CN106885563A - A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration - Google Patents
A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The invention discloses a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration, feature is：Closed loop is constituted by gyro sensors device, reading circuit, comparator, phaselocked loop, amplitude regulating circuit and switch 2, is responsible for driving gyro sensors device to be vibrated along drive shaft；Amplitude extracts circuit, amplitude regulating circuit and reading circuit, gyro sensors device and constitutes closed loop, is responsible for control gyro sensors device oscillation amplitude constant；Exciting circuit is responsible for the device vibration of excitation gyro sensors, frequency measurement circuit is responsible for reading oscillation signal frequency value, voltage prewired circuit is responsible for for frequency values being converted into preset voltage signal, and is applied on the voltage controlled oscillator in phaselocked loop, a vibration frequency of preset voltage controlled oscillator.The advantage of closed-loop driving circuit of the invention is：Vibration frequency is played by preset voltage controlled oscillator, using the narrow-band filtering and frequency tracking function of phaselocked loop, electricity vibration is prevented effectively from and is occurred, and available normal pressure integrated circuit technology is realized.
Description
Technical field
The present invention relates to a kind of closed-loop driving circuit of micro-mechanical gyroscope, especially a kind of micromechanics of anti-electricity vibration
Gyroscope closed-loop driving circuit.
Background technology
MEMS (Micro-Electro-Mechanical System, MEMS) is collection microsensor, micro- execution
The micro- energy of device, micro mechanical structure, micro battery, signal transacting and control circuit, high-performance electronic integrated device, interface, communication etc.
In the microdevice or system of one.Micro-mechanical gyroscope is a kind of important inertial MEMS.Typical micromechanical gyro
Instrument is made up of senser element and interface circuit two parts, and its operation principle is based on coriolis force (Coriolis Force) effect.
By taking resonant mode capacitor type micro-mechanical gyroscope as an example, as shown in figure 1, closed-loop driving circuit is first by the driven-mode (X of senser element
Direction) drive to resonant condition, when there is extraneous angular velocity vector ΩzDuring input, it is 2M that will produce size in sensed-mode (Y-direction)
The coriolis force F of Ω vc, this coriolis force can cause Y-direction to produce frequency and X-direction identical amplitude modulation displacement signal y (t), so as to draw
Detection electrode equivalent capacity C (t) change is played, by detecting that circuit reads C (t) and demodulates filtering, you can obtain reflecting input angle
Rate signal ΩzOutput voltage signal Vout。
Due to the limited precision of micro-mechanical gyroscope senser element processing technology, the driving stage on senser element driving direction
Inevitably there is a parasitic capacitance between plate and drive feedback pole plate, referred to as parasitic flying capcitor, as shown in Figure 2.
Due to the presence of parasitic flying capcitor, cause drive signal directly can be capacitively coupled to drive feedback end by this, and bring
Many negative effects.Main negative effect includes preventing the generation of " electrical-mechanical " vibration and triggers " electricity vibration ".Such as
Shown in Fig. 3, " electrical-mechanical " vibration refers to closed-loop driving circuit and driving pole plate equivalent capacity CdIt is equivalent with drive feedback pole plate
Electric capacity CsThe vibration of formation, is typically determined by gyroscope drive shaft resonant frequency, in several KHzs (kHz) to tens KHzs
(kHz) it is to expect occur in the range of；And " electricity vibration " refers to closed-loop driving circuit with parasitic flying capcitor CfWhat is formed shakes
Swing, by closed-loop driving circuit structure and parasitic flying capcitor CfSize it is relevant, be not typically more than hundred KHzs (kHz)
Expect what is occurred.But, closed-loop driving circuit and the loop that parasitic flying capcitor is constituted meet gain condition that vibration occurs with
During phase condition, gyroscope be possible to fall into electricity frequency of oscillation point and cannot normal work, accordingly, it would be desirable to try every possible means to avoid electricity
Learn vibration.
