CN106990478B - Light polarization rotator - Google Patents
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- CN106990478B CN106990478B CN201710289491.XA CN201710289491A CN106990478B CN 106990478 B CN106990478 B CN 106990478B CN 201710289491 A CN201710289491 A CN 201710289491A CN 106990478 B CN106990478 B CN 106990478B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
Abstract
The invention provides a light polarization rotator, wherein two ends of the light polarization rotator in the length direction are respectively a light input end and a light output end, and the part between the light input end and the light output end on the light polarization rotator is a polarization rotation area; the polarization rotation region is a channel waveguide with a concave cross section. The polarization rotator can realize polarization rotation under the ultra-small size of 0.725 mu m multiplied by 6.46 mu m. The light polarization rotator has low requirements on processing technology, and the minimum line width to be processed in the structure can be more than or equal to 200nm, so that the mass processing production can be completed by adopting the currently popularized and commercial middle-low-end 0.18 mu m micro-nano processing technology, thereby having the characteristic of low cost and having high application value in the field of integrated photoelectron.
Description
Technical Field
The invention relates to the field of integrated optoelectronic devices, in particular to a light polarization rotator.
Background
Polarization is an inherent property of light that has two polarization states, Transverse Electric (TE) and Transverse Magnetic (TM), in integrated optical waveguides. Polarization Rotator (Polarization Rotator), i.e. for use between the fundamental modes of two Polarization states (TE)0And TM0) Mode conversion is performed. However, the integrated optical waveguide belongs to a planar waveguide, and the polarization maintaining characteristic of the integrated optical waveguide is very good, and it is very difficult to change the optical axis of the mode in the planar waveguide, so that the integrated polarization rotator is also a research hotspot and difficulty in the field of integrated photoelectronics in the world in recent years.
At present, various structural schemes are available in the field, and the schemes can realize the polarization rotation function, but are difficult to be practical due to processing technology problems. The side wall inclined waveguide structure requires a special photolithography process; the characteristic size of the local shallow etching type waveguide is 70nm or less; most of the width-graded asymmetric waveguides need additional cladding treatment to realize the asymmetry of the waveguide in the thickness direction, and the scheme can lead the length of the device to reach hundreds of micrometers or even longer; the directional coupler type scheme is very sensitive to process errors; the hybrid surface plasmon waveguide requires special process treatment and the device loss is large. In summary, there is no reliable polarization rotator solution available for processing using commercially available integrated optoelectronic standard tape-out processes.
Therefore, how to design a light polarization rotator which does not affect the polarization rotation precision and has low requirements on the processing technology is a problem to be solved urgently.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the light polarization rotator which reduces the difficulty and cost of a processing process through the arrangement of a novel structure, improves the precision of realizing light polarization rotation, realizes quick and reliable batch processing production of the polarization rotator, and ensures the precision of light polarization rotation while batch processing production.
In order to solve the technical problems, the invention provides the following technical scheme:
the invention provides a light polarization rotator, wherein two ends of the light polarization rotator in the length direction are respectively a light input end and a light output end, and the part between the light input end and the light output end on the light polarization rotator is a polarization rotation area;
the polarization rotation region is a channel waveguide with a concave cross section.
Further, the light input end is an input strip waveguide, and the input strip waveguide is in conduction connection with one end of the channel waveguide shaped like a Chinese character 'ao'.
Further, a waveguide mode converter for conducting and connecting the strip waveguide for input and the groove waveguide is arranged between the strip waveguide for input and the groove waveguide.
Further, the waveguide mode converter is a multi-mode interference type waveguide mode converter;
the multimode interference waveguide mode converter includes: a multimode waveguide region and a channel waveguide region with gradually changed width;
one end of the multimode waveguide region is used for connecting an input waveguide, the other end of the multimode waveguide region is connected with one waveguide end face of the groove waveguide region with the gradually-changed width, and the other waveguide end face of the groove waveguide region with the gradually-changed width is used for connecting a polarization rotation region; the cross section shape of the end face of the waveguide mode converter used for connecting the waveguide rotating region is the same as that of the polarization rotating region.
Further, the light output end comprises two strip waveguides for output, and the two strip waveguides for output are respectively connected with the other end of the channel waveguide in the shape of the Chinese character 'ao' far away from the light input end in a conduction manner.
