CN106763841A - A kind of vacuum lock - Google Patents
A kind of vacuum lock Download PDFInfo
- Publication number
- CN106763841A CN106763841A CN201710118801.1A CN201710118801A CN106763841A CN 106763841 A CN106763841 A CN 106763841A CN 201710118801 A CN201710118801 A CN 201710118801A CN 106763841 A CN106763841 A CN 106763841A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- top board
- sealing plate
- housing
- lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
A kind of vacuum lock, it includes a housing, the housing both sides are provided with the through hole for being connected with vacuum chamber, the lock body that can slide up and down is provided with the housing, the lock body includes one piece of top board, the top board both sides are symmetrically arranged with sealing plate, and the top board is provided with the ball of multiple protrusion top board surfaces, and the sealing plate correspondence ball is provided with multiple cone-shaped grooves.A kind of vacuum lock provided by the present invention, compact conformation, good airproof performance can provide two adjacent vacuum chambers effectively sealing, and to the opening shape strong adaptability of vacuum chamber.
Description
Technical field
The present invention relates to technical field of vacuum equipment, more particularly to a kind of vacuum lock.
Background technology
Vacuum equipment all has that the pumpdown time is long, experiment and production efficiency than relatively low problem, some application necks
Domain involve the need for being passed through in vacuum function room hazardous gas, run into some gases cause raw materials technology spoilage problems, some
Working gas run into water in air can spoilage problems etc., need to coordinate vacuum function room to do a prechamber again for this,
So that sample is passed in and out from prechamber, and vacuum function room does not expose air, keeps good vacuum environment.So, in forevacuum
A valve, this valve are needed between room and vacuum function room can be opened and closed, and sample is being ensured effectively in prechamber during opening
On the premise of being transmitted between vacuum function room, connection space needs are as small as possible, to reduce gas diffusion, and ensure two cavitys
Size for connection is as small as possible, is conducive to vacuum cavity to design, and is unlikely to bring very much the invalid increase of vacuum chamber greatly because of connection space.
Existing prechamber is connected with vacuum function room, more using two ways.One kind is entered using vacuum gate valve
Row connection, but because vacuum gate valve is round hole, connection area is too big, for example, in order to transmit Φ 150mm (6 inches of Φ)
Sample is, it is necessary to using the push-pull valve of standard Φ 200mm (8 inches of Φ), the area of its coupling part will be 31400cm2。
Another kind is turnover plate type vacuum lock, due to turnover panel poor sealing, although can be by rotary cylinder applying power top
Firmly turnover panel is sealed, but turnover panel wants good seal, is mainly realized by prechamber and the pressure difference of vacuum function room close
Envelope, when vacuum functional compartments need to realize predetermined function by glow discharge, vacuum is generally between 0.1Pa~0.001Pa,
And prechamber is also essentially between 0.1Pa~0.001Pa, both sides' pressure difference very little, prechamber is pressed in 0.1Pa~0.001Pa
In the case of power, gas molecule seldom, is not enough to seal turnover panel applying pressure will pass through reprint, wants good seal,
Prechamber is necessarily allowed to return to air or quasi- atmospheric condition, in vacuum function room after hours, will also again to prechamber
Vacuumize, reach the Vacuum Balance with vacuum function room, be then turned on turnover panel, take out sample, can thus lower whole production effect
Rate.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of vacuum lock, so that problem noted earlier is reduced or avoided.
In order to solve the above technical problems, the present invention proposes a kind of vacuum lock, it includes a housing, the housing both sides
The through hole for being connected with vacuum chamber is provided with, the lock body that can slide up and down is provided with the housing, the lock body includes
One piece of top board, the top board both sides are symmetrically arranged with sealing plate, and the top board is provided with the rolling of multiple protrusion top board surfaces
Pearl, the sealing plate correspondence ball is provided with multiple cone-shaped grooves.
Preferably, it is provided with spring between two sealing plates.
Preferably, the lock body is provided with the guide bearing that can be rolled with the housing and be connected.
Preferably, the through hole and the sealing plate, the top board are rectangle.
Preferably, the side wall of the top board is evenly equipped with four pairs of balls, the side wall edge of the sealing plate along its length
Length direction is evenly equipped with four pairs of cone-shaped grooves.
Preferably, the sealing plate is provided with sealing ring.
