CN106881639A - The flat surface grinding method and surface grinding machine of workpiece - Google Patents
The flat surface grinding method and surface grinding machine of workpiece Download PDFInfo
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- CN106881639A CN106881639A CN201610824809.5A CN201610824809A CN106881639A CN 106881639 A CN106881639 A CN 106881639A CN 201610824809 A CN201610824809 A CN 201610824809A CN 106881639 A CN106881639 A CN 106881639A
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- 238000000227 grinding Methods 0.000 title claims abstract description 291
- 238000000034 method Methods 0.000 title claims description 35
- 229910001651 emery Inorganic materials 0.000 claims abstract description 196
- 238000005520 cutting process Methods 0.000 claims abstract description 126
- 230000000630 rising effect Effects 0.000 claims abstract description 22
- 230000033228 biological regulation Effects 0.000 claims abstract description 15
- 230000009467 reduction Effects 0.000 claims abstract description 14
- 238000012544 monitoring process Methods 0.000 claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims description 74
- 238000005259 measurement Methods 0.000 claims description 14
- 230000007423 decrease Effects 0.000 claims description 8
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 15
- 230000008859 change Effects 0.000 description 31
- 230000008520 organization Effects 0.000 description 15
- 240000002853 Nelumbo nucifera Species 0.000 description 10
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 10
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 10
- 230000001133 acceleration Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000006870 function Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 239000004576 sand Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 210000001138 tear Anatomy 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
Problem of the invention is material, other workpiece effectively can be cut to hard brittle material, difficulty with the high load capacity of appropriateness and be ground.When flat surface grinding is carried out to workpiece by emery wheel, while monitoring grinding load, when load rising is ground, the cutting speed of emery wheel is reduced, when load reduction is ground, increase cutting speed.Corresponding to each load threshold value in the multiple of grinding load, setting grinding load is bigger, the slower each cutting speed of the cutting speed of emery wheel, after grinding is started with fixing speed, whenever being ground load rising, dropping to the load threshold value of regulation, make emery wheel deceleration, speedup to corresponding cutting speed.
Description
Technical field
Flat surface grinding method and surface grinding machine the present invention relates to carry out the workpiece of flat surface grinding to workpiece.
Background technology
In the surface grinding machine of the emery wheel with cup type, the hard of the silicon wafer of manufacture of semiconductor element etc. to be used in grinding
During the workpiece of crisp material, while the load current of emery wheel axis drive motor is monitored, emery wheel is made with the cutting speed for specifying
The emery wheel of the front end of axle is cut, and carries out the infeed grinding of the workpiece on turntable, in the blocking of the eyelet because of emery wheel
When the load current of emery wheel axis drive motor is exceeded defined threshold, after keeping out of the way emery wheel, interrupting grinding, emery wheel is made again
Cut, with absorption surface, thus promoted self-sharpening effect (patent document 1) of emery wheel.
Prior art document
Patent document
Patent document 1：2006-No. 35406 publications of TOHKEMY
The content of the invention
The invention problem to be solved
In such past method for grinding, emery wheel is cut with the cutting speed for specifying, on the other hand,
When producing eyelet to block in the emery wheel in grinding, emery wheel is kept out of the way to interrupt grinding, then, again cut emery wheel
Enter, promote the self-sharpening effect of emery wheel.It is thus impossible to enough carried out in the grinding efficiency of emery wheel higher load condition high to workpiece
Grinding, is ground the cycle elongated, it is difficult to workpiece is ground with good efficiency in the short time in addition.
In addition, in the same past filing beyond the filing of patent document 1, with grinding, making emery wheel
The filing that opposite piece is cut with certain cutting speed；Corresponding to the incision upwards of movement of emery wheel, in deceleration side successively
To the thick grinding and feeding of change, middle grinding and feeding, while fine ginding enters to give feed speed relation, the filing being ground
(being referred to as " plain grinding method " below).
But, in the former filing, in grinding, the wear extent of emery wheel and the removal amount of workpiece and emery wheel are cut
The balance entered between amount is destroyed, and grinding load sharp rises, or only emery wheel weares and teares, and causes to be difficult to good
Workpiece is ground in the grinding efficiency of emery wheel good higher load condition stabilised efficiency.
Additionally, in the filing of the latter, because it is following such the reasons why, it is impossible to good efficiency, stably in emery wheel
Grinding efficiency good higher load condition workpiece is ground.Particularly in the workpiece of the high and crisp hard brittle material to hardness
When being ground, the feed speed for changing emery wheel due to the mode that overload state is not at according to the incision according to emery wheel is simultaneously
Workpiece is ground, therefore must slow down the cutting speed of emery wheel, the time for expending length is ground.
However, in the occasion of such hard brittle material, the self-sharpening effect (hole of wheel face is repeatedly produced in grinding
Eye is replaced), grinding load greatly changes up and down.Its reason is：Relatively before self-sharpening effect, the incision sense of emery wheel is poor
Situation, if once producing the self-sharpening effect of emery wheel, the cutting blade of emery wheel increases, and incision sense suddenly becomes good.
As a result, because the coefficient of friction of emery wheel and workpiece changes, grinding load greatly changes up and down, therefore cannot be with grinding efficiency
Good high load capacity, in the short time, is ground with good stabilised efficiency.
In addition, because of emery wheel, workpiece, mechanical thermal potential drastically that in self-sharpening effect, increases of frictional heat is caused
Move, in many occasions, grinding wheel spindle diminishes with the axial distance of turntable.The occasion that this point rises with the cutting speed of emery wheel
It is identical, it is to be ground the main cause that load tempestuously rises.In addition, if grinding load excessively rises, then it is abnormal with detection
Grinding load, machinery terminates processing, or in the danger of worst occasion, emery wheel, workpiece damage, or mechanical damage etc..
It is an object of the present invention to be directed to such past problem, there is provided the flat surface grinding method and flat stone mill of workpiece
Bed, wherein, effectively hard brittle material, other workpiece can be ground with the high load capacity being adapted to, and can prevent from being ground load
The damage for the workpiece, emery wheel and the machinery that cause such as steeply rising, in addition, the abrasion of emery wheel can be reduced.
