CN106985261B - The centrifugal pressure method of ITO rotary target green body single side and mold - Google Patents
The centrifugal pressure method of ITO rotary target green body single side and mold Download PDFInfo
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- CN106985261B CN106985261B CN201710224206.6A CN201710224206A CN106985261B CN 106985261 B CN106985261 B CN 106985261B CN 201710224206 A CN201710224206 A CN 201710224206A CN 106985261 B CN106985261 B CN 106985261B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/261—Moulds therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/261—Moulds therefor
- B28B1/262—Mould materials; Manufacture of moulds or parts thereof
- B28B1/264—Plaster
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/265—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor pressure being applied on the slip in the filled mould or on the moulded article in the mould, e.g. pneumatically, by compressing slip in a closed mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/28—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor involving rotation of the mould about a centrifugal axis
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Producing Shaped Articles From Materials (AREA)
Abstract
The centrifugal pressure method of ITO rotary target green body single side and mold, mold is arranged on the rotating platform, its internal cylinder-shaped type chamber that there is one to be used to accommodate slurry, the mold wall of cylinder-shaped type chamber inner side and outer side is equipped with micropore, the cylinder-shaped type of slurry injection mold is intracavitary, while rotating mould forms centrifugal action, compressed air is passed through to cylinder-shaped type is intracavitary through the micropore on the intracavitary side mold wall of cylinder-shaped type, so that single side pressurizes to slurry from inside to outside, the moisture in slurry is discharged through the micropore on cylinder-shaped type chamber outside mould wall, form ITO rotary target green body.By the way of centrifugal injection forming combination single side ventilation pressurization, single side draining, without mending slurry in forming process, it is not in interlayer defect that molding blank structure is uniform, and density also further increases.After molding on the inside of tubular green body will not sticking to mould, demoulding yield rate in this way is higher, and process is also more simply, conveniently.
Description
Technical field
The present invention relates to a kind of rotation ceramic target blank forming method and its used molds, specifically a kind of
The centrifugal pressure method of ITO rotary target green body single side and mold.
Background technique
ITO is the abbreviation title of Tin-doped Indium Oxide, and the meaning of ITO refers to a kind of indium tin oxide material
Material, ITO rotary target green body refer to that the cylindrical blank before the sintering of the rotary target made of indium tin oxide, green body internal diameter are generally
150 ~ 200mm, outer diameter are 165 ~ 220mm, a height of 300 ~ 350mm of cylinder.
The forming method of ITO rotary target green body at present has rubber package set dry powder isostatic cool pressing and usually with common gypsum
For mold filling forming method both.Chinese patent (103787651 A of CN 103193262 A, CN) etc. reports
The method that isostatic cool pressing prepares high-density ITO targe material, green body relatively molding density further increases after isostatic cool pressing, is easy after sintering
Highdensity ITO target is obtained, but hydrostatic pressing has its limitation, if large-size target compacting difficulty is big, the finished product of forming
Rate is low, stability is poor.Rotation target blankss body thickness degree of irregularity is larger after the molding of jacket isostatic pressing method, needs certain processing capacity
Make green body consistency of thickness, for non-net nearly size molding, following process amount is big after molding.Moreover, because ITO target to purity requirement very
Height, and the clout purity after processing is affected, and is difficult to carry out recycling use.Simultaneously isostatic pressing method to mold and press require compared with
Height needs to be equipped with the equipment such as granulation tower, cold isostatic press, invests big, at high cost.Using common gypsum as the injection forming side of mold
When method forms, grouting pressure is usually no more than 0.15MPa, only relies on the moisture content in the pore absorption slurry of gypsum, makes die cavity
Surface is gradually accumulated to form ceramic body, and the density of molding blank is lower.Japan Patent (JP1117136/88, JP117137/
88, JP117138/88) it with the slurry made of indium tin oxide, water, dispersing agent and binder in, injects by gypsum or high score
It is shaped to green body in sub- porous mold, after being demoulded, being dried, isostatic cool pressing need to be carried out to continue growing blank density, process increases
Add and affects production efficiency.And it is low to lead into base rate because de-watering of slurries is slow for this grouting mode itself, and mold is being inhaled
Water reaches a certain level rear water absorbing capacity decline, must dry before reusing, further decrease production efficiency.In addition, rotation
Mould therefor when target blankss body injection forming, generally solid (two-sided) the slip casting mold of form, this forming method is due to being opposite
Two gypsum surfaces absorb water simultaneously, the middle position of institute's molding blank through-thickness easily occur interlayer (with used in slip casting
Raw material is unrelated), particle in slurry gypsum mold adsorption accumulation opposite to two sides simultaneously, in the process among green body
Part forms cavity, needs to continue supplement slurry to fill up cavity and continue to accumulate to two sides, and such cavity, which becomes narrow gradually, to attenuate,
Interlayer defect is ultimately formed until slurry cannot be introduced into.The interlayer in the properties of product such as domestic ceramics, sanitary ware to not having
It influences, but is affected to ITO rotation target performance, by adjusting the granularity and slurry properties of ceramic raw material, interlayer can be mitigated
Performance degree, but be difficult to completely eliminate interlayer defect from technique, stable product quality can be impacted.
