CN106841796A - The online unknown frequency microwave phase detector device of clamped beam indirectly heat - Google Patents
The online unknown frequency microwave phase detector device of clamped beam indirectly heat Download PDFInfo
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- CN106841796A CN106841796A CN201710052696.6A CN201710052696A CN106841796A CN 106841796 A CN106841796 A CN 106841796A CN 201710052696 A CN201710052696 A CN 201710052696A CN 106841796 A CN106841796 A CN 106841796A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
- G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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Abstract
The online unknown frequency microwave phase detector device of clamped beam indirectly heat of the invention is made up of six port clamped beam couplers, channel selector switch, microwave frequency detector, microwave phase detector device cascade；Six port clamped beam couplers are made up of co-planar waveguide, dielectric layer, air layer and clamped beam；Co-planar waveguide is in SiO2On layer, the lower section of clamped beam is dielectric layer, and the co-planar waveguide length between two clamped beams is λ/4；First port is to the 3rd port, the 4th port and identical to the power degree of coupling of fifth port, the 6th port, measured signal is input into through first port, by second port output to subordinate's process circuit, by the 4th port and the 6th output to microwave phase detector device, exported to channel selector switch by the 3rd port and fifth port；7th port of channel selector switch and the 8th connects indirect heating type microwave power detector, and the 9th port and the tenth connect microwave frequency detector；Realize 0 360 ° of phase on-line checkings to unknown frequency signal.
Description
Technical field
The present invention proposes the online unknown frequency microwave phase detector device of clamped beam indirectly heat, belongs to microelectron-mechanical
The technical field of system.
Background technology
The parameters such as amplitude, power, the frequency of microwave signal are traditional measurement parameters.Microwave signal phase measurement not only with
Power measurement is related, and itself also occupies highly important status in microwave measurement.With the increase of frequency, signal
Wavelength is progressively approached with various component sizes in circuit, and voltage, electric current exist all in the form of ripple in circuit, the phase of signal
Postpone to cause that not only the voltage of various location, electric current are different in synchronization amplitude in circuit, and at same position
Voltage, electric current also not different in the same time.Therefore grasped in microwave frequency band and the phase of control signal is necessary
, the phase of microwave signal is also just into an important measurement parameter.The present invention is based on a kind of realization of Si technological designs
The online unknown frequency microwave phase detector device of clamped beam indirectly heat of online phase-detection.
The content of the invention
Technical problem：It is an object of the invention to provide a kind of online unknown frequency microwave phase inspection of clamped beam indirectly heat
Device is surveyed, fraction signal is coupled using six port clamped beam couplers carries out frequency detecting and phase-detection, and major part is examined
Surveying signal can be input in next stage process circuit, realize the 0-360 ° of phase on-line checking to unknown frequency signal, and tool
There is the benefit of low-power consumption.
Technical scheme：The online unknown frequency microwave phase detector device of clamped beam indirectly heat of the invention is consolidated by six ports
Strutbeam coupler, channel selector switch, microwave frequency detector, microwave phase detector device composition；
The first port of six port clamped beam couplers is to the 3rd port, the 4th port and first port to the 5th end
Mouth, the power degree of coupling of the 6th port distinguish identical, and measured signal is input into through first port, by second port output to subordinate
Reason circuit, by the 4th port and the output of the 6th port to a Wilkinson power combiners of microwave phase detector device and the
Two Wilkinson power combiners, and it is defeated by a Wilkinson power combiners and the 2nd Wilkinson power combiners
Go out to the 3rd indirect heating type microwave power detector and the 4th indirect heating type microwave power detector；By the 3rd port and
Channel selector switch is arrived in the output of five ports；7th port of channel selector switch and the 8th port connect the first indirect heating type respectively
Microwave power detector and the second indirect heating type microwave power detector, the 9th port of channel selector switch and the tenth port
Connect the 3rd Wilkinson power combiners of microwave frequency detector, and by the 3rd Wilkinson power combiners output to the
Five indirect heating type microwave power detectors realize the phase on-line checking to unknown frequency signal.
