CN107045084A - A kind of tangential piezoelectric constant d15Measurement apparatus and method - Google Patents
A kind of tangential piezoelectric constant d15Measurement apparatus and method Download PDFInfo
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- CN107045084A CN107045084A CN201710101656.6A CN201710101656A CN107045084A CN 107045084 A CN107045084 A CN 107045084A CN 201710101656 A CN201710101656 A CN 201710101656A CN 107045084 A CN107045084 A CN 107045084A
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- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000005259 measurement Methods 0.000 claims abstract description 68
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 230000035945 sensitivity Effects 0.000 claims abstract description 7
- 239000004020 conductor Substances 0.000 claims description 3
- 239000002305 electric material Substances 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 238000009530 blood pressure measurement Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 3
- 238000010008 shearing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/22—Measuring piezoelectric properties
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses a kind of tangential piezoelectric constant d15Measurement apparatus and method, including base, mass, spring clip and upper cover.During measurement, tested piezoelectric is placed between base and mass, and fixed with spring clip, is finally connected upper lid with base.Device is installed back-to-back with reference sensor, and reference sensor is arranged on excitational equipment, the output end connecting detection equipment of device.Vibration is produced by excitational equipment, reference sensor and tested piezoelectric is produced output signal, output signal is gathered using detection device, the sensitivity with reference sensor is contrasted, and pass through the quality of known quality block, you can calculate the tangential piezoelectric constant d of piezoelectric15, and compare by detection device the waveform or phase of two output signals, you can differentiate the polarity of tested piezoelectric.
Description
Technical field
The present invention relates to a kind of fields of measurement of piezoelectric, more particularly to a kind of measurement apparatus of shearing-type piezoelectric
And method.
Background technology
Sensor turns into a kind of particularly important instrument for obtaining nature and production information, comes particularly with modern industry
Say, such as lack sensor, modern industry will just lose basis.Piezoelectric is used as a critical component in sensor, its property
Energy parameter has conclusive influence to the indices of sensor.Therefore, it is necessary to the performance parameter to piezoelectric exactly
Measure, can just produce the sensor of one stream.
Piezoelectric can be roughly divided into two kinds of compression-type and shearing-type by structure.The biography made using shearing-type piezoelectric
Sensor has that small volume, sensitivity are big, fixing resonance frequency is high, frequency response range is wide, oscillation crosswise is than small, pedestal strain spirit
The advantages of sensitivity is small, is widely used, and has the trend for substituting compression-type sensor.Therefore, shearing-type piezoelectric
As critical component therein, greatly developed.
Piezoelectric constant is an important indicator of piezoelectric, directly influences the sensitivity parameter of sensor.Shearing-type
The piezoelectric constant of piezoelectric is tangential piezoelectric constant, and expression symbol is d15。
Measurement tangential piezoelectric constant d more common at present15Mainly use Quasi-static Method：In quasistatic d33On measuring instrument
45 ° of inclined plane clamps are installed, during measurement, the exciting force that decomposition piezoelectric is subject to is normal pressure and shearing force, pass through to calculate and shear
Power and piezoelectric and quasistatic d33The output of measuring instrument, obtains piezoelectric constant d15.There is complicated, operation in the method
Cumbersome, error is big, the shortcomings of anti-interference is poor, and quasistatic d33The piezoelectric constant of reference piezoelectrics in measuring instrument can be because of the time
And change, cause quasistatic d33Measuring instrument output bias, more increase measurement error.
Therefore develop a kind of simple and easy to apply, can accurately measure piezoelectric tangential piezoelectric constant d15Detection technique turn into industry
The problem solved is thirsted on boundary for a long time.
The content of the invention
In order to solve the above technical problems, the goal of the invention of the present invention is to provide a kind of tangential piezoelectric constant d15Measurement dress
Put, it is simple and easy to do, piezoelectric tangential piezoelectric constant d can be realized15Measurement, overcome the deficiencies in the prior art, improve piezoelectricity
Testing of materials efficiency.
For achieving the above object, the present invention provides following technical scheme：A kind of tangential piezoelectric constant d15Measurement
Device, including：
- base, it has the first locating surface；
- mass, it has the second locating surface, and first locating surface is oppositely arranged and formed with second locating surface
With the clearance space of tested piezoelectric form fit；
- setting element, it is forced on the mass, so that second locating surface compresses the tested piezoelectric
In on first locating surface；
Wherein, the base and the mass are conductor, and the setting element is insulator, first locating surface and
Second locating surface is that perpendicular or the tangent plane of the two are located in perpendicular, between the base and the mass absolutely
Edge is set, and the mass is also associated with output line.
