CN106915895A - The manufacture method of glass substrate and the manufacture device of glass substrate - Google Patents
The manufacture method of glass substrate and the manufacture device of glass substrate Download PDFInfo
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- CN106915895A CN106915895A CN201611238145.0A CN201611238145A CN106915895A CN 106915895 A CN106915895 A CN 106915895A CN 201611238145 A CN201611238145 A CN 201611238145A CN 106915895 A CN106915895 A CN 106915895A
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- glass
- melten glass
- formed body
- melten
- wall
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B7/00—Distributors for the molten glass; Means for taking-off charges of molten glass; Producing the gob, e.g. controlling the gob shape, weight or delivery tact
- C03B7/08—Feeder spouts, e.g. gob feeders
- C03B7/092—Stirring devices; Homogenisation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B7/00—Distributors for the molten glass; Means for taking-off charges of molten glass; Producing the gob, e.g. controlling the gob shape, weight or delivery tact
- C03B7/08—Feeder spouts, e.g. gob feeders
- C03B7/094—Means for heating, cooling or insulation
- C03B7/096—Means for heating, cooling or insulation for heating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
Abstract
The present invention provides a kind of manufacture method and manufacture device of the glass substrate of the end devitrification of the width that can suppress sheet glass.The present invention is a kind of manufacture method of the glass substrate of use formed body,The formed body possesses a pair of walls,The melten glass that guiding is flowed down from the upper surface for forming the feed trough for supplying melten glass,It is set to be merged in lower end and form sheet glass,And,The liquid phase viscosity of glass composition is more than 80000dPas and below 100000dPas,By the viscosity of melten glass be more than 25000dPas and the melten glass of below 35000dPas is supplied to feed trough,A pair of the guiding elements protruded using the end of the width from formed body,Simultaneously limit the width of the melten glass,Simultaneously make melten glass along under wall flow,Compare the melten glass that the inboard portion between the both ends of width described in the wall flows down,Increasing is supplied to the heating amount of the melten glass flowed down along the end,Thus making the viscosity of the melten glass of the lower end turns into more than 40000dPas and does not reach 80000dPas.
Description
Technical field
The present invention relates to the manufacture method and the manufacture device of glass substrate of a kind of glass substrate.
Background technology
So-called overflow downdraw refers to following method：(1) melten glass is supplied on top and forms melten glass
Feed trough and with wedge shape section building mortion (formed body), (2) by the melten glass overflowed from feed trough guide into
Shape dress put in the both sides equivalent to the wedge shape side a pair of walls, and under making melten glass along the wall flow, (3)
Make continuously to be configured to sheet glass (glass tape) in the lower end fusion of building mortion along the melten glass under each wall flow.Institute
The step such as the sheet glass of acquisition and then adjustment, slow cooling by thickness is cut to desired size, as glass substrate.Overflow
Daraf(reciprocal of farad) is flowed down to be adapted to manufacture large area and relatively thin glass substrate, such as liquid crystal display, organic EL
Used in the flat-panel monitors (FPD) such as (Electroluminescence, electroluminescence) display, plasma display
Glass substrate.
Sometimes both ends in building mortion, more particularly, the width of the melten glass of the wall that melten glass is flowed down
The end of the both sides in direction is spent, a pair of the guiding elements for being formed to each other are set in the way of being protruded from the wall of the end.It is logical
Configuration guiding element is crossed, is limited along the width of the melten glass under wall flow.In patent document 1, disclose and possess with specific
Shape guiding element building mortion.Following situation has been recorded in patent document 1：Using the building mortion, in melten glass
Viscosity it is of a relatively high in the case of can shape both ends (ear) dimensionally stable sheet glass.
In patent document 2, the technology of the shape defect of the end for preventing sheet glass is disclosed.More particularly, special
Following technology is disclosed in sharp document 2：In the lower end of building mortion and removing positioned at the sheet glass away from the nearest position of the device
The space configuration heater between roller is sent, the end of the sheet glass after just fusion is locally heated by one using heater one side
Implement the shaping and conveyance of sheet glass in face.
[background technology document]
[patent document]
[patent document 1] Japanese Patent Laid-Open 2010-189220 publications
[patent document 2] Japanese Patent Laid-Open 2010-215428 publications
The content of the invention
[invention problem to be solved]
In overflow downdraw, in the case of using the building mortion for possessing the guiding element, there are the following problems：If it is desired to
Shape the less glass of liquid phase viscosity, then easily produce devitrification along the melten glass flowed down near guiding element, that is to say, that
Easily produce the end (below, " end of width " is referred to as " end ") of the width in shaped sheet glass
Raw devitrification.In patent document 1, the record related to the devitrification of this kind of sheet glass end is had no.Recorded in patent document 2
Following situation：The adding in the lower end of building mortion and between the carrying roller than building mortion downstream by using configuration
Hot device heats guiding element lower end, it is possible to preventing the melten glass extended stationary periods of only guiding element lower end from easily producing devitrification
Temperature province.However, in the technology of patent document 2, the lower end of the only guiding element heated using the heater may not necessarily
It is enough fully to suppress along the devitrification of the melten glass flowed down near guiding element.Especially, the glass composition of melten glass is being constituted
In the case of liquid phase viscosity is less, it is difficult to suppress the end devitrification of shaped sheet glass.As the less glass of liquid phase viscosity
Glass composition, for example, can enumerate in order that percent thermal shrinkage diminishes and makes the low temperature polycrystalline silicon (LTPS of strain point rising：Low
Temperature Poly-Silicon) use glass composition.
Therefore, the present invention is the manufacture method and manufacture device of glass substrate that are carried out using overflow downdraw, purpose
It is the manufacture device that manufacture method and glass substrate such as lower glass substrate are provided：Suppress the end of shaped sheet glass
The effect of devitrification is higher, even if the liquid phase viscosity for constituting the glass composition of melten glass is smaller, can also obtain the suppression end
The effect of devitrification.
[technological means of solve problem]
A form of the invention is a kind of manufacture method of glass substrate, it is characterised in that：With forming step, wherein
Overflow downdraw formed glass sheet, the formed body is utilized to possess upper surface and a pair of walls, the upper surface using formed body
Form the feed trough for supplying melten glass, the wall guiding is overflowed and from the upper table surface current from the both sides of the feed trough
Under melten glass, make its lower end merge and form sheet glass.
The liquid phase viscosity for constituting the glass composition of the melten glass is more than 80000dPas and 100000dPas
Below.
In the forming step,
By the viscosity of melten glass for the melten glass of more than 25000dPas and below 35000dPas is supplied to institute
State feed trough,
Using a pair of guiding elements, the width of the melten glass is simultaneously limited, simultaneously make the melten glass along the wall
Flow down, the guiding element reaches the lower end with from the upper surface of the formed body, in the both sides of the width of the wall
The mode that end protrudes from the end is formed to each other,
Compare the melting glass that the inboard portion between the end of the both sides of width described in the wall flows down
Glass, increasing is supplied to the heating amount of the melten glass flowed down along the end, thus with the viscous of the melten glass of the lower end
Degree turns into more than 40000dPas and the mode up to 80000dPas is not heated.