Summary of the invention
The technical problem to be solved by the present invention is to overcome rotary target green body slip-casting shaping process green body to be also easy to produce interlayer
Defect, provides that a kind of blank structure is uniform, the centrifugal pressure method of ITO rotary target green body single side without dissection and mould
Tool.
Used technical solution is the present invention to solve above-mentioned technical problem: the centrifugal pressure of ITO rotary target green body single side
Power filling forming method, the cylinder-shaped type of slurry injection mold is intracavitary, while rotating mould forms centrifugal action, penetrate
Micropore on the cylinder-shaped intracavitary side mold wall of type is passed through compressed air to cylinder-shaped type is intracavitary, so that single side from inside to outside is to slurry
Pressurization is discharged the moisture in slurry through the micropore on cylinder-shaped type chamber outside mould wall, forms ITO rotary target green body.
Further, after the cylinder-shaped type chamber of slurry injection mold, through micro- on the intracavitary side mold wall of cylinder-shaped type
Hole makes 0.3-0.6MPa of its initial pressure to the intracavitary compressed air that is passed through of cylinder-shaped type, and control mold with 100-200 turns/
The revolving speed rotation divided keeps 3-after five minutes under initial pressure, pressure is increase gradually to 1.8-in 10-15 minutes
2.5MPa, and pressure maintaining 20-30 minutes.
Mold used in the centrifugal pressure of ITO rotary target green body single side is arranged on the rotating platform, inside
With one for accommodating the cylinder-shaped type chamber of slurry, it is distributed on the mold wall of the cylinder-shaped intracavitary side of type for cylinder-shaped type
The intracavitary micropore for being passed through compressed air, the mold wall on the outside of cylinder-shaped type chamber are equipped with the micropore for moisture in slurry to be discharged.
Further, the mold includes backform, bed die, left half module and right half module, is equipped at the center of bed die upward convex
Cylinder-shaped plaster mold out, left half module and the setting of right half module surround jointly on the outside of cylinder-shaped plaster mold, and with backform and bed die
The micropore for being passed through compressed air is distributed on cylinder-shaped plaster mold, is distributed on left half module and right half module for cylinder-shaped type chamber
Micropore for draining.
Further, the bed die is connected by round epoxy resin bottom cover, base circle plaster mold and cylinder-shaped plaster mold
Composition is connect, base circle plaster mold is fixed on the circumference of round epoxy resin bottom cover, for the lower end of closed circular tubular type chamber,
Cylinder-shaped plaster mold is fixed on the center of round epoxy resin bottom cover upper surface.
Further, the backform is connected and composed by round epoxy resin top cover and top annular plaster mold, top ring
Shape plaster mold is fixed on the circumference of round epoxy resin top cover, the upper end for closed circular tubular type chamber.
Further, the left half module and right half module by semi-cylindrical shaped plaster mold and are fixed on semi-cylindrical shaped plaster mold
The semi-cylindrical shaped epoxy resin in outside is constituted.
