CN106950804A - A kind of novel high-precision three-dimensional laser exposure curing equipment - Google Patents
A kind of novel high-precision three-dimensional laser exposure curing equipment Download PDFInfo
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- CN106950804A CN106950804A CN201710354544.1A CN201710354544A CN106950804A CN 106950804 A CN106950804 A CN 106950804A CN 201710354544 A CN201710354544 A CN 201710354544A CN 106950804 A CN106950804 A CN 106950804A
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- dimensional
- galvanometer
- dimensional dynamic
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
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- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention provides a kind of novel high-precision three-dimensional laser exposure curing equipment, including frame and is arranged at the controller of machine frame inside, three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system；Three-Dimensional Dynamic focusing system includes laser, beam expanding lens, Three-Dimensional Dynamic and focuses on galvanometer, scanning galvanometer and field lens；The light beam directive beam expanding lens first launched by laser, then Three-Dimensional Dynamic focusing galvanometer is entered by beam expanding lens, finally reach scanning galvanometer region, and the formation three-dimensional focal face on object to be processed；Also include being used for adjusting beam expanding lens and Three-Dimensional Dynamic focus between galvanometer along optical axis direction apart from size transmission device；The design is especially suitable for the exposure curing working process for different height curved surface, 160 millimeters x160 millimeters of sweep limits can be achieved, smaller focal beam spot can be obtained relative to prefocusing formula system, and can significantly improve the uniformity of focal beam spot, using effect is good.
Description
[technical field]
The present invention relates to laser process equipment technical field, more particularly to a kind of reasonable in design, sweep limits is wide, and
The novel high-precision three-dimensional laser exposure curing equipment of smaller, focal beam spot evenly can be obtained.
[background technology]
In recent years, with the fast development of electronic technology, printed circuit board correlation technique has obtained quick development and entered
Step, also makes it be widely used in every field, almost all of electronic equipment all including corresponding printed circuit board.
In the manufacturing process of PCB, exposure-processed is the key link in whole process of manufacture, however,
The current exposure for wiring board carries out the film with doing generally be directed to the curing process under flat state under ultra violet lamp
The optical polymerization reaction of film, light trigger absorbs luminous energy and resolves into free radical, and free radical triggers photo polymerization monomer to be polymerize again
Cross-linking reaction, forms the build macromolecular structure insoluble in dilute alkaline soln after reaction, due to that preferably can not be carried out for curved surface
Solidification processing, so such processing mode can not meet current high-precision, high complexity exposure-processed requirement.
Based on above mentioned problem, those skilled in the art, which have developed, uses laser explosure, and photoresists, photosensitive-ink are entered
The processing mode of row solidification, because laser has high brightness, high directivity, high monochromaticity and high coherence, it is possible to reach
Higher requirement on machining accuracy, and fabrication cycle is short, increasingly receives an acclaim.
In laser explosure solidification process, for nonplanar structure, it is necessary to fast and flexible regulation focal beam spot height and
Size, forms the machined surface of surface modeling, processing could be smoothly completed, however, currently for such case, general solution
Mode is to utilize different laser Machining heads, and the height size of each processing head is adjusted respectively, so that the focusing surface of curved surface is produced, this
The cost of equipment is not only greatly improved in the design of sample, and maintenance cost is high, and manipulation is complicated, is unfavorable for pushing away extensively for equipment
Extensively.
Based on above mentioned problem, those skilled in the art has carried out substantial amounts of research and development and experiment, from the processing of laser curing
Principle and handling process, which are set out, to be improved and improves, and is targetedly researched and developed, and achieve preferable achievement.
[content of the invention]
To overcome the problems of prior art, the present invention provides a kind of reasonable in design, and sweep limits is wide, and can
To obtain the novel high-precision three-dimensional laser exposure curing equipment of smaller, focal beam spot evenly.
