CN106898538A - Mass ion source - Google Patents
Mass ion source Download PDFInfo
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- CN106898538A CN106898538A CN201710210899.3A CN201710210899A CN106898538A CN 106898538 A CN106898538 A CN 106898538A CN 201710210899 A CN201710210899 A CN 201710210899A CN 106898538 A CN106898538 A CN 106898538A
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- Prior art keywords
- discharge cavity
- mass
- ion source
- electrode
- discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Abstract
The present invention relates to a kind of mass ion source, including：Discharge cavity；The outside sealing of discharge cavity, inside sets a unimpeded passage；The electrode of two mutually insulateds and connection discharge cavity；Two power supplies of electrode are connected respectively；Discharge cavity is connected to connect with mass spectrometric entrance the vacuum mechanism of one end.Above-mentioned mass ion source, the test substance for triggering aerosol and gaseous state by high voltage forms plasma, and all testing molecules are instantaneously ionized in the mass ion source, realize efficient Ionization Efficiency.
Description
Technical field
The present invention relates to mass-spectrometric technique field, more particularly to a kind of mass ion source of utilization gas discharge ionization.
Background technology
Mass spectrum is a kind of technology for separating and determining charged particle, is widely used in the qualitative and quantitative analysis of chemical substance, is
World today's sensitivity and resolution highest analysis detection instrument.In mass spectral analysis, material to be analyzed must be ionized first
It is only possible to be separated and determined into mass spectrograph as ion.The device for being used for sample ionization on mass spectrograph is exactly ion gun, by
In compound ions be a kind of chemical reaction process, so ion gun is it is also assumed that be exactly a kind of chemical reactor.
The type of traditional ion gun has chemical ioni zation under electron bombardment, electron spray, normal pressure, low-temperature plasma bombardment etc.
Ion gun, wherein except electron impact ion source is usually used in being combined with gas chromatograph, behind several be all used as liquid chromatogram
Detection, all these ion guns have a common feature, that is, ionizing efficiency is all very low, and about 10-9Hereinafter, that is, every ten
Only one of which or so is ionized and is measured in hundred million molecules, and wherein reason is likely due to all these ionization process and all relates to
And particle encounter (such as electron bombardment, plasma bombardment) or material contact and transfer (such as M+H+→[MH]+), this and it is traditional
Course of reaction is almost completely the same, and each moment only has the partial reaction thing just target as particle bombardment or material special delivery
Son, and the sub-fraction that the reactant for turning into target only overcomes activation energy barrier is only possible to become ion, but, it is to be measured
Holdup time of the thing inside ion gun is extremely short, typically only 1/tens seconds, much too late to reach chemical balance, institute
Have little time to ionize or experience ionization process at all with most sample molecules and just discharged from ion gun.Therefore, matter
Spectrum ionization process is a chemical reaction for dynamics Controlling, and it is to improve the crucial way of Ionization Efficiency to accelerate reaction speed
Footpath.In order to accelerate reaction, it is desirable to allow each sample molecule in an ion source while receiving the work of equal ionization energy
With, the energy needed for the ionization energy for applying is sufficiently more than molecular ionization, that is just hopeful to cause the sample in ion gun
The ionization reaction moment of product molecule reaches chemical balance so that ionization is transformed into balance controlled mistake by dynamic control process
Journey, therefore ionizing efficiency brings up to ultimate attainment, and mass spectral analysis thus reaches capacity sensitivity.Current world wide utilizes plasma
The ion gun for being ionized has had various, and essential characteristic is to produce plasma under action of high voltage using helium or nitrogen
Body, is bombarded as target using determinand with plasma, thus ionizes determinand, and the ion of generation enters back into mass spectrograph
It is measured.The ionization process of this kind of use plasma bombardment determinand targeting falls within as traditional electrospray mode
Dynamic control process, ionizing efficiency is 10-9Below.And, all above-mentioned ionization methods all use a large amount of ionization mediums, that is,
Need to consume helium or nitrogen.
The content of the invention
In order to realize that mass spectrum ionization process moment reaches thermodynamical equilibrium so as to the Ionization Efficiency that reaches capacity, the present invention is adopted
Gas or aerosol is triggered to ionize and to form plasma with highfield, each test substance molecule is subject to same inside plasma
Ionized Deng the effect of energy, the part as plasma, as the voltage or alternative frequency of additional power source are improved, from
Gaseous molecular is completely in plasmoid in component, and based on above-mentioned principle, the present invention provides a kind of raising Ionization Efficiency
Mass ion source.