Technical scheme for solving problem
The flat surface grinding method of workpiece of the invention is related to following methods, in the method, by emery wheel to work
When part carries out flat surface grinding, while monitoring grinding load, with the rising of grinding load, the cutting speed of emery wheel is reduced.
In addition, the flat surface grinding method of another workpiece of the invention is related to following methods, in the method, by sand
When wheel carries out flat surface grinding to workpiece, while monitoring grinding load, when load rising is ground, the incision speed of emery wheel is reduced
Degree, when load decline is ground, increases the cutting speed of emery wheel.
Additionally, each for the multiple load threshold values that can also correspond to be ground load, grinding is previously set, and load is bigger, emery wheel
The slower each cutting speed of cutting speed, after grinding is started with fixing speed, rise in grinding load every time, drop to
During the load threshold value of regulation, by emery wheel reduction, increase to corresponding cutting speed.
Further, maximum load threshold value when the incision higher than emery wheel can be previously set returns load threshold value, in grinding
Load exceedes when returning load threshold value, to specify while returning speed and return emery wheel, is ground.Also can be without fire
The incision of emery wheel is repeated and returns before flower grinding.
Further, also can be when grinding load outpaces the load threshold value for limiting execution, even if after, being ground load
In the case of the load threshold value of the cutting speed for being reduced to regulation, still made with being slower than the limitation cutting speed of the cutting speed of regulation
Emery wheel is cut, and degree more than limitation cutting speed is not accelerated to.
Surface grinding machine of the invention is related to following surface grinding machines, and the surface grinding machine carries out laterally giving by emery wheel to workpiece
Enter grinding, the surface grinding machine includes：Grinding load measurement mechanism, the grinding load measurement mechanism determines the mill of the emery wheel in grinding
Cut load；Speed set mechanism, the speed set mechanism corresponds to the cutting speed of multiple multiple emery wheels of load threshold value setting；Speed
Degree controlling organization, the speed control mechanism in the following manner on the basis of each load threshold value, with corresponding with each load threshold value
Cutting speed the speed of emery wheel is increased and decreased, which is：Grinding load in grinding is compared is same with load threshold value
When, with the rising of grinding load, declining, the cutting speed of emery wheel carries out speedup, slows down.
The effect of invention
According to the present invention, have the advantages that following, i.e. can be with suitable high load capacity effectively to hard brittle material, other works
Part is ground, and can prevent from being ground the damage for the workpiece, emery wheel and the machinery that cause such as steeply rising of load, in addition,
The abrasion of emery wheel can be reduced.
Brief description of the drawings
Fig. 1 is the front view of the surface grinding machine for representing the 1st implementation method of the invention；
Fig. 2 is the stereogram of the major part；
Fig. 3 is the block diagram of the control system；
Fig. 4 is its speed form；
Fig. 5 is the flow chart for representing grinding action；
Fig. 6 is the figure of the change etc. for representing the grinding load；
Fig. 7 is the block diagram of the control system for representing the 2nd implementation method of the invention；
Fig. 8 is the flow chart of grinding action；
Fig. 9 is its speed form；
Figure 10 is the figure of the change for representing the grinding load；
Figure 11 is the block diagram of the control system for representing the 3rd implementation method of the invention；
Figure 12 is its 1st speed form；
Figure 13 is its 2nd speed form；
Figure 14 is the speed form for representing the 4th implementation method of the invention；
Figure 15 is the block diagram for representing the 5th implementation method of the invention；
Figure 16 is the oscillogram of speed change.
Specific embodiment
Below according to accompanying drawing, embodiments of the present invention are specifically described.
Fig. 1~Fig. 6 represents the example of the 1st implementation method of the present application.It is brilliant to sapphire in the emery wheel 1 by cup type
When the workpiece W of the hard brittle material of piece etc. carries out cross feed grinding, using the surface grinding machine 2 as shown in Fig. 1, Fig. 2.Should
Surface grinding machine 2 is as shown in Fig. 1, Fig. 2, including：Turntable 3, is provided with freely loading and unloading on the top surface of the turntable 3
Workpiece W；The artifact-driven mechanism 4 of motor etc., the artifact-driven mechanism 4 around the axle center of above-below direction, in a directions of arrow and
The rotation driving turntable 3；Grinding wheel spindle 5, the grinding wheel spindle 5 freely being arranged on turntable 3 up and down；Motor etc.
Emery wheel drive mechanism 6, the emery wheel drive mechanism 6 around above-below direction axis, in b direction of arrow rotation drivings grinding wheel spindle 5；
Emery wheel 1, the emery wheel 1 is installed on the bottom of grinding wheel spindle 5 with freely loading and unloading, and by the rotation of the b directions of arrow, to turntable 3
On workpiece W carry out flat surface grinding；Emery wheel feed mechanism 7, the emery wheel feed mechanism 7 via grinding wheel spindle 5, cutting along the vertical direction
Enter direction c and return direction d feeding emery wheels 1.In addition, turntable 3, the direction of rotation of emery wheel 1 are arbitrary.
Fig. 3 represents the control system of the grinding action of control plane grinding machine 2.The control system includes NC controlling organizations 9, with
And such as constant dimensions controlling organization 10 and emery wheel incision return controlling organization 11, the NC controlling organizations 9 are controlled and surface grinding machine 2
The relevant common grinding action of infeed grinding.
Constant dimensions controlling organization 10 determines the size of the workpiece W in grinding, in rule by dimension measurement mechanism 12
During fixed sparking out period, by sparking out instruction output to emery wheel feed mechanism 7, according to by sparking out,
The mode that workpiece W is finish-machined to given size precision is controlled.
In addition, if emery wheel feed mechanism 7 is instructed with sparking out, then according in the position, emery wheel 1 is carried out continuously
The mode of the processing of workpiece W stops the feeding of grinding wheel spindle 5.In the occasion without constant dimensions controlling organization 10, also can be from workpiece W
Grinding start, reach the approach of regulation, or when by the stipulated time, output sparking out instruction.
While the grinding load that controlling organization 11 is used in the grinding for monitoring workpiece W is return in emery wheel incision, according to sand
Wheel 1 is effectively controlled the mode that workpiece W is ground the incision of emery wheel 1, is moved back with grinding efficiency appropriate high load capacity high
Return, including with the rising of grinding load, reduce the function of the cutting speed of emery wheel 1；Near The Upper Limit is risen in grinding load
When, the function of the incision of emery wheel 1 being repeated and returns；With the decline of grinding load, increase the function of the speed of emery wheel 1.
