CN106839991A - It is applied to the laser scanning device and Laser Scanning of three-dimensional scenic measurement - Google Patents

It is applied to the laser scanning device and Laser Scanning of three-dimensional scenic measurement Download PDF

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Publication number
CN106839991A
CN106839991A CN201710232058.2A CN201710232058A CN106839991A CN 106839991 A CN106839991 A CN 106839991A CN 201710232058 A CN201710232058 A CN 201710232058A CN 106839991 A CN106839991 A CN 106839991A
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laser
light
semi
accepting part
laser scanning
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CN106839991B (en
Inventor
耿远超
黄晚晴
张颖
刘兰琴
王文义
孙喜博
郑天然
张锐
粟敬钦
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention discloses a kind of laser scanning device and Laser Scanning for being applied to three-dimensional scenic measurement, including light source, laser phase modulation device, grating, speculum, lens, range finding light accepting part and imaging light accepting part composition;The laser phase modulation device and grating composition laser deflection portion are modulated to laser, the method that instead of traditional tilting mirror deflection, it is possible to achieve the laser scanning of high frequency.The present invention replaces tilting mirror using the combination of laser phase modulation device and grating, deflection scanning is carried out to light beam, scan frequency is limited only in the modulating frequency of phase-modulator, can reach GHz magnitudes, and deflection component does not exist mechanical movement, on the one hand the start delay that component inertia brings is avoided, on the other hand avoids influence of the friction of motion to device lifetime.