In the forming step, the temperature of the melten glass preferably to be flowed down along the end, from the shaping
Untill the upper surface of body reaches the lower end, than the mode that the liquidus temperature is higher by 10 DEG C~150 DEG C, led along described
The melten glass that part heating is flowed down along the end.
In the forming step, preferably using be arranged on the pair of guiding element and the wall to position
Heater, uniform mode is become with the temperature of the melten glass along the width of the wall, is heated along institute
State the melten glass under wall flow.
The lower end of preferably described formed body is the linear crest line that the pair of wall is connected to each other,
In the formed body, height of the guiding element away from the wall is more to become lower by the lower end, and described
The position of crest line is zero.
Another form of the invention is a kind of manufacture device of glass substrate, is shaped using overflow downdraw using formed body
Sheet glass.
The formed body of the manufacture device possesses：
Feed trough, supplies melten glass；
Upper surface, forms the feed trough；
A pair of walls, the melten glass that guiding is overflowed from the both sides of the feed trough and flowed down from the upper surface, make it
Merged in lower end and form sheet glass；And
A pair of guiding elements, with reaching the lower end from the upper surface of the formed body, in the width of the wall
Both sides the wall end, from the end protrude mode, mutually to being formed to ground, simultaneously limit the melten glass
Width, simultaneously makes the melten glass along under the wall flow.
The feed trough is configured to, wherein being more than 80000dPas and below 100000dPas by liquid phase viscosity
Glass composition constitute melten glass, with the viscosity of the melten glass as 25000dPas more than and 35000dPas with
Under state flowing.
Additionally, the manufacture device possesses heater, the heater is compared along width side described in the wall
To both side ends between the melten glass that flows down of inboard portion, increasing is supplied to the melten glass that is flowed down along the end
Heating amount, thus turns into more than 40000dPas and not up to the side of 80000dPas with the viscosity of the melten glass of the lower end
Formula is heated.
[The effect of invention]
The manufacture method of the glass substrate according to the form and the manufacture device of glass substrate, suppress shaped glass
The effect of the end devitrification of glass piece is higher, even if the liquid phase viscosity for constituting the glass composition of melten glass is smaller, can also obtain
Suppress the effect of the end devitrification.
Brief description of the drawings
Fig. 1 is the figure of the flow of of the manufacture method for representing present embodiment.
Fig. 2 is the skeleton diagram of of the manufacture device of the glass substrate of present embodiment.
Fig. 3 is the schematic diagram of of the formed body that can be used in the manufacture method for represent present embodiment.
Fig. 4 is the schematic diagram of of the manufacture method for representing the present embodiment using the device shown in Fig. 3.
Fig. 5 is represented in the manufacture method of present embodiment, and the part near the guiding element in melten glass is added
The schematic diagram of of the heater of heat.
Specific embodiment
Hereinafter, the manufacture method to glass substrate of the invention is illustrated.
(the overall summary of the manufacture method of glass substrate)
The figure of of the step of Fig. 1 is the manufacture method of the glass substrate for representing present embodiment.The system of glass substrate
Making method mainly has melting step (ST1), clarification steps (ST2), homogenization step (ST3), supplying step (ST4), shaping
Step (ST5), slow cooling step (ST6) and cut-out step (ST7).Alternatively, it is also possible to grinding step, grinding steps, clean
Step, checking step, bale packing step etc..Manufactured glass substrate as needed pack step in lamination, be transported to
The dealer of the side of buying.
In step (ST1) is melted, melten glass is made by the way that frit is heated.
In clarification steps (ST2), heated up by making melten glass, produced comprising oxygen, CO contained in melten glass2Or
Person SO2Bubble.The reduction reaction of fining agent (tin oxide etc.) of the bubble absorption by being included in melten glass and the oxygen that produces
After grow up, float up to the liquid level of melten glass and discharge.Then, in clarification steps, reduced by making the temperature of melten glass,
The reducing substances obtained by the reduction reaction of fining agent carries out oxidation reaction.Thus, in remaining in the bubble of melten glass
The gas componants such as oxygen are resorbed into melten glass, bubble collapse.The oxidation reaction and reduction reaction of fining agent are by control
The temperature of melten glass processed and carry out.
Additionally, clarification steps can also use vacuum deaerator mode, make bubble present in melten glass in reduced pressure atmosphere
Grow up and deaeration under gas.Vacuum deaerator mode is effective because not using fining agent.However, vacuum deaerator mode has device complicated
The problem changed and maximize.It is therefore preferable that using using fining agent make melten glass temperature rise defecation method.
In homogenization step (ST3), melten glass is stirred by using agitator, and carry out the homogeneous of glass ingredient
Change.Composition thereby, it is possible to reduce glass the reason for as arteries and veins reason etc. is uneven.Homogenization step is entered in following tank diameters
OK.
In supplying step (ST4), agitated melten glass is supplied to building mortion.
Forming step (ST5) and slow cooling step (ST6) are carried out in building mortion.
In forming step (ST5), sheet glass is moltened glass into, and make sheet glass liquid stream (flow).Shaping
When use overflow downdraw.
In slow cooling step (ST6), by the sheet glass flowed after shaping with as desired thickness, do not produce it is internal should
The mode of change, and do not produce the mode of warpage to be cooled down.
In cut-out step (ST7), the sheet glass after by slow cooling is cut to specific length, obtains the glass of tabular
Substrate.Through cut off glass substrate so that be cut to specific dimensions, make target size glass substrate.
Fig. 2 is the manufacture dress of the glass substrate for carrying out melting step (ST1)~cut-out step (ST8) in present embodiment
The skeleton diagram put.As shown in Fig. 2 the manufacture device of glass substrate mainly has fusing device 100, building mortion 200 and cut-out
Device 300.Fusing device 100 has melting groove 101, finer 120, tank diameter 103, transfer tube 104,105 and glass supply
Pipe 106.
The heating arrangements such as burner (not shown) are set in the melting groove 101 shown in Fig. 2.Add to being put into melting groove
Add the frit of fining agent, carry out melting step (ST1).The melten glass MG melted in groove 101 is melted is via transfer
Pipe 104 and supply to finer 102.
In finer 120, the temperature of adjustment melten glass MG carries out melting glass using the redox reaction of fining agent
The clarification steps (ST2) of glass MG.Specifically, heated up by making the melten glass MG in finer 102, be included in melten glass
In MG containing aerobic, CO2Or SO2Bubble, grow up after the oxygen that is produced by the reduction reaction of fining agent of absorption, float up to molten
Discharged after the liquid level for melting glass MG to gas-phase space.Then, reduced by making the temperature of melten glass MG, by the reduction of fining agent
The obtained reducing substances of reaction carries out oxidation reaction.Thus, remain in the gases such as oxygen in the bubble in melten glass MG into
Divide and be resorbed into melten glass MG, bubble collapse.Melten glass MG after clarification is supplied to stirring via transfer tube 105
Groove 103.
In tank diameter 103, stir melten glass MG using stirring rod 103a and carry out homogenization step (ST3).Stirring
The melten glass MG being homogenised in groove 103 is mixed to be supplied to (the supplying step of building mortion 200 via glass supply pipe 106
ST4)。
In building mortion 200, using overflow downdraw, from melten glass MG formed glass sheets SG (forming step ST5),
And carry out slow cooling (slow cooling step ST6).
