CN107036551A - A kind of clamping method of microspheres circularity non-cpntact measurement - Google Patents

A kind of clamping method of microspheres circularity non-cpntact measurement Download PDF

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Publication number
CN107036551A
CN107036551A CN201710151851.XA CN201710151851A CN107036551A CN 107036551 A CN107036551 A CN 107036551A CN 201710151851 A CN201710151851 A CN 201710151851A CN 107036551 A CN107036551 A CN 107036551A
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CN
China
Prior art keywords
microspheres
central
hole
air pump
measured
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Pending
Application number
CN201710151851.XA
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Chinese (zh)
Inventor
吕迅
张冬峰
陆惠宗
袁巨龙
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Priority to CN201710151851.XA priority Critical patent/CN107036551A/en
Publication of CN107036551A publication Critical patent/CN107036551A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2408Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A kind of clamping method of microspheres circularity non-cpntact measurement, realizing the clamping workpiece device of this method includes fixture column cap, the bottom of fixture column cap is arranged on rotation scroll chuck, the station groove for placing microspheres to be measured is provided with the top of fixture column cap, the side of station groove is provided with laser probe, and fixture column cap is provided with central through hole, and the top of central through hole is communicated with station trench bottom, central through hole lower part outlet is connected by airway tube with air pump, and air pump is provided with air pump pressure switch;Clamping process is as follows:Microspheres to be measured are put into station groove, booster air pump, from central through hole pumping, it is placed on the microspheres to be measured and central through hole cavity formation negative pressure state of station groove, until the air pressure in central through hole reaches setting value, air pump is stopped, and now microspheres to be measured are pressed in station groove;Rotation scroll chuck is rotated, and starts laser probe gathered data and carries out roundness measurement.The present invention effectively reduces vibrated higher with rotation interference, precision.

