CN106944751A - A kind of filter membrane and laser-processing system using Laser Processing - Google Patents
A kind of filter membrane and laser-processing system using Laser Processing Download PDFInfo
- Publication number
- CN106944751A CN106944751A CN201710331982.6A CN201710331982A CN106944751A CN 106944751 A CN106944751 A CN 106944751A CN 201710331982 A CN201710331982 A CN 201710331982A CN 106944751 A CN106944751 A CN 106944751A
- Authority
- CN
- China
- Prior art keywords
- laser
- filter membrane
- processing
- processing system
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/54—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms
- B01D46/543—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms using membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of filter membrane using Laser Processing, available for hundreds of nanometers to hundreds of microns various sizes of pollution particles of filtering.It has a wide range of application, when the filtering membrane aperture that Laser Processing is obtained is less than pollution particle effect more preferably；Also disclose it is a kind of be used to process the laser-processing system of the filter membrane, its laser for including being sequentially arranged, expand device, diffraction optical element, galvanometer unit, lens, loading mechanism and corresponding control unit.Pass through the selection to laser processing parameter, it is aided with galvanometer and loading mechanism, the microwell array that hundreds of nanometers to hundreds of microns of aperture is not waited can be made on the filter membrane of selected material, the system can be used for processing filter membrane (net), its high working efficiency, production cost are low, it is big without tool loss, pore density, with good filter effect.
Description
Technical field
The invention belongs to field of Environment Protection, it is related to a kind of filter membrane or screen pack using Laser Processing and processes the filter membrane
Or the laser-processing system of screen pack.
Background technology
Global air pollution, water pollution phenomenon are increasingly aggravated in recent years, in order to alleviate gas or liquid pollutant to people
Harmful effect, filtering technique obtained the attention and development of researcher and environment-friendly type enterprise, wherein micro-filter technology and product,
The demand that micron to the filter membrane (net) of nanoscale pollutant can especially be filtered is continued to increase.Micro-filtration is specifically referred to from gas
The method for mutually and in liquid phase suspension liquid retaining particulate, bacterium and other pollutants, main to be realized using membrane separation technique, filter membrane
Separating mechanism be mainly screening retention, by size be more than filter sizes solid particle or particle aggregate retain, can be extensive
Applied to fields such as waste water, sewage disposal, food, pharmaceutical industries, Seawater Desalination Project, air pollution treatments.
Particularly fine particle is seriously polluted in air in recent years, and it is micro- that environmental air dynamics equivalent diameter is less than 2.5
Particulate matter (PM2.5) concentration of rice remains high, and has had a strong impact on air quality, compared with thicker airborne particulate, its area
Greatly, activity is strong, easily subsidiary such as heavy metal, microorganism poisonous and harmful substances, its atmospheric residence time length, fed distance
Far, it is very big to health and atmosphere environment impact.And existing filter membrane processing unit (plant) structure is complex, production cost is high,
The particulate that membrane material may filter that simultaneously is very limited.
The content of the invention
In order to solve the above technical problems, the present invention proposes that a kind of utilization is laser machined, different sizes are (several available for filtering
Hundred nanometers to hundreds of microns) pollute the filter membrane (net) of particle and the laser-processing system for preparing filter bores.
The technical scheme is that：
The present invention is provided to be distributed with for filtering microparticle on a kind of filter membrane using Laser Processing, the filter membrane
In microwell array, the microwell array, a diameter of 0.1 micron -1 millimeter of micropore.
Preferably, the material of the filter membrane be metal or nonmetallic, the metal include but is not limited to stainless steel,
Aluminium, the nonmetallic including but not limited to plastics；The thickness of the filter membrane is 1 micron -2 millimeters.
Preferably, the aperture of the micropore is not more than 2.5 μm.
