CN106767956A - High speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear - Google Patents
High speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear Download PDFInfo
- Publication number
- CN106767956A CN106767956A CN201710111232.8A CN201710111232A CN106767956A CN 106767956 A CN106767956 A CN 106767956A CN 201710111232 A CN201710111232 A CN 201710111232A CN 106767956 A CN106767956 A CN 106767956A
- Authority
- CN
- China
- Prior art keywords
- module
- magnetic induction
- cosine
- gear
- machine tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
- G01D5/2497—Absolute encoders
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0428—Safety, monitoring
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/26—Pc applications
- G05B2219/2604—Test of external equipment
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/26—Pc applications
- G05B2219/2656—Instrumentation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
The present invention relates to high speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear, measuring gear includes mutually frustrating the inner ring major track and outer ring vernier magnetic track of row arrangement, and the inner ring major track number of teeth is Z, and the outer ring vernier magnetic track number of teeth is Z-1;Absolute value encoder includes measuring gear and the interior magnetic induction read head for being provided with magnetic induction component, signal conditioning circuit and FPGA interpolation sub-circuits, magnetic induction component carries out non-contact scanning generation Z and Z-1 sine and cosine orthogonal differential signal to measuring gear, after signal conditioning circuit, its error is corrected and compensated in real time by FPGA interpolations sub-circuit, so as to generate angle line number relative position value respectively for two tracks of Z and Z-1, then calculate current angular absolute position.Simple structure of the present invention, high precision, easy to install and strong shock resistance, greatly improved positioning, the repetitive positioning accuracy of machine tool chief axis, improve the overall accuracy in measurement and processing efficiency of Digit Control Machine Tool.
Description
Technical field
The present invention relates to a kind of encoder (Encoder), more particularly, to a kind of high speed and super precision machine tool chief axis, electro spindle magnetic
Sensing absolute value encoder, can be widely applied to the fields such as Digit Control Machine Tool, robot, elevator and industrial automation.
Background technology
Encoder is a kind of sensor for detection angles, position, speed and acceleration, is the angle position machinery rotation
The equipment that shifting or straight-line displacement are worked out, are converted to the electrical signal form that can be used for communicating, transmit and store, is machinery and electricity
The accurate measurement device that son is combined closely, is widely used in the various fields such as motor, automobile, wind-powered electricity generation, robot.From measurement function
On, encoder can be divided into increment size encoder (being also incremental encoder) and absolute value encoder.From measuring principle, coding
Device includes photoelectric encoder and magnetic induction encoder.
Increment size encoder is used to provide information of the current location relative to prior location, without the current definitely position of memory
The function of putting.When electromechanical equipment is powered off, if mechanical location changes because external force is moved or is rotated, position is caused to produce inclined
Move, and when electromechanical equipment restarts, increment size encoder is recorded before will be unable to judge the signal of current location and power off
Position signalling it is whether identical, thus encoder must be adjusted carry out the operation of back to zero.Each position of absolute value encoder
Correspondence one determination digital code, therefore its indicating value only with measurement starting and final position it is relevant, and with measure centre
Process is unrelated.When electromechanical equipment power-off after send a telegram in reply again when, absolute value encoder can read immediately the current spindle anglec of rotation or
Absolute position.
In the industrial production, wide variety of encoder is generally photo-electric, and its operation principle is:LED light source and condenser
The light source of the raster diffraction stripe of stabilization is provided;The grating structure of scanning mask and measuring basis is same or similar, when both
Slit has light to pass through when aliging, and light cannot pass through when both grooves align, and photocell is sensed during both relative motions
Just there is strong and weak alternately change in light intensity, it is in triangular wave patterns that this alternately change is, but because grating diffration effect is this
Alternately change is actually in sine wave.Sine and cosine encoded signal refers to the sinusoidal signal loading position that two-way phase difference is 90 degree
The code device signal of confidence breath.Photoelectric encoder both can detect angle displacement, can detect straight under mechanical switching device help again
Line position, has the advantages that low inertia, low noise, high accuracy, high-resolution, and it is poor to environmental suitability to have the disadvantage, for moisture,
The resistivity of dust, greasy dirt and temperature change is weaker, needs to do encapsulation process in practical application;Additionally, photoelectric encoder grating
Disk is generally glass material, when being rotated at a high speed around axle, easily because of the influence of the external environment conditions such as shaft vibration, impact so that grating disc
Fragmentation.
When photoelectric encoder is used on machine tool chief axis, its first position feedback photoelectric encoder feeds back with the second place
Photoelectric encoder can not be connected directly with machine tool chief axis, generally with the mechanical transmission mechanisms such as synchronizing wheel, belt and machine tool chief axis
It is indirectly connected with, its transmission process is:The spindle servo electric machine of built-in first position encoder drives belt movement, belt drive machine
Bed motion of main shaft, machine tool chief axis drive synchronizing wheel rotation, and synchronizing wheel drives the rotation of second place encoder, thus whole machinery to pass
Dynamic structure is more complicated, causes servomotor maximum speed relatively low.Supporting CNC digital control systems, are capable of achieving not high to required precision
The function such as screw thread process, rigid tapping, orientation trouble and tool magazine tool changing.If long-play, because bearing load is larger, skin
Band, the elastic deformation of Timing Belt, expand with heat and contract with cold and wear and tear so that Digit Control Machine Tool overall processing precision can become poorer and poorer.
When machine tool chief axis are higher to positioning accuracy request, first position feedback needs to use 17 or higher resolution
Photoelectric encoder, second place feedback will use the high-precision encoders such as magnetic resistance, magnetic grid, while second place feedback axial coding
Device and machine tool chief axis are direct-connected, to reduce driving error.It is integrated with machine tool chief axis that electro spindle realizes spindle motor, by height
Precision encoding device is direct-connected with machine tool chief axis, is reducing the error brought of transmission device simultaneously, and processing, positioning accurate greatly improved
Degree, and be a kind of desired transmission mode for meeting high speed and high precision processing requirement with a series of excellent drive characteristics.
Motor using digit position and controlling technology of velocity is driven, high accuracy sine and cosine encoder can provide 1Vpp electricity
The sinusoidal increment signal of ordinary mail number, signal quality is high to be turned into so as to carry out frequency multiplication interpolation subdivision high in follow-up signal process circuit
May.If for example, carrying out 4096 times thin in follow-up signal process circuit to every 512 rotary encoders of signal period of circle
Point, 2,000,000 measurements step pitch or line numbers, the resolution ratio equivalent to 21 can be just produced in a circle.Even if rotating speed reaches 24000
Revolutions per second, frequency when signal reaches control system input circuit also only has about 200KHz.The sinusoidal increment signal of 1Vpp is due to defeated
The spectrum component for going out is relatively simple, can transmit larger distance compared with square wave and it is unattenuated or distortion, it is allowed to cable
Length is up to 150 meters.
Except photoelectric encoder, magnetic induction encoder is also widely used in industrial production.Magnetic induction encoder is based on magnetic
Sensor, and Magnetic Sensor is widely used in modern industry and electronic product, is measured with induced field intensity and its distribution
The physical parameters such as electric current, position, direction.In the prior art, have many different types of sensors for measure magnetic field and its
His parameter, for example with Hall (Hall) element, anisotropic magnetoresistance (Anisotropic MagnetoResistance,
AMR) element, giant magnetoresistance (Gaint MagnetoResistance, GMR) element, tunnel magneto resistance TMR (Tunnel
MagnetoResistance) element is the Magnetic Sensor for measuring sensing element.Compared to other magnetic sensor elements, TMR elements
Possesses the advantages of big, the excellent temperature stability of Micro Energy Lose, high resolution, dynamic range and high sensitivity.
In high speed, high accuracy, the servo-drive system of high dynamic performance requirement, generally passed using the magnetic of output cosine and sine signal
Sensor detecting element, for position and velocity feedback.Its output signal includes that periodic sine and cosine (SINE, COSINE) is orthogonal
Differential signal, often rotates a circle and also exports reference zero (INDEX) differential signal all the way, when electromechanical equipment starts, though can be through
Later continuing signal processing circuit carries out frequency multiplication interpolation subdivision high, but can not immediately read the absolute position of the current spindle anglec of rotation
Value, until rotating shaft rotation is by after reference zero signal, can just obtain the absolute place value of the current spindle anglec of rotation.But lathe
It is synchronous motor that main shaft, electro spindle are most, needs to know the position of magnetic pole of rotor when synchronous motor startup, can be energetically
Square starts servomotor, is so accomplished by the definite current location for detecting rotor of absolute value encoder.If using traditional arteries and veins
The mode transmission signal of string is rushed, on the one hand with the raising of position-measurement device resolution ratio and precision, its output line number is increasingly
Greatly, it is higher to the requirement of subsequent control device interface in the case of motor runs at high speed, easily there is HFS transmission error count
Number, so as to influence numerical control device feedback control;On the other hand, train of pulse output is easily subject to the electricity of industrial environment apart from limited
Magnetic disturbance, is not suitable for the high-speed transfer of industry spot.In order to improve position feedback accuracy and high speed reliably transmission location number
According in digital control system, using digital serial bus formula communicator between position-measurement device and control device, by control end
Unit and measurement end unit are connected and composed by communication cable, compared with Transistor-Transistor Logic level and sine and cosine burst mode, universal serial bus
Formula transmission means improves antijamming capability, with reliability and real-time higher, while transmission incremental counter value may be selected
Or absolute position.
At present, the installation positioning method of magnetic induction encoder is very coarse, and the positioning reference plane of read head is plane.In peace
During dress, using positioning tool it is difficult to ensure that magnetic induction read head center, measure gear, machine tool chief axis install concentricity, meanwhile,
The positioning reference plane of read head and measure circumference of gear tangent plane be parallel to each other, read head and the guarantee for measuring the distance between gear
Also it is highly difficult, so as to cause the accuracy and uniformity of read head actual installation very poor, and then greatly reduce magnetic induction coding
The control accuracy of device.
Additionally, magnetic induction sine and cosine encoder is in engineer applied, due to by fluted disc processing technology, power-supply fluctuation, ring
The influence of border temperature change, the factor such as non-linear of read head magnetic induction chip, the output of position detecting element magnetic induction chip
Cosine and sine signal is often accompanied by direct current biasing error, amplitude error and quadrature phase error, harmonic component error, noise error etc.,
These errors directly influence the precision and reliability of servo-control system.The Angle Position letter how to be exported to sine and cosine encoder
Number error is effectively corrected and compensated, and high-resolution position is extracted from cosine and sine signal using suitable interpolation method
Confidence ceases, and has important research and application value to meet the high speed of servo-drive system, high-precision control requirement.
In Chinese invention patent application disclosed in 9 days March in 2016, number of patent application is 201511029653.3, open
Number it is CN105387879A, discloses the absolute place value magnetic coder of Large central aperture axial charging structure, is that a kind of magnet ring type is compiled
Code device, the magnet ring type coding disk employed in it is to pass through note by ferromagnetic material powder and as the ductile material of binding agent
The cyclic structure of the technique machine-shapings such as modeling, die casting or casting, is limited by the uniformity of material, and the also difficult precisely control of magnetization position
System so that magnetic moment size on coding disk, strong and weak and uniformity is more difficult is further enhanced, and during engineer applied,
Due to the exposure of coding disk upper magnetic pole outside, flying dust and tiny iron filings easily are adsorbed and carrys out error to detection band.As motor is processed
The rising of temperature, the coding disk temperature characterisitic of heat transfer will be the factor considered of having to, and coding disk can be magnetic decay, cause
Accuracy of waveform deteriorates, and closely influences machining accuracy.
