CN106938785A - 一种具有形变检测功能的玻璃基板气浮装置及检测方法 - Google Patents
一种具有形变检测功能的玻璃基板气浮装置及检测方法 Download PDFInfo
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- CN106938785A CN106938785A CN201710110580.3A CN201710110580A CN106938785A CN 106938785 A CN106938785 A CN 106938785A CN 201710110580 A CN201710110580 A CN 201710110580A CN 106938785 A CN106938785 A CN 106938785A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
- B65G51/035—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs for suspended articles, e.g. bottles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
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CN201710110580.3A CN106938785B (zh) | 2017-02-28 | 2017-02-28 | 一种具有形变检测功能的玻璃基板气浮装置及检测方法 |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108147056A (zh) * | 2017-12-25 | 2018-06-12 | 北京中电科电子装备有限公司 | 一种面板卡料检测装置及具有其的面板运输装置 |
CN108469442A (zh) * | 2018-05-16 | 2018-08-31 | 浙江西溪玻璃有限公司 | 一种玻璃检测装置 |
CN109323988A (zh) * | 2018-11-06 | 2019-02-12 | 合肥工业大学 | 一种适于气浮***的玻璃基板检测方法 |
CN111285031A (zh) * | 2020-03-11 | 2020-06-16 | 上海精测半导体技术有限公司 | 一种旋转台 |
CN112461164A (zh) * | 2020-12-09 | 2021-03-09 | 蚌埠中光电科技有限公司 | 一种高世代tft-lcd玻璃基板气浮装置 |
CN112834144A (zh) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | 一种气浮薄板***中用于流固耦合振动的测试装置 |
CN112830256A (zh) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | 薄板气浮支承***弹性稳压装置 |
CN113071927A (zh) * | 2021-03-04 | 2021-07-06 | 湖南大学 | 一种主动运输气浮平台 |
CN113203681A (zh) * | 2021-04-20 | 2021-08-03 | 合肥富煌君达高科信息技术有限公司 | 一种气浮旋转控制机构 |
CN113602813A (zh) * | 2021-08-10 | 2021-11-05 | 江苏科技大学 | 具有形变控制功能的玻璃基板气浮装置及控制方法 |
CN114543710A (zh) * | 2022-02-22 | 2022-05-27 | 江苏科技大学 | 气浮无接触输运平台悬浮物体的位置确定***及方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009179423A (ja) * | 2008-01-30 | 2009-08-13 | Kyocera Corp | 浮上用構造体、スライド部材およびステージ装置 |
CN101643151A (zh) * | 2008-08-08 | 2010-02-10 | 株式会社Ihi | 浮起运送装置 |
CN101715421A (zh) * | 2007-06-29 | 2010-05-26 | 株式会社Ihi | 悬浮输送装置 |
CN105712089A (zh) * | 2016-04-21 | 2016-06-29 | 江苏科技大学 | 一种无接触输运与定位平台装置及控制方法 |
CN106115270A (zh) * | 2016-08-29 | 2016-11-16 | 北京京城清达电子设备有限公司 | 一种气浮真空吸附搬送装置 |
-
2017
- 2017-02-28 CN CN201710110580.3A patent/CN106938785B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101715421A (zh) * | 2007-06-29 | 2010-05-26 | 株式会社Ihi | 悬浮输送装置 |
JP2009179423A (ja) * | 2008-01-30 | 2009-08-13 | Kyocera Corp | 浮上用構造体、スライド部材およびステージ装置 |
CN101643151A (zh) * | 2008-08-08 | 2010-02-10 | 株式会社Ihi | 浮起运送装置 |
CN105712089A (zh) * | 2016-04-21 | 2016-06-29 | 江苏科技大学 | 一种无接触输运与定位平台装置及控制方法 |
CN106115270A (zh) * | 2016-08-29 | 2016-11-16 | 北京京城清达电子设备有限公司 | 一种气浮真空吸附搬送装置 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108147056A (zh) * | 2017-12-25 | 2018-06-12 | 北京中电科电子装备有限公司 | 一种面板卡料检测装置及具有其的面板运输装置 |
CN108469442A (zh) * | 2018-05-16 | 2018-08-31 | 浙江西溪玻璃有限公司 | 一种玻璃检测装置 |
CN109323988A (zh) * | 2018-11-06 | 2019-02-12 | 合肥工业大学 | 一种适于气浮***的玻璃基板检测方法 |
CN109323988B (zh) * | 2018-11-06 | 2021-01-19 | 合肥工业大学 | 一种适于气浮***的玻璃基板检测方法 |
CN111285031A (zh) * | 2020-03-11 | 2020-06-16 | 上海精测半导体技术有限公司 | 一种旋转台 |
CN112461164A (zh) * | 2020-12-09 | 2021-03-09 | 蚌埠中光电科技有限公司 | 一种高世代tft-lcd玻璃基板气浮装置 |
CN112834144A (zh) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | 一种气浮薄板***中用于流固耦合振动的测试装置 |
CN112830256A (zh) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | 薄板气浮支承***弹性稳压装置 |
CN113071927A (zh) * | 2021-03-04 | 2021-07-06 | 湖南大学 | 一种主动运输气浮平台 |
CN113203681A (zh) * | 2021-04-20 | 2021-08-03 | 合肥富煌君达高科信息技术有限公司 | 一种气浮旋转控制机构 |
CN113602813A (zh) * | 2021-08-10 | 2021-11-05 | 江苏科技大学 | 具有形变控制功能的玻璃基板气浮装置及控制方法 |
CN114543710A (zh) * | 2022-02-22 | 2022-05-27 | 江苏科技大学 | 气浮无接触输运平台悬浮物体的位置确定***及方法 |
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Application publication date: 20170711 Assignee: HANGZHOU GOWE AUTOMATION CO.,LTD. Assignor: JIANGSU University OF SCIENCE AND TECHNOLOGY Contract record no.: X2024980000156 Denomination of invention: A glass substrate air flotation device with deformation detection function and detection method Granted publication date: 20220719 License type: Common License Record date: 20240109 Application publication date: 20170711 Assignee: Sichuan Jinyuan Pipe Co.,Ltd. Assignor: JIANGSU University OF SCIENCE AND TECHNOLOGY Contract record no.: X2024980000155 Denomination of invention: A glass substrate air flotation device with deformation detection function and detection method Granted publication date: 20220719 License type: Common License Record date: 20240109 |