The present invention also provides a kind of laser-processing system for being used to process the filter membrane, and the system of processing is included along sharp
Laser that light light path is sequentially arranged, expand device, diffraction optical element, galvanometer unit, lens, loading mechanism, also including with
The control unit of the laser, galvanometer unit and the electrical connection of loading mechanism.
Preferably, also including ccd image sensor, the ccd image sensor is disposed adjacent with the galvanometer unit,
Loading plane of the camera of the ccd image sensor towards the loading mechanism.
Preferably, the laser beam wavelength that the laser is sent is less than 2000nm.
Preferably, the pulsewidth of the laser can be millisecond, microsecond, nanosecond, psec or femtosecond rank.
Preferably, the galvanometer unit includes X-Y galvanometers, angle measuring sensor and drives the X-Y galvanometers to rotate
Drive mechanism；
Preferably, the loading mechanism is X-Y axle mobile platforms.
Preferably, the lens can be planoconvex spotlight, biconvex lens or flat field scanning lens.
The above-mentioned technical proposal of the present invention has advantages below compared with prior art：
(1) it is distributed with the filter membrane of the present invention using Laser Processing, the filter membrane for filtering microparticle
Microwell array, in the microwell array, a diameter of 0.1 micron -1 millimeter of micropore.Different sizes can be filtered, and (hundreds of nanometers extremely
Hundreds of microns) pollution particle, have a wide range of application, when obtained filter membrane (net) aperture be less than pollution particle effect more preferably；Together
When the filter membrane filter bores be made by Laser Processing, high in machining efficiency, equipment is lossless in itself, can prepare hole density it is big,
Filter membrane more than quantity, reduces production cost, and obtained filter membrane can be used as on mouth mask or other filtering products as needed.
(2) filter membrane of the present invention using Laser Processing, the material of the filter membrane is metal or nonmetallic, institute
State metal and include but is not limited to stainless steel, aluminium, the nonmetallic including but not limited to plastics, the thickness of the filter membrane is micro- for 1
- 2 millimeters of rice, extensively, the filter membrane of unlike material can be applied to different filtering occasions to the filter membrane material selection.
(3) laser-processing system of the present invention for being used to process the filter membrane, including sequentially set along laser optical path
The laser put, expand device, diffraction optical element, galvanometer unit, lens, loading mechanism, also including with the laser, shake
Mirror unit and the control unit of loading mechanism electrical connection.The system can monitor laser drilling process in real time, and reliability is high, processing effect
Rate and high precision, it is adaptable to the industrialized mass production of filter membrane.
Brief description of the drawings
In order that present disclosure is more likely to be clearly understood, specific embodiment and combination below according to the present invention
Accompanying drawing, the present invention is further detailed explanation, wherein
Fig. 1 is the structural representation of the laser-processing system described in the embodiment of the present invention 2.
Reference is expressed as in figure：1- lasers；2- expands device；3- galvanometer units；4- lens；5- loadings mechanism；
6- control units；7- diffraction optical elements.
Embodiment
Embodiment 1
The present embodiment, which is provided, is distributed with the different grains of used filtering on a kind of filter membrane using Laser Processing, the filter membrane
In the microwell array of the microparticle in footpath, the microwell array, a diameter of 0.1 μm of -1mm of micropore, preferably 2-500 μm, according to
Different demands, with Laser Processing can be that in different pore size, the present embodiment, the aperture of the micropore is preferably not greater than by micropore
2.5 μm, it is suitable for the minitype particles such as filtering PM2.5, its good filtration effect when in use, is used without multiple-layer stacked.The mistake
The material of filter membrane can be metal or nonmetallic materials, and wherein metal material can be selected as the conventional material such as stainless steel or aluminium
Matter, nonmetallic materials can select plastics, and the thickness of the filter membrane is 1 micron -2 millimeters, can be according to demand from different
Thickness.As disposable embodiment, the filter membrane can also be the filtering of the different pore size mesh made with laser
Net, plays a part of filtering particulate.
