CN106767956A - High speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear - Google Patents

High speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear Download PDF

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CN106767956A
CN106767956A CN201710111232.8A CN201710111232A CN106767956A CN 106767956 A CN106767956 A CN 106767956A CN 201710111232 A CN201710111232 A CN 201710111232A CN 106767956 A CN106767956 A CN 106767956A
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module
magnetic induction
cosine
gear
machine tool
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CN106767956B (en
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张道勇
许娟
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/249Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
    • G01D5/2497Absolute encoders
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0428Safety, monitoring
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/20Pc systems
    • G05B2219/26Pc applications
    • G05B2219/2604Test of external equipment
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/20Pc systems
    • G05B2219/26Pc applications
    • G05B2219/2656Instrumentation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The present invention relates to high speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear, measuring gear includes mutually frustrating the inner ring major track and outer ring vernier magnetic track of row arrangement, and the inner ring major track number of teeth is Z, and the outer ring vernier magnetic track number of teeth is Z-1;Absolute value encoder includes measuring gear and the interior magnetic induction read head for being provided with magnetic induction component, signal conditioning circuit and FPGA interpolation sub-circuits, magnetic induction component carries out non-contact scanning generation Z and Z-1 sine and cosine orthogonal differential signal to measuring gear, after signal conditioning circuit, its error is corrected and compensated in real time by FPGA interpolations sub-circuit, so as to generate angle line number relative position value respectively for two tracks of Z and Z-1, then calculate current angular absolute position.Simple structure of the present invention, high precision, easy to install and strong shock resistance, greatly improved positioning, the repetitive positioning accuracy of machine tool chief axis, improve the overall accuracy in measurement and processing efficiency of Digit Control Machine Tool.

Description

High speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear
Technical field
The present invention relates to a kind of encoder (Encoder), more particularly, to a kind of high speed and super precision machine tool chief axis, electro spindle magnetic Sensing absolute value encoder, can be widely applied to the fields such as Digit Control Machine Tool, robot, elevator and industrial automation.
Background technology
Encoder is a kind of sensor for detection angles, position, speed and acceleration, is the angle position machinery rotation The equipment that shifting or straight-line displacement are worked out, are converted to the electrical signal form that can be used for communicating, transmit and store, is machinery and electricity The accurate measurement device that son is combined closely, is widely used in the various fields such as motor, automobile, wind-powered electricity generation, robot.From measurement function On, encoder can be divided into increment size encoder (being also incremental encoder) and absolute value encoder.From measuring principle, coding Device includes photoelectric encoder and magnetic induction encoder.
Increment size encoder is used to provide information of the current location relative to prior location, without the current definitely position of memory The function of putting.When electromechanical equipment is powered off, if mechanical location changes because external force is moved or is rotated, position is caused to produce inclined Move, and when electromechanical equipment restarts, increment size encoder is recorded before will be unable to judge the signal of current location and power off Position signalling it is whether identical, thus encoder must be adjusted carry out the operation of back to zero.Each position of absolute value encoder Correspondence one determination digital code, therefore its indicating value only with measurement starting and final position it is relevant, and with measure centre Process is unrelated.When electromechanical equipment power-off after send a telegram in reply again when, absolute value encoder can read immediately the current spindle anglec of rotation or Absolute position.
In the industrial production, wide variety of encoder is generally photo-electric, and its operation principle is:LED light source and condenser The light source of the raster diffraction stripe of stabilization is provided;The grating structure of scanning mask and measuring basis is same or similar, when both Slit has light to pass through when aliging, and light cannot pass through when both grooves align, and photocell is sensed during both relative motions Just there is strong and weak alternately change in light intensity, it is in triangular wave patterns that this alternately change is, but because grating diffration effect is this Alternately change is actually in sine wave.Sine and cosine encoded signal refers to the sinusoidal signal loading position that two-way phase difference is 90 degree The code device signal of confidence breath.Photoelectric encoder both can detect angle displacement, can detect straight under mechanical switching device help again Line position, has the advantages that low inertia, low noise, high accuracy, high-resolution, and it is poor to environmental suitability to have the disadvantage, for moisture, The resistivity of dust, greasy dirt and temperature change is weaker, needs to do encapsulation process in practical application;Additionally, photoelectric encoder grating Disk is generally glass material, when being rotated at a high speed around axle, easily because of the influence of the external environment conditions such as shaft vibration, impact so that grating disc Fragmentation.
When photoelectric encoder is used on machine tool chief axis, its first position feedback photoelectric encoder feeds back with the second place Photoelectric encoder can not be connected directly with machine tool chief axis, generally with the mechanical transmission mechanisms such as synchronizing wheel, belt and machine tool chief axis It is indirectly connected with, its transmission process is:The spindle servo electric machine of built-in first position encoder drives belt movement, belt drive machine Bed motion of main shaft, machine tool chief axis drive synchronizing wheel rotation, and synchronizing wheel drives the rotation of second place encoder, thus whole machinery to pass Dynamic structure is more complicated, causes servomotor maximum speed relatively low.Supporting CNC digital control systems, are capable of achieving not high to required precision The function such as screw thread process, rigid tapping, orientation trouble and tool magazine tool changing.If long-play, because bearing load is larger, skin Band, the elastic deformation of Timing Belt, expand with heat and contract with cold and wear and tear so that Digit Control Machine Tool overall processing precision can become poorer and poorer.
