CN106767431A - A kind of confocal micro-displacement measuring device of length scanning and method - Google Patents
A kind of confocal micro-displacement measuring device of length scanning and method Download PDFInfo
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- CN106767431A CN106767431A CN201611127494.5A CN201611127494A CN106767431A CN 106767431 A CN106767431 A CN 106767431A CN 201611127494 A CN201611127494 A CN 201611127494A CN 106767431 A CN106767431 A CN 106767431A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
A kind of confocal micro-displacement measuring device of length scanning of the present invention and method, in confocal microscope light path system, illuminated using Wavelength tunable laser, an illumination is focused using Fresnel zone plate, axial chromatic aberration focal distance offset character according to Fresnel zone plate, the axial scan of focal beam spot is realized by length scanning, using the confocal axial optical chromatography response output of confocal pinhole photoelectric detection unit detection, for discrete wavelength λn=λmin+ (n 1) δ λ, n=1,2 ..., 11 respectively obtains axial optical chromatography displacement --- intensity response, wherein λminIt is lower limit wavelength, the wavelength upper limit is λmax=λmin+ 10 δ λ, δ λ are wavelength stepped intervals, the linear gauging relation look-up table of illumination wavelengths and axial displacement is made up of the peak of each optical chromatography response curve, fine length scanning is performed once respectively to each characteristic point of testing sample, the actual displacement amount of each point is extrapolated by the peak value and look-up table of each response curve, so as to complete the measurement of micro-displacement or relative altitude, the method is applicable the accurate measurement of micro-displacement, film thickness and nanometer step etc..
Description
Technical field
The invention belongs to Technology of Precision Measurement field, more particularly to a kind of confocal micro-displacement measuring device of length scanning and side
Method.
Background technology
Confocal microscopy (Confocal Microscopy) is the most typically method for realizing optical chromatography microtechnic,
Earliest confocal microscopic imaging is installed on middle and later periods the 1950's and is carried by Harvard University junior research worker M.Minsky
Go out, and have developed the original specimen of confocal microscopic imaging device, U.S. patent Nos power was obtained in 1961.Confocal microscope has
There are two big major advantages, i.e., imaging resolution characteristic high and axial optical chromatography ability.The appearance of confocal microscopy is reformed
The general principle of traditional wide field optical imagery, assembles scanning imagery and realizes that Non-contact nondestructive hinders optical chromatography by 3 points of conjugation,
The particularly appearance of laser-scanning confocal microtechnic and fluorescent confocal microtechnic and development is to modern biotechnology and medical science, thing
The field such as reason, chemistry, material science, nanometer technology, accurate measurement generates profound influence.
Using the single peak response characteristic of confocal microscope axial direction optical chromatography curve can realize Microstructures Topography,
The accurate measurement of micro-displacement and thickness etc., prior art typically realizes axial scan by two quasi-representative methods：The first kind is base
This form, referred to as desk-top scanning drives microstructure sample to realize axial scan by the axial displacement of objective table；Equations of The Second Kind method
Motionless objective table, and by microcobjective be arranged on an accurate displacement mechanism on, usually piezoelectric ceramics nano shifter or
Elaborate servo displacement motor device, now microcobjective be axially moveable realization to focal beam spot along axle scan, referred to as object lens are swept
Retouch.The class method of the above two relies on precision optical machinery motion to realize scanning, therefore confocal microscope imaging and measuring speed are subject to
Considerable restraint, big stroke precision shifter high cost, this two classes method cannot be realized being scanned along the fast precise in axial plane.
Above-mentioned technical problem is the main difficulty that current confocal microscope axial scan faces, and is badly in need of one kind and does not rely on machine
The fast scanning method of tool scanning.
The content of the invention
In order to overcome the shortcoming of above-mentioned prior art, it is an object of the invention to provide a kind of confocal micro-displacement of length scanning
Measurement apparatus and method, are illuminated, using ripple based on binary amplitude type or phase type large-numerical aperture Fresnel zone plate focus point
Tunable laser illumination long, the linear gauging relation curve by wavelength and displacement in the range of certain range realizes small position
The accurate measurement of shifting, in the whole measurement process after the calibration for completing linearity curve, sample and object lens need not carry out axle
Scanned to displacement.
