CN106793439A - A kind of microwave plasma torch device of automatic ignition - Google Patents
A kind of microwave plasma torch device of automatic ignition Download PDFInfo
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- CN106793439A CN106793439A CN201710083592.1A CN201710083592A CN106793439A CN 106793439 A CN106793439 A CN 106793439A CN 201710083592 A CN201710083592 A CN 201710083592A CN 106793439 A CN106793439 A CN 106793439A
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- microwave
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- plasma torch
- outer tube
- inner tube
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
Abstract
The present invention provides a kind of microwave plasma torch device of automatic ignition, it is made up of outer tube, middle pipe, inner tube, spacer ring, microwave coupling interface, outer tube microwave opening, coupling bar, coupling ring, reflection end face, regulating piston, the microwave plasma torch is made up of one section of coaxial open metal coaxial resonant cavity of three pipes, and plasma torch is formed in openend using microwave energy.The present invention changes the sparking mode of microwave plasma torch, by the inner tube relative position for adjusting torch pipe, allow that torch pipe need not realize automatic ignition by extra device, so that microwave plasma torch device ease for use is greatly enhanced, both influence of the high-tension ignition for microwave shielding structure design had been broken away from, in turn simplify apparatus structure, the reliability and stability of intensifier.Plasma source of the microwave plasma torch of the present invention for Atomic Emission Spectral Analysis, it can also be used to the plasma source of chemistry and field of measuring technique.
Description
Technical field
The invention belongs to microwave plasma torch technology and chemistry and field of measuring technique, and in particular to a kind of microwave etc.
Gas ions generating means, more particularly to a kind of automatic ignition microwave plasma torch device.
Background technology
Microwave plasma torch is (Jin, Q., et al., A microwave the plasma torch such as professor Jin Qinhan
assembly for atomic emission spectrometry.Spectrochimica Acta Part B:Atomic
Spectroscopy,1991.46B(3):P.417-430. (correspondence application is special for a kind of microwave plasma forming apparatus for) proposing
Profit number is CN 94205428.8), can be used for Atomic Emission Spectral Analysis light source, the ion gun of atom spectrum, gas decomposition etc.
Field.The device has three pipe coaxial configurations of metal, and plasma is formed in middle pipe and inner tube upper surface, extends to air
In, its sparking mode is that pipe and inner tube top form the electricity fire that instantaneous short circuit is formed in being contacted with Tesla coil or screwdriver
Flower lights plasma (Jin, Q., et al., A microwave plasma torch assembly for atomic
emission spectrometry.1991.46B:P.pp.417-430.), although the later device have passed through many researchs and learn
There is no essential change, it is necessary to provide extra electric spark in plasma formation region in the Improvement of person, sparking mode.Such as
(Bilgic, A.M., et al., Design and modelling of a the modified 2.45GHz such as Bilgic
coaxial plasma torch for atomic spectrometry.Spectrochimica Acta Part B:
Atomic Spectroscopy,1998.53(5):P.773-777.) the modified microwave plasma torch for proposing, igniting is still
The auxiliary of high-voltage spark the need for extra.
Traditional sparking mode of microwave plasma torch causes that it above has certain deficiency in application, such as atom
Emission spectrometer product, if the sparking mode on pipe and inner tube top has what operating personnel were clicked in being contacted using screwdriver
Potential safety hazard, and microwave from leakage can be caused, if extra high pressure can be increased using the sparking mode that Tesla coil discharges
Discharging function module, so that increase the complexity of system, and the presence of electrion pin can be to the electricity of microwave plasma torch
Magnetic field impacts, and may influence the stability of system.The present invention devise it is a kind of it is simple, can be with microwave of automatic ignition etc.
Gas ions torch device, it may not be necessary to realize automatic ignition by extra device, so that microwave plasma torch device
Ease for use is greatly enhanced, and simplifies apparatus structure, the reliability and stability of intensifier.
