CN106953000A - It is integrated in superconducting field coils of Josephson junction and preparation method thereof - Google Patents
It is integrated in superconducting field coils of Josephson junction and preparation method thereof Download PDFInfo
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- CN106953000A CN106953000A CN201710154577.1A CN201710154577A CN106953000A CN 106953000 A CN106953000 A CN 106953000A CN 201710154577 A CN201710154577 A CN 201710154577A CN 106953000 A CN106953000 A CN 106953000A
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- H—ELECTRICITY
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- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/805—Constructional details for Josephson-effect devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N60/10—Junction-based devices
- H10N60/12—Josephson-effect devices
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Abstract
Present invention offer is a kind of to be integrated in superconducting field coils of Josephson junction and preparation method thereof, and the superconducting field coils include：A plurality of bottom magnetic field line ring layer, a plurality of top layer magnetic field line ring layer, the second insulation material layer；Isolated between a plurality of bottom magnetic field line ring layer and a plurality of top layer magnetic field line ring layer by second insulation material layer；Perforate is provided with second insulation material layer, the 3rd superconducting material is filled with the perforate；The top layer magnetic field line ring layer connects adjacent two articles of bottoms magnetic field line ring layer by the 3rd superconducting material in the perforate, so as to form whole superconducting field coils.Superconducting field coils prepared by the present invention can produce magnetic field at Josephson junction, and be passed through current values will be smaller than electric current needed for prior art, the magnetic field range during Josephson junction is measured with changes of magnetic field can be extended, measurement efficiency is lifted.
Description
Technical field
The invention belongs to SPUID (SQUID) field, more particularly to one kind is integrated in Josephson junction
Superconducting field coils and preparation method thereof.
Background technology
Josephson junction is to constitute SPUID (SQUID), superconductive quantum bit (qubit), superconduction numeral
A kind of important component in the superconductive electronic devices such as circuit (RSFQ), it generally uses superconductor-insulating barrier-superconductor
(SIS) structure, as shown in figure 1, the wherein very thin thickness of insulating barrier, generally in more than ten nanometers of thickness.Josephson junction
Property and the property of above-mentioned superconductive electronic device are closely related, therefore, to the sign of Josephson junction electrology characteristic not only for
Help to deepen the understanding to Josephson effect, and be conducive to the application of superconductive electronic device.
According to josephson equation, when magnetic field passes through the insulating barrier in knot, the critical current of Josephson junction isWherein Ic (B) is the presence of the critical current tied during the B of magnetic field, Ic in Josephson junction
(0) it is the critical current tied when magnetic field is 0, Φ J=B*SJ are the magnetic flux that magnetic field B passes through Josephson junction, and SJ is cutting for knot
Area, Φ 0=2.07 × 10-15Wb is flux quantum constant, as can be seen that critical current is with passing through insulating barrier from above formula
Magnetic flux and change.The critical current of Josephson junction shown in Fig. 2 can be obtained with the change of externally-applied magnetic field according to above formula
Law, it is an important measurement for verifying Josephson junction quality.The critical current of Josephson junction is being measured with magnetic field
In change experiment, the approach of externally-applied magnetic field is：(1) an electrified wire is being added near Josephson junction, generally it is profit
It is prepared from micro fabrication, as shown in figure 3, in measurement process, DC current is passed through straight wire 20, what wire was produced
Magnetic field B passes through Josephson junction 10, the magnetic field amplitude that this method is produced it is smaller, it is necessary to the electric current being passed through it is larger be only possible to so that
Magnetic flux through Josephson junction 10 reaches 1 flux quantum or more flux quantum；(2) will prepare has Josephson junction
Chip is positioned in solenoid and (not illustrated), and magnetic field is produced using solenoid, and magnetic field passes through Josephson junction, generally comprised
There is the chip size of multiple Josephson junctions at several millimeters to a cm, therefore, solenoid diameter dimension is usually required
Several millimeters to centimetres, solenoid volume is larger, and can only some direction produce magnetic field, therefore, it is in the measurements
It is inefficient.
The content of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide a kind of Josephson junction that is integrated in
Superconducting field coils and preparation method thereof, for solving the critical current of measurement Josephson junction in the prior art with changes of magnetic field
When, the electric current for being passed through wire is big, and helical pipe size it is big the problems such as.