In shearing device 300, the glass substrate (cut-out step ST7) of the tabular that formation cuts out from sheet glass SG.
(composition of formed body)
Then, reference picture 3, Fig. 4, the composition of the formed body 1 possessed to building mortion 200 is illustrated.Fig. 3 represents this
One of the formed body 1 that can be used in the manufacture method of implementation method, Fig. 4 represents this reality using the formed body 1 shown in Fig. 3
Apply the manufacture method of mode one.Formed body 1 forms specific section, is the elongate in shape for extending in one direction.This theory
In bright book, the direction extended along the side long of formed body 1 is referred to as width.Formed body 1 possesses：Upper surface 3, forms and supplies
To the feed trough 2 of melten glass；A pair of walls 5, guiding is from after the both sides spilling of feed trough 2 from both ends 3a, 3b of upper surface 3
The melten glass for flowing down, makes it be merged in the lower end 4 of formed body 1 and form sheet glass SG and (wall is illustrate only in Fig. 3,4
Face)；And a pair of guiding elements 6a, 6b, it is formed in end 5a, 5b of the both sides of the width of wall 5.Guiding element 6a, 6b respectively with from
The wall 5 of end 5a, 5b is protruded, and guiding element 6a, 6b are formed to each other.Melten glass from the spilling of feed trough 2 is along a pair
Wall 5 is flowed down respectively.Wall 5 has：Vertical walls, the melten glass overflowed from feed trough 2 is flowed down to vertical；And incline
Wall, the melten glass that will be flowed down along vertical walls is oriented to the lower end 4 of formed body 1, and is connected with vertical walls.Along wall
A pair of liquid streams of 5 melten glass for flowing down collaborate in the lower end 4 of formed body 1, merge into each other.Now, using guiding element 6a, 6b, limit
The width of the melten glass that system is flowed down along wall 5, for example, be formed continuously the thickness evenness of width sheet glass higher
SG.The lower end 4 of formed body 1 is formed a pair of linear crest lines that (inclined wall is each other) connects each other of wall 5.Fig. 3,4
Shown symbol 2a is the bottom surface 2a of feed trough 2, and the symbol 7 shown in Fig. 3 is the liquid level 7 of the melten glass of supply to feed trough 2.
As shown in figure 3, the vicinity of each in guiding element 6a, 6b, prolongs with from the side of upper surface 3 of formed body 1 towards the side of lower end 4
The mode stretched configures heater 8, and the side not represented comprising the Fig. 3 in formed body 1 is (shown in the side and Fig. 3
Side also configures heater 8 in the same manner), near guiding element 6a, the 6b in the melten glass MG that a pair of walls 5 are flowed down
Heated partly and by the heater 8 along the melten glass MG that wall 5 is flowed down.The heating is as follows along guiding element
6a, 6b are carried out, i.e. along the viscosity of the part near guiding element 6a, the 6b in the melten glass MG that wall 5 is flowed down from formed body 1
Upper surface 3 reach lower end 4 untill (untill the part of melten glass is run down into up to lower end 4 from the upper surface 3 of formed body 1),
Not up to the liquid phase viscosity (below, also referred to as " liquid phase viscosity ") of the glass composition for constituting melten glass MG.
The sheet glass SG carried out using the overflow downdraw using the formed body 1 for possessing guiding element 6a, 6b shaping (and
The manufacture of the glass substrate obtained after sheet glass SG is cooled down) in, easily near guiding element 6a, 6b, that is to say, that shaping
The end (the symbol 50a shown in Fig. 3) of sheet glass SG produces devitrification.Think the situation be due to：House the forming furnace of formed body 1
In order to make melten glass MG become suitable for the viscosity of shaping in the lower end of formed body 1, it is typically set at and not only take into account sheet glass SG
Shaping and take into account melten glass MG cooling temperature, i.e., temperature lower than melten glass MG, so guiding element 6a, 6b can capture
Heat so that the temperature of the melten glass MG near guiding element 6a, 6b is easily lower than the temperature of the other parts in melten glass MG；And
Because this kind of temperature reduces and contact the physical resistance that guiding element 6a, 6b cause, the melten glass MG's near guiding element 6a, 6b flows down
Speed is easily lower than other parts in melten glass MG, when needing long to formed body 1 is left from contact guiding element 6a, 6b
Between；Produced etc. reason.
According to the technology of patent document 2 (Japanese Patent Laid-Open 2010-215428 publications), existing can suppress in guiding element
Lower end produces the possibility of devitrification.However, in the technology of patent document 2, it is difficult to suppress by the upstream in the lower end than guiding element
Region, the devitrification produced by initial stage for especially being begun to cool down after melten glass is contacted with guiding element, and cannot be using under guiding element
The heating at end eliminates the devitrification for once producing.In addition, using the alkali-free glass for being adapted to use the glass substrate of FPD, micro
The liquidus temperature of the glass containing alkali etc. is higher, the less glass composition of liquid phase viscosity, the manufacturer of such as present embodiment
Liquid phase viscosity used in method for more than 80000dPas and below 100000dPas, liquidus temperature be 1200 DEG C~
The glass composition of 1220 DEG C of scope, during formed glass sheet, this kind of devitrification is particularly easy to produce.
In the manufacture method of present embodiment, with the guiding element in the melten glass that the wall 5 along formed body 1 is flowed down
The viscosity of the part near 6a, 6b, untill reaching lower end 4 from the upper surface 3 of formed body 1, keeps the mode not up to liquid phase viscosity
(in the way of turning into more than liquidus temperature so that the temperature of the part reaches lower end 4 from the upper surface 3 of formed body 1), along leading
The part in part 6a, 6b heating melten glass.Thus, the part (melting near guiding element 6a, 6b for suppressing melten glass is obtained
The both ends of the width of glass MG) devitrification higher efficacy, even if with the glass combination for constituting melten glass MG
Thing is the less liquid phase viscosity of more than 80000dPas and below 100000dPas, and with 1200 DEG C~1220 DEG C
In the case of the liquidus temperature of scope, the devitrification that can also suppress the end is produced.
In this manual, so-called liquidus temperature, refers to the equilibrium temperature between molten mass and the first phase of crystallization, if should
More than temperature then in the absence of crystallization, so-called liquid phase viscosity refers to viscosity of the glass as the liquidus temperature.
