CN106712435A - Voice coil motor - Google Patents
Voice coil motor Download PDFInfo
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- CN106712435A CN106712435A CN201510416089.4A CN201510416089A CN106712435A CN 106712435 A CN106712435 A CN 106712435A CN 201510416089 A CN201510416089 A CN 201510416089A CN 106712435 A CN106712435 A CN 106712435A
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- groove
- voice coil
- coil motor
- groove structure
- prominent
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Abstract
The invention discloses a voice coil motor comprising a stator which is provided with groove structures of which the number is greater than or equal to 1; a rotor which is provided with convex structures which are arranged in the groove structures with the shape matched with that of the groove structures; and a coil which is at least partially arranged in the groove structures. The convex structures adaptive to the groove structures are arranged to generate gravity compensating force opposite to the direction of gravity on the rotor so that the stability of the motor can be enhanced, and thrust pressure of the coil caused by gravity can be reduced; besides, the stroke of the motor is increased so that the overall performance of the voice coil motor can be further enhanced, and the requirements of long-stroke movement and high-precision positioning of a photoetching machine can be effectively met.
Description
Technical field
The present invention relates to a kind of voice coil motor.
Background technology
Voice coil motor is generally made up of stator and mover, and its operation principle is：It is put into stator gap magnetic field
Coil windings, produce electromagnetic force after coil electricity, drive mover and load for linear motion, change electric current
Strong and weak and polarity, you can change the size and Orientation of electromagnetic force.Due to voice coil motor simple structure, maintenance side
Just, reliability and energy conversion efficiency are high, and electrically low with mechanical time constant, and thrust/mass ratio is high, nothing
Slot effect, it is not necessary to commutate, sensitivity is high, therefore short in the litho machine for requiring quick, high accuracy positioning
There is extensive use in stroke precision positioning unit.
Existing voice coil motor structure as shown in figure 1, including the armature 1 ' in rectangular shape, positioned at armature 1 '
Top, section are in downward opening E shaped iron cores 2 ' and the coil 3 ' being sheathed in the middle part of iron core 2 ', armature 1 '
Formed by the permeability magnetic material stacking of sheet with iron core 2 ', wherein iron core 2 ' and coil 3 ' is stator, armature 1 '
It is mover；The electromagnetism distribution of voice coil motor inside is as shown in Fig. 2 it is vertical paper that ⊙ represents current direction in figure
Outwards,Represent the vertical paper of current direction inwards.After coil 3 ' is internal is passed through electric current, in iron core 2 ' and
Armature 1 ' is internal to produce magnetic field so that produce gravitation between the two, armature 1 ' move upward and with iron core 2 '
Adhesive, when coil 3 ' is powered off, armature 1 ' moves separated with iron core 2 ' downwards.But use this kind of mode
The armature 1 ' and iron core 2 ' of setting only have after coil 3 ' is powered, and gravitation could be produced when both are closer to the distance,
And when armature 1 ' and iron core 2 ' are apart from very little, the two gravitation is very big, when both distances are slightly remote, gravitation urgency
Drastic change is small, therefore stroke is smaller, and gravitation fluctuation is big, and stability is low；Additionally, the voice coil motor does not possess weight
Force compensating function, has aggravated coil 3 ' along the rightabout pushing force of gravity, so as to reduce voice coil motor
Overall performance, fail to meet the motion of litho machine long stroke and high accuracy positioning demand.
The content of the invention
The present invention is in order to overcome the above not enough, there is provided one kind has gravity compensation function, and can effectively improve
The voice coil motor of stroke and stability.
In order to solve the above-mentioned technical problem, the technical scheme is that：A kind of voice coil motor, including：
Stator, is provided with groove structure, quantity >=1 of groove structure；
Mover, with prominent shape structure, the prominent shape structure setting is in above-mentioned groove structure, and shape and institute
Groove structure is stated to match；
Coil, is at least partially disposed in the groove structure.
Further, the voice coil motor also includes at least 2 magnet units, and the magnet unit is fixed and set
In in the stator or/and the mover.
Further, the stator and mover are the flat structure stacked by sheet permeability magnetic material.
Further, the quantity ratio of the groove structure, the prominent shape structure and the coil is A:B:C, its
In, A, B, C are the natural number more than or equal to 1, and A=B >=C.
Further, the quantity of the groove structure, the prominent shape structure and the coil compares A:B:C is
1:1:1, the groove structure is annular groove, and the prominent shape structure is the annular matched with the annular groove
Projection, the coil is loop coil, is arranged on the annular groove bottom.
