CN106929909A - A kind of electro-beam floating zone domain smelting furnace and method of smelting - Google Patents
A kind of electro-beam floating zone domain smelting furnace and method of smelting Download PDFInfo
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- CN106929909A CN106929909A CN201511021618.7A CN201511021618A CN106929909A CN 106929909 A CN106929909 A CN 106929909A CN 201511021618 A CN201511021618 A CN 201511021618A CN 106929909 A CN106929909 A CN 106929909A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Manufacture And Refinement Of Metals (AREA)
Abstract
The invention discloses a kind of electro-beam floating zone domain smelting furnace and method of smelting, applying argon gas fast cooling system, water cooling system and the high vacuum unit of a body of heater and arranging are included；Body of heater is made up of upper furnace chamber with lower furnace chamber, and during working condition, upper furnace chamber is docked with lower furnace chamber longitudinal sealing；Working region in body of heater, is installed with for fixing the charging fixing device of charge bar, and is provided with a ring-type electron gun, is that ring-type electron gun arranges electron gun mobile system, and also arranging one can drive the material rotating mechanism of lower charge mechanism rotation.Method of smelting is under high vacuum environment, fuel rod realizes the effect of narrow regions fusing in the presence of high energy heat, material is then maintained in the middle of charge bar by means of its liquid surface tension force in melting zone, slowly moved vertically in same direction simultaneously, in whole complicated physical and chemical process, gas evolution, impurity evaporation simultaneously generate monocrystalline, so as to reach Smelting Effect.
Description
Technical field
The present invention relates to the melting technique of high-purity refractory metal, more particularly to a kind of electro-beam floating zone
Domain smelting furnace and method of smelting.
Background technology
With developing rapidly for science and technology, Aeronautics and Astronautics, military project, nuclear energy and bioengineering etc. are permitted
Many high-tech sectors and associated equipment manufacturing industry and industry technology also rapid advances are automatically controlled, high-purity is difficult
Molten metal and its alloy monocrystalline material are because of itself superior physics and chemical property, mechanical property
Increasingly paid close attention to by technician.Many research institutions both domestic and external are also to this high-purity infusibility and conjunction
The preparation method of golden mono-crystalline structures material makes very big input.
The main operational principle of electronic torch melting technology is electron gun (negative electrode) by heating the electronics of transmitting
High-power electron beam is formed under the acceleration of high-voltage electrostatic field, melting is wanted in electron beam bombardment after focusing on
Metal, melts refractory metal.General electron-beam melting system (such as a kind of electron beam furnace)
Including electronic torch melting furnace body (contain electron gun, body of heater, crucible and cooling body) and supporting
Auxiliary equipment (vacuum system, high voltage power supply and low-tension supply) and operating system etc..Vacuum system is
Electron beam furnace provides vacuum working environment；High voltage power supply provide for electronics that electron gun is launched plus
Fast voltage and the bombarding voltage to cathode block etc.；Low-tension supply is primarily used to focusing on, deflecting and sweep
Coil with electric current, and then the electronics for controlling electron gun to launch are retouched, enables the work by design
Skill requirement is accurate to bombard to the charge bar being melted.
But it is all to use fixed form that the electron gun of current electronic torch melting furnace body is set, to some
The Smelting Effect of high-purity infusibility and alloy monocrystalline structural material is not good；And the method one of existing electronic torch melting
As be first to melt pending metal, holding obtains new performance materials and (carries in crucible, in restructuring
It is pure and be made monocrystal material) charge bar, during these, easily there are problems that crucible is contaminated, lead
The final products purity obtained after melting is caused not reach requirement.
The content of the invention
The main object of the present invention is to provide a kind of efficiency of heating surface electro-beam floating zone domain smelting furnace high, profit
High-purity infusibility and alloy monocrystalline structural material can be prepared with the equipment.
