CN106840852A - A kind of many atmosphere in situ environment stress ga(u)ges of modularization wide temperature range - Google Patents
A kind of many atmosphere in situ environment stress ga(u)ges of modularization wide temperature range Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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Abstract
A kind of many atmosphere in situ environment stress ga(u)ges of modularization wide temperature range, including Mechanical loading module, alternating temperature module, optical imagery and locating module, atmosphere module and sensing system, the deformeter can switch high temperature refrigerated module and realize mechanical test under wide temperature range extreme temperature, different atmosphere can be passed through in sealing shell and realizes single shaft in-situ mechanical test under many atmospheres, can immediately realize displacement measurement, temperature survey and mechanical meaurement.The deformeter mainly for synchrotron radiation in-situ mechanical experimental design, with modularization, wide temperature range, multi-environment, multi- scenarios method, carry out immediately mechanics, displacement, temperature survey and feedback the characteristics of.
Description
Technical field
The present invention relates to fields of measurement, and in particular to a kind of many atmosphere in situ environment stress ga(u)ges of modularization wide temperature range, can be with
Switching high temperature refrigerated module realizes mechanical test under wide temperature range extreme temperature, and different atmosphere realization can be passed through in sealing shell
The test of single shaft in-situ mechanical, can immediately realize displacement measurement, temperature survey and mechanical meaurement under many atmospheres.Should
Become instrument mainly for synchrotron radiation and electron microscope in-situ mechanical experimental design, it is wide temperature range, multi-environment, many with modularization
The characteristics of field couples, carries out mechanics, displacement, temperature survey and feedback immediately.
Background technology
The physical and chemical performance of atoms outermost electronics structure substantial connection material, and pass through to apply elastic strain change atom
Between distance influence outer electronic structure again, therewith, realize the change to the physics, chemical property of material.Therefore, by applying bullet
Property strain be the physics of controllable, reversible, quantitative controlled material, chemical property provide new approaches, i.e., so-called " elastic strain
Engineering ", and elastic strain engineering is carried out to further investigate essential in-situ mechanical loading equipemtn realization applying elastic strain
The correlated performance of material is monitored simultaneously.
On the other hand, the Service Environment of material is diversified, including hot environment, low temperature environment, dry environment, moistening
Environment, by stress, be powered etc. including, if it is desired to research material military service behavior under these circumstances, it is necessary to experiment
In give material similar experiment condition, microscopy apparatus are also needed in addition to material microstructure to provide grinding in terms of mechanism
Study carefully.Therefore, the additional sign equipment of the experimental facilities in situ of multi-environment multi- scenarios method is the necessary condition of investigation of materials.
Additionally, for microscopy apparatus, the means for being conventionally used to characterize microstructure have transmission electron microscope (TEM), pass
The X-ray diffraction (XRD) of system, EBSD (EBSD), neutron diffraction etc..If it is intended to microcosmic in accurately obtaining material
Structure, including crystal orientation, defect, twin etc., it is necessary to spatial resolution very high is right in intra-die range scale
Defect is characterized and recognized.Obviously, the resolution ratio of neutron diffraction and traditional XRD can not meet requirement, although TEM resolution ratio
It is very high but efficiency is very low, to obtain defect distribution interior on a large scale extremely difficult.The spatial resolution of EBSD very it is high still
It is difficult to quantitatively characterize local Strain Distribution, and it is very high to sample surfaces requirement, sample preparation is a problem.These set simultaneously
It is standby to need high vacuum environment to be tested, it is not for providing suitable with former Service Environment or target detection experiment condition
Reality.
In view of the limitation of the traditional characterization technique of the above, in recent years, the X-ray microbeam diffraction (μ XRD) based on synchrotron radiation
Technology is developed rapidly, its spatial resolution and angular resolution respectively reached submicron-scale (M.Kunz, N.Tamura,
K.Chen, et al, Review of Scientific Instruments, 2009) and~0.01 ° (N.Tamura,
A.A.MacDowell, R.S.Celestre, et al., Applied Physics Letters, 2002) rank.For sample
Size, sample (18) surface etc. are also without strict requirements, it is possible to reduce influence factor is introduced in sample making course.Because X is penetrated
Line penetration capacity is stronger than electronics, can carry out nondestructive analysis to some multilayer film heterojunction structures.Synchrotron radiation light source brightness is very high,
More than 100,000,000 times brighter than common XRD light sources, thus enough diffraction informations can be within a very short time collected, with very high
Time and spatial resolution.Because the change of the shape to lattice parameter of Laue diffraction spots is very sensitive, thus to part
The resolution ratio of strain is very high by (~10‐4)(J.D.Budai,W.Yang,N.Tamura,et al.,Nature Materials,
2003), so that the research that the Laue diffraction technology based on synchrotron radiation is developed to material microstructure has very real meaning
Justice.But the research of synchrotron radiation X micro-diffractive material is currently based on, it is necessary to experimental bench provides experiment condition, it is instantly existing
Experimental bench only has single warm table and cooling bench, and shortage can realize the in-situ mechanical experimental bench of multi-environment multi- scenarios method.