The reason for parasitic flying capcitor prevents " electrical-mechanical " vibration from occurring is analyzed as follows.As shown in figure 3, being posted when existing
Raw flying capcitor CfWhen, the electric current of closed-loop driving circuit detection is through CfThe electric current i of couplingfWith microthrust test drive feedback plate end
Electric current isSuperposition.Due to ifAnd isThere is 90 degree of phase difference, if ifMuch larger than is, because phase condition cannot expire in loop
Foot, desired " electrical-mechanical " vibration will not occur.Oscillator electrical model in Fig. 3 can be expressed as
Wherein, X is the displacement of gyroscope mass, FextIt is driving force, mxIt is gyroscope mass X-direction weight, ωx
It is the intrinsic angular frequency of gyroscope drive shaft, Q is gyroscope drive shaft quality factor, VdcAnd VbRespectively drive end and drive feedback
The DC differential pressure at end, VdrIt is driving voltage, CdIt is driving pole plate equivalent capacity, CsIt is drive feedback pole plate equivalent capacity, KF/V 2For
Driving voltage turns driving force conversion coefficient, Kc/xIt is displacement-capacitance conversion coefficient.The expression formula of oscillator transconductor can be obtained by formula (1)
For
Mutual conductance phase is equal to zero in making formula (2), can obtain equation
Wherein ωdIt is driving signal frequency.To cause that formula (3) there are Real Number Roots, need to meet
Formula (4) shows, it is to avoid the generation method of electricity vibration mainly has two, and first is from senser element Machine Design angle
Degree, reduces bridging parasitic capacitance C as far as possiblefValue；Second be from circuit design angle, can by change in formula (4) each
Variable, such as improve the polarizing voltage V being applied on microthrust test massp, to improve DC differential pressure VbAnd Vdc。
The method for avoiding electricity to vibrate at present includes, in terms of Machine Design, has and changes backing material into glass (ginseng by silicon
See Alper S E, Akin T.Symmetrical and decoupled nickel microgyroscope on
insulating substrate[J].Sensors&Actuators A Physical,2004,115(2–3):336-350.)、
Increase biasing pole plate between driving pole plate and drive feedback pole plate (referring to Park H W, Kim Y K, Jeong H G, et
al.Feed-through capacitance reduction for a micro-resonator with push–pull
configuration based on electrical characteristic analysis of resonator with
direct drive[J].Sensors&Actuators A Physical,2011,170(1):The method such as 131-138.), but this
A little methods can only substantially reduce parasitic flying capcitor, and cannot completely avoid electricity from vibrating, and can increase senser element
Design complexities.And in terms of circuit design, have bridge compensating electric capacity on trans-impedance amplifier to suppress higher-order of oscillation letter at present
Number method (referring to Alper S E, Sahin K, Akin T.An Analysis to Improve Stability of
Drive-Mode Oscillations in Capacitive Vibratory MEMS Gyroscopes[J].2009,51
(1):817-820.), but the shortcoming of the method is that big compensating electric capacity can introduce big phase shift, cause frequency of oscillation a large amount of
Off-resonance frequency.Another method is to increase the bias voltage on senser element mass, so as to avoid during oscillator starting of oscillation
Electricity oscillation point is fallen into (referring to Wu H M, Yin T, Jiao J W, et al.Analysis of parasitic feed-
through capacitance effect in closed-loop drive circuit design for capacitive
micro-gyroscope[J].Microsystem Technologies,2016,22(9):1-7.), but the shortcoming of the method is
The HVB high voltage bias of stabilization is difficult to be realized on the IC chip of conventional voltage technique.
The content of the invention
It is an object of the invention to provide a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration, to solve at present
There are a large amount of off-resonance frequencies of frequency of oscillation in the anti-electricity vibration design of closed-loop driving circuit to be difficult to routine with HVB high voltage bias
The problem realized on integrated circuit technology piece, it is to avoid gyroscope drive shaft falls into electricity vibration and causes the gyroscope cannot normal work
Make.
The present invention solve the technical scheme that is used of above-mentioned technical problem for：
A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration, by gyro sensors device, reading circuit, ratio
Compared with device, phaselocked loop, amplitude extract circuit, amplitude regulating circuit, frequency measurement circuit, voltage prewired circuit, exciting circuit and
Switch 1, switch 2, switch 3 and sequential control circuit composition.Phaselocked loop is connected and entered by the design philosophy of this closed-loop driving circuit
Closed-loop driving circuit, and the voltage controlled oscillator in phaselocked loop is preset into the startup vibration of gyroscope drive shaft resonant frequency annex,
Using the narrow-band filtering and frequency tracking function of phaselocked loop, it is to avoid electricity vibration occurs.