To achieve these goals, the technical solution adopted by the present invention is：
A kind of confocal micro-displacement measuring device of length scanning, including：
Wavelength tunable laser 1, as light source, exports collimated light beam；
Diadactic structure Fresnel zone plate 6, carries out light beam and assembles to form an illumination；
Confocal pinhole photoelectric detection unit, realizes confocal signal detection.
The Wavelength tunable laser 1, its wavelength continuously adjustabe, lower limit wavelength and the upper limit are respectively λminAnd λmax, under
Notch is long can to extend to ultraviolet band, and upper limit wavelength can extend near infrared band.
The diadactic structure Fresnel zone plate 6 be amplitude type or phase type, and girdle radius sequence byDetermine, whereinIt is ZhaoMing Center's ripple
Long, f isCorresponding focal length, N is annulus number, takes even number.
The diadactic structure Fresnel zone plate 6 is placed in air dielectric, and its numerical aperture meets NA>0.7.
The Wavelength tunable laser 1 sends laser beam concentrated lens 2, illumination pin hole 3 and collimation lens 4 successively
Collimation collimated light beam being formed afterwards, then being reflected through spectroscope 5, the reflected beams enter line convergence by diadactic structure Fresnel zone plate 6
Point illumination is provided, plane mirror or testing sample 7 are arranged near the focal plane of diadactic structure Fresnel zone plate 6, through flat
The light beam that face speculum or testing sample 7 are reflected back is transmitted through spectroscope 5, successively through collecting object lens 8 and confocal detection pin hole 9,
Finally received by photodetector 10.
Present invention also offers a kind of confocal microdisplacement measurement method of length scanning, comprise the following steps：
Step one, by lower limit wavelength λminTo upper limit λmaxDiscrete at equal intervals is λn=λmin+ (n-1) δ λ, n=1,2 ...,
11, δ λ are wavelength stepped intervals；
Step 2, for each wavelength Xn, plane mirror is driven using one-dimensional axial piezoelectric ceramics nano shifter
Obtain confocal axial optical chromatography response output, the corresponding axial coordinate Z in record peak response positionn, obtain wavelength --- peak
Value coordinate mapping table；
Step 3, using independent variable λnWith dependent variable ZnOne wavelength --- peak coordinate is obtained according to least square fitting
Linear relationship curve, as measurement calibration curve look-up table；
Step 4, changes authentic sample to be measured, is directed at different characteristic points to be measured and performs once fine length scanning respectively, remembers
The corresponding confocal axial optical chromatography response curve of record, is pushed away according to the corresponding scanning wavelength of peak point by step 3 gained look-up table
The peak point position axial coordinate corresponding to each point is calculated, so as to complete the accurate measurement of each point micro-displacement amount or relative altitude.
Compared with prior art, the present invention replaces mechanical scanning using length scanning, it is to avoid machinery of the sample with object lens
Motion is disturbed, for accurate or ultra precise measurement provides hardware guarantee；Replace normal merely with single plane micro-structural annulus piece
Rule large-numerical aperture micro objective realizes that focus point is illuminated, light structure, flexible design；Using existing ripe micro fabrication
The batch micro operations of Fresnel zone plate are capable of achieving, it is with low cost；Wavelength chooses flexible, from ultraviolet equal to near-infrared laser wavelength
Can cover.
Brief description of the drawings
Fig. 1 is the confocal micro-displacement measuring device of length scanning in the present invention, and 1 is Wavelength tunable laser in figure, and 2 are
Convergent lens, 3 is illumination pin hole, and 4 is collimation lens, and 5 is spectroscope, and 6 is binary amplitude type Fresnel blade unit, and 7 are
Plane mirror or testing sample, 8 is to collect object lens, and 9 is detecting pinhole, and 10 is photodetector.
Fig. 2 is Fresnel zone plate M of the present invention1Corresponding radial direction transmittance function figure.
Fig. 3 is Fresnel zone plate M of the present invention2Corresponding radial direction transmittance function figure.
Fig. 4 is Fresnel zone plate M of the present invention1Axial direction normalization focus strength curve map when corresponding wavelength is 532nm.
Fig. 5 is Fresnel zone plate M of the present invention2Axial direction normalization focus strength curve map when corresponding wavelength is 633nm.
Fig. 6 is Fresnel zone plate M of the present invention1Corresponding wavelength offset --- focal length linear relationship chart.
Fig. 7 is Fresnel zone plate M of the present invention2Corresponding wavelength offset --- focal length linear relationship chart.