Description

It is applied to the laser scanning device and Laser Scanning of three-dimensional scenic measurement
Technical field
The present invention relates to laser scanning field, and in particular to it is a kind of be applied to three-dimensional scenic measurement laser scanning device and Laser Scanning.
Background technology
Laser scanning device is the laser travel direction deflection that a kind of utilization certain device sends light source, right so as to realize Object carries out one-dimensional or two-dimensional scan device.With reference to distance member and image-forming block, three-dimensional imaging can be carried out to object. The current technology is applied to terrain detection, automatic Pilot and threedimensional model and the aspect such as quickly generates.
The current method for realizing laser scanning is mainly using motor-driven rotatable mirror (tilting mirror, referenced patent Document 200710153106.5) periodic deflection is carried out to laser beam, so as to realize scanning.But the driving for being limited to motor turns Speed, the scan frequency of tilting mirror method only up to reach MHz magnitudes.The inertia of moving component is limited to simultaneously, and it starts the time It is more long.And mechanical movement cannot avoid the life-span that frictional dissipation brings from limiting.
The content of the invention
It is an object of the invention to solve at least the above and/or defect, and provide at least will be described later excellent Point.
In order to realize these purposes of the invention and further advantage, there is provided a kind of to be applied to what three-dimensional scenic was measured Laser scanning device, including:
Light source for sending pulse laser;
The Laser Modulation unit for modulating laser direction deflection on laser optical path;
Speculum, its laser after Laser Modulation unit is adjusted carries out reflecting and projecting in a generally horizontal direction scanning mesh Mark thing, at the same by the light beam being reflected back from object reflex to imaging light accepting part and range finding light accepting part carry out object it is three-dimensional into Picture.
Preferably, the Laser Modulation unit includes:Trunnion axis modulating unit for modulating laser level deflection angle, It is located on laser optical path;
Vertical axes modulating unit for modulating laser vertical deflection angle, it is located at swashing after trunnion axis modulating unit is modulated In light light path.
Preferably, the trunnion axis modulating unit includes the trunnion axis phase-modulation being sequentially located in pulse laser light path Device and trunnion axis grating;The vertical axes modulating unit includes the vertical axes phase-modulator being sequentially located in pulse laser light path With vertical axes grating.
Preferably, the groove direction of the trunnion axis grating and vertical axes grating is mutually perpendicular to, and it deflects the inclined of laser Turn face to be mutually perpendicular to.
Preferably, also include:First semi-transparent semi-reflecting lens, it is located at the laser light between Laser Modulation unit and speculum Lu Shang, and the laser after Laser Modulation cells modulate is transmitted through speculum;The speculum is reflected laser and along big Horizontal direction is caused to project scanning object;
Lens, it is located on the reflected light path of the first semi-transparent semi-reflecting lens;
Second semi-transparent semi-reflecting lens, it is located on the transmitted light path of lens;
Wherein, the imaging light accepting part is located on the transmitted light path of the second semi-transparent semi-reflecting lens;The range finding light accepting part is located at On the reflected light path of the second semi-transparent semi-reflecting lens;It is semi-transparent semi-reflecting that the light beam being reflected back from object is reflexed to first by the speculum The reflecting surface of mirror, and horizontal reflection is to lens;Target beam is transmitted through the second semi-transparent semi-reflecting lens by the lens;From the second half The light beam of saturating semi-reflective mirror transmission enters imaging light accepting part, the light beam of reflection enters range finding light accepting part.
Preferably, second semi-transparent semi-reflecting lens are identical with the distance to range finding light accepting part to light accepting part is imaged.
Preferably, the reflecting mirror driving unit for driving speculum is connected with the speculum.
The present invention also provides and a kind of carry out laser using the above-mentioned laser scanning device for being applied to three-dimensional scenic measurement and sweep The method retouched, comprises the following steps:
Step one, set trunnion axis phase-modulator to the phase modulation function of laser asVertical axes phase-modulator The phase modulation function of laser isThen horizontal deflection angle α (t) of emergent light and vertical deflection angle beta (t) are respectively:
Wherein, the optical maser wavelength that λ sends for light source, c is the light velocity in vacuum, ku=d α/d λ, kv=d β/d λ are respectively water The abbe number of flat axle grating and vertical axes grating;WithRepresent two phase-modulators in t respectively The waveform slope at quarter;
Step 2, set up three-dimensional system of coordinate by origin of the center of speculum;Specifically include:It is with horizontal deflection angular direction U axles, are v axles with vertical deflection angular direction, are w axles with reflected light exit direction;Wherein, it is reflected back from object difference reflective spot Light incidence reflection mirror angle it is different, so as to different in the focal position of imaging light accepting part, so imaging light accepting part can be surveyed Measure coordinate of the reflective spot on object in uv planes;Range finding light accepting part measurement laser pulse is issued to return range finding and receives from light source The time Δ t in light portion, deducts transmission time Δ t of the light pulse inside laser scanning device0Afterwards, can to calculate object reflective The distance apart from laser scanning device is put, so that it is determined that coordinate of the object reflective spot in w axles;With the center of speculum as outside The origin of coordinates of coordinate system, then w axial coordinates be:
In the sweep limits of laser scanning device, three-dimensional (uvw) coordinate of each reflective spot of object is measured, so that Three-dimensional imaging can be carried out to object;
Meanwhile, the abbe number k of adjustment trunnion axis grating and vertical axes gratinguAnd kvCan be obtained not in u axles and v direction of principal axis Same resolution ratio.
Preferably, the Δ t0Transmitted after being sent from light source including laser to the time of speculum, and from object Transmitted to the time of range finding light accepting part after the reflected mirror transmitting of laser of return..
It is of the invention it is a kind of be applied to three-dimensional scenic measurement the operation principle of laser scanning device be:Height is sent from light source The pulse laser of repetition rate, periodic phase-modulation is carried out through laser phase modulation device, and phase-modulation causes the ripple of laser The translation that a small amount of occurs long, the translational movement is changed over time.Then, laser is by optical grating reflection, its angle of reflection and incident light Wavelength is related, so that the angle of reflected light changes with the modulation waveform generating period of phase-modulation, reaches laser and sweeps The purpose retouched.The laser scanning of two dimension can be realized using the combination of two groups of phase-modulators and grating, wherein, two gratings Groove direction is mutually perpendicular to, and the deflection plane of its deflection laser is mutually perpendicular to.
The present invention at least includes following beneficial effect:The present invention is turned using the combination substitution of laser phase modulation device and grating Mirror, deflection scanning is carried out to light beam, and scan frequency is limited only in the modulating frequency of phase-modulator, can reach GHz magnitudes, and partially Rotation member does not exist mechanical movement, on the one hand avoids the start delay that component inertia brings, and on the other hand avoiding motion rubs Wipe the influence to device lifetime.
Further advantage of the invention, target and feature embody part by following explanation, and part will also be by this The research and practice of invention and be understood by the person skilled in the art.
Brief description of the drawings:
Fig. 1 be laser scanning device internal structure of the present invention, and intrinsic coordinates definition schematic diagram;
Scanning of Fig. 2 laser scanning devices to object is illustrated, and exterior coordinate defines schematic diagram;
The scope and path schematic diagram of laser scanning in Fig. 3 embodiments 1;
The phase-modulation waveform φ of impulse waveform I (t) of light source 1, trunnion axis phase-modulator 2 in Fig. 4 embodiments 1u (t), and vertical axes phase-modulator 4 phase-modulation waveform φv(t)。
Specific embodiment:
The present invention is described in further detail below in conjunction with the accompanying drawings, to make those skilled in the art with reference to specification text Word can be implemented according to this.
It should be appreciated that it is used herein such as " have ", "comprising" and " including " term do not allot one or many The presence or addition of individual other elements or its combination.
Fig. 1 and 2 shows a kind of laser scanning device for being applied to three-dimensional scenic measurement, including:
Light source 1 for sending pulse laser;
The Laser Modulation unit for modulating laser direction deflection on laser optical path;
Speculum 7, its laser after Laser Modulation unit is adjusted carries out reflecting and projecting in a generally horizontal direction scanning Object 13, while the light beam being reflected back from object is reflexed into imaging light accepting part 10 and range finding light accepting part 11 carries out object Three-dimensional imaging.
In the above-mentioned technical solutions, the Laser Modulation unit includes:Trunnion axis for modulating laser level deflection angle Modulating unit, it is located on laser optical path;The trunnion axis modulating unit includes the level being sequentially located in pulse laser light path Axle phase-modulator 2 and trunnion axis grating 3;
Vertical axes modulating unit for modulating laser vertical deflection angle, it is located at swashing after trunnion axis modulating unit is modulated In light light path;The vertical axes modulating unit includes the vertical axes phase-modulator 4 being sequentially located in pulse laser light path and erects D-axis grating 5;The groove direction of the trunnion axis grating and vertical axes grating is mutually perpendicular to, and the deflection plane of its deflection laser is mutual Vertically;Structural representation as shown in Figure 1, sets up corresponding three-dimensional system of coordinate (x, y, z), the wherein groove of trunnion axis grating 3 Parallel xz planes;The parallel yz planes of groove of vertical axes grating 5.
In the above-mentioned technical solutions, also include:First semi-transparent semi-reflecting lens 6, its be located at Laser Modulation unit and speculum it Between laser optical path on, and the laser after Laser Modulation cells modulate is transmitted through speculum 7;The speculum 7 enters laser Row reflection simultaneously projects scanning object 13 in a generally horizontal direction;
Lens 8, it is located on the reflected light path of the first semi-transparent semi-reflecting lens;
Second semi-transparent semi-reflecting lens 9, it is located on the transmitted light path of lens;
