CN107024842B - A kind of automatic contraposition device and exposure sources and its exposure method - Google Patents
A kind of automatic contraposition device and exposure sources and its exposure method Download PDFInfo
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- CN107024842B CN107024842B CN201710455414.7A CN201710455414A CN107024842B CN 107024842 B CN107024842 B CN 107024842B CN 201710455414 A CN201710455414 A CN 201710455414A CN 107024842 B CN107024842 B CN 107024842B
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- film mechanism
- lens
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- base material
- lower film
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
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- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a kind of automatic contraposition devices and exposure sources and its exposure method.A kind of automatic contraposition device includes mounting bracket, the lower lens mechanism being fixedly linked on the downside of mounting bracket, the lower film mechanism being installed on the upside of lower camera lens, the upper film mechanism being installed on above lower film mechanism, and is installed on the upper lens mechanism above film mechanism；Upper lens mechanism, lower lens mechanism are equipped with several lens assemblies, and acquire positioning image by lens assembly, with the position of film mechanism, lower film mechanism in corresponding control.The present invention is effectively avoided considers influence to exposure to be worth doing because cutting, rushing dry film caused by hanging hole, then has electrostatic rod to eliminate electrostatic, dedusting mechanism dedusting, air purification etc. to ensure the cleanliness factor of base material.Real time monitoring alignment situation is carried out using high-resolution lens component, improves the precision of contraposition.Full process automatization operates, and saves labour turnover, improves production efficiency.
Description
Technical field
The present invention relates to FPC production equipment technologies, more specifically refer to that a kind of automatic contraposition device and exposure are set
Standby and its exposure method.
Background technology
The exposure process of current country FPC productions is all made of sheet material to bit pattern.Sheet material needs people in production to bit pattern
For work having pressed the base material cutting of dry film to come, the process cut will produce dry film bits, need to clean repeatedly prevent it is ill-exposed.Right
During position, a large amount of skilled worker of demand completes the contraposition of the film and base material, and this mode of production efficiency is low, and
It is also easy to produce defective products.
Higher and higher with the quality requirement of product, required precision is also higher and higher, and the mode of production manually aligned is more next
The requirement of production is more not achieved.Domestic and international market also has part to realize automated production, and still, existing automatic aligning exposure is set
It is standby to be also all made of sheet material contraposition, base material need to be manually placed, and manually the dry film of the hanging hole position on base material is crushed and is linked into, hung
Hole process also will produce dry film bits, and on processes such as subsequent exposures, there is also prodigious influences, and production efficiency is also relatively low
Under.
Invention content
It is an object of the invention to overcome the deficiencies of existing technologies, provide a kind of automatic contraposition device and exposure sources and its
Exposure method.
To achieve the above object, the present invention uses following technical scheme：
A kind of automatic contraposition device, including mounting bracket, the lower lens mechanism being fixedly linked on the downside of mounting bracket, are installed on down
Lower film mechanism on the upside of camera lens, the upper film mechanism being installed on above lower film mechanism, and be installed on above film mechanism
Upper lens mechanism；The upper lens mechanism, lower lens mechanism are equipped with several lens assemblies, and are acquired by lens assembly
Image is positioned, with the position of film mechanism, lower film mechanism in corresponding control.
Its further technical solution is：The upper film mechanism and lower film mechanism includes film mounting plate, is set to
The transparent panel of film mounting plate side, and be fixed on film mounting plate and be used to adjust the several of transparent Board position from two directions
A Power Component；The transparent panel and film mounting plate by equipped with several sliding parts be slidably connected；The Power Component
Including film force piece, the lead screw part with film force piece driving coupling, and set on lead screw part power output end and transparent panel it
Between articulation piece；Hinge bar one end that the articulation piece is equipped with is slidably connected with transparent panel, the transmission spiral shell of the other end and lead screw part
Mother is hinged.
Its further technical solution is：It is arranged with two on the upside of the feed end and discharge end of the upper film mechanism
Upper lens mechanism；The upper lens mechanism includes upper mounting seat, is slidably connected the sliding panel in upper mounting seat, and be fixedly connected
In the lens assembly of sliding panel；The upper mounting seat is equipped with the upper camera lens force piece for driving sliding panel sliding motion；It is described
Lens assembly is bordering on the setting of film mechanism downward；
The lens assembly by equipped with adjusting part be fixedly connected with sliding panel；The adjusting part includes that sliding joins
The X of sliding panel is connected to slide plate, is slidably connected the Y-direction slide plate to slide plate in X, and be slidably connected the Z-direction slide plate in Y-direction slide plate；
The sliding panel is equipped with for adjusting X regulating parts of the X to slide plate；The X is equipped with the Y for adjusting Y-direction slide plate to slide plate and adjusts
Part；The Y-direction slide plate is equipped with the Z regulating parts for adjusting Z-direction slide plate；The lens assembly is set to Z-direction slide plate.
Its further technical solution is：It is arranged with two on the downside of the feed end and discharge end of the lower film mechanism
Lower lens mechanism；The lower lens mechanism includes Y-direction mounting plate, is slidably connected X in Y-direction mounting plate both sides to mounting plate,
And it is fixed on lens assemblies of the X to mounting plate；The lens assembly is bordering on lower film mechanism setting upward；The Y-direction mounting plate
Equipped with for driving Y-direction force pieces of the X to mounting plate；The X is equipped with to mounting plate for driving the X of lens assembly to power
Part；
The lens assembly is slidably connected in mounting plate, and X is equipped with vertical direction to mounting plate and adjusts lens assembly with X
Z-direction regulating part.
Its further technical solution is：The upper film mechanism or lower film mechanism are equipped with elevating mechanism；The lifting
Mechanism includes being used to support film mechanism or lower film mechanism and several guide parts for being fixed on mounting bracket, for driving
The vertical force piece that film mechanism or lower film mechanism move up and down；The upper film mechanism or lower film mechanism and mounting bracket it
Between be equipped with bolster；
The upper film mechanism or lower film mechanism are equipped with horicontal motion mechanism；The horicontal motion mechanism is equipped with and liter
The level board that descending mechanism is fixedly connected, and the upper film mechanism or lower film mechanism are slidably connected with level board；The level
Plate is equipped with the horizontal power part for driving upper film mechanism or the horizontal movement of lower film mechanism.