Specific embodiment
Describe embodiments of the present invention in detail with reference to the accompanying drawings and examples.
As shown in figure 1, the confocal micro-displacement measuring device of a kind of length scanning of the invention, its light path system operation principle is：
Wavelength tunable laser 1 sends laser beam, and concentrated lens 2 are focused on, then are filtered by illumination pin hole 3, saturating by collimation afterwards
The collimation of mirror 4 forms collimated light beam, is then reflected through spectroscope 5, and the reflected beams enter line convergence by diadactic structure Fresnel zone plate 6
Point illumination is provided, plane mirror or testing sample 7 are arranged near the focal plane of diadactic structure Fresnel zone plate 6, through flat
The light beam that face speculum or testing sample 7 are reflected back is transmitted through spectroscope 5, then is assembled through collecting object lens 8, afterwards by confocal detection
Pin hole 9 is filtered, and useful signal is finally received and exported by photodetector 10.
The direct focussed collimated uniform laser light of Fresnel zone plate (Fresnel Zone Plate, FZP) in Fig. 1 devices
Beam, wheelbase is arbitrarily hung down from interior light field in surface after rang ring strap, by vector angular spectrum (Vectorial Angular
Spectrum, VAS) theory is analyzed calculating.
(1) Fresnel zone plate
If the wavelength of laser illuminator light beam is λ0, the refractive index of working media is η where Fresnel zone plate, then in medium
Optical wavelength is λ=λ0/ η, the girdle radius that can obtain Fresnel zone plate are
In formula, n is girdle radius ordinal number, and f is principal focal distance.
When taking ZhaoMing Center's wavelengthWhen,WhereinNow f isCorresponding focal length.
For large-numerical aperture FZP, effective numerical aperture can define according to maximum divergence half-angle α, i.e. NA=η sin α,
Meet tan α=rN/f；After numerical aperture definition, relationship below can be derived by using formula (1)
Thus, focal length f is established and associated with numerical aperture NA, medium refraction index η, wavelength X, maximum loop band number N.Given f,
According to formula (2), the annulus number N met under the premise of design NA can be calculated, and then obtain FZP diameters
If N is even number, the amplitude transmittance function of FZP is represented with t (r), for binary amplitude type FZP, transmittance function
It is described as
In formula, m=0,1 ..., N/2-1；Above formula assumes that innermost ring is printing opacity situation.
During laser beam illumination large-numerical aperture micro-structural annulus piece, it is necessary to consider the vector polarization characteristic of electromagnetic wave, because
This is completely illustrated using Vector Diffraction Theory, while for speed-up computation process, choosing a kind of Fast Hankel Transform and calculating
Method is quick, accurately calculate optical field distribution.
(2) vector angular spectra theory light field is calculated
Assuming that along the linearly polarized light (LPB) of X-direction vibration along Z axis forward-propagating, vertical illumination micro-structural, through micro-structural
After annulus piece diffraction, according to vector angular spectra theory, in z>Any point in 0 perpendicular planeElectric field E at position
Orthogonal components are
In formula, Ex(r, z) represents x to component, Ey(r, z) represents y to component,Represent z to component, q (l)
=(1/ λ2-l2)1/2, l represents radial spatial frequency component；J0And J1It is respectively first kind zeroth order and first-order bessel function, j is
Imaginary unit；Space angular spectrum A0L () is expressed as
In formula, t (r) represents the corresponding amplitude transmittance function of any round Symmetry Microstructure；G (r) represents that illuminating bundle exists
Optical field amplitude in micro-structural annulus plate plane, it is assumed here that uniform plane wave is illuminated, correspondence g (r)=1.Obtain micro- by formula (4)
Light distribution is after structure ring strap
For circularly polarized light and radial polarisation light illumination situations, intensity distribution meets rotational symmetry, is different from linear polarization
Light situation.
(3) Fast Hankel Transform algorithm
, it is necessary to zeroth order and single order Hankel transform is performed a plurality of times in the calculating process of formula (4) and formula (5), therefore Hunk
The computational efficiency and precision of your conversion are the keys of method for designing, and in order to accelerate computing, a kind of quick Hunk that of programming realization becomes
Scaling method is (referring to document A.E.Siegman.Quasi Fast Hankel Transform.Optics Letters, 1977,1:
13-15), the algorithm has a remarkable advantages such as fast, high precision, extremely low the Computer Storage requirement of calculating speed, general principle be
In standard Hankel transform integral expression, replaced using nonlinear exponent function variable, by the unilateral Hankel transform table of standard
Bilateral cross-correlation integral is shown as, by after such conversion cross-correlation can be calculated using Fourier transformation.
(4) specific embodiment
Using 532nm linearly polarized laser beam lightings, air dielectric (η=1) is devised comprising 100 annulus, a diameter of
D=116.06 μm of typical microstructure, characterisitic parameter is shown in Table 1, and specific girdle radius coordinate is shown in Table 2, corresponding radial direction transmitance
Function is as shown in Fig. 2 corresponding axial normalized intensity response is as shown in Figure 4.
Using 633nm linearly polarized laser beam lightings, air dielectric (η=1) is devised comprising 80 annulus, a diameter of D
=87.34 μm of typical microstructure, characterisitic parameter is shown in Table 1, and specific radial coordinate is shown in Table 3, and corresponding radial direction transmittance function is such as
Shown in Fig. 3, corresponding axial normalized intensity response is as shown in Figure 5.
Wavelength centered on illumination wavelengths is represented using FWHM (half extreme value overall with)When focal plane (z=f) in hot spot
Yardstick and axial focusing hot spot scale size, axial direction depth of focus DOF are represented.Δ λ represents current illumination wavelengths and centre wavelength
Deviation, NA is the numerical aperture (z=f) of FZP, and Δ f is maximum axial Jiao's shifting amount when wavelength offset is bound, the He of table 4
Table 5 is respectively the mapping table of the focal length and wavelength offset obtained according to VAS theoretical calculations, and as a result display has good line
Sexual intercourse, respectively as shown in Figures 6 and 7.
The microstructure parameters of table 1 and focus characteristics
The M of table 21Structural parameters (unit：μm)
The M of table 32Structural parameters (unit：μm)
Using coefficient correlation：
The relation of wavelength offset and focal length is represented, theoretical according to VAS, result of calculation is shown in Table 4 and table 5, to the data of table 4, rc
=-0.9993, to the data of table 5, rc=-0.9998, illustrates wavelength offset and focal length into perfect negative correlation, i.e., FZP is certain
There are significant linear negative color aberration characteristics in wave-length coverage.
The M of table 41Structural parameters (unit：μm)
| Δλ(nm) | -40 | -35 | -30 | -25 | -20 | -15 | -10 | -5 | 0 |
| f | 56.1 | 55.29 | 54.5 | 53.72 | 52.95 | 52.19 | 51.45 | 50.72 | 50 |
| Δλ(nm) | 5 | 10 | 15 | 20 | 25 | 30 | 35 | 40 | - |
| f | 49.3 | 48.6 | 47.92 | 47.25 | 46.59 | 45.93 | 45.3 | 44.67 | - |
The M of table 52Structural parameters (unit：μm)
| Δλ(nm) | -25 | -20 | -15 | -10 | -5 | 0 | 5 | 10 | 15 | 20 | 25 |
| f | 27.01 | 26.6 | 26.19 | 25.79 | 25.4 | 25.01 | 24.62 | 24.25 | 23.87 | 23.5 | 23.14 |
According to table 4 and the result of table 5, with reference to Fig. 6 and Fig. 7 linear relationship curves, confocal microdisplacement measurement method and step is as follows：
Step one, by wavelength it is discrete at equal intervals be λn=λminBetween+(n-1) δ λ, n=1,2 ..., 11, δ λ are wavelength stepping
Every λminIt is lower limit wavelength；
Step 2, for each wavelength Xn, a plane reflection is driven using one-dimensional axial piezoelectric ceramics nano shifter
Mirror obtains confocal axial optical chromatography response output, the corresponding axial coordinate Z in record peak response positionn, obtain wavelength inclined
Difference --- displacement mapping table；
Step 3, using independent variable λnWith dependent variable ZnA wavelength offset --- displacement is obtained using least square fitting
Linear relationship curve, as measurement calibration curve look-up table；
Step 4, changes authentic sample to be measured, is directed at different characteristic points to be measured and performs once fine length scanning respectively, remembers
The corresponding confocal axial optical chromatography response curve of record, is extrapolated according to the corresponding scanning wavelength of peak point by step 3 look-up table
Peak point position axial coordinate corresponding to each point, so as to complete the accurate measurement of each point displacement or relative altitude.