Emery wheel incision returns controlling organization 11 specifically, including：Grinding load measurement mechanism 13, the grinding load measuring
Determine the grinding load that mechanism 13 determines the emery wheel 1 in grinding；Speed set mechanism 14, the speed set mechanism 14 is negative for each
Lotus threshold value sets the cutting speed of emery wheel 1, returns speed；Speed control mechanism 15, in 15 pairs of grindings of the speed control mechanism
Actual grinding load and load threshold value is compared, corresponding to the increase and decrease of the grinding load, with by speed set mechanism 14
And set cutting speed, speed is return to control emery wheel feed mechanism 7.
Grinding load measurement mechanism 13 determines according to the change of electric current, electric power or the torque for flowing through emery wheel drive mechanism 6 etc.
The grinding load of the emery wheel 1 in grinding.Speed set mechanism 14 has the speed form as shown in Fig. 4.In speed form
In, for high speed incision, fast incision, middle incision, cut slowly, return slowly, in each action for returning, return soon, promptly returning
Each, setting is ground load increased load threshold value L1~L7 (Nm) by stages；With corresponding to each load threshold value L1~L7
(Nm) the cutting speed V0 of speed change~V7 (mm/min) and by stages.
Cut as emery wheel 1 is contacted with workpiece W at a high speed, start incision during grinding, high speed cutting speed V0 is set in 0.5
(mm/min).For fast incision, relative load threshold value L1 is set in slow cutting speed V1=0.3 (mm/min), is cut in
Enter, relative load threshold value L2, be set in middle cutting speed V2=0.1 (mm/min), cut for slow, relative load threshold value L3,
It is set in middle cutting speed V3=0.05 (mm/min).
In addition, for returning slowly, relative load threshold value L4 is set in and returns speed V4=-0.05 (mm/min) slowly, right
Return in, relative load threshold value L5 returns speed V5=-0.1 (mm/min), for returning soon, relative load in being set in
Threshold value L6, is set in and returns speed V6=-0.3 (mm/min) slowly.For promptly returning, relative load threshold value L7 is set in and moves back
Return speed V7 (full speed).
Further, since it is rightabout to return relative incision, therefore in the record that it returns speed V4 etc., its expression is right
The additional "-" of numerical value, in the meaning that rightabout is advanced.
Each load threshold value L1~L7 as be directed to load threshold value L1~L4 in figure 6 and as enumerating, in from load threshold
Value L1 increased relations successively to load threshold value L7.The emery wheel 1 corresponding with each load threshold value L1~L7 of grinding load
Cutting speed V0~V3, returns speed V4~V7 and determines which is beforehand through experiment etc. in the following manner：Consider work
The combination of material, size, emery wheel 1, the surface grinding machine 2 of part W etc., emery wheel 1 can be in grinding efficiency appropriate higher load condition high
Effectively workpiece W is ground.
Then, for high speed incision, fast incision, middle incision, slow incision, load threshold value is pressed by stages with grinding load
L1~L3 and increase, cutting speed slows down in incision direction by V1~V3 by stages.In addition, for returning slowly, in return,
Return soon, promptly return, with grinding load increase by load threshold value L4~L7 by stages, return speed by stages in
Return direction by V4~V7 speedup.Because emery wheel 1 is moved in the direction opposite with incision direction, therefore emery wheel 1 returns speed
V4~V7 slows down by stages when emery wheel 1 is on the basis of incision direction from slow returning to urgent returning.
In addition, also can be in the occasion of the speed form with the standard corresponding with the workpiece W of standard, corresponding to workpiece W
Material etc. difference, read the numerical value of the speed form of the standard, be controlled while being compensated to it.
Load threshold value L3 during for slow incision and load threshold value L4 when returning slowly, load threshold value L4 when returning slowly compared with
Height, but, before the sparking out after the threshold value L3 that overloads, according to the field for slow incision being repeatedly repeated and return slowly
Close, according to such as be ground load in negative threshold L3 less than load threshold value L4 when, the slow incision of emery wheel 1 is carried out, negative
During more than lotus threshold value L4, carry out the slow mode return of grinding 1, on the basis of load threshold value L4, switch emery wheel 1 slow incision and
Slowly return.
Referring to the flow chart of Fig. 5, the method for grinding to workpiece W is illustrated.The transverse direction of the workpiece W of surface grinding machine 2
Feed grinding is carried out by the control of NC controlling organizations 9.Surface grinding machine 2 is when the grinding for starting cross feed grinding is acted
(S1), first, before emery wheel 1 is contacted with workpiece W, emery wheel feed mechanism 7 is with the high speed feed higher than high speed cutting speed V0
Speed, grinding wheel spindle 5 is fed in incision direction.On the other hand, the size (S2) of workpiece W is determined by dimension measurement mechanism 12, is led to
Measure incision load of grinding load measurement mechanism 13 (S3), constant dimensions controlling organization 10 is crossed to judge whether in sparking out
Period (S4).
After the beginning of grinding action, whether due to being not yet in sparking out period (S4), therefore grinding load is judged
Less than the load threshold value L1 (S5) of fast incision, the feed speed of grinding wheel spindle 5 is reduced to from high speed feed speed and cut speed at a high speed
Degree V0, with high speed cutting speed V0, emery wheel 1 starts to be ground (S6) workpiece W1.
Before emery wheel 1 is contacted with workpiece W, with the high speed feed speed higher than high speed cutting speed V0, grinding wheel spindle is fed
5, before emery wheel 1 is contacted with workpiece W, high speed cutting speed V0 is reduced to, thus can shorten air clipping time, effectively go to
The grinding of workpiece W.
If emery wheel 1 is contacted with workpiece 1, start grinding, then the grinding load acted on grinding wheel spindle 5 rises, but,
Grinding load makes emery wheel 1 be cut (S6) less than during load threshold value L1 with high speed cutting speed V0.Then, if logical
The high speed incision of high speed cutting speed V0 is crossed, grinding load rises, and it is less than load threshold value L2 in more than load threshold value L1
(S5, S7), then make the cutting speed of emery wheel 1 be reduced to fast cutting speed V1 (S8) from high speed cutting speed V0, is cut soon with this
While entering speed V1 and cut emery wheel 1, continue the grinding of workpiece W.
