CN106783810A - A kind of nano combined ferroelectric thin-flim materials of golden lead zirconate titanate and preparation method thereof - Google Patents
A kind of nano combined ferroelectric thin-flim materials of golden lead zirconate titanate and preparation method thereof Download PDFInfo
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Abstract
The invention provides a kind of golden nano combined ferroelectric thin-flim materials of lead zirconate titanate and preparation method thereof, a mole composition for the thin-film material is Au:0.6 12mol%, Pb (Zr, Ti) O3:88 99.4mol%.The ferroelectric remnant polarization intensity of the thin-film material is 30 80 μ C/cm2.The preparation method of the material is to weigh lead acetate, zirconium-n-propylate, isopropyl titanate, gold chloride according to the requirement of material mol ratio；With water, isopropanol and acetic acid as solvent, shallow yellow transparent solution is obtained after being sufficiently stirred for.Then resulting solution is placed in Pt/Ti/SiO2On/Si hearth electrode materials, using chemical solution deposition spin-coating film.Afterwards by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C of thermal decomposition organic matters 10 minutes are warmed up to air cooling after 600 DEG C of annealing 30 minutes；Repeat said process for several times, obtain the nano combined ferroelectric thin-flim materials of golden lead zirconate titanate of required thickness.The thin-film material has broad application prospects in fields such as memory, ultracapacitor and solar-energy photo-voltaic cells.
Description
Technical field
The invention belongs to electronic material, functional material and intellectual material field, a kind of gold-lead zirconate titanate nanometer is specifically provided
Composite ferroelectric film material and preparation method thereof.
Background technology
Ferroelectric thin-flim materials is that a class has spontaneous polarization, and the function that spontaneous polarization can be turned to dispatch from foreign news agency place is thin
Membrane material.And, ferroelectric thin-flim materials also has photoelectric effect, piezo-electric effect, pyroelectric effect etc. simultaneously so that with lead zirconate titanate
(Pb(Zr,Ti)O3, PZT), barium titanate (BaTiO3, BTO), bismuth ferrite (BiFeO3, BFO) etc. be the ferroelectric thin-flim materials of representative
Show to be widely applied prospect in fields such as memory, ultracapacitor and solar-energy photo-voltaic cells.
In general, the basic configuration of above-mentioned all kinds of new function devices is Top electrode/ferroelectric thin film/bottom electrode " Sanming City
Control " structure.Therefore, there is a certain size interface potential barrier in upper and lower two interfaces of ferroelectric thin film.By regulating and controlling iron
Electropolarized size and Orientation, can effectively change interface potential barrier, so as to realize conducting and obstruction, the electron-hole of electric current
Efficiently separate.So, the size of ferroelectric remnant polarization intensity directly affects the performance of above-mentioned all kinds of new function devices.
In numerous ferroelectric thin films, PZT ferroelectric thin-flim materials is one of best ferroelectric material of current ferroelectric properties.
At present, in order to mutually compatible with Contemporary semiconductor industry, it is used mostly lower electricity of the metal platinum as deposition ferroelectric thin film
Pole material.The ferroelectric properties of ferroelectric thin film is closely related with its heterogeneous microstructure, and heterogeneous microstructure depends on film
Technology of preparing etc..Although the method for preparing ferroelectric thin film at present there are many kinds, sunk including magnetron sputtering, pulse laser
Product, chemical vapor deposition, chemical liquid deposition etc., but no matter which kind of method is used, the ferroelectric thin film prepared in metal platinum
All it is polycrystalline.So compared to the ferroelectric thin film of single crystal epitaxial, due to the influence of crystal boundary, defect etc., inevitably make
Into ferroelectricity periodical poling it is difficult, by defect electric charge pinning the problems such as, making the polarization intensity of film reduces.And the reduction meeting of polarization intensity
Cause the problems such as difficult, the solar cell photovoltaic conversion efficiency reduction of memory read/write.Therefore, it is necessary to develop one kind
Improve the effective ways of polycrystalline ferroelectric thin film polarization intensity.
The content of the invention
The present invention is directed to the polycrystalline ferroelectric thin film less problem of ferroelectric remnant polarization strength ratio, there is provided and a kind of new gold-
Nano combined ferroelectric thin film of lead zirconate titanate and preparation method thereof, can effectively improve the polarization intensity of polycrystalline ferroelectric thin film.Should
Method is simple and easy to apply, beneficial to practical application.The thin-film material is in fields such as memory, ultracapacitor and solar-energy photo-voltaic cells
Have broad application prospects.