When machine tool chief axis are higher to positioning accuracy request, first position feedback needs to use 17 or higher resolution Photoelectric encoder, second place feedback will use the high-precision encoders such as magnetic resistance, magnetic grid, while second place feedback axial coding Device and machine tool chief axis are direct-connected, to reduce driving error.It is integrated with machine tool chief axis that electro spindle realizes spindle motor, by height Precision encoding device is direct-connected with machine tool chief axis, is reducing the error brought of transmission device simultaneously, and processing, positioning accurate greatly improved Degree, and be a kind of desired transmission mode for meeting high speed and high precision processing requirement with a series of excellent drive characteristics.
Motor using digit position and controlling technology of velocity is driven, high accuracy sine and cosine encoder can provide 1Vpp electricity The sinusoidal increment signal of ordinary mail number, signal quality is high to be turned into so as to carry out frequency multiplication interpolation subdivision high in follow-up signal process circuit May.If for example, carrying out 4096 times thin in follow-up signal process circuit to every 512 rotary encoders of signal period of circle Point, 2,000,000 measurements step pitch or line numbers, the resolution ratio equivalent to 21 can be just produced in a circle.Even if rotating speed reaches 24000 Revolutions per second, frequency when signal reaches control system input circuit also only has about 200KHz.The sinusoidal increment signal of 1Vpp is due to defeated The spectrum component for going out is relatively simple, can transmit larger distance compared with square wave and it is unattenuated or distortion, it is allowed to cable Length is up to 150 meters.
Except photoelectric encoder, magnetic induction encoder is also widely used in industrial production.Magnetic induction encoder is based on magnetic Sensor, and Magnetic Sensor is widely used in modern industry and electronic product, is measured with induced field intensity and its distribution The physical parameters such as electric current, position, direction.In the prior art, have many different types of sensors for measure magnetic field and its His parameter, for example with Hall (Hall) element, anisotropic magnetoresistance (Anisotropic MagnetoResistance, AMR) element, giant magnetoresistance (Gaint MagnetoResistance, GMR) element, tunnel magneto resistance TMR (Tunnel MagnetoResistance) element is the Magnetic Sensor for measuring sensing element.Compared to other magnetic sensor elements, TMR elements Possesses the advantages of big, the excellent temperature stability of Micro Energy Lose, high resolution, dynamic range and high sensitivity.
In high speed, high accuracy, the servo-drive system of high dynamic performance requirement, generally passed using the magnetic of output cosine and sine signal Sensor detecting element, for position and velocity feedback.Its output signal includes that periodic sine and cosine (SINE, COSINE) is orthogonal Differential signal, often rotates a circle and also exports reference zero (INDEX) differential signal all the way, when electromechanical equipment starts, though can be through Later continuing signal processing circuit carries out frequency multiplication interpolation subdivision high, but can not immediately read the absolute position of the current spindle anglec of rotation Value, until rotating shaft rotation is by after reference zero signal, can just obtain the absolute place value of the current spindle anglec of rotation.But lathe It is synchronous motor that main shaft, electro spindle are most, needs to know the position of magnetic pole of rotor when synchronous motor startup, can be energetically Square starts servomotor, is so accomplished by the definite current location for detecting rotor of absolute value encoder.If using traditional arteries and veins The mode transmission signal of string is rushed, on the one hand with the raising of position-measurement device resolution ratio and precision, its output line number is increasingly Greatly, it is higher to the requirement of subsequent control device interface in the case of motor runs at high speed, easily there is HFS transmission error count Number, so as to influence numerical control device feedback control;On the other hand, train of pulse output is easily subject to the electricity of industrial environment apart from limited Magnetic disturbance, is not suitable for the high-speed transfer of industry spot.In order to improve position feedback accuracy and high speed reliably transmission location number According in digital control system, using digital serial bus formula communicator between position-measurement device and control device, by control end Unit and measurement end unit are connected and composed by communication cable, compared with Transistor-Transistor Logic level and sine and cosine burst mode, universal serial bus Formula transmission means improves antijamming capability, with reliability and real-time higher, while transmission incremental counter value may be selected Or absolute position.
At present, the installation positioning method of magnetic induction encoder is very coarse, and the positioning reference plane of read head is plane.In peace During dress, using positioning tool it is difficult to ensure that magnetic induction read head center, measure gear, machine tool chief axis install concentricity, meanwhile, The positioning reference plane of read head and measure circumference of gear tangent plane be parallel to each other, read head and the guarantee for measuring the distance between gear Also it is highly difficult, so as to cause the accuracy and uniformity of read head actual installation very poor, and then greatly reduce magnetic induction coding The control accuracy of device.