Further, the backform is equipped with for being passed through compressed air into the cavity at cylinder-shaped plaster mold center
Forcing pipe, the Grouting Pipe for injecting slurry to cylinder-shaped type chamber and the exhaust pipe for cylinder-shaped type chamber air to be discharged.
Further, circumferentially distributed in the semi-cylindrical shaped plaster mold to have demoulding tracheae, demoulding tracheae is vertically arranged,
One end communicates with the outside world, and the other end extends to inside semi-cylindrical shaped plaster mold.
Further, it is equipped with drainpipe in the semi-cylindrical shaped epoxy resin of left half module and right half module, the one of drainpipe
End is in communication with the outside, and the other end passes to semi-cylindrical shaped plaster mold bottom outside.
The beneficial effects of the present invention are: being combined according to the straight cylindrical form of rotary target green body using centrifugal injection forming
The mode of single side ventilation pressurization, single side draining, the water after slurry fully enters type chamber, without mending slurry in forming process, in slurry
Divide and be only discharged from unilateral die surface, it is not in interlayer defect that the molding blank structure of institute is uniform.And this mode makes slurry
In bubble be easier fast strikethrough outside mould micropore discharge, to prevent from forming gas hole defect in green body, with common note
The slurry method of forming is compared, and the even green body molded is more preferable, and density also further increases, without carrying out static pressure such as jacket etc. into one
Step processing.Due to being that single side pressurizes and do not supplement slurry from inside to outside, slurry is in pressurization to far from interior side form in mold cavity
Have the direction Uniform Movement of cylinderical surface and finally at base, therefore after forming on the inside of tubular green body will not sticking to mould, demould in this way at
Product rate is higher, and process is also simpler, conveniently.This method is compared with rubber package set dry powder cold isostatic compaction method, base after molding
Cost of material can be greatly reduced even without processing in body processing capacity very little, also do not need the high equipment of cost, cost is more
It is low.
Further, it using the composite die of resin and high strength gypsum, compared with common gypsum mold, can bear more
High pressure, maximum dwell pressure may be up to 1.8 ~ 2.5MPa, can accelerate shaping speed, improve production efficiency, and formed
Blank density it is higher, blank density can reach 4.65 ~ 5.01g/cm3(relative density is 65 ~ 70%, and theoretical density presses 7.15g/
cm3Calculate), while because of the characteristics of combining centrifugal injection forming, it is ensured that green body consistent internal structure, such green body are conducive to
It is fired into the uniform rotary target material of high density, microstructure.
Composable mold is designed as backform, left and right half module and the combination of 4 part of bed die, facilitates cylinder-shaped green body to demould, the bottom of by
Mould and left and right half module are placed in 3 on the flat bogie for being spliced into one group, and cooperation demoulding tracheae is passed through compressed air, it is easy to accomplish
It automatically controls.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of mould therefor of the present invention.
Fig. 2 is the structural schematic diagram of bed die.
Fig. 3 is the structural schematic diagram of backform.
Fig. 4 is the structural schematic diagram of left half module.
Marked in the figure: 1, backform, 101, round epoxy resin top cover, 102, top annular plaster mold, 2, bed die, 201, circle
Shape epoxy resin bottom cover, 202, base circle plaster mold, 203, cylinder-shaped plaster mold mould, 3, Zuo Banmo, 301, semi-cylindrical shaped stone
Cream mould, 302, semi-cylindrical shaped epoxy resin, 4, right half module, 5, metallic framework, 6, forcing pipe, 7, Grouting Pipe, 8, valve, 9, exhaust
Pipe, 10, demoulding tracheae, 11, cylinder-shaped type chamber, 12, cavity, 13, drainpipe, 14, rotating platform, 15, cylinder-shaped fixing seat.
Specific embodiment
The embodiment that the present invention will be specifically described below with reference to the accompanying drawings and embodiments.