In the manufacture method of present embodiment, the liquid phase viscosity that glass composition is flowed in building mortion 200 is
The melten glass MG of more than 80000dPas and below 100000dPas.In this case, it is configured to be supplied with via glass
The viscosity that melten glass MG is supplied to melten glass when building mortion 200 (feed trough 2 of formed body 1) is by pipe 106
More than 20000dPas and up to the mode of 40000dPas, the temperature of manufacture device control melten glass MG, additionally, constituting
It is the temperature of manufacture device control melten glass MG in the way of viscosity becomes more than 25000dPas and below 35000dPas
Degree.If making supply to the viscosity of the melten glass of the feed trough 2 of formed body 1, that is to say, that make the temperature of melten glass MG
Degree is uprised, then also produce following problem：The creep of formed body 1 becomes obvious, since shaping start over time by and
The central portion of sheet glass SG is sagging etc..On the other hand, if making supply gluing to the melten glass MG of the feed trough 2 of formed body 1
Degree is uprised, that is to say, that make the temperature step-down of melten glass MG, then devitrification is easily produced in forming step.Therefore, it is necessary to
It is possible to prevent devitrification generation and the melten glass MG of the creep that can suppress formed body 1 is supplied to formed body 1.Constituting
In the case that the liquid phase viscosity of the glass composition of melten glass MG is more than 80000dPas and below 100000dPas,
In order to the lower end of the viscosity highest formed body 1 in the melten glass MG shaped by formed body 1 prevents devitrification, so that melten glass
The viscosity of MG does not control the viscosity of melten glass up to the mode of 80000dPas.In order to suppress the creep of formed body 1, make
Supply to the viscosity of the melten glass MG of the feed trough 2 of formed body 1 and uprise, and the gluing melten glass in the lower end of formed body 1
Degree is not supplied to the feed trough 2 of formed body 1 up to the melten glass of 80000dPas.In the manufacture method of present embodiment, supply
Viscosity to the melten glass MG of the feed trough 2 to formed body 1 is that lower limit is 20000dPas to 25000dPas, and the upper limit is
35000dPas to 40000dPas.
In the manufacture method of present embodiment, in the melten glass for preferably being flowed down with the wall 5 along formed body 1
The temperature of the part near guiding element 6a, 6b, untill reaching lower end 4 from the upper surface 3 of formed body 1, temperature is higher by than liquidus temperature
More than 10 DEG C of mode heats the part, is more preferably heated in the way of the temperature that temperature is higher by more than 15 DEG C than liquidus temperature
The part.In these cases, the devitrification for more reliably suppressing the end of the sheet glass of shaping is produced.Specific liquidus temperature root
It is different according to the composition of glass composition.
In the manufacture method of present embodiment, in forming step, preferably flowed down with the wall 5 along formed body 1
Melten glass in guiding element 6a, 6b near part (along the melten glass MG that end flows down) temperature, from formed body 1
Untill upper surface 3 reaches lower end 4, the mode for being higher by 10 DEG C~150 DEG C than liquidus temperature than liquidus temperature (with as being higher by 10 DEG C
More than, the mode below 150 DEG C of temperature is increased on liquidus temperature), heat the part along guiding element 6a, 6b.Thus, energy
Enough suppress the contraction of the width in the sheet glass SG after the deformation and shaping of formed body 1.More preferably with along formed body 1
The melten glass MG that flows down of wall 5 in guiding element 6a, 6b near part temperature, under being reached from the upper surface 3 of formed body 1
Untill end 4, than the mode that liquidus temperature is higher by 15 DEG C~100 DEG C, the part is heated along guiding element.
Coordinate melten glass from formed body 1 leave after end chilling (chilling of sheet glass SG ends), more reliably
The devitrification for suppressing the end is produced.
According to the manufacture method of present embodiment, and the melting on the direction that flows down along the wall 5 of formed body 1 of non-heated
The part near guiding element 6a, 6b in glass MG, but be from the arrival lower end 4 of upper surface 3 of formed body 1 with the temperature of the part
Only, mode more sufficiently high than liquidus temperature, the melten glass MG that will be flowed down along formed body 1 overall temperature is set to than liquid phase temperature
Degree sufficiently high temperature, in theory for thus can also suppress devitrification.However, in the situation of manufacture liquidus temperature glass higher
Under, actually this kind of method cannot be applied to overflow downdraw.Reason is the presence of the glass to being carried out by overflow downdraw
The viscosity of the appropriate melten glass of shaping of piece is not (in order to produce the width of the lax or sheet glass of sheet glass as described below
The problem of contraction, the viscosity of the melten glass of the lower end of formed body 1 is preferably more than 40000dPas, more preferably
More than 70000dPas).If with the temperature of the part near the guiding element in melten glass side more sufficiently high than liquidus temperature
Formula, the overall temperature of the melten glass that will be flowed down along formed body 1 is set to than liquidus temperature sufficiently high temperature, or if
Exceedingly heated the lower end of formed body 1, then the viscosity that there is the melten glass MG of the lower end of formed body 1 turns into less than institute
State the possibility of appropriate scope.Then, following problem is produced：The viscosity for leaving the sheet glass SG after formed body 1 cannot fill
Point rise, sheet glass fallen with configuring the speed more than the draw speed of the carrying roller in the downstream of formed body 1 and in the roller
Upper glass plate SG relax, or sheet glass SG shrinkage in width.In addition, also producing following problem：The temperature of formed body 1 is higher, then
The creep of formed body 1 is more obvious, since process over time shaping the problems such as the sagging central portion of sheet glass SG.
In contrast, further contemplate increase slow cooling step in carrying roller to the method for the draw speed of sheet glass SG, but if
The temperature control of the sheet glass SG implemented in the slow cooling step after being considered as the desired thickness of glass substrate and shaping, that
The increase of the draw speed of carrying roller exist the limit (if it is considered that the temperature control of the sheet glass implemented in slow cooling step,
The conveyance speed of so sheet glass is preferably 50~500m/ hours, preferably 100~400m/ hours, preferably 120~300m/
Hour).So, the width of the sheet glass of shaping easily shrinks, it is impossible to ensure as the product width of glass substrate.In addition, such as
Fruit creep becomes obvious, then the uniformity of the thickness of slab of manufactured glass substrate can be reduced.
In the manufacture method of present embodiment, not make the melten glass MG entirety flowed down along the wall 5 of formed body 1
Temperature all uniformly rise in the flow direction of melten glass MG and width, make guiding element 6a, the 6b in melten glass MG
The temperature of neighbouring part is set to more than liquidus temperature.By the guiding element that will be particularly easy to produce in the melten glass MG of devitrification
The temperature of the part near 6a, 6b is set to more than liquidus temperature untill reaching lower end 4 from the upper surface 3 of formed body 1, that is to say, that
The local heating of the width of melten glass MG by being flowed down to the wall 5 along formed body 1, can suppress melten glass
MG entirety and the overall overheat of formed body 1, and make the part viscosity reach lower end 4 from the upper surface 3 of formed body 1 untill do not reach liquid
Phase viscosity, can suppress to produce the end devitrification in sheet glass.
Guiding element 6a, 6b in heating melten glass MG along guiding element 6a, 6b in the manufacture method of present embodiment is attached
As long as the method for near part can keep the viscosity of the part not reach liquid phase untill reaching lower end 4 from the upper surface 3 of formed body 1
Viscosity, then do not limit.
As shown in figure 4, one of heating means is to be heated to guiding element 6b, the heating from guiding element 6a using heater 8
Device 8 is configured in the way of extending to the side of lower end 4 from the side of upper surface 3 of formed body 1.According to the method, can from guiding element 6a to
Guiding element 6b, carries out the control of the heating of the melten glass MG flowed down along wall 5 relative ease.Heater 8 be arranged on
A pair of guiding elements 6a, 6b and wall 5 pairs to position, and so that the temperature of melten glass MG is uniform along the width of wall 5
Mode heat the melten glass MG flowed down along wall 5.By so that melten glass MG temperature along wall 5 width side
Melten glass MG is heated to uniform mode, the uniformity of the thickness of slab of sheet glass formed thereby can be realized.