Additionally, magnetic induction sine and cosine encoder is in engineer applied, due to by fluted disc processing technology, power-supply fluctuation, ring The influence of border temperature change, the factor such as non-linear of read head magnetic induction chip, the output of position detecting element magnetic induction chip Cosine and sine signal is often accompanied by direct current biasing error, amplitude error and quadrature phase error, harmonic component error, noise error etc., These errors directly influence the precision and reliability of servo-control system.The Angle Position letter how to be exported to sine and cosine encoder Number error is effectively corrected and compensated, and high-resolution position is extracted from cosine and sine signal using suitable interpolation method Confidence ceases, and has important research and application value to meet the high speed of servo-drive system, high-precision control requirement.
In Chinese invention patent application disclosed in 9 days March in 2016, number of patent application is 201511029653.3, open Number it is CN105387879A, discloses the absolute place value magnetic coder of Large central aperture axial charging structure, is that a kind of magnet ring type is compiled Code device, the magnet ring type coding disk employed in it is to pass through note by ferromagnetic material powder and as the ductile material of binding agent The cyclic structure of the technique machine-shapings such as modeling, die casting or casting, is limited by the uniformity of material, and the also difficult precisely control of magnetization position System so that magnetic moment size on coding disk, strong and weak and uniformity is more difficult is further enhanced, and during engineer applied, Due to the exposure of coding disk upper magnetic pole outside, flying dust and tiny iron filings easily are adsorbed and carrys out error to detection band.As motor is processed The rising of temperature, the coding disk temperature characterisitic of heat transfer will be the factor considered of having to, and coding disk can be magnetic decay, cause Accuracy of waveform deteriorates, and closely influences machining accuracy.
In the Chinese utility model patent of the bulletin of on April 29th, 2015, number of patent application is 201420861460.9, bulletin Number be CN204301754U, disclose gear rotary encoder, its output signal is divided into A roads, B roads and Z roads, with analog signal or The form output of square wave, does not have bus type data output capacities;Its sensing read head and gear between gap for 0.1 to 0.15mm, gap is too small, and mechanical erection requirement is excessively harsh, causes installation and debugging to expend a large amount of man-hours;Have at program inside it Reason chip by computer software, it is necessary to debug signal parameter, and program write-in program memory is preserved, non intelligent behaviour Control, manually adjusts very cumbersome, wastes time and energy, and homogeneity of product is not high.
The content of the invention
In order to solve encoder control accuracy in the prior art and the relatively low technical problem of reliability, the present invention provides a kind of Suitable for the magnetic induction absolute value encoder of high speed and super precision machine tool chief axis, encoder applies gear induced magnetism line work is former Reason, the double track measurement gear to number of teeth difference 1 carries out non-contact scanning, is producing the high reliability sine and cosine of corresponding number just Report to the leadship after accomplishing a task sub-signal, using FPGA field programmable logic devices, to cosine and sine signal direct current biasing error, amplitude error and orthogonal Phase error is corrected and compensated in real time, the high accuracy interpolation subdivision to cosine and sine signal is realized, so as in encoder system System internal needle generated the line number angular relative position high relative to the upper electric moment to two tracks that double track measures gear respectively Value, and the phase and phase difference between two tracks be analyzed simultaneously, because phase and phase difference are to consolidate within a revolution It is fixed and regular, and then encoder system can calculate current angular absolute position by angle line number relative position value.This Invention in the operating modes such as rapid drilling, rapid changing knife and continuity tapping, can remain the processing of stability, positioning, control High precision processed, the characteristics of with simple structure, small volume, lightweight, easy to install and strong shock resistance, is reducing complicated machinery While transmission mechanism, positioning, the repetitive positioning accuracy of machine tool chief axis greatly improved, so as to improve the entirety of Digit Control Machine Tool Accuracy in measurement and processing efficiency.
The present invention also provides the special measurement gear of high speed and super precision machine tool chief axis magnetic induction absolute value encoder.
High speed and super precision machine tool chief axis magnetic induction absolute value encoder of the present invention, including be sleeved on machine tool chief axis, electro spindle And with machine tool chief axis, the measurement gear of electro spindle synchronous rotary and measure the magnetic induction read head that gear is used cooperatively;The amount It is that double track measures gear to survey gear, and its inner ring major track number of teeth is Z, and the vernier magnetic track number of teeth in outer ring is Z-1, and inner ring major track Row arrangement is mutually frustrated with outer ring vernier magnetic track;Magnetic induction component, the signal being sequentially connected are provided with the magnetic induction read head Modulate circuit and FPGA interpolation sub-circuits, magnetic induction component and the measurement just tangent installation of circumference of gear;The magnetic induction unit Device carries out the Z and Z-1 sine and cosine orthogonal differential signal produced by non-contact scanning to measurement gear, by signal condition After circuit, its direct current biasing error, amplitude error and quadrature phase error are repaiied in real time by FPGA interpolations sub-circuit Just and compensation, so as to generate the angle line number relative position value relative to the upper electric moment respectively for two tracks of Z and Z-1, then According to the fixation between two tracks of Z and Z-1 and regular phase and phase difference relation, current angular line number is calculated absolute Positional value.