Further, the base has two first locating surfaces being disposed opposite to each other, and the measurement apparatus includes two
The individual mass, two first locating surfaces are oppositely arranged simultaneously with two the second locating surfaces of two masses respectively
Two clearance spaces are formed, the setting element uses spring clip, and two jig arm of the spring clip exert a force two respectively
On the individual mass.
Further, the base also has the 3rd locating surface, and the 3rd locating surface is horizontal plane, is shelved with thereon
The backing plate of level, the drawable setting of the backing plate, for supporting the tested piezoelectric and the mass bottom surface.
Further, the measurement apparatus also includes upper cover, and the upper cover cover sets the tested piezoelectric, the quality
Block and the setting element and lower port is fixedly mounted on the base.
Further, the base is substantially in T-shaped is inverted, and the vertical portion of T-shaped sets the first locating surface, the level of T-shaped
Part sets the 3rd locating surface, is located at the vertical portion of T-shaped, the horizontal component of T-shaped is also fixedly connected with the lower port of a upper cover.
Further, the string holes of its 3rd locating surface of insertion and its end face, the signal are additionally provided with the horizontal component of T-shaped
Output line is fed through the string holes.
Further, first locating surface and second locating surface are plane or are arcwall face.
Further, the bottom surface of the base is additionally provided with the mounting hole for being fixedly connected with reference sensor.
The present invention also provides another technical scheme, using the tangential piezoelectric constant d of measurement apparatus as described above15Survey
Amount method, comprises the following steps：
(1) measurement apparatus is fixed on a reference sensor back-to-back, the reference sensor is arranged on one and swashed
Shake in equipment, the output line of the output line of the measurement apparatus and the reference sensor is respectively connecting to a detection
In equipment；
(2) excitational equipment is opened, the measurement apparatus and the reference sensor is produced signal because of vibration simultaneously
It is sent to the detection device；
(3) gather and record the output signal Q of the measurement apparatuspWith the output signal Q of the reference sensors,
The tangential piezoelectric constant d of piezoelectric can be calculated by following formula15。
Wherein, S for consult measurement and calibration report reference sensor sensitivity；
m1、m2、m3、m4Respectively weigh the quality, the quality of mass, setting element of obtained tested piezoelectric
The quality of the output line of quality and measurement apparatus.
Further, the waveform of the detection device measurement apparatus and the output signal of the reference sensor is passed through
Or phase, the polarity of the tested piezoelectric is judged according to the polarity of the reference sensor.
Because above-mentioned technical proposal is used, the present invention has following advantages compared with prior art：
(1) in the prior art, there is certain error in the measurement of tangential piezoelectric constant, and be difficult to calibrate；The present invention utilizes pressure
The direct piezoelectric effect principle of electric material, the working condition of true simulation shearing-type sensor, using dynamic method, measurement is accurate, and
Using the reference sensor by measurement and calibration as reference, make measurement result more accurate, anti-interference is good, measurement efficiency
Height, is particularly suitable for use in making the measurement of the piezoelectric of shearing normalization piezoelectric acceleration sensor；
(2) measurement apparatus in the present invention also includes backing plate, and backing plate can be effectively isolated mass and base, prevent
Output signal short circuit, another effect of backing plate is to can guarantee that the polarised direction of tested piezoelectric is parallel with direction of vibration, it is to avoid
Tested piezoelectric is installed crooked and produces measurement error；
(3) present invention in measurement apparatus also include upper cover, it is connected with the base, make the tested piezoelectric,
Mass and spring clip encapsulation are with inside the upper lid, isolating interference, it is ensured that test result accuracy；
(4) base in the present invention is using T-shaped structure is inverted, with two the first locating surfaces, including two masses, with
By two the first locating surfaces and two the second locating surface two clearance spaces of formation, while setting element uses spring clip, give
Mounted tested piezoelectric and mass provide pretightning force, prevent from sliding；
(5) bottom surface of the base in the present invention is additionally provided with mounting hole, is easy to be connected with reference sensor.
Brief description of the drawings
Fig. 1 is tangential piezoelectric constant d disclosed by the invention15Measurement apparatus structural representation；
Fig. 2 is tangential piezoelectric constant d disclosed by the invention15Measuring method connection diagram；
Fig. 3 is the waveform comparison figure of measurement apparatus disclosed by the invention and the output signal of reference sensor.
Wherein, 1, base；2nd, mass；3rd, it is tested piezoelectric；4th, spring clip；5th, output line；51st, signal output
End；6th, backing plate；7th, upper cover；8th, measurement apparatus；9th, reference sensor；10th, excitational equipment；11st, output line；12nd, detection is set
It is standby.
