Summary of the invention
The present invention has invented induction cilium, and using this sensor structure for incuding cilium, simple, low in cost, output is saved
Point is more.
The present invention has following technology contents.
1, a kind of induction cilium, it is characterised in that: mainly it is made of fine shape electrode, resistive layer;Resistive layer wraps up fine shape electricity
The part of pole;Resistive layer is greater than maximum span of the resistive layer in fine shape electrode radially in the maximum span of fine shape electrode axial direction
2 times;The package section that resistive layer wraps up fine shape electrode has elasticity on the whole.
2, a kind of induction cilium as described in technology contents 1: the resistive layer is located at one end of fine shape electrode;Resistive layer
The bottom surface at end where covering the resistive layer of fine shape electrode.
3, a kind of induction cilium as described in technology contents 1: the resistive layer is located at the interlude of fine shape electrode.
4, a kind of induction cilium as described in technology contents 1: the resistive layer uses semiconductor fabrication.
5, a kind of induction cilium as described in technology contents 1: the resistive layer package section is helical form.
6, a kind of induction cilium as described in technology contents 1: the fine shape electrode is hollow.
7, a kind of induction cilium as described in technology contents 1: the resistive layer is immersed in conducting liquid.
8, a kind of induction cilium, it is characterised in that: mainly it is made of fine shape electrode, resistive layer;Resistive layer wraps up fine shape electricity
The whole of pole;Resistive layer has elasticity after wrapping up fine shape electrode on the whole.
9, a kind of induction cilium as described in technology contents 7: the fine shape electrode is hollow.
10, a kind of induction cilium as described in technology contents 7: the fine shape electrode section or all helical forms.
11, a kind of induction cilium as described in technology contents 7: the fine shape electrode is hollow.
12, a kind of induction cilium as described in technology contents 7: the resistive layer uses semiconductor fabrication.
13, a kind of induction cilium as described in technology contents 7: the resistive layer has lead connecting region, the region
Resistance is less than other regions.
14, a kind of induction cilium as described in technology contents 7: the resistive layer is immersed in conducting liquid.
15, a kind of sensor, it is characterised in that: there is induction cilium and conducting liquid described in technology contents 1-14;It leads
The resistance layer surface of electro-hydraulic body contact induction cilium;There is current path between conducting liquid and induction cilium.(conducting liquid with
Incuding has potential difference between the fine shape electrode of cilium).
16, a kind of induction cilium, it is characterised in that: mainly it is made of at least 2 induction ciliums, cavity, conducting liquids;
Induction cilium is mainly made of fine shape electrode, resistive layer;Resistive layer wraps up a part of fine shape electrode;Resistive layer exists
The maximum span of fine shape electrode axial direction is greater than 2 times of maximum span of the resistive layer in fine shape electrode radially;Resistive layer package is fine
The package section of shape electrode has elasticity on the whole;
The resistive layer overlay segment of at least 2 induction ciliums penetrates in cavity interface intervention cavity;In at least 2 intervention cavities
Maximum span of the induction cilium in portion on the vertical line direction at cavity interface is greater than the 2 of the average diameter of itself intervention plenum section
Times;Conducting liquid is loaded in cavity;The volume of conducting liquid is less than the dischargeable capacity of cavity;At least 2 induction ciliums can be with
Conducting liquid is touched simultaneously;The fine shape electrode of at least 2 induction ciliums is not directly contacted with conducting liquid.
17, a kind of state sensor as described in technology contents 16: the quantity of the induction cilium is at least four, until
Few 3 induction ciliums have that ' their resistive layer overlay segment penetrates that cavity interface intervention cavity is interior, they are at cavity interface simultaneously
Vertical line direction on maximum span be greater than 2 times of average diameter of itself intervention plenum section, their resistive layer can be simultaneously
Touch conducting liquid, their fine shape electrode is not directly contacted with conducting liquid ' these three technical characteristics.
18, a kind of sensor, it is characterised in that: mainly it is made of at least 2 induction ciliums, cavity, conducting liquids;
Induction cilium is mainly made of fine shape electrode, resistive layer;Resistive layer wraps up a part of fine shape electrode;Resistive layer exists
The maximum span of fine shape electrode axial direction is greater than 2 times of maximum span of the resistive layer in fine shape electrode radially;Resistive layer package is fine
The package section of shape electrode has elasticity on the whole;
The resistive layer overlay segment of at least 2 induction ciliums penetrates in cavity interface intervention cavity;In at least 2 intervention cavities
Maximum span of the induction cilium in portion on the vertical line direction at cavity interface is greater than the 2 of the average diameter of itself intervention plenum section
Times;Conducting liquid fills cavity;The fine shape electrode of at least 2 induction ciliums is not directly contacted with conducting liquid.
19, a kind of sensor as described in technology contents 18: the quantity of the induction cilium is at least 4;At least 3
Induction cilium simultaneously have ' their resistive layer overlay segment penetrate cavity interface intervention cavity in, they cavity interface hang down
Maximum span on line direction is greater than 2 times of the average diameter of itself intervention plenum section, their resistive layer can contact simultaneously
Conducting liquid is not directly contacted with to conducting liquid, their fine shape electrode ' these three technical characteristics.
