CN106917821B - A kind of processing method of planar motor permanent magnet array Air Bearing Surface - Google Patents
A kind of processing method of planar motor permanent magnet array Air Bearing Surface Download PDFInfo
- Publication number
- CN106917821B CN106917821B CN201511001030.5A CN201511001030A CN106917821B CN 106917821 B CN106917821 B CN 106917821B CN 201511001030 A CN201511001030 A CN 201511001030A CN 106917821 B CN106917821 B CN 106917821B
- Authority
- CN
- China
- Prior art keywords
- permanent magnet
- magnet array
- air bearing
- bearing surface
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003672 processing method Methods 0.000 title claims abstract description 11
- 239000000919 ceramic Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000003822 epoxy resin Substances 0.000 claims abstract description 9
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 9
- 239000011814 protection agent Substances 0.000 claims abstract description 8
- 239000003292 glue Substances 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 5
- 238000005299 abrasion Methods 0.000 claims abstract description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 239000007767 bonding agent Substances 0.000 claims description 3
- 230000001680 brushing effect Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 238000007711 solidification Methods 0.000 abstract 1
- 230000008023 solidification Effects 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2220/00—Shaping
- F16C2220/60—Shaping by removing material, e.g. machining
- F16C2220/70—Shaping by removing material, e.g. machining by grinding
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2223/00—Surface treatments; Hardening; Coating
- F16C2223/30—Coating surfaces
- F16C2223/42—Coating surfaces by spraying the coating material, e.g. plasma spraying
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2235/00—Cleaning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2380/00—Electrical apparatus
- F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
A kind of processing method of planar motor permanent magnet array Air Bearing Surface, belongs to Ultra-precision Turning technology field.In order to reach existing planar motor driving in X direction, the movenent performance requirement of the three freedom degree precision movement platform of Y-direction and about the z axis direction of rotation, meet the use needs of the air-bearing used on existing motion platform, the method of the invention is: coating the epoxide-resin glue with high osmosis in each gap between clean permanent magnet array upper surface and each permanent magnet first, and make its solidification, after being ground roughing, the ceramic protection agent material of one layer of high abrasion is brushed again, after being fully cured Deng it, be ground thick, retrofit and underhand polish, obtain required air-floatation planar.This method can obtain higher air-floatation planar degree, it is thus also avoided that the advantages that the problems such as liquid pollution corrosion is cut in grinding finishing and process of lapping has air bearing surface thickness small, light-weight, and manufacturing process is simple and fast and low in cost.
Description
Technical field
The present invention relates to the processing methods of planar motor permanent magnet array surface air-floatation planar, and it is flat to can be used for precise motion
The manufacture of plane of movement needed for the coarse motion platform of platform, especially integrated circuit processing precision workpiece stage, belongs to precise machining process
Field.
Background technique
Ultra-precision table system has a wide range of applications in integrated circuit processing and testing equipment, and plays of crucial importance
Effect.For example, the core component as litho machine, ultra-precision table system (mask platform and silicon wafer stage of litho machine) carries silicon
Piece or mask are moved according to the speed of setting and direction, are covered by mask platform with the high-precision positioning of silicon wafer stage with synchronous realization
Accurate transfer on mould characteristics of image to silicon wafer, therefore the movement of ultra-precision table system sports platform part and positioning accuracy are to realize light
Quarter machine resolution ratio and alignment precision key.
Traditional approach is directly to process to permanent magnet array upper surface, but since permanent magnet array belongs to splicing
Part, the careless slightly permanent magnet that will occur burst apart or the problems such as permanent magnet loosens pop-up, increase the risk of processing, and process
When used water-base cutting fluid the problems such as directly contacting permanent magnet, causing permanent magnet corrosion, finally affect plane electricity
The kinematic accuracy of machine.
Summary of the invention
The present invention provides a kind of processing methods of planar motor permanent magnet array Air Bearing Surface, it is intended to the reality of convenient and efficient
The processing and manufacturing of air bearing surface needed for existing air-bearing, so that while manufacture meets the air bearing surface of air-bearing requirement,
Air bearing surface size is small, light-weight, and substantially reduce time cycle, complex process degree, cost etc..