A kind of vacuum lock provided by the present invention, compact conformation, good airproof performance can be provided two adjacent vacuum chambers
Effectively sealing, and to the opening shape strong adaptability of vacuum chamber.
Brief description of the drawings
The following drawings is only intended to, in schematic illustration and explanation is done to the present invention, not delimit the scope of the invention.Wherein,
Fig. 1 is a kind of partial cross principle schematic of the vacuum lock according to a specific embodiment of the invention；
Fig. 2 is the dimensional decomposition structure principle schematic of the vacuum lock of Fig. 1.
Specific embodiment
In order to be more clearly understood to technical characteristic of the invention, purpose and effect, now control illustrates this hair
Bright specific embodiment.Wherein, identical part uses identical label.
Fig. 1 is a kind of partial cross principle schematic of the vacuum lock according to a specific embodiment of the invention；Fig. 2 is
The dimensional decomposition structure principle schematic of the vacuum lock of Fig. 1.Referring to shown in Fig. 1-2, the invention provides a kind of vacuum lock, its bag
A housing 1 is included, the both sides of the housing 1 are provided with the through hole 11 for being connected with vacuum chamber, and interior being provided with of the housing 1 can
The lock body 2 for sliding up and down, the lock body 2 includes one piece of top board 21, and the both sides of the top board 21 are symmetrically arranged with sealing plate 22, described
Top board 21 is provided with the ball 211 on multiple protrusion surfaces of top board 21, and the correspondence of the sealing plate 22 ball 211 is provided with
Multiple cone-shaped grooves 221.
Vacuum lock provided by the present invention is arranged between two vacuum chambers, for example, can be referred to installed in background technology
Between prechamber 101 and vacuum function room 102, the housing 1 respectively with the prechamber 101 and the vacuum function room
102 are fixedly connected, and the through hole 11 is respectively with the transmission of the prechamber 101 and the vacuum function room 102 mouthful (in figure
It is not shown) connection.
When the lower section of the inner chamber of the lock body 2 in the housing 1, the prechamber 101 and the vacuum function room
Connected between 102, so as to object transmission can be carried out.
When it is described lock body 2 under inner chamber from the promotion of drive device 3 (such as cylinder or hydraulic cylinder) to the housing 1 it is upper
When side is slided, the sealing plate 22 progressively blocks the through hole 11, when the inner chamber of top surface and the housing 1 of the sealing plate 22
Top surface contact when, the sealing plate 22 covers all the through hole 11, and now, the sealing plate 22 stops upward shifting
It is dynamic, and the top board 21 is continued to move up, the ball 211 is also continued to move up in the cone-shaped groove 221, by
Progressively reduce in the sectional dimension of the cone-shaped groove 221, therefore the ball 211 will promote the sealing plate 22 to institute
State through hole 11 to fit, that is to say, that the axial direction that the ball 211 can be by the sealing plate 22 in the through hole 11 is above pushed away
It is dynamic, so that the sealing plate 22 seals the through hole 11.
When needing two vacuum chambers to connect, pulling of the lock body 2 in drive device 3 (such as cylinder or hydraulic cylinder)
The lower section of the lower inner chamber to the housing 1 is slided, and the ball 211 return back to the circle under the drive of the top board 21 first
At the largest cross-sectional sized position of conical socket 221, afterwards, during downslide, the ball 211 passes through the top board 21
The cone-shaped groove 221 drives the sealing plate 22 to glide, so that the sealing plate 22 leaves covering for the through hole 11
Gai Wei, also can just cause to be connected between the through hole 11.
Vacuum lock provided by the present invention is that the present invention is controlled by ball mechanical force with the greatest improvement of prior art
Displacement of the sealing plate 22 on the axial direction of the through hole 11 is made, so as to ensure 22 pairs of through holes 11 of the sealing plate
Sealing effectiveness, this also just overcomes existing turnover plate type vacuum lock needs to ensure sealing by the pressure difference of different vacuum chambers
The defect of effect, additionally, not requiring the shape of through hole 11, that is to say, that pipe through-hole 11 is not what shape, the sealing
Plate 22 only needs to the shape of the correspondence through hole 11 to manufacture, and the size than through hole 11 is bigger, can ensure it is effective cover, this
Also overcome the existing vacuum gate valve technological deficiency higher to geomery requirement.