20, a kind of sensor, it is characterised in that: mainly by least 1 induction cilium, at least one electrode, cavity, conduction
Liquid is constituted;
Induction cilium is mainly made of fine shape electrode, resistive layer;Resistive layer wraps up a part of fine shape electrode;Resistive layer exists
The maximum span of fine shape electrode axial direction is greater than 2 times of maximum span of the resistive layer in fine shape electrode radially;Resistive layer package is fine
The package section of shape electrode has elasticity on the whole;
The resistive layer overlay segment of at least 1 induction cilium penetrates in cavity interface intervention cavity;In at least 1 intervention cavity
Maximum span of the induction cilium in portion on the vertical line direction at cavity interface is greater than the 2 of the average diameter of itself intervention plenum section
Times;At least 1 strip electrode penetrate cavity interface intervention cavity in or with cavity coboundary;Conducting liquid is loaded in cavity;It is conductive
The volume of liquid is less than the dischargeable capacity of cavity;At least one electrode and at least 1 induction cilium can touch conduction liquid simultaneously
Body;The fine shape electrode of at least 1 induction cilium is not directly contacted with conducting liquid.
21, a kind of sensor as described in technology contents 20: the quantity of the induction cilium is greater than 4;At least 3 senses
Answer cilium and meanwhile have ' their resistive layer overlay segment penetrate cavity interface intervention cavity in, they cavity interface vertical line
Maximum span on direction is greater than 2 times of the average diameter of itself intervention plenum section, their resistive layer can touch simultaneously
Conducting liquid, their fine shape electrode are not directly contacted with conducting liquid ' these three technical characteristics.
22, a kind of sensor, it is characterised in that: mainly by least 1 induction cilium, at least one electrode, cavity, conduction
Liquid is constituted;
Induction cilium is mainly made of fine shape electrode, resistive layer;Resistive layer wraps up a part of fine shape electrode;Resistive layer exists
The maximum span of fine shape electrode axial direction is greater than 2 times of maximum span of the resistive layer in fine shape electrode radially;Resistive layer package is fine
The package section of shape electrode has elasticity on the whole;
The resistive layer overlay segment of at least 1 induction cilium penetrates in cavity interface intervention cavity;In at least 1 intervention cavity
Maximum span of the induction cilium in portion on the vertical line direction at cavity interface is greater than the 2 of the average diameter of itself intervention plenum section
Times;At least one electrode penetrate cavity interface intervention cavity in or with cavity coboundary;Conducting liquid fills cavity.
23, a kind of sensor as described in technology contents 22: the quantity of the induction cilium is greater than 4;At least 3 senses
Answer cilium and meanwhile have ' their resistive layer overlay segment penetrate cavity interface intervention cavity in, they cavity interface vertical line
Maximum span on direction is greater than 2 times of the average diameter of itself intervention plenum section, their resistive layer can touch simultaneously
Conducting liquid, their fine shape electrode are not directly contacted with conducting liquid ' these three technical characteristics.
24, a kind of sensor, it is characterised in that: increase an elasticity on the basis of scheme described in technology contents 15-23
Film;Elastic membrane and cavity coboundary.(fluctuation of elastic membrane can be transmitted on induction cilium by conducting liquid, according to different designs
Different purposes are done, the technical program can be used as motion sensor or sound transducer, but be not excluded for other usages).
25, a kind of sensor as described in technology contents 24: the cavity is spiral lumen;Elastic membrane and spiral lumen
Exit face coboundary;Incude cilium helix tube in the radial direction on maximum span be greater than itself intervention plenum section
2 times of average diameter.(fluctuation of elastic membrane can be transmitted on induction cilium by conducting liquid, do different use according to different designs
On the way, the technical program can be used as motion sensor or sound transducer, but be not excluded for other usages).
26, a kind of sensor as described in technology contents 25: the cavity is the spiral lumen of caliber gradual change.It is (main
As sound transducer, but it is not excluded for other usages).
27, a kind of sensor as described in technology contents 26: the cavity is spiral case cavity-like.(according to different designs
Different purposes can be done, when spiral case describes chamber in the case where conducting liquid volume is less than cavity dischargeable capacity, appropriate design is led
The volume of electro-hydraulic body, so that tail of cavity body is there are when a small air cavity, particularly suitable for sound transducer, principle is mould
Apery ear;It is not excluded for other usages).
28, a kind of sensor, it is characterised in that: increasing on the basis of technology contents 25 has enlarged cavity;Enlarged cavity is main
The elastic membrane described in eardrum, tympanic canal, technology contents 7 is constituted;Tympanic canal caliber is gradual change;It is big that eardrum is located at tympanic canal cross-sectional area
One end;Elastic membrane is located at the small one end of tympanic canal cross-sectional area;Elastic membrane side and container coboundary, the elastic membrane other side and amplification
Chamber coboundary.(can be used for the sensing of sound, however not excluded that other usages).
29, a kind of sensor as described in technology contents 28: eardrum center also has heavy ball.(it can be used for moving, vibration
Sensing, however not excluded that other usages).
