CN106681093B - Ultraviolet laser projection lens - Google Patents
Ultraviolet laser projection lens Download PDFInfo
- Publication number
- CN106681093B CN106681093B CN201611137768.9A CN201611137768A CN106681093B CN 106681093 B CN106681093 B CN 106681093B CN 201611137768 A CN201611137768 A CN 201611137768A CN 106681093 B CN106681093 B CN 106681093B
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- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 230000005540 biological transmission Effects 0.000 claims abstract description 7
- 238000005452 bending Methods 0.000 claims 1
- 238000007493 shaping process Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 3
- 238000012423 maintenance Methods 0.000 abstract 1
- 238000005224 laser annealing Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000000265 homogenisation Methods 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000000741 silica gel Substances 0.000 description 3
- 229910002027 silica gel Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000000306 component Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/20—Lamp housings
- G03B21/206—Control of light source other than position or intensity
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/20—Lamp housings
- G03B21/208—Homogenising, shaping of the illumination light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Lens Barrels (AREA)
Abstract
The invention discloses an ultraviolet laser projection lens, and belongs to the technical field of optical lenses. The ultraviolet laser is excimer laser with the wavelength of 200 nm-400 nm, the ultraviolet laser projection lens comprises an optical structure and a mechanical structure, the optical structure comprises a first lens, a second lens and a third lens which are sequentially arranged along the transmission direction of incident light, wherein the first lens is a biconvex cylindrical positive lens, the second lens is a concave-convex cylindrical negative lens, and the third lens is a biconvex cylindrical positive lens; the mechanical structure comprises a fixing frame, a first adjusting component, a second adjusting component and a third adjusting component which are sequentially arranged along the transmission direction of incident light. The lens has the advantages of simple structure, easy assembly and adjustment, low production cost and convenient disassembly, assembly and maintenance, and can be applied to a beam shaping system for preparing low-temperature polycrystalline silicon for flat panel display.
Description
Technical Field
The invention belongs to the technical field of optical lenses, and relates to an ultraviolet laser projection lens.
Background
The electrical properties of the thin film transistor, which is a core component of the active driving of the flat panel display, determine the response speed, size and amount of information transmitted of the flat panel display. The polycrystalline silicon thin film transistor has higher electron mobility compared to the amorphous silicon thin film transistor, and thus a flat panel display manufactured therefrom has superior performance.
The technology for manufacturing the polycrystalline silicon film by excimer laser annealing is an advanced technology suitable for industrial production. The typical wavelength of the excimer laser is in an ultraviolet band, the heat effect is not obvious, the pulse width is narrow, the process of melting and recrystallizing the amorphous silicon is very short, and the heat damage to the substrate is small, so that the requirement of the crystallization process on the substrate is reduced, and the cost of industrial production is greatly reduced.
In order to improve the production quality and the production efficiency, a beam shaping system is adopted to align the original beam of the molecular laser for processing, so that the light spots on the surface of the amorphous silicon sample have high transverse-longitudinal ratio, the energy density meets the annealing requirement and the distribution is uniform. The beam shaping system of a typical excimer laser annealing device comprises an expanded beam collimation module, a long-axis beam homogenization module, a short-axis beam homogenization module and the like, wherein homogenized light spots of a short axis enter an ultraviolet laser projection lens and are imaged on the surface of a workpiece.
As mentioned above, the ultraviolet laser projection lens is an important working component of a beam shaping system of an excimer laser annealing device, and at present, an ultraviolet laser projection lens which can be applied to an excimer laser annealing device and can realize projection of light spots with high aspect ratio, energy density meeting requirements and uniform distribution is not reported, so that an ultraviolet laser projection lens which can meet related application requirements is urgently required to be designed.
Disclosure of Invention
In view of the prior art, an object of the present invention is to provide an ultraviolet laser projection lens, which can correct various aberrations, realize the projection of light spots with high aspect ratio, energy density meeting the requirements and uniform distribution, and can realize the continuous adjustment and high-precision positioning of the longitudinal direction, the transverse direction, the rolling shaft and the pitching of lens components, so as to meet the projection requirements of a beam shaping system of excimer laser annealing equipment.
The technical solution of the invention is as follows:
an ultraviolet laser projection lens comprises an optical structure and a mechanical structure.
