CN106847660B - A kind of middle high energy electron rifle - Google Patents
A kind of middle high energy electron rifle Download PDFInfo
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- CN106847660B CN106847660B CN201710217541.3A CN201710217541A CN106847660B CN 106847660 B CN106847660 B CN 106847660B CN 201710217541 A CN201710217541 A CN 201710217541A CN 106847660 B CN106847660 B CN 106847660B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a kind of middle high energy electron rifles, including：Q9 electron gun, differential extraction pipe, electrode flange and high pressure arrangement plates；Wherein, electrode flange is fixed on differential extraction pipe, and Q9 arrangement plates of high pressure are fixed at electrode flange rear end；Flange base, differential extraction interface and vacuum meter interface are further respectively had on differential extraction pipe；Electron gun is fixed on the inside of flange base interface；Electron gun includes：Hot cathode filament, tabletting, grid pedestal, anode, focusing electrode, deflection mechanism, molybdenum sheet, the first insulation spacer, the second insulation spacer, third insulation spacer, pipette tips and outer barrel.For the electron gun due to the secondary focusing lens constituted using grid pedestal, anode, focusing electrode, focusing performance is good good with parallel performance, and setting deflection mechanism makes beam spot position adjustable in pipette tips, and the electron gun structure is simple and performance is stablized.
Description
Technical field
The present invention relates to electro-optical device field, high energy electron rifle in being used more particularly to a kind of electronics energy loss spectrometer.
Background technology
In atomic and molecular physics section field, the experimental method of electron scattering is usually used, by measuring atom and molecule
Kinetic parameter obtains the internal structural information of atom and molecule.In this course, frequently with experimental facilities have：Electronics energy
Amount loss spectrometer, Electron Momentum Spectrometer, Auger electron spectrometer, the key technology of these equipment are to the accurate of electronic beam current
Control and detection.Such as in electronic energy loss spectrometer, from electron gun be emitted electron beam after energy monochromatic device monochrome,
It is collided with sample gas, then by energy analyzer collection analysis.In order to obtain, beam intensity is high, monochromaticjty is good, the angle of divergence
Spend small electronic beam current, one is essential the electron gun of well focussed.
In existing electron gun, the often intensity of line emphatically, and it is of less demanding to the focusing effect of line, the depth of parallelism.
But electron scattering is tested, beam spot and the depth of parallelism are to influence one of the key factor of instrument performance index, and beam spot is smaller, puts down
Row degree is higher, and the energy resolution of electron spectrometer is better.On the other hand, commonly using does not have deflection mechanism inside electron gun, need electricity
Sub- rifle is mechanically matched with experimental provision, and it is flexibly adjustable to cannot achieve multi-angle, and debugging gets up to be more troublesome.In addition some
Medium energy electrons rifle utilizes magnetic core logical circuit deflection electron beam, and since the shielding in magnetic field is extremely difficult, deflection magnetic field can interfere electron beam to exist
Track in analyzer seriously affects the energy resolution of electron spectrometer.
Invention content
Based on the problems of prior art, the object of the present invention is to provide a kind of middle high energy electron rifle, focusings
Can be good good with parallel performance, beam spot position is adjustable, and simple in structure and performance is stablized.