A kind of exposure sources with automatic contraposition device, including rack, above-mentioned automatic contraposition device are fixed on rack
The discharge mechanism of feed end and the receiving mechanism for being fixed on frame discharge end；The rack is bordering on the upper film of automatic contraposition device
It is equipped with upper light source mechanism on the upside of mechanism, is bordering on lower film mechanism and is equipped with lower light source mechanism.
Its further technical solution is：The discharge mechanism, receiving mechanism are equipped with the support plate for being fixed on rack, revolve
Turn the bearing for being connected in support plate, rotation is connected in the expansion assembly of bearing side, and for driving expansion assembly rotary motion
Expansion power part；
Wherein, expansion assembly includes rotating the hollow shaft coupled with bearing, is fixedly linked in hollow shaft and is distal to bearing one
The main axis of dilatation at end；Hollow shaft and the expansion power part driving coupling, and through-hole is equipped on the inside of hollow shaft；On the inside of the main axis of dilatation
Equipped with inner cavity；The main axis of dilatation periphery is equipped with the movable block of several and inner cavity unicom, and movable block is wedge structure；In described
Chamber is equipped with the tapered expansion block moved back and forth；Tapered expansion block one end couples with the expansion pull rod being equipped with；The expansion is drawn
Bar is through through-hole and extends to hollow shaft outer end so that with equipped with pull rod force piece driving coupling；
The pull rod force piece drives tapered expansion block to be moved back and forth in inner cavity by expanding pull rod, the cone of tapered expansion block
The lozenges of shape face and movable block is mutually slidably connected, to push movable block radial motion.
Its further technical solution is：It further include the material pulling mechanism for being bordering on the setting of automatic contraposition device discharge end；The drawing
Expect that mechanism includes bottom plate, is fixedly linked in the clamp assemblies of bottom plate, the drawing material force piece for driving clamp assemblies to move back and forth,
And it is used to support several support wheels of base material；It is described draw material force piece by equipped with drawing material lead screw drive clamp assemblies it is reciprocal
Movement；
The clamp assemblies include the movable plate being slidably connected in bottom plate, are slidably connected the grip block in movable plate, and with
The clamping force piece of grip block driving coupling；The gap by base material being equipped between the movable plate and grip block；
The clamping force piece drives grip block to be moved towards movable plate will be clamped by the base material in gap, and passes through
It is moved with the drawing material lead screw driving clamp assemblies of material force piece driving coupling are drawn, so that base material moves.
Its further technical solution is：It further include the dedusting mechanism set on automatic contraposition device feed end；The dust removal machine
Structure includes the dedusting frame for being fixed on rack, the dedusting force piece being fixed on the upside of dedusting frame, and driving coupling is dynamic in dedusting force piece
The press nips of power output end, and it is set to the fast pulley group on the downside of press nips；The press nips, fast pulley group are equipped with several
The dedusting idler wheel contacted with base material；
The dedusting force piece drives press nips to be moved towards fast pulley group, and dedusting idler wheel is contacted and pressed with substrate surface
Tightly, so that dedusting idler wheel takes away sundries.
Its further technical solution is：The rack periphery is equipped with shell；It is net that the shell upper end is equipped with several air
Change mechanism.
Compared with the prior art, the invention has the advantages that：A kind of automatic contraposition device of the present invention and exposure sources and its
Exposure method, the pattern exposed using roll-to-roll base material automatic aligning are directly rolled up again without cutting after base material has pressed dry film
It is exposed at the present invention is put into after coiled strip.Exposure process uses image automatic aligning, without artificial material retractable, contraposition, significantly
Save cost of labor；Be conducive to improve production efficiency, improve the precision and yields of product.
The present invention is effectively avoided considers influence to exposure to be worth doing because cutting, rushing dry film caused by hanging hole, then has electrostatic rod
Electrostatic, dedusting mechanism dedusting, air purification etc. are eliminated to ensure the cleanliness factor of base material.It is carried out using high-resolution lens component real
When monitor alignment situation, improve the precision of contraposition.Full process automatization operates, and saves labour turnover, improves production efficiency.
Description of the drawings
Fig. 1 is a kind of three-dimensional structure diagram of automatic contraposition device of the present invention；
Fig. 2 is a kind of upper film mechanism three-dimensional structure diagram of automatic contraposition device of the present invention；
Fig. 3 is a kind of upper film mechanism three-dimensional structure diagram of automatic contraposition device of the present invention；
Fig. 4 is a kind of Power Component three-dimensional structure diagram of the three-dimensional structure diagram of the retarder with planetary mechanism of the present invention；
Fig. 5 is the side view of Fig. 4；
Fig. 6 is a kind of upper lens mechanism three-dimensional structure diagram of automatic contraposition device of the present invention；
Fig. 7 is a kind of adjusting part three-dimensional structure diagram of the upper lens mechanism of automatic contraposition device of the present invention；
Fig. 8 is a kind of three-dimensional structure diagram of the lower lens mechanism of automatic contraposition device of the present invention；
Fig. 9 is the three-dimensional structure diagram of a kind of elevating mechanism of automatic contraposition device of the present invention, horicontal motion mechanism；
Figure 10 is the front view of Fig. 9；
Figure 11 is a kind of three-dimensional structure diagram of the exposure sources with automatic contraposition device of the present invention；
Figure 12 is a kind of discharge mechanism of the exposure sources with automatic contraposition device of the present invention, receiving mechanism stereochemical structure
Figure；
Figure 13 is a kind of mid section figure of the expansion assembly of the exposure sources with automatic contraposition device of the present invention；
Figure 14 is a kind of three-dimensional structure diagram of the material pulling mechanism of the exposure sources with automatic contraposition device of the present invention；
Figure 15 is a kind of three-dimensional structure diagram of the dedusting mechanism of the exposure sources with automatic contraposition device of the present invention；
Figure 16 is that a kind of present invention upper light source mechanism of the exposure sources with automatic contraposition device, lower light source mechanism are stood
Body structure chart；
Figure 17 is a kind of three-dimensional structure diagram of the feeding pressure mechanism of the exposure sources with automatic contraposition device of the present invention；
Figure 18 is a kind of the standing with shell and air purifying mechanism of exposure sources with automatic contraposition device of the present invention
Body structure chart.