Embodiment 2
The present embodiment provides a kind of laser-processing system for being used to process the filter membrane (net), itself as shown in figure 1, including
The laser 1 that is sequentially arranged along laser optical path, for change laser beam spot sizes expand device 2, diffraction optical element (DOE)
7th, for making the galvanometer unit 3 of laser beam deflection, the lens 4 for focusing on laser beam and loading mechanism 5, the loading mechanism 5
Loading plane towards the lens 4 exiting surface, also including being electrically connected with the laser 1, galvanometer unit 3 and loading mechanism 4
The control unit 6 connect.The diffraction optical element 7, which is arranged at, to be expanded between device 2 and galvanometer unit 3, plays and laser beam spreads out
The effect as a plurality of collimated light beam is penetrated, multiple micropores can be formed on filter membrane or microwell array is directly formed simultaneously,
Improve the efficiency of laser boring.
Wherein, described control unit 6 is the control terminals such as conventional computer, mobile phone；The laser 1 is semiconductor laser
Device, a length of 266-1064nm of its laser beam-wave sent；Device 2 is expanded for laser beam expanding lens, it expands multiple for 1-10 times, uses
In the beam diameter and the angle of divergence that change laser beam, make Laser Focusing effect more preferable；The galvanometer unit 3 shakes including a set of X-Y
Mirror, this set eyeglass can be rotated in X, Y direction respectively, and reflex is played to laser beam, the deflection effect to laser is realized,
Galvanometer is connected with angle measuring sensor, for measuring the deflection angle of X, Y galvanometer and giving control list by the information transmission measured
Member 6, the drive mechanism also rotated including driving X-Y galvanometers, the drive mechanism is conventional servomotor；The lens 4 can
Using planoconvex spotlight, biconvex lens or usual scanning lens, to play the focussing force to laser beam；The loading mechanism
5 be X-Y axle mobile platforms, along X, Y-direction filter membrane workpiece to be punctured can be driven to move under the regulation and control of control unit 6.
Further, also including a ccd image sensor, the ccd image sensor is adjacent with the galvanometer unit
Set, the camera of imaging sensor monitors the process of laser boring in real time towards the loading plane of loading mechanism 5.
The laser-processing system progress laser that the present embodiment also provides a kind of filter membrane (net) using described in embodiment 1 is beaten
The method in hole, it comprises the following steps：
S1, graphics processing made using control unit 6, aperture to be punctured and pitch of holes be set, and by the graphical information
It is directed into the terminal of laser 1；
S2, the loading plane that filter membrane to be processed (net) workpiece is placed in loading mechanism 5, set focal position of laser and swash
Light machined parameters, the parameters, the arteries and veins of laser such as pulsewidth, power, the wavelength of laser are set according to the thickness of filter membrane (net) and material
Width can be set in millisecond, microsecond, nanosecond, psec or femtosecond rank, the present embodiment according to the difference of filter membrane, the filter membrane
(net) uses plastic material, and thickness is 5-60 μm；
S3, unlatching laser 1, carry out laser boring, while start ccd image sensor, it is whole to laser drilling process
Monitoring in real time, controls the loading mechanism 5 to be moved in X, Y direction, with the different positions to workpiece during laser boring
Put carry out perforation processing.
Obviously, above-described embodiment is only intended to clearly illustrate example, and the not restriction to embodiment.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of change or
Change.There is no necessity and possibility to exhaust all the enbodiments.And the obvious change thus extended out or
Among changing still in the protection domain of the invention.
Claims (10)
1. a kind of filter membrane using Laser Processing, it is characterised in that be distributed with the filter membrane for filtering microparticle
In microwell array, the microwell array, a diameter of 0.1 micron -1 millimeter of micropore.
2. the filter membrane according to claim 1 using Laser Processing, it is characterised in that the material of the filter membrane is gold
Category is nonmetallic, and the metal includes but is not limited to stainless steel, aluminium；The nonmetallic including but not limited to plastics, the filtering
The thickness of net is 1 micron -2 millimeters.