The special measurement gear of high speed and super precision machine tool chief axis magnetic induction absolute value encoder of the present invention, including mutually frustrate row cloth The inner ring major track and outer ring vernier magnetic track put, the inner ring major track number of teeth are Z, and the outer ring vernier magnetic track number of teeth is Z-1.
Preferably, the inner ring major track is integrally formed with outer ring vernier magnetic track.
Compared with prior art, the present invention has the advantages that:
1st, electricity reads current spindle anglec of rotation absolute position immediately on magnetic induction absolute value encoder, and accuracy of detection is high And high-speed response can be carried out.Magnetic induction read head has selected high-precision sensing chip, works former using gear induced magnetism line Reason, can recognize the angle position that gear is measured immediately below chip, realize high accuracy, high reliability detection;Use FPGA (field programmable logic device) interpolation sub-circuit, the cosine and sine signal direct current biasing to the sampling of ADC analog to digital conversion circuits is missed Difference, amplitude error and quadrature phase error are corrected and compensated in real time, and can using error parameter is write into FPGA scenes The mode that programmed logic device in-chip FLASH ROM is preserved and called, carries out the automatic recalibration of electricity in FPGA programs and to by mistake Poor Automatic adjusument, realizes the high accuracy interpolation subdivision to cosine and sine signal, without the operation of manual debugging full automation, pole Big improves production efficiency, in the precision for improving encoder simultaneously, also improves anti-interference and high speed requirement.
2nd, present invention measurement gear does coding disk, has more preferable plasticity and uniform compared to magnet ring type coding disk Property, it is easy to processing, dimensional accuracy is more preferably controlled, and can meet different application scenarios;What is more important, measures gear through magnetoelectricity The cosine and sine signal accuracy of waveform that resistance sensor is produced is high, and uniformity is good.
3rd, heavy caliber hollow shaft is installed, without complicated mechanical transmission structure, it is not necessary to carry any bearing, it is not required that Any machenical coupling, measures direct geared and is sleeved on machine tool chief axis, electro spindle and is synchronously revolved with machine tool chief axis, electro spindle Turn, reducing the error brought of transmission device simultaneously, processing, positioning precision greatly improved, solve photoelectricity in the prior art Encoder is rotated at a high speed the problems such as to axial float and sensitive circular runout, improves adaptation energy of the encoder to use environment Power.
4th, magnetic induction encoder mechanical structure simplifies firm, measure between gear and magnetic induction read head using noncontact, Designed without abrasion, direct-drive machine error is small, does not have mechanism's back clearance problem, with anti-vibration, anticorrosive, antipollution and work wide Make the characteristic of temperature, fast response time adapts to high speed rotary motion, can be applied to the immalleable field of photoelectric encoder.
5th, magnetic induction reading header structure is novel, it is high to design firm, strong shock resistance, degree of protection, up to IP68, environment Adaptability is good, and stable and reliable working performance, accurate positioning, installation are easily and using easy to operate.
6th, magnetic induction absolute value encoder signal is exported by RS485 or RS422 EBIs, compatible BISS, SSI Deng serial communication protocol, and absolute position can be determined under conditions of 20000 revs/min of turn up and the above.
Brief description of the drawings
Fig. 1 is high speed and super precision machine tool chief axis magnetic induction absolute value encoder overall structure diagram of the present invention;
Fig. 2 is the structural representation that the present invention measures gear;
Fig. 3 is the schematic block circuit diagram of magnetic induction read head of the present invention;
Fig. 4 is the theory diagram that FPGA differences of the present invention mend sub-circuit.
Specific embodiment
Below in conjunction with embodiment and Figure of description, the present invention is described in further detail, but of the invention specific Implementation method not limited to this.
Embodiment
Such as Fig. 1, high speed and super precision machine tool chief axis magnetic induction absolute value encoder of the present invention is including being sleeved on machine tool chief axis, electricity master Ferromagnetism on axle and with machine tool chief axis, electro spindle synchronous rotary measures gear 1 and measures the magnetic induction that gear 1 is used cooperatively Read head 2.The magnetic induction read head 2 is positioned at the outside top of measurement gear 1, seating side 26 and the measurement of magnetic induction read head The side 12 of gear is in same plane, and magnetic induction read head and the gap measured between gear are 0.1mm to 0.3mm.
Such as Fig. 2, the measurement gear 1 is that double track measures gear, and with a center being arranged in live spindle Hole 11, the number of teeth of its inner ring major track 14 is Z, the number of teeth of outer ring vernier magnetic track 13 for Z-1, the i.e. number of teeth of inner ring major track 14 with The number of teeth difference 1 of outer ring vernier magnetic track 13, the inner ring major track number of teeth preferably 100 teeth (Z=100), the outer ring vernier magnetic track number of teeth is 99 teeth (Z-1), and inner ring major track and outer ring vernier magnetic track mutually frustrate row arrangement.The double track structure for measuring gear 1 is one Shaping, the circumference of inner ring major track and outer ring vernier magnetic track is preferred to be waited greatly.In normal use condition and range, can be according to reality The situation in border main shaft or motor space claims to the external diameter, thickness, hole size and the modulus that measure gear, measures gear Specification modulus can be 0.2,0.3,0.4,0.5,0.6,0.8,1.0 or 2.0.