The drive feedback pole plate of described gyro sensors device is connected with reading circuit, reading circuit and comparator phase
Connection, comparator is connected with phaselocked loop, phaselocked loop is connected with amplitude regulating circuit, amplitude regulating circuit by switch 2 with
The driving pole plate of gyro sensors device disconnects or is connected to form closed loop, is responsible for driving gyro sensors device to be shaken along drive shaft
Swing.
Described amplitude is extracted circuit and is connected with reading circuit and amplitude regulating circuit respectively, and and gyro sensor
Part constitutes closed loop feedback control oscillator signal amplitude.
Described exciting circuit is disconnected or is connected by switch 1 with the driving pole plate of gyro sensors device, is responsible for swashing
The vibration of gyro sensors device is encouraged, frequency measurement circuit is connected with reading circuit and is responsible for reading oscillation signal frequency value, voltage
Prewired circuit to be connected with frequency measurement circuit and be converted into preset voltage signal by frequency values, and by switch 3 and phaselocked loop
Voltage controlled oscillator disconnect or be connected, be responsible for preset voltage controlled oscillator rise vibration frequency.
The closure and the sequential opened of described sequential control circuit charge control switch 1, switch 2 and switch 3.
The concrete operating principle and work schedule of described closed-loop driving circuit are starting stage switch 1, switch 2, switch 3
Open；Opened rapidly after the closure of first stage switch 1, switch 2 is stayed open with switch 3, " encouraging-declining using oscillator
Subtract " principle, gyro sensors device is encouraged by exciting circuit, then cancel excitation, sensor presses resonant frequency damped oscillation, by
Frequency measurement circuit reads decaying ringing signal frequency values, and by VCO in the corresponding phaselocked loop of voltage prewired circuit calculating
The preset voltage of device；Second stage switch 1 and switch 2 are stayed open, and switch 3 is closed, and preset voltage is put on into VCO
Device；Phase III switch 1 is stayed open, and switch 3 is opened, and switch 2 is closed, and gyroscope resonant frequency is followed the trail of using phaselocked loop, and
By amplitude extract circuit and amplitude regulating circuit feedback control sensor oscillation amplitude so that gyro sensors device with resonance frequently
Rate is vibrated by constant amplitude.
The initial oscillation of the voltage controlled oscillator of described phaselocked loop can be carried out pre- by preset input control voltage
Put.
Described voltage prewired circuit will measure the frequency values and VCO that obtain by the conversion of frequency values to voltage
The corresponding frequency of device sets up mapping relations.
Described amplitude regulating circuit is poor with reference signal by comparing the range signal of amplitude extraction circuit output
Value, and adjust the amplitude that phaselocked loop exports square-wave signal with this difference.
Compared with prior art, the advantage of the invention is that phaselocked loop is sealed in closed-loop by closed-loop driving circuit, utilize
The preset phaselocked loop of vibration frequency follows the trail of gyroscope drive shaft resonant frequency, occurs so as to be prevented effectively from electricity vibration, and can use
Normal pressure integrated circuit technology is realized.
Brief description of the drawings
Fig. 1 is a kind of operation principle schematic diagram of capacitor type resonant-type micro-mechanical optic fiber gyroscope instrument of the present invention, but not only
It is limited to capacitor type, the resonance type micromechanical present invention is equally applicable for other types；
Fig. 2 is the schematic diagram that bridging parasitic capacitance is present in micro-mechanical gyroscope senser element in the prior art；
Fig. 3 is gyro sensors device and shaking that closed-loop driving circuit is constituted in the presence of parasitic flying capcitor in the prior art
Swing the model of device；
Fig. 4 is the micro-mechanical gyroscope closed-loop driving circuit block diagram of anti-electricity vibration of the present invention；
Fig. 5 is closed-loop driving circuit working timing figure of the present invention；
Fig. 6 is that one kind of exciting circuit in Fig. 4 realizes structure, is a kind of relaxation osillator of frequency-adjustable；
Fig. 7 is that one kind of frequency measurement circuit in Fig. 4 realizes structure；
Fig. 8 is that one kind of phaselocked loop in Fig. 4 realizes structure；
Fig. 9 is that one kind of voltage controlled oscillator in Fig. 8 realizes circuit, is level Four loop configuration；
Figure 10 is that one kind of reading circuit in Fig. 4 realizes structure, is the reading circuit across resistance structure for amplifying；
Figure 11 is that one kind of comparator in Fig. 4 realizes structure, is sluggish structure comparator；
Figure 12 is that one kind of amplitude extraction circuit in Fig. 4 realizes structure, is rectifier structure；
Figure 13 is that one kind of amplitude regulating circuit in Fig. 4 realizes structure, is the amplitude based on pi controller structure
Regulation circuit.