The structure of wherein six port clamped beam couplers is symmetrical set with its center line, by co-planar waveguide, dielectric layer,
Air layer and across clamped beam above it constitute；Co-planar waveguide is produced on SiO2On layer, anchor area is produced on co-planar waveguide, Gu
The lower section metallization medium layer of strutbeam, and collectively form coupled capacitor structure, being total between two clamped beams with air layer, clamped beam
Face waveguide length is λ/4；
Beneficial effect：
1) the online unknown frequency microwave phase detector device of clamped beam indirectly heat of the invention by the phase of microwave signal,
Frequency is surveyed module and is integrated together, and coupling fraction signal using six port clamped beam couplers carries out frequency detecting and phase
Detection, and most of signal can be input in next stage process circuit, realize existing 0-360 ° of phase of unknown frequency signal
Line is detected.
2) the online unknown frequency microwave phase detector device application indirectly heat of clamped beam indirectly heat of the invention declines
Wave power sensor detects the power of microwave signal, with preferable microwave property and without DC power；
3) the two Wilkinson power combiners of microwave phase detector module application in the present invention, a Wilkinson
Power divider and two indirect heating type microwave power detectors realize 0-360 ° of phase-detection.
Brief description of the drawings
Fig. 1 is the theory diagram of the online unknown frequency microwave phase detector device of clamped beam indirectly heat of the present invention,
Fig. 2 is the top view of six port clamped beam couplers,
Fig. 3 is AA ' the directional profile figures of the port clamped beam couplers of Fig. 2 six,
Fig. 4 is the top view of channel selector switch,
Fig. 5 is AA ' the directional profile figures of Fig. 4 channel selector switch,
Fig. 6 is the top view of Wilkinson power divider/synthesizers,
Fig. 7 is the top view of indirect heating type microwave power detector,
Fig. 8 is AA ' the directional profile figures of Fig. 7 indirect heating type microwave power detectors.
Figure includes：Six port clamped beam couplers 1, channel selector switch 2, microwave frequency detector 3, microwave phase inspection
Survey device 4, the first indirect heating type microwave power detector 5-1, the second indirect heating type microwave power detector 5-2, between the 3rd
Meet heated microwave power sensor 5-3, the 4th indirect heating type microwave power detector 5-4, the 5th indirectly heat type micro-wave
Power sensor 5-5, Wilkinson a power combiner 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson
Power divider 7, Si substrates 8, SiO2Layer 9, co-planar waveguide 10, anchor area 11, dielectric layer 12, clamped beam 13, cantilever beam 14, air
Layer 15, air bridges 16, asymmetrical coplanar stripline 17, isolation resistance 18, terminal resistance 19, P-type semiconductor arm 20, N-type semiconductor
Arm 21, output electrode 22, hot junction 23, cold end 24, substrate film structure 25, pull-down electrode 26, first port 1-1, second port
1-2, the 3rd port 1-3, the 4th port 1-4, fifth port 1-5, the 6th port 1-6, the 7th port 2-1, the 8th port 2-2,
9th port 2-3, the tenth port 2-4, the tenth Single port 6-1, the tenth Two-port netwerk 6-2, the 13rd port 6-3.
Specific embodiment
The online unknown frequency microwave phase detector device of clamped beam indirectly heat of the present invention is by six port clamped beam couplers
1, channel selector switch 2, microwave frequency detector 3, the cascade of microwave phase detector device 4 is constituted；Wherein, six port clamped beam coupling
Device 1 is made up of co-planar waveguide 10, dielectric layer 12, air layer 15 and clamped beam 13；Co-planar waveguide 10 is produced on SiO2On layer 9, Gu
The anchor area 11 of strutbeam 13 is produced on co-planar waveguide 10, and the lower section of clamped beam 13 deposition has a dielectric layer 12, and with air layer 15, solid
Strutbeam 13 collectively forms coupled capacitor structure, and the length of co-planar waveguide 10 between two clamped beams 13 is λ/4；Channel selector switch
2 are made up of co-planar waveguide 10, anchor area 11, dielectric layer 12, cantilever beam 14, pull-down electrode 26；The anchor area 11 of cantilever beam 14 is produced on
On co-planar waveguide 10, the lower section of cantilever beam 14 makes pull-down electrode 26, and is collectively formed out with the upper dielectric layer 12 of pull-down electrode 26
Close structure；Microwave frequency detector 3 is passed by the 3rd Wilkinson power combiners 6-3 and the 5th indirect heating type microwave power
Sensor 5-5 cascades are constituted；Microwave phase detector device 4 is by the 3rd indirect heating type microwave power detector 5-3, the 4th indirectly heat
Type micro-wave power sensor 5-4, Wilkinson power combiner 6-1, a 2nd Wilkinson power combiner 6-2,
Wilkinson power dividers 7 are constituted；First Wilkinson power combiner 6-1, the 2nd Wilkinson power combiners 6-
2 is identical with the topological structure of Wilkinson power dividers 7, by co-planar waveguide 10, asymmetrical coplanar stripline 17 and air bridges
15th, isolation resistance 18 is constituted, and signal is Wilkinson power dividers 7 from the input of port 11, and signal is input into from port 12,13
It is a Wilkinson power combiners 6-1 or the 2nd Wilkinson power combiners 6-2；
The port 1-3 of first port 1-1 to the 3rd, the 4th port 1-4 and first port 1- of six port clamped beam couplers 1
1 to fifth port 1-5, the power degree of coupling difference of the 6th port 1-6 is identical；Measured signal is through six port clamped beam couplers 1
First port 1-1 input, by second port 1-2 output to subordinate's process circuit, by the 4th port 1-4 and the 6th port 1-6
Microwave phase detector device 4 is exported, by the 3rd port 1-3 and fifth port 1-5 outputs to channel selector switch 2；Channel selecting
Between the 7th port 2-1 and the 8th port 1-2 of switch 2 meet the first indirect heating type microwave power detector 5-1 and second respectively
Heated microwave power sensor 5-2 is met, the 3rd port 3 of channel selector switch 2 and the 4th port 4 connect microwave frequency detector
3, realize the signal after the phase-detection to unknown frequency signal, and detection and can be used for other process circuits.It adds indirectly
Hot type microwave power detector and microwave phase, the Cleaning Principle of frequency can be explained as follows：
Indirect heating type microwave power detector：Microwave power as shown in Figure 7 is input into from input port, by co-planar waveguide
10 are input to terminal resistance 19 is converted to heat；P-type semiconductor arm 20 and N-type semiconductor arm 21 constitute thermocouple, thermocouple
Near the region of terminal resistance 19 as hot junction 23, thermocouple is near the region of output electrode 22 as cold end 24；Imitated according to Seebeck
Should, input microwave power size is understood by the thermoelectrical potential for measuring output electrode 22；The back of hot junction 23 of thermocouple subtracts substrate
Thin composition substrate film structure 25 is used to improve detection sensitivity.
Frequency detecting：Threeth port 1-3 and fiveth end of the microwave signal as shown in Figure 1 through six port clamped beam couplers 1
Channel selector switch 2 is arrived in mouth 1-5 outputs；7th port 2-1 of channel selector switch 2 and the 8th port 2-2 connect first and add indirectly
Hot type microwave power detector 5-1 and the second indirect heating type microwave power detector 5-2, the 9th end of channel selector switch 2
Mouth 2-3 and the tenth port 2-4 connects microwave frequency detector 3；The cantilever beam 14 of channel selector switch 2 is grounded, and pull-down electrode 26 connects
Driving voltage, when driving voltage is more than or equal to cut-in voltage, cantilever beam 14 is pulled down into, and passage is strobed；When channel selecting is opened
2 the 7th port 2-1 and the 8th port 2-2 are closed when being strobed, the output coupling of six port clamped beam couplers 1 can be tested out
Power P3And P5.The length of co-planar waveguide 10 between two clamped beams 13 of six port clamped beam couplers 1 is λ/4, now the 3rd
The phase difference of port 1-3 and fifth port 1-5 is 90 °, and the phase difference as shown in formula (1) is the linear function of frequency.
λ is the wavelength for being input into microwave signal, and c is the light velocity, εerFor effective dielectric constant is only relevant with structure.Work as channel selecting
When the port 9 and port 10 of switch 2 are strobed, two way microwave signals carry out power conjunction by Wilkinson power combiners 5
Into, and application indirect heating type microwave power detector 5 detects composite signal power PsSize, can draw defeated according to formula (2)
Enter the frequency of microwave signal.
P3, P5It is the power that the 3rd port 1-3 is coupled with fifth port 1-5, can be by indirect heating type microwave power detector
5 detections are obtained.
