CN106783507A - A kind of ion shaping lens structure design based on SIMION emulation - Google Patents

A kind of ion shaping lens structure design based on SIMION emulation Download PDF

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Publication number
CN106783507A
CN106783507A CN201611246989.XA CN201611246989A CN106783507A CN 106783507 A CN106783507 A CN 106783507A CN 201611246989 A CN201611246989 A CN 201611246989A CN 106783507 A CN106783507 A CN 106783507A
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CN
China
Prior art keywords
ion
lens
simion
shaping lens
ions follow
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Pending
Application number
CN201611246989.XA
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Chinese (zh)
Inventor
夏波涌
王海燕
李丽萍
王祥胜
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JIANGSU YIPU TECHNOLOGY Co Ltd
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JIANGSU YIPU TECHNOLOGY Co Ltd
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Application filed by JIANGSU YIPU TECHNOLOGY Co Ltd filed Critical JIANGSU YIPU TECHNOLOGY Co Ltd
Priority to CN201611246989.XA priority Critical patent/CN106783507A/en
Publication of CN106783507A publication Critical patent/CN106783507A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/067Ion lenses, apertures, skimmers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/40Time-of-flight spectrometers

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

The invention discloses a kind of ion shaping lens structure design based on SIMION emulation, ions follow trajectories are analyzed by SIMION first, a kind of ion shaping lens device is designed accordingly.The simulation process is that ions follow trajectories are analyzed using SIMION, main to include setting up ions follow trajectories model, and carries out parameter optimization using SIMION emulation.The ion shaping lens are three simple lenses of diameter identical coaxial circles tubular electrode combination, the ion lens is installed in the vacuum system of time of-flight mass spectrometer, it is focused for ion, lower the degree and energy, speed, the degree of scatter of angle of ion space diverging, to cause that ion substantially reaches mass analyzer.

Description

A kind of ion shaping lens structure design based on SIMION emulation
Technical field
It is based on the present invention relates to the technology category of the ion shaping lens in time of-flight mass spectrometer, more particularly to one kind The structure design of the ion shaping lens of SIMION emulation.
Background technology
In time of-flight mass spectrometer, the ion produced by ionization apparatus, especially time of flight secondary ion massspectrometry instrument In, secondary ion is entered into when in secondary ion optical system from the reflection of primary ions direction, is unavoidably existed Initial position dispersion, initial angle dispersion, primary power dispersion and initial velocity dispersion, these primary condition dispersion can cause from Difference on the sub- flight time, so that designing ion guide device before ion enters mass analyzer, enters to ion Line focusing, lowers the degree and energy, speed, the degree of scatter of angle of ion space diverging, to cause that ion is substantially arrived Up to mass analyzer.
Existing ion lens species is a lot, but is the absence of a kind of being designed according to the ions follow trajectories of predetermined substance Ion lens.The ions follow trajectories of predetermined substance molecule are analyzed herein in conjunction with SIMION simulation softwares, are set based on this An ion reshaping structure is counted.
The content of the invention
To solve the above problems, the purpose of the present invention is exactly to design a kind of ion shaping lens based on SIMION, first Simulation calculation is carried out to the flight path for setting ion using SIMION, a kind of ion shaping lens has been redesigned so that ion Ion after change substantially reaches mass analyzer, improves the precision of time of-flight mass spectrometer.
The present invention uses following technical scheme to solve above-mentioned technical problem:
1. it is a kind of based on SIMION emulation ion shaping lens structure design, it is characterised in that its design process first lead to Cross SIMION softwares to be analyzed ions follow trajectories, a kind of ion shaping lens device is designed accordingly.
2. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that:Using existing Electrostatic lenses analysis mode soft sim ION8.1 is emulated to the ions follow trajectories that ionization is produced, and obtains dividing for ion Dissipate track.
3. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that emulated When, the mode that selection directly sets array sizes sets up geometrical model.
4. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that emulated When, the parameter of required setting includes:The size of platform space, symmetric property, the type of field, the position of electrode, shape and size, The kinetic energy of ion, movement area distance, initial position, initial velocity, polar plate voltage value.
5. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that by emulation The dispersion angle of ions follow trajectories is obtained, the distance between ion lens pole plate is determined according to this and the value of voltage is accessed.
6. ion shaping lens according to claim 1, it is characterised in that by three diameter identical coaxial cylinders The simple lens of shape electrode combination, the combined shaped of three electrodes is symmetrical, and the both sides of simple lens have identical and constant Current potential, the current potential of two electrodes in makings outside is zero, and the current potential of target is adjustable.
7. ion shaping lens according to claim 1, its feature also has the current potential for assuming three electrodes to be respectively V1、V2And V3, and V1=V3, therefore the focal length of simple lens depends on the potential values of three electrodes for the value of f.
8. ion shaping lens according to claim 1, its feature also has:By the potential value for adjusting target And the size of pole plate, spacing adjust the focal length of lens, the transmission and focusing to ion are realized.
9. ion shaping lens according to claim 1, its feature also has that to set z be current potential transverse axis coordinate, and s is cylinder Spacing, a be gap midpoint to lens centre distance, then the focal length of simple lens be f value be
10. ion shaping lens according to claim 1, its feature also has:Lens are installed on flight time mass spectrum In the vacuum system of instrument, and whole vacuum system is full of as far as possible, the ion after ionization is carried out shaping and gathered with maximum magnitude Jiao, and substantially enter in mass analyzer.
11. ion shaping lens according to claim 1, its feature also has:Three metal electrode boards of lens it Between be full of insulating materials so that each pole plate is spaced and mutually insulated.
Brief description of the drawings
Fig. 1 is the method flow diagram of the ion shaping lens based on SIMION emulation;
Fig. 2 is the structural representation of ion shaping lens.
Specific embodiment
Technical scheme is described in further detail below in conjunction with the accompanying drawings:
1. as shown in figure 1, the method flow diagram of the ion shaping lens based on SIMION emulation, a kind of imitative based on SIMION Genuine ion shaping lens structure design, it is characterised in that its design process is first by SIMION softwares to ions follow trajectories It is analyzed, a kind of ion shaping lens device is designed accordingly.
2. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that:Using existing Electrostatic lenses analysis mode soft sim ION8.1 is emulated to the ions follow trajectories that ionization is produced, and obtains dividing for ion Dissipate track.
3. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that emulated When, the mode that selection directly sets array sizes sets up geometrical model.
4. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that emulated When, the parameter of required setting includes:The size of platform space, symmetric property, the type of field, the position of electrode, shape and size, The kinetic energy of ion, movement area distance, initial position, initial velocity, polar plate voltage value.
5. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that by emulation The dispersion angle of ions follow trajectories is obtained, the distance between ion lens pole plate is determined according to this and the value of voltage is accessed.
6. as shown in Fig. 2 ion shaping lens according to claim 1, it is characterised in that identical by three diameters Coaxial circles tubular electrode combination simple lens, the combined shaped of three electrodes is symmetrical, and the both sides of simple lens have phase Same and two electrodes on the outside of constant current potential, makings current potentials are zero, and the current potential of target is adjustable.
7. ion shaping lens according to claim 1, its feature also has the current potential for assuming three electrodes to be respectively V1、V2And V3, and V1=V3, therefore the focal length of simple lens depends on the potential values of three electrodes for the value of f.
8. ion shaping lens according to claim 1, its feature also has:By the potential value for adjusting target And the size of pole plate, spacing adjust the focal length of lens, the transmission and focusing to ion are realized.
9. ion shaping lens according to claim 1, its feature also has that to set z be current potential transverse axis coordinate, and s is cylinder Spacing, a be gap midpoint to lens centre distance, then the focal length of simple lens be f value be
10. ion shaping lens according to claim 1, its feature also has:Lens are installed on flight time mass spectrum In the vacuum system of instrument, and whole vacuum system is full of as far as possible, the ion after ionization is carried out shaping and gathered with maximum magnitude Jiao, and substantially enter in mass analyzer.
11. ion shaping lens according to claim 1, its feature also has:Three metal electrode boards of lens it Between be full of insulating materials so that each pole plate is spaced and mutually insulated.