The purpose of the present invention is what is be achieved through the following technical solutions：
The embodiment of the present invention provides a kind of middle high energy electron rifle, including：
Q9 electron gun, differential extraction pipe, electrode flange and high pressure arrangement plates；Wherein,
The electrode flange is fixed on the differential extraction pipe, and the high pressure Q9 arrangements plate is fixed at institute
State electrode flange rear end；
Flange base, differential extraction interface and vacuum meter interface are further respectively had on the differential extraction pipe；
The electron gun is fixed on the inside of the flange base interface；
The electron gun includes：Outer barrel, the outer barrel are interior from rear to the preceding pedestal of fixed setting grid successively, anode and focusing
Pole, the anode rear end are extend into the grid pan frontward end, and the focusing electrode rear end is extend into the anode front end, should
Pipette tips are arranged in outer cylinder front end, and deflection mechanism is fixedly installed in the pipette tips；The anode front end is equipped with the first molybdenum sheet with through-hole,
The focusing electrode front end is equipped with the second molybdenum sheet with through-hole；Between the grid pedestal, anode and focusing electrode and the outer barrel
Equipped with insulation spacer, third insulation spacer is equipped between the deflection mechanism and the pipette tips；The grid pedestal is cylindrical shape,
Conical opening pedestal is equipped in the grid pedestal, hot cathode filament is fixedly mounted on the conical opening bottom of the grid pedestal by tabletting
In seat, the wedge-shaped annulus of a circle is equipped with far from hot cathode filament one end on the grid pedestal；
It is described high pressure Q9 arrangement plate through cable respectively with the grid pedestal of the electron gun, anode, focusing electrode, deflection
Mechanism and the electrical connection of hot cathode filament.
As seen from the above technical solution provided by the invention, middle high energy electron rifle provided in an embodiment of the present invention,
It has the beneficial effect that：By the way that grid pedestal, anode and focusing electrode, profit are fixedly installed successively from rear to preceding in the outer barrel of electron gun
The condenser lens formed with focusing electrode with grid pedestal and anode, anode realizes the focusing to electronic beam current, and anode rear end is stretched
Entering into grid pedestal, focusing electrode rear end is extend into anode so that electric fields at different levels interpenetrate, and avoid outfield interference, by
In using secondary focusing lenses guarantee focusing effect；According to secondary focusing lens principle, there are two types of work for electron gun of the present invention
Pattern accelerates focusing mode and deceleration focusing mode, and after tested, electronic beam current can gather well under two kinds of operating modes
Coke, can be according to Power Supplies Condition flexible configuration focused condition；Since hot cathode filament is mounted on the conical opening pedestal of grid pedestal,
And hot cathode filament hair cross hair point is slightly higher than conical opening, it, can be effective when grid pedestal voltage is less than hot cathode lamp filament voltage
Contain hot cathode filament stray electron, retains silk point launching electronics, ensure that the consistency of line original state to a certain extent；
The first, second molybdenum sheet with through-hole is respectively set in anode front end and focusing electrode front end, and then differential air extraction system can be formed, drops
The low requirement to residing vacuum environment extends burn-out life.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill in field, without creative efforts, other are can also be obtained according to these attached drawings
Attached drawing.
Fig. 1 is the overall structure diagrammatic cross-section of the present invention；
Fig. 2 is the electron gun structural profile illustration of the present invention；
Fig. 3 is the focusing simulation drawing of the electron gun of the present invention；
Fig. 4 is the test fittings schematic diagram of the electron gun of the present invention；
Fig. 5 is the beam diameter dimensional drawing that the electron gun of the present invention measures in turbo mode；
Fig. 6 is the beam diameter dimensional drawing that the electron gun of the present invention measures under deceleration mode；
In figure：1, electron gun, 2, differential extraction pipe, 3, electrode flange, 4, Q9 arrangement plates of high pressure, 5, flange base,
6, differential extraction mouth, 7, vacuum meter interface, 8, hot cathode filament, 9, tabletting, 10, grid pedestal, 11, anode, 12, focusing electrode,
13, deflection mechanism, the 14, first molybdenum sheet, the second molybdenum sheets of 141-, the 15, first insulation spacer, the 16, second insulation spacer, 17, third
Insulation spacer, 18, pipette tips, 19, outer barrel.
Specific implementation mode
With reference to the particular content of the present invention, technical solution in the embodiment of the present invention is clearly and completely retouched
It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention
Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts,
Belong to protection scope of the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of middle high energy electron rifle, including：
Q9 electron gun, differential extraction pipe, electrode flange and high pressure arrangement plates；Wherein,
The electrode flange is fixed on the differential extraction pipe, and the high pressure Q9 arrangements plate is fixed at institute
State electrode flange rear end；
Flange base, differential extraction interface and vacuum meter interface are further respectively had on the differential extraction pipe；
The electron gun is fixed on the inside of the flange base interface；
The electron gun includes：Outer barrel, the outer barrel are interior from rear to the preceding pedestal of fixed setting grid successively, anode and focusing
Pole, the anode rear end are extend into the grid pan frontward end, and the focusing electrode rear end is extend into the anode front end, should
Pipette tips are arranged in outer cylinder front end, and deflection mechanism is fixedly installed in the pipette tips；The anode front end is equipped with the first molybdenum sheet with through-hole,
The focusing electrode front end is equipped with the second molybdenum sheet with through-hole；Between the grid pedestal, anode and focusing electrode and the outer barrel
Equipped with insulation spacer, third insulation spacer is equipped between the deflection mechanism and the pipette tips；The grid pedestal is cylindrical shape,
Conical opening pedestal is equipped in the grid pedestal, hot cathode filament is fixedly mounted on the conical opening bottom of the grid pedestal by tabletting
In seat, the wedge-shaped annulus of a circle is equipped with far from hot cathode filament one end on the grid pedestal；
It is described high pressure Q9 arrangement plate through cable respectively with the grid pedestal of the electron gun, anode, focusing electrode, deflection
Mechanism and the electrical connection of hot cathode filament.
Specifically, the differential extraction pipe of high energy electron rifle is equipped with flange base, differential extraction interface and vacuum among the above
Count interface；Wherein, flange base is CF50 interfaces, and electron gun is fixed on the inside of flange base interface；Electrode flange is fixed on
On differential extraction pipe, electrode flange is the 5000V CF electrode flanges of Kurt J.Lesker companies, open on electrode flange there are three
Through-hole, Q9 arrangement plates of high pressure pass through three helical column fixed-electrode method orchid rear ends；Differential extraction interface is DN600 quick-release methods
It is blue；Vacuum meter interface is CF35 flange-interfaces；Differential extraction pipe is decussate texture, the flange base and the electrode flange
It is oppositely arranged, the differential extraction interface is oppositely arranged with the vacuum meter interface.
In above-mentioned electron gun, electron gun is specifically included as shown in Fig. 1 to 2：Hot cathode filament, tabletting, grid pedestal,
Anode, focusing electrode, deflection mechanism, molybdenum sheet, the first insulation spacer, the second insulation spacer, third insulation spacer, pipette tips and outer barrel；
Wherein, hot cathode filament is the tungsten filament of the CL-ISIE/2-10-N models of ENERGY BEAM SCIENCES companies production；Grid
Pole pedestal is cylindrical shape, and a conical opening pedestal is equipped at installation hot cathode filament, and hot cathode filament is mounted on conical opening pedestal
It is interior and be fixed in conical opening pedestal by tabletting, electron beam transmitting can be controlled by controlling grid pedestal voltage, separate
There is a circle wedge shape annulus in hot cathode filament one end, and for tentatively suppressing launching electronics harness shape, hot cathode filament accesses negative high voltage
Power supply, grid pedestal voltage are slightly less than hot cathode lamp filament voltage.
Anode is double cylindrical structures, and the radius of its rear end cylinder is less than the radius of front end cylinder, the anode rear end minor radius
Cylinder one end, which is extend into the grid pedestal, forms infiltration electrical field, prevents outfield from interfering；The anode front end large radius cylinder one
The first molybdenum sheet with 3mm through-holes is set in end, and for stopping large angle scattering electronics and forming differential extraction hole, anode voltage is high
In hot cathode lamp filament voltage, for pulling out electronics.
Focusing electrode is similar to anode, and for double cylindrical structures, the radius of its rear end cylinder is less than the radius of front end cylinder, this is poly-
Burnt pole rear end minor radius cylinder one end is extend into the anode；Band is arranged in outlet in the focusing electrode front end large radius cylinder one end
Second molybdenum sheet of 3mm through-holes.Focusing electrode can access positive high voltage or negative high voltage, and it is saturating can to form secondary focusing with anode
Mirror realizes the further focusing to electron beam.