30, a kind of sensor, it is characterised in that: sensor of choosing any one kind of them in technology contents 15-29 increases at least one
Ground resistance;The fine shape electrode of the induction cilium of sensor is connected with the ungrounded end of ground resistance.
31, a kind of sensor, it is characterised in that: sensor of choosing any one kind of them in technology contents 15-30 increases at least one
Voltage signal amplifying device or original part;By the fine shape electrode of the induction cilium of sensor and voltage signal amplifying device or original part
Voltage signal inputs are connected.
32, a kind of sensor, it is characterised in that: sensor of choosing any one kind of them in technology contents 15-31 increases at least one
Resistance bridge;The fine shape electrode of the induction cilium of sensor is connected as the connecting pin of variable resistance with resistance bridge.
33, a kind of sensor application circuit, it is characterised in that: a kind of sensing is reasonably selected in technology contents 15-32
Device is reasonably connected to the sound inductive signal input node of circuit.
34, a kind of sensor application circuit, it is characterised in that: a kind of sensing is reasonably selected in technology contents 15-32
Device is reasonably connected to the motional induction signal input node of circuit.
35, a kind of sensor application circuit, it is characterised in that: a kind of sensing is reasonably selected in technology contents 15-32
Device is reasonably connected to the posture inductive signal input node of circuit.
36, a kind of sensor application equipment, it is characterised in that: the sensor with technology contents 15-32.
37, a kind of sensor application equipment, it is characterised in that: the sensor application circuit with technology contents 33-35.
Technology contents explanation and its advantages.
Central principle.
Principle 1: in the case where conducting liquid volume is less than cavity dischargeable capacity, the present invention is equal in electrical principles
Resistance or resistance group by conducting liquid regulation resistance value, the main distribution using resistivity is come expression status data;The original of change
Reason be incude the resistive layer on cilium can be considered as it is many in parallel after be connected on conducting liquid and incude cilium fine shape electrode it
Between resistance, change when conducting liquid moves between conducting liquid and the resistive layer of fine shape electrode be electrically connected volume, area,
Length and lead to change in resistance between electrode (length in parallel of resistive layer is changed), to influence all-in resistance;It is noticeable
Be: in the case that conducting liquid volume is less than cavity dischargeable capacity, the present invention needs those skilled in the art when implementing design
In conjunction with common knowledge, the prior art, technology convention, purpose of design, according to cavity, induction cilium, electrode, cavity interface layout
The occurrence of conducting liquid volume is determined, to avoid losing or weakening technical effect, if rough use hundred in the present invention
Point ratio is then difficult to reach the purpose of good protection to limit conducting liquid volume, this be it will be appreciated by those skilled in the art that
's.
Principle 2: in the case where conducting liquid is full of cavity, since the resistive layer on induction cilium can be considered as much simultaneously
The resistance being associated between conducting liquid and the fine shape electrode for incuding cilium, induction cilium deformation cause piezoresistive effect that can change parallel connection
The resistivity distribution of total resistance value, the resistance variations or resistance group that the deformation that cilium relies primarily on the motive force cilium of fluid generates becomes
Change (weaker than the variation of principle 1 many very much, difference is very big) and carrys out expression status data.
By the induction cilium of the invention known to this of principle 1,2 can be used for the testing the speed of subtle water flow (make to incude cilium with
Electric path is formed between tested water), the resistive layer of semi-conducting material manufacturing induction cilium appropriate is chosen, can be also used for surveying
(the cooperations such as temperature, light (cooperation transparent vessel, electrically conducting transparent liquid), pressure, color (cooperation transparent vessel, electrically conducting transparent liquid)
Appropriate conducting liquid).
