CN107014771B - A method of improving MEMS near infrared spectrometer resolution ratio - Google Patents
A method of improving MEMS near infrared spectrometer resolution ratio Download PDFInfo
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- CN107014771B CN107014771B CN201710138488.8A CN201710138488A CN107014771B CN 107014771 B CN107014771 B CN 107014771B CN 201710138488 A CN201710138488 A CN 201710138488A CN 107014771 B CN107014771 B CN 107014771B
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Abstract
The invention discloses a kind of methods for improving MEMS near infrared spectrometer resolution ratio, extend micro mirror moving distance by high voltage, using effective control method, are finally reached the effect for increasing resolution ratio.Quadrant division and variable pairing are carried out to micro mirror deflection angle and driving voltage first, simplify the design of decoupling control；Then the pid algorithm with dead zone is utilized to solve the problems, such as micro mirror because of repeatability reduction caused by controlling shake；Control precision of the micro mirror within the scope of total travel ensure that using segmentation variable gain PID algorithm；The hardware PID controller finally built using FPGA improves the real-time of control system.The present invention improves the resolution ratio of spectrometer by expanding drive voltage range, and the resolution ratio of spectrometer is effectively increased while keeping absorbance repeatability, provides reliable guarantee for property analysis modeling and forecasting.
Description
Technical field
The present invention relates to the automatic controls of MEMS (MEMS), specially a kind of to be improved using automatic control technology
The method of MEMS near infrared spectrometer resolution ratio.
Background technique
Near infrared spectrometer is widely used in property is quickly analyzed, such as in petroleum and petrochemical fields, crude oil, distillate and
The property of product oil, which quickly detects, all be unable to do without near infrared spectrometer.Current near infrared spectrometer is generally all in laboratory environment
Lower use, volume is larger, and portability is poor.
MEMS technology starts in recent years in the Miniaturization Design near infrared spectrometer.MEMS technology is varied,
In, a kind of MEMS near infrared spectrometer based on Fourier transform principle drives micromirror movements using thermal expansion principle, by outer
Making alive generates the movement of joule thermal drivers micro mirror beam arm, and this beam arm is generally made of multilayer material, is internally embedded resistive layer work
For heater use.
The resolution ratio of Fourier transformation type near infrared spectrometer is related with the moving distance of micro mirror, and moving distance is bigger, point
Resolution is higher.However, when the moving distance of MEMS micromirror increases, since factors, the micro mirror such as non-linear of manufacturing process are being transported
Deflection angle can also change therewith during dynamic, substantially reduce so as to cause the absorbance repeatability of spectrometer, this makes unilateral
Increase resolution ratio and loses meaning.How keep repeatability while improve resolution ratio, it has also become MEMS near infrared spectrometer is ground
Study carefully a critical issue of development.
Summary of the invention
For the limitation for solving above-mentioned technology, the invention proposes a kind of resolutions of raising MEMS near infrared spectrometer
The method of rate increases micro mirror moving distance using the method for expanding drive voltage range, and prevents micro mirror from existing using control algolithm
Entire moving range intrinsic deflection angle is excessive, and then achievees the purpose that improve spectral resolution, the specific steps are as follows:
1) direction micro mirror x deflection angle theta is carried outx, the direction y deflection angle thetay, with driving voltage U1、U2、U3And U4Between relationship
Test；
2) test result is analyzed, carries out four-quadrant division, and then complete variable pairing；
3) control interval division is carried out according to test result, it is whole carries out pid control parameter respectively in different control intervals
It is fixed；
4) in control process, if deviation is located in dead zone range, the output of controller is remained unchanged；Otherwise according to difference
Control interval carry out variable gain PID control respectively.
Preferably, micro mirror deflection angle is carried out under the different driving voltage of multiple groups respectively and the relationship of voltage is tested, to become
Amount pairing and interval division provide foundation.
Specifically, the relationship test refers to: driving voltage U1、U2、U3And U4Respectively three under different grades of voltage
Driving voltage is constant, applies small Positive-Negative Action voltage to the 4th driving voltage, records the behavior to micro mirror deflection angle
It influences.
For simplify MEMS micromirror deflection angle and driving voltage matching relationship, according under different driving voltage micro mirror deflect
The relationship at angle and driving voltage carries out four-quadrant division to micro mirror deflection angle, and carries out variable pairing respectively according to different quadrants.
More preferably, it using field programmable gate array, designs hardware PID controller and realizes control.The present invention is using scene
Programmable gate array (FPGA) realizes programming Control, and utilizes a hardware PID controller of eda tool Optimum Synthesis, to improve
The real-time of control.
Specifically, to reduce the influence because of control bring shake to repeatability, using the Digital PID Algorithm control with dead zone
The deflection angle of micro mirror processed, control formula are as follows:
In formula, ekIt is deflection angle target value θ*With deflection angle current value θkDeviation, ek=θ*-θk；e0For dead zone, according to tool
Body is actually adjustable.
Specifically, using variable-gain according to different stroke ranges to guarantee control precision of the micro mirror in entire stroke
Digital PID Algorithm,
In formula, ukCurrently to control output valve；ekAnd ek-1The angular deviation of respectively current and last sampling instant；uo
For the initial value of control；kp, kI, kDRespectively ratio, integral, differential coefficient, specific value is according to different stroke range point
It does not adjust.