In the Chinese utility model patent of the bulletin of on April 29th, 2015, number of patent application is 201420861460.9, bulletin
Number be CN204301754U, disclose gear rotary encoder, its output signal is divided into A roads, B roads and Z roads, with analog signal or
The form output of square wave, does not have bus type data output capacities;Its sensing read head and gear between gap for 0.1 to
0.15mm, gap is too small, and mechanical erection requirement is excessively harsh, causes installation and debugging to expend a large amount of man-hours;Have at program inside it
Reason chip by computer software, it is necessary to debug signal parameter, and program write-in program memory is preserved, non intelligent behaviour
Control, manually adjusts very cumbersome, wastes time and energy, and homogeneity of product is not high.
The content of the invention
In order to solve encoder control accuracy in the prior art and the relatively low technical problem of reliability, the present invention provides a kind of
Suitable for the magnetic induction absolute value encoder of high speed and super precision machine tool chief axis, encoder applies gear induced magnetism line work is former
Reason, the double track measurement gear to number of teeth difference 1 carries out non-contact scanning, is producing the high reliability sine and cosine of corresponding number just
Report to the leadship after accomplishing a task sub-signal, using FPGA field programmable logic devices, to cosine and sine signal direct current biasing error, amplitude error and orthogonal
Phase error is corrected and compensated in real time, the high accuracy interpolation subdivision to cosine and sine signal is realized, so as in encoder system
System internal needle generated the line number angular relative position high relative to the upper electric moment to two tracks that double track measures gear respectively
Value, and the phase and phase difference between two tracks be analyzed simultaneously, because phase and phase difference are to consolidate within a revolution
It is fixed and regular, and then encoder system can calculate current angular absolute position by angle line number relative position value.This
Invention in the operating modes such as rapid drilling, rapid changing knife and continuity tapping, can remain the processing of stability, positioning, control
High precision processed, the characteristics of with simple structure, small volume, lightweight, easy to install and strong shock resistance, is reducing complicated machinery
While transmission mechanism, positioning, the repetitive positioning accuracy of machine tool chief axis greatly improved, so as to improve the entirety of Digit Control Machine Tool
Accuracy in measurement and processing efficiency.
The present invention also provides the special measurement gear of high speed and super precision machine tool chief axis magnetic induction absolute value encoder.
High speed and super precision machine tool chief axis magnetic induction absolute value encoder of the present invention, including be sleeved on machine tool chief axis, electro spindle
And with machine tool chief axis, the measurement gear of electro spindle synchronous rotary and measure the magnetic induction read head that gear is used cooperatively;The amount
It is that double track measures gear to survey gear, and its inner ring major track number of teeth is Z, and the vernier magnetic track number of teeth in outer ring is Z-1, and inner ring major track
Row arrangement is mutually frustrated with outer ring vernier magnetic track;Magnetic induction component, the signal being sequentially connected are provided with the magnetic induction read head
Modulate circuit and FPGA interpolation sub-circuits, magnetic induction component and the measurement just tangent installation of circumference of gear;The magnetic induction unit
Device carries out the Z and Z-1 sine and cosine orthogonal differential signal produced by non-contact scanning to measurement gear, by signal condition
After circuit, its direct current biasing error, amplitude error and quadrature phase error are repaiied in real time by FPGA interpolations sub-circuit
Just and compensation, so as to generate the angle line number relative position value relative to the upper electric moment respectively for two tracks of Z and Z-1, then
According to the fixation between two tracks of Z and Z-1 and regular phase and phase difference relation, current angular line number is calculated absolute
Positional value.
The special measurement gear of high speed and super precision machine tool chief axis magnetic induction absolute value encoder of the present invention, including mutually frustrate row cloth
The inner ring major track and outer ring vernier magnetic track put, the inner ring major track number of teeth are Z, and the outer ring vernier magnetic track number of teeth is Z-1.
Preferably, the inner ring major track is integrally formed with outer ring vernier magnetic track.
Compared with prior art, the present invention has the advantages that:
1st, electricity reads current spindle anglec of rotation absolute position immediately on magnetic induction absolute value encoder, and accuracy of detection is high
And high-speed response can be carried out.Magnetic induction read head has selected high-precision sensing chip, works former using gear induced magnetism line
Reason, can recognize the angle position that gear is measured immediately below chip, realize high accuracy, high reliability detection;Use FPGA
(field programmable logic device) interpolation sub-circuit, the cosine and sine signal direct current biasing to the sampling of ADC analog to digital conversion circuits is missed
Difference, amplitude error and quadrature phase error are corrected and compensated in real time, and can using error parameter is write into FPGA scenes
The mode that programmed logic device in-chip FLASH ROM is preserved and called, carries out the automatic recalibration of electricity in FPGA programs and to by mistake
Poor Automatic adjusument, realizes the high accuracy interpolation subdivision to cosine and sine signal, without the operation of manual debugging full automation, pole
Big improves production efficiency, in the precision for improving encoder simultaneously, also improves anti-interference and high speed requirement.
2nd, present invention measurement gear does coding disk, has more preferable plasticity and uniform compared to magnet ring type coding disk
Property, it is easy to processing, dimensional accuracy is more preferably controlled, and can meet different application scenarios;What is more important, measures gear through magnetoelectricity
The cosine and sine signal accuracy of waveform that resistance sensor is produced is high, and uniformity is good.
3rd, heavy caliber hollow shaft is installed, without complicated mechanical transmission structure, it is not necessary to carry any bearing, it is not required that
Any machenical coupling, measures direct geared and is sleeved on machine tool chief axis, electro spindle and is synchronously revolved with machine tool chief axis, electro spindle
Turn, reducing the error brought of transmission device simultaneously, processing, positioning precision greatly improved, solve photoelectricity in the prior art
Encoder is rotated at a high speed the problems such as to axial float and sensitive circular runout, improves adaptation energy of the encoder to use environment
Power.
4th, magnetic induction encoder mechanical structure simplifies firm, measure between gear and magnetic induction read head using noncontact,
Designed without abrasion, direct-drive machine error is small, does not have mechanism's back clearance problem, with anti-vibration, anticorrosive, antipollution and work wide
Make the characteristic of temperature, fast response time adapts to high speed rotary motion, can be applied to the immalleable field of photoelectric encoder.