In the manufacture method of present embodiment, the viscosity along the melten glass MG flowed down near guiding element 6a, 6b is easy
Uprise, near guiding element 6a, 6b of the lower end 4 of formed body 1, the viscosity of melten glass MG easily becomes highest.Therefore, with edge
The melten glass that is flowed down near guiding element 6a, 6b to region 8a temperature, than between guiding element 6a and guiding element 6b along
The melten glass that wall 5 is flowed down to region 8b temperature mode high, the heater 8 of setting heating melten glass MG
Design temperature.That is, compare along region 8b substantially to wall 5 part (between the end of width both sides
Inboard portion) the melten glass MG that flows down, increasing be supplied to along with region 8a substantially to guiding element 6a, 6b near wall
The heating amount of the melten glass MG that the part (end of wall 5) in face 5 flows down.So, by making the region 8b's of heater 8
Design temperature is higher than the design temperature of the region 8a of heater 8, with the viscosity of the melten glass MG in the lower end 4 of formed body 1
The mode for not reaching as more than 40000dPas and 80000dPas is heated.By this kind of heating, flowed down along wall 5
Melten glass MG in guiding element 6a, 6b near part viscosity, untill reaching lower end 4 from the upper surface 3 of formed body 1, not
Up to the liquid phase viscosity of the glass composition for constituting melten glass MG, so as to devitrification can be prevented.The width of the region 8b of heater 8
The position for spending direction be with guiding element 6a, 6b substantially to position, the position of the width of the region 8a of heater 8 be with
The middle body of the width of the wall 5 of formed body 1 substantially to position.
As long as heater 8 can be in the way of the viscosity of the melten glass MG in the part reach liquid phase viscosity, also
It is to say heat melten glass MG in the way of the temperature of the melten glass in the part exceedes liquidus temperature, then does not limit.Plus
Thermal 8 is, for example, heater.
As long as can be used under the temperature environment gas of glass sheet forming stove, and can enter by using the heater
The heating of row melten glass MG, makes the viscosity of the part near guiding element 6a, the 6b in melten glass MG not reach liquid phase viscosity, then add
The species of hot device is not limited.Heater 8 is also molten comprising utilization laser or electromagnetic wave heating in addition to comprising heater
Melt the device of glass MG.
As long as matching somebody with somebody with along the vicinity of guiding element 6a, 6b in formed body 1 and along the mode of wall 5 that width extends
Put, can keep making the viscosity of the part near guiding element 6a, the 6b in the melten glass MG under the wall flow along formed body 1 from
The upper surface 3 of formed body 1 does not reach liquid phase viscosity untill reaching lower end 4, then the state of the configuration of heater 8 is not limited.Such as
Shown in Fig. 3, heater 8 is preferably can heat respectively has at 4, portion near guiding element 6a, 6b on 1 formed body 1
The mode divided is configured.
In the example shown in Fig. 4, heater is as heater 8 in the way of extending along wall 5 throughout width
Configuration is overall between guiding element 6a, 6b.Heater 8 be shaped as extending to guiding element 6b from guiding element 6a untill along width
The linearly shape for extending.As long as the shape of heater 8 extends to guiding element 6b from guiding element 6a along width on the whole
Untill (as long as on the whole along guiding element 6a, 6b and along formed body 1 width extend wall 5 shape), then
Can and non-linear shape.
For example, as shown in figure 4, the vicinity of heater 8 or guiding element 6b in formed body 1, with along from shaping
The heater that the mode that the direction that the lateral side of lower end 4 in upper surface 3 of device 1 extends extends is configured.
Position relationship on guiding element 6a, 6b and heater, heater 8 for example both can be as shown in Fig. 2 configuration have been led
The vicinity of the melten glass side (comparing guiding element 6a, 6b more by side between guiding element 6a, 6b) of part 6a, 6b, also can as shown in figure 5,
Configure in the vicinity with melten glass opposition side (comparing guiding element 6a, 6b more by the outside of width) of guiding element 6a, 6b.Preceding
In the case of person, heater 8 can be utilized directly to heat the part near guiding element 6a, 6b in melten glass MG.Rear
In the case of person, position also according to the specific configuration of heater 8 and the material of guiding element 6a, 6b is constituted and different, also can
Enough guiding element 6a, 6b is generated heat using heater 8, heated using guiding element 6a, 6b for having generated heat in melten glass MG should
Part near guiding element 6a, 6b.From for the viewpoint of the efficiency of heating, preferably melting is directly heated using heater 8
The part near guiding element 6a, 6b in glass MG.
As long as the portion near guiding element 6a, the 6b in the melten glass MG flowed down along the wall 5 of formed body 1 can be kept making
Point viscosity reach lower end 4 from the upper surface 3 of formed body 1 untill do not reach liquid phase viscosity, then by carry out specific of heater 8 plus
Thermal control is free to setting.For example, may be either continuity or intermittence by the heating that heater 8 is carried out.Matching somebody with somebody
In the case of having put multiple heaters 8, the heating of each heater 8 also can be independently controlled.Also can be to 1 heater 8
The multiple heating zones of setting, independently control the heating of each heating zone.
Preferably in formed body 1, lower end 4 more by formed body 1 of the height of guiding element 6a, 6b away from wall 5, i.e. more on the lower
Position becomes lower.The lower end 4 of formed body 1 is the linear crest line that the inclined wall 5 of both sides is connected to each other, and is led for a pair
Height in the inclined wall 5 of part 6a, 6b is preferably 0 (zero) in the position of the crest line.Thereby, it is possible to further suppress glass
Two strands of end (ear) the shape ground of piece SG is opened, and more stably continuously produces glass substrate.
It is higher in the liquidus temperature of the glass composition for constituting melten glass MG according to the manufacture method of present embodiment,
And in the case of liquid phase viscosity is less, for example, in the situation that glass composition is alkali-free glass, the micro glass containing alkali etc.
Under, can also obtain the effect of the end devitrification of the sheet glass SG for suppressing formed thereby.That is, constituting the glass of melten glass MG
In the case of the liquidus temperature of glass composition is higher, and liquid phase viscosity is less, by the manufacture method of present embodiment bring it is excellent
Point is larger.
In the manufacture method of present embodiment, the liquid phase viscosity for constituting the glass composition of melten glass MG is
Below 10000dPas.In this kind of glass composition, in the past, in the shaping of the sheet glass carried out by overflow downdraw
Easily produce the problem of end devitrification.However, in the manufacture method of present embodiment, obtaining the effect for suppressing devitrification.
The liquid phase viscosity of the melten glass MG used in the manufacture method of present embodiment is below 100000dPas.
The problem of devitrification becomes more apparent upon described in glass composition of the liquid phase viscosity for below 100000dPas, but in this implementation
The effect for suppressing devitrification is obtained in the manufacture method of mode.From the sheet glass that can stably implement to be carried out by overflow downdraw
Shaping viewpoint for, liquid phase viscosity is preferably more than 80000dPas.
In the manufacture method of present embodiment, the liquidus temperature for constituting the glass composition of melten glass MG is 1200 DEG C
Above and less than 1220 DEG C.In this kind of glass composition, in the past, hold in the shaping of the sheet glass carried out by overflow downdraw
It is also easy to produce the problem of end devitrification.However, in the manufacture method of present embodiment, obtaining the effect for suppressing devitrification.