Claims (11)

1. it is a kind of based on SIMION emulation ion shaping lens structure design, it is characterised in that its design process passes through first SIMION softwares are analyzed to ions follow trajectories, and a kind of ion shaping lens device is designed accordingly.
2. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that:Using existing electrostatic Lens analysis simulation softward SIMION8.1 is emulated to the ions follow trajectories that ionization is produced, and obtains the dispersion rail of ion Mark.
3. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that when being emulated, choosing The mode for selecting directly setting array sizes sets up geometrical model.
4. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that when being emulated, institute The parameter that need to be set includes:The size of platform space, symmetric property, the type of field, the position of electrode, shape and size, ion Kinetic energy, movement area distance, initial position, initial velocity, polar plate voltage value.
5. SIMION according to claim 1 is analyzed to ions follow trajectories, it is characterised in that obtained by emulating The dispersion angle of ions follow trajectories, the distance between ion lens pole plate is determined according to this and the value of voltage is accessed.
6. ion shaping lens according to claim 1, it is characterised in that by three diameter identical coaxial circles tubulars electricity The simple lens that pole combines, the combined shaped of three electrodes is symmetrical, and the both sides of simple lens have identical and constant current potential, The current potential of two electrodes in makings outside is zero, and the current potential of target is adjustable.
7. ion shaping lens according to claim 1, its feature also has three current potential of electrode respectively V of hypothesis1、V2 And V3, and V1=V3, therefore the focal length of simple lens depends on the potential values of three electrodes for the value of f.
8. ion shaping lens according to claim 1, its feature also has:By adjust target potential value and The size of pole plate, spacing adjust the focal length of lens, realize the transmission and focusing to ion.
9. ion shaping lens according to claim 1, its feature also has that to set z be current potential transverse axis coordinate, between s is cylinder Away from a is distance of the gap midpoint to lens centre, then the focal length of simple lens is that the value of f is
10. ion shaping lens according to claim 1, its feature also has:Lens are installed on time of-flight mass spectrometer In vacuum system, and whole vacuum system is full of as far as possible, the ion after ionization is carried out by shaping and focusing with maximum magnitude, and Substantially enter in mass analyzer.
11. ion shaping lens according to claim 1, its feature also has:Filled between three metal electrode boards of lens Full insulating materials so that each pole plate is spaced and mutually insulated.
CN201611246989.XA 2016-12-29 2016-12-29 A kind of ion shaping lens structure design based on SIMION emulation Pending CN106783507A (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
CN201611246989.XA CN106783507A (en) 2016-12-29 2016-12-29 A kind of ion shaping lens structure design based on SIMION emulation

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1689134A (en) * 2002-07-16 2005-10-26 力可公司 Tandem time of flight mass spectrometer and method of use
CN103858201A (en) * 2011-03-04 2014-06-11 珀金埃尔默健康科学股份有限公司 Electrostatic lenses and systems including the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1689134A (en) * 2002-07-16 2005-10-26 力可公司 Tandem time of flight mass spectrometer and method of use
CN103858201A (en) * 2011-03-04 2014-06-11 珀金埃尔默健康科学股份有限公司 Electrostatic lenses and systems including the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘晓旭 等: "《TOF-SIMS二次离子光学***仿真研究》", 《中国测试》 *

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