Description

A kind of clamping method of microspheres circularity non-cpntact measurement
Technical field
It is non-more specifically to a kind of microspheres circularity the present invention relates to microspheres circularity non-cpntact measurement field The clamping method of contact measurement.
Background technology
Develop with the electronic product in each field to miniaturization, precise treatment direction, such as high-precision micro milling machine, automobile are used anti- Locking brake system (ABS), hard disc of computer, digital camera, micromachine etc., its rotating moving part are required for using high property Energy miniature bearing carrys out control device volume and ensures its precision, performance, life and reliability.
Microspheres are the elements of miniature bearing most critical, and its precision (mainly including surface quality and circularity) is to micro- Type bearing movable precision and service life have vital influence, are the most important thing base components of equipment.
Currently for circularity measurement use at most and it is most accurate or use that laser measures it is a kind of non- The circularity non-contact measuring instrument of contact type measurement, its course of work is that microspheres 8 to be measured are placed in the taper of cylinder top end face Laser is beaten and treated in the rotary triangle chuck 6 on circularity non-contact measuring instrument by Kong Shang, clamping workpiece device clamping during measurement The surface of micrometer spherula 8, then drives clamping workpiece device to rotate so that laser is beaten on sphere by rotating scroll chuck 6 Point in the circular surface topography sample of the surface extraction of ball, data meter is carried out by the information entrained by the light that reflects Point counting analyses with processing to draw required circularity.
But, it is mounted in a bellmouth by gravity completely when existing circularity non-contact measuring instrument measures bigger spheroid On, but microspheres 8 are small due to the small inertia of its quality, the vibration and rotation to detecting instrument are more sensitive, are loaded if not outer Lotus, which is realized, to be clamped, and the microspheres 8 that vibration or centrifugal force when being rotated when measuring due to clamping workpiece device are caused exist The circularity that vibration or skew in conical socket and then can influence finally is measured.
Accordingly, it would be desirable to which a fixture is fixed by applying clamping force, the fixture is to there is non-magnetic microspheres 8 equal Clamping force can be provided, and other interference will not be introduced and influenceed.
The content of the invention
In order to overcome easily vibrated during existing microspheres circularity non-cpntact measurement and rotation interference, precision relatively low Deficiency, microspheres circularity noncontact vibrated and that rotation is disturbed, precision is higher is effectively reduced the invention provides a kind of The clamping method of measurement.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of clamping method of microspheres circularity non-cpntact measurement, realizes the clamping workpiece device of methods described, including Fixture column cap, the bottom of the fixture column cap is arranged on rotation scroll chuck, is provided with the top of the fixture column cap for putting The station groove of microspheres to be measured is put, the side of the station groove is provided with laser probe, and the fixture column cap is provided with central through hole, The top of the central through hole is communicated with the station trench bottom, and the central through hole lower part outlet is connected by airway tube and air pump Connect, the air pump is provided with air pump pressure switch;The clamping process is as follows:
Microspheres to be measured are put into station groove, start the air pump, from central through hole pumping, station groove are placed on Microspheres to be measured and central through hole cavity formation negative pressure state, until the air pressure in central through hole reaches setting value, air pump stops Only work, now microspheres to be measured are pressed in the station groove;Rotation scroll chuck is rotated, and starts laser probe collection Data carry out roundness measurement.
Further, the air pump is arranged on rotation scroll chuck, and the power line of the air pump is arranged on conducting slip ring, The conducting slip ring is arranged on lower prop;When rotating rotation scroll chuck, air pump is remained turned on power supply.
Further, the fixture column cap includes upper column head and lower column cap, and the upper column head is provided with central through hole, described The top end face center of upper column head is provided with station groove, and the bottom of the upper column head is tightly connected with the lower prop;The lower column cap Lower central through hole is provided with, the upper central through hole is connected with lower central through hole, the lower prop is provided with lower part outlet, the lower prop The bottom of body is arranged on the rotation scroll chuck;The many set upper column heads of correspondence on same set of lower prop are different big for correspondence Small microspheres to be measured.
The station groove is conical socket, and the coning angle and opening diameter of the conical socket are true according to microspheres to be measured It is fixed.It is of course also possible to be other shapes, as long as can be matched with microspheres to be measured.
In the present invention, microspheres 8 to be measured are placed on the bellmouth of fixture column cap, in being provided with clamping workpiece device Heart through hole is communicated with bellmouth;Before measurement, on the bellmouth that spheroid to be measured is placed on to clamping workpiece device top, air pump is by leading Tracheae is evacuated from clamping workpiece device central through hole, makes microspheres 8 with forming negative pressure in the aspirating hole cavity of holder contacts Microspheres 8 to be measured, are pressed on bellmouth by state under atmospheric pressure, reduce detection when rotating band come vibration or Centrifugal force is disturbed.When air pressure is less than air pump pressure switch rated value in clamping workpiece device aspirating hole, air pump is stopped, rotation Turn scroll chuck 6 and rotate progress circularity non-contact detecting with air pump 4, clamping workpiece device and tested microspheres, conduction is sliding Ring 3 prevents the power line 11 of air pump 4 from being wound on clamping workpiece device.So as to obtain the accurate circularity non-cpntact measurement of microspheres As a result.
Beneficial effects of the present invention are mainly manifested in:Simple and compact for structure, production cost is low, and function is easily achieved;Can Effectively realize measure microspheres when it is stepped up with reduce or remit measurement when due to vibration or position skew it is indefinite and The unnecessary influence brought to measurement result, so as to obtain accurate circularity non-cpntact measurement result.
