CN106714057A - Dynamic tracking MEMS microphone and dynamic tracking method - Google Patents

Dynamic tracking MEMS microphone and dynamic tracking method Download PDF

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Publication number
CN106714057A
CN106714057A CN201510780062.3A CN201510780062A CN106714057A CN 106714057 A CN106714057 A CN 106714057A CN 201510780062 A CN201510780062 A CN 201510780062A CN 106714057 A CN106714057 A CN 106714057A
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China
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signal
threshold
collection
threshold signal
mems microphone
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CN201510780062.3A
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Chinese (zh)
Inventor
叶菁华
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Yutaixin Microelectronics Technology Shanghai Co Ltd
Zilltek Technology Corp
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Yutaixin Microelectronics Technology Shanghai Co Ltd
Zilltek Technology Corp
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Priority to CN201510780062.3A priority Critical patent/CN106714057A/en
Publication of CN106714057A publication Critical patent/CN106714057A/en
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Abstract

The invention relates to the technical field of acoustic signal processing, and especially relates to a dynamic tracking MEMS microphone and a dynamic tracking method. A detection device detects an acquisition signal and compares the acquisition signal with a threshold signal; when the acquisition signal is not matched with the threshold signal, the detection device outputs a control signal, and a polarization device adjusts the polarization voltage of vibrating diaphragms under the action of the control signal; and when the polarization voltage changes, the sensitivity of the vibrating diaphragms changes correspondingly, so that the condition that the vibrating diaphragms are connected with each other can be avoided and the sound quality of microphone output can be improved. The dynamic tracking MEMS microphone and the dynamic tracking method provided by the invention can protect the vibrating diaphragms of the microphone on one hand, and can effectively avoid the output of ''harsh'' sound on the other hand.