The mass ion source, including：
Discharge cavity；The outside sealing of discharge cavity, inside sets a unimpeded passage；One end of discharge cavity is provided with for entering
The inlet end of gas, the other end is provided with the output end for connecting mass spectrometric entrance；
The electrode of two mutually insulateds and connection discharge cavity；When 250V~10000V voltages are applied to two electrodes, position
The air-flow in passage inside discharge cavity is ionized and forms plasma；
Two power supplies of electrode are connected respectively；Power supply is used to provide voltage to two electrodes；
Discharge cavity is connected to connect with mass spectrometric entrance the vacuum mechanism of one end；Vacuum mechanism is used in discharge cavity and matter
The entrance of the spectrometer one end that connects produces negative pressure so that discharge cavity continuously sucks gas and determinand and flows to output from inlet end
End, the plasma produced in discharge cavity is drawn towards mass spectrometric entrance, and enters in the case where mass spectrometric collection voltage drives
Mass spectrograph is measured.
Above-mentioned mass ion source, the test substance for triggering aerosol and gaseous state by high voltage forms plasma,
All testing molecules are instantaneously ionized in the mass ion source.Because throughput is small, testing molecule is in the mass ion source
Holdup time accordingly lengthens, and further promotes ionization complete so that the test limit of mass spectral analysis is improved to 10- from common 10-9
15.And, ionic species is M+ or M-, fragment seldom occurs, there is no that multiple-charged ion is produced, and is not also produced [MH]
+ or [M-H]-ion, data parse extremely simple convenience, therefore mass ion source of the invention can realize efficient ionization effect
Rate.Additionally, the present invention also possesses more preferable stability relative to traditional mass ion source, on the one hand due to forming plasma
So that all molecules inside mass ion source are all ionized all the time, in the absence of chance, on the other hand because the mass spectrum from
It is joined directly together inside component and mass spectrograph and is connect, in the absence of environmental disturbances.Furthermore, the present invention also has an outstanding advantages, without appointing
What gas, had not only reduced expenses but also had simplified operation, was also beneficial to stability.
Wherein in one embodiment, the mass ion source also includes being connected to the air intake duct of inlet end；Air intake duct is from entering
Gas end stretches out for drawing testing sample.
Wherein in one embodiment, discharge cavity is a hollow insulation tube；One of electrode seal is encircled in electric discharge
The outside in chamber；Another electrode is longitudinally therethrough in the middle of in discharge cavity and is left and the inwall of discharge cavity between for airflow
Gap.
Wherein in one embodiment, discharge cavity is a hollow metal pipe and constitutes one of electrode；Another
Electrode is that an appearance for being longitudinally therethrough in discharge cavity and being left and the inwall of discharge cavity between the gap for airflow is exhausted
The metal bar of edge.
Wherein in one embodiment, discharge cavity is a hollow insulation tube；Two electrodes are encircled in discharge cavity respectively
Between outside, and two electrodes insulate so that it is proper to two electrode applied voltages when the outside of discharge cavity will not be produced to put
Electricity.
Wherein in one embodiment, the mass ion source also includes a metal for being built in midline position in discharge cavity
Rod, for guiding extra electric field to enter inside discharge cavity so that circulate in gas in discharge cavity can 250V~
Plasma is formed under 2500V voltages and glow discharge is produced.
Wherein in one embodiment, discharge cavity is a hollow insulation tube；One of electrode is placed in for a tip of a root end
The spray point of the central point in discharge cavity；Another electrode is one and is bumped into the metal ring in discharge cavity；Metal ring
The center of circle is Chong Die with the needle point of spray point, and the periphery of metal ring forms equidistant intervals with the needle point of spray point.
Wherein in one embodiment, spray point is a hollow metal tube.
Wherein in one embodiment, discharge cavity is a hollow metal pipe and constitutes one of electrode；In addition
One electrode is a spray point of the 0~5mm of centre point of distance between two tips metal circular tube one end.
Wherein in one embodiment, spray point is a hollow metal tube.
Wherein in one embodiment, vacuum mechanism is a hollow seal for being connected to discharge cavity and mass spectrometric entrance
Joint；Mass spectrograph inner vacuum directly connects discharge cavity with so that discharge cavity sucks gas and treats test sample by hollow seal joint
Product.