Brief description of the drawings
Fig. 1 is the schematic diagram of the clamping workpiece device of microspheres circularity non-cpntact measurement.
Fig. 2 is the schematic diagram of upper column head.
Fig. 3 is the schematic diagram of lower column cap.
In Fig. 1,1- upper column heads, 2- lower props, 3- conducting slip rings, 4- air pumps, 5- air pumps pressure switch, 6- rotation three-jaw cards Disk, 7- laser probes, 8- microspheres to be measured, 9- airway tubes, 10- electric leads.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
A kind of 1~Fig. 3 of reference picture, clamping method of microspheres circularity non-cpntact measurement realizes the workpiece of methods described Clamping device includes fixture column cap, and the bottom of the fixture column cap is arranged on rotation scroll chuck 6, the top of the fixture column cap Portion is provided with the station groove for placing microspheres 8 to be measured, and the side of the station groove is provided with laser probe 7, the press post Head is provided with central through hole, and the top of the central through hole is communicated with the station trench bottom, and the central through hole lower part outlet leads to Cross airway tube 10 to be connected with air pump 4, the air pump 4 is provided with air pump pressure switch 5;The clamping process is as follows:
Microspheres to be measured are put into station groove, start the air pump, from central through hole pumping, station groove are placed on Microspheres to be measured and central through hole cavity formation negative pressure state, until the air pressure in central through hole reaches setting value, air pump stops Only work, now microspheres to be measured are pressed in the station groove;Rotation scroll chuck is rotated, and starts laser probe collection Data carry out roundness measurement.
Further, the fixture column cap includes upper column head 1 and lower prop 2, and the upper column head 1 is provided with central through hole, institute The top end face center for stating upper column head 1 is provided with station groove, and the bottom of the upper column head 1 is tightly connected with the lower prop 2;Under described Cylinder 2 is provided with lower central through hole, and the upper central through hole is connected with lower central through hole, and the lower prop 2 is provided with lower part outlet, institute The bottom for stating lower main body is arranged on the rotation scroll chuck 6;The many set upper column heads of correspondence on same set of lower prop, for correspondence Different size of microspheres to be measured.
The bottom of the upper column head 1 is provided with internal thread, and the top of the upper column head 1 is provided with the outer spiral shell for being used for connecting upper column head Line, the bottom of the lower prop 2 is provided with interior connection screw thread, and interior connection screw thread interior sealing installs the company for sealing lower central through hole Connect screw.
The air pump 4 is arranged on rotation scroll chuck 6, and the power line of the air pump 4 is arranged on conducting slip ring 3, institute Conducting slip ring 3 is stated on lower prop 2;When rotating rotation scroll chuck, air pump is remained turned on power supply.
The station groove is conical socket, and the coning angle and opening diameter of the conical socket are true according to microspheres to be measured It is fixed.It is of course also possible to be other shapes, as long as can be matched with microspheres to be measured.
The upper column head 1 is provided with central through hole, and there is a conical socket at top end face center, bottom provided with internal thread hole be used for Lower prop 2 is tightly connected, and the internal diameter of upper central through hole and the coning angle of cone tank and opening diameter can be according to actually treating Micrometer spherula determines can there is many set upper column heads 1 for same set of lower prop 2;The lower prop 2 is provided with lower central through hole, under There is external screw thread at the top of cylinder 2 for connection upper column head 1, and there is internal thread lower prop bottom with attachment screw center seal through hole, The side of lower prop 2 is provided with hole connection central through hole and is provided with internal thread for connection air pump 4;The conducting slip ring 3 is provided with Centre bore, is installed on cylinder top.
Further, the coning angle and opening diameter of the conical socket of the top end face of upper column head 1 can be according to actual to be measured small The sphere diameter of spheroid 8 determines that upper column head 1 and lower prop 2 are connected by thread seal, and both of which is provided with central through hole, and pore size is not It is required that it is consistent, can respectively it be determined according to the sphere diameter of spheroid 8 to be measured.
The air that the air pump 4 is mainly used in taking away in fixture aspirating hole reaches certain vacuum, on spheroid 8 to be measured Produce pressure difference below, and then produce a thrust, the size of the thrust be mainly controlled by air pump pressure switch and Regulation.
Conducting slip ring 3 is housed, the conducting slip ring 3 is provided with centre bore and is installed on lower prop 2 on the lower prop 2 Portion, for connecting power supply and air pump 4, realizes the rotation connection of wire, air pump 4 is together rotated with clamping workpiece device during measurement Meanwhile, air pump 4 still can keep good on-state with power supply.
In use, small ball to be measured is placed in the conical socket of fixture column cap, pumping is provided with clamping workpiece device Hole, starts before measurement, and air pump 4 is connected, and the air pump pressure switch 5 at air pump air inlet is placed at certain rated value, from workpiece It is evacuated in clamping device aspirating hole, negative pressure is formed in the aspirating hole cavity that microspheres 8 to be measured are contacted with clamping workpiece device Microspheres 8 to be measured, are pressed in conical socket by state under atmospheric pressure, treat gas in clamping workpiece device aspirating hole When pressure reaches rated value, air pump 4 is stopped, and then can begin through rotary work-table gathered data and measure.
Above-described embodiment is a kind of embodiment of the present invention, is not the limitation to technical solution of the present invention, though object It is so to be directed to microspheres but actually dimensionally have no limitation, as long as can be in above-mentioned reality without creative work The technical scheme realized on the basis of example is applied, is regarded as falling into the rights protection scope of patent of the present invention.