If by the fast incision of fast cutting speed V1, grinding load rises, and it is less than negative in more than load threshold value L2
Lotus threshold value L3 (S7, S9), then the cutting speed V2 for making the cutting speed of emery wheel 1 be reduced to from fast cutting speed V1 in incision
(S10), emery wheel 1 is cut with cutting speed V2 in this.
In addition, if the middle incision for passing through cutting speed V2, grinding load rising, it is less than in more than load threshold value L3
Load threshold value L4 (S9, S11), then therefrom cutting speed V2 is reduced to the slow cutting speed of slow incision to make the cutting speed of emery wheel 1
V3 (S12), while emery wheel 1 is cut with the slow cutting speed V3, is carried out continuously the grinding of workpiece W.
Like this, grinding is started with quick high speed cutting speed V0, then, is passed through from load threshold value L1 in grinding load
Load threshold value L2, during rising to more than load threshold value L3, for each load threshold value L1~L3, makes emery wheel 1 stage by stage
While ground slows down by cutting speed V1~V3, cut.
If additionally, be emery wheel 1 slow incision in less than load threshold value L3 when (S9), make the cutting speed of emery wheel 1 from
Slow cutting speed V3 increases to middle cutting speed V2 (S10) etc., is ground load reduction, then with the reduction of the grinding load, increase
Plus the cutting speed of emery wheel 1.
If being ground load in the grinding of slow cutting speed V3 to rise, it is less than load threshold in load threshold value more than 4
Value L5 (S11, S13), then be switched to slow the slow of speed V4 of returning and return from the slow incision of slow cutting speed V3, is moved back emery wheel 1 is made
While returning, continue the grinding (S14) of workpiece W.In addition, if load is ground in the grinding return slowly is less than load threshold value L4
(S11), then the slow incision of slow cutting speed V3 is switched to from returning slowly for speed V4 is return slowly, emery wheel 1 is cut slowly
(S12)。
Then, if before the high-load region of the grinding load near load threshold value L4 of emery wheel 1, making workpiece W's
Grinding is carried out, then be the upper and lower of load threshold value L3, L4 hereafter, emery wheel 1 be repeated according to one or many slow incision and
Slowly while returning, the final grinding of workpiece W is proceeded.
Also during this period, constant dimensions controlling organization 10 reads in the size of workpiece W, if in the finishing close to regulation
The sparking out period (S4) of precision size, then according to the instruction of the sparking out from constant dimensions controlling organization 10,
Emery wheel feed mechanism 7 stops the movement of emery wheel 1, and emery wheel 1 is carried out at the sparking out that stop position is ground to workpiece W
(S21).Then, if by sparking out, workpiece W is finishing size, then terminate to be ground (S22).
In addition, if in the grinding return slowly, grinding load is in more than load threshold value L5, less than load threshold value L6
(S13, S15), then while speed V5 is return in returning emery wheel 1, be ground (S16), if then return in
In, grinding load is less than load threshold value L7 (S15, S17) in more than load threshold value L6, then make sand to return speed V6 soon
While wheel 1 is return, continue to be ground (S18).
If additionally, grinding load is carried out at more than load threshold value L7 (S17) with promptly returning speed V7 (full speed degree)
Promptly return (S19), stop grinding (S20).Then, after the termination of grinding, tracking of emery wheel 1 etc. is carried out, carries out recovery sand
The adequate measure of the incision sense of wheel 1 etc..
After the high speed for like this, starting emery wheel 1 with high speed cutting speed V0 is cut, born in the grinding of monitoring grinding 1
While the variation of lotus, load threshold value L3 is risen to successively by load threshold value L2 from load threshold value L1 with its grinding load,
The cutting speed of emery wheel 1 is reduced to fast incision from high speed incision successively, middle incision is reduced to from fast incision, therefrom incision is reduced
To slow incision.
Then, can be by using such filing, according to the cutting speed of emery wheel 1 and by the grinding work piece W of emery wheel 1
The basically identical mode of the speed of realization, is ground by emery wheel 1 to workpiece W, can be negative in grinding efficiency appropriate height high
Lotus puts on the state on emery wheel 1, and effectively workpiece W is ground.
If particularly, continuing to cut emery wheel 1 at high speed, then with the carrying out of grinding, workpiece W be ground by emery wheel 1 and
The speed of realization is inconsistent with the cutting speed of emery wheel 1, and grinding residual is produced in workpiece W sides, and the grinding load of emery wheel 1 is singularly
Rise.If as a result, continuing to be ground in high speed incision state, acting, workpiece W excessive in the load on workpiece W
The problem of cracking etc..But, due to while monitoring grinding load, with the rising of grinding load, reducing the incision of emery wheel 1
Speed, therefore can prevent excessive load from putting on workpiece W.
In addition, the final stage of the grinding in workpiece W, grinding load rises to more than load threshold value L3, in the mill of slow incision
In cutting, if grinding load rises to L4, return slowly due to emery wheel 1 being switched to, therefore slow incision is being repeated and is returning slowly
To simultaneously, workpiece W is ground in higher load condition.Thus, there is no the grinding load of emery wheel 1 to continue to rise, workpiece W is made
With the situation of excessive load, can continue to be ground with grinding efficiency appropriate high load capacity high.
Fig. 6 represents grinding load and the change of size of workpiece W when being actually ground to workpiece W.Symbol A is table
Show the grinding load curve of the change of the grinding load for since the grinding of occasion of the invention, terminating to sparking out, symbol
Number B is the dimension curve of the change of the size of the workpiece W for representing this occasion.Symbol A1 is the mill of the occasion of past plain grinding
Load curve is cut, symbol B1 is the dimension curve of the change of the size of the workpiece W for representing this occasion.
In past plain grinding, due to passing through the incision amount of feeding of emery wheel 1 according to the mode not for over load
While controlling the cutting speed of thick grinding and feeding, middle grinding and feeding, finishing grinding and feeding and emery wheel 1, it is ground, therefore picture
As shown in the grinding load curve A1 of Fig. 6, it has to be ground with slow cutting speed, although with entering for grinding
OK, the grinding load of emery wheel 1 rises, but its rate of rise is slow.Then, due in the past, being susceptible to emery wheel 1
Eyelet blocking, cannot fully play the low load condition of grinding efficiency, workpiece W is ground, therefore with workpiece W's
The problem that the grinding cycle is long, grinding efficiency is poor and grinding temperature rises etc..