The present invention carries out injection forming in such a way that single side pressurizes and combines with centrifugation, first by slurry injection mold
Cylinder-shaped type is intracavitary, and then rotating mould forms centrifugal action, and slurry is close to the mould on the outside of cylinder-shaped type chamber under the action of the centrifugal
Have wall, simultaneously, is passed through compressed air, compression to cylinder-shaped type is intracavitary through the micropore on the intracavitary side mold wall of cylinder-shaped type
Air from inside to outside pressurizes to slurry.Under the pressurization of centrifugal action and compressed air, the moisture in slurry is through cylinder-shaped type chamber
Micropore on outside mould wall is discharged, and the particle packing in slurry forms ITO rotation on the mold wall on the outside of cylinder-shaped type chamber
Target blankss body.
In forming process, the pressure for being passed through compressed air is preferably controlled, by the way of pressurization step by step and pressure maintaining, concrete mode
Are as follows: by the cylinder-shaped type chamber of the ITO slurry injection mold of prepared higher solids content, good fluidity, later through cylindrical shape
Micropore on the intracavitary side mold wall of type makes 0.3-0.6MPa of its initial pressure to the intracavitary compressed air that is passed through of cylinder-shaped type, and
It controls mold to rotate with 100-200 revs/min of revolving speed, 3-is kept under initial pressure after five minutes, it will in 10-15 minutes
Pressure is increase gradually to 1.8-2.5MPa, and pressure maintaining 20-30 minutes.In the process in slurry moisture content through outside mould micropore
Filtering is gone out, and the solid green body of cylindrical shape of rotary target is formed.
Method of the invention can be used following mold and realize.The mold is arranged on rotating platform 14, is rotated by control
The rotation of 14 platforms, driven mold rotation.The cylinder-shaped type chamber 11 of setting one in mold, for accommodating slurry and blank forming, molding
The thickness of cylinder-shaped green body can be determined by parameters such as the solid concentration of slurry and grouting pressures afterwards, or as desired by adjustment mould
Tool type chamber thickness (cylinder-shaped type chamber outer, difference) of internal diameter.The die inside portion of the cylindrical shape type chamber 11 usually by being nested together
Divide and exterior portion surrounds.Die inside part constitutes the mold wall of cylinder-shaped 11 inside of type chamber, and mold exterior portion constitutes circle
11 outside mould wall of tubular type chamber.It is distributed on the mold wall of cylinder-shaped 11 inside of type chamber for being passed through to cylinder-shaped type is intracavitary
The mold wall of the micropore of compressed air, cylinder-shaped 11 outside of type chamber is equipped with the micropore for moisture in slurry to be discharged.
As shown in Figure 1, the mold includes backform 1, bed die 2, Zuo Banmo 3 and right half module 4.The center of bed die 2 be equipped with to
The cylinder-shaped plaster mold 203 protruded above.Left half module 3 and the setting of right half module 4 in 203 outside of cylinder-shaped plaster mold, and with backform 1 and
Bed die 2 surrounds cylinder-shaped type chamber 11 jointly.The cylindrical wall of cylinder-shaped plaster mold 203 is the mold of cylinder-shaped 11 inside of type chamber
Wall, cylinder-shaped plaster mold 203 are high-strength porous gypsum material, and the interior micropore being distributed is for being passed through pressure into cylinder-shaped type chamber 11
Contracting air.Left half module 3 and right half module 4 constitute the mold wall in cylinder-shaped 11 outside of type chamber, are similarly high-strength porous gypsum material,
The micropore of interior distribution is used for the moisture being discharged in slurry.
The mold can be used that resin is framed and high strength gypsum Material cladding is constituted, as shown in Fig. 2, bed die 2 is by circular rings
Oxygen resin bottom cover 201, base circle plaster mold 202 and cylinder-shaped plaster mold 203 connect and compose.Connection type is poured in gypsum
Before, metallic framework 5 is fixed on the outside of round epoxy resin bottom cover 201,202 He of base circle plaster mold is then poured in mold
Cylinder-shaped plaster mold 203, and then solidify connection and bed die 2 is made.Wherein, base circle plaster mold 202 is fixed on round asphalt mixtures modified by epoxy resin
On the circumference of rouge bottom cover, after other die assemblies, base circle plaster mold 202 is located at the lower end of cylinder-shaped type chamber 11.Cylinder
Shape plaster mold 203 is fixed on the center of round 201 upper surface of epoxy resin bottom cover, the interior side mold as cylinder-shaped type chamber 11
Wall.The center of cylinder-shaped plaster mold 203 is the cylindrical cavity 12 where compressed air, during gradually boosting, pressure maintaining,
Compressed air is uniformly pressurizeed to slurry from inside to outside through the micropore in cylinder-shaped plaster mold 203.
