CN106767390B - Interferometer optics system - Google Patents
Interferometer optics system Download PDFInfo
- Publication number
- CN106767390B CN106767390B CN201611133620.8A CN201611133620A CN106767390B CN 106767390 B CN106767390 B CN 106767390B CN 201611133620 A CN201611133620 A CN 201611133620A CN 106767390 B CN106767390 B CN 106767390B
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- CN
- China
- Prior art keywords
- microcobjective
- light
- spectroscope
- phase shifter
- light source
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A kind of interferometer optics system provided by the invention, including light source, condenser, optical filter, field stop, spectroscope, collimating mirror, phase shifter, microcobjective, charge coupled cell, the light that the light source issues successively passes through the condenser, the optical filter, the field stop, the spectroscope, the collimating mirror, the phase shifter, into the microcobjective, after the light splitting of the light splitting surface of the microcobjective, a part of light is reflected into the reference reflecting surface of the microcobjective, it is returned through described with reference to reflective surface, another part light reaches tested surface through the light splitting surface of the microcobjective, it reflects and returns through tested surface, it is overlapped after again passing through the light splitting surface with through the light with reference to reflective surface, it interferes and enters the charge coupled cell after spectroscope reflection, generate interference pattern Sample, element of the present invention is few, and structure is simple, is easy to guarantee lens barrel machining accuracy, reduces resetting difficulty.
Description
Technical field
The invention belongs to Optical System Design fields, and in particular to a kind of interferometer optics system.
Background technique
The method of measuring surface form has much at present, can be divided mainly into contact type measurement and non-contact measurement, contact
Formula measures by the way of Mechanical Contact point by point scanning, and the time is long, low efficiency, and easily scuffing piece surface, application is more limited.It is non-
Contact type measurement includes scanning electron microscope, scanning probe microscopy, white light interferometer etc., wherein white light interferometer base
In principle of optical interference, time of measuring is short, high-efficient, precision is high, in the surface topography of high-precision part especially optical element
It is widely used in measurement.
Although white light interferometer is with the obvious advantage in terms of high-precision surface topography measurement, white light currently on the market is dry
The deficiencies of for interferometer product there are optical system complexity, resetting difficulty is big, expensive.
Summary of the invention
In view of this, element is few, and structure is simple, in design the embodiment of the invention provides a kind of interferometer optics system
Using co-axial form, be not only easy to guarantee lens barrel machining accuracy, be also convenient for by the instruments such as centrescope, mirror surface position finder into
Row assistant resetting reduces resetting difficulty.
A kind of interferometer optics system provided by the invention, including light source, condenser, optical filter, field stop, light splitting
Mirror, collimating mirror, phase shifter, microcobjective, charge coupled cell (Charge-coupled Device, CCD), the light source hair
Light out successively passes through the condenser, optical filter, the field stop, the spectroscope, the collimating mirror, described
Phase shifter, into the microcobjective, after the light splitting of the light splitting surface of the microcobjective, a part of light is reflected into described micro-
The reference reflecting surface of object lens is returned through described with reference to reflective surface, and another part light penetrates the light splitting of the microcobjective
Face reaches tested surface, reflects and returns through tested surface, again passes through after the light splitting surface and through the light with reference to reflective surface
Line is overlapped, and is interfered and is entered the charge coupled cell CCD after spectroscope reflection, generates interference pattern.
Optionally, the light source is LED white light source.
Optionally, the condenser is cemented doublet.
Optionally, the spectroscope is glued by two isosceles right angle prisms, passes through coating film treatment and has transmissivity 50%
With reflectivity 50%.
Optionally, the collimating mirror is by coating film treatment and with the cemented doublet of achromatism effect.
Optionally, the phase shifter is Piezoelectric Ceramic.
Optionally, the microcobjective is Mirau type microcobjective, and the microcobjective is connected through a screw thread mode and moves
Phase device is fixedly connected.
Optionally, the light source, the condenser, the optical filter, the field stop, the spectroscope, the standard
Straight mirror, the phase shifter, the microcobjective are coaxial.
Optionally, the field stop and the charge coupled cell CCD image planes and measured surface three are at conjugate relation.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
Interferometer optics system element designed by the present invention is few, and structure is simple, co-axial form is used in design, not only easily
In guaranteeing lens barrel machining accuracy, it is also convenient for carrying out assistant resetting by instruments such as centrescope, mirror surface position finders, reduces adjustment
Difficulty.
Detailed description of the invention
Fig. 1 is a kind of structure chart of interferometer optics system in the embodiment of the present invention.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work
It encloses.
Description and claims of this specification and term " first ", " second ", " third " " in above-mentioned attached drawing
The (if present)s such as four " are to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should manage
The data that solution uses in this way are interchangeable under appropriate circumstances, so that the embodiments described herein can be in addition to illustrating herein
Or the sequence other than the content of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that
Cover it is non-exclusive include, for example, containing the process, method, system, product or equipment of a series of steps or units need not limit
In step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, produce
The other step or units of product or equipment inherently.