To achieve the above object, the present invention takes following design：
A kind of electro-beam floating zone domain smelting furnace, include a body of heater and arranging applying argon gas fast cooling system,
Water cooling system and high vacuum unit；
Described body of heater is made up of upper furnace chamber with lower furnace chamber；Wherein, lower furnace chamber is fixed on body of heater support,
Upper furnace chamber is equipped with the upper furnace chamber hoisting mechanism that can be lifted and be transferred, during working condition, on
Furnace chamber is docked with lower furnace chamber longitudinal sealing；
Working region in body of heater, is installed with the charging fixing device for fixing charge bar；
A ring-type electron gun is provided with body of heater, its set position can make clamped by charging fixing device
Charge bar is passed through along its axis.
It is that ring-type electron gun arranges electron gun mobile system in the smelting furnace of the electro-beam floating zone domain, should
Electron gun mobile system is driven and with water-cooling system using servo electric jar.
In the smelting furnace of the electro-beam floating zone domain, the charging fixing device includes upper charge mechanism with
Charge mechanism, both two opposite head ends are respectively provided with the chuck for gripping charge bar.
In the smelting furnace of the electro-beam floating zone domain, arranging one can drive the material of lower charge mechanism rotation to revolve
Rotation mechanism.
In the smelting furnace of the electro-beam floating zone domain, described upper furnace chamber is furnished with observation window, the observation window by
It is outer to install cover plate, seal glass and one group of reflecting glass successively in.
In the smelting furnace of the electro-beam floating zone domain, one group of reflecting glass is obliquely installed, and the group
Reflecting glass is each other parallel.
It is that upper and lower charge mechanism arranges a centering body, bag in the smelting furnace of the electro-beam floating zone domain
An eccentric flange and an adjustment mounting flange are included, eccentric flange and adjustment mounting flange are spherical and non-
It is relative with one heart to connect；Upper charge mechanism carries outer male structure with deck on eccentric flange, and both are concentric
Set；Upper charge mechanism is fixedly connected with adjustment mounting flange.
In the smelting furnace of the electro-beam floating zone domain, also with one of following structure：
1) the upper furnace chamber hoisting mechanism is worn body of heater frame and is crossed and therewith by two guide upright posts in left and right
It is fixed；
2) it is equipped with for realizing automatically controlled human-machine operation panel to electro-beam floating zone domain smelting furnace；
3) furnace chamber takes out mouth containing high vacuum on.
It is a further object of the present invention to provide a kind of method of electro-beam floating zone melting, using the method
The product purity obtained after fusion process, and melting can not only be simplified can be higher.
To achieve the above object, the present invention takes following design：
A kind of electro-beam floating zone domain method of smelting, with above-mentioned electro-beam floating zone domain smelting furnace, its
Method of smelting is comprised the following steps that：
A) upper furnace chamber is raised to by rational position by upper furnace chamber hoisting mechanism first and is locked, it is ensured that stove
Thorax is opened wide；
B) charge mechanism bottom and lower charge mechanism upper end in the length adjustment according to preprocessing charge bar
The distance between, it is coincide with charge bar length, while charge bar two ends are used into upper and lower charger respectively
The chuck of structure end is fixed；
C) upper furnace chamber hoisting mechanism is discharged, furnace chamber and, completion feeding sealed with the sealing of lower furnace chamber in landing；
D) water cooling system normal operation is treated, starts high vacuum unit to reach by human-machine operation panel
It is required that vacuum；
E) high and low pressure power-supply system is controlled, ring-type electron gun is opened；
F) servo electric jar is controlled, adjustment rifle travel mechanism makes position set by ring-type electron gun be in material
In the plane of rod lowermost end, at the uniform velocity moved upwards by the speed of setting；
G) control servomotor drives the rotary speed of material rotating mechanism, at the uniform velocity rotates charge bar, until
Meet melting once requirement；
H) terminate melting, or be transferred to the melting that step a carries out next time.
In the method for smelting of the electro-beam floating zone domain, also with following characterization methods：The step
In b, the chuck in upper and lower charging mechanism end portion is aligned and uses off-centre operation centering method with one heart, if
There is eccentric state in upper and lower charge mechanism, by the circumference to eccentric flange to adjustment, to its center
Position deviation is corrected.