As shown in figure 3, backform 1 is connected and composed by round epoxy resin top cover 101 and top annular plaster mold 102, connection
Mode is similar to bed die.Before gypsum casting, metallic framework 5 is fixed on the outside of round epoxy resin top cover 101, then casting top
Portion's annular plaster mold 102, is connected as one after solidification.Top annular plaster mold 102 is fixed on round epoxy resin top cover 101
Upper end on circumference, for closed circular tubular type chamber 11.
As shown in figure 4, left half module 3 is by semi-cylindrical shaped plaster mold 301 and the semicircle being fixed on the outside of semi-cylindrical shaped plaster mold
Tubular epoxy resin 302 is constituted.The structure of right half module 4 is identical as left half module 3, and the two is arranged symmetrically.Left half module 3 and right half module 4
Outside mould wall as cylinder-shaped type chamber 11.Compressed air is through the micropore in cylinder-shaped plaster mold 203, from inside to outside uniformly
It pressurizes to slurry, at the same time, moisture content is become by the discharge of the semi-cylindrical shaped plaster mold of left half module 3 and right half module 4 in slurry
Green body.Drainpipe 13 is additionally provided in left half module 3 and right half module 4.13 diameter 12-20mm of drainpipe, by air-locked plastic tube
The semi-cylindrical shaped epoxy resin for being placed in left and right half module is framed interior (left and right each 1), and one end is located at semi-cylindrical shaped plaster mold most
On the outside of low side, one end is interlinked to the outside by the way that resin is framed with mould.
Forcing pipe 6, Grouting Pipe 7 and exhaust pipe 9 are equipped on backform 1.Forcing pipe 6 is placed in the center of backform 1, using not
Ventilative plastic tube or metal tube, pipe diameter 8-15mm, for leading into the cavity 12 at cylinder-shaped 203 center of plaster mold
Enter pressurized with compressed air.Grouting Pipe 7 is connected with automatic or manual grouting equipment, is made of the plastic tube of transparent, non-sticky slurry, directly
Diameter 10-15mm, one end are pierced by from the round epoxy resin top cover 101 of backform 1, and the other end is embedded in top annular plaster mold in advance
It is connected in 102 and with cylinder-shaped type chamber 11, is fixed to the casting of top annular plaster mold 102, solidification grouting behind shaft or drift lining pipe.Grouting Pipe 7
It is equipped with valve 8, for controlling the open and closed of slip casting tube passage, main function is closed after slurry fills type chamber adds
Pressure.Exhaust pipe 9 is made of the plastic tube of transparent, non-sticky slurry, diameter 6-10mm, positioned at the position opposite with Grouting Pipe 7, for arranging
Air in cylinder-shaped type chamber 11, one end are pierced by from the round epoxy resin top cover 101 of backform 1 out, and the other end is embedded in top in advance
It is connected in portion's annular plaster mold 102 and with cylinder-shaped type chamber 11, to the casting of top annular plaster mold 102, solidification heel row tracheae quilt
It is fixed.
As shown in Fig. 1-4, it is equipped with demoulding tracheae 10 in backform, bed die, left half module and right half module, demoulds tracheae 10
For a kind of steel wire winding pipe, ventable air hole, the fibrous materials such as surface cladding ventilative cotton, fiber crops, diameter are distributed on pipe
6-10mm, pipe one end are fixed on that solid resin mold is framed to be interlinked to the outside with mould, and the other end extends into high-strength micropore gypsum mold,
Tracheae is demoulded apart from cavity surface 10-20mm, and circumferential uniformly, the vertical, parallel arrangement along cylinder-shaped type chamber, tracheae spacing are
60-80mm, pre-buried before pouring gypsum, fixation (only respectively illustrate 2 in backform, bed die, left half module and right half module in figure
Tracheae is demoulded, other to be not shown).