Driving voltage is in 0~2V, kp=0.55, kI=0.025, kD=0；Driving voltage is in 2V or more, kp=
0.38, kI=0.021, kD=0.
The utility model has the advantages that
The invention discloses a kind of methods for improving MEMS near infrared spectrometer resolution ratio, extend micro mirror by high voltage
Moving distance, and then achieve the effect that increase resolution ratio.In micro mirror moving process, divided, using variable quadrant with dead zone
The measures such as pid algorithm, segmentation variable gain PID, and the hardware PID controller based on FPGA, are keeping absorbance repeatability
Meanwhile the resolution ratio of spectrometer is effectively increased, reliable guarantee is provided for property analysis modeling and forecasting.
Detailed description of the invention
Fig. 1 is influence schematic diagram of the driving voltage to deflection angle
Fig. 2 is the implementation flow chart of control method of the present invention
Case is embodied
The present embodiment selects the MEMS micromirror of double layer material activation configuration, is driven respectively by driving voltage U1, U2, U3 and U4
Four beam arms of dynamic micro mirror, as shown in Figure 1.The present invention is described further with reference to the accompanying drawings and embodiments.
When four voltages of micro mirror are identical, theoretically the light of the center point reflection of micro mirror should be projected in coordinate
The origin of system.When some voltage increases, if U1 increases (see the upper left corner of micro mirror in Fig. 1), then it is heated by the beam arm that U1 drives
Expansion will push micro mirror to travel forward.At this point, the light of the center point reflection of micro mirror will no longer if other voltages are constant
Origin in coordinate system.As seen from Figure 1, the variation of any voltage can all have an impact the direction x and the direction y, that is, implement
When automatic control, there are coupled problems between variable.
The implementing procedure of entire control method is as shown in Figure 2.To solve coupled problem, and the design of simplified control system,
Driving voltage is carried out first to test the relationship of MEMS micromirror deflection angle, apply under different grades of voltage respectively it is small just
Bucking voltage, log.Table 1 has recorded driving voltage variation to θxInfluence.
1 driving voltage of table and θxRelationship test
Table 2 has recorded driving voltage variation to θyInfluence.
2 driving voltage of table and θyRelationship test
Seen from table 1, regardless of under great basic voltage, U1 is to θxAmplification factor be all positive, even discovery θxPartially
Greatly, then it can be controlled by reducing U1.It can be obtained in conjunction with table 1 and the analysis of 2 data of table:
If θx> 0 can then be reduced by U1, U2 increases, U3 increases, U4 reduction is adjusted；
If θx< 0 can then be increased by U1, U2 reduces, U3 reduces, U4 increase is adjusted；
If θy> 0 can then be increased by U1, U2 reduces, U3 increases, U4 reduction is adjusted；
If θy< 0 can then be reduced by U1, U2 increases, U3 reduces, U4 increase is adjusted.
According to above-mentioned rule, carrying out division processing further according to four quadrants can be obtained:
In Ith quadrant: i.e. θx> 0, θy> 0 can then be adjusted by U3, U4；
In Section II quadrant: i.e. θx< 0, θy> 0 can then be adjusted by U1, U2；
In IIIth quadrant: i.e. θx< 0, θy< 0 can then be adjusted by U3, U4；
In IVth quadrant: i.e. θx> 0, θy< 0 can then be adjusted by U1, U2.
To sum up, U3, U4 control are used in the Ith, III quadrant；U1, U2 control are then used in Section II, IV quadrant.By
After above-mentioned quadrant divides, the variable pairing of control system is simplified.
During eliminating micromirror movements, since fine jitter caused by frequently controlling is possible to spectrum repeatability
It is as follows to control formula using the Digital PID Algorithm with dead zone for adverse effect:
In formula, ekIt is deflection angle target value θ*With deflection angle current value θkDeviation, ek=θ*-θk；e0It is dead zone, is adjustable
Parameter is set as 0.001 ° in the present embodiment, it may be assumed that when angular deviation is less than 0.001 °, the current output u of PID controllerkIt protects
Hold it is constant, be last time output valve uk-1。
In addition, further analysis Tables 1 and 2 is as it can be seen that in different basic voltage ranges, driving voltage puts deflection angle
Big multiple is different.With the U1 in table 1 to θxFor, in 2V basic voltage hereinafter, the average value of amplification factor is
(0.391+0.411+0.252+0.247+0.444+0.506+0.326+0.310)/8=0.361
It is calculated using same method, amplification factor average value more than 2.5V basic voltage is 0.522.
That is, micro mirror, in different motion range, gain is variation.When in view of micro mirror grand movement
Non-linear factor, if be difficult to only with one group of pid parameter in a wide range of interior guarantee control effect.For this purpose, the present embodiment also into
The control interval gone under different voltages divides.According to table 1 and table 2, voltage range is divided into 0~2V and 2V two above area
Section.The formula of Digital PID Algorithm is as follows:
In formula, ukCurrently to control output valve；ekAnd ek-1The angular deviation of respectively current and last sampling instant；uo
For the initial value of control；kp, kI, kDRespectively proportional integral differential coefficient, using one group of PID ginseng in 0~2V voltage range
Number, respectively k2p=0.55, k2I=0.025, k2D=0；Another group of pid parameter, respectively k are used in 2V or more voltage range1p
=0.38, k1I=0.021, k1D=0.