In order to achieve the above objects and other related objects, the present invention provides a kind of cryogenic magnetic field for being integrated in Josephson junction
The preparation method of coil, the preparation method at least includes：
1) substrate is provided, in the superconducting material of epitaxial growth first, the first insulation material layer, the successively on the substrate
The three-layer thin-film structure of two superconducting materials；
2) the three-layer thin-film structure is etched, to form hearth electrode and a plurality of bottom magnetic field line ring layer；
3) part second superconducting material and the first insulation material layer on hearth electrode is etched to form Josephson
Knot, etching off is except second superconducting material and the first insulation material layer in a plurality of bottom magnetic field line ring layer in the same time；
4) in the step 3) body structure surface the second insulation material layer of formation for being formed, perforate is to expose the Josephson
Two end surfaces of the second superconductor layer surface, hearth electrode surface and the every bottom magnetic field line ring layer tied；
5) the 3rd superconducting material is deposited, and etches the 3rd superconducting material formation top electrode and a plurality of top layer magnetic field
Coil layer, the top electrode is used to draw the Josephson junction, and the top layer magnetic field line ring layer connects adjacent two bottom magnetic
Field wire ring layer, so as to form whole superconducting field coils.
A kind of scheme of optimization of the preparation method of the superconducting field coils of Josephson junction, institute are integrated in as the present invention
Superconducting field coils are stated apart from 10~100 microns of the Josephson junction.
A kind of scheme of optimization of the preparation method of the superconducting field coils of Josephson junction, institute are integrated in as the present invention
The overall dimensions for stating superconducting field coils are 10~100 microns.
A kind of scheme of optimization of the preparation method of the superconducting field coils of Josephson junction, institute are integrated in as the present invention
Substrate is stated for silicon substrate, magnesia substrate or Sapphire Substrate.
A kind of scheme of optimization of the preparation method of the superconducting field coils of Josephson junction, institute are integrated in as the present invention
The first insulation material layer is stated for aluminium nitride, aluminum oxide or magnesia.
A kind of scheme of optimization of the preparation method of the superconducting field coils of Josephson junction, institute are integrated in as the present invention
The material for stating the second insulation material layer is silicon nitride or silica.
A kind of scheme of optimization of the preparation method of the superconducting field coils of Josephson junction, institute are integrated in as the present invention
The first superconducting material, the second superconducting material and the 3rd superconducting material are stated for niobium nitride or niobium.
The present invention also provides the superconducting field coils for being integrated in Josephson junction that a kind of utilization above method is prepared,
The superconducting field coils include：A plurality of bottom magnetic field line ring layer, a plurality of top layer magnetic field line ring layer, the second insulation material layer；
Pass through second insulation material layer between a plurality of bottom magnetic field line ring layer and a plurality of top layer magnetic field line ring layer
Isolation；
Perforate is provided with second insulation material layer, the 3rd superconducting material is filled with the perforate；
The top layer magnetic field line ring layer connects adjacent two articles of bottom magnetic field by the 3rd superconducting material in the perforate
Coil layer, so as to form whole superconducting field coils.
A kind of scheme of optimization of the superconducting field coils of Josephson junction, the cryogenic magnetic field are integrated in as the present invention
10~100 microns of Josephson junction described in coil distance.
A kind of scheme of optimization of the superconducting field coils of Josephson junction, the cryogenic magnetic field are integrated in as the present invention
The overall dimensions of coil are 10~100 microns.
As described above, the present invention's is integrated in superconducting field coils of Josephson junction and preparation method thereof, with following
Beneficial effect：
1st, compared with electromotion straight wire, the characteristics of superconducting field coils of the invention have many numbers of turn, therefore, in coil
Being passed through will increase with electromotion straight wire identical electric current, magnetic field, and increasing degree is about directly proportional to the number of turn.The superconduction of the present invention simultaneously
Field coil preparation is mutually compatible with the micro fabrication of Josephson junction, does not increase technology difficulty.