Wherein in one embodiment, vacuum mechanism is one and is connected to discharge cavity and wraps up the sky of mass spectrometric entrance
Heart seal cavity；Hollow seal cavity is provided with a vacuum interface for being connected to external vacuum system.
Brief description of the drawings
Fig. 1 is the schematic diagram of the mass ion source of the embodiment of the present invention one；
Fig. 2 is the schematic diagram of the mass ion source of the embodiment of the present invention two；
Fig. 3 is the schematic diagram of the mass ion source of the embodiment of the present invention three；
Fig. 4 is the schematic diagram of the mass ion source of the embodiment of the present invention four；
Fig. 5 is the schematic diagram of the mass ion source of the embodiment of the present invention five；
Fig. 6 is the schematic diagram of the mass ion source of the embodiment of the present invention six；
Fig. 7 is the schematic diagram of the mass ion source of the embodiment of the present invention six；
Fig. 8 is the schematic diagram that the present invention is directly connected to mass spectrograph inner vacuum；
Fig. 9 is the schematic diagram of the additional vacuum mode of mass ion source of the invention.
Specific embodiment
It is specific purposes, the function that can further appreciate that feature of the invention, technological means and reached, parses this hair
Bright advantage and spirit, are further understood with specific embodiment by below in conjunction with accompanying drawing to detailed description of the invention.
A kind of mass ion source, for testing sample to be ionized into ion and mass spectrograph is supplied.The mass ion source bag
Include：Discharge cavity, two electrodes of connection discharge cavity, two power supplies of electrode are connected respectively, discharge cavity and mass spectrum is connected to
The entrance of instrument connect one end vacuum mechanism, be connected to discharge cavity connect with mass spectrometric entrance one end vacuum mechanism and
It is connected to the air intake duct of inlet end.Wherein,
The outside sealing of the discharge cavity, inside sets a unimpeded passage.One end of discharge cavity is provided with for air inlet
Inlet end, the other end is provided with the output end for connecting mass spectrometric entrance.Mutually insulated between two electrodes.When to two electricity
Pole applies high-tension electricity, and (scope of the high-tension electricity is 250V~10000V, and the selection of specific magnitude of voltage has with the type of sample
Close) when, the air-flow in the passage inside discharge cavity is ionized and forms plasma.Power supply is used to provide high-tension electricity
To two electrodes.Vacuum mechanism be used for discharge cavity connect with mass spectrometric entrance one end produce negative pressure so that discharge cavity is continuous
Suck gas and determinand from inlet end and flow to output end, the plasma produced in discharge cavity be drawn towards it is mass spectrometric enter
Mouthful, and be measured into mass spectrograph in the case where mass spectrometric collection voltage drives.Air intake duct from inlet end stretch out with
In absorption testing sample.
Above-mentioned mass ion source, the test substance for triggering aerosol and gaseous state by high voltage forms plasma,
All testing molecules are instantaneously ionized in the mass ion source.Because throughput is small, testing molecule is in the mass ion source
Holdup time accordingly lengthens, and further promotes ionization complete so that the test limit of mass spectral analysis is from common 10-9~10-10Improve
To 10-15.And, ionic species is M+Or M-, seldom there is fragment, there is no that multiple-charged ion is produced, also do not produce
[MH]+Or [M-H]-Ion, data parse extremely simple convenience, therefore mass ion source of the invention can realize efficient ion
Change efficiency.Additionally, the present invention also possesses more preferable stability relative to traditional mass ion source, on the one hand due to formed etc. from
Daughter causes that all molecules inside mass ion source are all ionized all the time, in the absence of chance, on the other hand because the matter
It is joined directly together inside spectrum ion gun and mass spectrograph and is connect, in the absence of environmental disturbances.Furthermore, the present invention also has an outstanding advantages, no
Any gas is used, operation has not only been reduced expenses but also simplified, stability is also beneficial to.
Below, there is provided several specific embodiments based on the design design of above-mentioned mass ion source.
Embodiment one
Referring to accompanying drawing 1, it is the mass ion source of the embodiment of the present invention one.
In the present embodiment, discharge cavity is a hollow insulation tube, and one of electrode seal is encircled in the outer of discharge cavity
Portion, another electrode is longitudinally therethrough in the middle of in discharge cavity and the gap for airflow is left and the inwall of discharge cavity between.