Further, the annular groove or/and the annular projection are provided with the annular for accommodating magnet unit
Fixing groove.
Further, the quantity of the groove structure, the prominent shape structure and the coil compares A:B:C is
2:2:1, the groove structure connects to form E type structures by stator connecting portion, and the prominent shape structure is by dynamic
Sub- connecting portion connects to form U-shape structure.
Further, the E types structure or/and the U-shape structure are provided with the rectangle for accommodating magnet unit
Fixing groove.
Further, the mover connecting portion is made up of nonmetallic materials.
Further, the quantity of the groove structure, the prominent shape structure and the coil compares A:B:C is 3:3:2,
The groove structure or/and the prominent shape structure setting have the rectangle fixing groove for accommodating magnet unit.
The voice coil motor that the present invention is provided, a kind of voice coil motor, including：Stator, is provided with groove structure, recessed
The quantity 1 of slot structure；Mover, with prominent shape structure, the prominent shape structure setting in above-mentioned groove structure,
And shape matches with the groove structure；And coil, it is at least partially disposed in the groove structure.
The present invention is opposite with its gravity direction to mover generation by setting the prominent shape structure being adapted with groove structure
Gravity compensation, can not only improve the stability of motor, reduce the pushing force that coil is produced by gravity,
And the stroke of motor is increased, and the overall performance of voice coil motor is further increased, effectively meet photoetching
Captain's stroke motion and high accuracy positioning demand.
Brief description of the drawings
Fig. 1 is existing voice coil motor structural representation；
Fig. 2 is existing voice coil motor inside electromagnetism distribution schematic diagram；
Fig. 3 is the structural representation of voice coil motor embodiment 1 of the present invention；
Fig. 4 is the profile of voice coil motor embodiment 1 of the present invention；
Fig. 5 is the inside electromagnetism distribution schematic diagram of voice coil motor embodiment of the present invention 1；
Gravity compensation is along Z axis when Fig. 6 a, 6b are respectively voice coil motor coil no power of the present invention and energization
Curve map；
Fig. 7 is the structural representation of voice coil motor embodiment 2 of the present invention；
Fig. 8 is the structural representation of voice coil motor embodiment 3 of the present invention；
Fig. 9 is the structural representation of voice coil motor embodiment 4 of the present invention；
Figure 10 is the overall structure figure of voice coil motor embodiment 5 of the present invention；
Figure 11 is the structure expanded view of voice coil motor embodiment 5 of the present invention.
Shown in Fig. 1-2：1 ', armature；2 ', iron core；3 ', coil；
Shown in Fig. 3-11：1st, stator；101st, groove structure；102nd, stator connecting portion；Annular groove；
2nd, mover；201st, prominent shape structure；202nd, mover connecting portion；3rd, coil；4th, magnet unit；401、
Interior ring magnet；402nd, outer ring magnet；501st, rectangle fixing groove；601st, annular fixing groove.
Specific embodiment
The present invention is described in detail below in conjunction with the accompanying drawings：
Embodiment 1
As shown in figure 3, the present invention provides a kind of voice coil motor, including：
Stator 1, stator 1 is iron core in the present invention, is provided with groove structure 101, the quantity of groove structure 101
≥1；Mover 2, mover is armature in the present invention, and with prominent shape structure 201, the prominent shape structure 201 sets
Put in above-mentioned groove structure 101, and shape matches with the groove structure 101；Coil 3, at least portion
Divide and be arranged in the groove structure 101.The present invention is by setting the prominent shape being adapted with groove structure 101
Structure 201 produces the gravity compensation opposite with its gravity direction to mover, can not only improve the stabilization of motor
Property, reduces the pushing force that coil 3 is produced by gravity, and increased the stroke of motor, further
The overall performance of voice coil motor is improve, the motion of litho machine long stroke and high accuracy positioning demand is effectively met.
Preferably, the voice coil motor also includes at least 2 magnet units 4, and the magnet unit 4 is fixed and set
In in the stator 1 or/and the mover 2.Mover is produced and its gravity direction phase by magnet unit 4
Anti- gravity compensation, can not only improve the stability of motor, reduce the thrust that coil is produced by gravity
Pressure；Groove structure 101 is set in iron core simultaneously, and armature is adapted with groove structure 101, increase
The stroke of motor, further increases the overall performance of voice coil motor, effectively meets litho machine long stroke
Motion and high accuracy positioning demand.
Preferably, the stator 1 and mover 2 are the flat structure stacked by sheet permeability magnetic material.