Further, light is input from the output terminal and output from the input terminal.
Further, the output strip waveguide includes: phase shift region, coupling region, output region;
two beams of light output to the two output strip waveguides through the concave channel waveguide generate phase difference through the phase shift region, are mutually coupled through the coupling region, and are output from the output end of the output strip waveguide.
Further, the optical polarization rotator is a dielectric, semiconductor or organic material waveguide.
Further, the dielectric is silicon dioxide, titanium dioxide or gallium oxide.
Further, the semiconductor is silicon, germanium, silicon nitride or a III-V optoelectronic compound material, and the III-V optoelectronic compound material is indium phosphide or gallium nitride.
According to the technical scheme, the two ends of the light polarization rotator in the length direction are respectively a light input end and a light output end, and the part between the light input end and the light output end on the light polarization rotator is a polarization rotation area; the polarization rotation region is a channel waveguide with a concave cross section, and the length directions of the channel waveguide and the light input end are the same; the invention can realize polarization rotation within the size of a few micrometers, has low requirement on the processing technology, and the minimum line width to be processed in the structure can be more than or equal to 200nm, so that the mass processing production can be completed by adopting the middle-low end 0.18 mu m micro-nano processing technology which is popularized and used at present, thereby having the characteristic of low cost and having high application value in the field of integrated photoelectron.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic diagram of a first embodiment of a light polarization rotator of the present invention.
Fig. 2 is a schematic diagram of a second embodiment of a light polarization rotator of the present invention.
Fig. 3 is a schematic diagram of a rectangular transition structure of a waveguide mode converter 40 of the present invention.
Fig. 4 is a schematic view of a streamlined transition structure of the waveguide mode converter 40 of the present invention.
Fig. 5 is a schematic view of a straight transition structure of the waveguide mode converter 40 of the present invention.
Fig. 6 is a schematic diagram of a structure in which an optical output terminal 30 of the present invention is connected to an output strip waveguide 31.
Fig. 7 is a schematic diagram of a structure in which two output strip waveguides 31 are connected to an optical output terminal 30 according to the present invention.
Fig. 8 is a schematic structural diagram of one embodiment of two output strip waveguides 31 of the present invention.
Fig. 9 is a schematic view of the structure of a channel waveguide 20 of a zigzag type in an application example of the present invention.
Fig. 10 is a schematic view of an eigenmode analysis of a notch channel waveguide in an application example of the present invention.
Fig. 11 is a schematic diagram of the structure of the input stripe waveguide 11 in the application example of the present invention.
Fig. 12 is a schematic structural view of a waveguide mode converter 40 in an application example of the present invention.
Fig. 13 is a light field distribution diagram of a polarization rotator in example one of application examples of the present invention.
Fig. 14 is a light field distribution diagram of a polarization rotator in example two of the application examples of the present invention.
10-a light input end; 11-input strip waveguide; 20-notch channel waveguide; 30-a light output end; 31-output strip waveguide; 311-phase shifting regions; 313-an output area; 312-a coupling region; 40-waveguide mode converter.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment of the present invention discloses a first specific implementation manner of a light polarization rotator, which specifically includes the following contents, referring to fig. 1:
the both ends on the length direction of light polarization rotator are light input end 10 and light output end 30 respectively, just the part between light input end 10 and the light output end 30 on the light polarization rotator is polarization rotation region.
In the above description, the general structure of the optical polarization rotator for the fundamental mode (TE) in two polarization states is a structure extending in the length direction, and the portion of the structure that performs the polarization rotation function is the polarization rotation region between the optical input end 10 and the optical output end 30, according to the practical application0And TM0) The light enters the polarization rotation region from the light input end 10, and is output through the light output end 30 after polarization rotation; additionally, the optical polarization rotator is a dielectric, semiconductor or organic material waveguide; the dielectric medium is silicon dioxide, titanium dioxide or gallium oxide; the semiconductor is silicon, germanium, silicon nitride or a III-V family photoelectronic compound material, and the III-V family photoelectronic compound material is indium phosphide or gallium nitride.
The polarization rotation region is a channel waveguide 20 having a cross section in a recessed shape.