Words and phrases are explained: ' cavity ' refers to the space with carrying capacity, it can be the inner cavity of single container, is also possible to
Accommodation space made of with multiple element, cavity is not in the know in addition to needing to pay attention to cloth when designing, it is further noted that selection, necessary
When appropriate conductive material can be selected to carry out appropriate design under the premise of without prejudice to common knowledge and technical purpose;
' dischargeable capacity ' refers to the part for allowing conducting liquid to be full of in cavity;
' coboundary ' refers to that signified body surface is also a part at chamber interface (cavity interface or enlarged cavity interface), i.e. institute
It is apparent to refer to that chamber interface (the cavity interface or enlarged cavity interface) perception around body surface and signified object is instinctively not present
Sense is penetrated, people instinctively will be considered that signified body surface is a part on chamber surface from perception;
' resistive layer ' refers to the layer with electronics mobile obstacle ability, and resistive layer is preferably film (such as carbon in the present invention
Resistive film, metallic resistance film), thin slice (such as pellet resistance material), thin layer (such as the layer for the generation that is vapor-deposited) shape, but also not
Exclude other qualified shapes;Resistive layer can be good conductor and be also possible to semiconductor, resistive layer do not include superconductor and
Insulator (not including thin to the insulating materials thin layer that may be constructed electron tunnel knot and passed through by electronics), resistive layer can be list
One substance composition is also possible to mixture and constitutes that (for example many kinds of substance is made by mixing, for another example made of semiconductor material
Mixing partially or fully is carried out on resistive layer), resistive layer, which can be single layer structure and be also possible to multilayered structure, (should ensure that inside and outside
It is conductive between surface), resistance layer surface can be it is smooth be also possible to out-of-flatness (such as can process shape, etching,
Such as processing in spontaneous burr, dimpling), resistive layer of the invention can be individually be also possible to it is multiple (such as: one
Resistive layer is total to multiple resistive layer coboundaries, a cavity and a resistive layer with multiple cavity coboundaries, one simultaneously simultaneously
Interface), ' resistive layer ' can have a small amount of insulating layer in the present invention, but insulating layer can not be allowed to cover resistive layer comprehensively, and
Resistive layer inner surface is set to touch conducting liquid, it should be noted that layer made of insulating materials covers resistance comprehensively
Layer but thin belong to feasible program of the invention to may be constructed the case where electron tunnel knot can be passed through by electronics;
' grounding resistor ' refers to the resistor of common one end connection in electronics place (GND) in circuit, can be with
It is the changeless resistor of resistance value, is also possible to (the non-variation random at any time, that is, when long after adjusting of the adjustable resistor of resistance value
Between keep resistance value without the resistor changed greatly);Grounding resistor can integrate in attitude transducer (in non-cavity), can also
To be independently placed in application circuit;
' it is close to two dimensions and a dimension that fine shape ' dictionary, which is ' tiny ' its meaning to the definition of ' fibre ',
The statement of the three-dimension object of degree size and noticeably greater than another two dimension does not also have since not specific formula can follow
Body numerical value can follow, therefore can determine that this kind of vocabulary are defined according to the intuition of the mankind, suchlike straight by the mankind
The non-accurate vocabulary for feeling to judge also relies on analogy certainly just like ' bulk ', ' sheet ', ' plate ', ' film-form ', ' pyriform ' etc.
Right object and the form defined, since this is the non-precision word that the whole mankind is used in conjunction with extensively, also not rigorous theory is to this
Class body provides strict difinition, the use of such word is under the pressure of human sciences and linguistic reality, therefore the reader of this paper is not
It should be fuzzy sets with ' fine shape ' for by negating the application, judging also should be according to most when whether an object has fine shape feature
The intuition mode of people's class is counted to judge;As the equivalent variation of form, in technical principle, technical effect and of the invention
In the case where equivalent, a surface is had the electrode of resistive layer to be had as long as it by resistive layer covering part ' to answer as long as fine shape ' form
This belongs to ' the fine shape electrode ' of meaning of the invention, and there may be bifurcated, intertextures to form dendroid, netted etc., this hair for fine shape object
' fine shape electrode ' preferable shape is hair shape in bright (radius is diminishing cylindric " e in such as attached drawing 1 ");
' electrode ' refers to the attachment made of good conductor material of the electric conductivity better than resistive layer, and electrode, which can be, to be had
Non-linear shape part but it by the part that resistive layer is covered should show as threadiness, the preferred high conductive material system of electrode
Make, in the case where not destroying feasibility of the invention, stability, the stronger the electric conductivity of electrode the better, and electrode can be with conducting wire
It is integrated;
' conducting liquid ' refers to the high fluidity substance with preferable conductive capability, and conducting liquid can be simple substance can also be with
It is mixture, such as the liquid etc. with conductive capability of liquid metal, electrolyte, resistor fluid, water, many kinds of substance composition.
Illustrate 1: the present invention is typically chosen material (mixture or simple substance) conduct that electric conductivity is inferior to conducting liquid
Resistive layer, to obtain biggish resistance variations rate and gradient when posture changing;Using electric conductivity better than conducting liquid
The case where material is as resistive layer, the resistance variations rate and gradient that when posture changing obtains are smaller.
Illustrate 2: the present invention and the entitled of the present inventor ' can be used for the posture biography of artificial intelligence equipment posture induction
Sensor, cluster, using ', the scheme of Patent No. ' 2014206903661 ' have a similarity, induction cilium of the invention can be with
Regard as ' 2014206903661 ' numbers application in electrode and resistive layer combination, still ' 2014206903661 ' numbers application in
Induction cilium and cilium elasticity are not referred to, so the application and ' 2014206903661 ' numbers applications and non-fully duplicate application.
Illustrate 3: the present invention predominantly has machine learning ability artificial neuron hardware and creates;But it is not excluded for using
In other circuits.
Illustrate 4: no matter designer, the producer, the user of sensor are intentionally or accidentally arranged in cluster unit
Bad, dispersing electrode, in vain incude cilium, bad element (such as be not provided in certain cavity of certain cluster a certain component make the cavity lose
Function or effect is gone to weaken), as long as unit has technical solution of the present invention in its sensor, should be regarded as of the invention
Technical solution.