Wherein, the imaging light accepting part 10 is located on the transmitted light path of the second semi-transparent semi-reflecting lens;The range finding light accepting part 11 On the reflected light path of the second semi-transparent semi-reflecting lens;It is semi-transparent that the light beam being reflected back from object is reflexed to first by the speculum The reflecting surface of semi-reflective mirror, and horizontal reflection is to lens;Target beam is transmitted through the second semi-transparent semi-reflecting lens by the lens;From The light beam of two semi-transparent semi-reflecting lens transmission enters imaging light accepting part, the light beam of reflection enters range finding light accepting part.
In the above-mentioned technical solutions, second semi-transparent semi-reflecting lens are extremely imaged light accepting part and the distance phase to light accepting part of finding range Together.
In the above-mentioned technical solutions, the reflecting mirror driving unit for driving speculum is connected with the speculum.
A kind of side that laser scanning is carried out using the above-mentioned laser scanning device for being applied to three-dimensional scenic measurement of the present invention Method, comprises the following steps:
Step one, as shown in figure 1, light source 1 sends the pulse laser of high repetition frequency, trunnion axis phase-modulator 2 and water Flat axle grating 3 is modulated to the horizontal deflection angle (the u direction of principal axis along Fig. 2) of laser, vertical axes phase-modulator 4 and vertical axes Grating 5 is modulated to the vertical deflection angle (the v direction of principal axis along Fig. 2) of laser, and then laser is saturating through the first semi-transparent semi-reflecting lens 6 Penetrate, speculum 7 reflect after along substantially horizontal direction outgoing to object 13;
If trunnion axis phase-modulator is to the phase modulation function of laserVertical axes phase-modulator laser Phase modulation function isThen horizontal deflection angle α (t) of emergent light and vertical deflection angle beta (t) are respectively:
Wherein, the optical maser wavelength that λ sends for light source, c is the light velocity in vacuum, ku=d α/d λ, kv=d β/d λ are respectively water The abbe number of flat axle grating and vertical axes grating;WithRepresent two phase-modulators in t respectively The waveform slope at quarter;
Step 2, the light beam (dotted line is represented in Fig. 1) of laser scanning device 14 is reflected back from object 13 by speculum 7 Focused on through lens 8 after being reflected with the first semi-transparent semi-reflecting lens 6, two-beam, a branch of transmission focusing are divided into after the second semi-transparent semi-reflecting lens 9 In the imaging surface of imaging light accepting part 10, another beam is reflected into light accepting part 11 of finding range.Semi-transparent semi-reflecting lens 9 to imaging the He of light accepting part 10 Distance to range finding light accepting part 11 is identical;The origin of coordinates of outside coordinate system sets up three-dimensional seat in the center of speculum as Fig. 2 Mark system;Specifically include:It is u axles with horizontal deflection angular direction, is v axles with vertical deflection angular direction, with reflected light exit direction as w Axle;Wherein, the angle of the light incidence reflection mirror 7 being reflected back from object difference reflective spot is different, so as in imaging light accepting part 10 Focal position it is different, so imaging light accepting part can measure coordinate of the reflective spot on object 13 in uv planes;Range finding is received Light portion 11 measures laser pulse and the time Δ t for returning to range finding light accepting part 11 is issued to from light source, deducts light pulse in laser scanning Transmission time Δ t inside device 140Afterwards, distance of the object reflective spot apart from laser scanning device 14 can be calculated, so that Determine coordinate of the object reflective spot in w axles.Wherein, Δ t0Transmitted after being sent from light source including laser to the time of speculum 7, And transmitted to the time of range finding light accepting part 11 after the reflected transmitting of mirror 7 of laser returned from object.With the center of speculum 7 It is the origin of coordinates of outside coordinate system in Fig. 2, then w axial coordinates are
To sum up, in the sweep limits of laser scanning device 14, three-dimensional (uvw) coordinate of each reflective spot of object is surveyed Amount such that it is able to which three-dimensional imaging is carried out to object.
Meanwhile, the abbe number k of adjustment trunnion axis grating 3 and vertical axes grating 5uAnd kvCan be obtained in u axles and v direction of principal axis Different resolution ratio.
Embodiment 1:
If need scanning target zone and path as shown in figure 3, for 5 × 5 matrix, laser from coordinate (- 2, -2) with Zigzag path is progressively scanned to coordinate (2,2).The then pulse sequence of light source 1 and two modulation waveforms of phase-modulator 2 and 4 As shown in Figure 4.Within a pulse period, the waveform of phase-modulator 2 and 4 keeps linear change, the correspondence scanning of its slope Angle, is kept for constant, next pulse cycle, φuThe slope variation of (t), φvT () keeps constant, then scanning element is in u direction of principal axis It is mobile.After complete a line to be scanned, φvT () changes, then scanning element is moved in v direction of principal axis, jumps into next line.
If the repetition rate that light source 1 sends laser is 1GHz, trunnion axis phase-modulator 2 and vertical axes phase-modulator 4 Modulating frequency be correspondingly set to 1GHz, then it is 1ns that laser scanning device 14 scans time for pixel, can be with 1ms Scanning 106Individual pixel, such that it is able to carry out quick clearly three-dimensional imaging to high-speed moving object.
Although embodiment of the present invention is disclosed as above, it is not restricted to listed in specification and implementation method With, it can be applied to various suitable the field of the invention completely, for those skilled in the art, can be easily Other modification is realized, therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited In specific details and shown here as the legend with description.