In a preferred embodiment, be can be set between two sealing plates 22 has spring (not shown) to connect
Connect, so, during the lock slide downward of body 2, when the ball 211 return back to the maximum of the cone-shaped groove 221
When at sectional dimension position, two sealing plates 22 can leave the through hole 11 under spring drive, near the top board 21,
So as to moving down beneficial to the lock body 2.
In a further advantageous embodiment, the lock body 2 is provided with the guide bearing that can be rolled with the housing 1 and be connected
23, can so be beneficial to sliding up and down for the lock body 2.
In a further advantageous embodiment, the through hole 11 and the sealing plate 22, the top board 21 are rectangle, so
The article of large-size is can transmit between may be such that two vacuum chambers.In order that the pressure obtained suffered by the sealing plate 22 is uniform,
The side wall of the top board 21 can along its length be evenly equipped with four to (the totally eight) ball 211, corresponding, the sealing plate 22
Side wall be evenly equipped with four along its length to (the totally eight) cone-shaped groove 221.
In order to preferably ensure 22 pairs of sealing effectiveness of the through hole 11 of the sealing plate, the sealing plate 22 may be used also
It is further provided with sealing ring 222.
A kind of vacuum lock provided by the present invention, compact conformation, good airproof performance can be provided two adjacent vacuum chambers
Effectively sealing, and to the opening shape strong adaptability of vacuum chamber.
It will be appreciated by those skilled in the art that although the present invention is described according to the mode of multiple embodiments,
Be not each embodiment only comprising an independent technical scheme.For the sake of so narration is used for the purpose of understanding in specification,
Those skilled in the art should be understood specification as an entirety, and by technical scheme involved in each embodiment
Regard that can be mutually combined into the mode of different embodiments understands protection scope of the present invention as.
Schematical specific embodiment of the invention is the foregoing is only, the scope of the present invention is not limited to.It is any
Those skilled in the art, the equivalent variations made on the premise of design of the invention and principle is not departed from, modification and combination,
The scope of protection of the invention all should be belonged to.
Claims (6)
1. a kind of vacuum lock, it is characterised in that it includes a housing, and the housing both sides are provided with for connecting with vacuum chamber
Logical through hole, is provided with the lock body that can slide up and down in the housing, the lock body includes one piece of top board, the top board both sides pair
Title is provided with sealing plate, and the top board is provided with the ball of multiple protrusion top board surfaces, the sealing plate correspondence rolling
Pearl is provided with multiple cone-shaped grooves.
2. vacuum lock according to claim 1, it is characterised in that be provided with spring between two sealing plates.
3. vacuum lock according to claim 1, it is characterised in that the lock body is provided with to be rolled with the housing and is connected
Guide bearing.
4. vacuum lock according to claim 1, it is characterised in that the through hole and the sealing plate, the top board are
Rectangle.
5. vacuum lock according to claim 4, it is characterised in that the side wall of the top board is evenly equipped with four pairs along its length
The ball, the side wall of the sealing plate is evenly equipped with four pairs of cone-shaped grooves along its length.