Specific implementation mode
In order to more fully understand the present invention technology contents, with reference to specific embodiment to technical scheme of the present invention into
One step introduction and explanation, but not limited to this.
It is the concrete structure view of the present embodiment as shown in Fig. 1 to Figure 18.
A kind of automatic contraposition device Q is fixedly linked in the lower mirror of 10 downside of mounting bracket as shown in Figure 1, including mounting bracket 10
Head mechanism 40 is installed on the lower film mechanism 30 of 40 upside of lower lens mechanism, is installed on the upper film of 30 top of lower film mechanism
Mechanism 20, and it is installed on the upper lens mechanism 50 of 20 top of film mechanism.Upper lens mechanism 50, lower lens mechanism 40 are equipped with
Several lens assemblies 21, and positioning image is acquired by lens assembly 21, with film mechanism 20, lower film machine in corresponding control
The position of structure 30.Wherein, lens assembly 21 is CCD camera lenses, is not further explained for the prior art.
As shown in Figures 2 to 5, upper film mechanism 20 and lower film mechanism 30 include film mounting plate 22, are set to the film
The transparent panel 23 of 22 side of mounting plate, and be fixed on film mounting plate 22 and be used to adjust 23 position of transparent panel from two directions
Several Power Components 24.Transparent panel 23 and film mounting plate 22 by equipped with several sliding parts 25 be slidably connected.It is transparent
23 periphery of plate is equipped with connection frame 231, and sliding part 25 is slidably connected by connecting frame 231 with film mounting plate 22.Preferably, thoroughly
Isotropic disk 23 is equipped with several stomatas and air drain 232 for being used to adsorb film film, and air drain setting is bonded side in transparent panel 23,
Stomata and 232 unicom of air drain, and stomata also with equipped with vacuum source unicom.
Wherein, sliding part 25 is multi-directional ball.Transparent panel 23 is slided by being distributed on the multi-directional ball of downside with film mounting plate 22
Dynamic contact.Meanwhile in order not to beat in sliding process as transparent panel 23, transparent panel 23 passes through in multi-directional ball and transparent panel 23
Slideslip couples, and extends to the downside for being distal to transparent panel 23 also by the fixation of support plate 251 multi-directional ball and film mounting plate 22 is slided
Dynamic connection, is slidably connected by multi-directional ball in 22 both sides of film mounting plate to form transparent panel 23.
Power Component 24 is including film force piece 241, the lead screw part 242 with 241 driving coupling of film force piece, and is set to
Articulation piece 243 between 242 power output end of lead screw part and transparent panel 23.244 one end of hinge bar that articulation piece 243 is equipped with thoroughly
Isotropic disk 23 is slidably connected, and the transmission nut 245 of the other end and lead screw part 242 is hinged.Wherein, film force piece 241 is motor.
Power Component 24 is installed on 22 the same side of film mounting plate, is adjusted in face of the position of transparent panel 23 in same level
Section.The multi-directional ball of 23 lower section of transparent panel contributes to the adjusting of Power Component 24.In the present embodiment, Power Component 24 is three, point
Mutually in orthogonal both direction, the horizontal position of transparent panel 23 An Zhuan not be adjusted from both direction.Preferably,
For balance adjustment film mechanism, two Power Components 24 are set in the feedstock direction perpendicular to base material, are set on feedstock direction
Set a Power Component 24.
Wherein, articulation piece 243 includes not only hinge bar 244, wherein further includes being fixed on 245 hinged seat of transmission nut
246,244 one end of hinge bar is hinged by axis pin 247 and hinged seat 246,244 other end of hinge bar by sliding rail slide with it is transparent
Plate 23 is slidably connected.In addition, hinged seat 246 is slidably connected also by slide sliding rail and film mounting plate 22.Transmission nut 245 is transported
Dynamic direction is mutually perpendicular to hinge bar 243 and 23 glide direction of transparent panel.Preferably, film force piece 241 by equipped with connection
Axis device 248 and 242 driving coupling of lead screw part.
Wherein, unlike upper film mechanism 20 and lower film mechanism 30：The height of the connection frame 231 of upper film mechanism 20
More than 231 height of connection frame of lower film mechanism 30.
Preferably, film mounting plate 22 is equipped with the position sensor that several are used to detect transparent panel 23, convenient for automation
Control.
As shown in Figure 6 to 7, two upper camera lens machines are arranged on the upside of the feed end and discharge end of upper film mechanism 20
Structure 50.Upper lens mechanism 50 includes upper mounting seat 51, is slidably connected the sliding panel 52 in upper mounting seat 51, and be fixedly linked in cunning
The lens assembly 21 of movable plate 52.Upper mounting seat 51 is equipped with for driving the upper camera lens force piece 53 of 52 sliding motion of sliding panel (excellent
Choosing, upper camera lens force piece 53 is cylinder).Wherein, sliding panel 52 is done and feedstock direction under the driving of upper camera lens force piece 53
Parallel linear motion.Lens assembly 21 is bordering on the setting of film mechanism 20 downward.Each upper lens mechanism 50 is equipped with two
Lens assembly 21, or more the top of film mechanism 20 formed there are four lens assembly 21, be acquired pair from the position at four angles
Bit image.
Lens assembly 21 by equipped with adjusting part 54 be fixedly connected with sliding panel 52.Adjusting part 54 includes that sliding joins
The X of sliding panel 52 is connected to slide plate 541, is slidably connected the Y-direction slide plate 542 to slide plate 541 in X, and be slidably connected in Y-direction slide plate
542 Z-direction slide plate 543.Sliding panel 52 is equipped with for adjusting X regulating parts 544 of the X to slide plate 541.X is equipped with to slide plate 541 and is used for
Adjust the Y regulating parts 545 of Y-direction slide plate 542.Y-direction slide plate 542 is equipped with the Z regulating parts 546 for adjusting Z-direction slide plate 543.Camera lens
Component 21 is set on Z-direction slide plate 543.Adjusting part 54 can be adjusted up lens assembly 21 from tri- sides X, Y, Z, to keep
The positional accuracy of Image Acquisition.
Wherein, X regulating parts 544, Y regulating parts 545, Z regulating parts 546 are micrometer.X regulating parts 544 are fixed on sliding
On plate 52, movable one end only is butted on the protruding block 547 that X is equipped with to slide plate 541, rotate micrometer, movable end can push X to
Slide plate 541 moves, the position upward 21X to adjust lens assembly.