The optical structure comprises a first lens, a second lens and a third lens which are sequentially arranged along the transmission direction of incident light, wherein the first lens is a biconvex cylindrical positive lens with the outline dimension of 100mm multiplied by 30mm, the second lens is a concave-convex cylindrical negative lens with the outline dimension of 100mm multiplied by 30mm, the third lens is a biconvex cylindrical positive lens with the outline dimension of 100mm multiplied by 30 mm;
further, the first lens includes a first cylindrical surface and a second cylindrical surface, the second lens includes a third cylindrical surface and a fourth cylindrical surface, and the third lens includes a fifth cylindrical surface and a sixth cylindrical surface. Wherein the curvature radius ranges of the first cylindrical surface and the second cylindrical surface are respectively 90 mm-95 mm, -40 mm-45 mm; the curvature radius ranges of the third cylindrical surface and the fourth cylindrical surface are respectively-20 mm to-25 mm and-40 mm to-45 mm; the curvature radius ranges of the fifth cylindrical surface and the sixth cylindrical surface are respectively 25 mm-30 mm, -70 mm-75 mm.
Further, the central thickness range of the first lens is 5 mm-10 mm; the central thickness range of the second lens is 1 mm-6 mm; the central thickness range of the third lens is 5 mm-10 mm.
Furthermore, the distance between the first lens and the second lens on the optical axis ranges from 3mm to 5 mm; the distance between the second lens and the third lens on the optical axis ranges from 0mm to 3 mm.
Furthermore, the refractive index ranges of the first lens, the second lens and the third lens are all 1.4-1.5.
The mechanical structure comprises a fixing frame, a first fixing seat, a first adjusting seat, a second fixing seat, a third adjusting seat, a third fixing seat, 9 groups of adjusting screws and 9 groups of adjusting gaskets, wherein the fixing frame, the first fixing seat, the first adjusting seat, the second adjusting seat, the third adjusting seat and the 9 groups of adjusting screws and 8 groups of adjusting gaskets are sequentially arranged along the transmission direction of incident light, the fixing frame is connected with the fixing seat through 12 groups of adjusting screws and 8 groups of adjusting gaskets, and comprises a first-stage positioning step and a second-stage positioning step.
Further, the fixing frame comprises a first-stage positioning step and a second-stage positioning step.
Furthermore, the first-stage positioning step realizes the axial positioning of the second fixing seat.
Furthermore, the second-stage positioning step realizes the axial positioning of the third fixing seat.
Furthermore, the first fixing seat and the first adjusting seat are connected with the three groups of adjusting gaskets through three groups of adjusting screws to form a first adjusting assembly, and the pitching adjustment and the axial position compensation of the first lens are realized through the elasticity of the adjusting gaskets; the second fixed seat and the second adjusting seat are connected with the three groups of adjusting gaskets through three groups of adjusting screws to form a second adjusting assembly, and the pitching adjustment and the axial position compensation of the second lens are realized through the elasticity of the adjusting gaskets; the third fixing seat and the third adjusting seat are connected with the three groups of adjusting gaskets through three groups of adjusting screws to form a third adjusting assembly, and the pitching adjustment and the axial position compensation of the third lens are realized through the elasticity of the adjusting gaskets.
Furthermore, two ends of the first adjusting seat are provided with cylindrical surface structures, and the curvature of the cylindrical surface structures is equal to that of the first cylindrical surface of the first lens.
Furthermore, two ends of the second adjusting seat are provided with cylindrical structures, and the curvature of each cylindrical structure is equal to that of the third cylindrical surface of the second lens.
Furthermore, two ends of the third adjusting seat are provided with cylindrical surface structures, and the curvature of each cylindrical surface structure is equal to that of a sixth cylindrical surface of the third lens.
Furthermore, the fixed frame is connected with the first adjusting assembly through four groups of adjusting screws and four groups of adjusting gaskets, and the transverse positioning compensation and the rolling shaft positioning compensation of the first adjusting assembly are realized through the elasticity of the adjusting gaskets; the four groups of adjusting screws and the four groups of adjusting gaskets are connected with the second adjusting assembly, and the transverse positioning compensation and the rolling shaft positioning compensation of the second adjusting assembly are realized through the elasticity of the adjusting gaskets; the third adjusting assembly is positioned by four groups of adjusting screws.
Further, the adjusting gasket is a spring gasket.