Embodiment
With reference to the accompanying drawings and examples, the embodiment to the present invention is described in further detail.It is below use
In the preferred embodiment of the explanation present invention, but it is not limited to the scope of the present invention.
Embodiment one：
Referring to Fig. 1, as shown in legend therein, a kind of tangential piezoelectric constant d15Measurement apparatus, including：
- base 1, it has two first opposite locating surfaces；
- two masses 2, each mass 2 has the second locating surface, two the first locating surfaces and two the second locating surface phases
To setting and being formed two clearance spaces with the tested form fit of piezoelectric 3；
- spring clip 4, its two jig arm are forced on two masses 2 respectively, so that the second locating surface compresses tested piezoresistive material
Material 3 is on the first locating surface；
Wherein, base 1 and mass 2 are conductor, and spring clip 4 is insulator, and the first locating surface and the second locating surface are perpendicular
Straight plane, insulation set between base 1 and mass 2, mass 2 is also associated with output line 5, and output line is connected to
Signal output part 51.
In the prior art, there is certain error in the measurement of tangential piezoelectric constant, and be difficult to calibrate；The present invention is using dynamic
Method, measurement is accurate, and uses the reference sensor by measurement and calibration as reference, makes measurement result more accurate, anti-interference
Property it is good, measurement efficiency is high, is particularly suitable for use in making the measurement of the piezoelectric of shearing normalization piezoelectric acceleration sensor.
Base in the present invention is using being inverted T-shaped structure, with two the first locating surfaces, including two masses, to pass through two the
One locating surface and two the second locating surface two clearance spaces of formation, while setting element uses spring clip, to mounted quilt
Pressure measurement electric material and mass provide pretightning force, prevent from sliding.
In a kind of embodiment, base 1 also has the 3rd locating surface, and the 3rd locating surface is horizontal plane, is shelved with thereon
The backing plate 6 of level, the drawable support of backing plate 6 is tested piezoelectric 3 and the bottom surface of mass 2.Backing plate 6 can be effectively isolated mass
2 and base 1, the output signal short circuit prevented, another effect of backing plate 6 is the polarization side that can guarantee that tested piezoelectric 3
To parallel with direction of vibration, it is to avoid tested piezoelectric 3 is installed crooked and produces measurement error
In a kind of embodiment, measurement apparatus also include upper cover 7, upper cover 7 cover set tested piezoelectric 3, mass 2 and
Spring clip 4 and lower port is fixedly mounted on base 1, isolation interference, it is ensured that test result accuracy.
In a kind of embodiment, the string holes of its 3rd locating surface of insertion and its end face is additionally provided with the horizontal component of T-shaped, is believed
Number output line 5 wears cable-through hole.The trend of output line 5 is clearer, and does not influence the fixation of upper cover.
In a kind of embodiment, the bottom surface of base 1 is additionally provided with mounting hole.
It is the tangential piezoelectric constant d of measurement apparatus as shown in legend therein referring to Fig. 215Measuring method, including such as
Lower step：
(1) measurement apparatus 8 is fixed on a reference sensor 9 back-to-back, reference sensor 9 is arranged on an excitational equipment
On 10, the output line 5 of measurement apparatus 8 and the output line 11 of reference sensor 9 are respectively connecting to a detection device 12
On；
(2) excitational equipment 10 is opened, measurement apparatus 8 and reference sensor 9 is produced signal because of vibration and is sent to inspection
Measurement equipment 12；
(3) the output signal Q of collection and recording measuring device 8pWith the output signal Q of reference sensor 9s,
The tangential piezoelectric constant d of piezoelectric can be calculated by following formula15。
Wherein, S for consult measurement and calibration report reference sensor 9 sensitivity；
m1、m2、m3、m4Respectively weigh the quality, the quality of mass 2, spring clip 4 of obtained tested piezoelectric 3
The quality of the output line 5 of quality and measurement apparatus 8.
Wherein, wherein, in step (1), measurement apparatus 8 is fixed on a reference sensor 9 back-to-back, referred to back-to-back
Both are coaxial, and the mounting surface of base is mounted opposite.The advantage so installed is that both vibrated acceleration are identical..
Compare the waveform or phase of measurement apparatus 8 and the output signal of reference sensor 9 by detection device 12, according to ginseng
The polarity for examining sensor 9 judges the polarity of tested piezoelectric 3.
Fig. 3 waveforms are observed, according to the polarity of reference sensor
If the polarity of reference sensor is just,
1. phase difference 0, measured material upper surface is positive pole；
2. phase difference 180, measured material lower surface is positive pole；
Polarity such as reference sensor is negative：
1. phase difference 0, measured material lower surface is positive pole；
2. phase difference 180, measured material upper surface is positive pole.