Illustrate 5: due to Chinese Complex Flexible the characteristics of, the intention of inventor and the understanding of reader inevitably occur
Deviation is reminded as the good will to those skilled in the art: combining the prior art, common knowledge in the application design present invention
Be designed, rather than inflexible literal meaning according to the invention come implement for another example: the present invention application design when should be noted that
Chemistry, electrochemical relationship between material;For another example: should be noted that when present invention application design and reduce fine shape electrode and electricity in cilium
The contact resistance of the constituted connection of resistance layer;Increase cilium quantity for another example of the invention improves that precision is higher, increases and can perceive shape
State;The volume of conducting liquid is for another example correctly configured according to electrode, the structure of cavity, quantity, geometric layout, sensing demand;Again
Such as: apply insulation crust outside resistive layer, shielding casing, shell, increase enhancement layer outside resistive layer;Etc. };Also
Be say the reading of the present patent application file should stand with common knowledge, understand the prior art, understand technology convention, have it is bright
The angle of those skilled in the art of true design requirement understands this hair in the premise without prejudice to the ultimate technical purpose of the present invention
Bright application documents.
Beneficial effects of the present invention: the configuration of the present invention is simple, service life be long, it is low in cost, can be used for artificial intelligence equipment work
For sensing device.
Specific embodiment
Below with reference to embodiment, the invention will be further described.
The form of embodiment 1, as shown in figure 1 several induction ciliums shown in a, b, c, d, e, f;
Induction cilium a is made of fine shape electrode a1 and resistive layer a10, and resistive layer a10 covers one end of fine shape electrode a1;
Induction cilium b is made of fine shape electrode b1 and resistive layer b10, and resistive layer b10 covers the middle section of fine shape electrode b1;
Induction cilium c is made of fine shape electrode c1 and resistive layer c10, and fine one end shape electrode c10 is spherical, resistive layer c10
Cover the ball end of fine shape electrode c1;
Induction cilium d is made of fine shape electrode d1 and resistive layer d10, and fine one end shape electrode d10 is pointed, resistive layer d10
Cover the tip of fine shape electrode d1;
Induction cilium e is made of fine shape electrode e1 and resistive layer e10, and resistive layer e10 covers one end of fine shape electrode e1;
Induction cilium f is made of fine shape electrode f1 and resistive layer f10, and resistive layer e10 covers the whole of fine shape electrode e1, electricity
Resistance layer f10 has lead connecting region f11, and the position resistive layer f10 where lead connecting region f11 is very thin.
A kind of sensor of embodiment 2, such as Fig. 2 is mainly by container S20, induction cilium S21, induction cilium S23, conduction liquid
Body S24, ground resistance RG, amplifier F, output node VS21, power input VCC, power supply place GND are constituted;
The resistive layer S211 overlay segment of induction cilium S21 penetrates in cavity interface intervention cavity;
The resistive layer S231 overlay segment of induction cilium S23 penetrates in cavity interface intervention cavity;
Incude the maximum span of cilium S21, S23 on the vertical line direction at container S20 cavity interface to be situated between greater than their own
Enter 2 times of the average diameter of plenum section;
Conducting liquid S24 fills container S20 cavity;
The fine shape electrode of induction cilium S21, S23 are not directly contacted with conducting liquid;
The fine shape electrode S230 of induction cilium S23 is connected with power input VCC;
The fine shape electrode S210 of induction cilium S21 is connected with ground resistance RG;
The fine shape electrode S210 of induction cilium S21 is connected with the input point of amplifier F;
Output node VS21 is connected with the output node of amplifier F;
Since the inertia of conducting liquid, conducting liquid can move when the sensor movement of this embodiment, push induction fine
Flexible deformation occurs for hair S21, S23, and the resistance variations of resistive layer S211, S231 on induction cilium S21, S23 cause to feel in turn
It answers the voltage value on cilium S21 fibre shape electrode to change, is exported after the amplification of amplifier F from output node VS21.
A kind of sensor of embodiment 3, such as Fig. 3 is mainly fine by container S30, induction cilium S31, induction cilium S32, induction
Hair S33, conducting liquid S34, two ground resistance RG, two amplifier F, output node VS31, output node VS32, power supply are defeated
Enter VCC, power supply place GND composition;
The resistive layer overlay segment of induction cilium S31, S32, S33 penetrate in cavity interface intervention cavity;
Incude the maximum span of cilium S31, S32, S33 on the vertical line direction at container S30 cavity interface and is greater than them certainly
Body intervenes 2 times of the average diameter of plenum section;
Conducting liquid S34 fills container S30 cavity;
The fine shape electrode of induction cilium S31, S32, S33 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium S33 is connected with power input VCC;
The fine shape electrode of induction cilium S31, S32 are connected with ground resistance RG;
The fine shape electrode of induction cilium S31, S32 are respectively connected with the input point of an amplifier F;
Output node VS21, VS32 are respectively connected with the output node of an amplifier F;
Since the inertia of conducting liquid, conducting liquid can move when the sensor movement of this embodiment, push induction fine
Flexible deformation occurs for hair S31, S32, S33, and the resistance variations of the resistive layer on induction cilium S31, S32, S33 cause to incude in turn
Voltage value variation on cilium S31, S32 fibre shape electrode, exports after the amplification of amplifier F from output node VS31, VS32.