Technical scheme is as follows:
A kind of processing method of planar motor permanent magnet array Air Bearing Surface of the present invention, it is characterised in that: the party
Method is as follows:
1) prepare the permanent magnet array with pedestal, which is cleaned and dried；
2) it is coated in each gap with high osmosis between the cleaning permanent magnet array upper surface finished and each permanent magnet
Epoxide-resin glue, and solidify；
3) the permanent magnet array upper surface obtained to step 2) carries out grinding roughing；
4) the brushing air-floatation planar again of the epoxide-resin glue upper surface after permanent magnet array solidifies, air bearing is flat in this method
Face (2) is the ceramic protection agent material of one layer of high abrasion, waits it to be fully cured after brushing；
5) the upper surface air-floatation planar of the permanent magnet array described in step 4) with pedestal is carried out again being ground thick, finishing
Work；
6) after the upper surface air-floatation planar of the step 5) permanent magnet array with pedestal carries out underhand polish, institute is obtained
Need air-floatation planar.
The processing method of a kind of planar motor permanent magnet array Air Bearing Surface of the present invention, it is characterised in that: described
Ceramic protection agent be the bonding agent mixed by epoxy resin and ceramic powders.
A kind of the advantages of processing method of planar motor permanent magnet array Air Bearing Surface of the invention, is: in permanent magnet battle array
List face coat one layer of ceramic protection agent, obtain higher air-floatation planar degree, it is thus also avoided that grinding finishing and it is ground
The problems such as liquid pollution corrosion is cut in journey, has air bearing surface thickness small, and light-weight, manufacturing process is simple and fast, cost
The advantages that cheap.
Detailed description of the invention
Fig. 1 is the permanent magnet array and air-floatation planar tomograph before processing provided by the invention.
Fig. 2 is the permanent magnet array and air-floatation planar side view before processing provided by the invention.
Fig. 3 is the permanent magnet array and air-floatation planar side view after processing provided by the invention.
Permanent magnet array of the 1- with pedestal；2- air-floatation planar；
Specific embodiment
Permanent magnet array is 300 μm or so by the surface planarity order of magnitude that processing is formed, and air-bearing is to air bearing
The surface accuracy of plane has higher requirements, and about 80 μm, therefore, invention describes a kind of planar motor permanent magnet array air bearings
The processing method on surface.
Increase above the permanent magnet array with backboard air bearing surface material by Roughing and fine machining to obtaining air bearing surface,
Steps are as follows for its manufacturing method:
1) prepare one piece of permanent magnet array with pedestal, which is cleaned and dried；
2) it is coated in each gap with high osmosis between the cleaning permanent magnet array upper surface finished and each permanent magnet
Epoxide-resin glue, and solidify；
3) the permanent magnet array upper surface obtained to second step carries out grinding roughing；
4) the ceramic protection agent of one layer of high abrasion is brushed in the epoxide-resin glue upper surface after permanent magnet array solidifies again
Material, and solidify, as depicted in figs. 1 and 2；
5) upper surface of the permanent magnet array described in the 4th step carries out grinding Roughing and fine machining again；
6) after the air bearing surface upper surface of the permanent magnet array described in the 5th step carries out underhand polish, it is flat to obtain required air bearing
Face, as shown in Figure 3.
Ceramic protection agent of the present invention is to be mixed by epoxy resin and ceramic powders by certain proportion
Bonding agent.The flatness of the upper surface air bearing surface of permanent magnet array obtained is 50 μm in this embodiment, while ceramics are anti-
Shield agent have many advantages, such as hardness and wearability it is good, without ferromagnetism.
Claims (2)
1. a kind of processing method of planar motor permanent magnet array Air Bearing Surface, it is characterised in that: this method as follows:
1) permanent magnet array (1) with pedestal is got out, which is cleaned and dried；
2) ring with high osmosis is coated in each gap between the cleaning permanent magnet array upper surface finished and each permanent magnet
Oxygen resin glue, and solidify；
3) the permanent magnet array upper surface obtained to step 2) carries out grinding roughing；
4) the ceramic protection agent material that one layer of high abrasion is brushed on the epoxide-resin glue after permanent magnet array solidifies, after brushing etc.
It is fully cured to it, forms air bearing surface；
5) air bearing surface is formed by step 4) to carry out being ground thick, retrofit and underhand polish again, obtain required air bearing
Plane.
