CN106840418A - A kind of anti-vibration method of phase-shifting interferometer - Google Patents
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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Abstract
The invention discloses a kind of anti-vibration method of phase-shifting interferometer, the phase-shifting interferometer camera in the method gathers second group of phase-shift interference in the case where combination of pixels function is opened and closed with first group of phase-shift interference of high speed acquisition and with low speed.Second group of phase-shift interference is by obtaining and the 3rd group of phase-shift interference of first group of phase-shift interference resolution ratio identical after uniform sampling.Extracts low resolution phase mehtod from first group of phase-shift interference using three step iterative algorithms of amendment, and fallen into a trap evaluation time associated arguments from the 3rd group of phase-shift interference using three step iterative algorithms are corrected as initial value using it.After bi-directional scaling time correlation parameter, with reference to second group of phase-shift interference construction least squares equation, high-resolution phase mehtod is calculated, final reconstruct measured surface is highly.The characteristics of the inventive method takes full advantage of the three step iterative algorithm of combination of pixels function and amendment of phase-shifting interferometer camera, purpose of the phase-shifting interferometer to anti-vibration has been admirably achieved using relatively low hardware cost.
Description
Technical field
The invention belongs to phase-shifting interference measuring field, and in particular to a kind of anti-vibration method of phase-shifting interferometer.
Background technology
Phase-shifting interferometer is the important instrument for measuring Optical Surface, the spy with high accuracy and high spatial resolution
Point.But traditional phase-shifting interferometer vibrates very sensitive to external world, atomic small vibration can all cause apparent measurement error.
In order to meet the demand measured under in-site measurement, on-position measure and other vibration environments, researchers have developed iterative algorithm, can
Phase mehtod is extracted with from the phase-shift interference of vibrated interference.Correct three step iterative algorithms（MTIA）It is wherein representative
One kind, the inclination Phase-shifting Errors that can be caused with compensation vibration and contrast fluctuate, and can refer to the document " Q. for publishing
Liu, Y. Wang, J. He, et al. Modified three-step iterative algorithm for
phase-shifting interferometry in the presence of vibration. Applied Optics.
2015, 54: 5833-5841.”.It is, with phase-shift interference as data basis, to be input into initial value, warp to correct three step iterative algorithms
After iterative cycles several times, convergence obtains correct phase mehtod.Correct three step iterative algorithms can convergent key factor be
The selection of initial value, initial value can be the amount of phase shift or phase distribution of estimation.Initial value is with exact value closer to iterative calculation
Convergence rate is faster, and otherwise convergence rate is slow or will not restrain.If the frame frequency of the speed of phase-shifting interferometer phase shifter and camera
It is all very high, the collection of phase-shift interference is completed within a very short time, the influence of so vibration will be weakened, is conducive to amendment three
Step iterative algorithm converges to correct result（Now, the shock resistance of three step iterative algorithms of amendment is good）.However, in prior art
Under level, camera is obtained and the speed of transmission view data is limited, it is impossible to realize high spatial resolution under frame frequency high
IMAQ.But camera typically all possesses combination of pixels（binning）Function, opens combination of pixels function, and camera is obtained and passed
The frame frequency of defeated image is high, then the resolution ratio of image will be very low；Combination of pixels function is closed, camera is operated in full resolution shape
State, obtains the high resolution of image, then camera is obtained and the frame frequency of transmission image will be very low.For phase-shifting interferometer,
The high-resolution of camera means finer measurement result, can see surface details clearly.Three step iterative algorithms of amendment are come
Say, the camera frame frequency high and the implacable contradiction of high-resolution of phase-shifting interferometer have led to correcting three step iterative algorithm antivibratioves
Dynamic contradiction between performance and fine measurement result, need badly had both had well to anti-vibration for phase-shifting interferometer development is a kind of
The method that ability can reconstruct high-resolution surface again.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of anti-vibration method of phase-shifting interferometer.