The content of the invention
In order to tackle existing deficiency, it is an object of the invention to provide a kind of many atmosphere in situ environments of modularization wide temperature range
Stress ga(u)ge, the deformeter can switch high temperature refrigerated module and realize mechanical test under wide temperature range extreme temperature, can be closed outer
Different atmosphere is passed through in shell and realizes single shaft in-situ mechanical test under many atmospheres, can immediately realize that displacement measurement, temperature are surveyed
Amount and mechanical meaurement.The deformeter is wide temperature range, more with modularization mainly for synchrotron radiation in-situ mechanical experimental design
Environment, multi- scenarios method, carry out immediately mechanics, displacement, temperature survey and feedback the characteristics of.
In order to reach object above, the present invention is adopted the following technical scheme that：
A kind of many atmosphere in situ environment stress ga(u)ges of modularization wide temperature range, including with lower module：Mechanical loading module:Including double
To the pull head 15 of the opposite arrangement of screw rod 4, slide bar 5 and the fixed two ends of sample 18, speed-changing gear box 32 and motor 16, institute
The contour installation parallel with slide bar 5 of reverse-flighted screw 4 is stated, passes through the base 23 of pull head 15, and two ends to pass sealing shell 1 and fix jointly
On sealing shell 1, reverse-flighted screw 4 passes one end of sealing shell 1 by shaft coupling and speed-changing gear box 32 and drives electricity
Machine 16 is connected；The pull head 15 1 is divided into 5 Rotating fields, including compressing tablet 26, the L-type bearing panel 20 for carrying compressing tablet 26,
Alternating temperature module 25, heat insulation layer 24 and base 23, compressing tablet 26 are fixed on L-type bearing panel 20, are designed using sinking to property, it is ensured that
Upper surface and bearing panel 20 are flushed, and the thickness of compressing tablet 26 is 1~2mm, maximizes X-ray and electron beam incident angle, bearing panel
20 points be two parts, the horizontal part 20-1 combined with compressing tablet 26, and L-type vertical part 20-2, vertical part and water
Flat component is by two tooth wedgings, while leading to recirculated water at vertical part, horizontal part upper surface fin is reinforced；When sample 18 is thin
Size is 10mm*20mm during film sample；When for stretching sample, it is shaped as stretching sample shape, i.e. intermediate elongated, the flat width in two ends, two ends
It is mat surface；The displacement range of the Mechanical loading module is 10mm to 20mm, and precision is 1 μm, can apply strain and be to the maximum
100%, can applying power be 0~1kN；
Alternating temperature module：Including temperature feedback system, high-temperature heating module and sub-cooled module, extent of alternating temperature is：It is low
Warm refrigerating module is liquid nitrogen boiling point to room temperature, and high-temperature heating module is room temperature to 1000 DEG C；High-temperature heating module and sub-cooled
Module is rectangle plate 28 and designs, and side side long processes two chamferings for being embedded in during pull head 15 as spacing, opposite side
Spacing dependence alignment pin 31 realize；Wherein refrigerated module structure is sandwich structure, and coiling is fixed by two pieces of metallic plates
Copper pipe 27；Refrigerated module connects with outside liquid nitrogen, and temperature is controlled by flow by valve 9-1 foldings, and thermocouple 12 is provided instead
Feedback model.High temperature module connects with external power source, is heated up by relay 9-2 control resistance wires, and thermocouple 12 provides feedback signal；
The controllable precision of alternating temperature module is ± 1 DEG C.