2nd, compared with energization solenoid, solenoid of the superconducting field coils equivalent to micro-meter scale of the invention, size from
Several millimeters of prior art have narrowed down to tens microns, and the preparation method of the present invention can be made near Josephson junction
The standby coil for producing different directions magnetic field, adds the diversity that magnetic field is added into Josephson junction.
Brief description of the drawings
Fig. 1 is the structural representation of Josephson junction.
Fig. 2 is knot critical current and the graph of relation in magnetic field.
Fig. 3 produces the schematic diagram in magnetic field for Josephson junction in the prior art and by straight wire.
Fig. 4~Fig. 8 is the structure flow chart of preparation method of the present invention.
Fig. 9 is Fig. 8 top view.
Component label instructions
101 substrates
102 first superconducting materials
103 first insulation material layers
104 second superconducting materials
105 hearth electrodes
106 bottom magnetic field line ring layers
10 Josephson junctions
107 second insulation material layers
108 top electrodes
109 top layer magnetic field line ring layers
20 straight wires
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Refer to accompanying drawing.It should be noted that the diagram provided in the present embodiment only illustrates the present invention in a schematic way
Basic conception, then in schema only display with relevant component in the present invention rather than according to component count during actual implement, shape
Shape and size are drawn, and it is actual when implementing kenel, quantity and the ratio of each component can be a kind of random change, and its component cloth
Office's kenel may also be increasingly complex.
The present invention provides a kind of preparation method for the superconducting field coils for being integrated in Josephson junction, and the preparation method is extremely
Include less：
Step 1 is first carried out), as shown in Figure 4 there is provided a substrate 101, in epitaxial growth successively on the substrate 101
One superconducting material 102, the first insulation material layer 103, the three-layer thin-film structure of the second superconducting material 104.
Specifically, the present invention can the first superconducting material of epitaxial growth 102, first be exhausted successively using magnetron sputtering mode
The three-layer thin-film structure of edge material layer 103, the second superconducting material 104.It is first superconducting material 102, described first exhausted
Edge material layer 103 and second superconducting material 104 can be in the case where not destroying vacuum environment respectively in different chambers
Room grows.
More specifically there is provided a substrate 101, the substrate 101 includes：Silicon substrate, magnesia substrate or Sapphire Substrate.
In the present embodiment, in order to prepare high-quality superconducting thin film, the substrate 101 is preferably magnesia substrate.
As an example, first superconducting material 102, the second superconducting material 104 can be niobium nitride or niobium etc..This
In embodiment, the superconducting material 104 of the first superconducting material 102 and second is nitridation niobium material.
As an example, first insulation material layer 103 is aluminium nitride, aluminum oxide or magnesia etc..It is excellent in the present embodiment
Aluminium nitride is selected as the first insulation material layer 103.The thickness of first insulation material layer 103 can be 1.2nm~2.4nm,
In the present embodiment, the thickness of first insulation material layer 103 is only 2nm.
Secondly step 2 is performed), as shown in figure 5, the three-layer thin-film structure is etched, to form hearth electrode 105 and a plurality of bottom
Layer magnetic field line ring layer 106.
Specifically, the figure of hearth electrode 105 is etched using micro fabrication, the micro fabrication includes but is not limited to light
Carve and etch.First superconducting material 102 etched as Josephson junction hearth electrode 105.
Etching is while form hearth electrode 105 of Josephson junction, the Josephson junction hearth electrode 105 it is attached
Closely, etching three-layer thin-film structure forms a plurality of bottom magnetic field line ring layer 106, as shown in Figure 5.Preferably, the bottom magnetic field line
The hearth electrode 105 of Josephson junction is in 10~100 micrometer ranges described in the overall distance of ring layer 106, so that the magnetic being subsequently formed
Field coil its magnetic field energy in measurement penetrates Josephson junction.The shape of the bottom magnetic field line ring layer 106 is not limited, its cross section
It is preferably shaped to rectangle.
Then step 3 is performed), as shown in fig. 6, the part He of the second superconducting material 104 on etching hearth electrode 105
First insulation material layer 103 is to form Josephson junction 10, and etching off is except in a plurality of bottom magnetic field line ring layer 106 in the same time
The insulation material layer 103 of second superconducting material 104 and first.