Claims (4)

1. a kind of clamping method of microspheres circularity non-cpntact measurement, realizes the clamping workpiece device of methods described, including folder Has column cap, the bottom of the fixture column cap is arranged on rotation scroll chuck, is provided with the top of the fixture column cap for placing The station groove of microspheres to be measured, the side of the station groove is provided with laser probe, it is characterised in that:The fixture column cap is provided with Central through hole, the top of the central through hole is communicated with the station trench bottom, and the central through hole lower part outlet passes through air guide Pipe is connected with air pump, and the air pump is provided with air pump pressure switch;The clamping process is as follows:
Microspheres to be measured are put into station groove, start the air pump, from central through hole pumping, the to be measured of station groove are placed on Microspheres and central through hole cavity formation negative pressure state, until the air pressure in central through hole reaches setting value, air pump stops work Make, now microspheres to be measured are pressed in the station groove;Rotation scroll chuck is rotated, and starts laser probe gathered data Carry out roundness measurement.
2. a kind of clamping method of microspheres circularity non-cpntact measurement as claimed in claim 1, it is characterised in that:The gas Pump is arranged on rotation scroll chuck, and the power line of the air pump is arranged on conducting slip ring, and the conducting slip ring is arranged on down On cylinder;When rotating rotation scroll chuck, air pump is remained turned on power supply.
3. a kind of clamping method of microspheres circularity non-cpntact measurement as claimed in claim 1 or 2, it is characterised in that:Institute Stating fixture column cap includes upper column head and lower column cap, and the upper column head is provided with central through hole, the top end face center of the upper column head Station groove is provided with, the bottom of the upper column head is tightly connected with the lower column cap;The lower column cap is provided with lower central through hole, described Upper central through hole is connected with lower central through hole, and the lower prop is provided with lower part outlet, and the bottom of the lower main body is arranged on described Rotate on scroll chuck;The many set upper column heads of correspondence on same set of lower prop, for the different size of microspheres to be measured of correspondence.
4. a kind of clamping method of microspheres circularity non-cpntact measurement as claimed in claim 1 or 2, it is characterised in that:Institute Station groove is stated for conical socket, the coning angle and opening diameter of the conical socket are determined according to microspheres to be measured.
CN201710151851.XA 2017-03-15 2017-03-15 A kind of clamping method of microspheres circularity non-cpntact measurement Pending CN107036551A (en)

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CN201710151851.XA CN107036551A (en) 2017-03-15 2017-03-15 A kind of clamping method of microspheres circularity non-cpntact measurement

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Application Number Priority Date Filing Date Title
CN201710151851.XA CN107036551A (en) 2017-03-15 2017-03-15 A kind of clamping method of microspheres circularity non-cpntact measurement

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110030949A (en) * 2019-05-06 2019-07-19 苏州慧利仪器有限责任公司 Air insulated device and laser interference detection device
CN112033337A (en) * 2020-09-04 2020-12-04 中国航空工业集团公司西安飞行自动控制研究所 Quick detection device of plunger sphere circularity

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201382775Y (en) * 2009-04-10 2010-01-13 周前飞 Measuring table for internal diameter and depth of deep hole
CN201555566U (en) * 2009-10-26 2010-08-18 江阴恒祥科技有限公司 Wiring mechanism for three-dimensional object profile measuring instrument
CN201983747U (en) * 2010-12-24 2011-09-21 浙江龙柏光伏科技有限公司 Device for measuring concentricity of silicon rod before silicon-rod butting
CN203489843U (en) * 2013-09-25 2014-03-19 宁波更大集团有限公司 Bearing end face runout detection device
CN203862331U (en) * 2014-05-08 2014-10-08 浙江工业大学之江学院 Device for detecting clamping thickness of material layer under impact from falling ball
CN105910542A (en) * 2016-06-08 2016-08-31 浙江工业大学 Non-contact measurement bearing sphere geometry parameter apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201382775Y (en) * 2009-04-10 2010-01-13 周前飞 Measuring table for internal diameter and depth of deep hole
CN201555566U (en) * 2009-10-26 2010-08-18 江阴恒祥科技有限公司 Wiring mechanism for three-dimensional object profile measuring instrument
CN201983747U (en) * 2010-12-24 2011-09-21 浙江龙柏光伏科技有限公司 Device for measuring concentricity of silicon rod before silicon-rod butting
CN203489843U (en) * 2013-09-25 2014-03-19 宁波更大集团有限公司 Bearing end face runout detection device
CN203862331U (en) * 2014-05-08 2014-10-08 浙江工业大学之江学院 Device for detecting clamping thickness of material layer under impact from falling ball
CN105910542A (en) * 2016-06-08 2016-08-31 浙江工业大学 Non-contact measurement bearing sphere geometry parameter apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110030949A (en) * 2019-05-06 2019-07-19 苏州慧利仪器有限责任公司 Air insulated device and laser interference detection device
CN112033337A (en) * 2020-09-04 2020-12-04 中国航空工业集团公司西安飞行自动控制研究所 Quick detection device of plunger sphere circularity

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Application publication date: 20170811