Electro-beam floating zone domain of the present invention method of smelting is to prepare high-purity infusibility and alloy monocrystalline structural material
Typical method.This method is substantially that under high vacuum environment, fuel rod is real in the presence of high energy heat
The effect of existing narrow regions fusing, material is then maintained at charge bar by means of its liquid surface tension force in melting zone
Centre, while slowly moved vertically in same direction, in whole complicated physical and chemical process,
Gas evolution, impurity evaporation simultaneously generate monocrystalline, so as to reach Smelting Effect.Melt in electro-beam floating zone domain
Furnace prepares high pure metal and monocrystalline equipment for special, using this equipment can under conditions of high vacuum,
The infusibilities such as tungsten, molybdenum, tantalum, niobium, titanium, zirconium, hafnium, active metal etc. are purified and list is drawn into
Crystalline substance, can also be by the insulating materials such as Al2O3, jewel, ceramics heating degassing etc..The equipment passes through ring
Shape electron gun from the electronics of emission of cathode under Potential distribution effect, by aggregation and accelerator by electricity
Beamlet is bombarded onto the fuel rod of clamping, charge bar is bombarded region and is heated up under heat energy transformation high and is melted
Change.
It is an advantage of the invention that：
1. electron gun is using annular rifle, it is to avoid filament region be directly facing with material, can eliminate fusing
During pollution of the splash to filament that produces of material, extend the life-span of filament；And be equipped with simultaneously
Electron gun mobile system, compared with other kinds of drive, with exquisiteness novel in design, small volume, high precision,
Complete Synchronization, self-locking property are good, health the advantages of；
2. material rotating mechanism is also equipped with the present invention, the uniform molten of material can be ensured in melting
Refining and crystal normal growth；
3. it is small compared with resistance heating region due to ring-type electron gun electron beam scanning width of the invention
Many, melting zone substantially, during electron gun is moved up and down, is appointed with the thermograde for treating smelting area
The liquation form of one melting range is more susceptible to the effect control of its surface tension, therefore the efficiency of heating surface is high, temperature
Degree gradient is easily controllable；
4., without being equipped with crucible, thus the problem presence without crucible pollution, the sky of equipment is also effectively saved
Between and cost of manufacture；
Brief description of the drawings
Fig. 1 is electro-beam floating zone domain furnace construction schematic diagram (front view) of the present invention.
Fig. 2 is electro-beam floating zone domain furnace construction schematic diagram (side view) of the present invention.
Fig. 3 is observation window structural representation of the present invention.
Fig. 4 is present invention charging fixing device part-structure schematic diagram.
In figure：The upper furnace chambers of 1-；2- vacuum observation windows；3- argon filling air cooling systems；The upper charge mechanisms of 4-；
5- charge bars；6- ring-type electron guns；Charge mechanism under 7-；Furnace chamber under 8-；9- material rotating mechanisms；10-
Servomotor；11- servo electric jars；12- body of heater supports；13- rifles travel mechanism；The upper furnace chambers of 14- are carried
Rise mechanism；15- human-machine operation panels；16- high vacuum units；17- eccentric flanges；18- adjustment is fixed
Flange；201- cover plates；202- seal glass；203- reflecting glasses.
Below in conjunction with the accompanying drawings and specific embodiment the present invention is described further.
Specific embodiment
Referring to shown in Fig. 1 and Fig. 2, electro-beam floating zone domain of the present invention smelting furnace uses vertical structure, main
Include including body of heater support, upper furnace chamber, lower furnace chamber, upper furnace chamber hoisting mechanism, upper charge mechanism,
Lower charge mechanism, ring-type electron gun, rifle travel mechanism, material rotating mechanism, high vacuum unit, very
Empty observation window, man-machine control panel, argon filling air cooling system, cooling water system.Wherein rifle moving machine
Structure ginseng is driven with servo electric jar, and material rotating mechanism is driven using servomotor, in corresponding servo
Under controller action, by the control realization precise movement of man-machine operation bench, the crystalline substance of complete performance is obtained
Body material.