The purpose of the present invention is accomplished by the following way：
The invention provides a kind of gold-lead zirconate-titanate ferroelectric nano composite film, the thin-film material into packet
Required as follows into meeting：
Mole composition be Au:0.6-12mol%, Pb (Zr, Ti) O3:88-99.4mol%；
Pb in the ferroelectric lead zirconate titanate film:Zr:The mol ratio of Ti is 10:0-8:2-10；
The nano combined ferroelectric thin film of gold-lead zirconate titanate that the present invention is provided, the ferroelectric remnant polarization of the thin-film material is
30-80μC/cm2；The thin-film material has (111) faceted crystal preferred orientation；The bottom electrode of the thin-film material is commercialization Pt/
Ti/SiO2/Si；Upper electrode material is the thick platinum of 50nm.
Present invention also offers the preparation method of the nano combined ferroelectric thin film of gold-lead zirconate titanate, comprise the following steps that：
(1) with water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, are pressed
According to Au:Pb(Zr,Ti)O3Mol ratio be 0.006-0.120:1, Pb:Zr:The mol ratio of Ti is 10:0-8:2-10, weighs chlorine
Auric acid, lead acetate, zirconium-n-propylate and isopropyl titanate.According to required concentration, water dissolves gold chloride is used, add acetate dissolution acetic acid
Lead, add isopropanol dissolving zirconium-n-propylate and isopropyl titanate, be then stirred at room temperature, stirring to gold chloride, lead acetate,
Zirconium-n-propylate and isopropyl titanate all dissolve, and obtain shallow yellow transparent solution；
(2) chemical solution deposition is used, the solution that step (1) has been configured is dripped into Pt/Ti/SiO2Revolved on/Si substrates
Apply, rotating speed is 1500 revs/min, and the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material
Film；
(3) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes, are warmed up to 600 DEG C of annealing 30
Air cooling after minute；
(4) (2)-(3) step process is repeated for several times, the gold-lead zirconate-titanate ferroelectric nano compound film of thickness needed for being obtained.
Platinum electrode (50nm thick) is deposited with ferro-electricity compound film surface using vacuum sputtering technique, may finally be formed platinum/
Gold-lead zirconate titanate/platinum capacitor arrangement.
Beneficial effects of the present invention：
The nano combined ferroelectric thin film of gold-lead zirconate titanate for realizing optimal ferroelectric properties of the present invention into being grouped into
Au:Pb(Zr,Ti)O3Mol ratio be 0.012:1.Now, the pure ferroelectric lead zirconate titanate film of ferroelectric remnant polarization strength ratio is carried
It is high by 50% or so, about reach 80 μ C/cm2, the ferroelectric thin film of the single crystal epitaxial that can match in excellence or beauty completely.And sunk using chemical solution
Area method prepares the nano combined ferroelectric thin film of gold-lead zirconate titanate, with process is simple, with low cost, component it is uniform, can large area it is equal
Even film forming and with the silicon-based semiconductor industry advantage such as mutually compatible.
Brief description of the drawings
Fig. 1 is the structural representation of gold obtained in the present invention-lead zirconate-titanate ferroelectric laminated film.
Fig. 2 is when the ratio of zirconium in lead zirconate titanate and titanium is 2:When 3, the gold-zirconium metatitanic acid of the obtained difference gold content of the present invention
The ferroelectric hysteresis loop figure of the nano combined ferroelectric thin film of lead.
Fig. 3 is when the ratio of zirconium in lead zirconate titanate and titanium is 2:When 3, the present invention nano combined iron of obtained gold-lead zirconate titanate
The ferroelectric remnant polarization intensity of conductive film with gold content variation diagram.