Specifically, the mass ion source is cold plasma discharge ion gun, and it includes that a connection main body 100, connects the company
Connect the discharge tube 105 of the hollow insulation of main body 100, tight be enclosed within the outer of the periphery of discharge tube 105 and be all surrounded discharge tube 105
Electrode 110, enter a metal bar of the bosom of discharge tube 105 as interior electrode 120.The metal bar is in T-shaped, in T-shaped
Head centre have a hole for penetration head (in the present embodiment, the hole is an inclined hole positioned at the centre of T-head,
Gas can be entered into inside discharge tube 105), extraneous gas can be entered inside discharge tube 105 by this hole.When electricity high
Pressure is applied on external electrode 110 and interior electrode 120 by binding post 140a and binding post 140b respectively, the gas in discharge tube 105
Body is breakdown, forms plasma, electric under action of high voltage after sample is inhaled into discharge tube in gas or aerosol state
From produced ion is separated and determined into mass spectrograph immediately.The sample of gaseous state or aerosol state can also with one with
The extension 160 being connected with ionization tube is imported and is ionized in discharge tube, the connection screw head that extension 160 can be commonly used with HPLC
130 and connecting sleeve 150 be closely connected with ionization tube by connecting the screw in main body 100.Wherein, external electrode 110, interior electrode
120th, binding post 140a and binding post 140b are metal quality, and other parts are entirely to be made up of insulating materials.For example, connection
Main body 100 is made up of high-temperature insulation material or metal material, and discharge tube 105 is high-temperature insulation material or metal material system
Into connection screw head 130 is hollow cutting ferrule plastics screw.Connecting sleeve 130 is plastic insulation cutting ferrule and coordinates with screw head 130 is connected
Use, for fastening extension 160, and in the case where there is interior electrode 120, card is played to the T-shaped interior electrode 120
The effect of position.
Embodiment two
Referring to accompanying drawing 2, it is the mass ion source of the embodiment of the present invention two.
In the present embodiment, discharge cavity is a hollow metal pipe and constitutes one of electrode.Another electrode is
A piece gold for the appearance insulation for being longitudinally therethrough in discharge cavity and being left and the inwall of discharge cavity between the gap for airflow
Category rod.Specifically, it is with the difference of embodiment one：Discharge tube 105 is metal tube, and the metal tube itself constitutes dispatch from foreign news agency
Pole, the outside of interior electrode 120 is provided with an insulation sleeve 125, discharges by being present in the gap between metal tube and insulation sleeve 125
Gas ionization and produce.The sample of gas or aerosol state enter discharge tube 105, under action of high voltage ionize formed etc. from
Daughter, sample ions so that by mass spectrograph collect, separate and determine.
Embodiment three
Referring to accompanying drawing 3, it is the mass ion source of the embodiment of the present invention three.
In the present embodiment, discharge cavity is a hollow insulation tube.Two electrodes are encircled in the outside of discharge cavity respectively, and
And insulated between two electrodes so that the proper external discharge that will not produce discharge cavity when applying high-tension electricity to two electrodes.Specifically
Ground, it is the example that the present invention produces plasma discharge using spaced electrodes, and it is with the difference of embodiment one, two：
Two electrodes are external electrode (110 i.e. shown in Fig. 3 and 115), separate enough between two electrodes, in action of high voltage decentralization
Gas in fulgurite 105 is ionized to form plasma, and the ion for obtaining is measured into mass spectrograph.If additional power source voltage
It is not enough to cause to produce plasma discharge in discharge tube 105, can be on the inside center line of discharge tube 105.
Additionally, on the basis of embodiment three, can also be improved.For example：The mass ion source also includes in one
The metal bar of midline position in discharge cavity is placed in, for guiding extra electric field to enter inside discharge cavity, so that circulate in putting
Gas in electric chamber forms plasma under the conditions of relatively low applied voltage (250V~2500V) and produces glow discharge.
In other embodiment, if being provided without built-in metal rod guiding extra electric field, applied voltage scope is between 500V~10000V.
Example IV
Referring to accompanying drawing 4, it is the mass ion source of the embodiment of the present invention four.
In the present embodiment, discharge cavity is a hollow insulation tube.One of electrode is placed in discharge cavity for a tip of a root end
The spray point of interior central point.Another electrode is one and is bumped into the metal ring in discharge cavity.The center of circle of metal ring with
The needle point of spray point is overlapped, and the periphery of metal ring forms equidistant intervals with the needle point of spray point.Specifically, in this example
Discharge mechanism be made up of a hollow discharge pin 200 and a ring electrode 210, spray point 200 and the phase of ring electrode 210
Mutually vertical, the needle point 220 of spray point is arranged on the circle centre position of ring electrode 210.When high voltage is applied to binding post 140a and wiring
After on post 140b, in the breakdown electric discharge of ring electrode circle centre position, the ion of generation is through discharge tube for the gas from the entrance of hollow needle 200
105 enter mass spectrograph is measured.Hollow discharge pin 200 while discharge process is played, lead to by the air inlet for being also used as gas
Road.