Y regulating parts 545 are fixed on X on slide plate 541, and movable one end is only butted on the protruding block that Y-direction slide plate 542 is equipped with
On, micrometer is rotated, movable end can push Y-direction slide plate 542 to move, the position in Y-direction to adjust lens assembly 21.
Z regulating parts 546 are fixed on Y-direction slide plate 542, and movable one end is only butted on the protruding block that Z-direction slide plate 543 is equipped with
On, micrometer is rotated, movable end can push Z-direction slide plate 543 to move, the position upward 21Z to adjust lens assembly.
Preferably, upper lens mechanism 50 is equipped with the photoelectric sensor that several are used for 21 position of detector lens component.
As shown in figure 8, being arranged with two lower lens mechanisms 40 on the downside of the feed end and discharge end of lower film mechanism 30.
Lower lens mechanism 40 includes Y-direction mounting plate 41, is slidably connected the X in 41 both sides of Y-direction mounting plate to mounting plate 42, and be fixed on X
To the lens assembly 21 of mounting plate 42.Lens assembly 21 is bordering on lower film mechanism 30 and is arranged upward.Y-direction mounting plate 41 is equipped with and is used for
Drive Y-direction force pieces 43 of the X to mounting plate 42.X is equipped with to mounting plate 42 for driving the X of lens assembly 21 to force piece 44.
Specifically, X to force piece 44, Y-direction force piece 43 be motor.Preferably, X is to mounting plate 42 and component pair mounted thereto
Claim to be arranged on Y-direction mounting plate 41.
Lens assembly 21 is slidably connected in mounting plate 42, and X is equipped with vertical direction to mounting plate 42 and adjusts lens group with X
The Z-direction regulating part 45 of part 21.Wherein, Z-direction regulating part 45 is equipped with micrometer, installation and Principles of Regulation and upper lens mechanism 50
Micrometer is identical, does not do burden herein.
Specifically, lower lens mechanism 40 is fixed on by holder 46 on mounting bracket 10.Y-direction force piece 43 is fixed on holder
On, that is, control Y-direction motor be fixed on holder 46, the power wheel 47 that motor power output end is equipped with by equipped with transmission belt
48 are fixed on 49 driving coupling of driven wheel that is located on holder 46, Y-direction mounting plate 41 on transmission belt 48.The rotation of transmission belt 48
Y-direction mounting plate 41 is driven to move, to adjust the position of lens assembly 21 in the Y direction.
Control X to motor be fixed on Y-direction mounting plate 41, the power wheel that motor power output end is equipped with by equipped with
Transmission belt and the driven wheel driving coupling being located on Y-direction mounting plate 41, X are fixed on to mounting plate 42 on transmission belt 48, transmission belt
48 rotation drives X to be moved to mounting plate 42, to adjust the position of lens assembly 21 in the X direction.Wherein, Z-direction regulating part
45 with X to mounting plate 42 equipped with sliding rail slide by way of be slidably connected.
As shown in Fig. 9 to Figure 10, upper film mechanism 20 or lower film mechanism 30 are equipped with elevating mechanism 60.Elevating mechanism 60
Including being used to support upper film mechanism 20 or lower film mechanism 30 and being fixed on several guide parts 61 of mounting bracket 10, for driving
The vertical force piece 62 that 20 or lower film mechanism 30 of Dong Shang films mechanism moves up and down.Wherein, upper film mechanism 20 is vertical dynamic
Power part 62 is motor, and passes through elevating screw part 64 and upper 20 driving coupling of film mechanism.The vertical power of lower film mechanism 30
Part 62 is cylinder, directly drives lower 30 elevating movement of film mechanism.
Bolster 63 is equipped between upper film mechanism 20 or lower film mechanism 30 and mounting bracket 10.Wherein, guide part 61 is
Sliding block sliding rail, specifically, mounting bracket 10 is equipped with sliding rail, elevating mechanism 60 is equipped with the slide being mutually matched with sliding rail.It is vertical dynamic
Power part 62 is motor, and by equipped with lead screw and upper 20 driving coupling of film mechanism.Also bolster 63 is cylinder, and quantity is
Four, upper film mechanism 20 is coupled by being distributed on the cylinder of surrounding with mounting bracket 10.Cylinder has the function of buffering and support,
The gravity of film mechanism 20 can be offset at work, convenient for flexibly control.Generally speaking, the upper film machine of the control of elevating mechanism 60
Structure 20 or lower film mechanism 30 move up and down, and the two is made to be bonded or detach.Wherein, elevating mechanism 60 is additionally provided with range sensor,
Distance for detecting upper film mechanism 20 or lower film mechanism 30 avoids the two from mutually squeezing bad.
Upper film mechanism 20 or lower film mechanism 30 are equipped with horicontal motion mechanism 70.Horicontal motion mechanism 70 is equipped with and liter
The level board 71 that descending mechanism 60 is fixedly connected, and upper film mechanism 20 or lower film mechanism 30 are slidably connected with level board 71.Water
Tablet 71 is equipped with the horizontal power part 72 for driving upper film mechanism 20 or lower 30 horizontal movement of film mechanism.Wherein, horizontal
Force piece 72 is cylinder.
Specifically, upper film mechanism 20 or lower 30 lower end of film mechanism are equipped with sliding rail, with the mutually matched slide of sliding rail
It is fixed on level board 71, and cylinder is fixed on level board 71, piston end and upper film mechanism 20 or lower film mechanism 30
It is fixedly connected, the work of cylinder is so that upper film mechanism 20 or lower film mechanism 30 protrude horizontally up outside mounting bracket 10, convenient for upper
The cleaning of film mechanism 20 or lower film mechanism 30 and installation film part.
A kind of exposure sources with automatic contraposition device, as shown in figure 11, including rack 80, above-mentioned automatic aligning dress
Q is set, the discharge mechanism 81 of 80 feed end of rack is fixed on and is fixed on the receiving mechanism 82 of 80 discharge end of rack.Rack 80 is bordering on
20 upside of upper film mechanism of automatic contraposition device Q is equipped with upper light source mechanism 83, is bordering on lower film mechanism 30 and is equipped with lower light source machine
Structure 84.Discharge mechanism 81, receiving mechanism 82 are equipped with the expansion assembly 813 of rotation, are convenient for the production of roll-to-roll base material.