Body of heater of the invention is made up of upper furnace chamber with lower furnace chamber, using Double water-cooled welding structure,
To reduce the deformation and weldering leakage problem that high temperature is produced in melting.Body of heater support 12 is fixed with basis, under
Furnace chamber 8 is fixed on body of heater support 12, and upper furnace chamber hoisting mechanism 14 is by two guide upright posts in left and right
Wear body of heater frame and cross and fixed thereto.Upper furnace chamber can be lifted and transferred by upper furnace chamber hoisting mechanism,
During working condition, upper furnace chamber is docked with lower furnace chamber longitudinal sealing.Upper furnace chamber hoisting mechanism 14 is molten actually
Room switching mechanism；For the ease of charging and start-up of the furnace, by pulley and the additional counterweight of wire mechanism,
Furnace chamber 1 in lifting, and hoisting mechanism left and right pillar is respectively equipped with dragging track and directive wheel, and end eventually
There is mechanical position limitation position, and it is flexible to ensure that furnace chamber is opened and closed with this, light to become, steadily.
Upper furnace chamber takes out mouth and vacuum observation window 2 containing high vacuum, and arranges quick argon filling cooling system 3.
Vacuum observation window 2 of the invention is to design light path according to light principle of reflection, and observation window makes fan
Palace formula, to reduce mechanically deform, be resistant to 450 DEG C of baking, it is shown in Figure 3, the observation window by
It is anti-that cover plate 201 (lead glass protecting screen), seal glass 202 and one group are installed successively in outward
Penetrate glass 203, one group of reflecting glass 203 is obliquely installed, and the group (this reality of reflecting glass 203
Apply in example using 2 pieces) it is each other parallel.Described cover plate 201 is (using lead glass protection
Screen is preferred), injury of the X-ray of high pressure generation to human body can be eliminated.The effect of reflecting glass：
Equipment can produce the sputtering of liquid gaseous state fusant during high melt, it is possible to observation window can be caused
Coating is condensed, common observation window can cause observation window to fail, it is impossible to the internal melting state of monitoring；Using
After one group of reflecting glass, incident angle is angled with glass, has both made after single-glass is plated,
Melting state can also be reflected into human eye by another side speculum, together by light principle of reflection
When can also filter off high light, protect eyes.Adjustable glass baffle plate is housed on window, is ensured in whole melting
During can clearly observe material.The design of this vacuum observation window 2, it is ensured that in furnace chamber
There is after the molten plating of surface layer of glass still normal work in portion.
Charging fixing device of the invention is made up of upper charge mechanism 4, lower charge mechanism 7 respectively, charge bar
5 are fixed by the grips of upper and lower charge mechanism；After the closing of upper furnace chamber 1, upper and lower charging
Mechanism is in vacuum melting room, its internal water flowing circulating cooling；Upper charge mechanism 4 is installed on
On the lower machinery frame of charge mechanism 7, adjusted up and down according to charge bar length；Upper lower chuck aligns use with one heart
Off-centre operation centering technology, it is shown in Figure 4, eccentric flange 17 is fitted with upper charge mechanism
With adjustment mounting flange 18, eccentric flange 17 with adjust that mounting flange 18 is spherical connects, its center
Line be in eccentric state, wherein eccentric flange upper end install charge mechanism (in the present embodiment, upper dress
Material mechanism with outer male structure with deck on eccentric flange), both are arranged concentrically, position relationship
Unanimously；Upper charge mechanism 4 is fixedly connected with adjustment mounting flange 18.If upper and lower charge mechanism occurs inclined
Heart shaped state, by the circumference to eccentric flange to adjustment, can be inclined to its center within the specific limits
Difference is corrected, so as to solve the problems, such as lower chuck out-of-alignment in charging fixing device, it is to avoid in material
Cause in rod rotary course get stuck, material is shapeless, material is damaged and the phenomenon such as device damage.
Electron gun of the invention 6 is made up using autoacceleration formula annular rifle, hollow cathode of oxygen-free copper, water
It is cold and be grounded.The electronics produced by filament is allowed to deflect, gathers by the Potential distribution that grid and anode are produced
Burnt and acceleration, is bombarded on material by negative electrode narrow slit.The structure of this rifle avoids filament and material
Region be directly facing, eliminate the pollution of material is produced in fusion process splash to filament, extend
The life-span of filament.Adjustment circular anode Gap size, can change melting zone width, so be conducive to melting
The material that diameter is big, smelt surface tension is small.In the present embodiment, the position set by the ring-type electron gun 6
Putting can be such that the charge bar 5 clamped by charging fixing device is passed through along its axis.
In the present invention, electron gun mobile system 13 is equipped with, by with water-cooling system, using servo
Electric cylinder be driven, with high accuracy, stable movement, low noise, and Operation and Maintenance it is simple the advantages of.
Electron gun can move up and down, and range is 500mm；Translational speed control exists：0.5mm/min~
50mm/min, and speed is adjustable, is usually operated at 2mm/min or so.The mechanism holds for novel linear
Row mechanism, compared with other kinds of drive, with exquisiteness novel in design, small volume, high precision, completely together
The advantages of step, good self-locking property, health.
Material rotating mechanism 9 is also equipped with the present invention, is directly driven by servomotor 10.In melting
Uniform melting and the crystal normal growth of material are ensure that, to meet the optimum efficiency of melting.Bar 5
1~20 rev/min of rotating speed, speed is adjustable, generally 2~3 revs/min operation.
Water-cooling system of the invention is equipped with controlled valve, flow using all the way one control per water all the way
The devices such as regulating valve, thermometer, and setting flowmeter carries out flow report at electron gun and material device
Alert and chain monitoring, more preferable cooling effect is reached with this.
Electronic control technology in the present invention belongs to prior art can be realized, not repeated herein.
The course of work of the present invention is to equip fuel rod by upper and lower material folding to fix, and is according to circulating electron
Potential distribution deflection, focusing and acceleration that rifle is produced from the electronics of emission of cathode by negative electrode and anode, lead to
The narrow slit for crossing anode is bombarded onto material, due to the bombardment result of electronics, in the concentration of local of charge bar
Very big energy and the fusing that heats up, fusant material smelting area is formed under its own face tension force effect,
Realize the generation effect of the purification and crystal to high temperature refractory material.Whole fusion process has heating
Efficiency high, thermograde be easily controllable, the advantage without crucible pollution, in current industry and future has
Very big development potential energy.
The various embodiments described above can be being subject to some changes without departing from the scope of the invention, therefore the above is said
It is bright include should be regarded as it is exemplary, and be not used to limit the present patent application patent protection domain.
Claims (10)
1. a kind of electro-beam floating zone domain smelting furnace, include a body of heater and arranging applying argon gas fast cooling system,
Water cooling system and high vacuum unit；It is characterized in that：
Described body of heater is made up of upper furnace chamber with lower furnace chamber；Wherein, lower furnace chamber is fixed on body of heater support,
Upper furnace chamber is equipped with the upper furnace chamber hoisting mechanism that can be lifted and be transferred, during working condition, on
Furnace chamber is docked with lower furnace chamber longitudinal sealing；
Working region in body of heater, is installed with the charging fixing device for fixing charge bar；
A ring-type electron gun is provided with body of heater, its set position can make clamped by charging fixing device
Charge bar is passed through along its axis.
2. electro-beam floating zone domain as claimed in claim 1 smelting furnace, it is characterised in that：It is annular electro
Sub- rifle arranges electron gun mobile system, and the electron gun mobile system is driven and is carried using servo electric jar
Water-cooling system.