In the above description, the channel waveguide 20 of the shape of Chinese character 'ao' is formed by removing a part of waveguide material in the middle of the strip waveguide 11 by shallow etching, and the depth of the removed part is less than the total thickness of the waveguide. Furthermore, in the whole structure of the light polarization rotator, the minimum line width required to be processed in processing can be more than or equal to 200nm, so that the light polarization rotator can be processed and produced in batch by adopting the currently popular and commercial middle and low-end 0.18-micron micro-nano processing technology, and can realize polarization rotation under the ultra-small size of 0.725-6.46 microns.
As can be seen from the above description, the embodiments of the present invention provide a light polarization rotator with a novel structure, which reduces the difficulty and cost of the manufacturing process through the structural arrangement, improves the precision of the light polarization rotator, realizes fast and reliable mass production of the polarization rotator, and ensures the precision of the light polarization rotator during the mass production.
The second embodiment of the present invention discloses a second specific implementation manner of a light polarization rotator, which specifically includes the following components, with reference to fig. 2:
the light input end 10 is an input strip waveguide 11, and the input strip waveguide 11 is connected with one end of the channel waveguide 20 in the shape of the Chinese character 'ao'; a waveguide mode converter 40 for conducting and connecting the input strip waveguide 11 and the concave channel waveguide 20 is arranged between the two, and the waveguide mode converter is a multi-mode interference type optical polarization rotator.
In the above description, in practical applications, the waveguide mode converter 40 only needs to be capable of realizing the conductive connection between the input stripe waveguide 11 and the channel waveguide 20 in the shape of Chinese character 'ao', and therefore, the structure of the waveguide mode converter 40 may be a rectangular transition structure as shown in fig. 3, a streamline transition structure as shown in fig. 4, or a straight transition structure as shown in fig. 5; accordingly, the width of the two ends of the waveguide mode converter 40 is sufficient to ensure that the light at the light input end 10 can completely enter the recessed channel waveguide 20 and the light in the recessed channel waveguide 20 can enter the light output end 30. in a preferred implementation, the width of one end of the waveguide mode converter 40 for connecting the input strip waveguide 11 is the same as the width of the input strip waveguide 11, the width of the other end of the waveguide mode converter 40 for connecting the recessed channel waveguide 20 is the same as the total width of the recessed channel waveguide 20, and the cross-sectional shape of the waveguide mode converter 40 for connecting the other end of the recessed channel waveguide 20 is the same as the cross-sectional shape of the recessed channel waveguide 20.
As can be seen from the above description, the embodiments of the present invention adopt the waveguide mode converter to connect two waveguides, so as to improve the polarization rotation performance of the optical polarization rotator.
In a specific implementation manner, the light output end 30 may be provided with only one output strip waveguide 31, as shown in fig. 6, and the output strip waveguide 31 may be connected to any one of two ends of the light output end 30, and the application scenario of the light polarization rotator provided with only one output strip waveguide 31 is the case of only one output waveguide in a certain working environment.
On the contrary, in another more preferred embodiment, as shown in fig. 7, the light output end 30 includes two output strip waveguides 31 symmetrically arranged and having the same length direction, and the two output strip waveguides 31 are respectively conductively connected to the other ends of the channel waveguides 20 away from the light input end 10; the application scenario of the optical polarization rotator with two output strip waveguides 31 is that two output waveguides are needed in a certain working environment, and the application scenario is also applicable to the case that only one output waveguide is needed in a certain working environment, that is, only the output waveguide of one output strip waveguide 31 needs to be obtained, and the optical power of the other output strip waveguide 31 is not processed.
As can be seen from the above description, the embodiments of the present invention provide a non-setting manner and an application manner of the light output end 30, and improve the applicability of the light polarization rotator while ensuring the accuracy of the output light of the light polarization rotator.
In a specific implementation manner, based on the case that the light output end 30 includes two output strip waveguides 31 that are axisymmetrically arranged and have the same length direction, the two output strip waveguides 31 shown in fig. 8 may specifically include: a phase shift region 311 for connecting with the channel waveguide 20 of a zigzag shape, an output region 313 for outputting light, and a coupling region 312 conductively connecting the phase shift region 311 and the output region 313; two beams of light output to the two output strip waveguides 31 through the channel waveguides 20 in the shape of Chinese character 'ao' are first subjected to phase difference by the phase shift region 311, then subjected to mutual coupling by the coupling region 312, and then output from the output region 313 of the output strip waveguide 31.