As shown in Figure 12 to 13, discharge mechanism 81, receiving mechanism 82 are equipped with the support plate 811 for being fixed on rack 80, rotation
Turn the bearing 812 for being connected in support plate 811, rotation is connected in the expansion assembly 813 of 812 side of bearing, and for driving expansion
The expansion power part 814 of 813 rotary motion of component.Wherein, expansion assembly 813 includes rotating the hollow shaft coupled with bearing 812
815, it is fixedly linked in hollow shaft 815 and is distal to the main axis of dilatation 816 of 812 one end of bearing.Hollow shaft 815 and expansion power part 814
Driving coupling, and 815 inside of hollow shaft is equipped with through-hole 817.
816 inside of main axis of dilatation is equipped with inner cavity 818, and 816 periphery of main axis of dilatation is equipped with the movable block of several and 818 unicom of inner cavity
819, and movable block 819 is wedge structure.In addition, inner cavity 818 is equipped with the tapered expansion block 821 moved back and forth.Tapered expansion block
821 one end couple with the expansion pull rod 822 being equipped with.Expansion pull rod 822 is through through-hole 817 and extends to 815 outer end of hollow shaft
(extend to and be distal to 816 one end of main axis of dilatation) so that with equipped with 823 driving coupling of pull rod force piece；Preferably, pull rod force piece
823 be cylinder.
Preferably, 819 outside of each movable block is equipped with arc block 824, and multiple arcs block 824 surrounds a circular expander
Telescopic shaft.
Pull rod force piece 823 drives tapered expansion block 821 to be moved back and forth in inner cavity by expanding pull rod 822, tapered expansion
The taper surface of block 821 and the lozenges of movable block are mutually slidably connected, to push 819 radial motion of movable block.
819 radial motion of movable block of main axis of dilatation 816 drives 824 stretching motion of arc block, convenient for the base material peace that will be wrapped
Dress.When charging, for pull rod force piece 823 by expanding pull rod 822 by tapered expansion block 821 toward being pushed forward, movable block 819 drives arc
The base material of 824 radial contraction of block, package is put into from 816 one end of main axis of dilatation, and then reverse drive pull rod force piece 823, will be wrapped
Base material fix.The course of work of discharging is with the opposite of charging.
Preferably, for the uniform force of entire discharge mechanism 81 or receiving mechanism 82,816 feeding end of main axis of dilatation is equipped with
Outrigger shaft 825, and rack 80 is equipped with and rotates the branch weight plate 826 coupled with outrigger shaft 825.Because expansion assembly 813 is rotated in branch
On seat 812, so main axis of dilatation 816 is also rotated horizontally around rotation center, in order to prevent in 813 course of work transfer of expansion assembly
Dynamic, branch weight plate 826 is equipped with the locking pin 827 that outrigger shaft 825 is clamped on to branch weight plate 826.
With other embodiment, expansion assembly 813 can be existing air-expanding shaft.
Wherein, as shown in figure 14, further include the material pulling mechanism 85 for being bordering on the setting of automatic contraposition device Q discharge ends.Draw material machine
Structure 85 includes bottom plate 851, is slidably connected the clamp assemblies 852 in bottom plate 851, for driving clamp assemblies 852 to move back and forth
Material force piece 853 is drawn, and is used to support several support wheels 854 of base material.Draw material force piece 853 by equipped with drawing material lead screw
855 driving clamp assemblies 852 move back and forth；
The clamp assemblies 852 include the movable plate 856 being slidably connected in bottom plate 851, are slidably connected in movable plate 856
Grip block 857, and the clamping force piece 858 with 857 driving coupling of grip block.It is equipped between movable plate 856 and grip block 857
Pass through the gap of base material；
Force piece 858, which is clamped, drives grip block 857 to be moved towards movable plate 856 will be clamped by the base material in gap, and
And by driving clamp assemblies 852 to move with the drawing material lead screw 855 of material 853 driving coupling of force piece is drawn, so that base material moves, into
And complete the process for drawing material.
Wherein, as shown in figure 15, further include the dedusting mechanism 86 for being set to automatic contraposition device Q feed ends.Dedusting mechanism 86
Dedusting frame 861 including being fixed on rack 10 is fixed on the dedusting force piece 862 of 861 upside of dedusting frame, and driving coupling is in dedusting
The press nips 863 of 862 power output end of force piece, and it is set to the fast pulley group 864 of 863 downside of press nips.Press nips 863 are logical
Traveller is crossed to be slidably connected with dedusting frame 861.Press nips 863, fast pulley group 864 are equipped with several dedusting rollings contacted with base material
Wheel 865.In the present embodiment, base material passes through between press nips 863 and the dedusting idler wheel 865 of fast pulley group 864, by base material
Sundries, which is stained with, to be taken away.Meanwhile press nips 863, fast pulley group 864 are respectively additionally provided with two of the contact mutual with dedusting idler wheel 865
Binding dust wheel.
Dedusting force piece 862 drives press nips 863 to be moved towards fast pulley group 864, and dedusting idler wheel 865 connects with substrate surface
It touches and compresses, so that dedusting idler wheel 865 takes away sundries.Meanwhile binding dust wheel can also take away dedusting idler wheel 865, it is ensured that dedusting
Continuity.
Wherein, as shown in figure 16, upper light source mechanism 83,84 structure of lower light source mechanism are identical, and only installation site is different.
Upper light source mechanism 83, lower light source mechanism 84 include light source mounting plate 831, are slidably connected in the illuminating part of light source mounting plate 831
832, and the light source force piece 833 for driving illuminating part 832 to move.Illuminating part 832 is bordering on the installation of film mechanism, and light downward
Driving source part 833 can drive illuminating part 832 to move, so that illuminating part 832 can be in optimum exposure position.Wherein, illuminating part
832 be the LED light group for sending out ultraviolet light.
Preferably, light source mounting plate 831 is equipped with the sensor of 832 position of detection illuminating part.