Specific embodiment
(a mole composition is Au to embodiment 1:0.6mol%, Pb (Zr0.4Ti0.6)O3:99.4mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Pb:Ti:Zr mol ratios are 5:3:2, according to Au:Pb(Zr0.4Ti0.6)O3Mol ratio be 0.006:1, weigh gold chloride, acetic acid
Lead, zirconium-n-propylate and isopropyl titanate, water, acetic acid and isopropanol are separately added into the concentration standard of 0.4mol/L, then room temperature again
Under be stirred, stirring to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain light yellow clear
Solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes in electric furnace, are warmed up to 600 DEG C
Air cooling after annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The residual polarization of gained gold-nano combined ferroelectric thin film of lead zirconate titanate is 64.4 μ C/cm2(see Fig. 2), with pure zirconium
Lead titanatc ferroelectric membranc is compared, and ferroelectric remnant polarization improves 20.4%.
(a mole composition is Au to embodiment 2:1.2mol%, Pb (Zr0.4Ti0.6)O3:98.8mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Pb:Ti:Zr mol ratios are 5:3:2, according to Au:Pb(Zr0.4Ti0.6)O3Mol ratio be 0.012:1, weigh gold chloride, acetic acid
Lead, zirconium-n-propylate and isopropyl titanate, water, acetic acid and isopropanol are separately added into the concentration standard of 0.4mol/L, then room temperature again
Under be stirred, stirring to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain light yellow clear
Solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes in electric furnace, are warmed up to 600 DEG C
Air cooling after annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The residual polarization of gained gold-nano combined ferroelectric thin film of lead zirconate-titanate ferroelectric is 79.7 μ C/cm2(see Fig. 2), it is and pure
Ferroelectric lead zirconate titanate film compare, ferroelectric remnant polarization improves 49.5%.
(a mole composition is Au to embodiment 3:1.2mol%, PbTiO3:98.8mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, isopropyl titanate are solute, according to Au:PbTiO3's
Mol ratio is 0.012:1, gold chloride, lead acetate, isopropyl titanate are weighed, water, vinegar are separately added into the concentration standard of 0.4mol/L
Acid and isopropanol, are then stirred at room temperature again, and stirring to gold chloride, lead acetate, isopropyl titanate all dissolving, are obtained
Shallow yellow transparent solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes in electric furnace, are warmed up to 600 DEG C
Air cooling after annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead titanates ferroelectric nano laminated film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead titanates thick platinum electrode, platinum
The area of electrode is 0.1963mm2。
The residual polarization of gained gold-nano combined ferroelectric thin film of lead titanates is 39.1 μ C/cm2.With pure lead titanate thin film
Compare, ferroelectric remnant polarization improves 11.7%.
(a mole composition is Au to embodiment 4:1.2mol%, Pb (Zr0.8Ti0.2)O3:98.8mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Pb:Ti:Zr mol ratios are 5:1:4, according to Au:Pb(Zr0.8Ti0.2)O3Mol ratio be 0.012:1, weigh gold chloride, acetic acid
Lead, zirconium-n-propylate and isopropyl titanate, water, acetic acid and isopropanol are separately added into the concentration standard of 0.4mol/L, then room temperature again
Under be stirred, stirring to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain light yellow clear
Solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes in electric furnace, are warmed up to 600 DEG C
Air cooling after annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The residual polarization of gained gold-nano combined ferroelectric thin film of lead zirconate titanate is 18.5 μ C/cm2.It is pure compared to this
PZT thin film for, ferroelectric remnant polarization improves 8.8%.
(a mole composition is Au to embodiment 5:5mol%, Pb (Zr0.4Ti0.6)O3:95mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Pb:Ti:Zr mol ratios are 5:3:2, according to Au:Pb(Zr0.4Ti0.6)O3Mol ratio be 0.053:1, weigh gold chloride, acetic acid
Lead, zirconium-n-propylate and isopropyl titanate, water, acetic acid and isopropanol are separately added into the concentration standard of 0.4mol/L, then room temperature again
Under be stirred, stirring to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain light yellow clear
Solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes in electric furnace, are warmed up to 600 DEG C
Air cooling after annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The residual polarization of the gained gold-nano combined ferroelectric thin film of lead zirconate titanate (see Fig. 1) is 64.4 μ C/cm2(see Fig. 2),
Compared with pure ferroelectric lead zirconate titanate film, ferroelectric remnant polarization improves 20.4%.