On the other hand, in the present invention, as shown in the grinding load curve A of Fig. 6, whenever with the grinding of emery wheel 1
On the basis of load, when the grinding load is the load threshold value of regulation, according to high speed incision, fast incision, middle incision, cut slowly it is suitable
Sequence, reduces the speed of emery wheel 1 successively, at the same time, incision, slow incision is repeatedly repeated and returns slowly, is transferred to no-spark
Grinding.
Thus, due to that by the rising of the grinding load of emery wheel 1 self-sharpening of abrasive particle can be promoted to act on, therefore can be with high
Grinding efficiency is ground in the short time to workpiece W, can effectively be ground with the grinding cycle shorter than past plain grinding
Cut.The result is that judging that the grinding time of the invention compared with the occasion of past plain grinding, can shorten about 2/3, can enter
The effective grinding of row.Then, it is proposed, according to the invention, due to grinding efficiency load high, being effectively ground, thus with low
The occasion of the plain grinding for being ground load and being ground compares, and can prevent the rising of grinding temperature.
Fig. 7~Figure 10 represents the example of the 2nd implementation method of the invention.Control machine is return in the emery wheel incision of present embodiment
Structure 11 has rate limitation perform function, as shown in Figure 7, including is ground load measurement with the 1st implementation method identical
Mechanism 13, speed set mechanism 14, speed control mechanism 15 and rate limitation executing agency 14A.
This rate limitation executing agency 14A has following function, and the grinding load of emery wheel 1 outpaces and limits the negative of execution
During lotus threshold value LA, in the case of the load threshold value L3 of slow incision is less than even if being ground load reduction thereafter, still provide for sand
The cutting speed of wheel 1 is limited in the limitation cutting speed V for being slower than slow cutting speed V3 (=0.05mm/min)α(=0.03mm/
Min rate limitation).
Speed form is constituted as shown in Figure 9, is become by stages in load threshold value L1~L3 with grinding load
Height, makes emery wheel 1 decelerate to cutting speed V1~V3 by stages, in the load threshold value L4 being ground when load rises to slow returning
When, return emery wheel 1 to return speed V4 (=- 0.05mm/min) slowly, rising to load threshold value when rate limitation is performed
During LA, limitation cutting speed V is limited inα(=0.03mm/min), when load threshold value LX when grinding stops is risen to, stops
Grinding.
In the cross feed grinding of workpiece W, as shown in Figure 8, judge grinding load whether when termination is ground
More than load threshold value LX (S23), if in more than load threshold value LX, stopping grinding (S24).In addition, small in grinding load
When load threshold value LX, confirm it is so far, grinding load whether more than the load threshold value LA when rate limitation is performed
(S25), if had once, though in grinding load less than (S26) in the case of load threshold value L4, will emery wheel 1 be limited in
Limitation cutting speed Vα(=0.03mm/min) (S27).If not in more than load threshold value LA, by the grinding load with it is negative
Lotus threshold value L1 is compared (S28), if less than load threshold value L1, then forms the cutting speed V0 (S29) of incision at a high speed.Connect
, when load is ground in more than load threshold value L1, be compared with load threshold value L2, when less than load threshold value L2 (S30),
Form the cutting speed V1 (S31) of fast incision.
Similarly when load is ground in more than load threshold value L2, if be compared with load threshold value L3, less than load
Threshold value L3 (S32), then be set to the cutting speed V2 (S33) of middle incision.In addition, when load is ground in more than load threshold value L3,
If be compared with load threshold value L4, less than load threshold value L4 (S34), then the slow cutting speed V3 (S35) of slow incision is formed.
When grinding load in the grinding of slow incision is in more than load threshold value L4, emery wheel 1 is return into (S36) to return speed V4 slowly,
Slow by emery wheel 1 is return, the reduction for seeking to be ground load.
Even if in the grinding return slowly, the load threshold value LA when grinding load of emery wheel 1 is performed with rate limitation enters
Row compares (S37), if less than load threshold value LA, then returns to step S2.But, if in the grinding return slowly, grinding
Load is not reduced, and the reason for because of certain grade, grinding load disposably rises to load threshold value LA when rate limitation is performed
More than (S37), then storage grinding load overload the situation (S38) of threshold value LA, perform cutting for rate limitation executing agency 14A
Enter rate limitation function.
If hereafter, the aggravating reason of grinding load is eliminated for the moment, then because slow the slow of speed V4 of returning of emery wheel 1 is moved back
Return, grinding load is dramatically reduced.But, because grinding load once overloads threshold value LX (S25), even if then in emery wheel 1
Grinding load less than slow incision when load threshold value L4 in the case of (S26), the cutting speed limitation of speed control mechanism 14A
Function is performed, and is not limited in original slow cutting speed V3 (=0.05mm/min), and the incision of later emery wheel 1 is limited in
Most slow limitation cutting speed Vα(=0.03mm/min) (S27).
Then, emery wheel 1 is not contacted and left repeatedly with workpiece W.If because of certain reason, there is no rate limitation to perform work(
Can, then in the grinding of the workpiece W for returning slowly, when grinding load reduction is less than load threshold value L3 (S34), cut from slow returning
Slow incision is changed to, emery wheel 1 is cut with slow cutting speed V3 (=0.05mm/min).Thus, if corresponding to grinding is negative
The rising of lotus, decline, control the cutting speed of emery wheel 1, then emery wheel 1 with fast cutting speed and it is fast return speed and tempestuously
Back and forth, emery wheel 1 is repeated with workpiece W and contacts and leave, and the grinding of workpiece W is not in progress.
But, even if in the case where returning slowly because of emery wheel 1, grinding load reduction are less than load threshold value L3, still not
Cut emery wheel 1 with the fast speed of cutting speed V3 (=0.05mm/min) at once, and to limit cutting speed Vα(=
Jogging speed 0.03mm/min) and cut at leisure, be switched to slow incision by from slow returning, can prevent the grinding of emery wheel 1 from bearing
The rising drastically of lotus, emery wheel 1 is not repeated tempestuously and returns and cut.Thus, as Figure 10 represents grinding load curve
Like that, the change stabilization of grinding load hereafter, effectively can be ground to workpiece W.