As shown in figure 17, the feed end of automatic contraposition device Q is equipped with feeding pressure mechanism 87 with discharge end.Feeding pressure mechanism 87 wraps
Material-pressing rack 871 is included, the movable pressing board 872 in material-pressing rack 871, and the binder for driving movable pressing board 872 to move are slidably connected
Force piece 873.872 downside of movable pressing board is equipped with fixation clip 874, and be equipped between fixation clip 874 and movable pressing board 872
Pass through the gap of base material；Binder force piece 873 drives movable pressing board 872 to be moved towards fixed pressuring plate 874, so as to will pass through the two gap
Base material compress.
Wherein, the feed end of the discharge end of discharge mechanism 81 and receiving mechanism 82 is equipped with electrostatic precipitation stick 88, prevents quiet
Interference of the electricity to production.
As shown in figure 18,80 periphery of rack is equipped with shell 90.90 upper end of shell is equipped with several air purifying mechanisms 91.It is empty
Gas purification mechanism 91 is the prior art, is not described herein.
A kind of automatic aligning exposure method, includes the following steps：
Step 1 opens air purifying mechanism 91, and adjusts suitable humidity and temperature, and discharge mechanism 81 rotates blowing
Afterwards, base material passes through electrostatic precipitation stick 88 and eliminates electrostatic to base material respectively under the action of material pulling mechanism 85；Dedusting mechanism 86 is to base
Material surface is dusted.
Step 2, the feed inlet and discharge port that are passed in and out for base material that mounting bracket 10 is equipped with.Before work, lower film mechanism 30
Film film is adsorbed on by 23 side of transparent panel by vacuum source with the transparent panel 23 of upper film mechanism 20, base material is under
Pass through between film mechanism 30 and the transparent panel 23 of upper film mechanism 20.It eliminates the base material after electrostatic and dedusting and enters automatic aligning
After device, the feeding pressure mechanism 87 at automatic contraposition device both ends compresses base material, prevents from shifting.
Step 3, after fixing substrate, upper film mechanism 20 drops to precalculated position (under at this point, by the drive of elevating mechanism 60
Film mechanism 30 is failure to actuate)；Lower film mechanism 30 is aligned on the basis of base material, then underlying four of lower lens mechanism 40
The MARK points position that a lens assembly 21 is moved to four angles carries out Image Acquisition, after computer system operation, sends letter
Number instruction is moved to target location to Power Component 24 to control lower film mechanism 30；After the completion of lower film mechanism 30 acts for the first time
It is examined using school, lens assembly 21 takes again mutually confirms whether lower film mechanism 30 and the MARK points of base material are completely superposed, and does not reach such as
To requirement, then pass through multiple Image Acquisition, position correction, until contraposition is completely superposed.
Step 4 is aligned after lower film mechanism 30 aligns on the basis of 20 or less film mechanism 30 of upper film mechanism, on
The external MARK points position that the lens assembly 21 of lens mechanism 50 is moved to lower film mechanism 30 carries out Image Acquisition, by calculating
After machine system operations, Power Component 24 drives film mechanism 20 to complete contraposition action；
Step 5, after the completion of upper film mechanism 20 is aligned with lower film mechanism 30, upper lens mechanism 50 and lower lens mechanism
40 are moved to outside exposure area, and upper film mechanism 20 declines or lower film mechanism 30 rises, until upper 20 He of film mechanism
The side that the transparent panel 23 of lower film mechanism 30 adsorbs film film is bonded with base material completely；Then the vacuum gas being equipped with is opened
Source, the air in extraction between film mechanism 20 and the transparent panel 23 of lower film mechanism 30, keeps the transparent panel 23 of base material both sides complete
Full fitting, does not stay bubble.
Step 6, then light source mechanism 83, lower light source mechanism 84 are opened, and light source is moved to precalculated position, so that right
Base material exposure is more uniformly reliable；After the completion of exposure, upper film mechanism 20 separates with lower film mechanism 30 and is moved to standby position.
Step 7, the base material after the pulling exposure of material pulling mechanism 85, and the electrostatic rod in 82 structure front end of collecting machine is set
Elimination electrostatic carried out to exposure rear substrate, receiving mechanism 82 carries out rewinding to the base material after exposure, and make next section it is to be exposed
Base material enter to exposure area；After base material to be exposed enters automatic contraposition device, continue as above-mentioned step, until roll
Base material exposure finishes.
Wherein, following steps can also be increased in the above process：Upper film mechanism 20 or lower film mechanism 30 need to clean
Or when exchanging film film for, it can be risen or fallen respectively to initial position under the effect of elevating mechanism 40, and in horizontal movement
Shell outside is stretched out respectively under acting on by mechanism 70, and then is operated to upper film mechanism 20 or lower film mechanism 30.
In conclusion a kind of automatic contraposition device of the present invention and exposure sources and its exposure method, using roll-to-roll base
The pattern of material automatic aligning exposure is put into progress of the present invention without cutting after base material has pressed dry film after being directly rolled into coiled strip again
Exposure.Exposure process uses image automatic aligning, without artificial material retractable, contraposition, greatly saves cost of labor；Be conducive to
Production efficiency is improved, the precision and yields of product are improved.
The present invention is effectively avoided considers influence to exposure to be worth doing because cutting, rushing dry film caused by hanging hole, then has electrostatic rod
Electrostatic, dedusting mechanism dedusting, air purification etc. are eliminated to ensure the cleanliness factor of base material.It is carried out using high-resolution lens component real
When monitor alignment situation, improve the precision of contraposition.Full process automatization operates, and saves labour turnover, improves production efficiency.
It is above-mentioned only with embodiment come the technology contents that further illustrate the present invention, in order to which reader is easier to understand, but not
It represents embodiments of the present invention and is only limitted to this, any technology done according to the present invention extends or recreation, by the present invention's
Protection.Protection scope of the present invention is subject to claims.
Claims (9)
1. a kind of automatic contraposition device, which is characterized in that including mounting bracket, the lower camera lens machine that is fixedly linked on the downside of mounting bracket
Structure, the lower film mechanism being installed on the upside of lower camera lens, the upper film mechanism being installed on above lower film mechanism, and it is installed on phenanthrene
Upper lens mechanism above woods mechanism；The upper lens mechanism, lower lens mechanism are equipped with several lens assemblies, and pass through mirror
Head assembly acquisition positioning image, with the position of film mechanism, lower film mechanism in corresponding control；
The upper film mechanism and lower film mechanism includes film mounting plate, is set to the transparent panel of film mounting plate side,
And it is fixed on film mounting plate and several Power Components for adjusting transparent Board position from two directions；The transparent panel with
Film mounting plate by equipped with several sliding parts be slidably connected；The Power Component includes film force piece, dynamic with the film
The lead screw part of power part driving coupling, and the articulation piece between lead screw part power output end and transparent panel；The articulation piece is set
Some hinge bar one end are slidably connected with transparent panel, and the transmission nut of the other end and lead screw part is hinged.