(a mole composition is Au to embodiment 6:12mol%, Pb (Zr0.4Ti0.6)O3:88mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Pb:Ti:Zr mol ratios are 5:3:2, according to Au:Pb(Zr0.4Ti0.6)O3Mol ratio be 0.14:1, weigh gold chloride, acetic acid
Lead, zirconium-n-propylate and isopropyl titanate, water, acetic acid and isopropanol are separately added into the concentration standard of 0.4mol/L, then room temperature again
Under be stirred, stirring to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain light yellow clear
Solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes in electric furnace, are warmed up to 600 DEG C
Air cooling after annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The residual polarization of gained gold-nano combined ferroelectric thin film of lead zirconate titanate is changed into 39.4 μ C/cm2(see Fig. 2).
(a mole composition is Au to comparative example 1:0mol%, Pb (Zr, Ti) O3:100mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Pb:Ti:Zr mol ratios are 5:3:2, according to Au:Pb(Zr,Ti)O3Mol ratio be 0:1, weigh gold chloride, lead acetate, positive third
Alcohol zirconium and isopropyl titanate, water, acetic acid and isopropanol are separately added into the concentration standard of 0.4mol/L, are then stirred at room temperature again
Mix, stirring to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain shallow yellow transparent solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes, then in 600 DEG C of electric furnaces
Annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The remanent polarization of gained ferroelectric lead zirconate titanate film is 53.3 μ C/cm2。
(a mole composition is Au to comparative example 2:0mol%, PbTiO3:100mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, isopropyl titanate are solute, according to Au:PbTiO3's
Mol ratio is 0:1, weigh gold chloride, lead acetate, isopropyl titanate, with the concentration standard of 0.4mol/L be separately added into water, acetic acid and
Isopropanol, is then stirred at room temperature again, and stirring to gold chloride, lead acetate, isopropyl titanate all dissolving, obtain pale yellow
Color clear solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes, then in 600 DEG C of electric furnaces
Annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The remanent polarization of gained ferroelectric lead zirconate titanate film is 35.0 μ C/cm2。
(a mole composition is Au to comparative example 3:0mol%, Pb (Zr0.2Ti0.8)O3:100mol%)
Step one：Prepare solution
With water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Pb:Ti:Zr mol ratios are 5:1:4, according to Au:Pb(Zr0.2Ti0.8)O3Mol ratio be 0:1, weigh gold chloride, lead acetate, just
Propyl alcohol zirconium and isopropyl titanate, water, acetic acid and isopropanol are separately added into the concentration standard of 0.4mol/L, are then carried out at room temperature again
Stirring, stirring to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain shallow yellow transparent solution；
Step 2：Prepare thin-film material
(1) Pt/Ti/SiO is used2/ Si (100) substrate.The solution that step one is configured is dripped into spin coating on substrate, rotating speed
It it is 1500 revs/min, the time is 10 seconds, it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(2) by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes, then in 600 DEG C of electric furnaces
Annealing 30 minutes；
(3) repeat (2)-(3) step process 3 times, 200nm thick gold-lead zirconate-titanate ferroelectric nano compound film is obtained；
(4) using vacuum sputtering technique in the nano combined ferroelectric thin film plated surface 50nm of gold-lead zirconate titanate thick platinum electrode,
The area of platinum electrode is 0.1963mm2。
The remanent polarization of gained ferroelectric lead zirconate titanate film is 17 μ C/cm2。
The above embodiments merely illustrate the technical concept and features of the present invention, its object is to allow person skilled in the art
Scholar will appreciate that present disclosure and implement according to this that it is not intended to limit the scope of the present invention.It is all according to the present invention
The equivalent change or modification made, should all be included within the scope of the present invention.
Claims (9)
1. a kind of nano combined ferroelectric thin-flim materials, it is characterised in that：The thin-film material meets following requirements into being grouped into：
Mole composition be Au:0.6-12mol%, Pb (Zr, Ti) O3:88-99.4mol%.
2. according to nano combined ferroelectric thin-flim materials described in claim 1, it is characterised in that：The ferroelectric remnant of the thin-film material
Polarization intensity is 30-80 μ C/cm2。
3. according to nano combined ferroelectric thin-flim materials described in claim 1, it is characterised in that：The thin-film material has (111)
Faceted crystal preferred orientation.