As shown in fig. 6, the part insulation material layer of the second superconducting material 104 and first on etching hearth electrode 105
After 103, remaining second superconducting material 104, the first insulation material layer 103 and hearth electrode 105 (i.e. the first superconducting material)
Formation Josephson junction 10, and the second superconducting material 104 and the first insulation material layer in a plurality of bottom magnetic field line ring layer 106
103 wholes are etched removal.
Then perform step 4), as shown in fig. 7, in the step 3) formed body structure surface formation the second insulation material layer
107, perforate is to expose the surface of the second superconducting material 104, the surface of hearth electrode 105 and the every bottom of the Josephson junction 10
Two end surfaces of layer magnetic field line ring layer 106.
Specifically, the material of second insulation material layer 107 is silicon nitride or silica.In the present embodiment, institute
The material for stating the second insulation material layer 107 is silica, in subsequent step, the top electricity for isolating the Josephson junction 10
Pole and hearth electrode, while the top layer and bottom of field coil can be completely cut off.
Finally perform step 5), as shown in Figure 8 and Figure 9, the 3rd superconducting material is deposited, and etch the 3rd superconduction material
Bed of material formation top electrode 108 and a plurality of top layer magnetic field line ring layer 109, the top electrode 108 are used to draw the Josephson junction
10, the top layer magnetic field line ring layer 109 connects adjacent two bottom magnetic field lines ring layer 106, so as to form whole superconducting magnetic field wire
Circle.Fig. 8 is sectional view, and Fig. 9 is Fig. 8 top view.
Specifically, in step 4) body structure surface for preparing deposits the 3rd superconducting material, etches the top electrode formed
108 are used to draw the electrical of Josephson junction 10.The top layer magnetic field line ring layer 109 of formation passes through the 3rd superconduction material in perforate
Material connection bottom magnetic field line ring layer 106.A plurality of top layer magnetic field line ring layer 109 and bottom magnetic field line ring layer 106 form whole multiturn
The superconducting field coils of stereochemical structure, as shown in Figure 9.
As an example, the 3rd superconducting material can be niobium nitride or niobium etc..In the present embodiment, the 3rd superconduction
Material layer is nitridation niobium material.
It should be noted that the superconducting field coils of multigroup different directions can be prepared near Josephson junction, when entering
During row measurement, the magnetic field of different directions can be produced according to specific requirement, adds and many of magnetic field is added into Josephson junction
Sample.
In addition, the number of turn and size of the superconducting field coils can optimize with requirement of experiment, to reach measurement request.
Preferably, the overall dimensions of the superconducting field coils are in 10~100 micrometer ranges.When toward being passed through electricity in superconducting field coils
During stream, the magnetic field of generation is by through the intermediate insulation layer segment of neighbouring Josephson junction, and magnetic field amplitude then can be by adjusting electricity
The size of stream is adjusted.
As shown in Fig. 8~Fig. 9, the present invention provides a kind of superconducting field coils for being integrated in Josephson junction, and the coil is adopted
Prepare in aforementioned manners, the superconducting field coils at least include：A plurality of bottom magnetic field line ring layer 106, a plurality of top layer magnetic field line
Ring layer 109, the second insulation material layer 107；
Insulated between a plurality of bottom magnetic field line ring layer 106 and a plurality of top layer magnetic field line ring layer 109 by described second
Material layer isolation 107；
Perforate is provided with second insulation material layer 107, the 3rd superconducting material is filled with the perforate；
The top layer magnetic field line ring layer 109 connects adjacent two articles of bottom magnetic by the 3rd superconducting material in the perforate
Field wire ring layer 106, so as to form whole superconducting field coils.
The top electrode of the top layer magnetic field line ring layer and Josephson junction in same layer, the bottom magnetic field line ring layer with about
The hearth electrode of Se Fusen knots is in same layer.
As an example, the superconducting field coils are apart from 10~100 microns of the Josephson junction.
As an example, the overall dimensions of the superconducting field coils are 10~100 microns.