Description

The MEMS microphone and dynamic tracing method of dynamic tracing
Technical field
The present invention relates to a kind of sound signal processing technical field, more particularly to a kind of dynamic tracing MEMS microphone and dynamic tracing method.
Background technology
Polarizing voltage, is added in the DC voltage between transaudient vibrating diaphragm and pole plate.The size of polarizing voltage can be straight Connect the sensitivity of influence detector.For MEMS microphone, polarizing voltage often improves 1V, its The sensitivity of MEMS Mikes point then improves 10db~20db, and sensitivity is higher, its MEMS microphone The Oscillation Amplitude of transaudient vibrating diaphragm acoustic pressure therewith is more obvious, and MEMS microphone in higher sensitivity is applied to , then easily there is vibrating diaphragm using this kind of microphone in the faint sound of collection, and the sound higher for acoustic pressure Connection phenomenon, because sound is higher, the Oscillation Amplitude of vibrating diaphragm is higher, greatly reduces between a pair of vibrating diaphragms Relative distance, when the relative distance between vibrating diaphragm is infinitely small, has occurred as soon as vibrating diaphragm connection phenomenon, and then Cause the microphone cannot accurate acquisition sound.
The content of the invention
In view of the shortcomings of the prior art, the present invention provide it is a kind of can real-time adjustment sensitivity of microphone dynamic The MEMS microphone and dynamic tracing method of tracking.
Technical purpose of the invention is realized by following technological means:
A kind of MEMS microphone of dynamic tracing, wherein, including:
One harvester, is provided with the vibrating diaphragm being parallel to each other for a pair on the harvester;It is used to form one and adopts Collection signal output;
One detection means, is prefabricated with threshold signal, is used to receive the collection signal, and according to the collection Signal and the threshold signal form control signal output;
One polarization device, in the presence of the control signal to the vibrating diaphragm provide a polarizing voltage with Adjust the sensitivity of the vibrating diaphragm.
Preferably, the MEMS microphone of above-mentioned dynamic tracing, wherein, the threshold signal includes the One threshold signal and Second Threshold signal;
In the state of the collection signal is more than first threshold signal, the detection means output first is controlled Signal, the polarization device reduces the polarizing voltage in the presence of first control signal;
In the state of the collection signal is less than Second Threshold signal, the detection means output second is controlled Signal, the polarization device improves the polarizing voltage in the presence of second control signal.
Preferably, the MEMS microphone of above-mentioned dynamic tracing, wherein, the first threshold signal is big In the Second Threshold signal, in the collection signal is more than the first threshold signal and exports described the After one control signal, the detection means judges whether the collection signal is believed more than the Second Threshold again Number.
Preferably, the MEMS microphone of above-mentioned dynamic tracing, wherein, the first threshold signal is 140db, the Second Threshold signal is 135db.
Preferably, the MEMS microphone of above-mentioned dynamic tracing, wherein, the detection means is RMS Detector.
A kind of dynamic tracing method based on MEMS microphone, wherein;Including,
Step 1, the control microphone collection are presently in the voice signal of environment, and form a collection letter Number output;
It is defeated that step 2, detection means form a control signal according to the collection signal node unification threshold signal Go out;
Step 3, polarization device adjust the polarizing voltage of the microphone in the presence of the control signal; And transfer to perform step 1.
Preferably, the above-mentioned dynamic tracing method based on MEMS microphone, wherein;In the step In 2, specifically include:
Step 21, the threshold signal prefabricated to the detection means, the threshold signal include the first threshold Value signal and Second Threshold signal;
Step 22, in the collection signal more than in the state of the first threshold signal, output one first Control signal;And perform step 3;In the state of the collection signal is less than the first threshold signal; Perform step 23;
Step 23, in the collection signal less than in the state of the Second Threshold signal, output one second Control signal;And perform step 3.
Preferably, the above-mentioned dynamic tracing method based on MEMS microphone, wherein;In the step In 21, the first threshold signal is more than the Second Threshold signal.
Compared with prior art, it is an advantage of the invention that:
Signal is gathered by a detection means examinations, and collection signal is compared with threshold signal, In the state of collection signal mismatches threshold signal, a control signal is exported, polarization device is believed in control The polarizing voltage of vibrating diaphragm, after polarizing voltage changes, the sensitivity of its vibrating diaphragm are adjusted in the presence of number Just accordingly change, it is to avoid the state of vibrating diaphragm interconnection occur, improve the tonequality of microphone output. On the one hand the application can protect the vibrating diaphragm of microphone, on the other hand also effectively avoid the occurrence of " ear-piercing " sound The output of sound.The application can also avoid the occurrence of the output of " ear-piercing " sound, when microphone local environment Sound steeply rise during, it is real when the voice signal of collected sound signal first time high-amplitude When reduce the sensitivity of vibrating diaphragm, the voice signal amplitude of microphone output is lowered, and then ensure that Mike The voice signal of wind output does not rise with steeply rising for ambient sound, there is provided the experience sense of user.
Brief description of the drawings
Fig. 1 is the MEMS microphone structure schematic diagram of dynamic tracing in the present invention;
Fig. 2 is the sensitivity curve figure of the MEMS microphone based on dynamic tracing in the present invention;
Fig. 3 is the dynamic tracing method of MEMS microphone in the present invention.
Specific embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, but not as of the invention Limit.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the invention, and It is not all, of embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art are without work The every other embodiment obtained on the premise of going out creative work, belongs to the scope of protection of the invention.
It should be noted that in the case where not conflicting, the embodiment in the present invention and the spy in embodiment Levying to be mutually combined.
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, but not as of the invention Limit.
As shown in figure 1, a kind of MEMS microphone of dynamic tracing, wherein, including:
One harvester, is provided with the vibrating diaphragm being parallel to each other for a pair on the harvester;It is used to form one and adopts Collection signal output;