The scheme that the present invention solves technical problem is to provide a kind of novel high-precision three-dimensional laser exposure curing equipment, including
Frame and it is arranged at the controller of machine frame inside, three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system；The three-dimensional
Dynamic focusing system include with controller be electrically connected with laser, beam expanding lens, Three-Dimensional Dynamic focus on galvanometer, scanning galvanometer and
Field lens；The light beam directive beam expanding lens first launched by laser, then Three-Dimensional Dynamic focusing galvanometer is entered by beam expanding lens, finally reach
Scanning galvanometer region, and the formation three-dimensional focal face on object to be processed；Also include being used to adjust beam expanding lens and Three-Dimensional Dynamic is gathered
Along optical axis direction apart from the transmission device of size between burnt galvanometer, the Three-Dimensional Dynamic focuses on galvanometer and is arranged at the transmission device
On；The three-dimensional rotation chucking appliance system includes the first swivel mount, the first motor of driving the first swivel mount rotation and consolidated
Due to the second motor of the first swivel mount one end；Object to be processed is arranged in the first swivel mount, and with the first rotation
Pivoted frame rotates；The Three-Dimensional Dynamic focusing system is arranged at three-dimensional rotation chucking appliance system top.
Preferably, the three-dimensional rotation chucking appliance system is also including being arranged at machine frame inside, for placing the first swivel mount
Pedestal；The first swivel mount two ends set left contiguous block and right contiguous block respectively；Second motor is fixedly installed on
On right contiguous block, and rotatable positioning member is both provided with the left contiguous block and right contiguous block middle part；Object to be processed
Fixed by two rotatable positioning members, and the drive shaft of the second motor is connected with the rotatable positioning member of right contiguous block, driving rotation
Keeper and the axial rotation of object to be processed.
Preferably, the Three-Dimensional Dynamic focusing system includes the laser storehouse for placing laser and expanded for disposing
Shu Jing and Three-Dimensional Dynamic focus on the focus lamp storehouse of galvanometer；Scanning galvanometer is arranged on the outside of focus lamp storehouse；In the beam expanding lens and three
The reflective mirror for changing the light direction of propagation is additionally provided between dimension dynamic focusing vibration mirror to combine；Laser light from beam expanding lens
Then beam is irradiated to Three-Dimensional Dynamic and is focused in galvanometer by the reflection of reflective mirror.
Preferably, the Three-Dimensional Dynamic focusing system also includes being arranged at laser storehouse and focus lamp storehouse bottom, playing branch
The support frame of support effect；The support frame is arranged on the processing platform of machine frame inside setting；Support frame and laser storehouse and focusing
Jing Cang is fixedly connected；
The frame includes the upper shell and the lower house positioned at processing platform bottom positioned at processing platform top；It is described
Three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system are arranged inside upper shell；Controller is arranged inside lower house；And
Maintenance door is additionally provided with the outside of the lower house.
Preferably, it is additionally provided with and is electrically connected with, with controller for avoiding setting on the outside of the three-dimensional rotation chucking appliance system
The safety screen for causing personnel to injure during received shipment row；Safe grating is provided with the safety screen, equipment was run
Cheng Zhong, human hand or other positions are stretched into after the sensing range of safe grating, controller control device operation suspension.
Preferably, a kind of novel high-precision three-dimensional laser exposure curing equipment is also external including being arranged at the upper casing
Display, control button and the keyboard on processing platform in portion；The upper shell is at three-dimensional rotation chucking appliance system position
Offer processing hole；And the processing hole position is between safety screen and display and control button；On the upper shell top also
It is provided with the alarm lamp being electrically connected with controller.
Preferably, it is provided with protective cover on the upper shell, close to the Three-Dimensional Dynamic focusing system position of machine frame inside；Should
The protective cover is located at processing hole top.
Preferably, the quantity of the reflective mirror inside the focus lamp storehouse is two；And be additionally provided with inside focus lamp storehouse
The focusing galvanometer storehouse of galvanometer is focused on for placing Three-Dimensional Dynamic；In the focusing galvanometer storehouse thang-kng is offered towards reflective mirror side
Hole；The beam expanding lens and Three-Dimensional Dynamic focus on galvanometer and be arranged in parallel.
Preferably, the scanning galvanometer is located at Three-Dimensional Dynamic and focused on rear side of galvanometer；And the scanning galvanometer is fixed on focus lamp
On storehouse；Field lens is fixed on scanning galvanometer bottom；The field lens and the first rotation rack position pair in three-dimensional rotation chucking appliance system
Should.
Preferably, the laser is ultraviolet laser.