In addition, in the present embodiment, according to after load threshold value LA when limiting execution that outpaces, even if in grinding
In the case of load reduction, still not being faster than limitation cutting speed VαSpeed make emery wheel 1 cut mode be controlled, but
It is, even if can also set limitation and return speed V in the case where emery wheel 1 is returnβ, certain load threshold value is exceeded in grinding load
After LB, even if thereafter, grinding load reduction is arrived close in the case of the upside of load threshold value L4, still not being faster than limitation return
Speed VβReturn speed and return.
Figure 11~Figure 13 represents the example of the 3rd implementation method of the invention.Control is return in the emery wheel incision of present embodiment
Mechanism 11 is as shown in Figure 11, including form selection mechanism 16, and the form selection mechanism 16 can suitably select speed to set
The speed form that mechanism 14 is stored, according to according to the form selected by form selection mechanism 16, speed control mechanism 15
The mode of control emery wheel feed mechanism 7 is controlled.
In the form that speed set mechanism 14 is stored, with than the 1st speed form T1 and Figure 13 as shown in figure 12
The 2nd shown speed form T2.Form selection mechanism 16 can respectively select the 1st speed form T1 and the 2nd speed form T2, this
Outward, the combination form for combining a part of two speed forms T1, T2 may be selected.
It is the speed form for constituting in the following manner with reference to form, which is：Select the 1st speed form T1 and
2nd speed form T2's is front and rear, will a 1st speed form T1 or the 2nd speed form T2 therefrom, be changed to another 2nd speed
Speed form change load setting during degree form T2 or the 1st speed form T1 is appropriate load threshold value, is become with the speed form
More load is changed and connects the front and rear of two speed forms T1, T2, therefrom a 1st speed form T1 or the 2nd speed form
T2 is switched to another 2nd speed form T2 or the 1st speed form T1.
Before being such as by the 1st speed form T1, the 2nd speed form T2 be after selection, and by load threshold value L3 setting
Be speed form change load occasion, may make up by the first half of the 1st speed form T1 to load threshold value L3 with from bear
1 speed form of the rear half-connection of the 2nd speed form T2 after lotus threshold value L3.
Then, in laterally feed incision, emery wheel incision is return controlling organization 11 and is monitoring the same of the change of grinding load
When, by speed control mechanism 15, control the cutting speed of emery wheel 1 respectively according to combination form.Such as, the first half of grinding according to
1st speed form T1 is controlled, in occasion of the grinding load less than load threshold value L3, with the slow incision of the 1st speed form T1
Speed V3 (=0.05mm/min) carries out the slow incision of emery wheel 1.Then, if grinding load is in more than load threshold value L3, from
1st speed form T1 is changed to the 2nd speed form T2, according to the 2nd speed form T2, with return slowly speed V3 (=-
0.05mm/min), the slow of emery wheel 1 is carried out to return.In addition, the aspect such as other structures, control is identical with each implementation method.
If constituted like this, selectively a part of the 1st speed form T1 and the 2nd speed form T2 can be combined,
Composition combination form, on the basis of quantity few speed form T1, T2 while, can be in the material of workpiece W, other side
It is ground under optimal conditions.
In addition, speed form can also have 3 kinds, speed form change load can also have various.In addition, not only through speed
Degree form change load, change form, but also can with cut-in timing, approach, from constant dimensions device etc. and read go
On the basis of except amount, become more speedometer lattice.
Figure 14 is the example for enumerating the 4th implementation method of the invention.Cut traverse feed is carried out to workpiece W by emery wheel 1
The occasion for entering, the grinding load in grinding corresponds to condition now and rises, declines.Then, the speed that can be also enumerated as Figure 14
Spend as the example of form, can be in which in selecting to use the rising situation of grinding load and reduce situation in selecting form
Load threshold value (ON represents selection, and OFF represents non-selection), corresponding to grinding condition, the appropriate necessary condition of selection.
In the occasion of the speed form of Figure 14, with high speed incision, fast incision, middle incision, cut slowly, return slowly, in move back
The controlling element return, return soon, promptly return, may correspond to rise situation, declines situation and suitably select each controlling element.
Such as, grinding load rising situation in, cut in not selecting, return slowly, in return, decline situation do not select to cut slowly
Enter.
Also the mill in the judgement time can be obtained by the judgement time for determining the several seconds in the past in actual transverse grinding
Cut the mode of the moving average of load etc., judge this moment grinding in rise situation, decline situation in which.
Figure 15, Figure 16 represent the example of the 5th implementation method of the invention.Emery wheel incision returns controlling organization 11 as Figure 15
As shown, including：Grinding load measurement mechanism 13, the grinding load measurement mechanism 13 determines the mill of the emery wheel 1 in grinding
Cut load；Speed set mechanism 14, the speed set mechanism 14 sets the cutting speed of emery wheel 1 for each load threshold value, moves back
Return speed；Time set mechanism 17, the time set mechanism 17 in the change of cutting speed, in the switching cut and return
When, set Acceleration and deceleration time；Speed control mechanism 15, grinding load and load threshold value in 15 pairs of grindings of the speed control mechanism
It is compared, the cutting speed that is set by speed set mechanism 14 according to corresponding with the increase and decrease of the grinding load, returns
Speed, incision control is carried out to emery wheel feed mechanism 7, control is return, and with the change of the cutting speed, cut and move back
The Acceleration and deceleration time T set by time set mechanism 17 during the switching returned, makes speed lentamente change in a direction.
In controlling organization 11 is return in the emery wheel incision of this spline structure, if preset by time set mechanism 17 added
Deceleration time T, during due in the change of cutting speed, the switching cutting and return in any occasion, can prevent speed
The change drastically of degree, therefore without the problem of grinding load reduction etc. for the moment, can be with height grinding load, with good efficiency to work
Part W is ground.
Such as, the occasion of the fast incision of cutting speed V1 is decelerated in the high speed incision from cutting speed V0, due to as scheming
As shown in solid in 16 (I), cutting speed V1 is reduced at leisure from cutting speed V0 in Acceleration and deceleration time T, therefore with
The occasion switched at once as shown in dotted line compares, and can suppress velocity variations drastically, suppresses the change of grinding load.