For the real-time for further increasing control system, Verilog HDL programming is carried out, the FPGA such as Quartus II are utilized
Tool optimizes comp comprehensive layout, generates a hardware PID controller.The FPGA working frequency that the present embodiment uses is reachable
100MHZ or more, compared with traditional microcontroller, using FPGA operation the hardware PID controller speed of service faster, stablize
Property is more preferable, effectively increases the real-time and anti-interference ability of system.
In the present embodiment, the method proposed by the present invention for improving MEMS near infrared spectrometer resolution ratio can be by micro mirror
Deflection angle controls while 0.01 ° of range, and the resolution ratio of spectrometer is stablized in 64 wave number (cm-1) within.It both keeps in this way
Good repeatability, and effectively increase the resolution ratio of spectrometer.
Above-described embodiment is put before this invention to be implemented, but protection scope of the present invention is not limited to above-mentioned implementation
Example.
Claims (4)
1. a kind of method for improving MEMS near infrared spectrometer resolution ratio, which is characterized in that using expansion driving voltage
The method of range increases micro mirror moving distance, and prevents micro mirror excessive at entire moving range intrinsic deflection angle using control algolithm,
And then achieve the purpose that improve spectral resolution, the specific steps are as follows:
1) direction micro mirror x deflection angle theta is carried outx, the direction y deflection angle thetay, with driving voltage U1、U2、U3And U4Between relationship test,
The relationship for carrying out micro mirror deflection angle and voltage under the different driving voltage of multiple groups respectively is tested, and is variable pairing and interval division
Foundation is provided, the relationship test refers to: driving voltage U1、U2、U3And U4Three driving electricity under different grades of voltage respectively
It presses constant, small Positive-Negative Action voltage is applied to the 4th driving voltage, record applies small Positive-Negative Action voltage behavior
Influence to micro mirror deflection angle；
2) test result is analyzed, carries out four-quadrant division, and then complete variable pairing；
3) control interval division is carried out according to test result, carries out pid control parameter adjusting respectively in different control intervals；
4) in control process, if deviation is located in dead zone range, the output of controller is remained unchanged；Otherwise according to different controls
Section processed carries out variable gain PID control respectively.
2. a kind of method for improving MEMS near infrared spectrometer resolution ratio according to claim 1, feature exist
In using field programmable gate array, design hardware PID controller realizes control.
3. a kind of method for improving MEMS near infrared spectrometer resolution ratio according to claim 1, feature exist
In to reduce the influence because of control bring shake to repeatability, using the deflection of the Digital PID Algorithm control micro mirror with dead zone
Angle, control formula are as follows:
In formula, ekIt is deflection angle target value θ*With deflection angle current value θkDeviation, ek=θ*-θk；e0For dead zone, according to specific reality
Border is adjustable.
4. a kind of method for improving MEMS near infrared spectrometer resolution ratio according to claim 3, feature exist
In, the Digital PID Algorithm of variable-gain is used according to different stroke ranges,
In formula, ukCurrently to control output valve；ekAnd ek-1The angular deviation of respectively current and last sampling instant；uoFor control
The initial value of system；kp, kI, kDRespectively ratio, integral, differential coefficient, specific value are whole according to different stroke range difference
It is fixed.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201569787U (en) * | 2009-12-18 | 2010-09-01 | 华中科技大学 | High speed control piezoelectric scanning device |
| CN102914417A (en) * | 2012-09-14 | 2013-02-06 | 无锡微奥科技有限公司 | Automatic test system and method of electric micromirror |
| CN103543742A (en) * | 2013-10-23 | 2014-01-29 | 北京七星华创电子股份有限公司 | Self-correcting method device for temperature control and time delay system for LPCVD equipment |
| CN104684841A (en) * | 2012-06-13 | 2015-06-03 | 普渡研究基金会 | Microelectromechanical system and methods of use |
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2017
- 2017-03-09 CN CN201710138488.8A patent/CN107014771B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201569787U (en) * | 2009-12-18 | 2010-09-01 | 华中科技大学 | High speed control piezoelectric scanning device |
| CN104684841A (en) * | 2012-06-13 | 2015-06-03 | 普渡研究基金会 | Microelectromechanical system and methods of use |
| CN102914417A (en) * | 2012-09-14 | 2013-02-06 | 无锡微奥科技有限公司 | Automatic test system and method of electric micromirror |
| CN103543742A (en) * | 2013-10-23 | 2014-01-29 | 北京七星华创电子股份有限公司 | Self-correcting method device for temperature control and time delay system for LPCVD equipment |
Non-Patent Citations (1)
| Title |
|---|
| 电热式MEMS微镜驱动控制技术研究;章皓等;《中国优秀硕士学位论文全文数据库》;20150215;全文 |
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