Deflection mechanism is made of four opposite deflecting electrodes for being fixed on the pipette tips inner wall, and each deflecting electrode is equal
For sector.Deflecting electrode accesses deflection voltage, realizes the directions electronic beam current XY two-dimensional deflection.
Grid pedestal, anode, focusing electrode are fixed on by the first insulation spacer and the second insulation spacer in outer barrel, and machine is deflected
Structure is fixed on by third insulation spacer in pipette tips, and pipette tips are coordinated with outer barrel by holding screw, forms electron gun outer layer screen
It covers.It is the first insulation spacer to be specifically arranged between the outer barrel outside grid pedestal and anode；The anode and focusing electrode
It is the second insulation spacer to be arranged between the outer barrel；It is third insulation to be arranged between the deflection mechanism and the pipette tips
Gasket.Wherein, the first insulation spacer is formed by 3 in 120 degree of fan-shaped teflon plates separated, for connection and fixed railing
Pole pedestal and anode mechanism, and by grid pedestal, anode mechanism comes with outer barrel mutually insulated；Second insulation spacer is one poly-
Tetrafluoroethene cylinder, for connection and fixed anode mechanism and focusing, and by anode mechanism, focusing is mutual with outer barrel
Insulation is come, and cylinder side slot milling is for connecting up.Third insulation spacer is 4 opposite fan-shaped teflon plate groups
At fan-shaped polytetrafluoroethylene (PTFE) on piece is provided with through-hole, is used for deflecting electrode and pipette tips inner wall isolated insulation.
In above-mentioned electron gun, tabletting, grid pedestal, anode, focusing electrode, the deflecting electrode of deflection mechanism, pipette tips and outer
Cylinder is all made of 316L stainless steels, avoids magnetic interference.
In above-mentioned electron gun, inside grid pedestal, anode, focusing electrode, deflecting electrode and pipette tips and first, second
Molybdenum sheet surface is coated with aquadag, and all electrodes being achieved on electron beam path are coated with aquadag, can be effective
Ground reduces electronics Secondary Emission, stablizes beam status.
The middle high energy electron rifle of the present invention is specifically described in further detail below in conjunction with the accompanying drawings.
As shown in figs. 1 to 6, the embodiment of the present invention provides a kind of middle high energy electron rifle, including：Electron gun 1, differential extraction
Q9 pipe 2, electrode flange 3, high pressure arrangement plates 4；
As shown in Figure 1, differential extraction pipe 2 is equipped with flange base 5, differential extraction interface 6, vacuum meter interface 7, flange bottom
Seat 5 is CF50 interfaces, and electron gun 1 is fixed on the inside of 5 interface of flange base, and electrode flange 3 is fixed on differential extraction pipe 2,
Electrode flange 3 is the 5000V CF electrode flanges of Kurt J.Lesker companies, opens that there are three through-hole, high pressure Q9 on electrode flange 3
Head arrangement plate 4 is fixed on 3 rear end of electrode flange by three helical columns；Differential extraction interface 6 is DN600 quick release flanges；Vacuum
Meter interface 7 is CF35 flange-interfaces.