One detection means, is prefabricated with threshold signal, is used to receive the collection signal, and according to the collection Signal and the threshold signal form control signal output;
One polarization device, in the presence of the control signal to the vibrating diaphragm provide a polarizing voltage with Adjust the sensitivity of the vibrating diaphragm.
Operation principle of the invention is:Signal is gathered by a detection means examinations, and collection is believed Number compared with threshold signal, in the state of collection signal mismatches threshold signal, the control letter of output one Number, polarization device adjusts the polarizing voltage of vibrating diaphragm in the presence of control signal, when polarizing voltage becomes After change, the sensitivity of its vibrating diaphragm just accordingly changes, it is to avoid the state of vibrating diaphragm interconnection occurs, carries The tonequality of microphone output high.On the one hand the application can protect the vibrating diaphragm of microphone, on the other hand also have Effect avoids the occurrence of the output of " ear-piercing " sound.The application can also avoid the occurrence of the defeated of " ear-piercing " sound Go out, during the sound of microphone local environment steeply rises, when collected sound signal is high for the first time During the voice signal of amplitude, the sensitivity of vibrating diaphragm, the voice signal amplitude quilt of microphone output are reduced in real time Reduce, and then ensure that the voice signal of microphone output does not rise with steeply rising for ambient sound, There is provided the experience sense of user.
Enumerate a specific embodiment, as described in Figure 2, when collection signal less than threshold signal (assuming that threshold value Signal is 135db) in the state of, the sensitivity of microphone is to be risen with fixed slope, when collection signal In the state of threshold signal, the polarizing voltage of polarization device reduction vibrating diaphragm, and then cause microphone Sensitivity decrease, does not continue to rise with a fixed slope.Under this kind of state, the sensitivity decrease of vibrating diaphragm, So that microphone is when high amplitude signals are gathered, the Oscillation Amplitude reduction of vibrating diaphragm, and then can continue to collection Voice signal.
As further preferred embodiment, the MEMS microphone of above-mentioned dynamic tracing, wherein, institute Stating threshold signal includes first threshold signal and Second Threshold signal.
In the state of the collection signal is more than first threshold signal, the detection means output first is controlled Signal, the polarization device reduces the polarizing voltage in the presence of first control signal.
In the state of the collection signal is less than Second Threshold signal, the detection means output second is controlled Signal, the polarization device improves the polarizing voltage in the presence of second control signal.
Using the detection method of dual threashold value signal, it is to avoid during high amplitude signals are gathered, sensitivity one The straight state in fluctuation, continues by taking Fig. 2 as an example, when only only one of which threshold signal (threshold signal It is 135db), after the sensitivity decrease of vibrating diaphragm, meeting between its collection sound amplitude and actual sound amplitude (such as actual sound is 140db, because of vibrating diaphragm sensitivity decrease, gathers the width of signal a difference occurs It is 132db to spend), when collection signal is less than in the state of threshold signal, using the method for single threshold value under, Polarizing voltage is necessarily readjusted, i.e. sensitivity is readjusted, after sensitivity raising, collection Difference between sound amplitude and actual sound amplitude reduces, (for example, before sensitivity adjustment between the two Difference 8db, 2db is differed after sensitivity adjustment between the two), its collection signal be possible to be higher than again Threshold signal, by that analogy, the sensitivity of its vibrating diaphragm is constantly in fluctuation status, in order to overcome this to lack Fall into.
As further preferred embodiment, the MEMS microphone of above-mentioned dynamic tracing, wherein, institute First threshold signal is stated more than the Second Threshold signal, the first threshold is more than in the collection signal After signal and output first control signal, the detection means judges whether the collection signal is big again In the Second Threshold signal.
The application provides a kind of dual threshold detection, in the state of collection signal is higher than first threshold signal, pole The polarizing voltage for reducing vibrating diaphragm is put in makeup so that the sensitivity decrease of vibrating diaphragm, when collection signal is less than second In the state of threshold signal (the actual sound signal amplitude for being presently in environment is lowered afterwards), carry again Rise the polarizing voltage of vibrating diaphragm so that worked under high sensitivity state.Between the two must be in sequence Perform.
As further preferred embodiment, the MEMS microphone of above-mentioned dynamic tracing, wherein, institute First threshold signal is stated for 140db, the Second Threshold signal is 135db.It is only herein a kind of act Example mode.
As further preferred embodiment, the MEMS microphone of above-mentioned dynamic tracing, wherein, institute Detection means is stated for RMS detector.
As shown in figure 3, a kind of dynamic tracing method based on MEMS microphone, wherein;Including,
Step 1, the control microphone collection are presently in the voice signal of environment, and form a collection letter Number output;
It is defeated that step 2, detection means form a control signal according to the collection signal node unification threshold signal Go out;
Step 3, polarization device adjust the polarizing voltage of the microphone in the presence of the control signal; And transfer to perform step 1.
As further preferred embodiment, the above-mentioned dynamic tracing method based on MEMS microphone, Wherein;In the step 2, specifically include:
Step 21, the threshold signal prefabricated to the detection means, the threshold signal include the first threshold Value signal and Second Threshold signal;
Step 22, in the collection signal more than in the state of the first threshold signal, output one first Control signal;And perform step 3;In the state of the collection signal is less than the first threshold signal; Perform step 23;
Step 23, in the collection signal less than in the state of the Second Threshold signal, output one second Control signal;And perform step 3.
As further preferred embodiment, the above-mentioned dynamic tracing method based on MEMS microphone, Wherein;In the step 21, the first threshold signal is more than the Second Threshold signal.
The above-mentioned dynamic tracing method based on MEMS microphone, the MEMS microphone with dynamic tracing Operation principle it is similar, do not repeat herein.
The foregoing is only preferred embodiments of the present invention, not thereby limit embodiments of the present invention and Protection domain, to those skilled in the art, should can appreciate that all utilization description of the invention And the equivalent done by diagramatic content and the scheme obtained by obvious change, should include Within the scope of the present invention.