The invention has the beneficial effects that: the invention effectively utilizes the form of a mechanical structure, realizes the precise adjustment and positioning of an optical structure in a three-dimensional space, simultaneously effectively utilizes the optical structure, corrects various aberrations introduced by a small field of view and a large relative aperture, realizes the projection of a beam shaping system short axis homogenization light spot of excimer laser annealing equipment, and meets the application requirement of excimer laser annealing.
Drawings
In order to make the object and technical solution of the present invention more clear, the present invention provides the following drawings for illustration:
FIG. 1 is a structural assembly diagram of the present invention.
Fig. 2(a) is an optical structural diagram of fig. 1.
Fig. 2(b) is a mechanical structure diagram of fig. 1.
Fig. 3 is a schematic connection diagram of the first fixing seat and the first adjusting seat of the present invention.
Fig. 4(a) is a schematic view of the structure of the two end cylindrical surfaces of the first adjusting seat.
Fig. 4(b) is a schematic structural view of two end cylindrical surfaces of the second adjusting seat.
Fig. 4(c) is a schematic view of the structures of the two end cylindrical surfaces of the third adjusting seat.
Fig. 5 is a schematic view of the connection between the first adjusting assembly and the fixing frame according to the present invention.
FIG. 6(a) is a graph of field curvature, distortion function for an embodiment of the present invention.
Fig. 6(b) is a transfer function curve of an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The described embodiments are only a part of the embodiments of the present invention, and are not intended to limit the scope of the present invention.
The embodiment of the invention designs a three-piece cylindrical ultraviolet laser projection lens aiming at excimer laser annealing equipment developed by the unit, projects a short-axis homogenized light spot of a beam shaping system of the annealing equipment, the ultraviolet laser is XeCl excimer laser with the wavelength of 308nm, and basic performance parameters of the lens are as follows: effective focal length f' =35.5253 mm; the meridian in-plane object space full field angle is 2w =0.4 °; the height of a half-field object is 0.5mm, the image height is 0.15mm, and the requirement of an excimer laser annealing technology on laser energy density is met; the diameter D =25mm of the lens entrance pupil in the meridian plane, and the relative aperture D/f' = 0.7; working distance 40.016mm, actual working distance 27.016 mm.
FIG. 1 is an overall assembly diagram of the present invention, including two parts, an optical structure and a mechanical structure. The optical structure comprises a first lens 101, a second lens 102 and a third lens 103 which are arranged in sequence along the transmission direction of incident light, wherein the first lens 101 is a biconvex cylindrical positive lens with the overall dimension of 100mm multiplied by 30mm, the second lens 102 is a concave-convex cylindrical negative lens with the overall dimension of 100mm multiplied by 30mm, the third lens 103 is a biconvex cylindrical positive lens with the overall dimension of 100mm multiplied by 30mm, the mechanical structure comprises a fixing frame 201, a first fixing seat 202, a first adjusting seat 203, a second adjusting seat 205, a second fixing seat 204, a third adjusting seat 207, a third fixing seat 206, 9 groups of adjusting screws 208 and 9 groups of adjusting gaskets 209, 12 groups of adjusting screws 211 and 8 groups of adjusting gaskets 210, wherein the fixing frame 201, the first fixing seat 202, the first adjusting seat 203, the second adjusting seat 205, the second fixing seat 204, the third adjusting seat 207 and the third fixing seat 206 are sequentially arranged along the transmission direction of incident light, and the fixing frame 201 comprises a first-stage positioning step 212 and a second-stage positioning step 213.
Fig. 2(a) is an optical structure diagram of the present invention, wherein a short-axis homogenization spot 104 with a wavelength of 308nm sequentially passes through a first cylindrical surface and a second cylindrical surface of a first lens 101, a third cylindrical surface and a fourth cylindrical surface of a second lens 102, and a fifth cylindrical surface and a sixth cylindrical surface of a third lens 103 along an optical axis direction, the optical axis center thickness of the first lens 101 is 8.5mm, the curvature radius of the first cylindrical surface is 92.198mm, and the curvature radius of the second cylindrical surface is-43.301 mm; the optical axis center thickness of the second lens 102 is 2mm, the curvature radius of the third cylindrical surface is-21.883 mm, the curvature radius of the fourth cylindrical surface is-40.846 mm, the optical axis center thickness of the third lens 103 is 6.5mm, the curvature radius of the fifth cylindrical surface is 28.306mm, and the curvature radius of the sixth cylindrical surface is-72.133 mm. The distance between the first lens 101 and the second lens 102 on the optical axis (i.e. the distance between the second cylindrical surface and the third cylindrical surface) is 3.1mm, the distance between the second lens 102 and the third lens 103 on the optical axis (i.e. the distance between the fourth cylindrical surface and the fifth cylindrical surface) is 0.2mm, and the materials of the three lenses are all ultraviolet-grade fused quartz JGS 1. In order to improve the efficiency, the six cylindrical surfaces are coated with 308nm laser antireflection films.