Optical imagery and locating module：Optical imagery includes visual light imaging with positioning and black light with locating module
Imaging and positioning, the visual light imaging and positioning mainly include reflective mirror 30 and microscope 10, and reflective mirror 30 includes dividing
Be not arranged in the first reflective mirror 30-1 at horizontal plane angle α, it is reflective with second that the first reflective mirror 30-1 angles are β
Mirror 30-2 and the 3rd reflective mirror 30-3 of 30 ° of sample oblique upper；The relation of wherein α and β isReflective mirror 30 is located in sealing shell 1 and is relatively fixed with microscope 10,
The horizontal direction of microscope 10 obtains the information of sample 18 just to reflective mirror 30 from reflective mirror 30；The camera lens of microscope 10 is by close
Envelope shell 1 is inserted, and in surrounding rubber-coated 11, is used to ensure air-tightness and is ensured also be realized between camera lens and sample 18
Relative motion；Reflective mirror 30 is relatively fixed with the camera lens of microscope 10, and sample is able to confirm that when sample 18 is appeared in the visual field
18 on synchrotron radiation sample stage horizontal direction position.When adjustment short transverse, when making sample 18 clear, i.e. confirmatory sample 18
Short transverse position；The black light imaging is primarily referred to as synchrotron radiation Laue X-ray and electricity with the black light of positioning
Beamlet, the upper cover plate of sealing shell 1 as black light window；Upper cover plate is divided into hollow out in the middle of 3 layers, upper and lower plates, two
Plate hollow part accommodates graphite flake 29, and graphite flake 29 is sealed with upper and lower plates by organic resin；
Atmosphere module：Including preliminary dehumidifying and filter assemblies, air inlet flow-disturbing component, Vacuum filtration device 17 and many gas
Atmosphere mixing chamber 7, installs gas flowmeter and air pressure feedback control valve 6 and flow-disturbing net conduct after many atmosphere mixing chambers 7
Air inlet flow-disturbing component, the inwall level of processing fin of sealing shell 1；Using activated carbon coating, as tentatively being removed in sealing shell 1
Wet and filter assemblies；By the folding of the air pressure feedback control valve 6 of barometer 14；Vacuum filtration device 17 and atmosphere mix
Room 7 is distributed in the both sides of sealing shell 1；
Sensing system：Realize mechanics sensing, displacement measurement and feedback, temperature survey and feedback, barometric surveying and dry and wet
Degree measurement；Mechanics sensing relies on piezoelectric transducer 22, the piezoelectric transducer 22 to be fixed on the drawing relative with L-type bearing panel 20
On first 15 step of base 23, the lower end of bearing panel 20 contacts with piezoelectric transducer 22, and the section of L-type bearing panel 20 keeps flat
L-type, " mutual " character form structure is presented with the base 23 of pull head 15, and directly pulling force is measured by piezoelectric transducer 22 in Mechanical loading；
Displacement measurement uses contact type measurement, displacement transducer two parts to be respectively placed on the support frame 19 being fixed on pull head 15；
Temperature survey in order to increase accuracy use thermocouple 12 contact the surface direct measurement surface temperature of sample 18, wherein wire around
Into spring-like, it is ensured that the detecting head of thermocouple 12 and the surface of sample 18 will not cause temperature survey to be forbidden because of vibration when loading；Together
When temperature survey also include for monitoring temperature in housing that the measurement of air pressure and humidity is then directed to shell vivo environment, to housing
The measurement of interior temperature, humidity and air pressure is surveyed by the temperature and dry hygrometer 13 and barometer 14 that are fixed on housing side
Amount.
The lower surface of L-type bearing panel 20 is contacted with alternating temperature module 25, as thermal conductive surface, alternating temperature module 25 and pull head 15
Heat insulation layer 24 is placed between base 23, alignment pin 31 is interted between heat insulation layer 24 and L-type bearing panel 20, for alternating temperature module 25
It is spacing.
The entire length of the pull head 15 is that more than the twice of height, the height of pull head 15 is the axle and pull head of reverse-flighted screw 4
1.5 to 2 times of distance between 15 bottom surface.
Support frame as described above 19, with the contact portion cushioning heat insulation layer 24 of pull head 15, is substantially reduced heat transfer using middle hollow out.
The Surface Machining via-hole array of internal insulation 24 of the pull head 15, under conditions of mechanical strength is ensured, further
Reduce thermal conductivity coefficient.
Temperature feedback, is to adjust the resistance wire power in high-temperature heating module for high-temperature heating module, and is directed to low temperature
Refrigerating module is then the flow velocity for adjusting liquid nitrogen in copper pipe 27.
The housing side inwall long of the sealing shell 1 has two slide rails to carry the horizontal movement of simultaneously gentle support frame 19, close
The width of shell 1, length and height are closed for more than 5 times of the width of alternating temperature module 25, length and height.
The side side long of the sealing shell 1 is installed by microscope 10, microscope 10 and the reflective mirror 30 that horizontal direction is in 45 degree
It is relatively fixed, the afterbody of microscope 10 is fixed on small-sized displacement platform, is then fixed on outer base, and microscope imaging is in external
On screen.
The deformeter is used not only for Experiments of Machanics under synchrotron radiation, it is also possible to for being tested under electron microscope,
For being tested under electron microscope, it is not necessary to install microscope 10.
Compared to the prior art compared with the present invention possesses following advantage：
(1) with the universality that can be used under synchrotron radiation and microscope.
(2) modularized design, possesses complete test system, can immediately and in high precision carry out mechanics, displacement, temperature survey
The characteristics of amount and feedback.
(3) can carry out the test under wide temperature range extreme temperature, realize being carried out on a laboratory apparatus simultaneously low temperature and
High temperature is tested.
(4) can simulate and carry out the test under multi-environment atmosphere.
(5) single mechanical test can be carried out, Li Re-coupling measurement, Li-heat-atmosphere coupling measurement realize experiment
The diversity of implementation.
(6) imaging of the visible ray with black light and alignment system have been gathered, it is possible to achieve Real Time Observation in experimentation,
Solve that synchrotron radiation is limited and in closed lab space how while carrying out X-ray scanning and realizing the problem of home position observation.
Brief description of the drawings
Fig. 1 is deformeter overall structure of the present invention and arrangement.
Fig. 2 is pull head side sectional view.
Fig. 3-1 is alternating temperature module top view.
Fig. 3-2 is L-type bearing panel lower surface upward view.
Fig. 3-3 is lid explosive view on sealing shell.
Fig. 3-4 is microscope and reflective mirror layout drawing.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
A kind of many atmosphere in situ environment stress ga(u)ges of modularization wide temperature range as shown in Figure 1, including with lower module：
Mechanical loading module:Including reverse-flighted screw 4, the pull head 15 positioned opposite of slide bar 5 and the fixed two ends of sample 18,
Speed-changing gear box 32, motor 16, the displacement range of Mechanical loading module is 10mm to 20mm, and precision is 1 μm, and can apply should
Change be 100% to the maximum, can applying power be 0~1kN.The contour installation parallel with slide bar 5 of reverse-flighted screw 4, jointly through pull head 15
Base 23, and two ends pass sealing shell 1 and are fixed on sealing shell 1, one end that reverse-flighted screw 4 passes sealing shell 1 leads to
Shaft coupling is crossed to be connected with speed-changing gear box 32 and motor 16.As shown in Fig. 2 the pull head 15 1 is divided into 5 Rotating fields,
L-type bearing panel 20, alternating temperature module 25, heat insulation layer 24 and base 23 including compressing tablet 26, for carrying compressing tablet 26.Compressing tablet 26
It is fixed on L-type bearing panel 20, is designed using sinking to property, it is ensured that upper surface and bearing panel 20 are flushed, and the thickness of compressing tablet 26 is about
It is 1~2mm, maximizes X-ray and electron beam incident angle, is fixed with sunk screw respectively on four angles, 20 points of L-type bearing panel
Be the horizontal part 20-1 that two parts are combined with compressing tablet 26, and L-type vertical part 20-2, vertical part and horizontal part
By two tooth wedgings, while leading to recirculated water at vertical part, horizontal part upper surface fin is reinforced.When sample 18 is film sample
Size is 10mm*20mm；When for general stretching sample, it is shaped as typically stretching sample common shape, centre is used for test section field width
1mm, 10mm long, thick 0.5mm, two ends are mat surface.
Alternating temperature module：Including temperature feedback system, high-temperature heating module and sub-cooled module, extent of alternating temperature is：It is low
Warm refrigerating module is liquid nitrogen boiling point to room temperature, and high-temperature heating module is room temperature to 1000 DEG C.As shown in figure 3-1, high-temperature heating mould
Block and sub-cooled module are rectangle plate 28 and design, and side side long processes conduct when two chamferings are used to be embedded in pull head 15
Spacing, the spacing dependence alignment pin 31 of opposite side is realized.Wherein refrigerated module structure is sandwich structure, by two pieces of metallic plates
Fix the copper pipe 27 of coiling.Refrigerated module connects with outside liquid nitrogen, by flowmeter and valve 9-1 foldings by flow control
Temperature, thermocouple 12 provides feedback model.High temperature module connects with external power source, is heated up by relay 9-2 control resistance wires, heat
Galvanic couple 12 provides feedback signal.The controllable precision of alternating temperature module is ± 1 DEG C.
Optical imagery and locating module：Optical imagery and locating module include visual light imaging and positioning and can not
See photoimaging with positioning, it is seen that photoimaging mainly includes reflective mirror 30 and microscope 10 with positioning.As shown in Figure 3-4, instead
Light microscopic 30 include be arranged in the first reflective mirror 30-1 at horizontal plane angle α, be β's with the first reflective mirror 30-1 angles
Second reflective mirror 30-2 and the 3rd reflective mirror 30-3 of 30 ° of sample oblique upper.The relation of wherein α and β isα=60 °, β=64 ° are used herein.Reflective mirror 30 is located at sealing shell 1
It is interior to be relatively fixed with microscope 10.The horizontal direction of microscope 10 obtains the information of sample 18 just to reflective mirror 30 from reflective mirror 30.
The camera lens of microscope 10 is inserted by sealing shell 1, and in surrounding rubber-coated 11, is used to ensure air-tightness and is ensured camera lens
Relative motion can be also realized and sample 18 between.Reflective mirror 30 is relatively fixed with the camera lens of microscope 10, when sample 18 is appeared in
The position of the horizontal direction on synchrotron radiation sample stage of sample 18 is can confirm that when in the visual field.When adjustment short transverse, make sample
18 it is clear when, you can confirm short transverse position.Black light is imaged and is primarily referred to as synchrotron radiation labor with the black light of positioning
X-ray in distress and electron beam.The upper cover plate of sealing shell 1 as black light window.As shown in Fig. 3-3, upper cover plate is common
It is divided into hollow out in the middle of 3 layers, upper and lower plates, two plate hollow parts accommodate graphite flake 29, and graphite flake 29 is entered with upper and lower plates by organic resin
Row sealing, graphite window size is 3cm*5cm.
Atmosphere module：Including preliminary dehumidifying and filter assemblies, air inlet flow-disturbing component, Vacuum filtration device 17 and many gas
Atmosphere mixing chamber 7, installs gas flowmeter and air pressure feedback control valve 6 and flow-disturbing net conduct after many atmosphere mixing chambers 7
Air inlet flow-disturbing component, the inwall level of processing fin of sealing shell 1, fin clearance is 2~3mm, and thickness is 1~2mm, and width is
3~5mm, using activated carbon coating, as preliminary dehumidifying and filter assemblies in housing.By the air pressure feedback control of barometer 14
The folding of valve 6.Vacuum filtration device 17 and atmosphere mixing chamber 7 are distributed in the both sides of sealing shell 1.
Sensing system：Realize mechanics sensing, displacement measurement and feedback, temperature survey and feedback, barometric surveying, humidity
Measurement.Mechanics sensing relies on piezoelectric transducer 22, the piezoelectric transducer 22 to be fixed on the pull head relative with L-type bearing panel 20
On 15 step of base 23, the lower end of bearing panel 20 contacts with piezoelectric transducer 22, and the section of L-type bearing panel 20 is the L for keeping flat
Type, " mutual " character form structure is presented with the base 23 of pull head 15, and directly pulling force is measured by piezoelectric transducer 22 in Mechanical loading.Position
Shift measurement uses contact type measurement, displacement transducer two parts to be respectively placed on the support frame 19 being fixed on pull head 15.Temperature
Degree measurement uses thermocouple 12 to contact the surface direct measurement surface temperature of sample 18 to increase accuracy, and wherein wire is coiled into
Spring-like, it is ensured that the detecting head of thermocouple 12 and the surface of sample 18 will not cause temperature survey to be forbidden because of vibration when loading.Simultaneously
Temperature survey also includes that the measurement of air pressure and humidity is then directed to shell vivo environment, in housing for monitoring temperature in housing
The measurement of temperature, humidity and air pressure is measured by the temperature and dry hygrometer 13 and barometer 14 that are fixed on housing side
The lower surface of L-type bearing panel 20 is contacted with alternating temperature module 25, used as thermal conductive surface.Alternating temperature module 25 and pull head 15
Heat insulation layer 24 is placed between base 23, alignment pin 31 is interted between heat insulation layer 24 and L-type bearing panel 20, for alternating temperature module 25
It is spacing.