The content of the invention
It is an object of the invention to provide a kind of microwave plasma torch device of automatic ignition, it is by three coaxial gold
The coaxial resonant cavity of category, the one end open of reflection end face composition, it is characterised in that can be with automatic ignition.Can be with the micro- of automatic ignition
Ripple plasma torcl apparatus, are that microwave plasma torch is improved, and the igniting of traditional microwave plasma torch needs
The electric spark that pipe and inner tube top formation instantaneous short circuit are formed in being contacted with Tesla coil or screwdriver is aided in, and is existed
Certain processing safety or system need extra increase high-pressure discharging device, so as to increase system complexity and unstability.
The microwave plasma torch device that the present invention is provided does not need pipe and inner tube top shape in Tesla coil or screwdriver contact
The auxiliary of the electric spark formed into instantaneous short circuit, it is only necessary to plus suitable microwave power, you can realize automatic ignition so that micro-
The ease for use of ripple plasma torcl apparatus is greatly enhanced, and apparatus structure is simplified, and reliability and stability are also strengthened.
A kind of microwave plasma torch device of automatic ignition of the present invention, by outer tube, middle pipe, inner tube, spacer ring, microwave coupling
Interface, outer tube microwave opening, coupling bar, coupling ring, reflection end face, regulating piston composition, outer tube, middle pipe, inner tube have metal
Three pipe coaxial configurations, the spacer ring for ensureing coaxial and regulation magnetic distribution metal, coupling are provided between middle pipe and inner tube
Ring is arranged on middle pipe outer wall, and microwave coupling interface is located at and outer tube microwave opening is formed on outer tube, and coupling bar is fixed on coupling ring,
And positioned between outer tube microwave opening, reflection end face is provided between outer tube and middle pipe, the coaxial resonant cavity of one end open is formed, instead
Penetrate end face to be linked together with regulating piston, reflection endface position can be finely adjusted by regulating piston, to facilitate regulation
Microwave plasma torch performance.Microwave energy is by the outer tube microwave opening on outer tube, microwave coupling interface, coupling bar and coupling ring
Collective effect be coupled into cavity, in cavity formed resonance structure and resonator openend formed highfield, Ji Chuangong
Make gas and form plasma.In order to the automatic ignition of microwave plasma torch needs, openend plasma formation region shape
Electrical breakdown is formed into local highfield, this highfield can be realized by pipe in regulation and inner tube relative position, therefore, inner tube
Port plane protruded the open transverse plane of resonator, the i.e. relatively middle pipe of inner tube portareapiston and outer tube portareapiston
It is prominent.
The automatic ignition of microwave plasma torch needs openend plasma formation region to form local highfield to be formed
Electrical breakdown, this highfield can be realized by pipe in regulation and inner tube relative position.In order to ensure torch pipe normal work, it is necessary to
The microwave source matched with torch pipe design is equipped with, generally, from conventional 2.45GHz microwave sources.Torch pipe can be normal
The power bracket of work and design be machined with certain relation, generally, 50 watts to 400 watts normal works are not asked
Topic, operating power higher then needs to be equipped with more preferable safeguard procedures.
The torch pipe wants normal work, it is necessary to which at least working gas is passed through all the way, and torch pipe can use multiple gases (such as Ar
Gas, He gas, air) used as working gas, working gas is passed through by middle pipe.If used up as plasma spectrochemical analysis
Source, sample imports torch pipe by the carrier gas port of inner tube tail end.The external space between outer tube and middle pipe can introduce shroud gas, be used for
Plasma torch carries out constriction or limitation peripheral gas enter plasma torch, and shroud gas are from outer tube near anti-
The shroud gas mouthful for penetrating end face are introduced.