Phase detectors：Microwave signal as shown in Figure 1 through six port clamped beam couplers 1 the 4th port 1-4 and the 6th
Port 1-6 is input to microwave phase detector device 4 and carries out phase-detection；Two clamped beams 13 of six port clamped beam couplers 1 it
Between the length of co-planar waveguide 10 be λ/4, now by the two way microwave signals phase difference of the 4th port 1-4 and the 6th port 1-6
It is 90 °；Input power Pr, the reference signal of f (microwave frequency detector 3 is measured) identical with measured signal frequency, reference signal
It is divided into two-way power and phase identical signal through Wilkinson power dividers 7, with the 4th port 1-4 and the 6th port 1-6
Two-way measured signal carry out work(through a Wilkinson power combiners 6-1 and the 2nd Wilkinson power combiners 6-2
Rate synthesizes；3rd indirect heating type microwave power detector 5-3 and the 4th indirect heating type microwave power detector 5-4 is to left and right
Power P after two-way synthesiscs1, Pcs2Detected, and the phase difference and reference signal between to be measured is drawn by formula (3)
P4, P6It is the power that the 4th port 1-4 is coupled with the 6th port 1-6, and P4=P3, P6=P5。
The preparation method of the online unknown frequency microwave phase detector device of clamped beam indirectly heat includes following steps：
1) 4 inches of high resistant Si substrates 8 are prepared, resistivity is 4000 Ω cm, and thickness is 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer 9；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4mm；
4) one layer of photoresist and photoetching are coated, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note
Enter phosphorus (P) ion, doping concentration is 1015cm-2, form isolation resistance 18 and terminal resistance 19；
5) one layer of photoresist is coated, P is used+Photolithography plate carries out photoetching, in addition to the region of P-type semiconductor arm 20, other regions
Glue protection is photo-etched, boron (B) ion is then poured into, doping concentration is 1016cm-2, form the P-type semiconductor arm 20 of thermocouple；
6) one layer of photoresist is coated, N is used+Photolithography plate carries out photoetching, in addition to the region of N-type semiconductor arm 21, other regions
Glue protection is photo-etched, phosphorus (P) ion is then poured into, doping concentration is 1016cm-2, form the N-type semiconductor arm 21 of thermocouple；
7) one layer of photoresist, photoetching thermoelectric pile and polysilicon resistance figure are coated, then thermocouple is formed by dry etching
Arm and polysilicon resistance；
8) one layer of photoresist, photoetching removal co-planar waveguide 10, asymmetrical coplanar stripline 17, metal interconnecting wires output electricity are coated
Photoresist at pole 22 and pull-down electrode 26；
9) electron beam evaporation (EBE) forms ground floor gold (Au), and thickness is 0.3mm, on removal photoresist and photoresist
Au, stripping forms ground floor Au, output electrode 22, the thermoelectric pile metal interconnecting wires of co-planar waveguide 10 and asymmetric coplanar strip 17
And pull-down electrode 26；
10) (LPCVD) one layer of Si is deposited3N4, thickness is 0.1mm；
11) one layer of photoresist is coated, photoetching simultaneously retains the photoresist below clamped beam 13 and cantilever beam 14, dry etching
Si3N4, form dielectric layer 12；
12) one layer of air of uniform coating layer 15 and litho pattern, thickness is 2mm, is retained under clamped beam 13 and cantilever beam 14
The polyimides of side is used as sacrifice layer；
13) photoresist is coated, it is photoetching removal clamped beam 13, cantilever beam 14, anchor area 11, co-planar waveguide 10, asymmetric coplanar
Photoresist with line 17 and the position of output electrode 22；
14) Seed Layer of the Ti/Au/Ti of A ° of evaporation 500/1500/300, the thickness of re-plating one after Ti layers at the top of removal
Spend is Au layers of 2mm；
15) Au on photoresist and photoresist is removed, clamped beam 13, cantilever beam 14, anchor area 11, co-planar waveguide is formed
10th, asymmetrical coplanar stripline 17 and output electrode 22；
16) deep reaction ion etching (DRIE) the backing material back side, makes membrane structure 25；
17) polyimide sacrificial layer is discharged：Developer solution soaks, the polyimide sacrificial layer under removal clamped beam, deionization
Water soaks slightly, absolute ethyl alcohol dehydration, is volatilized under normal temperature, dries.