The circuit part of the magnetic induction read head is encapsulated in metal shell 21, such as Fig. 3, including first circuit board 22, Magnet steel 23, electrical connector 24, second circuit board 25, are provided with cooperation magnet steel 23 to change of magnetic field strength feelings on first circuit board 22 Condition carries out the magnetic induction component of real-time detection;Signal conditioning circuit, the ADC moulds being sequentially connected are provided with second circuit board 25 Number change-over circuit, FPGA (field programmable logic device) interpolation sub-circuits and input/output interface circuit, and it is defeated from being input into Input/output interface terminal is drawn on outgoing interface circuit, signal conditioning circuit is electrically connected with magnetic induction component.Magnetic induction unit device Part produces sine and cosine orthogonal differential signal, amplifies through signal conditioning circuit, after filtering process, turns into ADC analog to digital conversion circuits The single-ended cosine and sine signal of digital quantity is changed to, is finally processed by FPGA interpolation sub-circuits.
The metal shell 21 of the magnetic induction read head uses copper alloy or aluminum alloy material, including cylinder body 27 and spiral-lock Upper lid 28 directly over cylinder body 27, is attached, and carry out electronics between cylinder body 27 and upper lid 28 by screw or solid gum Casting glue is sealed, and the circuit part of magnetic induction read head is placed in the annular seal space that cylinder body is constituted with upper lid, and its outside is equipped with metal Water joint is electrically connected with input/output interface circuit, realizes the output of absolute value encoder signal.Measure gear and magnetic induction Notably direction when read head is installed, it is necessary to corresponded to installation up and down, otherwise signal is bad.During installation, it is recommended to use standard The clearance gauge of thickness (such as 0.15 millimeter), both can accurately ensure magnetic induction component and measure the clipping room of gear away from can obtain again Splendid signal quality.Additionally, the symmetrical projection being easily installed is provided with the bottom of the metal shell 21 of magnetic induction read head, it is right Projection is claimed to be located at the both sides of the bottom of metal shell 21, the symmetrical rising height of both sides is consistent, to realize magnetic induction component and amount Survey circumference of gear is just tangent, that is, realize magnetic induction component center, measure the concentricity that gear, machine tool chief axis are installed, Ran Houtong Cross screw to be fastenedly connected magnetic induction read head with read head fixing base, finally extract clearance gauge out or rotation measures gear and takes out plug Chi.
The magnetic induction component is SMRE (Semiconductor MagnetoResistive Element) semiconductor Magnetoresistive element or TMR (Tunnel MagnetoResistance) tunnel magneto resistance sensor.Magnetic resistance sensor chip Can be superior, with high magnetic field gradient sensitivity, small changes of magnetic field can be detected, output signal has good temperature Stability, it uses push-pull type Wheatstone bridge design, and difference is provided along the Grad in sensor sensing direction to externally-applied magnetic field Voltage output, and produce the two-way there is the quadrature voltage output signal of precise phase difference, it is used to detect the position for measuring pinion rotation Put and direction.Coordinate magnetic induction encoder location and installation technique and welding circuit board production technology, such as magnetic induction chip pin Design of pad etc., it is ensured that cosine and sine signal quadrature phase error is in the range of rational restriction.
In work, machine tool chief axis, electro spindle drive measurement gear 1 to rotate, on the first circuit board 22 of magnetic induction read head 2 Magnetic induction component coordinates magnet steel 23, and using the operation principle of gear induced magnetism line, measuring gear to double track carries out non-connecing Touch is scanned, and produces the high reliability sine and cosine orthogonal differential signal of corresponding number (Z and (Z-1)), is connected by electrical connector 24 Signal conditioning circuit on logical second circuit board 25, shaping is carried out to signal, filters high frequency spurs, uses FPGA field-programmables Logical device, cosine and sine signal direct current biasing error, amplitude error and quadrature phase error to the sampling of ADC analog to digital conversion circuits Corrected in real time and compensated, and error parameter write-in FPGA field programmable logic device in-chip FLASHs ROM is preserved And upper electricity is called, the high accuracy interpolation subdivision to cosine and sine signal is realized, so that in encoder system internal needle to Z and (Z-1) Two tracks generated the line number angular relative position value high relative to the upper electric moment respectively, and simultaneously to Z and (Z-1) the two rails Phase and phase difference between mark are analyzed, because phase and phase difference are fixed and regular within a revolution, and then Encoder system calculates current angular absolute position by angle line number relative position value.