Backform 1, bed die 2, Zuo Banmo 3 and right half module 4 are placed on rotating platform 14 after combining, and rotating platform 14 is equipped with
Cylinder-shaped fixing seat 15(for fixing slip casting mold is a circular groove in form), it is made of metal material.In single side
While slip casing by pressure, the rotation of 14 driven mold of rotating platform generates centrifugal force and accelerates dehydration forming speed, while improving base
Body structure uniformity coefficient.
Embodiment: after the backform 1 made, bed die 2, Zuo Banmo 3, right half module 4 are molded, with jack or other fixtures
Pressurization is simultaneously fixed on the cylinder-shaped fixed station 15 of rotating platform 14.Taking the solid concentration made is that 85%, viscosity is lower than
600mPas, and the ITO slurry after micro defoaming agent is added, send slurry to enter in cylinder-shaped type chamber 11 from Grouting Pipe 7 with air pump,
Until the micro- outlet for exposing transparent exhaust pipe 9 of slurry, illustrates that type chamber 11 has filled.Then close the valve of Grouting Pipe 7 and exhaust pipe 9
Door is passed through the compressed air that initial pressure is 0.3 MPa by forcing pipe 6, gas through cylinder-shaped plaster mold 203 micropore to type
ITO slurry uniform pressurization in chamber 11 starts rotating platform 14 after starting pressurization, and adjustment fixed rotating speed is 150 revs/min, with first
After beginning pressure 0.3MPa pressure maintaining 5min, pressure is increase gradually to highest 2.2MPa, and pressure maintaining 25min in 12min, is made
The micro porous filtration that moisture content surrounds columnar two semi-cylindrical shaped plaster molds through outside in ITO slurry is gone out, and ITO rotary target is formed
The solid green body of cylindrical shape.It is demoulded immediately after blank forming, first mold is removed and is placed on track 3 and is spliced into a plane
Flat bogie on, first with the pressure of 0.2MPa respectively by the demoulding tracheae 10 of 4 middle ring cloth of left half module 3 and right half module to half
Be blown into compressed air in cylinder-shaped plaster mold, gas by mold micropore to billet surface uniform pressurization, under pressure,
Left and right half module is separated from green body with trolley, and green body stays on intermediate trolley, then passes through 1 middle ring of backform with the pressure of 0.2MPa
The demoulding tracheae 10 of cloth is blown into compressed air into top annular plaster mold 102, sloughs backform 1, finally uses the pressure of 0.2MPa
Compressed air is blown into base circle plaster mold 202 by the demoulding tracheae 10 of 2 middle ring cloth of bed die, while along side straight up
To base is taken, bed die 2(is sloughed due to being that single side pressurizes and do not supplement slurry from inside to outside, slurry is in pressurization Shi Xiangyuan in type chamber 11
Direction Uniform Movement from cylinder-shaped 203 cylinderical surface of plaster mold and finally at base, therefore on the inside of tubular green body will not sticking to mould, can
It takes out upwards easily).
ITO rotary target green body after demoulding is placed directly on load bearing board, and after drying, degreasing, green body is surveyed with weight method
Amount, density 4.79g/cm3(relative density 67%, theoretical density press 7.15g/cm3Calculate), then by green body in 1560 DEG C, it is micro-
It presses after being sintered under Oxygen Condition, obtaining density is 7.136 g/cm3(relative density 99.8%, theoretical density press 7.15g/cm3Meter
Calculate) ITO rotary target material.
This method mould therefor service life is long, without drying, can at any time, Reusability, save cost.It can be used simultaneously more
Group mold connect with automatic grouting system program, and blank forming completion rear mold, which is placed on track 3 and is spliced into one group, puts down
On plate trolley, compressed air realization demoulding is passed through by demoulding tracheae, it is easy to accomplish automatically control.The ITO of preparation rotates target blankss
Volume density is high, specification is big, structure is uniform, is suitable for firing high density ITO rotary target material under the conditions of normal pressure or minute-pressure.