5th, magnetic induction reading header structure is novel, it is high to design firm, strong shock resistance, degree of protection, up to IP68, environment
Adaptability is good, and stable and reliable working performance, accurate positioning, installation are easily and using easy to operate.
6th, magnetic induction absolute value encoder signal is exported by RS485 or RS422 EBIs, compatible BISS, SSI
Deng serial communication protocol, and absolute position can be determined under conditions of 20000 revs/min of turn up and the above.
Brief description of the drawings
Fig. 1 is high speed and super precision machine tool chief axis magnetic induction absolute value encoder overall structure diagram of the present invention;
Fig. 2 is the structural representation that the present invention measures gear;
Fig. 3 is the schematic block circuit diagram of magnetic induction read head of the present invention;
Fig. 4 is the theory diagram that FPGA differences of the present invention mend sub-circuit.
Specific embodiment
Below in conjunction with embodiment and Figure of description, the present invention is described in further detail, but of the invention specific
Implementation method not limited to this.
Embodiment
Such as Fig. 1, high speed and super precision machine tool chief axis magnetic induction absolute value encoder of the present invention is including being sleeved on machine tool chief axis, electricity master
Ferromagnetism on axle and with machine tool chief axis, electro spindle synchronous rotary measures gear 1 and measures the magnetic induction that gear 1 is used cooperatively
Read head 2.The magnetic induction read head 2 is positioned at the outside top of measurement gear 1, seating side 26 and the measurement of magnetic induction read head
The side 12 of gear is in same plane, and magnetic induction read head and the gap measured between gear are 0.1mm to 0.3mm.
Such as Fig. 2, the measurement gear 1 is that double track measures gear, and with a center being arranged in live spindle
Hole 11, the number of teeth of its inner ring major track 14 is Z, the number of teeth of outer ring vernier magnetic track 13 for Z-1, the i.e. number of teeth of inner ring major track 14 with
The number of teeth difference 1 of outer ring vernier magnetic track 13, the inner ring major track number of teeth preferably 100 teeth (Z=100), the outer ring vernier magnetic track number of teeth is
99 teeth (Z-1), and inner ring major track and outer ring vernier magnetic track mutually frustrate row arrangement.The double track structure for measuring gear 1 is one
Shaping, the circumference of inner ring major track and outer ring vernier magnetic track is preferred to be waited greatly.In normal use condition and range, can be according to reality
The situation in border main shaft or motor space claims to the external diameter, thickness, hole size and the modulus that measure gear, measures gear
Specification modulus can be 0.2,0.3,0.4,0.5,0.6,0.8,1.0 or 2.0.
The circuit part of the magnetic induction read head is encapsulated in metal shell 21, such as Fig. 3, including first circuit board 22,
Magnet steel 23, electrical connector 24, second circuit board 25, are provided with cooperation magnet steel 23 to change of magnetic field strength feelings on first circuit board 22
Condition carries out the magnetic induction component of real-time detection;Signal conditioning circuit, the ADC moulds being sequentially connected are provided with second circuit board 25
Number change-over circuit, FPGA (field programmable logic device) interpolation sub-circuits and input/output interface circuit, and it is defeated from being input into
Input/output interface terminal is drawn on outgoing interface circuit, signal conditioning circuit is electrically connected with magnetic induction component.Magnetic induction unit device
Part produces sine and cosine orthogonal differential signal, amplifies through signal conditioning circuit, after filtering process, turns into ADC analog to digital conversion circuits
The single-ended cosine and sine signal of digital quantity is changed to, is finally processed by FPGA interpolation sub-circuits.
The metal shell 21 of the magnetic induction read head uses copper alloy or aluminum alloy material, including cylinder body 27 and spiral-lock
Upper lid 28 directly over cylinder body 27, is attached, and carry out electronics between cylinder body 27 and upper lid 28 by screw or solid gum
Casting glue is sealed, and the circuit part of magnetic induction read head is placed in the annular seal space that cylinder body is constituted with upper lid, and its outside is equipped with metal
Water joint is electrically connected with input/output interface circuit, realizes the output of absolute value encoder signal.Measure gear and magnetic induction
Notably direction when read head is installed, it is necessary to corresponded to installation up and down, otherwise signal is bad.During installation, it is recommended to use standard
The clearance gauge of thickness (such as 0.15 millimeter), both can accurately ensure magnetic induction component and measure the clipping room of gear away from can obtain again
Splendid signal quality.Additionally, the symmetrical projection being easily installed is provided with the bottom of the metal shell 21 of magnetic induction read head, it is right
Projection is claimed to be located at the both sides of the bottom of metal shell 21, the symmetrical rising height of both sides is consistent, to realize magnetic induction component and amount
Survey circumference of gear is just tangent, that is, realize magnetic induction component center, measure the concentricity that gear, machine tool chief axis are installed, Ran Houtong
Cross screw to be fastenedly connected magnetic induction read head with read head fixing base, finally extract clearance gauge out or rotation measures gear and takes out plug
Chi.
The magnetic induction component is SMRE (Semiconductor MagnetoResistive Element) semiconductor
Magnetoresistive element or TMR (Tunnel MagnetoResistance) tunnel magneto resistance sensor.Magnetic resistance sensor chip
Can be superior, with high magnetic field gradient sensitivity, small changes of magnetic field can be detected, output signal has good temperature
Stability, it uses push-pull type Wheatstone bridge design, and difference is provided along the Grad in sensor sensing direction to externally-applied magnetic field
Voltage output, and produce the two-way there is the quadrature voltage output signal of precise phase difference, it is used to detect the position for measuring pinion rotation
Put and direction.Coordinate magnetic induction encoder location and installation technique and welding circuit board production technology, such as magnetic induction chip pin
Design of pad etc., it is ensured that cosine and sine signal quadrature phase error is in the range of rational restriction.