The anti-vibration method of phase-shifting interferometer of the invention, is characterized in, described method is comprised the following steps：
A. start phase-shifting interferometer, phase-shifting interferometer is operated in phase shift pattern, phase shift when gathering adjacent two width phase-shift interference
The optical path difference change that device is produced turns to Δ, and it is 2 π Δs/λ to calculate default amount of phase shift, and λ is optical source wavelength；
B. the combination of pixels function of phase-shifting interferometer camera is opened, phase shifting equipment coordinates camera frame frequency to produce optical path difference change, moves
First group of phase-shift interference of relevant interferometer collection, common L1 width, the resolution ratio of every width phase-shift interference is R1 × C1；
C. the combination of pixels function of phase-shifting interferometer camera is closed, phase shifting equipment coordinates camera frame frequency to produce optical path difference change, moves
Camera second group of phase-shift interference of collection of relevant interferometer, common L2 width, the resolution ratio of every width phase-shift interference is R2 × C2, R2/
R1=M, C2/C1=N, M, N are the integer more than 1；
D. using default amount of phase shift as initial value, position phase is calculated from first group of phase-shift interference using three step iterative algorithms of amendment
Distribution I；
E. to second group of phase-shift interference in each width phase-shift interference carry out uniform sampling, obtain resolution ratio for R1 × C1
3rd group of phase-shift interference；
F. using phase mehtod I as initial value, fallen into a trap evaluation time from the 3rd group of phase-shift interference using three step iterative algorithms of amendment
Associated arguments, described time correlation parameter is included：Horizontal phase shift obliquity factor kx1、kx2、…、kxL2, longitudinal phase shift incline because
Sub- ky1、ky2、…、kyL2, phase shift translational movement d1、d2、…、dL2, background fluctuations factor a1、a2、…、aL2, the modulation degree fluctuation factor
b1、b2、…、bL2；
G. by the horizontal phase shift obliquity factor kx in step f1、kx2、…、kxL2The horizontal phase shift that N corrected is respectively divided by incline
Oblique factor K x1、Kx2、…、KxL2, by longitudinal phase shift obliquity factor ky1、ky2、…、kyL2It is respectively divided by the longitudinal direction shifting that M is corrected
Tilt factor K y1、Ky2、…、KyL2；
H. the amount of phase shift D of (x, y) individual pixel on second group of phase-shift interference is calculated1(x,y)= Kx1×x+ Ky1×y+d1、
D2(x,y)= Kx2×x+ Ky2×y+d2、…、DL2(x,y)= KxL2×x+ KyL2×y+dL2, by the image of corresponding pixel
Gray value I1(x,y)、I2(x,y)、…、IL2(x, y) takes out, with D1(x,y)、D2(x,y)、…、DL2(x,y)、a1、a2、…、aL2、
b1、b2、…、bL2Construction least squares equation, solves position phase φ (x, y) that least squares equation obtains (x, y) individual pixel；
I. repeat step h, until obtaining the position phase of all pixels point on second group of phase-shift interference, position is existed according to pixel
Order on second group of phase-shift interference is stored in two-dimensional matrix and obtains phase mehtod II, to the unpacking of phase mehtod II, according to light
Corresponding relation reconstruct measured surface is learned highly to be distributed.
Uniform sampling described in step e is：Take out and own (a+mM, b+nN) individual pixel on R2 × C2 image in different resolution
Gray value, and the matrix of R1 × C1 sizes is stored in by original order, 1≤a ＜ M, 1≤b ＜ N, m=0,1 ..., R1-1, n=0,
1,…, C1-1。
L1 and L2 are all higher than being equal to 4.
A kind of anti-vibration method of phase-shifting interferometer of the invention inexpensive, function admirable for phase-shifting interferometer is provided
To the method for anti-vibration, while can ensure to obtain high-resolution measurement result.The method takes full advantage of phase-shifting interferometer
The combination of pixels function and measured surface feature of camera immovable feature in a short time, first with three step iterative algorithms of amendment from collection
Frame frequency phase-shift interference high in calculate the phase mehtod of low resolution, then using the phase mehtod of low resolution as initial
Value, is fallen into a trap evaluation time associated arguments, then solve with three step iterative algorithms of amendment from the high-resolution phase-shift interference of uniform sampling
The least squares equation of time correlation parameter and high-resolution phase-shift interference construction, finally realizes the standard of high-resolution phase mehtod
Really extract.