Claims (10)
- The centrifugal pressure method of 1.ITO rotary target green body single side, it is characterised in that: by the cylinder of slurry injection mold Shape type is intracavitary, while rotating mould forms centrifugal action, through the micropore on the intracavitary side mold wall of cylinder-shaped type to cylinder Shape type is intracavitary to be passed through compressed air, so that single side from inside to outside pressurizes to slurry, make the moisture in slurry through cylinder-shaped type chamber outside Micropore discharge on side mold wall, forms ITO rotary target green body.
- 2. the centrifugal pressure method of ITO rotary target green body single side as described in claim 1, it is characterised in that: slurry After the cylinder-shaped type chamber of material injection mold, it is passed through through the micropore on the intracavitary side mold wall of cylinder-shaped type to cylinder-shaped type is intracavitary Compressed air makes 0.3-0.6MPa of its initial pressure, and controls mold and rotated with 100-200 revs/min of revolving speed, initial 3-are kept under pressure after five minutes, and pressure is increase gradually to 1.8-2.5MPa, and 20-30 points of pressure maintaining in 10-15 minutes Clock.
- The mold of the centrifugal pressure of 3.ITO rotary target green body single side, it is characterised in that: mold setting is rotating It is internal that there is a mould for accommodating the cylinder-shaped type chamber (11) of slurry, on the inside of cylinder-shaped type chamber (11) on platform (14) Be distributed on tool wall for when mold is rotated to the intracavitary compressed air that is passed through of cylinder-shaped type so that single side from inside to outside is to slurry The micropore of pressurization, the mold wall on the outside of cylinder-shaped type chamber (11) are equipped with the micropore for moisture in slurry to be discharged.
- 4. the mold of the centrifugal pressure of ITO rotary target green body single side as claimed in claim 3, feature exist In: the mold includes backform (1), bed die (2), Zuo Banmo (3) and right half module (4), is equipped at the center of bed die (2) upward convex Cylinder-shaped plaster mold (203) out, Zuo Banmo (3) and right half module (4) setting on the outside of the cylinder-shaped plaster mold (203), and with top Mould (1) and bed die (2) surround cylinder-shaped type chamber (11) jointly, are distributed on cylinder-shaped plaster mold (203) empty for being passed through compression The micropore for draining is distributed on the micropore of gas, Zuo Banmo (3) and right half module (4).
- 5. the mold of the centrifugal pressure of ITO rotary target green body single side as claimed in claim 4, feature exist In: the bed die (2) is by round epoxy resin bottom cover (201), base circle plaster mold (202) and cylinder-shaped plaster mold (203) it connects and composes, base circle plaster mold (202) is fixed on the circumference of round epoxy resin bottom cover, is used for closed cylinder The lower end of shape type chamber (11), cylinder-shaped plaster mold (203) are fixed on the center of round epoxy resin bottom cover (201) upper surface.
- 6. the mold of the centrifugal pressure of ITO rotary target green body single side as claimed in claim 4, feature exist In: the backform (1) is connected and composed by round epoxy resin top cover (101) and top annular plaster mold (102), top annular Plaster mold (102) is fixed on the circumference of round epoxy resin top cover (101), is used for the upper end of closed circular tubular type chamber (11).
- 7. the mold of the centrifugal pressure of ITO rotary target green body single side as claimed in claim 4, feature exist In: the left half module (3) and right half module (4) by semi-cylindrical shaped plaster mold and be fixed on the outside of semi-cylindrical shaped plaster mold half Cylinder-shaped epoxy resin is constituted.
- 8. the mold of the centrifugal pressure of ITO rotary target green body single side as claimed in claim 4, feature exist In: the backform (1) is equipped with for being passed through adding for compressed air in the cavity (12) to cylinder-shaped plaster mold (203) center Pressure pipe (6) is used for the Grouting Pipe (7) of cylinder-shaped type chamber (11) injection slurry and for the interior air of cylinder-shaped type chamber (11) to be discharged Exhaust pipe (9).