Embodiment five
Referring to accompanying drawing 5, it is the mass ion source of the embodiment of the present invention five.
In the present embodiment, spray point is a hollow metal tube.Specifically, the electric discharge in this example solid is put by one
Acusector 205 and a ring electrode 210 are constituted, and spray point 205 seals and be fixed to connection main body by an insulation sleeve 230
Above 100, it is mutually perpendicular to ring electrode 210, the needle point 220 of spray point is arranged on the circle centre position of ring electrode 210.Gas is from even
Another entrance suction in main body 100 is connect, is applied between two electrodes by spray point 205 and ring electrode 210
High electrical breakdown discharges, and the ion of generation enters mass spectrograph and is measured through discharge tube 105.
Embodiment six
In the present embodiment, discharge cavity is a hollow metal pipe and constitutes one of electrode.Another electricity
The extremely one solid spray point of the 0~5mm of centre point of distance between two tips metal circular tube one end.Specifically, discharge tube 105 is metal
Pipe, and the metal tube itself constitutes first electrode.Another electrode is solid spray point 205, the pin of the spray point 205
Point extends to the centre point of the inlet end of discharge tube 105 nearby (needle point is apart from 0~5mm of the centre point).Gas is from by connecting master
Extension 160 on body 100 enters.
Embodiment seven
In the present embodiment, discharge cavity is a hollow metal pipe and constitutes one of electrode.Another electricity
An extremely tip of a root end is close to the spray point of the 0~5mm of centre point of metal circular tube one end, and the spray point is hollow metal tube.
Specifically, discharge tube 105 is metal tube, and the metal tube itself constitutes first electrode.Another electrode is spray point
200, the spray point 200 is hollow metal tube, and its needle point extends to (needle point near the centre point of the inlet end of discharge tube 105
Apart from 0~5mm of the centre point).Gas enters from spray point 205.
Ion gun shown in examples detailed above has two ways to be connected with mass spectrograph：
The first is connected to discharge cavity and the hollow seal of mass spectrometric entrance connects as shown in figure 8, vacuum mechanism is one
Head.Mass spectrograph inner vacuum directly connects discharge cavity with so that discharge cavity sucks gas and treats test sample by hollow seal joint
Product.Specifically, the mass ion source passes through a special connector 300 the discharge tube 105 of ion gun and the entrance of mass spectrograph 400
350 is closely coupled, also different for the different entry form connectors 300 of mass spectrograph 400, with must ensure it is of the invention from
Component is directly connected with the vacuum inside mass spectrograph in the form of sealing.
Second as shown in figure 9, vacuum mechanism is one is connected to discharge cavity and wraps up the hollow of mass spectrometric entrance
Seal cavity.Hollow seal cavity is provided with a vacuum interface for being connected to external vacuum system.Specifically, the mass spectrum from
Component includes a cavity 350 being tightly connected with mass spectrometer inlet 350 and the vavuum pump (not shown) vacuumized to cavity,
The export pipeline 105 of mass ion source of the present invention is sealably coupled to cavity inside through cavity wall, the entrance phase with mass spectrograph 400
Right, 1~5mm gaps are stayed in centre, allow vacuum that gas or aerosol sample suction ion gun are produced ionization, and ion is by mass spectrograph
400 collection voltages orders about lower entrance mass spectrograph 400 by separate with determine, the material not being ionized then siphoned away by vacuum be discharged to it is useless
In gas.
Each technical characteristic of above example can be combined arbitrarily, to make description succinct, not to above-described embodiment
In each technical characteristic it is all possible combination be all described, as long as however, the combination of these technical characteristics do not exist lance
Shield, is all considered to be the scope of this specification record.