Specific embodiment
A kind of micro-mechanical gyroscope closed-loop driving circuit block diagram of anti-electricity vibration of the invention and operation principle such as Fig. 4 institutes
Show, closed-loop driving circuit extracts circuit, amplitude adjusted by gyro sensors device, reading circuit, comparator, phaselocked loop, amplitude
Circuit, frequency measurement circuit, voltage prewired circuit, exciting circuit and switch 1, switch 2, switch 3 and sequential control circuit group
Into.Gyro sensors device, reading circuit, comparator, phaselocked loop, amplitude regulating circuit constitute closed loop with switch 2, are responsible for driving
Gyro sensors device vibrates along drive shaft.Amplitude extracts circuit, amplitude regulating circuit and reading circuit, gyro sensors device
Closed loop is constituted, is responsible for control gyro sensors device oscillation amplitude constant.Exciting circuit is responsible for excitation gyro sensors device and is shaken
Swing, frequency measurement circuit is responsible for reading oscillation signal frequency value, and voltage prewired circuit is responsible for for frequency values being converted into preset voltage
Signal, and be applied on the voltage controlled oscillator in phaselocked loop, a vibration frequency of preset voltage controlled oscillator.Sequential control circuit passes through
The closure of controlling switch 1, switch 2 and switch 3 and the sequential for opening control circuit work.
The initial oscillation of the voltage controlled oscillator of phaselocked loop can be carried out preset by preset input control voltage.
It is corresponding with voltage controlled oscillator that voltage prewired circuit will measure the frequency values for obtaining by the conversion of frequency values to voltage
Frequency set up mapping relations.
By comparing, amplitude extracts the range signal of circuit output to amplitude regulating circuit and reference signal obtains difference, is used in combination
This difference regulation phaselocked loop exports the amplitude of square-wave signal.
The design philosophy of closed-loop driving circuit is that the voltage controlled oscillator in phaselocked loop is preset into gyroscope drive shaft resonance
Frequency annex starts vibration, using the narrow-band filtering and frequency tracking function of phaselocked loop, it is to avoid electricity vibration occurs.Thus, close
The work schedule of ring drive circuit is segmented into 4 stages, as shown in figure 5, starting stage switch 1, switch 2 and switch 3 are beaten
Open, circuit is awaited orders；First stage switch 1 is closed rapidly after opening, switch 2 and switch 3 are remained turned-off, using " swashing for oscillator
Encourage-decay " principle, gyro sensors device is encouraged by exciting circuit, sensor presses resonant frequency damped oscillation, then by frequency
Measuring circuit reads decaying ringing signal frequency values, and by voltage controlled oscillator in the corresponding phaselocked loop of voltage prewired circuit calculating
Preset voltage；Second stage switch 1 and switch 2 are stayed open, and switch 3 is closed, and preset voltage is put on into voltage controlled oscillator, in advance
Put the initial oscillation of voltage controlled oscillator；Phase III switch 1 is stayed open, and switch 3 is opened, and switch 2 is closed, using locking phase
Ring follows the trail of gyroscope resonant frequency, and extracts circuit and amplitude regulating circuit feedback control sensor oscillation amplitude by amplitude, makes
Gyro sensors device is obtained to be vibrated by constant amplitude with resonant frequency.Tell about what is be related to successively below as above-mentioned temporal order
The implementation or structure of circuit module.
" excitation-decay " principle refers to, when excitation is cancelled after gyro sensors device is applied in excitation a period of time, to pass
Inductor component can be can be expressed as with its resonant frequency damped oscillation
V in formula (5)0It is initial voltage, depending on sensor and the original state of circuit, ω0It is sensor drive shaft resonance
Frequency, Q is drive shaft quality factor, and t is the time.