- 9. the mold of the centrifugal pressure of ITO rotary target green body single side as claimed in claim 7, feature exist In: circumferentially distributed in the semi-cylindrical shaped plaster mold to have demoulding tracheae (10), demoulding tracheae is vertically arranged, one end and outer Boundary communicates, and the other end extends to inside semi-cylindrical shaped plaster mold.
- 10. the mold of the centrifugal pressure of ITO rotary target green body single side as claimed in claim 7, feature exist In: be equipped with drainpipe (13) in the semi-cylindrical shaped epoxy resin of Zuo Banmo (3) and right half module (4), one end of drainpipe with External world's connection, the other end pass to semi-cylindrical shaped plaster mold bottom outside.
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| CN201710224206.6A CN106985261B (en) | 2017-04-07 | 2017-04-07 | The centrifugal pressure method of ITO rotary target green body single side and mold |
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| CN106985261B true CN106985261B (en) | 2019-06-28 |
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| CN107538598A (en) * | 2017-09-07 | 2018-01-05 | 韶关市欧莱高新材料有限公司 | A kind of tubular target injection forming mould |
| CN107599123B (en) * | 2017-09-07 | 2023-05-05 | 广东欧莱高新材料股份有限公司 | Frock of cylindric target slip casting mould |
| CN108081436A (en) * | 2017-12-08 | 2018-05-29 | 郑州大学 | The method and apparatus that roller injection forming prepares oxide ceramics target |
| CN109079963B (en) * | 2018-07-11 | 2020-08-28 | 中国船舶重工集团公司第七二五研究所 | Single-side pressure grouting forming mold and manufacturing method of ITO (indium tin oxide) plane target |
| CN109925072B (en) * | 2019-03-09 | 2022-04-26 | 上海杰达齿科制作有限公司 | Dental restoration body porcelain-piling centrifugal compact anti-overflow device and process |
| CN110370426B (en) * | 2019-07-29 | 2020-09-29 | 福建阿石创新材料股份有限公司 | Centrifugal forming device and preparation method of ITO (indium tin oxide) rotary target |
| CN110303159B (en) * | 2019-07-29 | 2023-04-18 | 河北工业职业技术学院 | Wear-resistant material forming equipment and method |
| CN110625735A (en) * | 2019-10-22 | 2019-12-31 | 河北惟新科技有限公司 | Slip casting device and method of ITO (indium tin oxide) rotating target |
| CN111440000B (en) * | 2020-04-24 | 2022-04-29 | 河北恒博新材料科技股份有限公司 | Preparation method of large-size rotary ceramic target |
| CN112725753B (en) * | 2020-12-30 | 2023-02-24 | 湖南柯盛新材料有限公司 | Method for binding multiple sections of ITO (indium tin oxide) rotary target materials in one-step centrifugation manner |
| CN113815091A (en) * | 2021-07-30 | 2021-12-21 | 安徽省含山民生瓷业有限责任公司 | Grouting process |
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| JPS526290B2 (en) * | 1972-03-16 | 1977-02-21 | ||
| CN1114522C (en) * | 2000-06-16 | 2003-07-16 | 吉林大学 | Vacuum injection process of preparing electrolyte film tube and its forming equipment |
| CN100336647C (en) * | 2004-04-15 | 2007-09-12 | 邱欣昭 | Centrifugal press grouting forming machine for ceramics |
| CN101186052A (en) * | 2007-11-20 | 2008-05-28 | 中材高新材料股份有限公司 | Filter-press molding mold of ceramic component and filter-press molding method |
| CN204844461U (en) * | 2014-12-05 | 2015-12-09 | 宁夏东方钽业股份有限公司 | Pressure slip casting mould of tubulose pottery target |
| CN104589461B (en) * | 2015-01-14 | 2016-09-21 | 河北东同光电科技有限公司 | Pottery rotary target casting mould and preparation method thereof |
| CN104552561A (en) * | 2015-01-16 | 2015-04-29 | 广东科达洁能股份有限公司 | Multi-hole mould for slip casting |
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