Above example only express it is of the invention preferred embodiment its description is more specific and in detail, but not
Can therefore be construed as limiting the scope of the patent.It should be pointed out that for the person of ordinary skill of the art,
Without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection model of the invention
Enclose.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (12)
1. a kind of mass ion source, it is characterised in that including：
Discharge cavity；The outside sealing of the discharge cavity, inside sets a unimpeded passage；One end of the discharge cavity is provided with use
In the inlet end of air inlet, the other end is provided with the output end for connecting mass spectrometric entrance；
The electrode of two mutually insulateds and the connection discharge cavity；When to two electrodes applying 250V~10000V voltages
When, the air-flow in the passage inside the discharge cavity is ionized and forms plasma；
Two power supplies of the electrode are connected respectively；The power supply is used to provide voltage to two electrodes；
The discharge cavity is connected to connect with the mass spectrometric entrance vacuum mechanism of one end；The vacuum mechanism is used in institute
State the discharge cavity one end that connects with the mass spectrometric entrance and produce negative pressure so that the discharge cavity is continuous from inlet end suction
Gas and determinand simultaneously flow to the output end, and the plasma produced in the discharge cavity is drawn towards described mass spectrometric
Entrance, and be measured into mass spectrograph in the case where the mass spectrometric collection voltage drives.
2. mass ion source according to claim 1, it is characterised in that also including being connected to the air-breathing of the inlet end
Pipe；The air intake duct stretches out for drawing testing sample from the inlet end.
3. mass ion source according to claim 1, it is characterised in that the discharge cavity is a hollow insulation tube；Its
In an electrode seal encircle in the outside of the discharge cavity；During another described electrode is longitudinally therethrough in the discharge cavity
Between and leave and the inwall of the discharge cavity between gap for the airflow.
4. mass ion source according to claim 1, it is characterised in that the discharge cavity be a hollow metal pipe and
Constitute one of them described electrode；Another described electrode for one be longitudinally therethrough in the discharge cavity and with the discharge cavity
Inwall between leave for the airflow gap appearance insulation metal bar.
5. mass ion source according to claim 1, it is characterised in that the discharge cavity is a hollow insulation tube；Two
The individual electrode is encircled in the outside of the discharge cavity respectively, and is insulated so that proper to two institutes between two electrodes
The external discharge of the discharge cavity will not be produced when stating electrode applied voltage.
6. mass ion source according to claim 5, it is characterised in that in being also built in the discharge cavity including
The metal bar of line position, for guiding extra electric field to enter inside the discharge cavity, so that circulating in the discharge cavity
Gas plasma can be formed under 250V~2500V voltages and produce glow discharge.
7. mass ion source according to claim 1, it is characterised in that the discharge cavity is a hollow insulation tube；Its
In electrode be the central point that a tip of a root end is placed in the discharge cavity spray point；Another described electrode is one
It is bumped into the metal ring in the discharge cavity；The center of circle of the metal ring is Chong Die with the needle point of the spray point, and described
The periphery of metal ring forms equidistant intervals with the needle point of the spray point.
8. mass ion source according to claim 7, it is characterised in that the spray point is a hollow metal tube.
9. mass ion source according to claim 1, it is characterised in that the discharge cavity be a hollow metal pipe simultaneously
And constitute one of them described electrode；Another described electrode is the centre point of metal circular tube one end described in a distance between two tips
The spray point of 0~5mm.
10. mass ion source according to claim 9, it is characterised in that the spray point is a hollow metal tube.
11. mass ion sources according to claim 1, it is characterised in that the vacuum mechanism for one be connected to it is described
The hollow seal joint of discharge cavity and the mass spectrometric entrance；The mass spectrograph inner vacuum passes through the hollow seal joint
The discharge cavity is directly connected to cause discharge cavity suction gas and the testing sample.
12. mass ion sources according to claim 1, it is characterised in that the vacuum mechanism for one be connected to it is described
Discharge cavity and wrap up the hollow seal cavity of the mass spectrometric entrance；The hollow seal cavity is provided with one for connecting
To the vacuum interface of external vacuum system.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107464737A (en) * | 2017-08-28 | 2017-12-12 | 广西电网有限责任公司电力科学研究院 | A kind of firm mass ion source and its installation method |
| CN109507275A (en) * | 2018-11-08 | 2019-03-22 | 平高集团有限公司 | The Mass Spectrometer Method system and method for insulating gas electric discharge decomposition product in GIS |
| CN110010444A (en) * | 2019-03-29 | 2019-07-12 | 广州安诺科技股份有限公司 | A kind of more electric field mass spectrometer ion sources |
| CN111739783A (en) * | 2020-05-28 | 2020-10-02 | 清华大学 | Atmospheric pressure electric arc ion source for small mass spectrometer and detection method thereof |
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