The quantity ratio of the groove structure 101, the prominent shape structure 201 and the coil 3 is A:B:C, wherein,
A, B, C are the natural number more than or equal to 1, and A=B >=C, it is preferred that groove structure 101, prominent shape
The quantity of structure 201 and coil 3 compares A:B:C is 2:2:1, in the present embodiment, groove structure 101, prominent shape
Quantity A, B of structure 201 and coil 3, C are respectively 2,2,1, and groove structure 101 is connected by stator
The connection of socket part 102 forms E type structures, and prominent shape structure 201 is connected by mover connecting portion 202 and forms U-shaped
Structure, as shown in figure 4, the mover connecting portion 202 is made up of nonmetallic materials, using this kind of design side
Formula can reduce mover weight.
The E types structure or/and the U-shape structure are provided with the rectangle fixing groove for accommodating magnet unit 4
501, specifically, rectangle fixing groove 501 is arranged on the both sides of the opening of groove structure 101, magnet unit 4
Quantity is 4 pieces, is separately positioned in the rectangle fixing groove 501, electromagnetism distribution such as Fig. 5 inside voice coil motor
Shown, wherein ⊙ represents current direction as vertical paper is outside,Represent the vertical paper of current direction inwards.It is fixed
There is magnetic field inside son 1, mover 2 and magnet unit 4, because two groups of magnetic lines of force of magnet unit 4 need to be worn
Crossing air or vacuum could close, but air or vacuum magneto resistive ratio constitute armature permeability magnetic material magnetic resistance
Greatly, the magnetic line of force will pass through from the less medium of magnetic resistance from armature, therefore, 4 pairs of ranks of magnet unit
Iron produces a power opposite with gravity direction, i.e. gravity compensation.Along Z when no power and energization in coil 3
The gravity compensation that direction of principal axis (direction i.e. opposite with gravity) is produced to armature as shown in Fig. 6 a, 6b, when
During 3 no power of coil, magnet unit 4 (is not marked less than armature and load to the gravity compensation of armature in figure
Go out) gravity, now armature can downwards be moved with load, away from iron core, reach the position of dotted line frame；
When directional current shown in Fig. 5 is passed through in coil 3, iron core and coil 3 produce gravitation to armature, with magnetic
The gravity compensation collective effect that unit 4 is produced, makes armature move upward, near iron core；When coil 3
Inside it is passed through during with Fig. 5 current in opposite, iron core and coil 3 produce repulsion to armature, accelerates armature and bear
Load is moved downwards.Therefore voice coil motor can be met by adjusting the size and Orientation of electric current in coil 3
Movement travel and speed requirement.
It should be noted that according to actual needs also can be using armature as stator 1, iron core is used as mover 2, work
Make principle identical.
Embodiment 2
As shown in fig. 7, unlike the embodiments above, in the embodiment, rectangle fixing groove 501 is set
At the middle part of prominent structure 201, specifically, magnet unit 4 is provided with 2 pieces, equally it is by leading due to iron core
Magnetic material is constituted, and the magnetic resistance of its magneto resistive ratio air is small, therefore this group of magnetic line of force of magnet unit 4 will be from magnetic
Less medium is hindered, i.e., is passed through from iron core, interaction force is produced with iron core, because iron core is stator 1,
Armature is mover 2, therefore can also regard the gravity benefit opposite with gravity direction to armature generation of magnet unit 4 as
Repay power.
Embodiment 3
As shown in figure 8, it is unlike the embodiments above, in the present embodiment, the opening of groove structure 101 two
The middle part of side and prominent structure 201 is equipped with the rectangle fixing groove 501 being adapted with magnet unit 4, magnetic list
The quantity of unit 4 is 6 pieces, is separately positioned on the rectangle fixing groove 501 of the opening of groove structure 101 both sides and dashes forward
Go out in the rectangle fixing groove 501 at the middle part of structure 201, similarly, the rectangle of the opening of groove structure 101 both sides is consolidated
The magnetic line of force for determining the magnet unit 4 in groove 501 passes through from armature, and upward gravity compensation is produced to it,
And one group of magnetic line of force of magnet unit 4 in the rectangle fixing groove 501 at the prominent middle part of structure 201 is from iron core
Pass through, gravitation is produced with iron core, also regard as and gravity compensation is produced to armature, being arranged such to effectively improve
Gravity compensation, further reduces coil 3 to armature and loads along the pushing force of gravity opposite direction.