As shown in Fig. 2, electron gun 1 includes：Hot cathode filament 8, tabletting 9, grid pedestal 10, anode 11, focusing electrode 12,
Deflection mechanism 13, molybdenum sheet 14, the first insulation spacer 15, the second insulation spacer 16, third insulation spacer 17, pipette tips 18 and outer barrel
19；
Wherein, hot cathode filament 8 is the CL-ISIE/2-10-N models of ENERGY BEAM SCIENCES companies production
Tungsten filament.Grid pedestal 10 is cylindrical shape, has a conical opening pedestal, hot cathode filament 8 to be mounted at installation hot cathode filament 8
It is fixed on grid pedestal in conical opening pedestal and by circular ring shape tabletting 9, can be controlled by controlling 10 voltage of grid pedestal
Electron beam emits, and is equipped with the wedge-shaped annulus of a circle far from 8 one end of hot cathode filament on grid pedestal 10, emits for tentatively suppressing
Beam shapes, hot cathode filament 8 access negative high voltage power source, and 10 voltage of grid pedestal is typically slightly lower than 8 voltage of hot cathode filament；
Anode 11 is double cylindrical structures, and the smaller one end of circular cylinder radius is stretched into grid pedestal 10, and infiltration electrical field is formed, and is prevented
Only outfield is interfered.There is the first molybdenum sheet 14 in the larger one end of circular cylinder radius, 3mm through-holes is provided on the first molybdenum sheet 14, for stopping
Large angle scattering electronics simultaneously forms differential extraction hole, and 11 voltage of anode is higher than 8 voltage of hot cathode filament, for pulling out electronics.
Focusing electrode 12 is similar to anode 11, and for double cylindrical structures, the smaller one end of circular cylinder radius is stretched into anode 11, cylinder
There is the second molybdenum sheet 141 in the larger one end exit of radius, and 3mm through-holes are provided on the second molybdenum sheet 141, and focusing electrode 12 can access just
High pressure or negative high voltage can form secondary focusing lens with anode 11, realize the further focusing to electron beam.
Deflection mechanism 13 is fixed on 18 inner wall of pipette tips by four opposite deflecting electrodes and forms, and deflecting electrode is sector, partially
Turn electrode access deflection voltage, realizes the directions electronic beam current XY two-dimensional deflection；
First insulation spacer 15 is made of three pieces in 120 degree of fan-shaped teflon plates separated, which is provided with threaded hole,
For fixing grid pedestal 10 and anode 11, and fan-shaped teflon plate is leaned in grid pedestal 10 and anode 11 and is nearby equipped with one
Step can come grid pedestal 10, anode 11 and 19 mutually insulated of outer barrel；Second insulation spacer 16 is a polytetrafluoroethylene (PTFE)
Cylinder, for fixed anode 11 and focusing electrode 12, and in anode 11 and focusing electrode 12 by nearby there is a step, can by anode 11,
Focusing electrode 12 comes with 19 mutually insulated of outer barrel, and polytetrafluoroethylene (PTFE) cylinder side slot milling is for connecting up；Third insulation spacer
17 be four opposite fan-shaped teflon plate compositions, and fan-shaped polytetrafluoroethylene (PTFE) on piece is provided with through-hole, is used for deflection mechanism
13 deflecting electrode and 18 inner wall isolated insulation of pipette tips；
Grid pedestal 10, anode 11 and focusing electrode 23 are fixed on outer by the first insulation spacer 15 and the second insulation spacer 16
In cylinder 19, deflection mechanism 13 is fixed on by third insulation spacer 17 in pipette tips 18, and pipette tips 18 pass through holding screw with outer barrel 19
Cooperation forms electron gun outer shield.
Tabletting 9, grid pedestal 10, anode 11, focusing electrode 12, deflecting electrode, pipette tips 18, outer barrel 19 are all stainless by 316L
Steel is made, and is avoided that magnetic interference.
Grid pedestal 10, anode 11, focusing electrode 12, deflecting electrode, 18 inside of pipette tips and 14 surface of molybdenum sheet are coated with colloid
Graphite can reduce secondary.
It is illustrated in figure 3 focusing simulation drawing of the present invention under 1500V acceleration patterns, simulated conditions voltage is：Hot cathode
Filament -1500V, grid pedestal -1503V, anode -885V, focusing electrode 2600V, the at this time beam diameter at from electron gun muzzle 27mm
For 0.70mm.