Compared with prior art, a kind of novel high-precision three-dimensional laser exposure curing equipment of the invention passes through in machine frame inside
Set what the laser in three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system, Three-Dimensional Dynamic focusing system was launched simultaneously
Light beam directive beam expanding lens first, then Three-Dimensional Dynamic focusing galvanometer is entered by beam expanding lens, scanning galvanometer region is finally reached, and treating
Process on object and formed during three-dimensional focal face, reality processing, beam expanding lens focuses on the distance between galvanometer no with Three-Dimensional Dynamic
Disconnected adjustment, so as to change the position of focal spot in two dimension or three dimensions, reaches the effect of " 3-D scanning ", very
It is adapted to the exposure curing working process for different height curved surface, the design can realize 160 millimeters x160 millimeters of sweep limits,
Smaller focal beam spot can be obtained relative to prefocusing formula system, and can significantly improve the uniformity of focal beam spot, is made
It is good with effect.
[brief description of the drawings]
Fig. 1 is a kind of stereoscopic-state structural representation of novel high-precision three-dimensional laser exposure curing equipment of the invention.
Fig. 2 is a kind of internal state structural representation of novel high-precision three-dimensional laser exposure curing equipment of the invention.
Fig. 3 is the enlarged diagram at A in Fig. 2.
Fig. 4 is the solid of Three-Dimensional Dynamic focusing system in a kind of novel high-precision three-dimensional laser exposure curing equipment of the invention
Status architecture schematic diagram.
Three-Dimensional Dynamic focusing system is plane in a kind of novel high-precision three-dimensional laser exposure curing equipment of Fig. 5 present invention
State structural representation.
Fig. 6 is the enlarged diagram at B in Fig. 4.
[embodiment]
To make the purpose of the present invention, technical scheme and advantage are more clearly understood, below in conjunction with drawings and Examples, to this
Invention is further elaborated.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, not
For limiting this invention.
Fig. 1 is referred to Fig. 6, a kind of novel high-precision three-dimensional laser exposure curing equipment 1 of the invention include frame 11 with
And it is arranged at controller, three-dimensional rotation chucking appliance system 13 and Three-Dimensional Dynamic focusing system 15 inside frame 11；The three-dimensional
Dynamic focusing system 15 include with controller be electrically connected with laser 153, beam expanding lens 154, Three-Dimensional Dynamic focus on galvanometer 156,
Scanning galvanometer 157 and field lens 158；The light beam directive beam expanding lens 154 first launched by laser 153, then entered by beam expanding lens 154
Enter Three-Dimensional Dynamic and focus on galvanometer 156, finally reach the region of scanning galvanometer 157, and three-dimensional focal is formed on object 2 to be processed
Face；Also include being used to adjust between beam expanding lens 154 and Three-Dimensional Dynamic focusing galvanometer 156 filling along transmission of the optical axis direction apart from size
1541 are put, the Three-Dimensional Dynamic focuses on galvanometer 156 and is arranged on the transmission device 1561；The three-dimensional rotation chucking appliance system 13 is wrapped
Include the first swivel mount 131, the first motor of driving the first swivel mount 131 rotation and be fixed on first swivel mount 131
Second motor 133 of one end；Object 2 to be processed is arranged in the first swivel mount 131, and is revolved with the first swivel mount 131
Turn；The Three-Dimensional Dynamic focusing system 15 is arranged at the top of three-dimensional rotation chucking appliance system 13.
It is three-dimensional by setting three-dimensional rotation chucking appliance system 13 and Three-Dimensional Dynamic focusing system 15 simultaneously in the inside of frame 11
The light beam directive beam expanding lens 154 first that laser 153 in dynamic focusing system 15 is launched, then enter three-dimensional by beam expanding lens 154
Dynamic focusing vibration mirror 156, finally reaches the region of scanning galvanometer 157, and forms three-dimensional focal face on object 2 to be processed, actual
In process, beam expanding lens 154 and Three-Dimensional Dynamic focus on the constantly adjustment of the distance between galvanometer 156, so as in two dimension or
Change the position of focal spot in three dimensions, reach the effect of " 3-D scanning ", be especially suitable for for different height curved surface
Exposure curing working process, the design can realize 160 millimeters x160 millimeters of sweep limits, can be with relative to prefocusing formula system
Smaller focal beam spot is obtained, and can significantly improve the uniformity of focal beam spot, using effect is good, reaches high-precision exposure
Solidification.