Claims (8)

1. a kind of MEMS microphone of dynamic tracing, it is characterised in that including:
One harvester, is provided with the vibrating diaphragm being parallel to each other for a pair on the harvester;It is used to form one and adopts Collection signal output;
One detection means, is prefabricated with threshold signal, is used to receive the collection signal, and according to the collection Signal and the threshold signal form control signal output;
One polarization device, in the presence of the control signal to the vibrating diaphragm provide a polarizing voltage with Adjust the sensitivity of the vibrating diaphragm.
2. the MEMS microphone of dynamic tracing according to claim 1, it is characterised in that the threshold Value signal includes first threshold signal and Second Threshold signal;
In the state of the collection signal is more than first threshold signal, the detection means output first is controlled Signal, the polarization device reduces the polarizing voltage in the presence of first control signal;
In the state of the collection signal is less than Second Threshold signal, the detection means output second is controlled Signal, the polarization device improves the polarizing voltage in the presence of second control signal.
3. the MEMS microphone of dynamic tracing according to claim 2, it is characterised in that described One threshold signal is more than the Second Threshold signal, and the first threshold signal is more than in the collection signal And after exporting first control signal, whether the detection means judges the collection signal more than institute again State Second Threshold signal.
4. the MEMS microphone of dynamic tracing according to claim 2, it is characterised in that described One threshold signal is 140db, and the Second Threshold signal is 135db.
5. the MEMS microphone of dynamic tracing according to claim 1, it is characterised in that the inspection Survey device is RMS detector.
6. a kind of dynamic tracing method based on MEMS microphone, it is characterised in that;Including,
Step 1, the control microphone collection are presently in the voice signal of environment, and form a collection letter Number output;
It is defeated that step 2, detection means form a control signal according to the collection signal node unification threshold signal Go out;
Step 3, polarization device adjust the polarizing voltage of the microphone in the presence of the control signal; And transfer to perform step 1.
7. the dynamic tracing method based on MEMS microphone according to claim 6, it is characterised in that; In the step 2, specifically include:
Step 21, the threshold signal prefabricated to the detection means, the threshold signal include the first threshold Value signal and Second Threshold signal;
Step 22, in the collection signal more than in the state of the first threshold signal, output one first Control signal;And perform step 3;In the state of the collection signal is less than the first threshold signal; Perform step 23;
Step 23, in the collection signal less than in the state of the Second Threshold signal, output one second Control signal;And perform step 3.
8. the dynamic tracing method based on MEMS microphone according to claim 7, it is characterised in that; In the step 21, the first threshold signal is more than the Second Threshold signal.
CN201510780062.3A 2015-11-13 2015-11-13 Dynamic tracking MEMS microphone and dynamic tracking method Pending CN106714057A (en)

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