The present invention uses FPGA field programmable logic devices, and the cosine and sine signal to the sampling of ADC analog to digital conversion circuits is straight Stream biased error, amplitude error and quadrature phase error are corrected and compensated in real time, are realized to the high-precision of cosine and sine signal Degree interpolation subdivision, principle is as shown in figure 4, including direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal Most value module, memory module, frequency multiplication module, Coordinate Rotation Digital computing module and rotating shaft anglec of rotation generation module, directly Stream biased error compensating module, amplitude error compensating module, frequency multiplication module, Coordinate Rotation Digital computing module and rotating shaft rotation Gyration generation module is sequentially connected, cosine and sine signal be most worth module respectively with direct current biasing error compensation module, amplitude error Compensating module, memory module connection, memory module be used for store direct current biasing error compensation module, amplitude error compensating module, Cosine and sine signal is most worth the operation result of module.Frequency multiplication module includes that cosine and sine signal multiplier module, cosine and sine signal are moved Phase module, adjustment circuit module, wherein cosine and sine signal multiplier module are provided with two, cosine and sine signal multiplier module it is defeated Enter end to be connected with amplitude error compensating module, output end is connected with adjustment circuit module;Another cosine and sine signal multiplier module Input be connected with amplitude error compensating module by cosine and sine signal phase shift block, output end and adjustment circuit module connect Connect, adjustment circuit module is connected with Coordinate Rotation Digital computing module.
The sine and cosine orthogonal differential signal of magnetic induction component output, by signal conditioning circuit, to orthogonal differential signal Be amplified, Shape correction, and filter high frequency spurs and even-order harmonic.Using ADC analog to digital conversion circuits to sine wave signal and Cosine wave signal carries out high speed real-time synchronization collection, and carries out digital filtering by FPGA, and filtering method is:Eight numbers of continuous acquisition According to, two maximum sampled values, two minimum sampled values are removed, the average value of lower four sampled values of remainder is as current form Sampled value.Using this kind of digital filtering method, shake, saltus step and the interference of sampled data are eliminated well.
Due to being influenceed by measuring the factors such as Gearmaking Technology, power-supply fluctuation, variation of ambient temperature, monocycle sine and cosine The sampling maximum and minimum value of signal can all have data dithering all the time, measure the sine and cosine letter that gear revolves sampling of turning around Number maximum and minimum value also can all have data dithering all the time, for the smoothed data subdivision error that brings of shake, adopt Following method is taken to be processed:Machine shaft rotation is most worth module, motor by after reference zero signal, starting cosine and sine signal Rotating shaft is for each revolution by reference zero signal, one maximum of numeration sinusoidal signal, a minimum value, cosine signal one Maximum, a minimum value, eight cycles of continuous counter, sampling obtain eight sinusoidal signal maximums, minimum values, eight cosine Signal maximum, minimum value;Remove two maximum sampled values, two minimum sampled values, lower four sampled values of remainder it is flat Sampling maximum and minimum value of the average as cosine and sine signal.
Equation below is run in direct current biasing error compensation module and amplitude error compensating module, direct current biasing is derived Error and amplitude error;
SIN (θ+)=VCC/2+offset_A+Ksin (θ+α); 〈1〉
SIN (θ -)=VCC/2+offset_B-Lsin (θ+α); 〈2〉
SIN (θ)=SIN (θ+)-SIN (θ -)=offset_A-offset_B+ (K+L) sin (θ+α); 〈3〉
COS (θ+)=VCC/2+offset_C+Mcos (θ+β); 〈4〉
COS (θ -)=VCC/2+offset_D-Ncos (θ+β); 〈5〉
COS (θ)=COS (θ+)-COS (θ -)=offset_C-offset_D+ (M+N) cos (θ+β); 〈6〉
Wherein, SIN (θ+), SIN (θ -), COS (θ+), COS (θ -) are the difference that magnetic induction component exports cosine and sine signal Sub-signal, SIN (θ), COS (θ) are the cosine and sine signal by being obtained after signal conditioning circuit.Offset_A, offset_C are The DC deviation amount of sine and cosine principal-employment sub-signal, offset_B, offset_D are the DC deviation amount of sine and cosine negative differential signal, K, M are the amplitude deviation factor of sine and cosine principal-employment sub-signal, and L, N are the amplitude deviation factor of sine and cosine negative differential signal, and α, β are Cosine and sine signal phase deviation.From the maximum of cosine and sine signal, minimum value:
SIN (90 °)=offset_A-offset_B+ (K+L) sin (90 °); 〈7〉
SIN (270 °)=offset_A-offset_B+ (K+L) sin (270 °); 〈8〉
SIN (90 °)+SIN (270 °)=2 (offset_A-offset_B); 〈9〉
SIN (90 °)-SIN (270 °)=2 (K+L); 〈10〉
Offset_A-offset_B=(SIN (90 °)+SIN (270 °))/2; 〈11〉
K+L=(SIN (90 °)-SIN (270 °))/2; 〈12〉
Obtain the sampling maximum and minimum value of sinusoidal signal, you can draw the direct current biasing error and amplitude of sinusoidal signal Error, similarly, can also draw the direct current biasing error and amplitude error of cosine signal.