Brief description of the drawings
Fig. 1 is the workflow diagram of the anti-vibration method of phase-shifting interferometer of the invention；
Fig. 2 is the step iterative algorithm principle schematic of amendment three of the anti-vibration method of phase-shifting interferometer of the invention；
Fig. 3 is first group of phase shift interference of camera collection after combination of pixels function is opened of the phase-shifting interferometer in the present invention
Figure；
Fig. 4 is second group of phase shift interference of camera collection after combination of pixels function is closed of the phase-shifting interferometer in the present invention
Figure；
Fig. 5 is the phase mehtod I extracted using three step iterative algorithms of amendment from first group of phase-shift interference in the present invention；
Fig. 6 is that the pixel during the uniform sampling of the embodiment in the present invention divides schematic diagram；
Fig. 7 is four kinds of image schematic diagrames obtaining of uniform sampling of the embodiment in the present invention；
Fig. 8 is the 3rd group of phase-shift interference that second group of phase-shift interference in the present invention is obtained after uniform sampling；
Fig. 9 is the phase mehtod II that least square method calculating is used from second group of phase-shift interference in the present invention；
Figure 10 be phase mehtod II in the present invention through unpacking and using the measured surface reconstructed after optics corresponding relation highly
Distribution map.
Specific embodiment
The invention will now be described in detail with reference to the accompanying drawings.
The anti-vibration method of phase-shifting interferometer of the invention, is characterized in, described method is comprised the following steps：
A. start phase-shifting interferometer, phase-shifting interferometer is operated in phase shift pattern, phase shift when gathering adjacent two width phase-shift interference
The optical path difference change that device is produced turns to Δ, and it is 2 π Δs/λ to calculate default amount of phase shift, and λ is optical source wavelength；
B. the combination of pixels function of phase-shifting interferometer camera is opened, phase shifting equipment coordinates camera frame frequency to produce optical path difference change, moves
First group of phase-shift interference of relevant interferometer collection, common L1 width, the resolution ratio of every width phase-shift interference is R1 × C1；
C. the combination of pixels function of phase-shifting interferometer camera is closed, phase shifting equipment coordinates camera frame frequency to produce optical path difference change, moves
Camera second group of phase-shift interference of collection of relevant interferometer, common L2 width, the resolution ratio of every width phase-shift interference is R2 × C2, R2/
R1=M, C2/C1=N, M, N are the integer more than 1；
D. using default amount of phase shift as initial value, position phase is calculated from first group of phase-shift interference using three step iterative algorithms of amendment
Distribution I；
E. to second group of phase-shift interference in each width phase-shift interference carry out uniform sampling, obtain resolution ratio for R1 × C1
3rd group of phase-shift interference；
F. using phase mehtod I as initial value, fallen into a trap evaluation time from the 3rd group of phase-shift interference using three step iterative algorithms of amendment
Associated arguments, described time correlation parameter is included：Horizontal phase shift obliquity factor kx1、kx2、…、kxL2, longitudinal phase shift incline because
Sub- ky1、ky2、…、kyL2, phase shift translational movement d1、d2、…、dL2, background fluctuations factor a1、a2、…、aL2, the modulation degree fluctuation factor
b1、b2、…、bL2；
G. by the horizontal phase shift obliquity factor kx in step f1、kx2、…、kxL2The horizontal phase shift that N corrected is respectively divided by incline
Oblique factor K x1、Kx2、…、KxL2, by longitudinal phase shift obliquity factor ky1、ky2、…、kyL2It is respectively divided by the longitudinal direction shifting that M is corrected
Tilt factor K y1、Ky2、…、KyL2；
H. the amount of phase shift D of (x, y) individual pixel on second group of phase-shift interference is calculated1(x,y)= Kx1×x+ Ky1×y+d1、
D2(x,y)= Kx2×x+ Ky2×y+d2、…、DL2(x,y)= KxL2×x+ KyL2×y+dL2, by the image of corresponding pixel
Gray value I1(x,y)、I2(x,y)、…、IL2(x, y) takes out, with D1(x,y)、D2(x,y)、…、DL2(x,y)、a1、a2、…、aL2、
b1、b2、…、bL2Construction least squares equation, solves position phase φ (x, y) that least squares equation obtains (x, y) individual pixel；
I. repeat step h, until obtaining the position phase of all pixels point on second group of phase-shift interference, position is existed according to pixel
Order on second group of phase-shift interference is stored in two-dimensional matrix and obtains phase mehtod II, to the unpacking of phase mehtod II, according to light
Corresponding relation reconstruct measured surface is learned highly to be distributed.