Preferably, the three-dimensional rotation chucking appliance system 13 also includes being arranged inside frame 11, rotated for placing first
The pedestal 135 of frame 131；The two ends of first swivel mount 131 set left contiguous block 1311 and right contiguous block 1313 respectively；The
Two motors 133 are fixedly installed on right contiguous block 1313, and in the middle of the left contiguous block 1311 and right contiguous block 1313
Position is both provided with rotatable positioning member；Object 2 to be processed is fixed by two rotatable positioning members, and the drive of the second motor 133
Moving axis is connected with the rotatable positioning member of right contiguous block 1313, driving rotatable positioning member and the axial rotation of object to be processed 2.It is three-dimensional
The structure design of rolling clamp system 13 can cause during reality processing, can flexibly treat processing object 2 it is each not
It is processed with corner, it is to avoid produce processing dead angle, improve processing efficiency, the structure design letter is answered, and good stability is used
Reliability is high.
Preferably, the Three-Dimensional Dynamic focusing system 15 includes laser storehouse 152 and the use for being used to place laser 153
The focus lamp storehouse 151 of galvanometer 156 is focused in placement beam expanding lens 154 and Three-Dimensional Dynamic；Scanning galvanometer 157 is arranged at focus lamp storehouse
151 outsides；It is additionally provided between the beam expanding lens 154 and Three-Dimensional Dynamic focus on galvanometer 156 for changing the light direction of propagation
Reflective mirror 155 combine；Then laser beam from beam expanding lens 154 is irradiated to Three-Dimensional Dynamic by the reflection of reflective mirror 155
Focus in galvanometer 156.
Preferably, the Three-Dimensional Dynamic focusing system 15 also includes being arranged under laser storehouse 152 and focus lamp storehouse 151
Portion, the support frame 158 played a supporting role；The support frame 158 is arranged on the processing platform 117 that the inside of frame 11 is set；Branch
Support 158 is fixedly connected with laser storehouse 152 and focus lamp storehouse 151；
The frame 11 is included positioned at the upper shell on the top of processing platform 117 and under the bottom of processing platform 117
Housing；The three-dimensional rotation chucking appliance system 13 and Three-Dimensional Dynamic focusing system 15 are arranged inside upper shell；Controller is arranged at
Inside lower house；And it is additionally provided with maintenance door on the outside of the lower house.Reasonable in design, reliability is high.
Preferably, the outside of three-dimensional rotation chucking appliance system 13 is additionally provided with is electrically connected with, for avoiding with controller
The safety screen 113 for causing personnel to injure in equipment running process；Safe grating is provided with the safety screen 113
1131, in equipment running process, human hand or other positions are stretched into after the sensing range of safe grating 1131, controller control device
Operation suspension.The setting of safety screen 113 can effectively improve the overall security performance of equipment.
Preferably, a kind of novel high-precision three-dimensional laser exposure curing equipment 1 also includes being arranged at the upper shell
Outside display 114, control button 115 and the keyboard 116 on processing platform；The upper shell is pressed from both sides in three-dimensional rotation
The position of tool system 13 offers processing hole；And the processing hole position in safety screen 113 and display 114 and control button 115 it
Between；The alarm lamp 111 being electrically connected with controller is additionally provided with the upper shell top.
Preferably, the position of Three-Dimensional Dynamic focusing system 15 on the upper shell, inside frame 11 is provided with protection
Cover 112；The protective cover 112 is located at processing hole top.
Preferably, the quantity of the reflective mirror 155 inside the focus lamp storehouse 151 is two；And inside focus lamp storehouse 151
It is additionally provided with the focusing galvanometer storehouse that galvanometer 156 is focused on for placing Three-Dimensional Dynamic；In the focusing galvanometer storehouse towards reflective mirror 155 1
Side offers light hole；The beam expanding lens 154 and Three-Dimensional Dynamic focus on galvanometer 156 and be arranged in parallel.
Preferably, the scanning galvanometer 157 is located at Three-Dimensional Dynamic and focused on rear side of galvanometer 156；And the scanning galvanometer 157 is fixed
In on focus lamp storehouse 151；Field lens 158 is fixed on the bottom of scanning galvanometer 157；The field lens 158 and three-dimensional rotation chucking appliance system
The position of the first swivel mount 131 correspondence in 13.
Preferably, the laser 153 is ultraviolet laser 153.It is well known that laser have high brightness, high directivity,
High monochromaticity and high coherence, so the design is exposed solidification processing using laser, with more significant than uviol lamp
Working process effect.