In summary, present invention offer is a kind of is integrated in superconducting field coils of Josephson junction and preparation method thereof, institute
State preparation method and be included near Josephson junction and prepare superconducting field coils, when being passed through electric current, the magnetic field of generation will be passed through
The insulation layer segment of neighbouring Josephson junction, magnetic field amplitude can be adjusted by adjusting the size of electric current.Compared at present to about
The mode in Se Fusen knots plus magnetic field, this mode reduces requirement of the measurement experiment to electric current, improves Josephson junction
The efficiency of matter measurement.
So, the present invention effectively overcomes various shortcoming of the prior art and has high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (10)
1. a kind of preparation method for the superconducting field coils for being integrated in Josephson junction, it is characterised in that the preparation method is extremely
Include less：
1) provide a substrate, on the substrate successively the superconducting material of epitaxial growth first, the first insulation material layer, the second surpass
Lead the three-layer thin-film structure of material layer；
2) the three-layer thin-film structure is etched, to form hearth electrode and a plurality of bottom magnetic field line ring layer；
3) part second superconducting material and the first insulation material layer on etching hearth electrode are to form Josephson junction, together
Moment etching off is except second superconducting material and the first insulation material layer in a plurality of bottom magnetic field line ring layer；
4) in the step 3) body structure surface the second insulation material layer of formation for being formed, perforate is to expose the Josephson junction
Two end surfaces of the second superconductor layer surface, hearth electrode surface and every bottom magnetic field line ring layer；
5) the 3rd superconducting material is deposited, and etches the 3rd superconducting material formation top electrode and a plurality of top layer field coil
Layer, the top electrode is used to draw the Josephson junction, and the top layer magnetic field line ring layer connects adjacent two bottom magnetic field lines
Ring layer, so as to form whole superconducting field coils.
2. the preparation method of the superconducting field coils according to claim 1 for being integrated in Josephson junction, it is characterised in that：
The superconducting field coils are apart from 10~100 microns of the Josephson junction.
3. the preparation method of the superconducting field coils according to claim 1 for being integrated in Josephson junction, it is characterised in that：
The overall dimensions of the superconducting field coils are 10~100 microns.
4. the preparation method of the superconducting field coils according to claim 1 for being integrated in Josephson junction, it is characterised in that：
The substrate is silicon substrate, magnesia substrate or Sapphire Substrate.
5. the preparation method of the superconducting field coils according to claim 1 for being integrated in Josephson junction, it is characterised in that：
First insulation material layer is aluminium nitride, aluminum oxide or magnesia.
6. the preparation method of the superconducting field coils according to claim 1 for being integrated in Josephson junction, it is characterised in that：
The material of second insulation material layer is silicon nitride or silica.
7. the preparation method of the superconducting field coils according to claim 1 for being integrated in Josephson junction, it is characterised in that：
First superconducting material, the second superconducting material and the 3rd superconducting material are niobium nitride or niobium.
8. the superconducting field coils for being integrated in Josephson junction that preparation method described in a kind of utilization claim 1 is prepared,
Characterized in that, the superconducting field coils include：It is a plurality of bottom magnetic field line ring layer, a plurality of top layer magnetic field line ring layer, second exhausted
Edge material layer；
Isolated between a plurality of bottom magnetic field line ring layer and a plurality of top layer magnetic field line ring layer by second insulation material layer；
Perforate is provided with second insulation material layer, the 3rd superconducting material is filled with the perforate；
The top layer magnetic field line ring layer connects adjacent two articles of bottom field coils by the 3rd superconducting material in the perforate
Layer, so as to form whole superconducting field coils.
9. the superconducting field coils according to claim 8 for being integrated in Josephson junction, it is characterised in that：The superconducting magnetic
Field coil is apart from 10~100 microns of the Josephson junction.