6. according to the vacuum lock that one of claim 1-5 is described, it is characterised in that the sealing plate is provided with sealing ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118801.1A CN106763841A (en) | 2017-03-02 | 2017-03-02 | A kind of vacuum lock |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118801.1A CN106763841A (en) | 2017-03-02 | 2017-03-02 | A kind of vacuum lock |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106763841A true CN106763841A (en) | 2017-05-31 |
Family
ID=58960541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710118801.1A Pending CN106763841A (en) | 2017-03-02 | 2017-03-02 | A kind of vacuum lock |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106763841A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108193190A (en) * | 2017-12-28 | 2018-06-22 | 深圳市华星光电半导体显示技术有限公司 | A kind of vacuum plant |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4405113A (en) * | 1981-05-11 | 1983-09-20 | Josiephine Reed Erwin | Reciprocating expandable gate valve |
| JP2001021048A (en) * | 1999-06-29 | 2001-01-26 | Varian Inc | Gate valve having lamp actuator mechanism |
| CN1464949A (en) * | 2001-08-01 | 2003-12-31 | 凡利安股份有限公司 | Gate valve with delayed retraction of counter plate |
| CN2713238Y (en) * | 2004-07-06 | 2005-07-27 | 吴维岳 | Valve structure of wafer reaction chamber |
| CN101604609A (en) * | 2009-06-30 | 2009-12-16 | 北京中科科仪技术发展有限责任公司 | A kind of vacuum isolating valve |
| CN204004486U (en) * | 2014-08-01 | 2014-12-10 | 川北真空科技(北京)有限公司 | Push-pull valve |
| CN204004487U (en) * | 2014-08-06 | 2014-12-10 | 川北真空科技(北京)有限公司 | Push-pull valve seal arrangement |
| CN205155194U (en) * | 2015-11-09 | 2016-04-13 | 东莞市汇成真空科技有限公司 | Vacuum valve of jumbo size bivalve door plant |
-
2017
- 2017-03-02 CN CN201710118801.1A patent/CN106763841A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4405113A (en) * | 1981-05-11 | 1983-09-20 | Josiephine Reed Erwin | Reciprocating expandable gate valve |
| JP2001021048A (en) * | 1999-06-29 | 2001-01-26 | Varian Inc | Gate valve having lamp actuator mechanism |
| CN1464949A (en) * | 2001-08-01 | 2003-12-31 | 凡利安股份有限公司 | Gate valve with delayed retraction of counter plate |
| CN2713238Y (en) * | 2004-07-06 | 2005-07-27 | 吴维岳 | Valve structure of wafer reaction chamber |
| CN101604609A (en) * | 2009-06-30 | 2009-12-16 | 北京中科科仪技术发展有限责任公司 | A kind of vacuum isolating valve |
| CN204004486U (en) * | 2014-08-01 | 2014-12-10 | 川北真空科技(北京)有限公司 | Push-pull valve |
| CN204004487U (en) * | 2014-08-06 | 2014-12-10 | 川北真空科技(北京)有限公司 | Push-pull valve seal arrangement |
| CN205155194U (en) * | 2015-11-09 | 2016-04-13 | 东莞市汇成真空科技有限公司 | Vacuum valve of jumbo size bivalve door plant |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108193190A (en) * | 2017-12-28 | 2018-06-22 | 深圳市华星光电半导体显示技术有限公司 | A kind of vacuum plant |
| CN108193190B (en) * | 2017-12-28 | 2020-06-09 | 深圳市华星光电半导体显示技术有限公司 | Vacuum device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201344287Y (en) | Vacuum valve of continuous evacuation device | |
| CN102878316B (en) | Ball valve reliable in sealing and low in opening-closing torque | |
| CN110185801A (en) | Special-shaped mesolow sealing ring | |
| MY151638A (en) | Heat exchanger shell assembly and method of assembling | |
| CN106763841A (en) | A kind of vacuum lock | |
| CN106938776A (en) | A kind of vacuum chamber material forwarding formations | |
| CN204284503U (en) | A kind of high vacuum gate valve | |
| CN202251207U (en) | Hydraulic cylinder | |
| CN213415537U (en) | Novel dry ash conveying pneumatic double-gate valve | |
| CN205401729U (en) | High vacuum baffle valve | |
| CN206001015U (en) | Controlled fluid contact sealing device | |
| CN106904408A (en) | A kind of vacuum chamber conveyer | |
| CN204541394U (en) | The damping buffer unit of drawer and furniture with drawer | |
| CN204386880U (en) | Variable conpacitance compressor and comprise the electrical products of this variable conpacitance compressor | |
| CN103410996A (en) | Dual soft sealing flat gate valve | |
| CN203131074U (en) | Wedge gate valve | |
| CN201753772U (en) | Hydraulic push rod type double-valve-plate valve | |
| CN207261345U (en) | A kind of integrated hydraulic control cylinder | |
| CN202203425U (en) | Multi-eccentric hard sealed butterfly valve | |
| CN217762632U (en) | Embedded floating oil seal seat | |
| CN210265930U (en) | Multiple sealed cage governing valve | |
| CN215806325U (en) | Improved cartridge valve | |
| CN207195751U (en) | A kind of sealing structure of disk centrifuge valve | |
| CN207935527U (en) | A kind of ironmaking dedusting high life Double-deck cinder discharge valve | |
| CN216479089U (en) | Valve block adopting lip-shaped sealing strip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170531 |