2. a kind of automatic contraposition device according to claim 1, which is characterized in that the feed end of the upper film mechanism
Lens mechanisms are gone up with being arranged with two on the upside of discharge end；The upper lens mechanism includes upper mounting seat, be slidably connected in
The sliding panel of upper mounting seat, and it is fixedly linked in the lens assembly of sliding panel；The upper mounting seat is equipped with for driving sliding panel
The upper camera lens force piece of sliding motion；The lens assembly is bordering on the setting of film mechanism downward；
The lens assembly by equipped with adjusting part be fixedly connected with sliding panel；The adjusting part include be slidably connected in
The X of sliding panel is slidably connected the Y-direction slide plate to slide plate in X, and be slidably connected the Z-direction slide plate in Y-direction slide plate to slide plate；It is described
Sliding panel is equipped with for adjusting X regulating parts of the X to slide plate；The X is equipped with the Y regulating parts for adjusting Y-direction slide plate to slide plate；Institute
Y-direction slide plate is stated equipped with the Z regulating parts for adjusting Z-direction slide plate；The lens assembly is set to Z-direction slide plate.
3. a kind of automatic contraposition device according to claim 1, which is characterized in that the feed end of the lower film mechanism
With two lower lens mechanisms are arranged on the downside of discharge end；The lower lens mechanism includes Y-direction mounting plate, be slidably connected in
The X of Y-direction mounting plate both sides is to mounting plate, and is fixed on lens assemblies of the X to mounting plate；The lens assembly is bordering on lower phenanthrene upward
Woods mechanism is arranged；The Y-direction mounting plate is equipped with for driving Y-direction force pieces of the X to mounting plate；The X is equipped with to mounting plate and uses
In driving lens assembly X to force piece；
The lens assembly is slidably connected in mounting plate, and X is equipped with the Z that vertical direction adjusts lens assembly to mounting plate with X
To regulating part.
4. a kind of automatic contraposition device according to claim 1, which is characterized in that the upper film mechanism or lower film machine
Structure is equipped with elevating mechanism；The elevating mechanism includes being used to support film mechanism or lower film mechanism and being fixed on mounting bracket
Several guide parts, the vertical force piece for driving upper film mechanism or lower film mechanism to move up and down；The upper film
Bolster is equipped between mechanism or lower film mechanism and mounting bracket；
The upper film mechanism or lower film mechanism are equipped with horicontal motion mechanism；The horicontal motion mechanism is equipped with and elevator
The level board that structure is fixedly connected, and the upper film mechanism or lower film mechanism are slidably connected with level board；The level board is set
It is useful for the horizontal power part for driving film mechanism or the horizontal movement of lower film mechanism.
5. a kind of exposure sources with automatic contraposition device, which is characterized in that including rack, any one of Claims 1-4 institute
The automatic contraposition device stated is fixed on the discharge mechanism of rack feed end and is fixed on the receiving mechanism of frame discharge end；It is described
Rack, which is bordering on the upside of the upper film mechanism of automatic contraposition device, is equipped with upper light source mechanism, is bordering on lower film mechanism and is equipped with lower light source machine
Structure.
6. a kind of exposure sources with automatic contraposition device according to claim 5, which is characterized in that the blowing
Mechanism, receiving mechanism are equipped with the support plate for being fixed on rack, and rotation is connected in the bearing of support plate, and rotation is connected in bearing one
The expansion assembly of side, and the expansion power part for driving expansion assembly rotary motion；
Wherein, expansion assembly includes rotating the hollow shaft coupled with bearing, is fixedly linked in hollow shaft and is distal to bearing one end
Main axis of dilatation；Hollow shaft and the expansion power part driving coupling, and through-hole is equipped on the inside of hollow shaft；It is equipped on the inside of the main axis of dilatation
Inner cavity；The main axis of dilatation periphery is equipped with the movable block of several and inner cavity unicom, and movable block is wedge structure；The inner cavity is set
There is the tapered expansion block of reciprocating motion；Tapered expansion block one end couples with the expansion pull rod being equipped with；The expansion pull rod passes through
Reach through hole and extend to hollow shaft outer end so that with equipped with pull rod force piece driving coupling；
The pull rod force piece drives tapered expansion block to be moved back and forth in inner cavity by expanding pull rod, the taper surface of tapered expansion block
It is mutually slidably connected with the lozenges of movable block, to push movable block radial motion.
7. a kind of exposure sources with automatic contraposition device according to claim 5, which is characterized in that further include being bordering on
The material pulling mechanism of automatic contraposition device discharge end setting；The material pulling mechanism includes bottom plate, is fixedly linked in the clamping group of bottom plate
Part, the drawing material force piece for driving clamp assemblies to move back and forth, and it is used to support several support wheels of base material；The drawing material
Force piece by equipped with drawing material lead screw drive clamp assemblies move back and forth；
The clamp assemblies include the movable plate being slidably connected in bottom plate, are slidably connected the grip block in movable plate, and with clamping
The clamping force piece of plate driving coupling；The gap by base material being equipped between the movable plate and grip block；
The clamping force piece drives grip block to be moved towards movable plate will be clamped by the base material in gap, and by with drawing
The drawing material lead screw driving clamp assemblies movement for expecting force piece driving coupling, so that base material moves.
8. a kind of exposure sources with automatic contraposition device according to claim 5, which is characterized in that further include being set to
The dedusting mechanism of automatic contraposition device feed end；The dedusting mechanism includes the dedusting frame for being fixed on rack, is fixed on dedusting frame
The dedusting force piece of upside, driving coupling is in the press nips of dedusting force piece power output end, and is set on the downside of press nips
Fast pulley group；The press nips, fast pulley group are equipped with several dedusting idler wheels contacted with base material；
The dedusting force piece drives press nips to be moved towards fast pulley group, and dedusting idler wheel is contacted and compressed with substrate surface, with
Dedusting idler wheel is set to take away sundries.