Embodiment 4
As shown in figure 9, unlike the embodiments above, the present embodiment concave slot structure 101, the prominent shape
The quantity of structure 201 and the coil 3 compares A:B:C is 3:3:2, it is groove structure 101, prominent in the present embodiment
Quantity A, B of shape structure 201 and coil 3, C are respectively 3,3,2, groove structure 101 or/and prominent shape
Structure 201 is provided with the rectangle fixing groove 501 for accommodating magnet unit 4, specifically, the quantity of armature
Can be three pieces, position is corresponding with the groove structure 101 respectively, be connected by nonmetallic materials between armature
Connect, form the E type structures of opening upwards, the opening two ends of groove structure 101 are provided with and the phase of magnet unit 4
The rectangle fixing groove 501 of adaptation.
Embodiment 5
As shown in figs. 10-11, unlike the embodiments above, iron core and armature are side in the present embodiment
The drum of opening, the quantity of groove structure 101, prominent shape structure 201 and the coil 3 compares A:B:C is
1:1:1, the groove structure 101 is annular groove, and the prominent shape structure 201 is to be matched with annular groove
Annular projection, the coil 3 is loop coil, is arranged on annular groove bottom, annular groove or/and annular
Projection is provided with the annular fixing groove 601 for accommodating magnet unit 4.Specifically, the quantity of magnet unit 4 is
2, respectively interior ring magnet 401 and outer ring magnet 402, annular fixing groove 601 also are provided with 2, respectively
It is adapted with interior ring magnet 401 and outer ring magnet 402.
Embodiment 6
As different from Example 5, the ring being adapted with magnet unit 4 also is provided with the present embodiment in armature
Shape fixing groove (is not marked) in figure, and the quantity of magnet unit 4 is 3, is separately positioned in iron core and armature
Annular fixing groove 601 in.
In sum, the voice coil motor that the present invention is provided, a kind of voice coil motor, including：Stator 1, is provided with recessed
Slot structure 101, the quantity 1 of groove structure 101；Mover 2, with prominent shape structure 201, the prominent shape knot
Structure 201 is arranged in above-mentioned groove structure 101, and shape matches with the groove structure 101；And
Coil 3, is at least partially disposed in the groove structure 101.The present invention is by setting and groove structure 101
The prominent shape structure 201 being adapted produces the gravity compensation opposite with its gravity direction to mover 2, can not only
The stability of motor is improved, the pushing force that coil is produced by gravity is reduced, and increased motor
Stroke, further increases the overall performance of voice coil motor, effectively meets the motion of litho machine long stroke and height
Precision location requirement.
Although being illustrated to embodiments of the present invention in specification, these implementation methods are intended only as
Prompting, should not limit protection scope of the present invention.Various provinces are carried out without departing from the spirit and scope of the present invention
Slightly, displacement and change should be included within the scope of the present invention.
Claims (10)
1. a kind of voice coil motor, it is characterised in that the voice coil motor includes：
Stator, is provided with groove structure, quantity >=1 of groove structure；
Mover, with prominent shape structure, the prominent shape structure setting is in above-mentioned groove structure, and shape and institute
Groove structure is stated to match；
Coil, is at least partially disposed in the groove structure.
2. voice coil motor according to claim 1, it is characterised in that the voice coil motor is also included extremely
Few 2 magnet units, the magnet unit is fixed in the stator or/and the mover.
3. voice coil motor according to claim 2, it is characterised in that the stator and mover are served as reasons
The flat structure of sheet permeability magnetic material stacking.
4. voice coil motor according to claim 1, it is characterised in that the groove structure, described prominent
The quantity ratio of shape structure and the coil is A:B:C, wherein, A, B, C are the natural number more than or equal to 1,
And A=B >=C.
5. voice coil motor according to claim 4, it is characterised in that the groove structure, described prominent
The quantity of shape structure and the coil compares A:B:C is 1:1:1, the groove structure is annular groove, described prominent
Shape structure is the annular projection matched with the annular groove, and the coil is loop coil, is arranged on described
Annular groove bottom.
6. voice coil motor according to claim 5, it is characterised in that the annular groove or/and described
Annular projection is provided with the annular fixing groove for accommodating magnet unit.
7. voice coil motor according to claim 4, it is characterised in that the groove structure, described prominent
The quantity of shape structure and the coil compares A:B:C is 2:2:1, the groove structure is connected by stator connecting portion
E type structures are formed, the prominent shape structure connects to form U-shape structure by mover connecting portion.
8. voice coil motor according to claim 7, it is characterised in that the E types structure or/and described
U-shape structure is provided with the rectangle fixing groove for accommodating magnet unit.
9. voice coil motor according to claim 7, it is characterised in that the mover connecting portion is by non-gold
Category material is made.