The entire length of the pull head 15 is that more than the twice of height, the height of pull head 15 is the axle and pull head of reverse-flighted screw 4
1.5 to 2 times of distance between 15 bottom surface.
Support frame as described above 19, with the contact portion cushioning heat insulation layer 24 of pull head 15, is substantially reduced heat transfer using middle hollow out.
The Surface Machining via-hole array of internal insulation 24 of the pull head 15, under conditions of mechanical strength is ensured, further
Reduce thermal conductivity coefficient.
Temperature feedback, is to adjust the resistance wire power in high-temperature heating module for high-temperature heating module, and is directed to low temperature
Refrigerating module is then the flow velocity for adjusting liquid nitrogen in copper pipe 27.
The housing side inwall long of the sealing shell 1 has two slide rails to carry the horizontal movement of simultaneously gentle support frame 19, close
The width of shell 1, length and height are closed for more than 5 times of the width of alternating temperature module 25, length and height.
The side side long of the sealing shell 1 is installed by microscope 10, microscope 10 and the reflective mirror 30 that horizontal direction is in 45 degree
It is relatively fixed, the afterbody of microscope 10 is fixed on small-sized displacement platform, is then fixed on outer base, and microscope imaging is in external
On screen.
The deformeter is used not only for Experiments of Machanics under synchrotron radiation, it is also possible to for being tested under electron microscope,
For being tested under electron microscope, it is not necessary to install microscope 10.
Operation principle of the invention is：First by strip standard specimen, the recessed of the upper surface of L-type bearing panel 20 is placed on
Groove, installs compressing tablet 26, and whole sample stage is installed on synchrotron radiation sample stage, finds the position of sample 18 accurately under synchrotron radiation
Put.Then the camera lens of microscope 10 is inserted together with reflective mirror 30, first vertically draws high and axially move horizontally, substantially determine sample 18
Position in the horizontal direction, then moves up and down the camera lens and reflective mirror 30 of microscope 10, until the lower surface of sample 18 is clear.Connect
And unload standard specimen.Laboratory sample 18 is made strip, the groove of the upper surface of L-type bearing panel 20 is placed on, compressing tablet 26 is installed,
The fixation to the two ends of sample 18 is realized, alternating temperature module 25 is installed, by the one side with chamfering just to this following table of L-type bearing panel 20
The position-limited edge in face is the following insertion of Fig. 3-2, is inserted into alignment pin 31 and fixes.If carrying out low temperature test, then by low temperature
The copper pipe 27 of module and liquid nitrogen pipeline are connected out shell, and then thermocouple 12 and the intimate surface contact of sample 18 close close
The upper lid of shell 1 is closed, to carrying out vacuumizing drying in shell.If high temperature is tested, then heating wire is connect outside power supply pass-out shell, will
Thermocouple 12 and the intimate surface contact of sample 18, the upper lid of the sealing shell 1 that then closes.Extracted then according to environment needed for experiment
Vacuum is simultaneously passed through required gas, can not be vacuum dried under high temperature experiment, by barometer, thermometer and dry hygrometer to shell
Interior environment is monitored.Loading speed is monitored by the rotating speed of controlled motor 16, while piezoelectric transducer 22 is recorded
The size of stress, the displacement transducer on support frame 19 then writes displacement, while testing number to synchrotron radiation
According to being acquired.It is possible thereby to realize once the single shaft in-situ mechanical experiment of many atmosphere wide temperature ranges.
The sample stage is used under being also positioned over electron microscope simultaneously, need not now install microscope 10, remaining step
Suddenly ibid.