Specific embodiment of the invention is described above in association with accompanying drawing, but these explanations can not be understood to limitation
The scope of the present invention, protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (6)
1. the confocal micro-displacement measuring device of a kind of length scanning, it is characterised in that including：
Wavelength tunable laser (1), as light source, exports collimated light beam；
Diadactic structure Fresnel zone plate (6), carries out light beam and assembles to form an illumination；
Confocal pinhole photoelectric detection unit, realizes confocal signal detection.
2. the confocal micro-displacement measuring device of length scanning according to claim 1, it is characterised in that the tunable wave length swashs
Light device (1), its wavelength continuously adjustabe, lower limit wavelength and the upper limit are respectively λminAnd λmax, lower wavelength can extend to ultraviolet waves
Section, upper limit wavelength can extend near infrared band.
3. the confocal micro-displacement measuring device of length scanning according to claim 1, it is characterised in that the diadactic structure Fresnel
Zone plate (6) is amplitude type or phase type, and girdle radius sequence by
Determine, whereinIt is ZhaoMing Center's wavelength, f isCorresponding focal length, N is annulus number, takes even number.
4. the confocal micro-displacement measuring device of length scanning according to claim 1, it is characterised in that the diadactic structure phenanthrene alunite
You are placed in air dielectric zone plate (6), and its numerical aperture meets NA>0.7.
5. the confocal micro-displacement measuring device of length scanning according to claim 1, it is characterised in that the tunable wave length swashs
Light device (1) sends laser beam, and concentrated lens (2), illumination pin hole (3) and collimation lens (4) form collimation directional light afterwards successively
Beam, then reflects through spectroscope (5), and the reflected beams enter line convergence and provide point illumination by diadactic structure Fresnel zone plate (6), put down
Face speculum or testing sample (7) are arranged near the focal plane of diadactic structure Fresnel zone plate (6), through plane mirror or
The light beam that testing sample (7) is reflected back is transmitted through spectroscope (5), successively through collecting object lens (8) and confocal detection pin hole (9), most
Received by photodetector (10) afterwards.
6. a kind of confocal microdisplacement measurement method of length scanning, it is characterised in that comprise the following steps：
Step one, by lower limit wavelength λminTo upper limit λmaxDiscrete at equal intervals is λn=λmin+ (n-1) δ λ, n=1,2 ..., 11, δ λ
It is wavelength stepped intervals；
Step 2, for each wavelength Xn, drive plane mirror to be total to using one-dimensional axial piezoelectric ceramics nano shifter
Focal axis is responded to optical chromatography and exported, the corresponding axial coordinate Z in record peak response positionn, obtain wavelength --- peak coordinate
Mapping table；
Step 3, using independent variable λnWith dependent variable ZnOne wavelength --- the line of peak coordinate is obtained according to least square fitting
Sexual intercourse curve, as measurement calibration curve look-up table；
Step 4, changes authentic sample to be measured, is directed at different characteristic points to be measured and performs once fine length scanning respectively, records phase
The confocal axial optical chromatography response curve answered, is extrapolated according to the corresponding scanning wavelength of peak point by step 3 gained look-up table
Peak point position axial coordinate corresponding to each point, so as to complete the accurate measurement of each point micro-displacement amount or relative altitude.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020163A (en) * | 2017-12-26 | 2018-05-11 | 中国科学技术大学 | A kind of device of micro- tracking particulate three-D displacement |
| CN108592814A (en) * | 2017-11-22 | 2018-09-28 | 华侨大学 | Color calibration method for colored confocal measurement |
| CN108873287A (en) * | 2018-08-07 | 2018-11-23 | 西安交通大学 | A kind of miniature confocal microscopic imaging device |
| CN108875124A (en) * | 2018-04-26 | 2018-11-23 | 哈尔滨工业大学 | Extract the maximum backoff algorithm of confocal axial response curve peak position |