A kind of sensor of embodiment 4, such as Fig. 4 is mainly fine by container S40, induction cilium S41, induction cilium S42, induction
Hair S43, conducting liquid S44, two ground resistance RG, two amplifier F, output node VS41, output node VS42, power supply are defeated
Enter VCC, power supply place GND composition;
The resistive layer overlay segment of induction cilium S41, S42, S43 penetrate in cavity interface intervention cavity;
Incude the maximum span of cilium S41, S42, S43 on the vertical line direction at container S40 cavity interface and is greater than them certainly
Body intervenes 2 times of the average diameter of plenum section;
For conducting liquid S44 in container S40 cavity, the volume of conducting liquid S44 is less than effective appearance of container S40 cavity
Product;
The fine shape electrode of induction cilium S41, S42, S43 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium S43 is connected with power input VCC;
The fine shape electrode of induction cilium S41, S42 are connected with ground resistance RG;
The fine shape electrode of induction cilium S41, S42 are respectively connected with the input point of an amplifier F;
Output node VS21, VS32 are respectively connected with the output node of an amplifier F;
The sensor of this embodiment moves or attitudes vibration is due to the inertia of conducting liquid, and conducting liquid can move, change
Become between induction cilium S41, S42, S43 and be electrically connected area, causes to incude the voltage value on cilium S41, S42 fibre shape electrode
Variation exports after the amplification of amplifier F from output node VS41, VS42.
A kind of sensor of embodiment 5, such as Fig. 5 is mainly fine by container S50, induction cilium S51, induction cilium S52, induction
Hair S53, conducting liquid S54, two ground resistance RG, two amplifier F, output node VS51, output node VS52, power supply are defeated
Enter VCC, power supply place GND composition;
The resistive layer overlay segment of induction cilium S51, S52, S53 penetrate in cavity interface intervention cavity;
Incude the maximum span of cilium S51, S52, S53 on the vertical line direction at container S50 cavity interface and is greater than them certainly
Body intervenes 2 times of the average diameter of plenum section;
For conducting liquid S54 in container S50 cavity, the volume of conducting liquid S54 is less than effective appearance of container S50 cavity
Product;
The fine shape electrode of induction cilium S51, S52, S53 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium S53 is connected with power input VCC;
The fine shape electrode of induction cilium S51, S52 are connected with ground resistance RG;
The fine shape electrode of induction cilium S51, S52 are connected with output node VS51, VS52 respectively;
The sensor of this embodiment moves or attitudes vibration is due to the inertia of conducting liquid, and conducting liquid can move, change
Become between induction cilium S51, S52, S53 and be electrically connected area, causes to incude the voltage value on cilium S51, S52 fibre shape electrode
Variation, signal are exported from output node VS51, VS52.
A kind of sensor of embodiment 6, such as Fig. 6 is mainly by container S60, induction cilium S61, induction cilium S62, electrode
S63, conducting liquid S64, two ground resistance RG, two amplifier F, output node VS61, output node VS62, power input
VCC, power supply place GND are constituted;
Induction cilium S61, S62, resistive layer overlay segment penetrate in cavity interface intervention cavity;
In the saturating cavity interface intervention cavity of electrode S63;
Incude the maximum span of cilium S61, S62 on the vertical line direction at container S60 cavity interface to be situated between greater than their own
Enter 2 times of the average diameter of plenum section;
For conducting liquid S64 in container S60 cavity, the volume of conducting liquid S64 is less than effective appearance of container S60 cavity
Product;
The fine shape electrode of induction cilium S61, S62 are not directly contacted with conducting liquid;
Electrode S63 is connected with power input VCC;
The fine shape electrode of induction cilium S61, S62 are connected with ground resistance RG;
The fine shape electrode of induction cilium S61, S62 are connected with output node VS61, VS62 respectively;
The sensor of this embodiment moves or attitudes vibration is due to the inertia of conducting liquid, and conducting liquid can move, change
Become between induction cilium S61, S62 and electrode S63 and be electrically connected area, causes to incude on cilium S61, S62 fibre shape electrode
Voltage value variation, signal are exported from output node VS61, VS62.
A kind of sensor of embodiment 7, such as Fig. 7 is mainly by container S70, induction cilium S71, electrode S72, induction cilium
S73, conducting liquid S74, two ground resistance RG, two amplifier F, output node VS71, output node VS72, power input
VCC, power supply place GND are constituted;
Induction cilium S71, S73, resistive layer overlay segment penetrate in cavity interface intervention cavity;
In the saturating cavity interface intervention cavity of electrode S72;
Incude cilium S71, S73, the maximum span on the vertical line direction at container S70 cavity interface is situated between greater than their own
Enter 2 times of the average diameter of plenum section;
For conducting liquid S74 in container S70 cavity, the volume of conducting liquid S74 is less than effective appearance of container S70 cavity
Product;
The fine shape electrode of induction cilium S71, S73 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium S73 is connected with power input VCC;
Incude cilium S71, the fine shape electrode of electrode S73 is connected with ground resistance RG;
The fine shape electrode of induction cilium S71 is connected with output node VS71 respectively;
Electrode S72 is connected with output node VS72;
The sensor of this embodiment moves or attitudes vibration is due to the inertia of conducting liquid, and conducting liquid can move, change
Become induction cilium S71, S73, electrode S63 is electrically connected area between them, cause to incude cilium S71, electrode S72 fibre shape electricity
Voltage value variation on extremely, signal are exported from output node VS61, VS62.