Three described pipe coaxial configurations dimensionally need to meet microwave transmission requirement.Microwave can middle pipe and outer tube it
Between and middle pipe and inner tube between transmit, in order to ensure resonator openend formed highfield, it is necessary to microwave is existed with TEM waveshapes
Transmission in torch pipe, therefore the size of the external diameter of the internal diameter of outer tube and middle pipe needs guarantee microwave to be transmitted with TEM ripples in torch pipe.Institute
The outside dimension ratio of the internal diameter and middle pipe of stating outer tube needs the impedance operator of consideration microwave transmission circuit, and impedance is carried out as far as possible
With design, and ensure transmission mode of the microwave in torch pipe for TEM mode, in order to microwave transmission mode is in ensureing resonator
TEM mode, outer tube diameter preferred 20mm, the middle preferred 7mm of pipe external diameter.In order to ensure that the carrier gas in inner tube carries the effect of sample,
The preferred 2mm of inner tube diameter.
Further, traditional torch pipe is in fit on, resonator openend the outer pipe, the pipe and the inner pipe at grade,
In order to realize automatic ignition, it is necessary to the relatively middle pipe of inner tube portareapiston and outer tube portareapiston are prominent, so that
Local tip or local strong electric are formed, to realize automatic ignition.The preferred relatively middle pipe of inner tube portareapiston and
Outer tube portareapiston protrudes 0.5-2mm.
Described microwave plasma torch, it is characterized in that the assembling of inner tube needs to protrude the open transverse plane of resonator, makes
Obtaining plasma torch forming part has local highfield or point discharge, adds and enables to the normal work of microwave plasma torch
Being capable of automatic ignition after the microwave power of work.
The spacer ring is located between middle pipe and inner tube, and spacer ring is a quarter with the portareapiston distance of coaxial resonant cavity
Near the odd-multiple of microwave wavelength.Spacer ring simultaneously also have ensure in pipe and inner tube axiality effect, preferably, spacer ring with
The portareapiston distance of coaxial resonant cavity is a quarter microwave wavelength.Due to being needed by work gas between middle pipe and inner tube
Need to be provided with aperture on body, therefore spacer ring and facilitate working gas to pass through.
The reflection end face is the short-circuit face of metal, it is ensured that the structure of resonator.Reflection endface position can be in 20mm
In the range of by regulating piston adjust, but apart from resonator portareapiston should be four point of one wavelength odd-multiple it is attached
Closely, i.e. the portareapiston of reflection end face distance resonator is apart from about 3/4ths microwave wavelengths.
The outer tube microwave opening is located on the tube wall of outer tube, and microwave is by outer tube microwave opening with conductance or electric capacity coupling
The mode of conjunction is coupled into the cavity of resonator, microwave coupling interface connection microwave input block and coupling bar, coupling bar with couple
Ring links together, and coupling ring is directly connected to middle pipe, and the size design of outer tube microwave opening should follow microwave transmission impedance
The principle of matching, it is ensured that microwave is smoothly transferred to the inside cavity of resonator.In order to ensure the electricity of the cavity for being coupled into resonator
Magnetic field can form resonance, and outer tube microwave aperture position should be apart from the reflection quarter-wave odd-multiple of end face, i.e. distance
The quarter-wave even-multiple in resonator openend, the distance of outer tube microwave extended distance resonator openend is less than reflection
Distance of the end face to resonator openend.
Operation principle of the invention is described below：The coaxial torch pipe of three described pipes forms the resonator of one end open,
In traditional assembling mode, the open end of the outer pipe, the pipe and the inner pipe of open transverse plane is substantially at same plane, but
Due to lacking local extremely strong electric field region or discharge tip, the igniting of plasma need by external high pressure coil or
The electric spark that short circuit is formed between middle pipe and inner tube is realized, by adjustment assembly so that inner tube is slightly protruded, ensure that
The success of automatic ignition.Further, inner tube protrudes the magnetic distribution for changing torch pipe tip, is formed between inner tube and middle pipe
Local strong electric, is passed through plasma working gas, and input can cause the microwave power of plasma normal work, torch
Automatic ignition forms the plasma of stabilization by pipe.The size that inner tube is protruded should not be excessive, in order to avoid field structure is caused
Strong destruction, general prominent size 0.5-2mm.