Fig. 6 is a kind of implementation of exciting circuit, is a relaxation osillator for frequency-adjustable, can be passed through during work
Regulation off chip resistor RsetBy oscillator output signal frequency tuning into the resonant frequency close to gyro sensors device drive shaft,
Then cancelled after excitation a period of time.The general principle of the relaxation osillator in Fig. 6 is described as follows：Reference current IcIt is alternately two
Individual electric capacity Cm1And Cm2Charge, the voltage on two electric capacity is through comparator and reference voltage VrefCompare, the data signal warp for obtaining
Cross set-reset flip-floop and produce control signal Vc1And Vc2, it is applied to M2~5Capacitor charge and discharge is controlled on the phase inverter of composition.Due to electric discharge
Speed is far longer than charging, therefore can not consider discharge time when calculating, then control signal Vc2Cycle be represented by
Wherein Δ V is charge voltage range, CmIt is charge and discharge capacitance.Output signal fcFrequency be represented by
Charging current IcBig I by off chip resistor RsetIt is adjusted, expression formula is
Wherein, VrefIt is reference voltage.Convolution (6), (7) and (8), the centre frequency that can obtain bandpass filter is
Wherein, from formula (9), by adjusting off chip resistor Rset, you can realize the frequency regulation of output signal.
Fig. 6 is only that one kind of exciting circuit realizes structure, but is not limited to this kind of structure.
Fig. 7 is a kind of structure of realizing of frequency measurement circuit, but not limited to this structure, and comparator is by the input of oscillatory extinction
Signal VinIt is transformed into square-wave signal Vcomp, then clock Clk controlled output data signals are passed through by counter.
Voltage prewired circuit can be realized by digital analog converter, but not limited to this structure.The digit and frequency of digital analog converter
Measuring circuit output digit is mutually unified, and is realized and VCO in phaselocked loop by controlling the reference voltage of digital analog converter
The frequency correspondence of device.For example, frequency measurement circuit output is 14 position digital signals, then maximum can characterize (214- 1) Hz, i.e.,
The signal of about 16.4kHz, then digital analog converter select 14；Assuming that the voltage controlled oscillator maximum oscillation frequency in phaselocked loop is
224Hz, if senser element resonant frequency is 2 to the maximum14Hz, then the frequency divider in phaselocked loop be set to 210Frequency dividing, if control voltage
Scope is 1~4V, then digital analog converter reference voltage is arranged to 1.5V, and biasing is set to 2.5V, then digital analog converter output is also 1
~4V, so actually measured frequency can be just transmitted on voltage controlled oscillator by preset voltage.
Fig. 8 is a kind of structure of realizing of charge pump phase lock loop, but not limited to this structure, by phase frequency detector, charge pump, low
Bandpass filter, voltage controlled oscillator and frequency divider composition, preset voltage load on voltage controlled oscillator input.
Fig. 9 is that a kind of voltage controlled oscillator realizes structure, is level Four loop configuration, but not limited to this structures.Gain in figure
Level is input into control voltage V using the fully differential structure of wide tuning rangecontChanged by adjusting gain stage tail current source size
To load capacitance CLCharging-discharging cycle, so as to adjust output signal frequency of oscillation.Buffer stage employs the difference of current mirror load
Differential signal is changed into single-ended signal by point gain stage, and by phase inverter integer into square-wave signal.
Figure 10 is that a kind of reading circuit realizes structure, is but the not limited to this structure across resistance structure for amplifying.Amplify in figure
Device is fully differential structure, by fully-differential amplifier, resistance RFWith compensating electric capacity CFConstitute.Fully-differential amplifier is using folding common source
Common gate structure, and ensure that amp DC operating point is normal by input common-mode feedback and output common mode feedback.
Figure 11 is that a kind of comparator realizes structure, is hysteresis comparator structure, but not limited to this structures.Comparator is by preceding
Put big, latch, self biased differential amplifying stage and the part of output driving four is constituted, preferable can must solve input signal noise and draw
The threshold point for rising misses turning problem.
Figure 12 is the implementation that a kind of oscillator signal amplitude extracts circuit, is rectifier structure, but not limited to this structure.