In addition, it is same in the slow incision from cutting speed V3, the slow occasion return for returning speed V4 is switched to, due to picture
As shown in solid in Figure 16 (II), it is switched to from cutting speed V3 returns speed V4 at leisure with Acceleration and deceleration time T,
Therefore the occasion switched as shown in dotted line at once compared with, rightabout velocity variations drastically can be suppressed, can press down
The change of system grinding load.
Additionally, Acceleration and deceleration time T can also correspond to material of workpiece W etc. and suitably set.In addition, can be in a variable manner
Setting Acceleration and deceleration time T, and also can be in the switching cut and return, speed control mechanism 15 is special according to the acceleration and deceleration of regulation
Property, acceleration and deceleration are carried out at leisure or by stages.
Embodiments of the present invention are had been described in detail above, but, the invention is not restricted to present embodiment, can enter
The various change of row.Such as, the quantity of the preferably load threshold value of grinding load is more.Then, load threshold value can also ad infinitum be increased
Quantity, increased to infinitely by making the quantity of load threshold value, can also carry out with grinding load increase, according to stepless way
And make the variable speed that the cutting speed of emery wheel 1 reduces.
Additionally, in embodiments, the example of the workpiece W of hard brittle material is provided, but be not restricted to that hard brittle material, for
The whole of the flat surface grinding of the workpiece W of various materials, can similarly implement.
As grinding load, the example of the rotary load torque of grinding wheel spindle 5 is provided, however, it is possible to pass through emery wheel driving machine
The change of the electric current, electric power of structure 6 acts on the change of load in emery wheel drive mechanism 6 and judges grinding load, can also pass through
The torque of artifact-driven mechanism 4, electric current, electric power, the change of load judge grinding load.In addition, there is no artifact-driven mechanism
Surface grinding machine 2 occasion, also dependent on act on workpiece W load judge grinding load.In addition, can also be driven by by emery wheel
The change of the electric current, electric power or load of motivation structure 6, what the change of electric current, electric power or load with artifact-driven mechanism 4 was combined etc.
Mode, the relevant factor combination of more than two relevant with the change of grinding load is judged.
In the 1st and the 2nd implementation method, the occasion risen to being ground load in incision has been described in detail, but,
If in incision, grinding load then obviously, can also be carried out less than the load threshold value of regulation according to the mode for increasing cutting speed
Control.It is same that the stipulated time also can be set in the occasion, increase cutting speed.
In addition, for grinding load, by specify load threshold value on the basis of increase reduce cutting speed, or incision and
The occasion switched between returning is sufficient if can carry out the incision of emery wheel 1 on the basis of the load threshold value for specifying, return
It is enough, can also be judged more than the anyone in load threshold value according to less than load threshold value.
At a high speed incision, fast incision, middle incision, cut, return slowly slowly, in return, return soon etc. be only simple enumerating
Property example, can also segment according to the degree more than them, can the rough segmentation with less quantity.Additionally, each load threshold value, cutting
The value for enter speed, returning speed is only simple particularization example, however it is not limited to they.
The explanation of label：
Label 1 represents emery wheel；
Label 2 represents surface grinding machine；
Label 3 represents turntable；
Label 4 represents artifact-driven mechanism；
Label 5 represents grinding wheel spindle；
Label 7 represents emery wheel feed mechanism；
Label 10 represents constant dimensions controlling organization；
Label 11 represents that controlling organization is return in emery wheel incision；
Label 12 represents dimension measurement mechanism；
Label 13 represents grinding load measurement mechanism；
Label 14 represents speed set mechanism；
Label 14A represents rate limitation executing agency；
Label 15 represents speed control mechanism；
Label 16 represents form selection mechanism；
Label 17 represents time set mechanism.
Claims (10)
1. a kind of flat surface grinding method of workpiece, it is characterised in that when flat surface grinding is carried out to workpiece by emery wheel, in monitoring
While grinding load, with the rising of grinding load, the cutting speed of emery wheel is reduced.
2. a kind of flat surface grinding method of workpiece, it is characterised in that when flat surface grinding is carried out to workpiece by emery wheel, in monitoring
While grinding load, when load rising is ground, the cutting speed of emery wheel is reduced, when grinding load declines, increase emery wheel
Cutting speed.
3. the flat surface grinding method of workpiece according to claim 1 and 2, it is characterised in that corresponding to many of grinding load
Each of individual load threshold value, is previously set grinding each cutting speed that load is bigger, emery wheel cutting speed is slower, with regulation
After speed starts grinding, every time when being ground load rising, dropping to the load threshold value of regulation, by emery wheel reduction, increase to right
The cutting speed answered.
4. the flat surface grinding method of workpiece according to claim 1 and 2, it is characterised in that be previously set higher than emery wheel
Maximum load threshold value during cutting returns load threshold value, be ground load exceed return load threshold value when, specifying
While returning speed and return emery wheel, it is ground.
5. the flat surface grinding method of workpiece according to claim 1 and 2, it is characterised in that before sparking out, repeatedly
Carry out the incision of emery wheel and return.
6. the flat surface grinding method of workpiece according to claim 1 and 2, it is characterised in that outpaced in grinding load
When limiting the load threshold value of execution, even if after, feelings of the grinding load reduction to the load threshold value of the cutting speed of regulation
Under condition, emery wheel still is cut to be slower than the limitation cutting speed of the cutting speed of regulation, limitation cutting speed is not accelerated to
Degree above.
7. the method for grinding of workpiece according to claim 3, it is characterised in that when being previously set the cutting higher than emery wheel
Maximum load threshold value returns load threshold value, be ground load exceed return load threshold value when, with what is specified returning speed
While returning emery wheel, it is ground.
8. the flat surface grinding method of workpiece according to claim 3, it is characterised in that before sparking out, enter repeatedly
The incision of row emery wheel with return.
9. the flat surface grinding method of workpiece according to claim 3, it is characterised in that outpaced limitation in grinding load
During the load threshold value of execution, even if after, in the case of the load threshold value of grinding load reduction to the cutting speed of regulation,
Emery wheel still is cut to be slower than the limitation cutting speed of the cutting speed of regulation, is not accelerated to more than limitation cutting speed
Degree.