Difference with the prior art of the present invention is：
Present invention employs six novel port clamped beam coupled structures, wherein the first end of six port clamped beam couplers
Mouth is identical to the power degree of coupling of the 3rd port, the 4th port and first port to fifth port, the 6th port；It is this clamped
Beam coupled structure the signal of fraction is coupled out from the microwave signal of coplanar wave guide transmission come detect microwave signal frequency and
Phase size, and most of signal can be input in next stage process circuit；Using indirect heating type microwave power detector
To detect the power of microwave signal, with preferable microwave property and without DC power；Clamped beam of the invention is online unknown
Frequency microwave phase detectors, realize the 0-360 ° of phase on-line checking to unknown frequency signal.
The structure for meeting conditions above is considered as the online unknown frequency microwave phase of clamped beam indirectly heat of the invention
Detector.
Claims (3)
1. the online unknown frequency microwave phase detector device of a kind of clamped beam indirectly heat, it is characterised in that the phase detectors by
Six ports clamped beam coupler (1), channel selector switch (2), microwave frequency detector (3), microwave phase detector device (4) cascade
Constitute；Wherein, the first port (1-1) of six ports clamped beam coupler (1) to the 3rd port (1-3), the 4th port (1-4) with
And first port (1-1) is identical to fifth port (1-5), the power degree of coupling of the 6th port (1-6) difference, measured signal is through the
Single port (1-1) is input into, by second port (1-2) output to subordinate's process circuit, by the 4th port (1-4) and the 6th port
A Wilkinson power combiner (6-1) and twoth Wilkinson power of (1-6) output to microwave phase detector device (4)
Synthesizer (6-2), and it is defeated by a Wilkinson power combiners (6-1) and the 2nd Wilkinson power combiners (6-2)
Go out to the 3rd indirect heating type microwave power detector (5-3) and the 4th indirect heating type microwave power detector (5-4)；By
Channel selector switch (2) is arrived in three ports (1-3) and fifth port (1-5) output；7th port (2- of channel selector switch (2)
1) the first indirect heating type microwave power detector (5-1) and the second indirectly heat type micro-wave are connect respectively with the 8th port (2-2)
Power sensor (5-2), the 9th port (2-3) of channel selector switch (2) and the tenth port (2-4) connect microwave frequency detector
(3) the 3rd Wilkinson power combiners (6-3), and by the 3rd Wilkinson power combiners (6-3) output to the 5th
Indirect heating type microwave power detector (5-5) realizes the phase on-line checking to unknown frequency signal；
The structure of wherein six ports clamped beam coupler (1) is symmetrical set with its center line, by co-planar waveguide (10), medium
Layer (12), air layer (15) and across clamped beam above it (13) constitute；Co-planar waveguide (10) is produced on SiO2On layer (9),
Anchor area (11) is produced on co-planar waveguide (10), the lower section metallization medium layer (12) of clamped beam (13), and with air layer (15), solid
Strutbeam (13) collectively forms coupled capacitor structure, and co-planar waveguide (10) length between two clamped beams (13) is λ/4.
2. the online unknown frequency microwave phase detector device of clamped beam indirectly heat as described in claim 1, its feature exists
In channel selector switch (2) by co-planar waveguide (10), anchor area (11), dielectric layer (12), cantilever beam (14), pull-down electrode (26) structure
Into；On co-planar waveguide (10), the lower section of cantilever beam (14) makes pull-down electrode (26) in anchor area (11), and with pull-down electrode (26)
Upper dielectric layer (12) collectively forms construction of switch；Cantilever beam (14) ground connection of channel selector switch (2), pull-down electrode (26) connects
Driving voltage；When driving voltage is more than or equal to cut-in voltage, cantilever beam (14) is pulled down into, and passage is strobed.
3. the online unknown frequency microwave phase detector device of clamped beam indirectly heat as described in claim 1,2, its feature exists
In indirectly heat type micro-wave work(sensor (5) by Si substrates (8), SiO2Layer (9), co-planar waveguide (10), terminal resistance (19), P
Type semiconductor arm (20), N-type semiconductor arm (21), output electrode (22) is constituted；Microwave power is input into by co-planar waveguide (10)
Heat is converted to terminal resistance (19)；P-type semiconductor arm (20) and N-type semiconductor arm (21) constitute thermocouple；According to
Seebeck effects, input microwave power size is understood by the thermoelectrical potential for measuring output electrode (22).