A kind of sensor of embodiment 8, such as Fig. 8 is mainly by container S80, induction cilium S81, electrode S82, induction cilium
S83, conducting liquid S84, two ground resistance RG, two amplifier F, output node VS81, output node VS82, power input
VCC, power supply place GND are constituted;
Induction cilium S81, S83, resistive layer overlay segment penetrate in cavity interface intervention cavity;
In the saturating cavity interface intervention cavity of electrode S82;
Incude cilium S81, S83, the maximum span on the vertical line direction at container S70 cavity interface is situated between greater than their own
Enter 2 times of the average diameter of plenum section;
For conducting liquid S84 in container S80 cavity, the volume of conducting liquid S84 is less than effective appearance of container S80 cavity
Product;
The fine shape electrode of induction cilium S81, S83 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium S83 is connected with power input VCC;
Incude cilium S81, the fine shape electrode of electrode S83 is connected with ground resistance RG;
The fine shape electrode of induction cilium S81 is connected with output node VS81 respectively;
Electrode S82 is connected with output node VS82;
The sensor of this embodiment moves or attitudes vibration is due to the inertia of conducting liquid, and conducting liquid can move, push away
Innervation answers fibre swing, changes resistivity between induction cilium S81, S83 and conducting liquid S84, causes to incude cilium S81, electricity
Voltage value variation on the S82 fibre shape electrode of pole, signal are exported from output node VS81, VS82.
A kind of sensor of embodiment 9, such as Fig. 9 is mainly by strombuliform container S90, induction cilium S91, induction cilium
S92, induction cilium S93, conducting liquid S94, two ground resistance RG, two amplifier F, output node VS91, output node
VS92, power input VCC, power supply place GND, elastic membrane S95 are constituted;
Elastic membrane S95 is enclosed at the spiral mouth of container S90;
The resistive layer overlay segment of induction cilium S91, S92, S93 penetrate in cavity interface intervention cavity;
Incude the maximum span of cilium S91, S92, S93 on the vertical line direction at container S50 cavity interface and is greater than them certainly
Body intervenes 2 times of the average diameter of plenum section;
For conducting liquid S94 in container S90 cavity, the volume of conducting liquid S94 is less than effective appearance of container S90 cavity
Product, since the cavity of container S90 is spiral case shape, the micro-cavities of tail portion are mainly because liquid level surface tension and pressure are kept;
The fine shape electrode of induction cilium S91, S92, S93 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium S93 is connected with power input VCC;
The fine shape electrode of induction cilium S91, S92 are connected with ground resistance RG;
The fine shape electrode of induction cilium S91, S92 are connected with output node VS91, VS92 respectively;
When external sound passes to elastic membrane S95, conducting liquid can move the sensor of this embodiment, push induction fine
Hair S91, S92, S93 are swung, and lead to the resistance variations for incuding the resistive layer of cilium S91, S92, cause to incude cilium S91, S92 fibre
Voltage value variation on shape electrode, exports after the amplification of amplifier F from output node VS91, VS92.
A kind of sensor of embodiment 10, such as Figure 10 is mainly by strombuliform container Sa0, induction cilium Sa1, induction cilium
Sa2, induction cilium Sa3, conducting liquid Sa4, two ground resistance RG, two amplifier F, output node VSa1, output node
VSa2, power input VCC, power supply place GND, elastic membrane Sa5 are constituted;
Elastic membrane Sa5 is enclosed at the spiral mouth of container Sa0;
The resistive layer overlay segment of induction cilium Sa1, Sa2, Sa3 penetrate in cavity interface intervention cavity;
Incude the maximum span of cilium Sa1, Sa2, Sa3 on the vertical line direction at container S50 cavity interface and is greater than them certainly
Body intervenes 2 times of the average diameter of plenum section;
Conducting liquid Sa4 is filled in container Sa0 cavity;
The fine shape electrode of induction cilium Sa1, Sa2, Sa3 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium Sa3 is connected with power input VCC;
The fine shape electrode of induction cilium Sa1, Sa2 are connected with ground resistance RG;
The input pin for incuding each amplifier F of fine shape electrode of cilium Sa1, Sa2 is connected;
Output node VSa1, VSa2 respectively with the output pin of 1 amplifier F be connected;
During exercise, due to the inertia of conducting liquid, conducting liquid can move the sensor of this embodiment, push induction
Cilium Sa1, Sa2, Sa3 are swung, and lead to the resistance variations for incuding the resistive layer of cilium Sa1, Sa2, cause to incude cilium Sa1, Sa2
Voltage value variation on fine shape electrode, exports after the amplification of amplifier F from output node VSa1, VSa2.