As shown in connection with fig. 1, a kind of interferometer optics system, including light source 1, condenser 2, filter are provided in the embodiment of the present invention
Mating plate 3, field stop 4, spectroscope 5, collimating mirror 6, phase shifter 7, microcobjective 8, charge coupled cell 9, the light source 1 are sent out
Light out successively passes through the condenser 2, the optical filter 3, the field stop 4, the spectroscope 5, the collimating mirror
6, the phase shifter 7, into the microcobjective 8, after the light splitting surface 8b of the microcobjective 8 light splitting, a part of light is anti-
It is mapped to the reference reflecting surface 8a of the microcobjective 8, is returned through described with reference to reflecting surface 8a reflection, another part light penetrates institute
The light splitting surface 8b for stating microcobjective 8 reaches tested surface, reflects and returns through tested surface, again passes through after the light splitting surface 8b and through institute
The light stated with reference to reflecting surface 8a reflection is overlapped, and is interfered and is entered the Charged Couple member after the spectroscope 5 reflection
Part CCD 9 generates interference pattern.
Optionally, the light source 1 is LED white light source, and those of ordinary skill in the art can be using the light for generating white light
Source does not limit this.
Optionally, the condenser 2 is cemented doublet, and those of ordinary skill in the art can flexibly select, not to this
It is defined.
Optionally, the spectroscope 5 is glued by two isosceles right angle prisms, by coating film treatment, has transmissivity 50%
With reflectivity 50%, those of ordinary skill in the art can flexibly be selected, to this without limiting.
Optionally, the collimating mirror 6 is by coating film treatment and with the cemented doublet of achromatism effect, and this field is general
Logical technical staff can flexibly select, to this without limiting.
Optionally, the phase shifter 7 is Piezoelectric Ceramic, has Subnano-class resolution ratio and nano grade positioning precision,
Those of ordinary skill in the art can flexibly select, to this without limiting.
Optionally, the microcobjective 8 be Mirau type microcobjective, the microcobjective 8 be connected through a screw thread mode with
Phase shifter 7 is fixedly connected, and those of ordinary skill in the art can flexibly select, to this without limiting.
Optionally, the light source 1, the condenser 2, the optical filter 3, the field stop 4, the spectroscope 5, institute
State that collimating mirror 6, the phase shifter 7, the microcobjective 8 are coaxial, the light that the light source 1 issues successively passes through the condenser
2, the optical filter 3, the field stop 4, the spectroscope 5, the collimating mirror 6, the phase shifter 7, into described micro-
Object lens 8, after the light splitting surface 8b of the microcobjective 8 light splitting, a part of light is reflected into the reference reflection of the microcobjective 8
Face 8a is returned through described with reference to reflecting surface 8a reflection, and another part light reaches quilt through the light splitting surface 8b of the microcobjective 8
Survey face is reflected through tested surface and is returned, and again passes through after the light splitting surface 8b and through the light weight reflected with reference to reflecting surface 8a
It closes, interfere and enters the charge coupled cell CCD 9 after the spectroscope 5 reflection, generate interference pattern.
Optionally, the field stop 4 is closed with 9 image planes of charge coupled cell CCD and measured surface three at conjugation
System.
Relative space position relationship is leaned between 9 three of the light source 1, spectroscope 5 and charge coupled cell CCD, guarantees light
The light that source 1 issues passes through spectroscope 5 and reaches tested surface, is reflected back spectroscope 5 through tested surface, then reflected by spectroscope 5, can
Vertically into charge coupled cell CCD 9.
Interferometer optics system element designed by the present invention is few, and structure is simple, co-axial form is used in design, not only easily
In guaranteeing lens barrel machining accuracy, it is also convenient for carrying out assistant resetting by instruments such as centrescope, mirror surface position finders, reduces adjustment
Difficulty.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
In several embodiments provided herein, it should be understood that disclosed system, device and method can be with
It realizes by another way.For example, the apparatus embodiments described above are merely exemplary, for example, the unit
It divides, only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple units or components
It can be combined or can be integrated into another system, or some features can be ignored or not executed.Another point, it is shown or
The mutual coupling, direct-coupling or communication connection discussed can be through some interfaces, the indirect coupling of device or unit
It closes or communicates to connect, can be electrical property, mechanical or other forms.
The unit as illustrated by the separation member may or may not be physically separated, aobvious as unit
The component shown may or may not be physical unit, it can and it is in one place, or may be distributed over multiple
In network unit.It can select some or all of unit therein according to the actual needs to realize the mesh of this embodiment scheme
's.
It, can also be in addition, the functional units in various embodiments of the present invention may be integrated into one processing unit
It is that each unit physically exists alone, can also be integrated in one unit with two or more units.Above-mentioned integrated list
Member both can take the form of hardware realization, can also realize in the form of software functional units.