In Three-Dimensional Dynamic scanning system, scanning galvanometer 157 is placed on Three-Dimensional Dynamic and focuses on the rear of galvanometer 156, laser
Beam is introduced into beam expanding lens 154, enters back into Three-Dimensional Dynamic and focuses on galvanometer 156, is then scanned through the reflection of galvanometer 157, just finally
Reach focal plane, using transmission device 1561 along optical axis direction moving three dimension dynamic focusing vibration mirror 156, change beam expanding lens 154 with
Three-Dimensional Dynamic focuses on the distance between galvanometer 156, so as to change the position of focal spot in two dimension or three dimensions, reaches
To " 3-D scanning ", the focusing surface of this system is a curved surface, and flat field can be by coordinating the rotation of scanning galvanometer 1574 micro-
Beam expanding lens 154 is adjusted to focus on the distance between galvanometer 156 to realize with Three-Dimensional Dynamic.
Compared with prior art, a kind of novel high-precision three-dimensional laser exposure curing equipment 1 of the invention is by frame 11
Swashing in the internal chucking appliance system of setting three-dimensional rotation simultaneously 13 and Three-Dimensional Dynamic focusing system 15, Three-Dimensional Dynamic focusing system 15
The light beam directive beam expanding lens 154 first that light device 153 is launched, then Three-Dimensional Dynamic focusing galvanometer 156 is entered by beam expanding lens 154, finally
The region of scanning galvanometer 157 is reached, and is formed on object 2 to be processed during three-dimensional focal face, reality processing, beam expanding lens 154
The constantly adjustment of the distance between galvanometer 156 is focused on Three-Dimensional Dynamic, light is focused on so as to change in two dimension or three dimensions
The position of point, reaches the effect of " 3-D scanning ", is especially suitable for the exposure curing working process for different height curved surface, originally sets
160 millimeters x160 millimeters of sweep limits is can be achieved in meter, and smaller focal beam spot can be obtained relative to prefocusing formula system, and
The uniformity of focal beam spot can be significantly improved, using effect is good, reach that high-precision exposure solidifies.
Invention described above embodiment, is not intended to limit the scope of the present invention..It is any in the present invention
Spirit and principle within modification, equivalent and the improvement made etc., should be included in the claim protection model of the present invention
Within enclosing.
Claims (10)
1. a kind of novel high-precision three-dimensional laser exposure curing equipment, it is characterised in that：Including frame and it is arranged in frame
Controller, three-dimensional rotation chucking appliance system and the Three-Dimensional Dynamic focusing system in portion；The Three-Dimensional Dynamic focusing system includes and control
Laser, beam expanding lens, Three-Dimensional Dynamic focusing galvanometer, scanning galvanometer and field lens that device processed is electrically connected with；Launched by laser
Light beam directive beam expanding lens first, then Three-Dimensional Dynamic focusing galvanometer is entered by beam expanding lens, scanning galvanometer region is finally reached, and treating
Process and three-dimensional focal face is formed on object；Also include being used to adjust between beam expanding lens and Three-Dimensional Dynamic focusing galvanometer along optical axis direction
Apart from the transmission device of size, the Three-Dimensional Dynamic focuses on galvanometer and is arranged on the transmission device；The three-dimensional rotation fixture system
System includes the first swivel mount, the first motor of driving the first swivel mount rotation and is fixed on the first swivel mount one end
Second motor；Object to be processed is arranged in the first swivel mount, and is rotated with the first swivel mount；The Three-Dimensional Dynamic is gathered
Burnt system is arranged at three-dimensional rotation chucking appliance system top.
2. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 1, it is characterised in that：The three-dimensional
Rolling clamp system also includes being arranged at machine frame inside, the pedestal for placing the first swivel mount；First swivel mount two
End sets left contiguous block and right contiguous block respectively；Second motor is fixedly installed on right contiguous block, and in the left company
Connect block and right contiguous block middle part is both provided with rotatable positioning member；Object to be processed is fixed by two rotatable positioning members, and the
The drive shaft of two motors is connected with the rotatable positioning member of right contiguous block, driving rotatable positioning member and object to be processed axial direction
Rotation.
3. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 1, it is characterised in that：The three-dimensional
Dynamic focusing system is including for placing the laser storehouse of laser and for disposing beam expanding lens and Three-Dimensional Dynamic to focus on galvanometer
Focus lamp storehouse；Scanning galvanometer is arranged on the outside of focus lamp storehouse；Also set between the beam expanding lens and Three-Dimensional Dynamic focus on galvanometer
The reflective mirror for changing the light direction of propagation is equipped with to combine；Laser beam from beam expanding lens is by the reflection of reflective mirror, so
After be irradiated to Three-Dimensional Dynamic focus on galvanometer in.
4. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 3, it is characterised in that：The three-dimensional
Dynamic focusing system also includes being arranged at laser storehouse and focus lamp storehouse bottom, the support frame played a supporting role；The support frame
On the processing platform for being arranged at machine frame inside setting；Support frame is fixedly connected with laser storehouse and focus lamp storehouse；
The frame includes the upper shell and the lower house positioned at processing platform bottom positioned at processing platform top；The three-dimensional
Rolling clamp system and Three-Dimensional Dynamic focusing system are arranged inside upper shell；Controller is arranged inside lower house；And institute
State and be additionally provided with maintenance door on the outside of lower house.
5. a kind of novel high-precision three-dimensional laser exposure curing as described in any one claim in Claims 1-4 is set
It is standby, it is characterised in that：It is additionally provided with and is electrically connected with, with controller for avoiding in equipment on the outside of the three-dimensional rotation chucking appliance system
The safety screen for causing personnel to injure in running；Safe grating, equipment running process are provided with the safety screen
In, human hand or other positions are stretched into after the sensing range of safe grating, controller control device operation suspension.
6. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 5, it is characterised in that：Also include setting
Display, control button and the keyboard on processing platform being placed in outside the upper shell；The upper shell is in three-dimensional
Rolling clamp system position offers processing hole；And the processing hole position is between safety screen and display and control button；
The upper shell top is additionally provided with the alarm lamp being electrically connected with controller.
7. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 6, it is characterised in that：The upper casing
Protective cover is provided with body, close to the Three-Dimensional Dynamic focusing system position of machine frame inside；The protective cover is located on processing hole
Portion.
8. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 3, it is characterised in that：It is described to focus on
The quantity of reflective mirror inside mirror storehouse is two；And be additionally provided with inside focus lamp storehouse for placing Three-Dimensional Dynamic focusing galvanometer
Focusing galvanometer storehouse；In the focusing galvanometer storehouse light hole is offered towards reflective mirror side；The beam expanding lens and Three-Dimensional Dynamic are poly-
Burnt galvanometer be arranged in parallel.
9. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 3, it is characterised in that：The scanning
Galvanometer is located at Three-Dimensional Dynamic and focused on rear side of galvanometer；And the scanning galvanometer is fixed on focus lamp storehouse；Field lens is fixed on scanning galvanometer
Bottom；The field lens is corresponding with the first rotation rack position in three-dimensional rotation chucking appliance system.
10. a kind of novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 1, it is characterised in that：It is described to swash
Light device is ultraviolet laser.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710354544.1A CN106950804B (en) | 2017-05-19 | 2017-05-19 | A kind of novel high-precision three-dimensional laser exposure curing equipment |
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|---|---|---|---|
| CN201710354544.1A CN106950804B (en) | 2017-05-19 | 2017-05-19 | A kind of novel high-precision three-dimensional laser exposure curing equipment |
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| CN106950804A true CN106950804A (en) | 2017-07-14 |
| CN106950804B CN106950804B (en) | 2018-05-08 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108380465A (en) * | 2018-01-31 | 2018-08-10 | 江苏法尔胜光电科技有限公司 | Solidification equipment suitable for bundling optical fiber connector boundling end |
| CN108513445A (en) * | 2018-04-24 | 2018-09-07 | 朱元昊 | A kind of novel semi-additive process 3D fine circuitry manufacture crafts |
| CN108838552A (en) * | 2018-07-13 | 2018-11-20 | 上海骄成机电设备有限公司 | A kind of anvil block exposure all-in-one machine |
| CN109108459A (en) * | 2018-10-18 | 2019-01-01 | 深圳市斯普莱特激光科技有限公司 | A kind of high degree of safety automatized three-dimensional laser process equipment |
| CN109175677A (en) * | 2018-10-18 | 2019-01-11 | 深圳市斯普莱特激光科技有限公司 | A kind of high accurancy and precision automatized three-dimensional laser process equipment |
| CN112117393A (en) * | 2020-09-23 | 2020-12-22 | 江苏洛柳精密科技有限公司 | Laser packaging placement equipment |
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