10. voice coil motor according to claim 4, it is characterised in that the groove structure, described
The quantity of prominent shape structure and the coil compares A:B:C is 3:3:2, the groove structure or/and the prominent shape structure
It is provided with the rectangle fixing groove for accommodating magnet unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510416089.4A CN106712435A (en) | 2015-07-15 | 2015-07-15 | Voice coil motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510416089.4A CN106712435A (en) | 2015-07-15 | 2015-07-15 | Voice coil motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106712435A true CN106712435A (en) | 2017-05-24 |
Family
ID=58895106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510416089.4A Pending CN106712435A (en) | 2015-07-15 | 2015-07-15 | Voice coil motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106712435A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109286297A (en) * | 2017-07-21 | 2019-01-29 | 深圳市东上力达科技有限公司 | The linear motion device being made of C-shaped clump weight and inverse magnetic group or coil |
| CN113162359A (en) * | 2021-04-01 | 2021-07-23 | 杨铭轲 | Linear motor and electric bed |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1157691B (en) * | 1961-07-24 | 1963-11-21 | Wilhelm Loth | Electromagnetic parallel oscillating motor |
| JPH01253400A (en) * | 1988-04-01 | 1989-10-09 | Hitachi Metals Ltd | Movable magnet type loudspeaker |
| US5777403A (en) * | 1996-07-30 | 1998-07-07 | Nikon Corporation | Voice coil motor with air guide and air bellows |
| JP2000083364A (en) * | 1998-09-04 | 2000-03-21 | Sanyo Electric Co Ltd | Movable core linear motor |
| JP2003235231A (en) * | 2002-02-08 | 2003-08-22 | Shinko Electric Co Ltd | Linear actuator |
| US20070003099A1 (en) * | 2005-06-21 | 2007-01-04 | Madni Asad M | Voice coil actuator with embedded capacitive sensor for motion, position and/or acceleration detection |
| CN101310430A (en) * | 2005-11-18 | 2008-11-19 | 皇家飞利浦电子股份有限公司 | Linear variable reluctance actuator having band coils |
| CN101393822A (en) * | 2007-09-17 | 2009-03-25 | 施耐德电器工业公司 | Electromagnetic actuator and switching device equipped with such an electromagnetic actuator |
| CN101917143A (en) * | 2010-07-21 | 2010-12-15 | 华中科技大学 | Voice coil motor with magnetic suspension gravity balancing function |
| CN203135682U (en) * | 2013-03-18 | 2013-08-14 | 王肇 | Voice coil motor |
-
2015
- 2015-07-15 CN CN201510416089.4A patent/CN106712435A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1157691B (en) * | 1961-07-24 | 1963-11-21 | Wilhelm Loth | Electromagnetic parallel oscillating motor |
| JPH01253400A (en) * | 1988-04-01 | 1989-10-09 | Hitachi Metals Ltd | Movable magnet type loudspeaker |
| US5777403A (en) * | 1996-07-30 | 1998-07-07 | Nikon Corporation | Voice coil motor with air guide and air bellows |
| JP2000083364A (en) * | 1998-09-04 | 2000-03-21 | Sanyo Electric Co Ltd | Movable core linear motor |
| JP2003235231A (en) * | 2002-02-08 | 2003-08-22 | Shinko Electric Co Ltd | Linear actuator |
| US20070003099A1 (en) * | 2005-06-21 | 2007-01-04 | Madni Asad M | Voice coil actuator with embedded capacitive sensor for motion, position and/or acceleration detection |
| CN101310430A (en) * | 2005-11-18 | 2008-11-19 | 皇家飞利浦电子股份有限公司 | Linear variable reluctance actuator having band coils |
| CN101393822A (en) * | 2007-09-17 | 2009-03-25 | 施耐德电器工业公司 | Electromagnetic actuator and switching device equipped with such an electromagnetic actuator |
| CN101917143A (en) * | 2010-07-21 | 2010-12-15 | 华中科技大学 | Voice coil motor with magnetic suspension gravity balancing function |
| CN203135682U (en) * | 2013-03-18 | 2013-08-14 | 王肇 | Voice coil motor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109286297A (en) * | 2017-07-21 | 2019-01-29 | 深圳市东上力达科技有限公司 | The linear motion device being made of C-shaped clump weight and inverse magnetic group or coil |
| CN113162359A (en) * | 2021-04-01 | 2021-07-23 | 杨铭轲 | Linear motor and electric bed |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
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| CB02 | Change of applicant information | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170524 |
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| RJ01 | Rejection of invention patent application after publication |