3. the filter membrane according to claim 2 using Laser Processing, it is characterised in that the aperture of the micropore is not more than
2.5μm。
4. a kind of laser-processing system for being used to process the filter membrane described in claim any one of 1-3, it is characterised in that described
System of processing include be sequentially arranged along laser optical path laser, expand device, diffraction optical element, galvanometer unit, lens, load
Thing mechanism, the loading plane of the loading mechanism towards the lens exiting surface, also including with the laser, galvanometer unit
The control unit electrically connected with loading mechanism.
5. laser-processing system according to claim 4, it is characterised in that also including ccd image sensor, the CCD
Imaging sensor is disposed adjacent with the galvanometer unit, and the camera of the ccd image sensor is towards the loading mechanism
Loading plane.
6. laser-processing system according to claim 5, it is characterised in that the laser beam wavelength that the laser is sent is small
In 2000nm.
7. laser-processing system according to claim 6, it is characterised in that the pulsewidth of the laser can for millisecond, microsecond,
Nanosecond, psec or femtosecond rank.
8. laser-processing system according to claim 7, it is characterised in that the galvanometer unit includes X-Y galvanometers, angle
Measurement sensor and the drive mechanism for driving the X-Y galvanometers to rotate.
9. laser-processing system according to claim 8, it is characterised in that the loading mechanism is X-Y axle mobile platforms.
10. laser-processing system according to claim 9, it is characterised in that the lens can be planoconvex spotlight, biconvex
Lens or flat field scanning lens.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710331982.6A CN106944751A (en) | 2017-05-11 | 2017-05-11 | A kind of filter membrane and laser-processing system using Laser Processing |
| PCT/CN2017/103375 WO2018205482A1 (en) | 2017-05-11 | 2017-09-26 | Filtering film processed using laser and laser processing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710331982.6A CN106944751A (en) | 2017-05-11 | 2017-05-11 | A kind of filter membrane and laser-processing system using Laser Processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106944751A true CN106944751A (en) | 2017-07-14 |
Family
ID=59478578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710331982.6A Pending CN106944751A (en) | 2017-05-11 | 2017-05-11 | A kind of filter membrane and laser-processing system using Laser Processing |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106944751A (en) |
| WO (1) | WO2018205482A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107745188A (en) * | 2017-09-30 | 2018-03-02 | 深圳信息职业技术学院 | A kind of picosecond laser process equipment |
| CN107876968A (en) * | 2017-12-26 | 2018-04-06 | 英诺激光科技股份有限公司 | A kind of laser process equipment for parallel processing |
| CN108211817A (en) * | 2017-12-29 | 2018-06-29 | 广东工业大学 | A kind of manufacturing method of aluminum metal filter membrane |
| WO2018205482A1 (en) * | 2017-05-11 | 2018-11-15 | 英诺激光科技股份有限公司 | Filtering film processed using laser and laser processing system |
| CN112516804A (en) * | 2019-09-18 | 2021-03-19 | 无锡华润微电子有限公司 | PM2.5 protective equipment, PM2.5 filtering membrane and preparation method thereof |
| CN113750823A (en) * | 2021-07-19 | 2021-12-07 | 青岛科技大学 | Natural biomass material oil-water separation membrane and preparation method and application thereof |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1338970A (en) * | 1999-12-08 | 2002-03-06 | 巴克斯特国际公司 | Microporous filter membrane, manufacture thereof and separator therewith |