It is prepared by the microwave plasma torch device it is a further object to provide a kind of described automatic ignition
Application in the plasma source of Atomic Emission Spectral Analysis.
It is prepared by the microwave plasma torch device it is also another object of the present invention to provide a kind of described automatic ignition
For the application in the plasma source of chemistry and field of measuring technique.
The present invention changes the sparking mode of microwave plasma torch, traditional sparking mode be with Tesla coil or
Pipe and inner tube top form the spark ignition plasma that instantaneous short circuit is formed in screwdriver contact.If making product
Words but also will prevent microwave leakage, the side lighted a fire with screwdriver, it is necessary to consider the reliability of system and the convenience of operation
Formula has that potential safety hazard and Product Experience are bad.Additional extra high-voltage spark is needed to set with Tesla coil
Standby, and ignition electrode needs to be close to plasma, extra high-tension apparatus increased the complexity of equipment, and reduce equipment can
By property, the electromagnetic field that ignition electrode also can be around plasma is interfered, and may increase the unstability of plasma.This
Outward, in order to ensure security, it is necessary to design microwave shielding structure, the presence of needle construction of lighting a fire can also influence microwave shielding structure
Design.The realization of automatic ignition allows the ease for use of microwave plasma torch to greatly enhance, and has both broken away from high-tension ignition for microwave
The influence of shielding construction design, in turn simplify apparatus structure, enhance reliability and stability.
Compared with the microwave plasma torch (the correspondence number of applying for a patent is CN 94205428.8) of the propositions such as Jin Qinhan, this
The microwave plasma torch for proposing is invented (generally to be contacted with metal parts such as screwdrivers without using inner tube and middle pipe instantaneous short circuit
Torch pipe is realized) spark that is formed lights plasma, need to only add the microwave power for meeting microwave plasma torch work, i.e.,
It is capable of achieving automatic ignition.With (Bilgic, A.M., et al., Design and modelling of a such as Bilgic
modified 2.45GHz coaxial plasma torch for atomic spectrometry.Spectrochimica
Acta Part B:Atomic Spectroscopy,1998.53(5):P.773-777.) the modified microwave plasma for proposing
Body torch is compared, and microwave plasma torch proposed by the present invention is without the extra high-voltage spark of offer, you can light plasma
Body.
Brief description of the drawings
Fig. 1 is structural representation of the invention.
Fig. 2 is a kind of microwave plasma torch atomic emission spectrometer schematic diagram of device of automatic ignition.
Specific embodiment
The present invention is further described with reference to the accompanying drawings and examples.It will be understood by those of skill in the art that this
A little embodiments are only illustrative of the invention and is not intended to limit the scope of the invention.
Embodiment 1
Referring to Fig. 1, a kind of microwave plasma torch device of automatic ignition, by outer tube (1), middle pipe (2), inner tube (3), every
Circle (4), microwave coupling interface (5), outer tube microwave opening (6), coupling bar (7), coupling ring (8), reflection end face (9), regulation are lived
Plug (10) composition, the three pipe coaxial configurations of outer tube (1), middle pipe (2), inner tube (3) with metal, between middle pipe (2) and inner tube (3)
The spacer ring (4) for ensureing coaxial and regulation magnetic distribution metal is provided with, coupling ring (8) is arranged on middle pipe (2) outer wall, microwave
Coupling interface (5) is located at and outer tube microwave opening (6) is formed on outer tube (1), and coupling bar (7) is fixed on coupling ring (8), and is located at
Between outer tube microwave opening (6), reflection end face (9) is provided between outer tube (1) and middle pipe (2), forms the coaxial humorous of one end open
Shake chamber, and reflection end face (9) links together with regulating piston (10), can be to reflection end face (9) position by regulating piston (10)
Put and be finely adjusted, to facilitate regulation microwave plasma torch performance.Microwave energy by the outer tube microwave opening (6) on outer tube (1),
The collective effect of microwave coupling interface (5), coupling bar (7) and coupling ring (8) is coupled into cavity, and resonance structure is formed in cavity
And highfield is formed in resonator openend, is punctured working gas and is formed plasma.In order to microwave plasma torch from
Moving point fire needs, and openend plasma formation region forms local highfield and forms electrical breakdown, and this highfield can pass through
Pipe and inner tube relative position are realized in regulation, therefore, the port plane of inner tube (3) protrudes the open transverse plane of resonator.