In work, machine tool chief axis, electro spindle drive measurement gear 1 to rotate, on the first circuit board 22 of magnetic induction read head 2
Magnetic induction component coordinates magnet steel 23, and using the operation principle of gear induced magnetism line, measuring gear to double track carries out non-connecing
Touch is scanned, and produces the high reliability sine and cosine orthogonal differential signal of corresponding number (Z and (Z-1)), is connected by electrical connector 24
Signal conditioning circuit on logical second circuit board 25, shaping is carried out to signal, filters high frequency spurs, uses FPGA field-programmables
Logical device, cosine and sine signal direct current biasing error, amplitude error and quadrature phase error to the sampling of ADC analog to digital conversion circuits
Corrected in real time and compensated, and error parameter write-in FPGA field programmable logic device in-chip FLASHs ROM is preserved
And upper electricity is called, the high accuracy interpolation subdivision to cosine and sine signal is realized, so that in encoder system internal needle to Z and (Z-1)
Two tracks generated the line number angular relative position value high relative to the upper electric moment respectively, and simultaneously to Z and (Z-1) the two rails
Phase and phase difference between mark are analyzed, because phase and phase difference are fixed and regular within a revolution, and then
Encoder system calculates current angular absolute position by angle line number relative position value.
The present invention uses FPGA field programmable logic devices, and the cosine and sine signal to the sampling of ADC analog to digital conversion circuits is straight
Stream biased error, amplitude error and quadrature phase error are corrected and compensated in real time, are realized to the high-precision of cosine and sine signal
Degree interpolation subdivision, principle is as shown in figure 4, including direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal
Most value module, memory module, frequency multiplication module, Coordinate Rotation Digital computing module and rotating shaft anglec of rotation generation module, directly
Stream biased error compensating module, amplitude error compensating module, frequency multiplication module, Coordinate Rotation Digital computing module and rotating shaft rotation
Gyration generation module is sequentially connected, cosine and sine signal be most worth module respectively with direct current biasing error compensation module, amplitude error
Compensating module, memory module connection, memory module be used for store direct current biasing error compensation module, amplitude error compensating module,
Cosine and sine signal is most worth the operation result of module.Frequency multiplication module includes that cosine and sine signal multiplier module, cosine and sine signal are moved
Phase module, adjustment circuit module, wherein cosine and sine signal multiplier module are provided with two, cosine and sine signal multiplier module it is defeated
Enter end to be connected with amplitude error compensating module, output end is connected with adjustment circuit module;Another cosine and sine signal multiplier module
Input be connected with amplitude error compensating module by cosine and sine signal phase shift block, output end and adjustment circuit module connect
Connect, adjustment circuit module is connected with Coordinate Rotation Digital computing module.
The sine and cosine orthogonal differential signal of magnetic induction component output, by signal conditioning circuit, to orthogonal differential signal
Be amplified, Shape correction, and filter high frequency spurs and even-order harmonic.Using ADC analog to digital conversion circuits to sine wave signal and
Cosine wave signal carries out high speed real-time synchronization collection, and carries out digital filtering by FPGA, and filtering method is:Eight numbers of continuous acquisition
According to, two maximum sampled values, two minimum sampled values are removed, the average value of lower four sampled values of remainder is as current form
Sampled value.Using this kind of digital filtering method, shake, saltus step and the interference of sampled data are eliminated well.
Due to being influenceed by measuring the factors such as Gearmaking Technology, power-supply fluctuation, variation of ambient temperature, monocycle sine and cosine
The sampling maximum and minimum value of signal can all have data dithering all the time, measure the sine and cosine letter that gear revolves sampling of turning around
Number maximum and minimum value also can all have data dithering all the time, for the smoothed data subdivision error that brings of shake, adopt
Following method is taken to be processed:Machine shaft rotation is most worth module, motor by after reference zero signal, starting cosine and sine signal
Rotating shaft is for each revolution by reference zero signal, one maximum of numeration sinusoidal signal, a minimum value, cosine signal one
Maximum, a minimum value, eight cycles of continuous counter, sampling obtain eight sinusoidal signal maximums, minimum values, eight cosine
Signal maximum, minimum value;Remove two maximum sampled values, two minimum sampled values, lower four sampled values of remainder it is flat
Sampling maximum and minimum value of the average as cosine and sine signal.
Equation below is run in direct current biasing error compensation module and amplitude error compensating module, direct current biasing is derived
Error and amplitude error;
SIN (θ+)=VCC/2+offset_A+Ksin (θ+α); 〈1〉
SIN (θ -)=VCC/2+offset_B-Lsin (θ+α); 〈2〉
SIN (θ)=SIN (θ+)-SIN (θ -)=offset_A-offset_B+ (K+L) sin (θ+α); 〈3〉
COS (θ+)=VCC/2+offset_C+Mcos (θ+β); 〈4〉
COS (θ -)=VCC/2+offset_D-Ncos (θ+β); 〈5〉
COS (θ)=COS (θ+)-COS (θ -)=offset_C-offset_D+ (M+N) cos (θ+β); 〈6〉
Wherein, SIN (θ+), SIN (θ -), COS (θ+), COS (θ -) are the difference that magnetic induction component exports cosine and sine signal
Sub-signal, SIN (θ), COS (θ) are the cosine and sine signal by being obtained after signal conditioning circuit.Offset_A, offset_C are
The DC deviation amount of sine and cosine principal-employment sub-signal, offset_B, offset_D are the DC deviation amount of sine and cosine negative differential signal,
K, M are the amplitude deviation factor of sine and cosine principal-employment sub-signal, and L, N are the amplitude deviation factor of sine and cosine negative differential signal, and α, β are
Cosine and sine signal phase deviation.From the maximum of cosine and sine signal, minimum value:
SIN (90 °)=offset_A-offset_B+ (K+L) sin (90 °); 〈7〉
SIN (270 °)=offset_A-offset_B+ (K+L) sin (270 °); 〈8〉
SIN (90 °)+SIN (270 °)=2 (offset_A-offset_B); 〈9〉
SIN (90 °)-SIN (270 °)=2 (K+L); 〈10〉
Offset_A-offset_B=(SIN (90 °)+SIN (270 °))/2; 〈11〉
K+L=(SIN (90 °)-SIN (270 °))/2; 〈12〉
Obtain the sampling maximum and minimum value of sinusoidal signal, you can draw the direct current biasing error and amplitude of sinusoidal signal
Error, similarly, can also draw the direct current biasing error and amplitude error of cosine signal.