Direct current biasing error is subtracted by the current optional position moment waveform sample values processed by digital filtering, you can To the cosine and sine signal comprising amplitude error and quadrature phase error:
SIN (θ)-(offset_A-offset_B)=(K+L) sin (θ+α)
COS (θ)-(offset_C-offset_D)=(M+N) cos (θ+β)
Amplitude deviation factor is multiplied by both sides simultaneously, obtains formula:
(M+N) (SIN (θ)-(offset_A-offset_B))=(M+N) (K+L) sin (θ+α)
(K+L) (COS (θ)-(offset_C-offset_D))=(K+L) (M+N) cos (θ+β)
The two-way cosine and sine signal of the direct current biasing error that is eliminated and amplitude error, the tangent letter of negating if two formulas are divided by Number, you can obtain the only cosine and sine signal angular positional value comprising quadrature phase error.
Sampling maximum, minimum value to cosine and sine signal carry out above-mentioned computing, obtain direct current biasing error amount and amplitude Error amount, write-in FPGA in-chip FLASHs ROM (i.e. memory module) is preserved, and is called in automatically after electricity on next time, and then is realized The real-time amendment of the cosine and sine signal error produced to magnetic induction component and compensation.If error deviation threshold value sets more than a certain Situations such as definite value, such as magnetic induction read head are reinstalled is influenceed, then FPGA programs are recalibrated automatically, so as to realize to error Automatic adjusument.
The cosine and sine signal for having eliminated direct current biasing error and amplitude error is modified using frequency multiplication technology, Quadrature phase error can be transformed into by direct current biasing error and amplitude error by phase shift, frequency multiplication, electricity is adjusted through rear class After road module goes removing DC bias error and adjustment amplitude, with the high-quality cosine and sine signal of the two-way of two frequencys multiplication as original letter Number, in Coordinate Rotation Digital computing module, then interpolation subdivision is carried out, subdivision accuracy can be improved, can reduce to sine and cosine again The orthogonality requirement of signal.Coordinate Rotation Digital computing module is based on Coordinate Rotation Digital and calculates (CORDIC) algorithm, calculates anti- Tangent, asks for phase value, show that rotating shaft anglec of rotation present position values, i.e. double track measure gear two phases of track of Z and Z-1 For the relative position value of the rotating shaft anglec of rotation at upper electric moment.The feeding rotating shaft anglec of rotation generation of angle line number relative position value Module, by rotating shaft anglec of rotation generation module according to the fixation between two tracks of Z and Z-1 and regular phase and phase difference Two tracks of relation, i.e. Z and Z-1 rotate a circle and are all 360 degree, final to calculate generation current angular absolute position values.The magnetic The ADA4950-2 IC chips of the preferred Anolog Devices companies of high-speed-differential operational amplifier in sensing read head; The high-speed parallel AD9248 of the multi-level differential pipelined architecture of the preferred Anolog Devices companies of ADC analog to digital conversion circuits is integrated Circuit chip;The preferred FPGA field programmable logic devices 10M16SCU169I7G IC chips of interpolation sub-circuit.
Whole algorithms using FPGA treatment, fully with FPGA pipeline parallel method computings the characteristics of, and utilize FPGA The modules such as memory block, hardware multiplier that inside carries improve hardware algorithm and realize performance, and speed is fast, and real-time is high, meets Requirement of the motion control arithmetic to current location real-time.Magnetic induction component is exported just using digital circuit processing mode The various errors of cosine signal are effectively corrected and compensated, and improve accuracy and reliability that difference mends subdivision, and then improve The subdivision accuracy and resolution ratio of cosine and sine signal, and preserve and adjust using by error parameter write-in FPGA in-chip FLASHs ROM Mode, carries out FPGA programs and recalibrates automatically and to the Automatic adjusument of error.By high-speed ADC analog to digital conversion circuit With working in coordination for FPGA field programmable logic devices, the data acquisition and procession of high-speed, high precision is realized, by serial Communications protocol bus realizes the data output of high-speed and high-efficiency, so that for servo-control system provides more accurate positional information Meet high speed, the requirement of high-precision control.
The precision for measuring Gear Processing has a huge impact to the precision and uniformity of code device signal.Commercial Application In, the precise measure gear of 6 grades of GB or higher precision should be selected.Code device signal line number can be carried out by measuring number of gear teeth Adjustment, and and then influence machine tooling, positioning precision.Measuring gear has three kinds of mounting means:1st, hot charging.Using this technique When, the internal diameter for producing measurement gear should be slightly less than the main shaft diameter of axle.Under normal temperature, measuring gear can not connect with main shaft.By adding Heat surveys gear makes material expand, at this moment can measure gear and be mounted on main shaft.Then cooling measures gear makes Material shrinkage, most Gear is measured eventually to be firmly pressed on main shaft.2nd, it is tightened on the shaft shoulder.Gear will be measured on main shaft, will be measured with screw Gear is surveyed to be fixed on the main shaft shaft shoulder.3rd, clamped by axle nut.Measure gear to be installed on spindle shaft, compressed by axle nut On a component.Customer requirement can also be answered, an integration type shaft nut is assembled on gear is measured, therefore had on internal diameter Corresponding screw thread.