10. the superconducting field coils according to claim 8 for being integrated in Josephson junction, it is characterised in that：The superconduction
The overall dimensions of field coil are 10~100 microns.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108539004A (en) * | 2018-04-25 | 2018-09-14 | 中国科学院上海微***与信息技术研究所 | Sub-micron josephson tunnel junction and preparation method thereof |
| CN110148664A (en) * | 2019-05-13 | 2019-08-20 | 中国科学院上海微***与信息技术研究所 | The preparation method of Josephson junction |
| CN110890620A (en) * | 2018-09-07 | 2020-03-17 | 杭州潮盛科技有限公司 | Antenna structure integrated on chip and manufacturing process |
| CN110906851A (en) * | 2019-10-22 | 2020-03-24 | 上海海事大学 | Bridge crane swing angle and rope length detection device and detection method |
| CN111460749A (en) * | 2020-04-23 | 2020-07-28 | 中国科学院上海微***与信息技术研究所 | Method and circuit for fine optimization of superconducting digital unit |
| WO2021111229A1 (en) * | 2019-12-06 | 2021-06-10 | International Business Machines Corporation | Computing devices containing magnetic josephson junctions with embedded magnetic field control element |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104078220A (en) * | 2014-07-29 | 2014-10-01 | 电子科技大学 | Inductor and resistor compound superconducting reactor |
| CN104377299A (en) * | 2014-08-21 | 2015-02-25 | 中国科学院上海微***与信息技术研究所 | SQUID structure preventing magnetic field interference in non-magnetic shielding environment |
| CN105702849A (en) * | 2016-02-01 | 2016-06-22 | 中国科学院上海微***与信息技术研究所 | Superconducting circuit with superconductive layer covered step area and preparation method thereof |
| CN205427169U (en) * | 2016-03-11 | 2016-08-03 | 苏州大学 | Fluxgate probe based on MEMS technique |
-
2017
- 2017-03-15 CN CN201710154577.1A patent/CN106953000B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104078220A (en) * | 2014-07-29 | 2014-10-01 | 电子科技大学 | Inductor and resistor compound superconducting reactor |
| CN104377299A (en) * | 2014-08-21 | 2015-02-25 | 中国科学院上海微***与信息技术研究所 | SQUID structure preventing magnetic field interference in non-magnetic shielding environment |
| CN105702849A (en) * | 2016-02-01 | 2016-06-22 | 中国科学院上海微***与信息技术研究所 | Superconducting circuit with superconductive layer covered step area and preparation method thereof |
| CN205427169U (en) * | 2016-03-11 | 2016-08-03 | 苏州大学 | Fluxgate probe based on MEMS technique |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108539004A (en) * | 2018-04-25 | 2018-09-14 | 中国科学院上海微***与信息技术研究所 | Sub-micron josephson tunnel junction and preparation method thereof |
| CN108539004B (en) * | 2018-04-25 | 2023-12-05 | 中国科学院上海微***与信息技术研究所 | Submicron Josephson tunnel junction and preparation method thereof |
| CN110890620A (en) * | 2018-09-07 | 2020-03-17 | 杭州潮盛科技有限公司 | Antenna structure integrated on chip and manufacturing process |
| CN110148664A (en) * | 2019-05-13 | 2019-08-20 | 中国科学院上海微***与信息技术研究所 | The preparation method of Josephson junction |
| CN110148664B (en) * | 2019-05-13 | 2021-01-19 | 中国科学院上海微***与信息技术研究所 | Process for preparing josephson junctions |
| CN110906851A (en) * | 2019-10-22 | 2020-03-24 | 上海海事大学 | Bridge crane swing angle and rope length detection device and detection method |
| CN110906851B (en) * | 2019-10-22 | 2021-07-23 | 上海海事大学 | Bridge crane swing angle and rope length detection device and detection method |
| WO2021111229A1 (en) * | 2019-12-06 | 2021-06-10 | International Business Machines Corporation | Computing devices containing magnetic josephson junctions with embedded magnetic field control element |
| US11309479B2 (en) | 2019-12-06 | 2022-04-19 | International Business Machines Corporation | Computing devices containing magnetic Josephson Junctions with embedded magnetic field control element |
| GB2605096A (en) * | 2019-12-06 | 2022-09-21 | Ibm | Computing devices containing magnetic Josephson Junctions with embedded magnetic field control element |
| CN111460749A (en) * | 2020-04-23 | 2020-07-28 | 中国科学院上海微***与信息技术研究所 | Method and circuit for fine optimization of superconducting digital unit |
| CN111460749B (en) * | 2020-04-23 | 2022-12-06 | 中国科学院上海微***与信息技术研究所 | Method and circuit for fine optimization of superconducting digital unit |
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| CN106953000B (en) | 2018-10-26 |
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