| CN109059762A (en) * | 2018-08-07 | 2018-12-21 | 西安交通大学 | A kind of Fresnel zone plate Spectral Confocal measurement method |
| CN109163662A (en) * | 2018-08-31 | 2019-01-08 | 天津大学 | Spectral Confocal displacement measurement method and device based on length scanning |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050167578A1 (en) * | 2003-12-11 | 2005-08-04 | Riza Nabeel A. | Agile spectral interferometric microscopy |
| US6958858B2 (en) * | 2001-07-30 | 2005-10-25 | Leica Microsystems Heidelberg Gmbh | Method for scanning microscopy; and scanning microscope |
| CN101183210A (en) * | 2006-11-17 | 2008-05-21 | 奇梦达北美公司 | Inspection systems and methods |
| CN101339129A (en) * | 2007-09-03 | 2009-01-07 | 深圳大学 | Variable visual field scanning microscope and the method based on fixed light path system |
| CN101915555A (en) * | 2010-07-09 | 2010-12-15 | 上海理工大学 | Axial scanning method by using electric control varifocal lens as confocal microscope system |
| CN105044895A (en) * | 2015-06-01 | 2015-11-11 | 西安交通大学 | Super-resolution confocal-microscopic imaging device and method |
-
2016
- 2016-12-09 CN CN201611127494.5A patent/CN106767431B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6958858B2 (en) * | 2001-07-30 | 2005-10-25 | Leica Microsystems Heidelberg Gmbh | Method for scanning microscopy; and scanning microscope |
| US20050167578A1 (en) * | 2003-12-11 | 2005-08-04 | Riza Nabeel A. | Agile spectral interferometric microscopy |
| CN101183210A (en) * | 2006-11-17 | 2008-05-21 | 奇梦达北美公司 | Inspection systems and methods |
| CN101339129A (en) * | 2007-09-03 | 2009-01-07 | 深圳大学 | Variable visual field scanning microscope and the method based on fixed light path system |
| CN101915555A (en) * | 2010-07-09 | 2010-12-15 | 上海理工大学 | Axial scanning method by using electric control varifocal lens as confocal microscope system |
| CN105044895A (en) * | 2015-06-01 | 2015-11-11 | 西安交通大学 | Super-resolution confocal-microscopic imaging device and method |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108592814A (en) * | 2017-11-22 | 2018-09-28 | 华侨大学 | Color calibration method for colored confocal measurement |
| CN108592814B (en) * | 2017-11-22 | 2020-05-15 | 华侨大学 | Color calibration method for color confocal measurement |
| CN108020163B (en) * | 2017-12-26 | 2020-01-31 | 中国科学技术大学 | device for microscopically tracking three-dimensional displacement of particles |
| CN108020163A (en) * | 2017-12-26 | 2018-05-11 | 中国科学技术大学 | A kind of device of micro- tracking particulate three-D displacement |
| CN108875124B (en) * | 2018-04-26 | 2022-04-01 | 哈尔滨工业大学 | Maximum value compensation algorithm for extracting peak value position of confocal axial response curve |
| CN108875124A (en) * | 2018-04-26 | 2018-11-23 | 哈尔滨工业大学 | Extract the maximum backoff algorithm of confocal axial response curve peak position |
| CN108873287A (en) * | 2018-08-07 | 2018-11-23 | 西安交通大学 | A kind of miniature confocal microscopic imaging device |
| CN109059762A (en) * | 2018-08-07 | 2018-12-21 | 西安交通大学 | A kind of Fresnel zone plate Spectral Confocal measurement method |
| CN108873287B (en) * | 2018-08-07 | 2020-06-19 | 西安交通大学 | Miniature confocal microscopic imaging device |
| CN109163662A (en) * | 2018-08-31 | 2019-01-08 | 天津大学 | Spectral Confocal displacement measurement method and device based on length scanning |
| CN111272217A (en) * | 2020-01-17 | 2020-06-12 | 中国科学院上海技术物理研究所 | Method for extracting ultraviolet to infrared laser spots by utilizing fractal structure |
| CN111272217B (en) * | 2020-01-17 | 2021-12-31 | 中国科学院上海技术物理研究所 | Method for extracting ultraviolet to infrared laser spots by utilizing fractal structure |
| CN112762820A (en) * | 2020-12-11 | 2021-05-07 | 深圳市菲森科技有限公司 | Calibration device and calibration method of confocal three-dimensional measurement system |
| CN112595245A (en) * | 2021-03-08 | 2021-04-02 | 深圳中科飞测科技股份有限公司 | Detection method, detection system, and non-volatile computer-readable storage medium |
| CN114353671A (en) * | 2022-01-14 | 2022-04-15 | 西安交通大学 | Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle |
| CN114353671B (en) * | 2022-01-14 | 2022-11-01 | 西安交通大学 | Dual-wavelength diffraction interference system and method for realizing synchronous measurement of displacement and angle |
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