9. a kind of automatic aligning exposure method, which is characterized in that include the following steps：
Step 1 opens air purifying mechanism, and adjusts suitable humidity and temperature；After discharge mechanism rotates blowing, base material exists
Under the action of material pulling mechanism, passes through electrostatic precipitation stick respectively and electrostatic is eliminated to base material；Dedusting mechanism is dusted substrate surface；
Step 2 opens vacuum source, and lower film mechanism and the transparent panel of upper film mechanism are inhaled film film by vacuum
It is attached to transparent panel side；It eliminates the base material after electrostatic and dedusting and enters automatic contraposition device, and in lower film mechanism and upper phenanthrene
Between the transparent panel of woods mechanism；The feeding pressure mechanism at automatic contraposition device both ends compresses base material, prevents from shifting；
Step 3, after fixing substrate, upper film mechanism is driven by elevating mechanism to precalculated position, and lower film mechanism is failure to actuate；Under
Film mechanism is aligned on the basis of base material, and then four lens assemblies of lower lens mechanism are moved to the MARK points at four angles
Position carries out Image Acquisition, after computer system operation, sends signal instruction and controls lower film mechanism to Power Component
It is moved to target location；Lower film mechanism examines after the completion of acting for the first time using school, and lens assembly takes again mutually confirms lower film machine
Whether the MARK of structure and base material points are completely superposed, and such as not up to require, then pass through multiple Image Acquisition, position correction, until right
Until position is completely superposed；
Step 4 is aligned after the contraposition of lower film mechanism on the basis of upper following film mechanism of film mechanism, upper lens mechanism
The external MARK points position that lens assembly is moved to lower film mechanism carries out Image Acquisition, after computer system operation, moves
Power component drives film mechanism to complete contraposition action；
Step 5, after the completion of upper film mechanism is aligned with lower film mechanism, upper lens mechanism is moved to exposure with lower lens mechanism
Light region exterior；Upper film mechanism declines or lower film mechanism rises, and the transparent panel of upper film mechanism and lower film mechanism is mutual
It is close, until being fitted in base material both sides completely；Open vacuum source, in extraction the transparent panel of film mechanism and lower film mechanism it
Between air, so that the transparent panel of base material both sides is bonded completely, do not stay bubble；
Step 6, light source mechanism and lower light source mechanism in opening, and light source mechanism is moved to precalculated position, so as to be exposed to base material
Light；After the completion of exposure, feeding pressure mechanism unclamps base material, and upper film mechanism separates with lower film mechanism and is moved to standby position；
Step 7, the base material after the pulling exposure of material pulling mechanism, and after the electrostatic rod in receiving mechanism front end is set to exposure
Base material carries out elimination electrostatic, and receiving mechanism carries out rewinding to the base material after exposure, and next section of base material to be exposed is made to enter
To exposure area；After base material to be exposed enters automatic contraposition device, continue as above-mentioned step, until roll base material has exposed
Finish.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710455414.7A CN107024842B (en) | 2017-06-16 | 2017-06-16 | A kind of automatic contraposition device and exposure sources and its exposure method |
| CN201810443120.7A CN108646525B (en) | 2017-06-16 | 2017-06-16 | Automatic alignment device with lifting mechanism and exposure equipment thereof |
| CN201810442581.2A CN108614397B (en) | 2017-06-16 | 2017-06-16 | Automatic alignment device with lower lens mechanism and exposure equipment thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710455414.7A CN107024842B (en) | 2017-06-16 | 2017-06-16 | A kind of automatic contraposition device and exposure sources and its exposure method |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810443120.7A Division CN108646525B (en) | 2017-06-16 | 2017-06-16 | Automatic alignment device with lifting mechanism and exposure equipment thereof |
| CN201810442581.2A Division CN108614397B (en) | 2017-06-16 | 2017-06-16 | Automatic alignment device with lower lens mechanism and exposure equipment thereof |
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| Publication Number | Publication Date |
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| CN107024842A CN107024842A (en) | 2017-08-08 |
| CN107024842B true CN107024842B (en) | 2018-11-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810443120.7A Active CN108646525B (en) | 2017-06-16 | 2017-06-16 | Automatic alignment device with lifting mechanism and exposure equipment thereof |
| CN201810442581.2A Active CN108614397B (en) | 2017-06-16 | 2017-06-16 | Automatic alignment device with lower lens mechanism and exposure equipment thereof |
| CN201710455414.7A Active CN107024842B (en) | 2017-06-16 | 2017-06-16 | A kind of automatic contraposition device and exposure sources and its exposure method |
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| CN201810442581.2A Active CN108614397B (en) | 2017-06-16 | 2017-06-16 | Automatic alignment device with lower lens mechanism and exposure equipment thereof |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108255029A (en) * | 2018-03-09 | 2018-07-06 | 广东华恒智能科技有限公司 | A kind of sided exposure machine and its exposure method |
| CN110737176B (en) * | 2018-07-20 | 2024-07-09 | 深圳市三字自动化设备有限公司 | Working method of automatic alignment exposure machine |
| CN109683446A (en) * | 2019-01-30 | 2019-04-26 | 广东华恒智能科技有限公司 | A kind of exposure device |
| CN109739071A (en) * | 2019-01-30 | 2019-05-10 | 广东华恒智能科技有限公司 | A kind of roll-to-roll Full-automatic exposure machine |
| CN110972402B (en) * | 2019-11-19 | 2020-11-06 | 信丰福昌发电子有限公司 | A automatic alignment exposure equipment for HDI circuit board inlayer dry film |
| CN112731771B (en) * | 2020-12-30 | 2023-06-02 | 中山新诺科技股份有限公司 | Novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine |
| CN112904678B (en) * | 2021-01-14 | 2022-06-10 | 广东华恒智能科技有限公司 | Vertical roll-to-roll exposure equipment |
| CN116360225B (en) * | 2023-03-17 | 2024-02-06 | 广东科视光学技术股份有限公司 | Double-sided PCB exposure machine and online automatic alignment device thereof |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN108614397B (en) | 2020-11-17 |
| CN107024842A (en) | 2017-08-08 |
| CN108614397A (en) | 2018-10-02 |
| CN108646525A (en) | 2018-10-12 |
| CN108646525B (en) | 2020-05-12 |
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