The automatic ignition of microwave plasma torch needs openend plasma formation region to form local highfield to be formed
Electrical breakdown, this highfield can be realized by managing (2) and inner tube (3) relative position in regulation.In order to ensure the normal work of torch pipe
Make, it is necessary to be equipped with the microwave source matched with torch pipe design, such as continuous wave from 200W exports 2.45GHz microwave sources.
The torch pipe wants normal work, it is necessary to which at least working gas is passed through all the way, and torch pipe can use multiple gases (such as Ar
Gas, He gas, air) used as working gas, working gas (12) is passed through by middle pipe (2), if as plasma spectrochemistry
Analysis light source, sample imports torch pipe by the carrier gas port (11) of inner tube (3) tail end.The external space between outer tube (1) and middle pipe (2)
Shroud gas can be introduced, constriction is carried out for plasma torch (14) or limitation peripheral gas is entered plasma flame
Torch (14), shroud gas are introduced from outer tube (1) near the shroud gas mouthful (13) of reflection end face (9).
The internal diameter of the outer tube (1) and the outside dimension ratio of middle pipe (2) need the impedance for considering microwave transmission circuit special
Property, designing impedance matching is carried out as far as possible, and ensure transmission mode of the microwave in torch pipe for TEM mode, in order to ensure resonance
Microwave transmission mode is TEM mode, the preferred 20mm of outer tube (1) internal diameter, the preferred 7mm of middle pipe (2) external diameter in chamber.In order to ensure inner tube
(3) carrier gas in carries the effect of sample, the preferred 2mm of inner tube (3) internal diameter.
Further, in fit on, the resonator openend of outer tube (1), middle pipe (2) and inner tube (3) exists traditional torch pipe
On same plane, in order to realize automatic ignition, it is necessary to the relatively middle pipe (2) of inner tube (3) portareapiston and outer tube (1) opening
Transverse plane prominent 0.5-2mm, so that local tip or local strong electric are formed, to realize automatic ignition.
The spacer ring (4) between middle pipe (2) and inner tube (3), the portareapiston of spacer ring (4) and coaxial resonant cavity away from
From being a quarter microwave wavelength.Effect of the spacer ring (4) with pipe (2) and inner tube (3) axiality in guarantee, due to middle pipe (2)
Need by working gas, therefore aperture (not shown) be provided with spacer ring (4) to facilitate working gas suitable and inner tube (3) between
Profit passes through.
Reflection end face (9) is the short-circuit face of metal, it is ensured that the structure of resonator.Reflection end face (9) position can be with
Adjusted by regulating piston (10) in the range of 20mm, reflection end face (9) is about apart from the portareapiston distance of resonator
3/4ths microwave wavelengths.
On the tube wall of outer tube (1), microwave is by outer tube microwave opening (6) with conductance for the outer tube microwave opening (6)
Or capacity coupled mode is coupled into the cavity of resonator, microwave coupling interface (5) connection microwave input block and coupling bar
(7), coupling bar (7) links together with coupling ring (8), and coupling ring (8) is directly connected to middle pipe (2), outer tube microwave opening (6)
Position is 1/2nd microwave wavelengths with resonator openend distance.