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101034122A (en) * | 2007-03-30 | 2007-09-12 | 东南大学 | Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor |
| WO2007101916A1 (en) * | 2006-03-09 | 2007-09-13 | Valtion Teknillinen Tutkimuskeskus | Device and method for measuring electrical power |
| CN101332971A (en) * | 2008-07-29 | 2008-12-31 | 东南大学 | Passing type microwave power detector based on microelectronic mechanical cantilever beam and manufacturing method |
| JP4436065B2 (en) * | 2003-04-23 | 2010-03-24 | 三菱重工業株式会社 | Phase measuring device and space solar power generation system |
| CN101788605B (en) * | 2010-02-01 | 2012-04-11 | 东南大学 | Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof |
| CN103278681A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Microwave power sensor with multi-cantilever structure |
| CN103018559B (en) * | 2012-12-26 | 2015-04-15 | 东南大学 | Device and method for phase detection based on indirect type micromechanical microwave power sensor |
| CN103344831B (en) * | 2013-06-19 | 2015-04-29 | 东南大学 | Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof |
| CN104614584A (en) * | 2015-01-15 | 2015-05-13 | 南京邮电大学 | Micro-mechanical, high-precision and fixed supporting beam type microwave power detecting system and preparation method thereof |
| CN104655921A (en) * | 2015-02-16 | 2015-05-27 | 南京邮电大学 | Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system |
| CN103048540B (en) * | 2013-01-18 | 2015-09-30 | 东南大学 | Based on online microwave frequency detector and the detection method thereof of semi-girder and direct-type power sensor |
| CN104950172A (en) * | 2015-07-01 | 2015-09-30 | 东南大学 | GaAs-based low-leakage-current microwave phase detector provided with double clamped-beam switches |
-
2017
- 2017-01-24 CN CN201710052696.6A patent/CN106841796B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4436065B2 (en) * | 2003-04-23 | 2010-03-24 | 三菱重工業株式会社 | Phase measuring device and space solar power generation system |
| WO2007101916A1 (en) * | 2006-03-09 | 2007-09-13 | Valtion Teknillinen Tutkimuskeskus | Device and method for measuring electrical power |
| CN101034122A (en) * | 2007-03-30 | 2007-09-12 | 东南大学 | Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor |
| CN101332971A (en) * | 2008-07-29 | 2008-12-31 | 东南大学 | Passing type microwave power detector based on microelectronic mechanical cantilever beam and manufacturing method |
| CN101788605B (en) * | 2010-02-01 | 2012-04-11 | 东南大学 | Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof |
| CN103018559B (en) * | 2012-12-26 | 2015-04-15 | 东南大学 | Device and method for phase detection based on indirect type micromechanical microwave power sensor |
| CN103048540B (en) * | 2013-01-18 | 2015-09-30 | 东南大学 | Based on online microwave frequency detector and the detection method thereof of semi-girder and direct-type power sensor |
| CN103278681A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Microwave power sensor with multi-cantilever structure |
| CN103344831B (en) * | 2013-06-19 | 2015-04-29 | 东南大学 | Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof |
| CN104614584A (en) * | 2015-01-15 | 2015-05-13 | 南京邮电大学 | Micro-mechanical, high-precision and fixed supporting beam type microwave power detecting system and preparation method thereof |
| CN104655921A (en) * | 2015-02-16 | 2015-05-27 | 南京邮电大学 | Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system |
| CN104950172A (en) * | 2015-07-01 | 2015-09-30 | 东南大学 | GaAs-based low-leakage-current microwave phase detector provided with double clamped-beam switches |
Non-Patent Citations (2)
| Title |
|---|
| ZHENXIANG YI 等: "Fabrication of the Different Microwave Power Sensor by Seesaw-Type MEMS Membrane", 《JOURNAL OF MICROELECTROMECHANICAL SYSTEMS》 * |
| 焦永昌 等: "基于MEMS技术的差分式微波信号相位检测器", 《东南大学学报》 * |
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