Fig. 4 show the test fittings schematic diagram of electron gun of the present invention, A1It for detection pedestal, is sleeved on outside electron gun, base
It is provided with diameter a=1mm apertures, A on seat bottom plate2, A3, A4For Detection electrode, A2, A3On be provided with diameter a=1mm apertures, wherein poly-
Focus is from muzzle 10mm, A1Pedestal bottom plate Range Focusing point distance D=17mm, other Detection electrode spacing d=30mm, Mei Geji
The half angle that aperture on plate corresponds to focus point is：θ1=1.68 °, θ2=0.61 °, θ3=0.37 °, detect pedestal and detection bottom
The corresponding size of current of plate is I1,I2,I3,I4, beam diameter size and transmitting case can be obtained according to current distribution.Electronic beam current
Density Distribution meets Gaussian Profile along beam cross section radial direction, the electronic beam current intensity I in radius rcFor：
By detecting I simultaneously1,I2,I3,I4, according to：
The standard deviation sigma of Gaussian Profile can be derived byr, electron beam diameter can use Gaussian function full width at half maximumIt indicates；
Fig. 5 show the focusing beam spot size figure that electron gun of the present invention is tested under 1500V acceleration patterns, horizontal in figure
Coordinate is anode voltage, and ordinate is to focus pole tension, and the voltage under best focused condition is：Hot cathode filament-
1500V, grid pedestal -1503V, anode -885V, focusing electrode 2600V, beam diameter is at from electron gun muzzle 27mm at this time
0.95mm, line size are 6.273 μ A；
Fig. 6 show the focusing beam spot size figure that electron gun of the present invention is tested under 1500V deceleration modes, horizontal in figure
Coordinate is anode voltage, and ordinate is to focus pole tension, and the voltage under best focused condition is：Hot cathode filament-
1501.5V, grid pedestal -1503V, anode 200V, focusing electrode -1080V, beam diameter is at from electron gun muzzle 27mm at this time
0.75mm, line size are 2.168 μ A；Compared to accelerate pattern, have broader, more stable focus voltage section, at this time root
According to the current distribution on test fittings Detection electrode, it is known that electron beam divergence half angle is less than θ1=1.68 ° account for 69.96%,
It dissipates half angle and is less than θ2=0.61 ° accounts for 41.78%, and diverging half angle is less than θ3=0.37 ° accounts for 21.97%.The distribution is close
Seemingly meet the Gaussian Profile of standard deviation sigma=0.79 °.
More than, it is merely preferred embodiments of the present invention, but scope of protection of the present invention is not limited thereto, it is any
Those familiar with the art in the technical scope of present disclosure, all answer by the change or replacement that can be readily occurred in
It is included within the scope of the present invention.Therefore, protection scope of the present invention should be with the protection domain of claims
It is accurate.
Claims (9)
1. a kind of middle high energy electron rifle, which is characterized in that including：
Q9 electron gun, differential extraction pipe, electrode flange and high pressure arrangement plates；Wherein,
Electrode flange is fixed on differential extraction pipe, and Q9 arrangement plates of high pressure are fixed at electrode flange rear end；
Flange base, differential extraction interface and vacuum meter interface are further respectively had on differential extraction pipe；
Electron gun is fixed on the inside of flange base interface；
Electron gun includes：Outer barrel, the outer barrel are interior from rear to the preceding pedestal of fixed setting grid successively, anode and focusing electrode, anode
Rear end is extend into grid pan frontward end, and focusing electrode rear end is extend into anode front end, outer cylinder front end setting pipette tips, in pipette tips
Deflection mechanism is fixedly installed；Anode front end is equipped with the first molybdenum sheet with through-hole, and focusing electrode front end is equipped with the second molybdenum sheet with through-hole；
It is equipped with insulation spacer between grid pedestal, anode and focusing electrode and outer barrel, third is equipped between deflection mechanism and pipette tips and is insulated
Gasket；The grid pedestal is cylindrical shape, and conical opening pedestal is equipped in the grid pedestal, and hot cathode filament is fixed by tabletting pacifies
In the conical opening pedestal of the grid pedestal, a circle wedge is equipped with far from hot cathode filament one end on the grid pedestal
Shape annulus；
The arrangement plates of high pressure Q9 through cable respectively with grid pedestal, anode, focusing electrode, deflection mechanism and the hot cathode of electron gun
Filament is electrically connected.