The operation principle of the present embodiment is described below：The coaxial torch pipe of three described pipes forms the resonance of one end open
Chamber, in traditional assembling mode, the open end of the outer tube (1), middle pipe (2) and inner tube (3) of open transverse plane is substantially at
Same plane, but due to lacking local extremely strong electric field region or discharge tip, the igniting of plasma is needed by outer
The electric spark that short circuit is formed between portion's high-tension coil or middle pipe (2) and inner tube (3) is realized, by adjustment assembly so that inner tube
(3) slightly protrude, ensure that the success of automatic ignition.Inner tube (3) protrusion changes the magnetic distribution at torch pipe tip,
Local strong electric is formd between inner tube (3) and middle pipe (2), plasma working gas (12) are passed through, input can be caused
Automatic ignition forms the plasma torch (14) of stabilization by the microwave power of plasma normal work, torch pipe.Inner tube (3)
Prominent size should not be excessive, in order to avoid strong destruction is caused to field structure, prominent 0.5-2mm.
The present invention changes the sparking mode of microwave plasma torch, traditional sparking mode be with Tesla coil or
(2) and inner tube (3) top is managed in screwdriver contact and forms the spark ignition plasma that instantaneous short circuit is formed.If making product
, it is necessary to consider the reliability of system and the convenience of operation if product, but also microwave leakage is prevented, be lighted a fire with screwdriver
Mode there is a problem of that potential safety hazard and Product Experience are bad.Additional extra high-voltage spark is needed with Tesla coil
Equipment, and ignition electrode needs to be close to plasma, and extra high-tension apparatus increased the complexity of equipment, reduce equipment
Reliability, the electromagnetic field that ignition electrode also can be around plasma is interfered, and may increase the unstability of plasma.This
Outward, in order to ensure security, it is necessary to design microwave shielding structure, the presence of needle construction of lighting a fire can also influence microwave shielding structure
Design.The realization of automatic ignition allows the ease for use of microwave plasma torch to greatly enhance, and has both broken away from high-tension ignition for microwave
The influence of shielding construction design, in turn simplify apparatus structure, enhance reliability and stability.
Embodiment 2
Referring to a kind of microwave plasma torch device of automatic ignition of Fig. 1, the automatic ignition of microwave plasma torch is needed
Want openend plasma formation region to form local highfield and form electrical breakdown, this highfield can be managed by regulation
(2) realized with inner tube (3) relative position.In order to ensure torch pipe normal work, it is necessary to be equipped with the microwave matched with torch pipe design
Source, such as from the continuous wave output 2.45GHz microwave sources of 200W.
Outer tube (1) internal diameter preferred 20mm, middle pipe (2) the preferred 7mm of external diameter, the preferred 2mm of inner tube (3) internal diameter.Middle pipe (2)
Wall thickness 1mm, inner tube (3) wall thickness 0.5mm.
The torch pipe working gas selects Ar gas, working gas (12) to be passed through by middle pipe (2), and carrier gas is by inner tube (3) tail end
Carrier gas port (11) import torch pipe, working gas and carrier gas flux are respectively 0.6L min‐1With 0.4L min‐1。
Further, in fit on, the resonator openend of outer tube (1), middle pipe (2) and inner tube (3) exists traditional torch pipe
On same plane, in order to realize automatic ignition, it is necessary to the relatively middle pipe (2) of inner tube (3) portareapiston and outer tube (1) opening
Transverse plane is prominent, so that local tip or local strong electric are formed, to realize automatic ignition.
The position of transverse plane, i.e., middle pipe (2) and interior are opened with respect to outer tube (1) by pipe (2) in constantly adjustment and inner tube (3)
Pipe (3) carries out automatic ignition test, as a result such as the institute of table 1 respectively in each case with respect to the distance that outer tube (1) openend protrudes
Show.
