CN106768537A - 基于溅射薄膜技术的高性能扭矩传感器 - Google Patents
基于溅射薄膜技术的高性能扭矩传感器 Download PDFInfo
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- CN106768537A CN106768537A CN201710151982.8A CN201710151982A CN106768537A CN 106768537 A CN106768537 A CN 106768537A CN 201710151982 A CN201710151982 A CN 201710151982A CN 106768537 A CN106768537 A CN 106768537A
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- sensitive resistance
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- strain
- sensor
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- 238000005516 engineering process Methods 0.000 title claims abstract description 28
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 25
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- 239000010408 film Substances 0.000 claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 239000011651 chromium Substances 0.000 claims description 9
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- 230000004888 barrier function Effects 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 7
- 238000010276 construction Methods 0.000 abstract description 2
- 239000003292 glue Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
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- 238000005498 polishing Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/108—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving resistance strain gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Force In General (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710151982.8A CN106768537A (zh) | 2017-03-15 | 2017-03-15 | 基于溅射薄膜技术的高性能扭矩传感器 |
Applications Claiming Priority (1)
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CN201710151982.8A CN106768537A (zh) | 2017-03-15 | 2017-03-15 | 基于溅射薄膜技术的高性能扭矩传感器 |
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CN106768537A true CN106768537A (zh) | 2017-05-31 |
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CN201710151982.8A Pending CN106768537A (zh) | 2017-03-15 | 2017-03-15 | 基于溅射薄膜技术的高性能扭矩传感器 |
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CN (1) | CN106768537A (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107894295A (zh) * | 2017-12-22 | 2018-04-10 | 北京中航兴盛测控技术有限公司 | 一种薄膜扭矩传感器芯片及制造方法 |
CN108444549A (zh) * | 2018-06-08 | 2018-08-24 | 扬州森瑟尔科技有限公司 | 一种测力/扭矩传感器 |
CN109632006A (zh) * | 2019-01-11 | 2019-04-16 | 重庆大学 | 一种无线智能螺栓及在线监测*** |
JP2020071161A (ja) * | 2018-11-01 | 2020-05-07 | 株式会社小野測器 | トルク検出器及びモータ評価システム |
CN113267280A (zh) * | 2021-06-25 | 2021-08-17 | 华中科技大学 | 一种应变式扭矩传感器 |
CN113899481A (zh) * | 2021-09-29 | 2022-01-07 | 中航电测仪器股份有限公司 | 一种扭转角应变式传感器及其测量装置和测量方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1529141A (zh) * | 2003-09-27 | 2004-09-15 | 北京迪威尔石油天然气技术开发有限公 | 扭矩、载荷传感器 |
DE102004033925A1 (de) * | 2004-07-14 | 2006-02-09 | Gtm Gassmann Theiss Messtechnik Gmbh | Drehmoment-Messaufnehmer |
CN102175363A (zh) * | 2010-12-31 | 2011-09-07 | 东莞市百赛仪器有限公司 | 用离子束溅射硅薄膜制作的压力应变器件及方法 |
CN103644837A (zh) * | 2013-12-18 | 2014-03-19 | 黑龙江华安精益计量技术研究院有限公司 | 一种拉扭双分量应变传感器 |
CN105136377A (zh) * | 2015-08-18 | 2015-12-09 | 熊辉 | 溅射薄膜锤击由壬压力传感器 |
CN105628289A (zh) * | 2015-12-25 | 2016-06-01 | 陕西电器研究所 | 一种采用溅射薄膜芯体的四余度压力传感器 |
CN205861101U (zh) * | 2016-06-06 | 2017-01-04 | 宁波柯力传感科技股份有限公司 | 一种测量轴向力和扭矩的复合传感器 |
CN206725134U (zh) * | 2017-03-15 | 2017-12-08 | 北京中航兴盛测控技术有限公司 | 基于溅射薄膜技术的高性能扭矩传感器 |
-
2017
- 2017-03-15 CN CN201710151982.8A patent/CN106768537A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1529141A (zh) * | 2003-09-27 | 2004-09-15 | 北京迪威尔石油天然气技术开发有限公 | 扭矩、载荷传感器 |
DE102004033925A1 (de) * | 2004-07-14 | 2006-02-09 | Gtm Gassmann Theiss Messtechnik Gmbh | Drehmoment-Messaufnehmer |
CN102175363A (zh) * | 2010-12-31 | 2011-09-07 | 东莞市百赛仪器有限公司 | 用离子束溅射硅薄膜制作的压力应变器件及方法 |
CN103644837A (zh) * | 2013-12-18 | 2014-03-19 | 黑龙江华安精益计量技术研究院有限公司 | 一种拉扭双分量应变传感器 |
CN105136377A (zh) * | 2015-08-18 | 2015-12-09 | 熊辉 | 溅射薄膜锤击由壬压力传感器 |
CN105628289A (zh) * | 2015-12-25 | 2016-06-01 | 陕西电器研究所 | 一种采用溅射薄膜芯体的四余度压力传感器 |
CN205861101U (zh) * | 2016-06-06 | 2017-01-04 | 宁波柯力传感科技股份有限公司 | 一种测量轴向力和扭矩的复合传感器 |
CN206725134U (zh) * | 2017-03-15 | 2017-12-08 | 北京中航兴盛测控技术有限公司 | 基于溅射薄膜技术的高性能扭矩传感器 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107894295A (zh) * | 2017-12-22 | 2018-04-10 | 北京中航兴盛测控技术有限公司 | 一种薄膜扭矩传感器芯片及制造方法 |
CN108444549A (zh) * | 2018-06-08 | 2018-08-24 | 扬州森瑟尔科技有限公司 | 一种测力/扭矩传感器 |
JP2020071161A (ja) * | 2018-11-01 | 2020-05-07 | 株式会社小野測器 | トルク検出器及びモータ評価システム |
CN109632006A (zh) * | 2019-01-11 | 2019-04-16 | 重庆大学 | 一种无线智能螺栓及在线监测*** |
CN113267280A (zh) * | 2021-06-25 | 2021-08-17 | 华中科技大学 | 一种应变式扭矩传感器 |
CN113899481A (zh) * | 2021-09-29 | 2022-01-07 | 中航电测仪器股份有限公司 | 一种扭转角应变式传感器及其测量装置和测量方法 |
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Effective date of registration: 20181016 Address after: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Applicant after: WEIYE ZHIXIN (BEIJING) TECHNOLOGY Co.,Ltd. Address before: 102101 building 26, No. 8, Feng Gu Road, Badaling Development Zone, Yanqing, Beijing. Applicant before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20191220 Address after: 41030 floor 4, building A5, e center, No.18 Xiangtai Road, Liuyang Economic Development Zone, Changsha City, Hunan Province Applicant after: SONGNUOMENG TECHNOLOGY Co.,Ltd. Address before: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Applicant before: WEIYE ZHIXIN (BEIJING) TECHNOLOGY Co.,Ltd. |
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Application publication date: 20170531 |