CN106770364A - 基板定位机构、宏观检查装置及宏观检查方法 - Google Patents
基板定位机构、宏观检查装置及宏观检查方法 Download PDFInfo
- Publication number
- CN106770364A CN106770364A CN201710061596.XA CN201710061596A CN106770364A CN 106770364 A CN106770364 A CN 106770364A CN 201710061596 A CN201710061596 A CN 201710061596A CN 106770364 A CN106770364 A CN 106770364A
- Authority
- CN
- China
- Prior art keywords
- substrate
- macro inspection
- positioning mechanism
- inspection apparatus
- body frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 179
- 230000007246 mechanism Effects 0.000 title claims abstract description 90
- 238000007689 inspection Methods 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000000725 suspension Substances 0.000 claims description 15
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims description 6
- 238000007667 floating Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 12
- 239000012634 fragment Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 206010000060 Abdominal distension Diseases 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 208000024330 bloating Diseases 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710061596.XA CN106770364A (zh) | 2017-01-26 | 2017-01-26 | 基板定位机构、宏观检查装置及宏观检查方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710061596.XA CN106770364A (zh) | 2017-01-26 | 2017-01-26 | 基板定位机构、宏观检查装置及宏观检查方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106770364A true CN106770364A (zh) | 2017-05-31 |
Family
ID=58955149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710061596.XA Pending CN106770364A (zh) | 2017-01-26 | 2017-01-26 | 基板定位机构、宏观检查装置及宏观检查方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106770364A (zh) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006035703A1 (ja) * | 2004-09-27 | 2006-04-06 | Olympus Corporation | マクロ検査装置及びマクロ検査方法 |
CN101764077A (zh) * | 2009-12-31 | 2010-06-30 | 东莞宏威数码机械有限公司 | 对位***及对位方法 |
CN201845752U (zh) * | 2010-10-29 | 2011-05-25 | 北京京东方光电科技有限公司 | 基板对位装置、基板对位平台和基板传送设备 |
CN102456602A (zh) * | 2010-10-28 | 2012-05-16 | 奥林巴斯株式会社 | 检查装置和基板的定位方法 |
CN204079766U (zh) * | 2014-08-21 | 2015-01-07 | 芜湖东旭光电科技有限公司 | 液晶玻璃基板横切机的导向轮手动调节装置 |
CN104992919A (zh) * | 2015-07-21 | 2015-10-21 | 合肥鑫晟光电科技有限公司 | 定位脚、定位装置及位置归正方法 |
CN206671219U (zh) * | 2017-01-26 | 2017-11-24 | 江苏东旭亿泰智能装备有限公司 | 基板定位机构、宏观检查装置 |
-
2017
- 2017-01-26 CN CN201710061596.XA patent/CN106770364A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006035703A1 (ja) * | 2004-09-27 | 2006-04-06 | Olympus Corporation | マクロ検査装置及びマクロ検査方法 |
CN101764077A (zh) * | 2009-12-31 | 2010-06-30 | 东莞宏威数码机械有限公司 | 对位***及对位方法 |
CN102456602A (zh) * | 2010-10-28 | 2012-05-16 | 奥林巴斯株式会社 | 检查装置和基板的定位方法 |
CN201845752U (zh) * | 2010-10-29 | 2011-05-25 | 北京京东方光电科技有限公司 | 基板对位装置、基板对位平台和基板传送设备 |
CN204079766U (zh) * | 2014-08-21 | 2015-01-07 | 芜湖东旭光电科技有限公司 | 液晶玻璃基板横切机的导向轮手动调节装置 |
CN104992919A (zh) * | 2015-07-21 | 2015-10-21 | 合肥鑫晟光电科技有限公司 | 定位脚、定位装置及位置归正方法 |
CN206671219U (zh) * | 2017-01-26 | 2017-11-24 | 江苏东旭亿泰智能装备有限公司 | 基板定位机构、宏观检查装置 |
Non-Patent Citations (1)
Title |
---|
费仁元等: "《机器人机械设计和分析》", vol. 1, 北京工业大学出版社, pages: 190 - 193 * |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20180095265A1 (en) | Curved display panel adhering device | |
CN104385757A (zh) | 一种贴合装置以及相应的贴合方法 | |
CN107450284B (zh) | 曝光设备及透明基板的曝光方法 | |
CN206671219U (zh) | 基板定位机构、宏观检查装置 | |
CN205588752U (zh) | 撕背光源保护膜装置 | |
CN103381965A (zh) | 一种液晶面板的气浮式导向轮传送装置 | |
CN110065226A (zh) | 仿形机构及设有其的贴合设备 | |
CN104536171A (zh) | 一种液晶屏检测装置 | |
KR101807497B1 (ko) | 글래스 패널용 흡착장치 | |
CN101677078B (zh) | 基板定位装置 | |
CN114101910B (zh) | 共通金属掩膜版手动张网机 | |
CN102444670A (zh) | 气浮结构 | |
CN208689310U (zh) | 一种对组压合装置 | |
CN105073661A (zh) | 用于整平玻璃板的装置和整平玻璃板的方法 | |
CN209702215U (zh) | 一种平衡升降装置 | |
CN106770364A (zh) | 基板定位机构、宏观检查装置及宏观检查方法 | |
CN106062857B (zh) | 曲面面板显示器的缺陷修复装置 | |
CN201387471Y (zh) | 点灯检查设备 | |
CN203616545U (zh) | 液晶模组分离装置 | |
KR101639557B1 (ko) | 엘씨디 패널 커브드 변환 시스템 | |
CN109366965A (zh) | 一种真空贴膜机 | |
CN100362643C (zh) | 基板吸附装置 | |
CN209111513U (zh) | 一种真空贴膜机 | |
CN106304677A (zh) | 双臂多头贴片机 | |
CN101369063A (zh) | 液晶屏的调整装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant before: JIANGSU DONGXU YITAI INTELLIGENT EQUIPMENT Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20201218 Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant before: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
|
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170531 |