Uniform sampling described in step e is：Take out and own (a+mM, b+nN) individual pixel on R2 × C2 image in different resolution
Gray value, and the matrix of R1 × C1 sizes is stored in by original order, 1≤a ＜ M, 1≤b ＜ N, m=0,1 ..., R1-1, n=0,
1,…, C1-1。
L1 and L2 are all higher than being equal to 4.
Embodiment 1
In the present embodiment, using Fizeau type plane phase-shifting interferometers, optical source wavelength is 633nm, using piezoelectric ceramics actuator
（PZT）As phase shifting equipment.When phase-shifting interferometer runs under phase shifting work mode, engraved in the adjacent double sampling of camera
PZT promotes reference mirror movement 79.1nm, it is considered to double light path, then the optical path difference change of each step turns to 158.2nm, then can calculate
Default amount of phase shift is pi/2.Phase-shifting interferometer gathers 4 width phase-shift interferences under camera fast mode（That is L1=4）, composition first
Group phase-shift interference；9 width interference patterns are gathered under camera high resolution mode（That is L2=9）, constitute second group of phase-shift interference.This
The camera of phase-shifting interferometer is the digital CMOS camera of USB3.0 interfaces in embodiment, and the size of the effective target surface of camera is all 1/3
Inch.After opening combination of pixels function, the parameter of the camera is：Frame frequency 274fps, resolution ratio 240 × 320；Close combination of pixels
After function, the parameter of the camera is：Frame frequency 100fps, resolution ratio 480 × 640.
The operation of the present embodiment is carried out according to the flow shown in Fig. 1, and relevant parameter is R1=240, C1=320, R2=480, C2
=640, M=N=2.
The principle flow chart for correcting three step iterative algorithms is as shown in Figure 2.Correct three step iterative algorithms and calculate input when starting
Initial value can be phase mehtod, or time correlation parameter（Phase shift obliquity factor, phase shift translational movement, background fluctuations
The factor, the modulation degree fluctuation factor）.The numerical value exported after iteration convergence can be time correlation parameter, or phase mehtod.
Each loop iteration for correcting three step iterative algorithms is divided into three modules：One module is gone using known time correlation parameter
Calculate phase mehtod；One module be using the time correlation parameter of known phase mehtod and x directions go to calculate y directions when
Between associated arguments；Last module is to go to calculate x directions using the time correlation parameter of known phase mehtod and y directions
Time correlation parameter.The numerical value obtained with other two module latest computeds in each module goes to calculate unknown quantity, favorably
In the Fast Convergent of iteration.Each module solves unknown quantity and uses least square method.
Using the phase-shifting interferometer of the present embodiment phase-shift interference is gathered under vibration interference.Adopted under camera fast mode
First group of phase-shift interference of collection（Totally 4 width）As shown in Figure 3.The second group of phase-shift interference gathered under camera high resolution mode
（Totally 9 width）As shown in Figure 4.
Using three step iterative algorithms of amendment from first group of phase-shift interference calculate first phase mehtod when, use it is initial
Value is：Phase shift translational movement be 0, pi/2, π, 3 pi/2s, all phase shift obliquity factors are zero, the background fluctuations factor and modulation degree fluctuation because
Son is 1,1,1,1.By 5 iterative cycles, first phase mehtod of calculating is as shown in Figure 5.
Second group of phase-shift interference in Fig. 4 carries out uniform sampling.For the present embodiment, second group of phase-shift interference
Uniform sampling can have following four kinds of modes.First the pixel of second group of phase-shift interference is divided according to Fig. 6, then
Image to after four kinds of uniform samplings shown in Fig. 7.1st kind：(1+2m, the 1+2n) in piece image is taken, (m=0,1 ...,
239;N=0,1 ..., 319), all pixel gray values marked as a will take out in Fig. 6, arranged according to original order
Row, obtain piece image in Fig. 7.Similarly, all pixel gray values marked as b, c, d are taken respectively, can obtain Fig. 7
In second and third, four width images.In the present embodiment, from the 1st kind of uniform sampling mode, the 3rd group of phase-shift interference is obtained, such as schemed
Shown in 8.
It is initial value with first phase mehtod, is calculated from the 3rd group of phase-shift interference using three step iterative algorithms of amendment
Time correlation parameter.By 5 iterative cycles, the time correlation parameter for obtaining is as shown in table 1.The shifting of the first width phase-shift interference
Tilt the factor and phase shift translational movement is defaulted as zero, the background fluctuations factor and the modulation degree fluctuation factor are defaulted as 1.
Due to N=2, to horizontal phase shift tilt quantity divided by 2, the horizontal phase shift obliquity factor Kx for being correctedi, it is respectively
0.651×10-4、-0.338×10-4、-1.019×10-4、-0.765×10-4、-0.630×10-4、-0.308×10-4、
0.366×10-4、0.434×10-4rad/pixel.Due to M=2, to longitudinal phase shift tilt quantity divided by 2, that is corrected is vertical
To phase shift obliquity factor Kyi, it is respectively 0.940 × 10-4、0.889×10-4、0.023×10-4、0.176×10-4、0.138×
10-4、-0.008×10-4、0.218×10-4、1.606×10-4rad/pixel。
To (x, y) the individual pixel in second group of phase-shift interference, using the horizontal phase shift obliquity factor of amendment, amendment
Longitudinal phase shift obliquity factor, table 1 in phase shift translational movement di calculate (x, y) individual one group of amount of phase shift D of pixeli(x,y)= Kxi
×x+ Kyi×y+di, (i=1,2 ..9).Take out the ash of (x, y) individual pixel on all images in second group of phase-shift interference
Angle value Ii(x, y), background fluctuations factor ai, modulation degree fluctuation factor bi, least squares equation is built, such as formula (1) ~ (3).
(1)
(2)
(3)
The X for obtaining is the matrix of 3 × 1.Position phase φ (x, y) of (x, y) individual pixel, X are calculated from X using formula (4)
(2), X (3) is respectively second and third element in X.
(4)
Least squares equation is set up to all of pixel on second group of phase-shift interference, 480 × 640 pixels can be obtained
The position phase data of point.According to pixel putting in order in second group of phase-shift interference, the position of pixel is mutually stored in one
The matrix of 480 × 640 sizes, obtains second phase mehtod, as shown in Figure 9.
Unpacking computing is carried out to second phase mehtod, and optics is set up according to the specific light path form of phase-shifting interferometer
Relation, reconstructing surface elevation information.In the present embodiment, phase-shifting interferometer employs Fizeau type optical interference circuits, and used swashs
Light device wavelength is 632.8nm.So, the relational expression to φ (x, y) unpacking and gauging surface height h (x, y) is
(5)
In formula, unwrap is unpacking computing.The apparent height distribution of final reconstruct is as shown in Figure 10.The result and the standard on surface
Really height is distributed closely.
Directly with default amount of phase shift 0, pi/2,3 pi/2s ..., 11 pi/2s be initial value, using correcting three step iterative methods to second
Group phase-shift interference is calculated, and by 10 iteration, the surface of the phase mehtod for obtaining and reconstruct deviates considerably from the standard on surface
Really height is distributed, and shows now to measure failure.Therefore, the inventive method can be accurate from the phase-shift interference of interference vibrated
Phase mehtod really is restored, and spatial resolution high can be kept.
Claims (3)
1. a kind of anti-vibration method of phase-shifting interferometer, it is characterised in that described method is comprised the following steps：
A. start phase-shifting interferometer, phase-shifting interferometer is operated in phase shift pattern, phase shift when gathering adjacent two width phase-shift interference
The optical path difference change that device is produced turns to Δ, and it is 2 π Δs/λ to calculate default amount of phase shift, and λ is optical source wavelength；
B. the combination of pixels function of phase-shifting interferometer camera is opened, phase shifting equipment coordinates camera frame frequency to produce optical path difference change, moves
First group of phase-shift interference of relevant interferometer collection, common L1 width, the resolution ratio of every width phase-shift interference is R1 × C1；
C. the combination of pixels function of phase-shifting interferometer camera is closed, phase shifting equipment coordinates camera frame frequency to produce optical path difference change, moves
Camera second group of phase-shift interference of collection of relevant interferometer, common L2 width, the resolution ratio of every width phase-shift interference is R2 × C2, R2/
R1=M, C2/C1=N, M, N are the integer more than 1；
D. using default amount of phase shift as initial value, position phase is calculated from first group of phase-shift interference using three step iterative algorithms of amendment
Distribution I；
E. to second group of phase-shift interference in each width phase-shift interference carry out uniform sampling, obtain resolution ratio for R1 × C1
3rd group of phase-shift interference；
F. using phase mehtod I as initial value, fallen into a trap evaluation time from the 3rd group of phase-shift interference using three step iterative algorithms of amendment
Associated arguments, described time correlation parameter is included：Horizontal phase shift obliquity factor kx1、kx2、…、kxL2, longitudinal phase shift incline because
Sub- ky1、ky2、…、kyL2, phase shift translational movement d1、d2、…、dL2, background fluctuations factor a1、a2、…、aL2, the modulation degree fluctuation factor
b1、b2、…、bL2；
G. by the horizontal phase shift obliquity factor kx in step f1、kx2、…、kxL2It is respectively divided by the horizontal phase shift inclination that N is corrected
Factor K x1、Kx2、…、KxL2, by longitudinal phase shift obliquity factor ky1、ky2、…、kyL2It is respectively divided by longitudinal phase shift that M is corrected
Obliquity factor Ky1、Ky2、…、KyL2；
H. the amount of phase shift D of (x, y) individual pixel on second group of phase-shift interference is calculated1(x,y)= Kx1×x+ Ky1×y+d1、
D2(x,y)= Kx2×x+ Ky2×y+d2、…、DL2(x,y)= KxL2×x+ KyL2×y+dL2, by the image of corresponding pixel
Gray value I1(x,y)、I2(x,y)、…、IL2(x, y) takes out, with D1(x,y)、D2(x,y)、…、DL2(x,y)、a1、a2、…、aL2、
b1、b2、…、bL2Construction least squares equation, solves position phase φ (x, y) that least squares equation obtains (x, y) individual pixel；
I. repeat step h, until obtaining the position phase of all pixels point on second group of phase-shift interference, position is existed according to pixel
Order on second group of phase-shift interference is stored in two-dimensional matrix and obtains phase mehtod II, to the unpacking of phase mehtod II, according to light
Corresponding relation reconstruct measured surface is learned highly to be distributed.
2. the anti-vibration method of phase-shifting interferometer according to claim 1, it is characterised in that uniform described in step e being adopted
Sample is：The gray value for owning (a+mM, b+nN) individual pixel on R2 × C2 image in different resolution is taken out, and R1 is stored in by original order
The matrix of × C1 sizes, 1≤a ＜ M, 1≤b ＜ N, m=0,1 ..., R1-1, n=0,1 ..., C1-1.
3. the anti-vibration method of phase-shifting interferometer according to claim 1, it is characterised in that L1 and L2 are all higher than being equal to 4.
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Cited By (2)
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| CN113048876A (en) * | 2021-03-16 | 2021-06-29 | 上海乾曜光学科技有限公司 | Vibration detection preprocessing method applied to phase-shifting laser interferometer |
| CN113048877A (en) * | 2021-03-16 | 2021-06-29 | 上海乾曜光学科技有限公司 | Anti-vibration phase shifting method applied to phase shifting laser interferometer |
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| CN113048877A (en) * | 2021-03-16 | 2021-06-29 | 上海乾曜光学科技有限公司 | Anti-vibration phase shifting method applied to phase shifting laser interferometer |
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