Direct current biasing error is subtracted by the current optional position moment waveform sample values processed by digital filtering, you can
To the cosine and sine signal comprising amplitude error and quadrature phase error:
SIN (θ)-(offset_A-offset_B)=(K+L) sin (θ+α)
COS (θ)-(offset_C-offset_D)=(M+N) cos (θ+β)
Amplitude deviation factor is multiplied by both sides simultaneously, obtains formula:
(M+N) (SIN (θ)-(offset_A-offset_B))=(M+N) (K+L) sin (θ+α)
(K+L) (COS (θ)-(offset_C-offset_D))=(K+L) (M+N) cos (θ+β)
The two-way cosine and sine signal of the direct current biasing error that is eliminated and amplitude error, the tangent letter of negating if two formulas are divided by
Number, you can obtain the only cosine and sine signal angular positional value comprising quadrature phase error.
Sampling maximum, minimum value to cosine and sine signal carry out above-mentioned computing, obtain direct current biasing error amount and amplitude
Error amount, write-in FPGA in-chip FLASHs ROM (i.e. memory module) is preserved, and is called in automatically after electricity on next time, and then is realized
The real-time amendment of the cosine and sine signal error produced to magnetic induction component and compensation.If error deviation threshold value sets more than a certain
Situations such as definite value, such as magnetic induction read head are reinstalled is influenceed, then FPGA programs are recalibrated automatically, so as to realize to error
Automatic adjusument.
The cosine and sine signal for having eliminated direct current biasing error and amplitude error is modified using frequency multiplication technology,
Quadrature phase error can be transformed into by direct current biasing error and amplitude error by phase shift, frequency multiplication, electricity is adjusted through rear class
After road module goes removing DC bias error and adjustment amplitude, with the high-quality cosine and sine signal of the two-way of two frequencys multiplication as original letter
Number, in Coordinate Rotation Digital computing module, then interpolation subdivision is carried out, subdivision accuracy can be improved, can reduce to sine and cosine again
The orthogonality requirement of signal.Coordinate Rotation Digital computing module is based on Coordinate Rotation Digital and calculates (CORDIC) algorithm, calculates anti-
Tangent, asks for phase value, show that rotating shaft anglec of rotation present position values, i.e. double track measure gear two phases of track of Z and Z-1
For the relative position value of the rotating shaft anglec of rotation at upper electric moment.The feeding rotating shaft anglec of rotation generation of angle line number relative position value
Module, by rotating shaft anglec of rotation generation module according to the fixation between two tracks of Z and Z-1 and regular phase and phase difference
Two tracks of relation, i.e. Z and Z-1 rotate a circle and are all 360 degree, final to calculate generation current angular absolute position values.The magnetic
The ADA4950-2 IC chips of the preferred Anolog Devices companies of high-speed-differential operational amplifier in sensing read head;
The high-speed parallel AD9248 of the multi-level differential pipelined architecture of the preferred Anolog Devices companies of ADC analog to digital conversion circuits is integrated
Circuit chip;The preferred FPGA field programmable logic devices 10M16SCU169I7G IC chips of interpolation sub-circuit.
Whole algorithms using FPGA treatment, fully with FPGA pipeline parallel method computings the characteristics of, and utilize FPGA
The modules such as memory block, hardware multiplier that inside carries improve hardware algorithm and realize performance, and speed is fast, and real-time is high, meets
Requirement of the motion control arithmetic to current location real-time.Magnetic induction component is exported just using digital circuit processing mode
The various errors of cosine signal are effectively corrected and compensated, and improve accuracy and reliability that difference mends subdivision, and then improve
The subdivision accuracy and resolution ratio of cosine and sine signal, and preserve and adjust using by error parameter write-in FPGA in-chip FLASHs ROM
Mode, carries out FPGA programs and recalibrates automatically and to the Automatic adjusument of error.By high-speed ADC analog to digital conversion circuit
With working in coordination for FPGA field programmable logic devices, the data acquisition and procession of high-speed, high precision is realized, by serial
Communications protocol bus realizes the data output of high-speed and high-efficiency, so that for servo-control system provides more accurate positional information
Meet high speed, the requirement of high-precision control.
The precision for measuring Gear Processing has a huge impact to the precision and uniformity of code device signal.Commercial Application
In, the precise measure gear of 6 grades of GB or higher precision should be selected.Code device signal line number can be carried out by measuring number of gear teeth
Adjustment, and and then influence machine tooling, positioning precision.Measuring gear has three kinds of mounting means:1st, hot charging.Using this technique
When, the internal diameter for producing measurement gear should be slightly less than the main shaft diameter of axle.Under normal temperature, measuring gear can not connect with main shaft.By adding
Heat surveys gear makes material expand, at this moment can measure gear and be mounted on main shaft.Then cooling measures gear makes Material shrinkage, most
Gear is measured eventually to be firmly pressed on main shaft.2nd, it is tightened on the shaft shoulder.Gear will be measured on main shaft, will be measured with screw
Gear is surveyed to be fixed on the main shaft shaft shoulder.3rd, clamped by axle nut.Measure gear to be installed on spindle shaft, compressed by axle nut
On a component.Customer requirement can also be answered, an integration type shaft nut is assembled on gear is measured, therefore had on internal diameter
Corresponding screw thread.
Magnetic induction absolute value encoder signal is connect via 10 core shielded twisted pair lines by RS485 or RS422 buses
The serial communication protocols such as mouth output, compatible BISS, SSI, and can be surveyed under conditions of 20000 revs/min of turn up and the above
Determine absolute position, can be widely applied to the fields such as Digit Control Machine Tool, robot, elevator and industrial automation.