3. electro-beam floating zone domain as claimed in claim 1 smelting furnace, it is characterised in that：The charging
Fixing device includes upper charge mechanism and lower charge mechanism, and both are respectively provided with use by two opposite head ends
In the chuck for gripping charge bar.
4. electro-beam floating zone domain as claimed in claim 1 smelting furnace, it is characterised in that：Arranging one can
Drive the material rotating mechanism of lower charge mechanism rotation.
5. electro-beam floating zone domain as claimed in claim 1 smelting furnace, it is characterised in that：Described is upper
Furnace chamber is furnished with observation window, and the observation window installs cover plate, seal glass and one group successively from outside to inside
Reflecting glass.
6. electro-beam floating zone domain as claimed in claim 5 smelting furnace, it is characterised in that：Described one group
Reflecting glass is obliquely installed, and the reflecting glass of the group is each other parallel.
7. electro-beam floating zone domain as claimed in claim 1 smelting furnace, it is characterised in that：For upper and lower
Charge mechanism arranges a centering body, includes an eccentric flange and an adjustment mounting flange, eccentric method
Blue and adjustment mounting flange is spherical and non-concentric connects relatively；Upper charge mechanism is with outer male structure with card
On eccentric flange, both are arranged concentrically seat；Upper charge mechanism is fixedly connected with adjustment mounting flange.
8. electro-beam floating zone domain as claimed in claim 1 smelting furnace, it is characterised in that also with following
One of structure：
1) the upper furnace chamber hoisting mechanism is worn body of heater frame and is crossed and therewith by two guide upright posts in left and right
It is fixed；
2) it is equipped with for realizing automatically controlled human-machine operation panel to electro-beam floating zone domain smelting furnace；
3) furnace chamber takes out mouth containing high vacuum on.
9. a kind of electro-beam floating zone domain method of smelting, the electricity with any one in claim 1 to 8
Beamlet suspension region smelting furnace, it is characterised in that method of smelting is comprised the following steps that：
A) upper furnace chamber is raised to by rational position by upper furnace chamber hoisting mechanism first and is locked, it is ensured that stove
Thorax is opened wide；
B) charge mechanism bottom and lower charge mechanism upper end in the length adjustment according to preprocessing charge bar
The distance between, it is coincide with charge bar length, while charge bar two ends are used into upper and lower charger respectively
The chuck of structure end is fixed；
C) upper furnace chamber hoisting mechanism is discharged, furnace chamber and, completion feeding sealed with the sealing of lower furnace chamber in landing；
D) water cooling system normal operation is treated, starts high vacuum unit to reach by human-machine operation panel
It is required that vacuum；
E) high-low voltage power source system is controlled, ring-type electron gun is opened；
F) servo electric jar is controlled, adjustment rifle travel mechanism makes position set by ring-type electron gun be in material
In the plane of rod lowermost end, at the uniform velocity moved upwards by the speed of setting；
G) control servomotor drives the rotary speed of material rotating mechanism, at the uniform velocity rotates charge bar, until
Meet melting once requirement；
H) terminate melting, or be transferred to the melting that step a carries out next time.
10. electro-beam floating zone domain as claimed in claim 9 method of smelting, it is characterised in that also have
There are following characterization methods：In the step b, the chuck in upper and lower charging mechanism end portion is aligned with one heart
Using off-centre operation centering method, if eccentric state occurs in upper and lower charge mechanism, by bias
The circumference of flange is corrected to adjustment to its center position deviation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201511021618.7A CN106929909B (en) | 2015-12-31 | 2015-12-31 | A kind of electro-beam floating zone domain smelting furnace and method of smelting |
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| CN201511021618.7A CN106929909B (en) | 2015-12-31 | 2015-12-31 | A kind of electro-beam floating zone domain smelting furnace and method of smelting |
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Cited By (1)
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| CN111118596A (en) * | 2020-01-09 | 2020-05-08 | 有研工程技术研究院有限公司 | Multifunctional electron beam zone smelting furnace |
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