| JP2003181668A (en) * | 2001-11-30 | 2003-07-02 | Matsushita Electric Ind Co Ltd | Pico-second laser micro-machining system, system for controlling intensity of beam of light, method of laser milling cutting, method of controlling intensity distribution of beam of light, method of designing micro- filter, method of rectifying angle of reflection, method of correcting hysteresis effect, and method of operating scanning mirror |
| US20040080592A1 (en) * | 2002-10-29 | 2004-04-29 | Xerox Corporation | Conical or cylindrical laser ablated filter |
| CN101980083A (en) * | 2010-09-13 | 2011-02-23 | 长春理工大学 | Method and system for preparing filter membrane mesh structure by laser interference photoetching technology |
| KR20140086934A (en) * | 2014-05-16 | 2014-07-08 | 한국과학기술원 | Method of manufacturing surface plasmonic color filter using laser interference lithography |
| CN203817621U (en) * | 2013-12-03 | 2014-09-10 | 张立国 | Laser beam splitting and galvanometer scanning processing device |
| CN105195904A (en) * | 2014-06-23 | 2015-12-30 | 三菱电机株式会社 | Laser processing device |
| CN205309586U (en) * | 2016-01-29 | 2016-06-15 | 孙树峰 | Device in femto second laser processing aeroengine blade air film hole |
| CN105688447A (en) * | 2016-01-21 | 2016-06-22 | 北京理工大学 | Filter screen capable of realizing efficient oil-water separation, and method for preparing filter screen by femtosecond laser |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07108392A (en) * | 1993-10-13 | 1995-04-25 | Seishin Kigyo:Kk | Base plate piercing method and device and base plate subjected to piercing |
| JP2006086436A (en) * | 2004-09-17 | 2006-03-30 | Seiko Epson Corp | Method of manufacturing semiconductor apparatus, electro-optical device and electronic device |
| CN202185678U (en) * | 2011-07-27 | 2012-04-11 | 苏州德龙激光有限公司 | Device for manufacturing metal film group hole through ultrashort pulse laser |
| CN105664725A (en) * | 2016-03-28 | 2016-06-15 | 杭州青澜环保科技有限公司 | Soft flat filter membrane element and method for manufacturing same |
| CN106475685B (en) * | 2016-12-07 | 2019-10-11 | 常州英诺激光科技有限公司 | A kind of device and marking method improving material laser marking quality and efficiency |
| CN106944751A (en) * | 2017-05-11 | 2017-07-14 | 英诺激光科技股份有限公司 | A kind of filter membrane and laser-processing system using Laser Processing |
-
2017
- 2017-05-11 CN CN201710331982.6A patent/CN106944751A/en active Pending
- 2017-09-26 WO PCT/CN2017/103375 patent/WO2018205482A1/en active Application Filing
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1338970A (en) * | 1999-12-08 | 2002-03-06 | 巴克斯特国际公司 | Microporous filter membrane, manufacture thereof and separator therewith |
| JP2003181668A (en) * | 2001-11-30 | 2003-07-02 | Matsushita Electric Ind Co Ltd | Pico-second laser micro-machining system, system for controlling intensity of beam of light, method of laser milling cutting, method of controlling intensity distribution of beam of light, method of designing micro- filter, method of rectifying angle of reflection, method of correcting hysteresis effect, and method of operating scanning mirror |
| US20040080592A1 (en) * | 2002-10-29 | 2004-04-29 | Xerox Corporation | Conical or cylindrical laser ablated filter |
| CN101980083A (en) * | 2010-09-13 | 2011-02-23 | 长春理工大学 | Method and system for preparing filter membrane mesh structure by laser interference photoetching technology |
| CN203817621U (en) * | 2013-12-03 | 2014-09-10 | 张立国 | Laser beam splitting and galvanometer scanning processing device |
| KR20140086934A (en) * | 2014-05-16 | 2014-07-08 | 한국과학기술원 | Method of manufacturing surface plasmonic color filter using laser interference lithography |
| CN105195904A (en) * | 2014-06-23 | 2015-12-30 | 三菱电机株式会社 | Laser processing device |
| CN105688447A (en) * | 2016-01-21 | 2016-06-22 | 北京理工大学 | Filter screen capable of realizing efficient oil-water separation, and method for preparing filter screen by femtosecond laser |