From test result it can be seen that, the open end of the outer tube (1), middle pipe (2) and inner tube (3) of open transverse plane is basic
In the case of same plane, microwave plasma torch cannot realize automatic ignition, by adjustment assembly so that inner tube (3)
Slightly protrude, ensure that the success of automatic ignition.Inner tube (3) protrusion changes the magnetic distribution at torch pipe tip,
Local strong electric is formd between inner tube (3) and middle pipe (2), plasma working gas (12) are passed through, input can be caused
Automatic ignition forms the plasma torch (14) of stabilization by the microwave power of gas ions normal work, torch pipe.
The present invention changes the sparking mode of microwave plasma torch, traditional sparking mode be with Tesla coil or
(2) and inner tube (3) top is managed in screwdriver contact and forms the spark ignition plasma that instantaneous short circuit is formed.If making product
, it is necessary to consider the reliability of system and the convenience of operation if product, but also microwave leakage is prevented, be lighted a fire with screwdriver
Mode there is a problem of that potential safety hazard and Product Experience are bad.Additional extra high-voltage spark is needed with Tesla coil
Equipment, and ignition electrode needs to be close to plasma, and extra high-tension apparatus increased the complexity of equipment, reduce equipment
Reliability, the electromagnetic field that ignition electrode also can be around plasma is interfered, and may increase the unstability of plasma.This
Outward, in order to ensure security, it is necessary to design microwave shielding structure, the presence of needle construction of lighting a fire can also influence microwave shielding structure
Design.The realization of automatic ignition allows the ease for use of microwave plasma torch to greatly enhance, and has both broken away from high-tension ignition for microwave
The influence of shielding construction design, in turn simplify apparatus structure, enhance reliability and stability.
The microwave plasma torch automatic ignition condition test that table 1 is worked with Ar gas
Note：0 representative is unable to automatic ignition, and 1 representative can be with automatic ignition success.Middle pipe protrudes with respect to outer tube, positional representation
Just, to be otherwise negative, pipe upper surface 1mm on the lower side relative to outer tube upper surface during such as -1mm is represented in table.
Embodiment 3
It is a kind of microwave plasma torch atomic emission spectrometer schematic diagram of device of automatic ignition referring to Fig. 2.
The core of microwave plasma torch atomic emission spectrometer is microwave source (16) and torch pipe (17), microwave source
(16) there is provided maintain plasma continuous firing microwave energy, civilian microwave frequency it is more be 915 ± 50MHz and 2450
± 50MHz, required for plasma microwave source kilowatt or so in power bracket, typically from the continuous of 2450 ± 50MHz
Ripple high power magnetron.The core of microwave source (16) is magnetron, and power supply (15) is powered to magnetron, closed circuit protection
Device (20) is monitored according to the state of microwave source (16), prevents magnetron current excessive, prevents microwave source temperature too high, if
There is unusual condition and close microwave output, prevent device failure.The microwave energy of microwave source (16) output is coupled into torch pipe (17),
Torch pipe (17) is a kind of microwave plasma torch device of automatic ignition, and torch pipe (17) is passed through appropriate working gas, and loading is suitable
When microwave power, you can formation can be used for the plasma source of Atomic Emission Spectral Analysis.By the carrier gas of torch pipe (17)
Determinand is introduced, determinand completes the excitation of spectra, launches element to be measured distinctive by a series of processes in the plasma
Spectral signal, light splitting and signal acquisition process are carried out by spectral detection system (18) to spectral signal, can obtain spectrum letter
Number.By the analysis of spectral signal processing system (19), it is possible to achieve quantitative or qualitatively element measurement.
Described torch pipe (17) is the metal tube with three pipe coaxial configurations, is similar to the coaxial cable of one end open, electromagnetism
Field forms certain field structure in torch pipe cavity, can be conducive to the formation of plasma.Inner tube (3) portareapiston
Relatively middle pipe (2) and outer tube (1) portareapiston are prominent, so as to form local tip or local strong electric, can be with
Realize automatic ignition.