10. a kind of surface grinding machine, the surface grinding machine carries out cross feed grinding by emery wheel to workpiece, and the surface grinding machine includes：
Grinding load measurement mechanism, the grinding load measurement mechanism determines the grinding load of the emery wheel in grinding；Speed set mechanism, should
Speed set mechanism corresponds to the cutting speed of multiple multiple emery wheels of load threshold value setting；Speed control mechanism, the speed control
Mechanism in the following manner on the basis of each load threshold value, with the cutting speed corresponding with each load threshold value to the speed of emery wheel
Increased and decreased, which is：While the grinding load in comparing grinding is with load threshold value, the rising of adjoint grinding load,
Decline, the cutting speed to emery wheel carries out speedup, deceleration.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015183134A JP6510374B2 (en) | 2015-09-16 | 2015-09-16 | Method of surface grinding of workpiece and surface grinding machine |
| JP2015-183134 | 2015-09-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106881639A true CN106881639A (en) | 2017-06-23 |
| CN106881639B CN106881639B (en) | 2021-03-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201610824809.5A Active CN106881639B (en) | 2015-09-16 | 2016-09-14 | Method for grinding surface of workpiece and surface grinding machine |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20170072529A1 (en) |
| JP (1) | JP6510374B2 (en) |
| KR (1) | KR102573501B1 (en) |
| CN (1) | CN106881639B (en) |
| TW (1) | TWI703010B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110888396A (en) * | 2018-09-07 | 2020-03-17 | 发那科株式会社 | Numerical controller |
| CN112157585A (en) * | 2020-08-24 | 2021-01-01 | 河南捷利达超硬制品有限公司 | Grinding control method |
| CN114985844A (en) * | 2022-06-28 | 2022-09-02 | 湖南中大创远数控装备有限公司 | Grinding method for spiral bevel gear |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020025989A (en) * | 2018-08-09 | 2020-02-20 | 株式会社ディスコ | Grinding device |
| WO2022137525A1 (en) * | 2020-12-25 | 2022-06-30 | 株式会社ジーベックテクノロジー | Control method for grinder holder, grinder holder, and grinding tool |
| CN117415730B (en) * | 2023-12-19 | 2024-03-12 | 江苏京创先进电子科技有限公司 | Thinning control method, system and thinning equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63150158A (en) * | 1986-12-10 | 1988-06-22 | Sumitomo Electric Ind Ltd | Cut-in device of end surface grinder |
| US5044125A (en) * | 1988-09-02 | 1991-09-03 | Cincinnati Milacron-Heald Corp. | Method and apparatus for controlling grinding processes |
| JP2002028860A (en) * | 2000-07-17 | 2002-01-29 | Sumitomo Heavy Ind Ltd | Grinding machine |
| JP2006035406A (en) * | 2004-07-30 | 2006-02-09 | Nachi Fujikoshi Corp | Surface grinding device |
| CN1905959A (en) * | 2004-12-02 | 2007-01-31 | 三菱日立制铁机械株式会社 | On-line grinding method for work roll |
| JP2013226625A (en) * | 2012-04-26 | 2013-11-07 | Disco Corp | Grinding method and grinding device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6056821A (en) * | 1983-09-09 | 1985-04-02 | Honda Motor Co Ltd | Gear grinder |
| KR0167021B1 (en) * | 1993-03-15 | 1999-02-01 | 카타다 테쯔야 | Automatic grinding apparatus |
| US5827111A (en) * | 1997-12-15 | 1998-10-27 | Micron Technology, Inc. | Method and apparatus for grinding wafers |
| JP2005279882A (en) * | 2004-03-30 | 2005-10-13 | Seiko Instruments Inc | Grinding device |
| JP5301823B2 (en) * | 2007-12-06 | 2013-09-25 | 株式会社ニデック | Eyeglass lens peripheral processing equipment |
| EP2457689B1 (en) * | 2009-07-22 | 2013-06-26 | JTEKT Corporation | Method and device for preventing slip of work piece |
-
2015
- 2015-09-16 JP JP2015183134A patent/JP6510374B2/en active Active
-
2016
- 2016-08-15 US US15/236,667 patent/US20170072529A1/en not_active Abandoned
- 2016-09-08 KR KR1020160115480A patent/KR102573501B1/en active IP Right Grant
- 2016-09-13 TW TW105129696A patent/TWI703010B/en active
- 2016-09-14 CN CN201610824809.5A patent/CN106881639B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63150158A (en) * | 1986-12-10 | 1988-06-22 | Sumitomo Electric Ind Ltd | Cut-in device of end surface grinder |
| US5044125A (en) * | 1988-09-02 | 1991-09-03 | Cincinnati Milacron-Heald Corp. | Method and apparatus for controlling grinding processes |
| JP2002028860A (en) * | 2000-07-17 | 2002-01-29 | Sumitomo Heavy Ind Ltd | Grinding machine |
| JP2006035406A (en) * | 2004-07-30 | 2006-02-09 | Nachi Fujikoshi Corp | Surface grinding device |
| CN1905959A (en) * | 2004-12-02 | 2007-01-31 | 三菱日立制铁机械株式会社 | On-line grinding method for work roll |
| JP2013226625A (en) * | 2012-04-26 | 2013-11-07 | Disco Corp | Grinding method and grinding device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110888396A (en) * | 2018-09-07 | 2020-03-17 | 发那科株式会社 | Numerical controller |
| CN110888396B (en) * | 2018-09-07 | 2024-03-05 | 发那科株式会社 | Numerical controller |
| CN112157585A (en) * | 2020-08-24 | 2021-01-01 | 河南捷利达超硬制品有限公司 | Grinding control method |
| CN114985844A (en) * | 2022-06-28 | 2022-09-02 | 湖南中大创远数控装备有限公司 | Grinding method for spiral bevel gear |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106881639B (en) | 2021-03-30 |
| JP6510374B2 (en) | 2019-05-08 |
| KR102573501B1 (en) | 2023-08-31 |
| TWI703010B (en) | 2020-09-01 |
| KR20170033233A (en) | 2017-03-24 |
| TW201718179A (en) | 2017-06-01 |
| US20170072529A1 (en) | 2017-03-16 |
| JP2017056516A (en) | 2017-03-23 |
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