Rectifier is used from demodulation structure, and input differential signal produces four tunnel demodulated signals for solution through hysteresis comparator and non-overlapping clock
Tune switch is used.Under the control of demodulated signal, solution tune switch carries out full-wave rectification, the difference letter of output to input differential signal
Number through instrument amplifier change into single-ended signal export.Filter capacitor and buffer before and after solution tune switch are tuned to open to reduce solution
Close influence of the burr for producing to front stage.
Due to phaselocked loop output is square-wave signal, therefore amplitude regulating circuit can not simply use variable gain amplifier
Realize.A kind of implementation method of amplitude regulating circuit is exported after the signal that amplitude extracts circuit acquisition is compared with reference value,
Output signal as square wave signal power sources voltage, i.e., by adjusting the amplitude of its dominant frequency signal in square-wave signal.Realize circuit knot
As shown in figure 13, high-gain cascode structure operational amplifier adjustable resistance R outer with piece, tunable capacitor C proportion of composing are accumulated structure
Sub-controller, the range signal V that will be input intoampWith reference signal VrefCompare rear output control signal Vctr, as the electricity of phase inverter
Source voltage, regulation square wave oscillation signal VinThe amplitude of (pll output signal), exports VoutSignal.Amplitude regulating circuit it is another
A kind of implementation method is that phaselocked loop first exports square-wave signal turns triangular signal circuit by square wave and triangular wave turns sine wave and believes
Number circuit changes into sinusoidal signal output, while can be adjusted with variable gain amplifier using traditional pi controller shake
Swing signal amplitude, but this method shortcoming be because oscillation signal frequency is general in several KHzs or tens KHzs, therefore
Square wave turns triangular signal circuit and triangular wave turns the filter capacitor of sine wave signal circuit and is required to be placed on outside piece, it is impossible to piece
It is upper integrated.
It is worth noting that, the foregoing is only presently preferred embodiments of the present invention, patent of the invention is not thereby limited
Protection domain, the present invention can also carry out the improvement of material and structure to the construction of above-mentioned various parts, or use skill
Art equivalent is replaced.Therefore all equivalent structure changes made with specification of the invention and diagramatic content, or directly or
Apply to other correlative technology fields indirectly to be similarly all contained in the range of of the invention covering.
Claims (4)
1. the micro-mechanical gyroscope closed-loop driving circuit that a kind of anti-electricity vibrates, it is characterised in that by gyro sensors device, read
Go out circuit, comparator, phaselocked loop, amplitude and extract circuit, amplitude regulating circuit, frequency measurement circuit, voltage prewired circuit, excitation
Circuit and switch 1, switch 2, switch 3 and sequential control circuit composition, it is described
The drive feedback pole plate of gyro sensors device is connected with reading circuit, reading circuit is connected with comparator, compare
Device is connected with phaselocked loop, phaselocked loop is connected with amplitude regulating circuit, amplitude regulating circuit is by switching 2 and gyro sensors
The driving pole plate of device disconnects or is connected to form closed loop, is responsible for driving gyro sensors device to be vibrated along drive shaft；
Amplitude is extracted circuit and is connected with reading circuit and amplitude regulating circuit respectively, and constitutes closed loop with gyro sensors device
Feedback control oscillator signal amplitude；
Exciting circuit is disconnected or is connected by switch 1 with the driving pole plate of gyro sensors device, is responsible for excitation gyroscope and is passed
Inductor component vibrate, frequency measurement circuit be connected with reading circuit be responsible for read oscillation signal frequency value, voltage prewired circuit and
Frequency measurement circuit to be connected and be converted into preset voltage signal by frequency values, and by the VCO in switch 3 and phaselocked loop
Device disconnects or is connected, and that is responsible for preset voltage controlled oscillator plays vibration frequency；
The closure of sequential control circuit charge control switch 1, switch 2 and switch 3 and the sequential opened；
The work schedule of closed-loop driving circuit is to switch 1, switch 2, switch 3 starting stage to open；First stage switch 1 is closed
Close, switch 2 is stayed open with switch 3, then exciting circuit excitation gyro sensors device switchs 1 and open, and excitation is cancelled, and passes
Sensor presses resonant frequency damped oscillation, and decaying ringing signal frequency values are read by frequency measurement circuit, and by voltage prewired circuit
The preset voltage of voltage controlled oscillator in output phaselocked loop；Second stage switch 1 and switch 2 are stayed open, and switch 3 is closed, will be pre-
Put voltage and put on voltage controlled oscillator；Phase III switch 1 is stayed open, and switch 3 is opened, and switch 2 is closed, and phaselocked loop follows the trail of top
Spiral shell instrument resonant frequency, and circuit and amplitude regulating circuit feedback control sensor oscillation amplitude, gyro sensors are extracted by amplitude
Device is vibrated with resonant frequency by constant amplitude.