From the above description, it can be seen that the specific implementation of the present invention gives a specific arrangement of the light output end 30, improving the accuracy of the light output.
To further illustrate the present invention, the present invention further provides an application example of a light polarization rotator, which specifically includes the following contents:
the principle of the polarization rotator disclosed by the invention is explained by taking a Silicon-on-insulator (SOI) material platform as an example, wherein the waveguide material is Silicon, the cladding layer and the substrate material is Silicon dioxide. The notch channel waveguide 20 used in this application example is shown in fig. 9, where H is 220nm, H is 70nm, and W isslot200nm is selected according to the standard design rule of an foundational manufacturer, and the waveguide width W is a free variable for optimizing the performance of the device.
When W is 725nm, the waveguide can support 3 eigenmodes, as shown in fig. 10. Wherein the effective refractive index neffThe mode principal transverse light field component is E2.12xAnd HyAnd thus the mode of the TE polarization state, denoted TE0 slotAnd (5) molding. The 4 transverse optical field components of the other 2 modes have equivalent intensity, and no main field component exists, so that the polarization state is a mixed polarization state and is respectively marked as EM1 slotAnd EM2 slotAnd (5) molding.
TM polarization fundamental mode (TM) in input stripe waveguide 110 strip) Has a main transverse light field component of EyAnd Hx. When TM0 stripWhen the light enters the groove waveguide 20, the main transverse optical field component E does not exist in the groove waveguide 20yAnd HxOf (1), hence in TM0 stripMode-input light waves convertible only to EM1 slotAnd EM2 slotThe superposition state of the two modes is propagated. EM1 slotAnd EM2 slotThere is a certain difference in effective refractive index between the two modes, which will produce beat oscillations during propagation. The width of the notch channel waveguide 20 is optimized so that the polarization of the corresponding superimposed state at the beat length position (6.46 μm) of the beat oscillation is the TE polarization. Polarization rotation is then achieved by connecting the output strip waveguide 31 at this position, where the input strip waveguide 11 is shown in fig. 11.
TE polarization fundamental mode (TE) in the input stripe waveguide 110 strip) When the light enters the groove waveguide 20, TE is generated0 stripAnd TE0 slotAre all ExAnd HyAnd thus will be converted to TE0 slotThe mode propagates in the channel waveguide shaped like a Chinese character 'ao'. The TE polarization is still present when the polarization is transmitted to the output strip waveguide 31.
Since there is a certain difference in field distribution between the notch channel waveguide 20 and the input stripe waveguide 11, in the input stripe waveguide 11 in the following example, the waveguide mode converter 40 shown in fig. 12 is used to connect the input stripe waveguide 11 and the notch channel waveguide 20. It should be noted that better performance can be obtained by connecting two waveguides using the waveguide mode converter 40, but this is not a requirement for the application of the present invention, and the waveguide mode converter 40 should not be considered as a limitation for the application of the present invention. Polarization rotation can also be achieved by directly connecting the input stripe waveguide 11 to the channel waveguide 20 in a zigzag shape or by connecting it to another type of waveguide converter.
For example, one:
the light wave output can be realized by connecting 2 mutually symmetrical output strip waveguides 31 to the end of the channel waveguide 20 in the shape of a Chinese character 'ao', as shown in fig. 13. The input and output waveguides are all shown as strip waveguides. In which the transverse field component ExAnd HyCorresponding to the TE polarization state, always appear in pairs, hence H in FIG. 13yIs shown as a representative; transverse field component EyAnd HxCorresponding to the TM polarization state, always appear in pairs, hence E in FIG. 13yIs a generationThe table shows. The fundamental mode of TE polarization (TE) in the strip waveguide, visible from the field distribution0 strip) When the polarization state of the incident light is incident, the TE polarization state is still kept after passing through the polarization rotation region. Subsequently, 2 TE beams having a phase difference of 0 are output from the 2 output strip waveguides 31 symmetrical to each other in the output region0 stripLight waves. TM polarization fundamental mode (TM) in input stripe waveguide 110 strip) When incident, the main transverse field component of the polarization rotation region is EyAnd HxIs converted intoxAnd HyI.e., rotated to the TE polarization state. Subsequently, 2 TE beams having a phase difference of π are output from 2 strip waveguides for output 31 symmetrical to each other in the output region0 stripLight waves.