2. a kind of middle high energy electron rifle according to claim 1, which is characterized in that anode is double cylindrical structures, its rear end cylinder
Radius be less than the radius of front end cylinder, which, which extend into grid pedestal, forms infiltration electricity
；The first molybdenum sheet with 3mm through-holes is set in the anode front end large radius cylinder one end.
3. according to a kind of middle high energy electron rifle of claims 1 or 2, which is characterized in that focus extremely double cylindrical structures, its rear end
The radius of cylinder is less than the radius of front end cylinder, which extend into anode；The focusing electrode
The second molybdenum sheet with 3mm through-holes is set in the large radius cylinder one end of front end.
4. according to a kind of middle high energy electron rifle of claims 1 or 2, which is characterized in that deflection mechanism is by being fixed on pipette tips inner wall
Four opposite deflecting electrodes compositions, each deflecting electrode is sector.
5. according to a kind of middle high energy electron rifle of claims 1 or 2, which is characterized in that between grid pedestal and anode and outer barrel
Setting is the first insulation spacer；
It is the second insulation spacer to be arranged between anode and focusing electrode and outer barrel；
It is third insulation spacer to be arranged between deflection mechanism and pipette tips.
6. a kind of middle high energy electron rifle according to claim 5, which is characterized in that the first insulation spacer is in 120 degree points by three pieces
The fan-shaped teflon plate composition opened；In each sector teflon plate one is equipped between grid pedestal and anode
Rank；
Second insulation spacer is a polytetrafluoroethylene (PTFE) cylinder, is had between anode is with focusing electrode in the polytetrafluoroethylene (PTFE) cylinder
One step, second insulation spacer outside are equipped with wiring space；
Third insulation spacer is made of four opposite fan-shaped teflon plates, each fan-shaped polytetrafluoroethyl-ne of the third insulation spacer
Alkene on piece is equipped with through-hole.
7. according to a kind of middle high energy electron rifle of claims 1 or 2, which is characterized in that pipette tips are solid by holding screw with outer barrel
Fixed connection.
8. according to a kind of middle high energy electron rifle of claims 1 or 2, which is characterized in that tabletting, grid pedestal, anode, focusing
Pole, the deflecting electrode of deflection mechanism, pipette tips and outer barrel are all made of 316L stainless steels and are made；
Inside grid pedestal, anode, focusing electrode, the deflecting electrode of deflection mechanism and pipette tips, the first molybdenum sheet surface, the second molybdenum sheet table
Face is coated with aquadag.
9. a kind of middle high energy electron rifle according to claim 1, which is characterized in that differential extraction pipe is decussate texture, flange
Pedestal is oppositely arranged with electrode flange, and differential extraction interface is oppositely arranged with vacuum meter interface.
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| FR2861215B1 (en) * | 2003-10-20 | 2006-05-19 | Calhene | ELECTRON GUN WITH FOCUSING ANODE, FORMING A WINDOW OF THIS CANON, APPLICATION TO IRRADIATION AND STERILIZATION |
| CN201813579U (en) * | 2009-12-14 | 2011-04-27 | 北京有色金属研究总院 | Electronic gun for electron beam melting furnace |
| CN201804836U (en) * | 2009-12-14 | 2011-04-20 | 北京有色金属研究总院 | Electron gun |
| US8461526B2 (en) * | 2010-12-01 | 2013-06-11 | Kla-Tencor Corporation | Electron beam column and methods of using same |
| CN103000479B (en) * | 2012-12-24 | 2015-07-15 | 中国科学院大连化学物理研究所 | Novel electronic gun |
| JP6437316B2 (en) * | 2014-02-14 | 2018-12-12 | 日本電子株式会社 | Electron gun, three-dimensional additive manufacturing apparatus, and electron gun control method |
| CN106024561B (en) * | 2016-08-04 | 2018-01-05 | 桂林狮达机电技术工程有限公司 | Air electron beam process equipment electron gun |
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2017
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