Magnetic induction absolute value encoder signal is connect via 10 core shielded twisted pair lines by RS485 or RS422 buses The serial communication protocols such as mouth output, compatible BISS, SSI, and can be surveyed under conditions of 20000 revs/min of turn up and the above Determine absolute position, can be widely applied to the fields such as Digit Control Machine Tool, robot, elevator and industrial automation.
One of presently preferred embodiments of the present invention is the foregoing is only, is not intended to limit the invention, it is all in the present invention Spirit and principle within any modification, equivalent and the improvement made etc., should be included in protection scope of the present invention it It is interior.

Claims (10)

1. high speed and super precision machine tool chief axis magnetic induction absolute value encoder, it is characterised in that including being sleeved on machine tool chief axis, electro spindle Magnetic induction read head that is upper and being used cooperatively with machine tool chief axis, the measurement gear of electro spindle synchronous rotary and measurement gear;It is described It is that double track measures gear to measure gear, and its inner ring major track number of teeth is Z, and the vernier magnetic track number of teeth in outer ring is Z-1, and the main magnetic of inner ring Road and outer ring vernier magnetic track mutually frustrate row arrangement;Magnetic induction component, the letter being sequentially connected are provided with the magnetic induction read head Number modulate circuit and FPGA interpolation sub-circuits, magnetic induction component with measure the just tangent installation of circumference of gear;The magnetic induction Component carries out the Z and Z-1 sine and cosine orthogonal differential signal produced by non-contact scanning to measurement gear, is adjusted by signal After reason circuit, its direct current biasing error, amplitude error and quadrature phase error are carried out in real time by FPGA interpolations sub-circuit Amendment and compensation, so that the angle line number relative position value relative to the upper electric moment was generated respectively for two tracks of Z and Z-1, Again according to the fixation between two tracks of Z and Z-1 and regular phase and phase difference relation, current angular line number is calculated exhausted To positional value.
2. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that described FPGA interpolations sub-circuit include direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal be most worth module, Memory module, frequency multiplication module, Coordinate Rotation Digital computing module and rotating shaft anglec of rotation generation module, direct current biasing error The generation of compensating module, amplitude error compensating module, frequency multiplication module, Coordinate Rotation Digital computing module and the rotating shaft anglec of rotation Module is sequentially connected, cosine and sine signal be most worth module respectively with direct current biasing error compensation module, amplitude error compensating module, deposit Storage module connection, cosine and sine signal is most worth module for asking for the sampling maximum and minimum value of cosine and sine signal, memory module Most it is worth the operation result of module, institute for storing direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal Stated angle line number relative position value of the Coordinate Rotation Digital computing module generation relative to the upper electric moment, the rotating shaft anglec of rotation Generation module calculates current angular line number absolute position values.
3. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 2, it is characterised in that described to multiply Method times frequency module includes cosine and sine signal multiplier module, cosine and sine signal phase shift block, adjustment circuit module, wherein sine and cosine letter Number multiplier module is provided with two, and an input for cosine and sine signal multiplier module is connected with amplitude error compensating module, output End is connected with adjustment circuit module;The input of another cosine and sine signal multiplier module by cosine and sine signal phase shift block with Amplitude error compensating module is connected, and output end is connected with adjustment circuit module, and adjustment circuit module is calculated with Coordinate Rotation Digital Module is connected.
4. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 2, it is characterised in that described straight Stream biased error compensating module and amplitude error compensating module derive the direct current biasing error and amplitude of cosine and sine signal respectively Error;Then using frequency multiplication module by phase shift, frequency multiplication by quadrature phase error be transformed into direct current biasing error and Amplitude error, after adjusted circuit module goes removing DC bias error and adjustment amplitude, with the two-way cosine and sine signal of two frequencys multiplication Interpolation subdivision is carried out again in Coordinate Rotation Digital computing module as primary signal.
5. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the magnetic Sensing read head be located at measure gear outside top and and measure gear between gap be 0.1 to 0.3mm.
6. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the magnetic The seating side for sensing read head is in same plane with gear side is measured;The housing bottom of magnetic induction read head is provided with to be easy to Install symmetrical projection, symmetrical rising height one show realize magnetic induction component and measure the just tangent installation of circumference of gear, i.e., Realize magnetic induction component center, measure the concentricity that gear, machine tool chief axis are installed.
7. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the amount The inner ring major track for surveying gear is integrally formed with outer ring vernier magnetic track.
8. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the magnetic The ADC analog to digital conversion circuits being connected between signal conditioning circuit and FPGA interpolation sub-circuits are additionally provided with sensing read head.
9. the special measurement gear of high speed and super precision machine tool chief axis magnetic induction absolute value encoder, it is characterised in that including mutually frustrating The inner ring major track and outer ring vernier magnetic track of arrangement are arranged, the inner ring major track number of teeth is Z, and the outer ring vernier magnetic track number of teeth is Z-1.
10. special measurement gear according to claim 9, it is characterised in that the inner ring major track and outer ring vernier magnetic Road is integrally formed.
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