4. according to nano combined ferroelectric thin-flim materials described in claim 1, it is characterised in that：The bottom electrode of the thin-film material is
Commercial Pt/Ti/SiO2/Si。
5. according to nano combined ferroelectric thin-flim materials described in claim 1, it is characterised in that：The Top electrode of the thin-film material is
Platinum, thickness is 50nm.
6. according to nano combined ferroelectric thin-flim materials described in claim 1, it is characterised in that：Pb in the thin-film material:Zr:Ti
Mol ratio be 10:0-8:2-10.
7. according to nano combined ferroelectric thin-flim materials described in claim 1, it is characterised in that：The nano combined ferroelectric thin film
Into being grouped into Au:Pb(Zr,Ti)O3Mol ratio be 0.012:1.
8. the preparation method of nano combined ferroelectric thin-flim materials described in a kind of claim 1, it is characterised in that including following step
Suddenly：
(1), with water, acetic acid and isopropanol as solvent, gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate are solute, according to
Au:Pb(Zr,Ti)O3Mol ratio be 0.006-0.140:1, Pb:Zr:The mol ratio of Ti is 10:0-8:2-10, weighs chlorine gold
Acid, lead acetate, zirconium-n-propylate and isopropyl titanate, are separately added into water, acetic acid and isopropanol, are then stirred at room temperature, stir
Mix to gold chloride, lead acetate, zirconium-n-propylate and isopropyl titanate all dissolving, obtain shallow yellow transparent solution；
(2), using chemical solution deposition, the solution that step (1) has been configured is dripped into Pt/Ti/SiO2Spin coating on/Si substrates, turns
Speed is 1500 revs/min, and the time is 10 seconds, and it is 4000 revs/min next to heighten rotating speed, and the time is 40 seconds, obtains raw material film；
(3), by the drying 10 minutes of 120 DEG C of raw material film, 350 DEG C thermally decompose organic matter 10 minutes, are warmed up to 600 DEG C and anneal 30 minutes
Air cooling afterwards；
(4), (2)-(3) step process is repeated for several times, the nano combined ferroelectric thin film of gold-lead zirconate titanate of thickness needed for being obtained.
9. a kind of capacitor containing nano combined ferroelectric thin-flim materials described in claim 1, it is characterised in that：Splashed using vacuum
Penetrate technology and be deposited with platinum electrode on nano combined ferroelectric thin film surface, ultimately form platinum/gold-lead zirconate titanate/platinum capacitor arrangement.
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Cited By (4)
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| CN109036878A (en) * | 2018-06-06 | 2018-12-18 | 华南师范大学 | A kind of ferroelectric thin-flim materials device and preparation method thereof |
| CN109279652A (en) * | 2018-09-03 | 2019-01-29 | 沈阳工业大学 | A kind of nano combined ferroelectric thin-flim materials of platinum-zirconium lead titanates and preparation method |
| CN114956812A (en) * | 2022-05-24 | 2022-08-30 | 沈阳工业大学 | Lead titanate-lead zirconate nano composite film and preparation method thereof |
| CN115274298A (en) * | 2022-05-20 | 2022-11-01 | 沈阳工业大学 | Lead zirconate nano composite dielectric film and preparation method thereof |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109036878A (en) * | 2018-06-06 | 2018-12-18 | 华南师范大学 | A kind of ferroelectric thin-flim materials device and preparation method thereof |
| CN109036878B (en) * | 2018-06-06 | 2020-04-07 | 华南师范大学 | Ferroelectric film material device and preparation method thereof |
| CN109279652A (en) * | 2018-09-03 | 2019-01-29 | 沈阳工业大学 | A kind of nano combined ferroelectric thin-flim materials of platinum-zirconium lead titanates and preparation method |
| CN115274298A (en) * | 2022-05-20 | 2022-11-01 | 沈阳工业大学 | Lead zirconate nano composite dielectric film and preparation method thereof |
| CN115274298B (en) * | 2022-05-20 | 2023-10-03 | 沈阳工业大学 | Lead zirconate nano composite dielectric film and preparation method thereof |
| CN114956812A (en) * | 2022-05-24 | 2022-08-30 | 沈阳工业大学 | Lead titanate-lead zirconate nano composite film and preparation method thereof |
| CN114956812B (en) * | 2022-05-24 | 2023-02-24 | 沈阳工业大学 | Lead titanate-lead zirconate nano composite film and preparation method thereof |
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