2. the micro-mechanical gyroscope closed-loop driving circuit that a kind of anti-electricity according to claim 1 vibrates, it is characterised in that
The initial oscillation of the voltage controlled oscillator of described phaselocked loop can be carried out preset by preset input control voltage.
3. the micro-mechanical gyroscope closed-loop driving circuit that a kind of anti-electricity according to claim 1 vibrates, it is characterised in that
It is corresponding with voltage controlled oscillator that described voltage prewired circuit will measure the frequency values for obtaining by the conversion of frequency values to voltage
Frequency sets up mapping relations.
4. the micro-mechanical gyroscope closed-loop driving circuit that a kind of anti-electricity according to claim 1 vibrates, it is characterised in that
By comparing, amplitude extracts the range signal of circuit output to described amplitude regulating circuit and reference signal obtains difference, and uses this
Difference regulation phaselocked loop exports the amplitude of square-wave signal.
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| CN109253725A (en) * | 2017-07-13 | 2019-01-22 | 深迪半导体(上海)有限公司 | A kind of signal processing system of MEMS gyroscope |
| CN109945849A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | A kind of closed loop phase lock driving circuit structure based on MEMS gyroscope |
| CN110470291A (en) * | 2019-09-04 | 2019-11-19 | 中国海洋大学 | A kind of MEMS resonant formula gyroscope interface circuit and TT&C system |
| CN111272161A (en) * | 2020-03-06 | 2020-06-12 | 尚同电子科技(淄博)有限公司 | Micro gyroscope excitation and protection device and method |
| CN112213710A (en) * | 2019-07-11 | 2021-01-12 | 英飞凌科技股份有限公司 | Controlling an oscillation system |
| CN114264318A (en) * | 2021-12-06 | 2022-04-01 | 河北汉光重工有限责任公司 | Method and device for testing natural frequency of closed-loop fiber optic gyroscope |
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| CN109253725A (en) * | 2017-07-13 | 2019-01-22 | 深迪半导体(上海)有限公司 | A kind of signal processing system of MEMS gyroscope |
| CN109945849A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | A kind of closed loop phase lock driving circuit structure based on MEMS gyroscope |
| CN109945849B (en) * | 2019-04-02 | 2023-09-26 | 四川知微传感技术有限公司 | Closed-loop phase-locked driving circuit structure based on MEMS gyroscope |
| CN112213710A (en) * | 2019-07-11 | 2021-01-12 | 英飞凌科技股份有限公司 | Controlling an oscillation system |
| CN112213710B (en) * | 2019-07-11 | 2024-01-12 | 英飞凌科技股份有限公司 | Controlled oscillation system |
| CN110470291A (en) * | 2019-09-04 | 2019-11-19 | 中国海洋大学 | A kind of MEMS resonant formula gyroscope interface circuit and TT&C system |
| CN110470291B (en) * | 2019-09-04 | 2023-11-24 | 中国海洋大学 | MEMS resonant gyroscope interface circuit and measurement and control system |
| CN111272161A (en) * | 2020-03-06 | 2020-06-12 | 尚同电子科技(淄博)有限公司 | Micro gyroscope excitation and protection device and method |
| CN111272161B (en) * | 2020-03-06 | 2021-07-06 | 尚同电子科技(淄博)有限公司 | Micro gyroscope excitation and protection device and method |
| CN114264318A (en) * | 2021-12-06 | 2022-04-01 | 河北汉光重工有限责任公司 | Method and device for testing natural frequency of closed-loop fiber optic gyroscope |
| CN114264318B (en) * | 2021-12-06 | 2024-06-11 | 河北汉光重工有限责任公司 | Method and device for testing natural frequency of closed-loop fiber optic gyroscope |
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