In the manufacture method of present embodiment, melten glass MG can also contain zirconium oxide and/or tin oxide.Containing aerobic
Change in the melten glass MG of zirconium, the liquidus temperature of glass composition rises compared with the situation for not containing zirconium oxide.This kind of molten
Melt in glass MG, in the past, the problem of end devitrification is easily produced in the shaping of the sheet glass SG carried out by overflow downdraw.
However, in the manufacture method of present embodiment, obtaining the effect for suppressing devitrification.Zirconium oxide is former as the composition of glass composition
Originally it is included in melten glass MG, in addition to this situation, can also be because using the melting constituted using high zirconia system refractory body
Groove and building mortion and dissolution are to melten glass MG.Especially, in the case where this kind of melting groove is used by frit electric smelting solution,
There is the tendency that the zirconium oxide concentration in melten glass MG is uprised.That is, the manufacture method of present embodiment makes in utilization
The melting groove constituted with high zirconia system refractory body will be more suitable in the case of frit electric smelting solution.
Additionally, resistance to conventional widely used use aluminum oxide electroforming using the melting groove that high zirconia system refractory body is constituted
The melting groove that fiery thing is constituted is compared, and is difficult etching glass, used as lasting a long time for melting groove.In addition, it is also possible to suppress melting glass
The foaming of glass MG.Therefore, (viscosity of glass composition is 10 to be suitable for melt temperature2.5The temperature of pool) glass combination higher
Thing, such as formation of the melten glass of alkali-free glass and the micro glass containing alkali.
In addition, the situation that the melten glass formed in groove is melted is made up of alkali-free glass or the micro glass containing alkali
Under, there is following tendency：The ratio resistance of glass composition is easily uprised, frit no power, but high zirconia refractory body
It is powered.If the refractory body is powered, then will dissolution zirconium oxide in the melten glass MG formed in melting groove.Namely
Say, the manufacture method of present embodiment is forming alkali-free using the melting groove constituted using high zirconia system refractory body by electric smelting solution
It is more suitable in the case of the melten glass MG of glass or the micro glass containing alkali.
In the FPD glass substrates such as liquid crystal display, organic el display, preferably by alkali-free glass or it is micro containing
The glass substrate that the glass of alkali is constituted.Its reason is, if from glass substrate dissolution alkali composition in panel manufacturing step, that
There is the danger of the deterioration in characteristics of electronic component such as thin film transistor (TFT) (TFT).That is, the manufacture method of present embodiment
, by frit electric smelting solution, obtained melten glass profit is used using the melting groove constituted using high zirconia system refractory body
It is particularly suitable in the case of manufacturing FPD glass substrates with overflow downdraw.Additionally, so-called alkali-free glass, refers to substantially not
Glass composition containing alkali metal oxide (not up to 0.05 mass % in terms of containing ratio).The so-called micro glass containing alkali,
It refer to the glass composition of the alkali metal oxide containing 0.05~2.0 mass %.
In the melten glass MG containing tin oxide, devitrification is easily produced due to the crystallization of tin oxide.In addition, with oxygen
In the case that change zirconium coexists, tin oxide has makes the effect of zirconium oxide crystallization.In this kind of melten glass MG, in the past, by overflowing
It is particularly easy to produce the problem of end devitrification in the shaping for flowing down the sheet glass SG that daraf(reciprocal of farad) is carried out.However, in present embodiment
In manufacture method, the effect for suppressing devitrification is obtained.
In the manufacture method of present embodiment, the glass composition for constituting melten glass MG is alternatively alkali-free glass or micro-
Glass of the amount containing alkali.Compared with the alkali glass containing alkali metal oxide more than 2.0 mass %, exist this kind of alkali-free glass or
The liquidus temperature of the micro glass containing alkali is higher, the less tendency of liquid phase viscosity, is obtained in the manufacture method of present embodiment
The effect of devitrification must be suppressed.The effect is forming alkali-free using the melting groove constituted using high zirconia system refractory body by electric smelting solution
Become particularly apparent situation in the case of the melten glass of glass or the micro glass containing alkali as described above.
Additionally, from for the viewpoint of deterioration in characteristics for preventing the electronic components such as TFT, FPD glass substrates are preferably alkali-free
Glass.But, from for meltability and clarification viewpoint, FPD glass substrates are preferably the micro glass containing alkali.If making
Alkali metal oxide it is micro containing and form the micro glass containing alkali, the meltability of glass composition and clarification can improve.
For clarification, there is alkali metal oxide, contribute to glass basicity to rise, the metal that valence mumber changes easily is aoxidized.
In addition, forming melten glass MG's by the electric smelting solution of frit in the melting groove constituted using high zirconia system refractory body
In the case of, the ratio resistance of glass is diminished compared with alkali-free glass, zirconium oxide can be suppressed to melten glass dissolution, suppression
The increased devitrification resistance of melten glass processed rises.
In the manufacture method of present embodiment, the glass composition on constituting melten glass MG represents 102.5Pool
The temperature (melt temperature) of viscosity is alternatively 1500 DEG C~1750 DEG C.Because this kind of glass composition needs high temperature in melting,
So in the case where melten glass MG is formed using the melting groove constituted using high zirconia system refractory body, zirconium oxide is easily molten
Go out.For this kind of glass composition, the effect for suppressing devitrification can be also obtained in the manufacture method of present embodiment.
As the glass ingredient contained by the glass substrate that the manufacture method using present embodiment is manufactured, for example, enumerate
SiO2、Al2O3、B2O3、MgO、CaO、SrO、BaO、Li2O、Na2O、K2O、ZrO2、TiO2, ZnO and P2O5。
SiO2It is the framework ingredient of glass, therefore is essential component.If content tails off, there is strain point to decline, thermal expansion system
The increased tendency of number.If additionally, SiO2Content is excessively few, is just difficult to make glass substrate low-density.On the other hand, if SiO2Contain
Amount is excessive, then the ratio resistance for having melten glass MG rises, and melt temperature is significantly uprised and is difficult to the tendency for melting.If SiO2Content
Excessively, also devitrification temperature rises, the tendency that devitrification resistance declines.And, if SiO2Content is excessive, and etch-rate can be slack-off.
From such a viewpoint, SiO2Content be preferably the scope of such as 60~80mol%.SiO2Content be more preferably 64~
The scope of the scope of 73mol% or 65~75mol%, especially preferably 66~72mol%, still more preferably for 67~
The scope of 71mol%.
Al2O3It is the essential component for improving strain point.If Al2O3Content is very few, and strain point can decline.And, if Al2O3Contain
Amount is very few, then have the tendency of Young's modulus and acid etching etching speed also declines.On the other hand, if Al2O3Content is excessive, then glass
Devitrification temperature can rise, and devitrification resistance can decline, so there is formability variation.From such a viewpoint, Al2O3's
Content is preferably the scope of 8~20mol%.Al2O3Content be preferably the scope of 10~17mol%, more preferably 10.5~
The scope of the scope of 17mol%, especially preferably 11~15mol%, is still more preferably the scope of 12~15mol%.