The sparking mode of the torch pipe is different from traditional sparking mode, and traditional mode is with Tesla coil or spiral shell
(2) and inner tube (3) top is managed in silk knife contact and form the spark ignition plasma that instantaneous short circuit is formed, lighted a fire with screwdriver
Mode there is a problem of that potential safety hazard and Product Experience are bad, need additional extra high-voltage spark with Tesla coil
Equipment, and ignition electrode needs to be close to plasma, and extra high-tension apparatus increased the complexity of equipment, reduce equipment
Reliability, the electromagnetic field that ignition electrode also can be around plasma is interfered, and may increase the unstability of plasma.This
Outward, in order to ensure security, it is necessary to design microwave shielding structure, the presence of needle construction of lighting a fire can also influence microwave shielding structure
Design.The realization of automatic ignition allows the ease for use of microwave plasma torch to greatly enhance, and has both broken away from high-tension ignition for microwave
The influence of shielding construction design, in turn simplify apparatus structure, enhance reliability and stability.As can be seen here, automatic ignition
Microwave plasma torch atomic emission spectrometer device is more practical.
Claims (4)
1. the microwave plasma torch device of a kind of automatic ignition, by outer tube (1), middle pipe (2), inner tube (3), spacer ring (4), microwave
Coupling interface (5), outer tube microwave opening (6), coupling bar (7), coupling ring (8), reflection end face (9), regulating piston (10) composition,
The three pipe coaxial configurations of outer tube (1), middle pipe (2), inner tube (3) with metal, spacer ring is provided between middle pipe (2) and inner tube (3)
(4), coupling ring (8) is arranged on middle pipe (2) outer wall, and microwave coupling interface (5) is located at and outer tube microwave opening is formed on outer tube (1)
(6), coupling bar (7) is fixed on coupling ring (8), and positioned between outer tube microwave opening (6), between outer tube (1) and middle pipe (2)
Reflection end face (9) is provided with, the coaxial resonant cavity of one end open is formed, reflection end face (9) links together with regulating piston (10),
Characterized in that, the port plane of inner tube (3) protrudes the open transverse plane of resonator.
2. a kind of microwave plasma torch device of automatic ignition according to claim 1, it is characterised in that inner tube (3)
The relatively middle pipe (2) of portareapiston and outer tube (1) portareapiston protrude 0.5-2mm.
3. a kind of microwave plasma torch device of automatic ignition according to claim 1 is preparing atomic emission spectrum point
Application in the plasma source of analysis.
4. a kind of microwave plasma torch device of automatic ignition according to claim 1 is being prepared for chemistry and measurement
Application in the plasma source of technical field.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710083592.1A CN106793439A (en) | 2017-02-16 | 2017-02-16 | A kind of microwave plasma torch device of automatic ignition |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710083592.1A CN106793439A (en) | 2017-02-16 | 2017-02-16 | A kind of microwave plasma torch device of automatic ignition |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109213039A (en) * | 2018-09-04 | 2019-01-15 | 攀枝花学院 | A kind of remote control Tesla coil |
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| CN113727508A (en) * | 2020-05-26 | 2021-11-30 | 上海大学 | Novel vacuum microwave plasma ion source |
| CN117373964A (en) * | 2023-12-05 | 2024-01-09 | 天津吉兆源科技有限公司 | Automatic ignition device for microwave remote plasma body |
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| CN109213039A (en) * | 2018-09-04 | 2019-01-15 | 攀枝花学院 | A kind of remote control Tesla coil |
| CN111465161A (en) * | 2020-03-18 | 2020-07-28 | 苏州迈微能等离子科技有限公司 | Normal-pressure self-ignition type microwave plasma torch and microwave plasma generation system |
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| CN117373964A (en) * | 2023-12-05 | 2024-01-09 | 天津吉兆源科技有限公司 | Automatic ignition device for microwave remote plasma body |
| CN117373964B (en) * | 2023-12-05 | 2024-03-12 | 天津吉兆源科技有限公司 | Automatic ignition device for microwave remote plasma body |
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