2. a kind of processing method of planar motor permanent magnet array Air Bearing Surface as described in claim 1, it is characterised in that: institute
The ceramic protection agent stated is the bonding agent mixed by ceramic powders and epoxy resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511001030.5A CN106917821B (en) | 2015-12-28 | 2015-12-28 | A kind of processing method of planar motor permanent magnet array Air Bearing Surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511001030.5A CN106917821B (en) | 2015-12-28 | 2015-12-28 | A kind of processing method of planar motor permanent magnet array Air Bearing Surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106917821A CN106917821A (en) | 2017-07-04 |
| CN106917821B true CN106917821B (en) | 2019-06-18 |
Family
ID=59455759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511001030.5A Active CN106917821B (en) | 2015-12-28 | 2015-12-28 | A kind of processing method of planar motor permanent magnet array Air Bearing Surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106917821B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6134981A (en) * | 1999-12-03 | 2000-10-24 | Nikon Research Corporation Of America | Precision scanning apparatus and method with fixed and movable guide members |
| CN1699006A (en) * | 2005-06-01 | 2005-11-23 | 清华大学 | Electrochemical machining process for array micro type hole |
| CN102312921A (en) * | 2010-07-02 | 2012-01-11 | 东上国际股份有限公司 | Method for manufacturing air bearing |
| CN103742955A (en) * | 2014-01-17 | 2014-04-23 | 吴棠恩 | Gas stove panel manufacturing process |
| CN204565971U (en) * | 2015-04-29 | 2015-08-19 | 魏志忠 | Absorption floating platform |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02129501A (en) * | 1988-11-09 | 1990-05-17 | Shirata Seisakusho:Kk | Surface plate for precision measurement |
| WO2011160867A1 (en) * | 2010-06-23 | 2011-12-29 | Asml Holding N.V. | Pneumatic bearing with bonded polymer film wear surface and production method thereof |
-
2015
- 2015-12-28 CN CN201511001030.5A patent/CN106917821B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6134981A (en) * | 1999-12-03 | 2000-10-24 | Nikon Research Corporation Of America | Precision scanning apparatus and method with fixed and movable guide members |
| CN1699006A (en) * | 2005-06-01 | 2005-11-23 | 清华大学 | Electrochemical machining process for array micro type hole |
| CN102312921A (en) * | 2010-07-02 | 2012-01-11 | 东上国际股份有限公司 | Method for manufacturing air bearing |
| CN103742955A (en) * | 2014-01-17 | 2014-04-23 | 吴棠恩 | Gas stove panel manufacturing process |
| CN204565971U (en) * | 2015-04-29 | 2015-08-19 | 魏志忠 | Absorption floating platform |
Non-Patent Citations (1)
| Title |
|---|
| 光刻机超精密工件台研究;朱煜等;《电子工业专用设备》;20040215;全文 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106917821A (en) | 2017-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10118269B2 (en) | Self-sharpening polishing device with magnetorheological flexible polishing pad formed by dynamic magnetic field and polishing method thereof | |
| CN110193763B (en) | Prism fine polishing equipment and process | |
| CN201026588Y (en) | Magnetorheological apparatus for grinding and polishing curved surface | |
| CN104209862B (en) | Ultra-smooth plane grinding polishing device and method for online trimming flexible polishing pad | |
| CN107617933B (en) | Dynamic magnetic field magnetorheological polishing device | |
| Zhang et al. | High-performance grinding of a 2-m scale silicon carbide mirror blank for the space-based telescope | |
| CN105922125A (en) | Magneto-rheological fluid dynamic pressure composite polishing device and method | |
| CN106917821B (en) | A kind of processing method of planar motor permanent magnet array Air Bearing Surface | |
| KR101760355B1 (en) | Method for the material-removing machining of very thin work pieces in a double side grinding machine | |
| Sun et al. | Investigation on magnetorheological shear thickening finishing (MSTF) with radially slotted magnetic pole for free-form surface | |
| CN106919000B (en) | The processing method of planar motor permanent magnet array Air Bearing Surface | |
| CN112461264B (en) | Nano manufacturing equipment for quartz hemispherical harmonic oscillator | |
| ES2400925T3 (en) | Manufacturing and processing method for silicon carbide scanning and optical mirrors | |
| CN205817564U (en) | A kind of cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity | |
| WO2024045493A1 (en) | Shape-controlled flexible polishing method for microarray mold | |
| CN109807720B (en) | Generating type processing method of micro-lens array optical element | |
| CN101966675B (en) | Production method for high-precision ultra-thin edge thick lens | |
| JP2001328065A (en) | Precision machining device | |
| Fan | Research of ultra precision machining technology | |
| CN110486383B (en) | Aerostatic bearing matrix and manufacturing method of surface microstructure thereof | |
| KR20190125192A (en) | Pellicle frame and method for manufacturing the same | |
| Liu et al. | Modeling and experiment of concave microlens array on silicon wafer by grinding-polishing process with diamond slurry | |
| Tang et al. | Development of an Ultra-Precision Annular Polishing Machine Tool with Full Gas Static Pressure | |
| CN203485012U (en) | Automatic elevating cover for grinding and polishing machine and grinding and polishing machine | |
| Suzuki et al. | Precision machining and measurement of micro aspheric molds |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |