CN106737218A - The method for cutting silicon chips of low cost - Google Patents
The method for cutting silicon chips of low cost Download PDFInfo
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- CN106737218A CN106737218A CN201611261879.0A CN201611261879A CN106737218A CN 106737218 A CN106737218 A CN 106737218A CN 201611261879 A CN201611261879 A CN 201611261879A CN 106737218 A CN106737218 A CN 106737218A
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- mortar
- cutting
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- new
- cutting liquid
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
- B24C1/045—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass for cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
- B24C9/006—Treatment of used abrasive material
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Solid Wastes (AREA)
Abstract
The present invention relates to silicon chip cutting technique field, in existing silicon chip cutting technique, because mortar consumption is big, in order to cost-effective, most enterprises using will reclaim mortar be configured to mortar product with new mortar by the way of use, but fresh sand and new cutting liquid use ratio are high during configuration, and subsequent cleaning processes cleaning water consumption is big, cannot recycle, cause production cost higher, in order to solve this technical problem, the present invention provides a kind of method for cutting silicon chips of low cost, by the use ratio for changing fresh sand and new cutting liquid in mortar product allocation plan, with the waste water effective recycling produced to subsequent cleaning processes, the effect of production cost is reduced so as to reach.
Description
Technical field
The present invention relates to silicon chip cutting technique field, specially a kind of method for cutting silicon chips of low cost.
Background technology
In existing silicon chip cutting technique, because mortar consumption is big, most enterprises are re-used using mortar is reclaimed
Mode with cost-effective, the general principle that mortar is reclaimed is:Separation of solid and liquid is carried out to waste mortar using centrifuge, after separation
Liquid phase is mainly the dirty liquid for including most of little particles and cutting liquid, and solid phase is the bulky grain carborundum that can be continuing with.
Liquid phase is further processed using filter press, little particle is kept completely separate with cutting liquid, what acquisition can continue to use cuts
Cut liquid.Then the bulky grain carborundum and cutting liquid that will be reclaimed combine the new cutting liquid mixed configuration of a certain amount of fresh sand, are made tool
The mortar product for having cutting power is continuing with, and back and forth carries out.
Existing silicon chip cutting technique generally comprises following steps:
1. cutting machine is cut using mortar product to silicon rod, and cutting is completed, blanking to degumming machine.
2. degumming machine carries out prerinse and degumming, and step includes:
(1) No. 1, No. 2 grooves of degumming machine carry out spray prerinse using running water to crystal bar;
(2) No. 3 groove running water of degumming machine are cleaned by ultrasonic;
(3) No. 4 groove lactic acid degummings of degumming machine.
(4) blanking is to cleaning machine
3. cleaning machine carries out inserted sheet cleaning, and step includes:
(1) No. 1 groove citric acid of cleaning machine is cleaned by ultrasonic;
(2) No. 2 grooves of cleaning machine, No. 3 groove running water overflow ultrasound rinsings;
(3) No. 4 grooves of cleaning machine, No. 5 groove medicaments are cleaned by ultrasonic;
(4) No. 6 grooves of cleaning machine, No. 7 grooves, No. 8 grooves, No. 9 groove pure water overflow rinsings.
(5) blanking is to sorting table;
4. shipment is packed after sorting table sorting inspection.
Wherein, the mortar product in step 1 is formed by new mortar and the configuration of online mortar, and concrete configuration method is:
(1) new mortar configuration:
Fresh sand and recovery sand are according to 9:, into sand, new cutting liquid and recovery cutting liquid are according to 5 for 1 proportional arrangement:5 ratio is matched somebody with somebody
It is set to cutting liquid;
By sand, cutting liquid according to 1:1 proportional arrangement is the suspension of 1.660-1.670kg/L into density, is stirred 8 hours
Laggard line density monitoring, meets new mortar standard (such as table 1) and is configured for mortar product afterwards.
The new mortar standard of table 1
(2) online mortar configuration:
The antiquated sand pulp density for producing will be cut and be diluted to 1.5-1.6kg/L, be then separated into centrifuge and once weighed
Liquid and a light liquid.Carry out press filtration to a light liquid with filter press again, produce online recycling cutting liquid;
Add and reconciled during online recycling cutting liquid is added into a heavy-fluid, by the density of a heavy-fluid adjust to
1.55-1.6kg/L, is then separated into secondary heavy-fluid and secondary light liquid with centrifuge by a heavy-fluid again.With filter press to secondary
Light liquid carries out press filtration, produces online recycling cutting liquid.Reconciled during online recycling cutting liquid is added into secondary heavy-fluid, will be secondary
The density of heavy-fluid is adjusted to 1.680-1.685kg/L, as online mortar.
(3) mortar product configuration:
The new mortar and online mortar that complete will be configured according to 2:8 ratio is mixed into mortar product, and stirring 2 hours is laggard
Line density is monitored, and meeting mortar product standard (such as table 2) is used to cut afterwards.
The mortar product standard of table 2
There is following defect in above-mentioned processing step:
1. fresh sand, new cutting liquid use ratio are high in mortar product configuration, and fresh sand ratio is 90%, and new cutting liquid proportional is
50%, production cost is high;
2. degumming machine spray is big with running water usage amount, and production cost is high, waste water resource.
3. cleaning machine rinsing Water usage is big, No. 2 grooves of cleaning machine, No. 3 groove running water overflow rinsings, No. 6 grooves, No. 7 grooves, 8
Number groove, No. 9 groove pure water overflows rinsings, production cost are high, waste water resource.
The content of the invention
For the problems of the prior art, the present invention provides a kind of method for cutting silicon chips of low cost.
To realize above technical purpose, the technical scheme is that:A kind of method for cutting silicon chips of low cost, its step
Including:
A. cutting machine is cut using mortar product to silicon rod, and cutting is completed, blanking to degumming machine.
B. degumming machine originally Water spray prerinse;
C. degumming machine running water is cleaned by ultrasonic;
D. degumming machine lactic acid degumming, blanking to cleaning machine;
E. cleaning machine citric acid is cleaned by ultrasonic;
F. cleaning machine running water overflow ultrasound rinsing;
G. cleaning machine medicament is cleaned by ultrasonic;
H. cleaning machine pure water overflow rinsing, blanking to sorting table;
I. shipment is packed after sorting table sorting inspection.
The collocation method of mortar product is in the step A:
A. new mortar configuration:
Fresh sand and recovery sand are according to 6:, into sand, new cutting liquid and recovery cutting liquid are according to 1 for 4 proportional arrangement:9 ratio is matched somebody with somebody
It is set to cutting liquid;
By sand, cutting liquid according to 1:1 proportional arrangement is the suspension of 1.660-1.670kg/L into density, is stirred 8 hours
Laggard line density monitoring, configures after meeting new mortar standard for mortar product, and new mortar standard is as follows:
D50 values:9.40-12.00;
Little particle adds up (0-5.13um):< 5%;
Particle diameter is concentrated accumulative (7.50-13.31um):≥80;
The largest particles (19.50um):< 0.15%;
25 DEG C of pH value:5.0-7.5;
Electrical conductivity (us/cm):< 30;
Viscosity (mPas):240-320;
25 DEG C of proportion (kg/L):1.665-1.670;
Moisture content:≤ 0.5%.
B. online mortar configuration:
The waste mortar cutting liquid for producing will be cut and be diluted to 1.5-1.6kg/L.Then the waste mortar that will have been diluted with from
Scheming is separated into a heavy-fluid and a light liquid.Carry out press filtration to a light liquid with filter press again, produce online recycling cutting liquid;
Add and reconciled during online recycling cutting liquid is added into a heavy-fluid, by the density of a heavy-fluid adjust to
1.55-1.6kg/L, is then separated into secondary heavy-fluid and secondary light liquid with centrifuge by a heavy-fluid again.With filter press to secondary
Light liquid carries out press filtration, produces online recycling cutting liquid.Reconciled during online recycling cutting liquid is added into secondary heavy-fluid, will be secondary
The density of heavy-fluid is adjusted to 1.680-1.685kg/L, as online mortar.
C. mortar product configuration:
The new mortar and online mortar that complete will be configured according to 2:8 ratio is mixed into mortar product, and stirring 2 hours is laggard
Line density is monitored, and is used to cut after meeting mortar product standard, and mortar product standard is as follows:
D50 values:8.65-9.40;
Little particle adds up (0-5.13um):< 6%;
Particle diameter is concentrated accumulative (7.50-13.31um):≥80;
The largest particles (19.50um):< 0.2%;
25 DEG C of pH value:5.0-7.5;
Electrical conductivity (us/cm):< 30;
Viscosity (mPas):200-280;
25 DEG C of proportion (kg/L):1.675-1.680;
Moisture content:≤ 0.8%.
From the above, it can be seen that the advantage that the present invention possesses is:Fresh sand, new cutting liquid are used in mortar product configuration
Ratio reduction, fresh sand ratio is 60%, and new cutting liquid proportional is 10%, effectively reduces production cost.
Used as improvement, the mortar product in the step A is also added with dispersant;Dispersant is used to improve mortar flowing
Property, prevent mortar bonding die.
Used as improvement, the waste water produced in the step B is reused for step B after being processed through filter press press filtration;Waste water pressure
Reused after filter, reduce production cost, saving water resource.
Used as improvement, the waste water produced in the step F is reused for step B after being processed through filter press press filtration;Waste water pressure
Reused after filter, reduce production cost, saving water resource.
Used as improvement, the waste water produced in the step H is used for step F;The waste water produced in step H is used for step F, weight
It is multiple to utilize, reduce production cost, saving water resource.
From the above, it can be seen that the present invention possesses advantages below:
1. fresh sand, the reduction of new cutting liquid use ratio in mortar product configuration, fresh sand ratio is 60%, newly cuts liquid proportional
It is 10%, effectively reduces production cost;
2. it is reused for spraying prerinse after the waste water press filtration that the prerinse of degumming machine spray is produced, recycles, reduces
Production cost, has saved water resource.
3. cleaning machine running water overflow is reused for degumming machine spray prerinse after being cleaned by ultrasonic the waste water press filtration for producing, and follows
Ring is utilized, and reduces production cost, has saved water resource.
4. the waste water after cleaning machine pure water overflow rinsing is cleaned by ultrasonic for running water overflow, and a water is dual-purpose, reduces life
Cost is produced, water resource has been saved.
Brief description of the drawings
Fig. 1 is process chart of the invention.
Fig. 2 is water circulation use flow chart of the present invention.
Specific embodiment
With reference to Fig. 1, a specific embodiment of the invention is described in detail, but any limit is not done to claim of the invention
It is fixed.
As shown in figure 1, a kind of method for cutting silicon chips of low cost, its step includes:
A. cutting machine is cut using mortar product to silicon rod, and cutting is completed, blanking to degumming machine.
B. degumming machine carries out prerinse, degumming to the silicon rod after cutting, and step includes:
A. No. 1 groove originally Water spray prerinse of degumming machine
B. No. 2 groove running water of degumming machine are cleaned by ultrasonic;
C. No. 3 groove lactic acid degummings of degumming machine, blanking to cleaning machine;
C. cleaning machine carries out inserted sheet cleaning
A. No. 1 groove citric acid of cleaning machine is cleaned by ultrasonic;
B. No. 2 grooves of cleaning machine, No. 3 groove running water overflow ultrasound rinsings;
C. No. 4 grooves of cleaning machine, No. 5 groove medicaments are cleaned by ultrasonic;
D. No. 6 grooves of cleaning machine, No. 7 grooves, No. 8 grooves, No. 9 groove pure water overflow rinsings.
Wherein, the mortar product in step A is formed by new mortar and the configuration of online mortar, and concrete configuration method is:
A. new mortar configuration:
Fresh sand and recovery sand are according to 9:, into sand, new cutting liquid and recovery cutting liquid are according to 5 for 1 proportional arrangement:5 ratio is matched somebody with somebody
It is set to cutting liquid;
By sand, cutting liquid according to 1:1 proportional arrangement is the suspension of 1.660-1.670kg/L into density, is stirred 8 hours
Laggard line density monitoring, meets new mortar standard (such as table 1) and is configured for mortar product afterwards.
The new mortar standard of table 1
B. online mortar configuration:
To cut the antiquated sand pulp density for producing be diluted to 1.5-1.6kg/L (during first production, it is necessary to new cutting liquid or
Cutting liquid dilution waste mortar is reclaimed, after starting production, when there is online recycling cutting liquid to produce, is diluted with online recycling cutting liquid
Waste mortar), then it is separated into a heavy-fluid and a light liquid with centrifuge.Light liquid is pressed with filter press again
Filter, produces online recycling cutting liquid;
Add and reconciled during online recycling cutting liquid is added into a heavy-fluid, by the density of a heavy-fluid adjust to
1.55-1.6kg/L, is then separated into secondary heavy-fluid and secondary light liquid with centrifuge by a heavy-fluid again.With filter press to secondary
Light liquid carries out press filtration, produces online recycling cutting liquid.Reconciled during online recycling cutting liquid is added into secondary heavy-fluid, will be secondary
The density of heavy-fluid is adjusted to 1.680-1.685kg/L, as online mortar.
C. mortar product configuration:
The new mortar and online mortar that complete will be configured according to 2:8 ratio is mixed into mortar product, and stirring 2 hours is laggard
Line density is monitored, and meeting mortar product standard (such as table 2) is used to cut afterwards.
The mortar product standard of table 2
Because the ratio of new cutting liquid in mortar product is relatively low, mortar mobility weakens, and easily sand occurs during section blanking
Slurry deposition bonding die, causes sliver problem, in order to make up this problem, chemical industry dispersion is further introduced in mortar product
Agent, to improve mortar mobility, it is ensured that section quality.
In order to ensure quality of cutting into slices, make up because of the cutting power that fresh sand in mortar product and new cutting liquid proportional reduction bring
Decline problem, when being cut, suitably can increase finished product mortar on original Process ba- sis.
Because originally water consumption is big in cleaning step, to being recycled after each step water reuse filter press simple process,
Including:
1. degumming machine originally Water spray prerinse water consumption is big, therefore the waste water for being produced introduces wastewater disposal basin, then through pressure
Reuse pool is introduced after filter treatment, the water of reuse pool is used for degumming machine and sprays prerinse, so that production cost is reduced, while
Saving water resource.
2. because the ultrasound overflow rinsing of cleaning machine running water and pure water overflow rinsing water amount are big, and pure water overflow rinsing is produced
Raw waste water cleanliness factor is higher, meets running water ultrasound overflow rinsing water standard, therefore the waste water that pure water overflow rinsing is produced
For running water ultrasound overflow rinsing, to reduce production cost, while saving water resource.
3. the waste water for being produced after pair cleaning machine running water ultrasound overflow rinsing introduces wastewater disposal basin, after then being processed through filter press
Reuse pool is introduced, the water of reuse pool is used for degumming machine originally Water spray prerinse, same to reduce production cost and save water
Resource.
As a example by cutting 680,000 silicon chips, former technique and new technology of the present invention contrast are as follows:
Former technique:
1. when new mortar is configured in mortar product configuration, fresh sand and recovery sand are according to 9:1 proportional arrangement, new cutting liquid and
Cutting liquid is reclaimed according to 5:5 proportional arrangement.It is 35kg per knife fresh sand consumption, new cutting liquid consumption is 19.5kg.
2. per knife mortar product consumption 390kg.
3. degumming machine originally Water spray prerinse waste water, cleaning machine running water ultrasound overflow poaching wastewater and pure water overflow drift
Waste water is washed not recycle.
New technology:
1. when new mortar is configured in mortar product configuration, fresh sand and recovery sand are according to 6:4 proportional arrangement, new cutting liquid and
Cutting liquid is reclaimed according to 1:9 proportional arrangement.It is 17.2kg per knife fresh sand consumption, new cutting liquid consumption is 4.3kg.
2. per knife mortar product consumption 430kg.
3. degumming machine originally Water spray prerinse waste water, cleaning machine running water ultrasound overflow poaching wastewater and pure water overflow drift
Waste water is washed to recycle according to the method described in the present invention.
Monolithic Cost comparisons such as table 3.
The former technique of table 3 and new technology monolithic Cost comparisons
Cut respectively with former technique and new technology, cutting yield contrast table 4.
The former technique of table 4 is contrasted with new technology yield
As can be seen that using after new technology, monolithic cost is reduced, but has no effect on cutting effect from above-mentioned contrast, into
Product yield maintains an equal level with former technique substantially, has no too big change.
In sum, the present invention has advantages below:
1. fresh sand, the reduction of new cutting liquid use ratio in mortar product configuration, fresh sand ratio is 60%, newly cuts liquid proportional
It is 10%, effectively reduces production cost;
2. chemical industry dispersant is introduced in mortar product, mortar mobility is improved, to make up mortar product because of new cutting
Low the brought mortar deposition bonding die problem of liquid allocation ratio, it is ensured that section quality.
3. it is reused for spraying prerinse after the waste water press filtration that the prerinse of degumming machine spray is produced, recycles, reduces
Production cost, has saved water resource.
4. cleaning machine running water overflow is reused for degumming machine spray prerinse after being cleaned by ultrasonic the waste water press filtration for producing, and follows
Ring is utilized, and reduces production cost, has saved water resource.
5. the waste water after cleaning machine pure water overflow rinsing is cleaned by ultrasonic for running water overflow, and a water is dual-purpose, reduces life
Cost is produced, water resource has been saved.
It is understood that above with respect to specific descriptions of the invention, being merely to illustrate the present invention and being not limited to this
Technical scheme described by inventive embodiments.It will be understood by those within the art that, still the present invention can be repaiied
Change or equivalent, to reach identical technique effect;As long as satisfaction uses needs, all within protection scope of the present invention.
Claims (5)
1. a kind of method for cutting silicon chips of low cost, its step includes:
A. cutting machine is cut using mortar product to silicon rod, and cutting is completed, blanking to degumming machine.
B. degumming machine originally Water spray prerinse;
C. degumming machine running water is cleaned by ultrasonic;
D. degumming machine lactic acid degumming, blanking to cleaning machine;
E. cleaning machine citric acid is cleaned by ultrasonic;
F. cleaning machine running water overflow ultrasound rinsing;
G. cleaning machine medicament is cleaned by ultrasonic;
H. cleaning machine pure water overflow rinsing, blanking to sorting table;
I. shipment is packed after sorting table sorting inspection.
The collocation method of mortar product is in the step A:
A. new mortar configuration:
Fresh sand and recovery sand are according to 6:, into sand, new cutting liquid and recovery cutting liquid are according to 1 for 4 proportional arrangement:9 proportional arrangement into
Cutting liquid;
By sand, cutting liquid according to 1:1 proportional arrangement into density for 1.660-1.670kg/L suspension, stirring 8 hours it is laggard
Line density is monitored, and is configured for mortar product after meeting new mortar standard, and new mortar standard is as follows:
D50 values:9.40-12.00;
Little particle adds up (0-5.13um):< 5%;
Particle diameter is concentrated accumulative (7.50-13.31um):≥80;
The largest particles (19.50um):< 0.15%;
25 DEG C of pH value:5.0-7.5;
Electrical conductivity (us/cm):< 30;
Viscosity (mPas):240-320;
25 DEG C of proportion (kg/L):1.665-1.670;
Moisture content:≤ 0.5%.
B. online mortar configuration:
The waste mortar cutting liquid for producing will be cut and be diluted to 1.5-1.6kg/L.Then the waste mortar centrifuge that will have been diluted
It is separated into a heavy-fluid and a light liquid.Carry out press filtration to a light liquid with filter press again, produce online recycling cutting liquid;
Reconciled being added in an online recycling cutting liquid heavy-fluid of addition, the density of a heavy-fluid is adjusted to 1.55-
1.6kg/L, is then separated into secondary heavy-fluid and secondary light liquid with centrifuge by a heavy-fluid again.Secondary light liquid is entered with filter press
Row press filtration, produces online recycling cutting liquid.Reconciled during online recycling cutting liquid is added into secondary heavy-fluid, by secondary heavy-fluid
Density is adjusted to 1.680-1.685kg/L, as online mortar.
C. mortar product configuration:
The new mortar and online mortar that complete will be configured according to 2:8 ratio is mixed into mortar product, and stirring carries out close after 2 hours
Degree monitoring, is used to cut after meeting mortar product standard, and mortar product standard is as follows:
D50 values:8.65-9.40;
Little particle adds up (0-5.13um):< 6%;
Particle diameter is concentrated accumulative (7.50-13.31um):≥80;
The largest particles (19.50um):< 0.2%;
25 DEG C of pH value:5.0-7.5;
Electrical conductivity (us/cm):< 30;
Viscosity (mPas):200-280;
25 DEG C of proportion (kg/L):1.675-1.680;
Moisture content:≤ 0.8%.
2. it is according to claim 1 low cost method for cutting silicon chips, it is characterised in that:Finished sand in the step A
Slurry is also added with dispersant.
3. it is according to claim 1 low cost method for cutting silicon chips, it is characterised in that:What is produced in the step B is useless
Water is reused for step B after being processed through filter press press filtration.
4. it is according to claim 1 low cost method for cutting silicon chips, it is characterised in that:What is produced in the step F is useless
Water is reused for step B after being processed through filter press press filtration.
5. it is according to claim 1 low cost method for cutting silicon chips, it is characterised in that:What is produced in the step H is useless
Water is used for step F.
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CN108821490A (en) * | 2018-06-12 | 2018-11-16 | 山东大海新能源发展有限公司 | A kind of solar panel processing disintegrating system in waste pipe for realizing near-zero release |
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