Example two:
as shown in fig. 14, the input region and the polarization rotation region of the present embodiment are the same as the first example, except that the light output from the two output stripe waveguides 31 in the output region are not output symmetrically to each other; the light waves firstly pass through the phase shift region in the output region, so that a phase difference of pi/2 exists between the two waveguides; then, the light waves in the two output waveguides are coupled with each other through the coupling area; and finally, dividing the waveguide into 2 independent output waveguides at the position where the two waveguides are completely coupled.
The optical field distribution shows that the polarization selection characteristic is the same as the example. With the difference that TE0 stripWhen light waves are incident, the light waves are TE0 stripThe mode is output from the lower output waveguide only; TM0 stripWhen light waves are incident, the light waves are TE0 stripThe mode is output only from the upper output waveguide.
As can be seen from the above description, the application example of the present invention provides a light polarization rotator with a novel structure, which reduces the difficulty, cost and time of the processing process through the structural arrangement, improves the precision of the light polarization rotation, realizes the fast and reliable mass production of the polarization rotator, and ensures the precision of the light polarization rotation during the mass production.
The above examples are only for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A light polarization rotator is characterized in that two ends of the light polarization rotator in the length direction are a light input end and a light output end respectively, and the part between the light input end and the light output end on the light polarization rotator is a polarization rotation area;
the polarization rotation region is a channel waveguide with a concave cross section;
the concave channel waveguide is provided with an eigenmode of a TE polarization state and two eigenmodes of a mixed polarization state;
when the TE polarization fundamental mode exists in the light input end, the TE polarization fundamental mode is converted into the eigenmode of the TE polarization state for propagation when being transmitted to the groove waveguide; when the light input end is a TM polarization fundamental mode, the TM polarization fundamental mode is converted into superposition of eigenmodes of the two mixed polarization states for transmission when being transmitted to the concave channel waveguide.
2. A light polarization rotator according to claim 1, wherein the light input end is an input stripe waveguide, and the input stripe waveguide is conductively connected to one end of the channel waveguide.
3. A light polarization rotator according to claim 2, wherein a waveguide mode converter is provided between the input slab waveguide and the channel waveguide in a zigzag shape for conducting connection therebetween.
4. A light polarization rotator according to claim 3, wherein the waveguide mode converter is a multi-mode interference type waveguide mode converter;
the multimode interference waveguide mode converter includes: a multimode waveguide region and a channel waveguide region with gradually changed width;
one end of the multimode waveguide region is used for connecting an input waveguide, the other end of the multimode waveguide region is connected with one waveguide end face of the groove-shaped channel waveguide region with the gradually-changed width, and the other waveguide end face of the groove-shaped channel waveguide region with the gradually-changed width is used for connecting a polarization rotation region; the waveguide mode converter is used for connecting the cross section shape of the end face of the polarization rotation region with the cross section shape of the polarization rotation region.
5. A light polarization rotator according to claim 1, wherein the light output end is an output strip waveguide.
6. A light polarization rotator according to claim 2 or 5, wherein light is input from the light output end and output from the light input end.
7. The light polarization rotator of claim 5, wherein the output slab waveguide comprises: phase shift region, coupling region, output region;
two beams of light output to the output strip waveguide through the concave channel waveguide generate phase difference through the phase shift region, are mutually coupled through the coupling region, and are output from the output region of the output strip waveguide.
8. A light polarization rotator according to claim 1, wherein the light polarization rotator is a dielectric, semiconductor or organic material waveguide.
9. A light polarization rotator according to claim 8, wherein the dielectric is silicon dioxide, titanium dioxide or gallium oxide.
10. A light polarization rotator according to claim 8 wherein the semiconductor is silicon, germanium, silicon nitride or a group iii-v optoelectronic compound material and wherein the group iii-v optoelectronic compound material is indium phosphide or gallium nitride.
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| CN112904477B (en) * | 2021-03-05 | 2022-05-10 | 东南大学 | Polarization insensitive optical power divider based on shallow etching multimode interference coupler |
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| US9977187B2 (en) * | 2014-05-22 | 2018-05-22 | Sifotonics Technologies Co., Ltd. | Polarization rotator-splitter/combiner based on silicon rib-type waveguides |
| CN204009131U (en) * | 2014-08-25 | 2014-12-10 | 北京大学 | A kind of waveguide mode converter |
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