Claims (9)
1. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range, it is characterised in that：Including with lower module：Mechanical loading mould
Block:Pull head (15), the speed-changing gear box of the opposite arrangement including reverse-flighted screw (4), slide bar (5) and fixed sample (18) two ends
(32) and motor (16), reverse-flighted screw (4) the contour installation parallel with slide bar (5), jointly through the bottom of pull head (15)
Seat (23), and two ends pass sealing shell (1) and are fixed on sealing shell (1), reverse-flighted screw (4) passes sealing shell (1)
One end be connected with speed-changing gear box (32) and motor (16) by shaft coupling；The pull head (15) one is divided into 5 layers
Structure, including compressing tablet (26), the L-type bearing panel (20) for carrying compressing tablet (26), alternating temperature module (25), heat insulation layer (24) with
And base (23), compressing tablet (26) is fixed on L-type bearing panel (20), using the design of sinking to property, it is ensured that upper surface and loading end
Plate (20) is flushed, and compressing tablet (26) thickness is 1~2mm, maximizes X-ray and electron beam incident angle, and bearing panel (20) is divided into two
The vertical part (20-2) of individual part, the horizontal part (20-1) combined with compressing tablet (26), and L-type, vertical part and level
Part is by two tooth wedgings, while leading to recirculated water at vertical part, horizontal part upper surface fin is reinforced；When sample (18) is thin
Size is 10mm*20mm during film sample；When for stretching sample, it is shaped as stretching sample shape, i.e. intermediate elongated, the flat width in two ends, two ends
It is mat surface；The displacement range of the Mechanical loading module is 10mm to 20mm, and precision is 1 μm, can apply strain and be to the maximum
100%, can applying power be 0~1kN；
Alternating temperature module：Including temperature feedback system, high-temperature heating module and sub-cooled module, extent of alternating temperature is：Low temperature cold
But module is liquid nitrogen boiling point to room temperature, and high-temperature heating module is room temperature to 1000 DEG C；High-temperature heating module and sub-cooled module
Rectangle plate (28) design is, side side long processes two chamferings for being embedded in during pull head (15) as spacing, opposite side
Spacing dependence alignment pin (31) realize；Wherein refrigerated module structure is sandwich structure, and disk is fixed by two pieces of metallic plates
Around copper pipe (27)；Refrigerated module connects with outside liquid nitrogen, and temperature, thermocouple are controlled by flow by valve (9-1) folding
(12) feedback model is provided.High temperature module connects with external power source, is heated up by relay (9-2) control resistance wire, thermocouple
(12) feedback signal is provided；The controllable precision of alternating temperature module is ± 1 DEG C.
Optical imagery and locating module：Optical imagery includes visual light imaging with positioning and black light imaging with locating module
With positioning, with positioning mainly including reflective mirror (30) and microscope (10), reflective mirror (30) includes the visual light imaging
Be arranged in the first reflective mirror (30-1) at horizontal plane angle α, be the second of β with the first reflective mirror (30-1) angle
Reflective mirror (30-2) and the 3rd reflective mirror (30-3) of 30 ° of sample oblique upper；The relation of wherein α and β isReflective mirror (30) in the sealing shell (1) with microscope (10)
It is relatively fixed, microscope (10) horizontal direction just to reflective mirror (30), obtains sample (18) information from reflective mirror (30)；It is micro-
The camera lens of mirror (10) is inserted by sealing shell (1), and rubber-coated (11) in surrounding, is used to ensure air-tightness and is ensured mirror
Relative motion can be also realized between head and sample (18)；Reflective mirror (30) is relatively fixed with the camera lens of microscope (10), works as sample
(18) position of sample (18) horizontal direction on synchrotron radiation sample stage is able to confirm that when appearing in the visual field.When adjustment height
Direction, when making sample (18) clear, i.e. confirmatory sample (18) short transverse position；The black light imaging can not with positioning
See that light is primarily referred to as synchrotron radiation Laue X-ray and electron beam, the upper cover plate of sealing shell (1) as black light perspective
Window；Upper cover plate is divided into hollow out in the middle of 3 layers, upper and lower plates, and two plate hollow parts accommodate graphite flake (29), graphite flake (29) and upper and lower plates
Sealed by organic resin；
Atmosphere module：Including preliminary dehumidifying and filter assemblies, air inlet flow-disturbing component, Vacuum filtration device (17) and many atmosphere
Mixing chamber (7), installs gas flowmeter and air pressure feedback control valve (6) and flow-disturbing net after many atmosphere mixing chambers (7)
As air inlet flow-disturbing component, sealing shell (1) inwall level of processing fin；Using activated carbon coating, as sealing shell (1)
Interior preliminary dehumidifying and filter assemblies；By the folding of air pressure feedback control valve (6) of barometer (14)；Vacuum filtration device
And atmosphere mixing chamber (7) is distributed in sealing shell (1) both sides (17)；
Sensing system：Realize that mechanics sensing, displacement measurement and feedback, temperature survey and feedback, barometric surveying and humidity are surveyed
Amount；By piezoelectric transducer (22), the piezoelectric transducer (22) is fixed on relative with L-type bearing panel (20) mechanics sensing
On base (23) step of pull head (15), bearing panel (20) lower end contacts with piezoelectric transducer (22), L-type bearing panel (20)
Section is the L-type for keeping flat, and " mutual " character form structure is presented with pull head (15) base (23), is directly passed by piezoelectricity in Mechanical loading
Sensor (22) measures pulling force；Displacement measurement uses contact type measurement, displacement transducer two parts to be respectively placed in and be fixed on pull head
(15) on the support frame (19) on；Temperature survey uses thermocouple (12) contact sample (18) surface direct to increase accuracy
Measurement surface temperature, wherein wire are coiled into spring-like, it is ensured that thermocouple (12) detecting head and sample (18) surface will not be because of
Vibration causes temperature survey to be forbidden during loading；Temperature survey simultaneously also includes for monitoring temperature in housing, air pressure and humidity
Measurement be then directed to shell vivo environment, to the measurement of shell body temperature, humidity and air pressure by being fixed on the gas of housing side
Temperature and dry hygrometer (13) and barometer (14) are measured.
2. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：It is described
L-type bearing panel (20) lower surface is contacted with alternating temperature module (25), as thermal conductive surface, alternating temperature module (25) and pull head (15) base
(23) heat insulation layer (24) is placed between, alignment pin (31) is interted between heat insulation layer (24) and L-type bearing panel (20), for alternating temperature
Module (25) it is spacing.
3. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：It is described
Pull head (15) entire length is that more than the twice of height, the height of pull head (15) is the axle and pull head (15) of reverse-flighted screw (4)
1.5 to 2 times of distance between bottom surface.
4. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：It is described
Support frame (19), with pull head (15) contact portion cushioning heat insulation layer (24), is substantially reduced heat transfer using middle hollow out.
5. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：It is described
Internal insulation (24) Surface Machining via-hole array of pull head (15), under conditions of mechanical strength is ensured, further reduces thermal conductivity
Coefficient.
6. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：Temperature
Feedback, is to adjust the resistance wire power in high-temperature heating module for high-temperature heating module, and being directed to sub-cooled module is then
The flow velocity of liquid nitrogen in regulation copper pipe (27).
7. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：It is described
The housing side inwall long of sealing shell (1) has two slide rails to carry the horizontal movement of simultaneously gentle support frame (19), sealing shell (1)
Width, length and height be the width of alternating temperature module (25), more than 5 times of length and height.
8. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：It is described
Microscope (10) is installed in sealing shell (1) side side long, and microscope (10) is relative in 45 degree of reflective mirror (30) with horizontal direction
Fixed, microscope (10) afterbody is fixed on small-sized displacement platform, is then fixed on outer base, and microscope imaging is in external screen
On curtain.
9. many atmosphere in situ environment stress ga(u)ges of a kind of modularization wide temperature range according to claim 1, it is characterised in that：It is described
Deformeter is used not only for Experiments of Machanics under synchrotron radiation, it is also possible to for being tested under electron microscope, for electron microscopic
Tested under mirror, it is not necessary to which microscope (10) is installed.
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| CN108152167A (en) * | 2018-01-19 | 2018-06-12 | 中国科学技术大学 | The method that low temperature stretches rheometer and the test of macromolecule membrane cryogenic property |
| CN108507881A (en) * | 2018-03-19 | 2018-09-07 | 西安交通大学 | Superhigh temperature power thermal coupling deformeter and working method are tested in situ based on Reflection X-ray |
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| CN111610097A (en) * | 2020-06-11 | 2020-09-01 | 四川大学 | Polymer material four-way or two-way tensile test equipment |
| CN111610097B (en) * | 2020-06-11 | 2022-02-08 | 四川大学 | Polymer material four-way or two-way tensile test equipment |
| CN111624093A (en) * | 2020-07-08 | 2020-09-04 | 重庆渝微电子技术研究院有限公司 | Two-dimensional flexible material testing system |
| CN111965027A (en) * | 2020-08-13 | 2020-11-20 | 中国科学院上海应用物理研究所 | Micro CT (computed tomography) in-situ tensile testing device |
| CN113514319A (en) * | 2021-05-10 | 2021-10-19 | 吉林大学 | In-situ static-dynamic fatigue mechanical property testing instrument in scanning electron microscope |
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