B2O3It is the high temperature viscometrics for reducing glass, the composition for improving meltbility.That is, the viscosity near melt temperature can be reduced,
So improving meltability.Additionally, still reducing the composition of devitrification temperature.If B2O3Content is less, then have meltability and devitrification resistance
The tendency of decline.If B2O3Content is excessive, then strain point and Young's modulus can decline.Additionally, B during because of forming of glass2O3Volatilization,
Easily produce devitrification.Especially, strain point glass high has the tendency of forming temperature and uprises, so accelerating the volatilization, has
Devitrification generation becomes significant problem.Additionally, because of B when glass melts2O3Volatilization, the heterogeneity of glass becomes notable, easily produces
Arteries and veins is managed.From such a viewpoint, B2O3Content is preferably the scope of 0~15mol%, the more preferably scope of 0~8mol%,
The more preferably scope of 0~7mol%, the more preferably scope of 0.1~6mol%, are still more preferably 1~5mol%
Scope, the most preferably scope of 1.5~4.5mol%.
MgO is the composition for lifting meltability.Additionally, be still difficult to increase the composition of density in alkaline-earth metal, if so
Relative increase its content, just easily realizes low-density.Containing MgO, the ratio resistance and melt temperature of melten glass MG can be reduced.
But, if the content of MgO is excessive, the devitrification temperature of glass can steeply rise, so easily producing mistake especially in forming step
Thoroughly.From such a viewpoint, content of MgO is the scope of 0~15mol%, preferably the scope of 1~15mol%, more preferably
The scope of the scope of 0~6mol%, more preferably 1~6mol%.Or, content of MgO is preferably the model of 0~15mol%
Enclose, more preferably the scope of 0~6mol%, more preferably the scope of 1~6mol%.
CaO is to lift glass meltability without the active ingredient that steeply rises the devitrification temperature of glass.Additionally, also
It is to be difficult in alkaline-earth metal acidulants to increase the composition of density, if so relative increase its content, easily realizes low-density
Change.If content is very few, the rising and devitrification resistance for having the tendency of the ratio resistance for producing melten glass MG decline.If CaO content
Excessively, then having thermal coefficient of expansion increases, the tendency that density rises.From such a viewpoint, CaO content is 0~20mol%'s
The scope of the scope of scope, preferably 1~15mol%, more preferably 2~11mol%, more preferably 4~9mol%
Scope.
SrO is the composition of the devitrification temperature that can reduce glass.SrO not necessarily, but if it does, then devitrification resistance and molten
Xie Xinghui is lifted.But, if SrO contents are excessive, density can excessively rise.From such a viewpoint, SrO contents be 0~
The scope of the scope of the scope of 15mol%, preferably 0~8mol%, more preferably 0~3mol%, more preferably 0~1mol%
Scope, the more preferably scope of 0~0.5mol%, still more preferably to contain substantially no.
BaO is the essential component of the ratio resistance of the devitrification temperature and melten glass MG that can effectively reduce glass.If containing
BaO, then devitrification resistance and meltability can be lifted.But, if the content of BaO is excessive, density can excessively rise.Additionally, from mitigation
From the viewpoint of environmental pressure, and because have the tendency of thermal coefficient of expansion increase, so BaO contents be 0~15mol% or 0.1~
The scope of the scope of the scope of 15mol%, preferably 1~15mol%, more preferably 1~10mol%, more preferably 1.5
The scope of~6mol%.
Li2O and Na2O is to increase the thermal coefficient of expansion of glass and be likely to result in the composition of substrate damage in heat treatment.
Additionally, still reducing the composition of strain point.On the other hand, due to the ratio resistance of melten glass MG can be reduced, if so containing just
Melting groove can be suppressed to be etched.According to view of the above, Li2The content of O is preferably 0~0.5mol%, more preferably substantially not
Contain.Na2The content of O is preferably 0~0.5mol%, more preferably 0~0.2mol%.In addition, comparing Li2O, Na2O is to be difficult
The composition of strain point is reduced, it is advantageous to Na2O ＞ Li2O.In addition, from preventing the composition from causing TFT from glass substrate dissolution
From the viewpoint of deterioration in characteristics, Li2O and Na2O is preferably and contains substantially no.
K2O is to improve the basicity of glass, promote clarification composition.Additionally, still reducing the ratio electricity of melten glass MG
The composition of resistance.If it does, then the ratio resistance of melten glass MG can be reduced, so can prevent from constituting the refractory body energization for melting groove,
It is etched so as to melting groove can be suppressed.Additionally, when the refractory body for constituting melting groove contains zirconium oxide, melting groove can be suppressed and invaded
Erosion and zirconium oxide from groove dissolution is melted to melten glass MG, so the devitrification of zirconium oxide can also be suppressed to result from.Additionally, can reduce
Glass adhesion near melting temperature, so meltability and clarification lifting.On the other hand, if K2O content is excessive, then have heat swollen
The tendency that swollen coefficient increase and strain point decline.From such a viewpoint, K2O content is preferably the scope of 0~0.8mol%,
The more preferably scope of 0.01~0.5mol%, the more preferably scope of 0.1~0.3mol%.
ZrO2And TiO2It is the composition of the strain point for improving glass.But, if ZrO2Amount and TiO2Amount is excessive, then devitrification temperature
Significantly rise, there is devitrification resistance decline.Especially, ZrO2Fusing point is high and infusibility, so part material heap can be caused
Product is in the problem for melting trench bottom etc.If these compositions not melted are mixed into glass green body, glass can be caused as inclusion
Quality variation.Additionally, TiO2It is to allow the composition of glass coloration, so being not readily used for base plate for displaying.Go out from such viewpoint
Hair, in the glass substrate of present embodiment, ZrO2And TiO2Content be respectively preferably 0~5mol%, more preferably 0~
The scope of 2mol%, more preferably contains substantially no.
ZnO is the composition for lifting meltability.But, it is not necessary to composition.If ZnO content is excessive, there is devitrification temperature to rise,
Strain point declines, the tendency that density rises.From such a viewpoint, ZnO content is preferably the scope of 0~5mol%, more excellent
Elect the scope of 0~2mol% as, more preferably contain substantially no.
P2O5It is the composition for reducing high temperature viscometrics and lifting meltability.But, it is not necessary to composition.If P2O5Content is crossed at most
Strain point can decline.Additionally, because of P when glass melts2O5Volatilization, the heterogeneity of glass becomes notable, easily produces arteries and veins reason.From this
From the viewpoint of sample, P2O5Content is preferably the scope of 0~3mol%, the more preferably scope of 0~1mol%, more preferably 0~
The scope of 0.5mol%, more preferably contains substantially no.
The glass substrate manufactured using the manufacture method of present embodiment for example includes the alkali-free glass containing consisting of.