A kind of sensor of embodiment 11, such as Figure 11 is mainly by strombuliform container Sb0, induction cilium Sb1, induction cilium
Sb2, electrode Sb3, conducting liquid Sb4, two ground resistance RG, two amplifier F, output node VSb1, output node VSb2,
Power input VCC, power supply place GND, elastic membrane Sb5 are constituted;
Elastic membrane Sb5 is enclosed at the spiral mouth of container Sb0;
The resistive layer overlay segment of induction cilium Sb1, Sb2 penetrate in cavity interface intervention cavity;
Electrode Sb3 is penetrated in cavity interface intervention cavity;
Incude the maximum span of cilium Sb1, Sb2 on the vertical line direction at container S50 cavity interface to be situated between greater than their own
Enter 2 times of the average diameter of plenum section;
Conducting liquid Sb4 is filled in container Sb0 cavity;
The fine shape electrode of induction cilium Sb1, Sb2 are not directly contacted with conducting liquid;
Electrode Sb3 is connected with power input VCC;
The fine shape electrode of induction cilium Sb1, Sb2 are connected with ground resistance RG;
The input pin for incuding each amplifier F of fine shape electrode of cilium Sb1, Sb2 is connected;
Output node VSb1, VSb2 respectively with the output pin of 1 amplifier F be connected;
During exercise, due to the inertia of conducting liquid, conducting liquid can move the sensor of this embodiment, push induction
Cilium Sb1, Sb2 are swung, and lead to the resistance variations for incuding the resistive layer of cilium Sb1, Sb2, cause to incude cilium Sb1, Sb2 fibre shape
Voltage value variation on electrode, exports after the amplification of amplifier F from output node VSb1, VSb2;In this embodiment also
There are induction cilium Sb8, Sb9 not to repeat to sketch.
Embodiment 12, such as Figure 12 spiral shell shell vessel Sc0 in be filled with liquid Sc4, elastic membrane Sc5 is enclosed in container Sc0
Spiral mouth at, also collectively form enlarged cavity Sc65 with eardrum Sc6 on the outside of elastic membrane Sc5;For the summary of problem, this implementation is real
Example does not draw the other parts such as electrode, amplifier.
Embodiment 13, such as Figure 13 spiral shell shell vessel Sd0 in be filled with liquid Sd4, elastic membrane Sd5 is enclosed in container Sd0
Spiral mouth at, enlarged cavity Sd65 is also collectively formed on the outside of elastic membrane Sd5 with eardrum Sd6, there is heavy ball Sd7 on eardrum Sd6;For
The summary this embodiment of problem does not draw the other parts such as electrode, amplifier.
A kind of sensor of embodiment 14, such as Figure 14 is mainly by container Se0, induction cilium Se1, induction cilium Se3, conduction
Liquid Se4, resistance R1, R3, adjustable resistance R2, output node VSe1+, VSe1+, power input VCC, power supply place GND are constituted;
The resistive layer overlay segment of induction cilium Se1 penetrates in cavity interface intervention cavity;
The resistive layer overlay segment of induction cilium Se3 penetrates in cavity interface intervention cavity;
Incude the maximum span of cilium Se1, Se3 on the vertical line direction at container Se0 cavity interface to be situated between greater than their own
Enter 2 times of the average diameter of plenum section;
Conducting liquid Se4 fills container Se0 cavity;
The fine shape electrode of induction cilium Se1, Se3 are not directly contacted with conducting liquid;
The fine shape electrode of induction cilium Se3 is connected with power input VCC;
The fine shape electrode of induction cilium Se1 is connected with ground resistance R1;
The fine shape electrode of induction cilium Se3 is connected with adjustable resistance R2;
R1, R2, R3 and induction cilium Se1, Se3, container Se0, conducting liquid Se4 collectively form electric bridge;
Since the inertia of conducting liquid, conducting liquid can move when the sensor movement of this embodiment, push induction fine
Flexible deformation occurs for hair S21, S23, leads to the resistance variations for incuding resistive layer S211, S231 on cilium S21, S23, signal warp
It is exported from output node VSe+, VSe-.
The variation of embodiment 15, the form of several induction ciliums as shown in a, b, c, d, e, f in Figure 15;
Induction cilium g is made of fine shape electrode g1 and resistive layer g10, and resistive layer g10 covers one end of fine shape electrode g1;
Induction cilium h is made of fine shape electrode h1 and resistive layer h10, and resistive layer h10 covers two sections of fine shape electrode h1;
Induction cilium i is made of fine shape electrode i1 and resistive layer i10, and fine one end shape electrode i10 is spherical, resistive layer i10
Cover the ball end of fine shape electrode i1;
Induction cilium j is made of fine shape electrode j1 and resistive layer j10, and fine shape electrode j1 intertexture shows as netted, resistive layer
J10 covers fine shape electrode j1;
Induction cilium k is made of fine shape electrode k1 and resistive layer k10, and resistive layer k10 covers one end of fine shape electrode k1, electricity
Resistance layer k10 tree-shaped;
Induction cilium L is made of fine shape electrode L1 and resistive layer L10, and resistive layer L10 covers the whole of fine shape electrode L1, electricity
Resistance layer L10 has lead connecting region L11, and the position resistive layer L10 where lead connecting region L11 is very thin.
Embodiment 16, an optional embodiment in embodiment 2-14, will have on the basis of selected embodiment
The quantity of effect induction cilium increases to 100 or more.
Embodiment 17, an optional embodiment in embodiment 2-14, using the resistive layer on induction cilium
Making material makes container.