One of presently preferred embodiments of the present invention is the foregoing is only, is not intended to limit the invention, it is all in the present invention
Spirit and principle within any modification, equivalent and the improvement made etc., should be included in protection scope of the present invention it
It is interior.
Claims (10)
1. high speed and super precision machine tool chief axis magnetic induction absolute value encoder, it is characterised in that including being sleeved on machine tool chief axis, electro spindle
Magnetic induction read head that is upper and being used cooperatively with machine tool chief axis, the measurement gear of electro spindle synchronous rotary and measurement gear;It is described
It is that double track measures gear to measure gear, and its inner ring major track number of teeth is Z, and the vernier magnetic track number of teeth in outer ring is Z-1, and the main magnetic of inner ring
Road and outer ring vernier magnetic track mutually frustrate row arrangement;Magnetic induction component, the letter being sequentially connected are provided with the magnetic induction read head
Number modulate circuit and FPGA interpolation sub-circuits, magnetic induction component with measure the just tangent installation of circumference of gear;The magnetic induction
Component carries out the Z and Z-1 sine and cosine orthogonal differential signal produced by non-contact scanning to measurement gear, is adjusted by signal
After reason circuit, its direct current biasing error, amplitude error and quadrature phase error are carried out in real time by FPGA interpolations sub-circuit
Amendment and compensation, so that the angle line number relative position value relative to the upper electric moment was generated respectively for two tracks of Z and Z-1,
Again according to the fixation between two tracks of Z and Z-1 and regular phase and phase difference relation, current angular line number is calculated exhausted
To positional value.
2. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that described
FPGA interpolations sub-circuit include direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal be most worth module,
Memory module, frequency multiplication module, Coordinate Rotation Digital computing module and rotating shaft anglec of rotation generation module, direct current biasing error
The generation of compensating module, amplitude error compensating module, frequency multiplication module, Coordinate Rotation Digital computing module and the rotating shaft anglec of rotation
Module is sequentially connected, cosine and sine signal be most worth module respectively with direct current biasing error compensation module, amplitude error compensating module, deposit
Storage module connection, cosine and sine signal is most worth module for asking for the sampling maximum and minimum value of cosine and sine signal, memory module
Most it is worth the operation result of module, institute for storing direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal
Stated angle line number relative position value of the Coordinate Rotation Digital computing module generation relative to the upper electric moment, the rotating shaft anglec of rotation
Generation module calculates current angular line number absolute position values.
3. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 2, it is characterised in that described to multiply
Method times frequency module includes cosine and sine signal multiplier module, cosine and sine signal phase shift block, adjustment circuit module, wherein sine and cosine letter
Number multiplier module is provided with two, and an input for cosine and sine signal multiplier module is connected with amplitude error compensating module, output
End is connected with adjustment circuit module;The input of another cosine and sine signal multiplier module by cosine and sine signal phase shift block with
Amplitude error compensating module is connected, and output end is connected with adjustment circuit module, and adjustment circuit module is calculated with Coordinate Rotation Digital
Module is connected.
4. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 2, it is characterised in that described straight
Stream biased error compensating module and amplitude error compensating module derive the direct current biasing error and amplitude of cosine and sine signal respectively
Error;Then using frequency multiplication module by phase shift, frequency multiplication by quadrature phase error be transformed into direct current biasing error and
Amplitude error, after adjusted circuit module goes removing DC bias error and adjustment amplitude, with the two-way cosine and sine signal of two frequencys multiplication
Interpolation subdivision is carried out again in Coordinate Rotation Digital computing module as primary signal.
5. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the magnetic
Sensing read head be located at measure gear outside top and and measure gear between gap be 0.1 to 0.3mm.
6. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the magnetic
The seating side for sensing read head is in same plane with gear side is measured;The housing bottom of magnetic induction read head is provided with to be easy to
Install symmetrical projection, symmetrical rising height one show realize magnetic induction component and measure the just tangent installation of circumference of gear, i.e.,
Realize magnetic induction component center, measure the concentricity that gear, machine tool chief axis are installed.
7. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the amount
The inner ring major track for surveying gear is integrally formed with outer ring vernier magnetic track.
8. high speed and super precision machine tool chief axis magnetic induction absolute value encoder according to claim 1, it is characterised in that the magnetic
The ADC analog to digital conversion circuits being connected between signal conditioning circuit and FPGA interpolation sub-circuits are additionally provided with sensing read head.
9. the special measurement gear of high speed and super precision machine tool chief axis magnetic induction absolute value encoder, it is characterised in that including mutually frustrating
The inner ring major track and outer ring vernier magnetic track of arrangement are arranged, the inner ring major track number of teeth is Z, and the outer ring vernier magnetic track number of teeth is Z-1.
10. special measurement gear according to claim 9, it is characterised in that the inner ring major track and outer ring vernier magnetic
Road is integrally formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710111232.8A CN106767956B (en) | 2017-02-27 | 2017-02-27 | Magnetic induction absolute value encoder of high-speed high-precision machine tool spindle and measuring gear thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710111232.8A CN106767956B (en) | 2017-02-27 | 2017-02-27 | Magnetic induction absolute value encoder of high-speed high-precision machine tool spindle and measuring gear thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106767956A true CN106767956A (en) | 2017-05-31 |
CN106767956B CN106767956B (en) | 2023-03-24 |
Family
ID=58959792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710111232.8A Active CN106767956B (en) | 2017-02-27 | 2017-02-27 | Magnetic induction absolute value encoder of high-speed high-precision machine tool spindle and measuring gear thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106767956B (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109000685A (en) * | 2018-06-20 | 2018-12-14 | 珠海格力电器股份有限公司 | Phase detection and compensation system and absolute encoder adopting same |
CN110487302A (en) * | 2019-07-03 | 2019-11-22 | 上海吉亿电机有限公司 | A kind of high-precision encoder and its mounting structure on traction motor |
CN110871276A (en) * | 2018-08-31 | 2020-03-10 | 蒂森克虏伯发动机***(大连)有限公司 | Electric spindle of machine tool |
CN111221300A (en) * | 2018-11-26 | 2020-06-02 | 大隈株式会社 | Numerical control device |
CN112525055A (en) * | 2020-11-27 | 2021-03-19 | 厦门微控科技有限公司 | Linear displacement measuring system based on magnetic grid ruler and using method thereof |
US10989566B2 (en) | 2018-04-09 | 2021-04-27 | Infineon Technologies Ag | Magnetic sensor system for measuring linear position |
WO2024060987A1 (en) * | 2022-09-19 | 2024-03-28 | 亿航智能设备(广州)有限公司 | Rotary actuator integrated with gear nonius encoder, and control method |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008286667A (en) * | 2007-05-18 | 2008-11-27 | Okuma Corp | Electromagnetic induction type position sensor |
CN101709983A (en) * | 2009-10-30 | 2010-05-19 | 大连光洋科技工程有限公司 | On-line actual error compensation system of sine and cosine encoder |
CN201579419U (en) * | 2009-12-22 | 2010-09-15 | 西安腾达电器有限责任公司 | Magnetic encoder for spindle of machine tool |
CN102111158A (en) * | 2010-11-23 | 2011-06-29 | 广州数控设备有限公司 | Device for subdividing sine signal and cosine signal of position sensor and coding data, and implementation method thereof |
US20130221953A1 (en) * | 2012-02-24 | 2013-08-29 | Tsann-Huei Chang | Absolute position recording device of motor |
CN104316085A (en) * | 2014-11-18 | 2015-01-28 | 连云港杰瑞电子有限公司 | Absolute value rotary encoder based on double-speed induction synchronous machine |
-
2017
- 2017-02-27 CN CN201710111232.8A patent/CN106767956B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008286667A (en) * | 2007-05-18 | 2008-11-27 | Okuma Corp | Electromagnetic induction type position sensor |
CN101709983A (en) * | 2009-10-30 | 2010-05-19 | 大连光洋科技工程有限公司 | On-line actual error compensation system of sine and cosine encoder |
CN201579419U (en) * | 2009-12-22 | 2010-09-15 | 西安腾达电器有限责任公司 | Magnetic encoder for spindle of machine tool |
CN102111158A (en) * | 2010-11-23 | 2011-06-29 | 广州数控设备有限公司 | Device for subdividing sine signal and cosine signal of position sensor and coding data, and implementation method thereof |
US20130221953A1 (en) * | 2012-02-24 | 2013-08-29 | Tsann-Huei Chang | Absolute position recording device of motor |
CN104316085A (en) * | 2014-11-18 | 2015-01-28 | 连云港杰瑞电子有限公司 | Absolute value rotary encoder based on double-speed induction synchronous machine |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10989566B2 (en) | 2018-04-09 | 2021-04-27 | Infineon Technologies Ag | Magnetic sensor system for measuring linear position |
CN109000685A (en) * | 2018-06-20 | 2018-12-14 | 珠海格力电器股份有限公司 | Phase detection and compensation system and absolute encoder adopting same |
CN110871276A (en) * | 2018-08-31 | 2020-03-10 | 蒂森克虏伯发动机***(大连)有限公司 | Electric spindle of machine tool |
CN111221300A (en) * | 2018-11-26 | 2020-06-02 | 大隈株式会社 | Numerical control device |
CN111221300B (en) * | 2018-11-26 | 2024-05-28 | 大隈株式会社 | Numerical control device |
CN110487302A (en) * | 2019-07-03 | 2019-11-22 | 上海吉亿电机有限公司 | A kind of high-precision encoder and its mounting structure on traction motor |
CN112525055A (en) * | 2020-11-27 | 2021-03-19 | 厦门微控科技有限公司 | Linear displacement measuring system based on magnetic grid ruler and using method thereof |
WO2024060987A1 (en) * | 2022-09-19 | 2024-03-28 | 亿航智能设备(广州)有限公司 | Rotary actuator integrated with gear nonius encoder, and control method |
Also Published As
Publication number | Publication date |
---|---|
CN106767956B (en) | 2023-03-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106625020B (en) | High speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder | |
CN106767956A (en) | High speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear | |
CN206578635U (en) | High speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder | |
CN103925933B (en) | A kind of multi-turn absolute magnetic encoder | |
CN103527620B (en) | Spherical hinge and the method for measurement of angle of revolution measurement can be realized | |
CN206339246U (en) | A kind of high-precision rotating speed and rotation absolute angular position measurement sensor | |
CN206583466U (en) | High speed and super precision machine tool chief axis magnetic induction absolute value encoder and its measurement gear | |
CN201387335Y (en) | Hall rotary encoder | |
CN104634367B (en) | A kind of magneto-electric absolute position transducer of Large central aperture structure and the method for measurement absolute position | |
CN104298170B (en) | Side putting type precision corner displacement detecting system voluntarily | |
CN203203607U (en) | Multi-loop absolute magnetic encoder | |
CN106595726B (en) | A kind of gear type magnetic encoder based on hypodontia structure | |
CN109443451A (en) | A kind of motor position speed detector | |
CN101876557A (en) | Position detecting device and signal processing device and method thereof | |
CN102997887A (en) | Method and device for multi-dimensional detection of angle sensor | |
CN108844557A (en) | Encoder orthogonal sinusoidal wave producer production method | |
CN207439425U (en) | High speed and super precision machine tool chief axis, electro spindle magnetic induction sine and cosine encoder | |
CN204301754U (en) | Gear rotary encoder | |
CN109990823A (en) | For detecting the detection device and detection method of photoelectric encoder precision | |
CN102322878B (en) | Preparation method for high-accuracy encoder and high-accuracy angle sensor | |
CN203703064U (en) | Actuator provided with angular displacement measuring and control device | |
CN105387879A (en) | Absolute position magnetic encoder of large center hole axial magnetization structure | |
CN201503273U (en) | Position detection device and signal processing device thereof | |
CN106225814A (en) | A kind of gear type magnetic encoder | |
CN206132084U (en) | Sensor of precision measurement rotational speed and rotatory absolute angle position |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |