 14, by receiving the first laser, and to described the
One laser is dissipated, and forms the 4th laser, and the 4th laser is the laser after the first laser dissipates, then will be described
4th laser light incident is to positive lens.Positive lens 5, the positive lens 5 is the thin lens in thick middle periphery, i.e. convex lens, with meeting
The ability of optically focused, the positive lens 5 receives the 4th laser, and enters line convergence to the 4th laser, forms second laser,
The second laser is the laser after the 4th laser is converged, and the second laser then is incident into first reflection
Mirror.Voice coil motor 3, the voice coil motor 3 is connected with the lower end of the negative lens 2, and can be slided, the voice coil motor 3
Adjustable range be 1mm, for the distance between negative lens described in fine tuning 2 and described positive lens 5.Linear slide platform 4, it is described linear
Slide unit 4 is connected with the lower end of the positive lens 5, and can be slided, and the adjustable range of the Linear slide platform 4 is 50mm, is used for
The distance between negative lens 2 described in coarse adjustment and the positive lens 5, pass through the fine tuning of the voice coil motor 3, the Linear slide platform 4
With accurate adjustment, so as to change the distance between the negative lens 2 and described positive lens 5, change the angle of divergence of the second laser, enter
And the focal length of the first laser can be continuously adjusted.
Then structure and the effect of the Laser Processing unit are specifically described, the Laser Processing unit includes：Track 13,
Linear electric motors 12, the side of the linear electric motors 12 is connected with the track 13, with elevating function, the linear electric motors 12
Adjustable range is 100mm, and for the distance between accurate adjustment laser head and described exemplar, specifically, the linear electric motors 12 can
With the material of the print according to actual conditions, the difference of the characteristic such as thickness is adjusted between the exemplar and the laser head
Distance so as to fit processing conditions；Laser head 11, the laser head can be one kind in lens, object lens, galvanometer, can be with
Changed according to the characteristic of the print so that the application of described device is more extensive, the side of the laser head 11
It is connected with the opposite side of the linear electric motors 12, for receiving the 3rd laser, the 3rd laser is the described first reflection
The incident laser of mirror 6, while by the 3rd laser action in the exemplar, be cut to the exemplar, is polished etc. and being processed,
The exemplar can be the ultra-thin materials such as wafer, ito thin film or FPC flexible boards, and the embodiment of the present application is not entered to the exemplar
Row concrete restriction；Altimeter 10, the side of the altimeter 10 is connected with the opposite side of the laser head 11, for fixed described
The position of print, and exemplar positional information is fed back into control system, and then continuously focused by the voice coil motor 3, finally
Suitable laser is obtained, the exemplar is processed.
Secondly structure and the effect of the image unit are specifically described, the image unit includes：Spot light, described light
The first light beam is launched in source, wherein, first light beam is transmitted through first speculum 6, Ran Houtong by the spectroscope 7
The reflection of first speculum 6 is crossed, the laser head 11 is incident to, finally illuminates the exemplar, reach and illuminate the exemplar
Purpose；Laser head 11, the laser head 11 is used to receive the second light beam, while second light beam is incident into described first
Speculum 6, wherein, second light beam is the light beam that the exemplar reflects；First speculum 6, first speculum 6 is received
Second light beam of the outgoing of laser head 11, while second light beam is reflexed into spectroscope 7, second speculum
For there is high-transmission rate to the laser, there is the speculum of high reflectance to the spot light；Spectroscope 7, the spectroscope 7
For receiving second light beam of the outgoing of the first speculum 6, while being incident to the ccd image sensor 8；CCD schemes
As sensor 8, the ccd image sensor 8 is used to receive incident second light beam of the spectroscope 7, to the print
Process carries out Real Time Observation and shooting, and the ccd image sensor 8 can be processed in described device to the exemplar
During, process is monitored in real time, problem and processing progress etc. present in process are found in time.
Embodiment three
A kind of laser precision machining device that the embodiment of the present application is provided, the embodiment of the present application are introduced in order to clearer
A kind of application method of laser precision machining device is additionally provided, it is specific as follows：
The use process of the laser precision machining device is：User of service is before the exemplar processing is carried out, first by institute
State exemplar and be positioned over the lower section of laser head 11, and be fixed, open generating laser 1, fed back by the altimeter 10
To the positional information of the exemplar of control system, and by ccd image sensor to the 3rd laser action in described
The observation of exemplar situation, by Linear slide platform 5 described in coarse adjustment, voice coil motor 3 described in fine tuning is carried out the first laser continuous
Focusing, is finally given the 3rd laser for being adapted to the processing exemplar, the exemplar is added using the 3rd laser
Work, is significantly focused using Z axis described device and realizes dynamic focusing, Neng Goushi with by way of collimator and extender mirror accurate focusing
Defocusing amount is less than 5 μm in existing process, it is ensured that the effect of the uniformity of process.
The technical scheme provided in the embodiment of the present application, has at least the following technical effects or advantages：
1. in device provided in an embodiment of the present invention, launching first laser by laser first, then pass through collimation
Expand unit receives the first laser, while adjusting the focal length of the first laser, forms second laser, then anti-by first
Penetrate mirror and receive the second laser, while the second laser is transmitted through into Laser Processing unit, form the 3rd laser；Finally lead to
Cross laser machining cell and receive the 3rd laser, while the 3rd laser action is passed through into above-mentioned technical proposal in exemplar
Solve causes because defocusing amount is excessive in processing it cannot be guaranteed that the uniformity of laser in the prior art, so as to influence crudy
Technical problem, having reached makes the defocusing amount in laser processing procedure be less than 5 μm, it is ensured that the technology of the uniformity of laser processing procedure
Effect.
2. the embodiment of the present application launches the first light beam by spot light, wherein, first light beam is used for illuminating the sample
Part；Second light beam is received by laser head, while second light beam is incident into first speculum, wherein, described the
Two light beams are the light beam that the exemplar reflects, then by second light beam of the first speculum reception laser head outgoing,
Spectroscope is reflexed to simultaneously, second light beam of the first speculum outgoing is then being received by spectroscope, is being entered simultaneously
The ccd image sensor is incident upon, incident second light beam of the spectroscope is received finally by ccd image sensor,
Real Time Observation and shooting are carried out to the print process, being solved by above-mentioned technological means in the prior art can not be timely
The technical problem observed laser processing procedure and cause crudy to decline, reached to be carried out to laser processing procedure in real time
Monitoring and the technique effect shot.
3. the laser head that the embodiment of the present application is used can be one kind in lens, object lens, galvanometer, so as to solve existing
There is the processing that single lens are only limitted in technology, processing mode is more single, the not strong technical problem of versatility, having reached can
Provide the user more processing mode selectivity.
, but those skilled in the art once know basic creation although preferred embodiments of the present invention have been described
Property concept, then can make other change and modification to these embodiments.So, appended claims are intended to be construed to include excellent
Select embodiment and fall into having altered and changing for the scope of the invention.
Obviously, those skilled in the art can carry out various changes and modification without departing from this hair to the embodiment of the present invention
The spirit and scope of bright embodiment.So, if these modifications and variations of the embodiment of the present invention belong to the claims in the present invention
And its within the scope of equivalent technologies, then the present invention is also intended to comprising including these changes and modification.
Claims (10)
1. a kind of laser precision machining device, it is characterised in that described device includes：
Laser, the laser launches first laser；
Collimator and extender unit, the collimator and extender unit receives the first laser, while the focal length of the first laser is adjusted,
Form second laser；
First speculum, first speculum receives the second laser, adds while the second laser is transmitted through into laser
Work order member, forms the 3rd laser；
Unit is laser machined, the Laser Processing unit receives the 3rd laser；Simultaneously by the 3rd laser action in sample
Part.
2. device as claimed in claim 1, it is characterised in that described device also includes：
Second speculum, second speculum is located at the lower section of the laser, and the first laser is incident into the standard
Straight expand unit；
3rd speculum, the 3rd speculum is located at the collimator and extender unit rear, and the second laser is incident into institute
State the first speculum.
3. device as claimed in claim 1, it is characterised in that the collimator and extender unit includes：
Negative lens, the negative lens receives the first laser, and the first laser is dissipated, and forms the 4th laser,
By the 4th laser light incident to positive lens；
Positive lens, the positive lens receives the 4th laser, and enters line convergence to the 4th laser, forms second laser,
The second laser is incident to first speculum simultaneously；
Voice coil motor, the voice coil motor is connected with the lower end of the negative lens, for negative lens described in fine tuning with it is described just saturating
The distance between mirror；
Linear slide platform, the Linear slide platform is connected with the lower end of the positive lens, for negative lens described in coarse adjustment with it is described just saturating
The distance between mirror；
Wherein, according to adjustment the distance between the negative lens and the positive lens, and then the focal length of the first laser is adjusted.
4. device as claimed in claim 1, it is characterised in that the Laser Processing unit includes：
Track；
Linear electric motors, the side of the linear electric motors is connected with the track, with elevating function, for accurate adjustment laser head and institute
State the distance between exemplar；
Laser head, the side of the laser head is connected with the opposite side of the linear electric motors, for receiving the 3rd laser, together
When by the 3rd laser action in the exemplar, the exemplar is processed；
Altimeter, the side of the altimeter is connected with the opposite side of the laser head, the position for fixing the print.
5. device as claimed in claim 1, it is characterised in that described device also includes image unit, wherein, the image list
Member includes：
Spot light, the spot light launches the first light beam, wherein, first light beam is used for illuminating the exemplar；
Laser head, the laser head is used to receive the second light beam, while second light beam is incident to first speculum,
Wherein, second light beam is the light beam that the exemplar reflects；
First speculum, first speculum is used for second light beam for receiving the laser head outgoing, reflexes to simultaneously
Spectroscope；
Spectroscope, the spectroscope is used for second light beam for receiving the first speculum outgoing, while being incident to described
Ccd image sensor；
Ccd image sensor, the ccd image sensor is used to receive incident second light beam of the spectroscope, to institute
State print process and carry out Real Time Observation and shooting.
6. device as claimed in claim 5, it is characterised in that first speculum has high-transmission rate to the laser,
There is high reflectance to the spot light.
7. device as claimed in claim 4, it is characterised in that the laser head can be one in lens, object lens, galvanometer
Kind.
8. device as claimed in claim 3, it is characterised in that the adjustable range of the voice coil motor is 1mm.
9. device as claimed in claim 3, it is characterised in that the adjustable range of the Linear slide platform is 50mm.
10. device as claimed in claim 5, it is characterised in that the adjustable range of the linear electric motors is 100mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710002019.3A CN107052570A (en) | 2017-01-03 | 2017-01-03 | A kind of laser precision machining device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710002019.3A CN107052570A (en) | 2017-01-03 | 2017-01-03 | A kind of laser precision machining device |
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| CN107052570A true CN107052570A (en) | 2017-08-18 |
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| CN201710002019.3A Pending CN107052570A (en) | 2017-01-03 | 2017-01-03 | A kind of laser precision machining device |
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