SiO2：56-65 mass %
Al2O3：15-19 mass %
B2O3：8-13 mass %
MgO：1-3 mass %
CaO：4-7 mass %
SrO：1-4 mass %
BaO：0-2 mass %
Na2O：0-1 mass %
K2O：0-1 mass %
As2O3：0-1 mass %
Sb2O3：0-1 mass %
SnO2：0-1 mass %
Fe2O3：0-1 mass %
ZrO2：0-1 mass %
The glass substrate manufactured in present embodiment is suitable for the display glass comprising glass substrate for plane display device
Glass substrate.It is adapted for use with the oxide semiconductor display glass base of the oxide semiconductors such as IGZO (indium, gallium, zinc, oxygen)
Plate and the LTPS display glass using LTPS (Low Temperature Poly-silicon, low temperature polycrystalline silicon) semiconductor
Substrate.In addition, the glass substrate manufactured in present embodiment is suitable for the few liquid crystal of content of requirement alkali metal oxide
Show device glass substrate.In addition, being also suitable for organic el display glass substrate.In other words, the glass of present embodiment
The manufacture method of substrate is suitable for the manufacture of glass substrate for display, is particularly suitable for the system of liquid crystal display glass substrate
Make.In addition, also being used as the display of mobile terminal device etc. or the cover glass of framework, contact panel, solar cell
Glass substrate, disk glass or cover glass.It is particularly suitable for using the glass for liquid crystal display base of multi-crystal TFT
Plate.
More than, the manufacture device of manufacture method and glass substrate to glass substrate of the invention is said in detail
It is bright, but the present invention is not limited to the implementation method, without departing from the spirit and scope of the invention, naturally it is also possible to carry out
Various improvement or change.
[explanation of symbol]
100 fusing devices
101 melt groove
102 finers
103 tank diameters
103a stirring rod
104th, 105 transfer tube
106 glass supply pipes
120 finers
200 building mortions
300 shearing devices
MG melten glass
SG sheet glass
SGa (sheet glass) end
1 formed body
2 feed troughs
3 upper surfaces
3a, 3b (upper surface) end
4 lower ends
5 walls
6a, 6b guiding element
7 liquid levels
8 heaters (heater)
Claims (5)
1. a kind of manufacture method of glass substrate, it is characterised in that：With forming step, overflow is utilized using formed body wherein
Glass tube down-drawing formed glass sheet, the formed body possesses upper surface and a pair of walls, and the upper surface forms supply melten glass
Feed trough, the melten glass that wall guiding is overflowed from the both sides of the feed trough and flowed down from the upper surface makes it
Merged in lower end and form sheet glass；And
Constitute the melten glass glass composition liquid phase viscosity for more than 80000dPas and 100000dPas with
Under,
In the forming step,
By the viscosity of melten glass be more than 25000dPas and the melten glass of below 35000dPas is supplied to the confession
To groove,
Using a pair of guiding elements, the width of the melten glass is simultaneously limited, under simultaneously making the melten glass along the wall flow,
The guiding element with reaching the lower end from the upper surface of the formed body, at the end of the both sides of the width of the wall
The mode that portion protrudes from the end is formed to each other,
The melten glass that the inboard portion between the end of the both sides of width described in the wall flows down is compared,
Increasing is supplied to the heating amount of the melten glass flowed down along the end, thus with the viscosity of the melten glass of the lower end into
The mode for not reaching for more than 40000dPas and 80000dPas is heated.
2. the manufacture method of glass substrate according to claim 1, it is characterised in that：
In the forming step, the temperature of the melten glass to be flowed down along the end, from the formed body it is described on
Untill surface reaches the lower end, than the mode that the liquidus temperature is higher by 10 DEG C~150 DEG C, along guiding element heating along
The melten glass that the end flows down.
3. the manufacture method of glass substrate according to claim 1 and 2, it is characterised in that：
In the forming step, using be arranged on the pair of guiding element and the wall to position heater,
Uniform mode is become along the width of the wall with the temperature of the melten glass, is heated along under the wall flow
Melten glass.
4. the manufacture method of glass substrate according to any one of claim 1 to 3, it is characterised in that：
The lower end of the formed body is the linear crest line that the pair of wall is connected to each other,
In the formed body, height of the guiding element away from the wall is to become lower closer to the lower end, and in the rib
The position of line is zero.
5. a kind of manufacture device of glass substrate, it is characterised in that：Overflow downdraw formed glass sheet, institute are utilized using formed body
Formed body is stated to possess：
Feed trough, supplies melten glass；
Upper surface, forms the feed trough；
A pair of walls, the melten glass that guiding is overflowed from the both sides of the feed trough and flowed down from the upper surface makes it under
Merge and form sheet glass in end；And
A pair of guiding elements, with reaching the lower end from the upper surface of the formed body, the wall width it is double
The end of the wall of side, from the mode that the end protrudes, mutually to being formed to ground, simultaneously limits the width of the melten glass
Degree, simultaneously makes the melten glass along under the wall flow；And
The feed trough is configured to, wherein by the glass that liquid phase viscosity is more than 80000dPas and below 100000dPas
The melten glass that composition is constituted, with the viscosity of the melten glass as 25000dPas more than and below 35000dPas
State flows,
The manufacture device is also equipped with heater, and the heater compares two along width described in the wall
The melten glass that inboard portion between side end flows down, increasing is supplied to the heating of the melten glass flowed down along the end
Amount, is added in the way of the viscosity of the melten glass of the lower end turns into more than 40000dPas and does not reach 80000dPas
Heat.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-257182 | 2015-12-28 | ||
| JP2015257182 | 2015-12-28 | ||
| JP2016-239135 | 2016-12-09 | ||
| JP2016239135A JP2017119617A (en) | 2015-12-28 | 2016-12-09 | Glass substrate manufacturing method, and glass substrate manufacturing apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN106915895A true CN106915895A (en) | 2017-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611238145.0A Pending CN106915895A (en) | 2015-12-28 | 2016-12-28 | The manufacture method of glass substrate and the manufacture device of glass substrate |
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| Country | Link |
|---|---|
| JP (1) | JP2017119617A (en) |
| KR (1) | KR20170077814A (en) |
| CN (1) | CN106915895A (en) |
| TW (1) | TW201728541A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110944949A (en) * | 2017-09-13 | 2020-03-31 | 日本电气硝子株式会社 | Method for manufacturing glass article |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7488509B2 (en) | 2020-06-18 | 2024-05-22 | 日本電気硝子株式会社 | Glass article manufacturing apparatus and manufacturing method thereof |
| CN113233739B (en) * | 2021-04-30 | 2023-05-16 | 彩虹显示器件股份有限公司 | Substrate glass and manufacturing method |
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| JP5097295B2 (en) * | 2010-12-28 | 2012-12-12 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method of glass substrate for liquid crystal display device |
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- 2016-12-23 KR KR1020160177927A patent/KR20170077814A/en not_active Application Discontinuation
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| CN103140447A (en) * | 2011-07-01 | 2013-06-05 | 安瀚视特控股株式会社 | Method for manufacturing glass sheet |
| JP2013216533A (en) * | 2012-04-06 | 2013-10-24 | Avanstrate Inc | Method and apparatus for manufacturing glass sheet |
| CN103508658A (en) * | 2012-06-28 | 2014-01-15 | 安瀚视特控股株式会社 | Glass plate manufacturing method |
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| CN110944949A (en) * | 2017-09-13 | 2020-03-31 | 日本电气硝子株式会社 | Method for manufacturing glass article |
Also Published As
| Publication number | Publication date |
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| TW201728541A (en) | 2017-08-16 |
| JP2017119617A (en) | 2017-07-06 |
| KR20170077814A (en) | 2017-07-06 |
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