Those of ordinary skill in the art will appreciate that all or part of the steps in the various methods of above-described embodiment is can
It is completed with instructing relevant hardware by program, which can be stored in a computer readable storage medium, storage
Medium may include: read-only memory (ROM, Read Only Memory), random access memory (RAM, Random
Access Memory), disk or CD etc..
A kind of interferometer optics system provided by the present invention is described in detail above, for the general of this field
Technical staff, thought according to an embodiment of the present invention, there will be changes in the specific implementation manner and application range, to sum up
Described, the contents of this specification are not to be construed as limiting the invention.
Claims (6)
1. a kind of interferometer optics system, which is characterized in that including light source (1), condenser (2), optical filter (3), field stop
(4), spectroscope (5), collimating mirror (6), phase shifter (7), microcobjective (8), charge coupled cell (9)；
The light source (1), the condenser (2), the optical filter (3), the field stop (4), the spectroscope (5), institute
It is coaxial to state collimating mirror (6), the phase shifter (7), the microcobjective (8)；
The light that the light source (1) issues successively pass through the condenser (2), the optical filter (3), the field stop (4),
The spectroscope (5), the collimating mirror (6), the phase shifter (7), into the microcobjective (8), through the microcobjective
(8) after light splitting surface (8b) light splitting, a part of light is reflected into the reference reflecting surface (8a) of the microcobjective (8), through described
It reflecting and returns with reference to reflecting surface (8a), another part light reaches tested surface through the light splitting surface (8b) of the microcobjective (8),
It reflects and returns through tested surface, again pass through the light splitting surface (8b) afterwards and through the light weight with reference to reflecting surface (8a) reflection
It closes, interfere and enters the charge coupled cell (9) after the spectroscope (5) reflection, generate interference pattern；
The spectroscope (5) is glued by two isosceles right angle prisms, passes through coating film treatment and has transmissivity 50% and reflectivity
50%；
The field stop (4) and the charge coupled cell (9) image planes and measured surface three are at conjugate relation.
2. system according to claim 1, which is characterized in that the light source (1) is LED white light source.
3. system according to claim 1, which is characterized in that the condenser (2) is cemented doublet.
4. system according to claim 1, which is characterized in that the collimating mirror (6) is to pass through coating film treatment and have to disappear
The cemented doublet of color difference effect.
5. system according to claim 1, which is characterized in that the phase shifter (7) is Piezoelectric Ceramic.
6. system according to claim 1, which is characterized in that the microcobjective (8) is Mirau type microcobjective, institute
It states microcobjective (8) and is connected through a screw thread mode and be fixedly connected with phase shifter (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133620.8A CN106767390B (en) | 2016-12-10 | 2016-12-10 | Interferometer optics system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133620.8A CN106767390B (en) | 2016-12-10 | 2016-12-10 | Interferometer optics system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106767390A CN106767390A (en) | 2017-05-31 |
| CN106767390B true CN106767390B (en) | 2019-07-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201611133620.8A Expired - Fee Related CN106767390B (en) | 2016-12-10 | 2016-12-10 | Interferometer optics system |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108225209A (en) * | 2017-12-04 | 2018-06-29 | 中国特种飞行器研究所 | A kind of stereoscopic vision erosion profile detection device and detection method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201050978Y (en) * | 2007-06-15 | 2008-04-23 | 西安普瑞光学仪器有限公司 | Precise distribution device for surface shape of white light interferometry sample |
| CN105157625A (en) * | 2015-05-29 | 2015-12-16 | 北京航空航天大学 | Fiber end face microscopic interferometry system based on zoom imaging lens |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3657345B2 (en) * | 1996-04-25 | 2005-06-08 | オリンパス株式会社 | Film thickness inspection system |
| US7705996B2 (en) * | 2005-07-18 | 2010-04-27 | Ohio State University | Methods and systems for ultra-precise measurement and control of object motion in six degrees of freedom by projection and measurement of interference fringes |
| JP2011085413A (en) * | 2009-10-13 | 2011-04-28 | Nikon Corp | Signal analyzer, white interferometer device, and method and program for signal analysis |
| CN105865370B (en) * | 2016-05-23 | 2019-04-19 | 华南师范大学 | A kind of white light scanning interferometric method and system |
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2016
- 2016-12-10 CN CN201611133620.8A patent/CN106767390B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201050978Y (en) * | 2007-06-15 | 2008-04-23 | 西安普瑞光学仪器有限公司 | Precise distribution device for surface shape of white light interferometry sample |
| CN105157625A (en) * | 2015-05-29 | 2015-12-16 | 北京航空航天大学 | Fiber end face microscopic interferometry system based on zoom imaging lens |
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| CN106767390A (en) | 2017-05-31 |
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