Claims (9)

1. it is a kind of to be applied to the laser scanning device that three-dimensional scenic is measured, it is characterised in that including:
Light source for sending pulse laser;
The Laser Modulation unit for modulating laser direction deflection on laser optical path;
Speculum, its laser after Laser Modulation unit is adjusted carries out reflecting and projecting in a generally horizontal direction scanning target Thing, at the same by the light beam being reflected back from object reflex to imaging light accepting part and range finding light accepting part carry out object it is three-dimensional into Picture.
2. it is as claimed in claim 1 to be applied to the laser scanning device that three-dimensional scenic is measured, it is characterised in that the laser is adjusted Unit processed includes:Trunnion axis modulating unit for modulating laser level deflection angle, it is located on laser optical path;
Vertical axes modulating unit for modulating laser vertical deflection angle, it is located at the laser light after the modulation of trunnion axis modulating unit Lu Shang.
3. it is as claimed in claim 1 to be applied to the laser scanning device that three-dimensional scenic is measured, it is characterised in that the trunnion axis Modulating unit includes the trunnion axis phase-modulator and trunnion axis grating that are sequentially located in pulse laser light path;The vertical axes are adjusted Unit processed includes the vertical axes phase-modulator and vertical axes grating that are sequentially located in pulse laser light path.
4. it is as claimed in claim 3 to be applied to the laser scanning device that three-dimensional scenic is measured, it is characterised in that the trunnion axis The groove direction of grating and vertical axes grating is mutually perpendicular to, and the deflection plane of its deflection laser is mutually perpendicular to.
5. it is as claimed in claim 3 to be applied to the laser scanning device that three-dimensional scenic is measured, it is characterised in that also to include:The One semi-transparent semi-reflecting lens, it is located on the laser optical path between Laser Modulation unit and speculum, and by Laser Modulation cells modulate Laser afterwards is transmitted through speculum;The speculum carries out laser to reflect and project in a generally horizontal direction scanning object;
Lens, it is located on the reflected light path of the first semi-transparent semi-reflecting lens;
Second semi-transparent semi-reflecting lens, it is located on the transmitted light path of lens;
Wherein, the imaging light accepting part is located on the transmitted light path of the second semi-transparent semi-reflecting lens;The range finding light accepting part is located at second On the reflected light path of semi-transparent semi-reflecting lens;The light beam being reflected back from object is reflexed to the first semi-transparent semi-reflecting lens by the speculum Reflecting surface, and horizontal reflection is to lens;Target beam is transmitted through the second semi-transparent semi-reflecting lens by the lens;From second semi-transparent half The light beam of anti-mirror transmission enters imaging light accepting part, the light beam of reflection enters range finding light accepting part.
6. the as claimed in claim 5 laser scanning device for being applied to three-dimensional scenic measurement, it is characterised in that described the second half Saturating semi-reflective mirror is identical with the distance to range finding light accepting part to light accepting part is imaged.
7. it is as claimed in claim 1 to be applied to the laser scanning device that three-dimensional scenic is measured, it is characterised in that the speculum On be connected with reflecting mirror driving unit for driving speculum.
8. it is a kind of that laser scanning is carried out using the laser scanning device for being applied to three-dimensional scenic measurement as claimed in claim 5 Method, it is characterised in that comprise the following steps:
Step one, set trunnion axis phase-modulator to the phase modulation function of laser asVertical axes phase-modulator laser Phase modulation function beThen horizontal deflection angle α (t) of emergent light and vertical deflection angle beta (t) are respectively:
α ( t ) = - k u λ 2 2 π c ∂ φ u ( t ) ∂ t
β ( t ) = - k v λ 2 2 π c ∂ φ v ( t ) ∂ t
Wherein, the optical maser wavelength that λ sends for light source, c is the light velocity in vacuum, ku=d α/d λ, kv=d β/d λ are respectively trunnion axis The abbe number of grating and vertical axes grating;WithRepresent two phase-modulators in t respectively Waveform slope;
Step 2, set up three-dimensional system of coordinate by origin of the center of speculum;Specifically include:It is u axles with horizontal deflection angular direction, It is v axles with vertical deflection angular direction, is w axles with reflected light exit direction;Wherein, the light being reflected back from object difference reflective spot The angle of incidence reflection mirror is different, so as to different in the focal position of imaging light accepting part, so imaging light accepting part can measure mesh Mark coordinate of the reflective spot on thing in uv planes;Range finding light accepting part measures laser pulse and is issued to return range finding light accepting part from light source Time Δ t, deduct transmission time Δ t of the light pulse inside laser scanning device0Afterwards, can calculate object reflective spot away from With a distance from laser scanning device, so that it is determined that coordinate of the object reflective spot in w axles;Center with speculum is as exterior coordinate The origin of coordinates of system, then w axial coordinates be:
w ( u , v ) = Δ t ( u , v ) - Δt 0 2
In the sweep limits of laser scanning device, three-dimensional (uvw) coordinate of each reflective spot of object is measured such that it is able to Three-dimensional imaging is carried out to object;
Meanwhile, the abbe number k of adjustment trunnion axis grating and vertical axes gratinguAnd kvCan be different with the acquisition of v direction of principal axis in u axles Resolution ratio.
9. the side of laser scanning is carried out using the laser scanning device for being applied to three-dimensional scenic measurement as claimed in claim 8 Method, it is characterised in that the Δ t0Transmitted after being sent from light source including laser to the time of speculum, and returned from object The transmitting of laser reflected mirror after transmit to the time of range finding light accepting part.
CN201710232058.2A 2017-04-11 2017-04-11 Laser scanning device and laser scanning method applied to three-dimensional scene measurement Active CN106839991B (en)

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CN110703449A (en) * 2019-09-30 2020-01-17 西安交通大学 Space coding grating generator adopting modulation laser scanning technology
CN114295075A (en) * 2022-03-09 2022-04-08 中国工程物理研究院激光聚变研究中心 Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece

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Publication number Priority date Publication date Assignee Title
CN108759711A (en) * 2018-04-04 2018-11-06 杭州电子科技大学 A kind of non-mechanical laser three-dimensional scanning system
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CN114295075A (en) * 2022-03-09 2022-04-08 中国工程物理研究院激光聚变研究中心 Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece

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