| CN205309586U (en) * | 2016-01-29 | 2016-06-15 | 孙树峰 | Device in femto second laser processing aeroengine blade air film hole |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018205482A1 (en) * | 2017-05-11 | 2018-11-15 | 英诺激光科技股份有限公司 | Filtering film processed using laser and laser processing system |
| CN107745188A (en) * | 2017-09-30 | 2018-03-02 | 深圳信息职业技术学院 | A kind of picosecond laser process equipment |
| CN107876968A (en) * | 2017-12-26 | 2018-04-06 | 英诺激光科技股份有限公司 | A kind of laser process equipment for parallel processing |
| WO2019127813A1 (en) * | 2017-12-26 | 2019-07-04 | 英诺激光科技股份有限公司 | Laser processing apparatus for parallel processing |
| CN108211817A (en) * | 2017-12-29 | 2018-06-29 | 广东工业大学 | A kind of manufacturing method of aluminum metal filter membrane |
| CN108211817B (en) * | 2017-12-29 | 2020-08-18 | 广东工业大学 | Manufacturing method of aluminum metal filtering membrane |
| CN112516804A (en) * | 2019-09-18 | 2021-03-19 | 无锡华润微电子有限公司 | PM2.5 protective equipment, PM2.5 filtering membrane and preparation method thereof |
| CN113750823A (en) * | 2021-07-19 | 2021-12-07 | 青岛科技大学 | Natural biomass material oil-water separation membrane and preparation method and application thereof |
| CN113750823B (en) * | 2021-07-19 | 2022-11-25 | 青岛科技大学 | Natural biomass material oil-water separation membrane and preparation method and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018205482A1 (en) | 2018-11-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106944751A (en) | A kind of filter membrane and laser-processing system using Laser Processing | |
| Dommati et al. | A comprehensive review of recent developments in 3D printing technique for ceramic membrane fabrication for water purification | |
| CN105688447B (en) | A kind of filter screen and its femtosecond laser preparation method of achievable high efficiency water-oil separating | |
| JP4272519B2 (en) | Apparatus and method for laterally deflecting and separating particles with a stationary array of optical tweezers | |
| US7704294B2 (en) | Aerodynamic lens particle separator | |
| JP2018528850A (en) | Ceramic filter and method for forming the same | |
| CN101375348B (en) | Droplet deformation | |
| Serhatlioglu et al. | CO2 laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving | |
| CN1276693C (en) | Apparatus for applying optical gradient forces | |
| CN207656101U (en) | A kind of filter membrane and laser-processing system using laser processing | |
| CN102653030A (en) | Multifunctional laser processing head | |
| TW201902816A (en) | Microchannel wafer and manufacturing method thereof | |
| KR20150121334A (en) | Multi modal laser machining system | |
| JPWO2006126487A1 (en) | Microchip and manufacturing method of microchip | |
| CN109001903B (en) | High-order mode optical tweezers based on biconical four-mode optical fiber and test method thereof | |
| Yalikun et al. | Ultrathin glass filter fabricated by femtosecond laser processing for high-throughput microparticle filtering | |
| CN207873385U (en) | A kind of laser process equipment for parallel processing | |
| CN102151997A (en) | Method for processing micropore of patch clamp chip | |
| Zhong et al. | Removal of organic aerosols from furnace flue gas by ceramic filters | |
| Dasgupta et al. | Microfluidic sorting with blinking optical traps | |
| Li et al. | Microlens arrays enable variable-focus imaging | |
| CN111716023B (en) | Machining device and machining method for high depth-diameter ratio micropores | |
| JP2007313378A (en) | Optical substance operating device | |
| WO2009115598A1 (en) | Guiding device for guiding light beams, laser cutting device provided therewith and production device equipped therewith for producing a preform for fibre composite structures suitable for power flows | |
| Okoli et al. | Application of nanotechnology in the manufacturing sector: A review |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170714 |
|
| RJ01 | Rejection of invention patent application after publication |