Embodiment two
Further, the first locating surface and the second locating surface are arcwall face, and the tangent plane of arcwall face is located in perpendicular.
It is above the description to the embodiment of the present invention, by the foregoing description of the disclosed embodiments, makes this area special
Industry technical staff can realize or using the present invention.A variety of modifications to these embodiments come to those skilled in the art
Say and will be apparent, generic principles defined herein can not depart from the situation of the spirit or scope of the present invention
Under, realize in other embodiments.Therefore, the present invention is not intended to be limited to the embodiments shown herein, but to accord with
Close the most wide scope consistent with features of novelty with principles disclosed herein.
Claims (10)
1. a kind of tangential piezoelectric constant d15Measurement apparatus, it is characterised in that including：
- base, it has the first locating surface；
- mass, it has the second locating surface, and first locating surface is oppositely arranged and formed and quilt with second locating surface
The clearance space of pressure measurement electric material form fit；
- setting element, it is forced on the mass, so that second locating surface compresses the tested piezoelectric in institute
State on the first locating surface；
Wherein, the base and the mass are conductor, and the setting element is insulator, first locating surface and described
Second locating surface is that perpendicular or the tangent plane of the two are located in perpendicular, and insulation is set between the base and the mass
Put, the mass is also associated with output line.
2. tangential piezoelectric constant d according to claim 115Measurement apparatus, it is characterised in that the base has opposite
Two first locating surfaces set, the measurement apparatus includes two masses, two first locating surfaces point
It is not oppositely arranged with two the second locating surfaces of two masses and forms two clearance spaces, the setting element
Using spring clip, two jig arm of the spring clip exert a force on two masses respectively.
3. tangential piezoelectric constant d according to claim 115Measurement apparatus, it is characterised in that the base also has the
Three locating surfaces, the 3rd locating surface is horizontal plane, is shelved with horizontal backing plate thereon, the drawable setting of the backing plate,
For supporting the tested piezoelectric and the mass bottom surface.
4. tangential piezoelectric constant d according to claim 115Measurement apparatus, it is characterised in that the measurement apparatus is also wrapped
Upper cover is included, the upper cover cover sets the tested piezoelectric, the mass and the setting element and lower port is fixed
On the base.
5. the tangential piezoelectric constant d according to claim 3 or 415Measurement apparatus, it is characterised in that the base is substantially
In T-shaped is inverted, the vertical portion of T-shaped sets the first locating surface, and the horizontal component of T-shaped sets the 3rd locating surface, is located at the perpendicular of T-shaped
Straight part, the horizontal component of T-shaped is also fixedly connected with the lower port of a upper cover.
6. tangential piezoelectric constant d according to claim 515Measurement apparatus, it is characterised in that on the horizontal component of T-shaped
The string holes of its 3rd locating surface of insertion and its end face is additionally provided with, the output line is fed through the string holes.
7. tangential piezoelectric constant d according to claim 115Measurement apparatus, it is characterised in that first locating surface and
Second locating surface is plane or is arcwall face.
8. tangential piezoelectric constant d according to claim 115Measurement apparatus, it is characterised in that the bottom surface of the base is also
Provided with the mounting hole for being fixedly connected with reference sensor.
9. using the tangential piezoelectric constant d of the measurement apparatus as described in claim 1-8 is any15Measuring method, its feature exists
In comprising the following steps：
(1) measurement apparatus is fixed on a reference sensor back-to-back, the reference sensor is set installed in an exciting
Standby upper, the output line of the output line of the measurement apparatus and the reference sensor is respectively connecting to a detection device
On；
(2) excitational equipment is opened, the measurement apparatus and the reference sensor is produced signal because of vibration and is transmitted
To the detection device；
(3) gather and record the output signal Q of the measurement apparatuspWith the output signal Q of the reference sensors,
The tangential piezoelectric constant d of piezoelectric can be calculated by following formula15。
Wherein, S for consult measurement and calibration report reference sensor sensitivity；
m1、m2、m3、m4Respectively weigh the quality, the quality of mass, the quality of setting element of obtained tested piezoelectric with
And the quality of the output line of measurement apparatus.
10. tangential piezoelectric constant d according to claim 915Measuring method, it is characterised in that pass through detection device ratio
The waveform or phase of the measurement apparatus and the output signal of the reference sensor, according to the polarity of the reference sensor
Judge the polarity of the tested piezoelectric.
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| Application Number | Priority Date | Filing Date | Title |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579651A (en) * | 2019-09-05 | 2019-12-17 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring device |
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