Fig. 2(b) is a schematic mechanical structure diagram of the present invention, the first fixing base 202 and the first adjusting base 203 are connected by three sets of adjusting screws 208 and three sets of spring washers 209 to form a first adjusting assembly, as shown in fig. 3, wherein, two ends of the first adjusting base are provided with cylindrical structures 214, as shown in fig. 4, the curvature radius of the cylindrical structures is equal to the first cylindrical surface of the first lens 101, the first lens 101 is adhered to the first adjusting base 203 by using silica gel, and the pitch adjustment and the axial position compensation of the first lens 101 are realized by the elastic force of the spring washers 209; the second fixing seat 204 and the second adjusting seat 205 are connected by three sets of adjusting screws 208 and three sets of spring gaskets 209 to form a second adjusting assembly, wherein two ends of the second adjusting seat are provided with cylindrical structures 215, the curvature radius of the cylindrical structures is equal to that of a third cylindrical surface of the second lens 102, the second lens 102 is adhered to the second adjusting seat by silica gel, and the pitching adjustment and the axial position compensation of the second lens 102 are realized by the elasticity of the spring gaskets 209; the third fixing seat 206 and the third adjusting seat 207 are connected by three sets of adjusting screws 208 and three sets of spring washers 209 to form a third adjusting assembly, wherein two ends of the third adjusting seat are provided with cylindrical surface structures 216, the curvature radius of the cylindrical surface structures is equal to the sixth cylindrical surface of the third lens 103, the third lens 103 is adhered to the third adjusting seat by silica gel, and the pitching adjustment and the axial position compensation of the third lens 103 are realized by the elastic force of the spring washers 209. The fixing frame comprises a first-stage positioning step 212 and a second-stage positioning step 213 structure, which are respectively used for realizing axial positioning of the second fixing seat 204 and the third fixing seat 206. The fixing frame 201 is connected with the first adjusting assembly through four sets of adjusting screws 211 and four sets of spring washers 210, as shown in fig. 5, the transverse positioning compensation and the roller positioning compensation of the first adjusting assembly are realized through the elasticity of the spring washers 210; the four groups of adjusting screws 211 and the four groups of spring gaskets 210 are connected with a second adjusting assembly, and the transverse positioning compensation and the roller positioning compensation of the second adjusting assembly are realized through the elasticity of the spring gaskets 210; the third adjustment assembly is positioned by four sets of adjustment screws 211.
The invention is based on the theory of geometric optics, fully considers the requirements of excimer laser annealing application, successfully provides a simple and practical lens structure by means of computer optical design and mechanical design software, and the lens can be proved to meet the application requirements by using a field curvature curve, a distortion curve and a transfer function curve of the lens as shown in figure 6.
Claims (8)
1. An ultraviolet laser projection lens is characterized in that: the optical structure is clamped in the mechanical structure and comprises a first lens (101), a second lens (102) and a third lens (103) which are sequentially arranged along the transmission direction of incident light, wherein the first lens (101) is a biconvex cylindrical positive lens, the second lens (102) is a concave-convex cylindrical negative lens, and the third lens (103) is a biconvex cylindrical positive lens; the mechanical structure comprises a fixed frame (201), a first fixed seat (202), a first adjusting seat (203), a second adjusting seat (205), a second fixed seat (204), a third adjusting seat (207), a third fixed seat (206), 9 groups of adjusting screws (208) and 9 groups of adjusting gaskets (209) for connecting the fixed seat and the adjusting seat, 12 groups of adjusting screws (211) and 8 groups of adjusting gaskets (210) for connecting the fixed frame and the fixed seat, wherein the fixed frame (201) comprises a first-stage positioning step (212) and a second-stage positioning step (213);
in the optical structure, the first lens (101) comprises a first cylindrical surface and a second cylindrical surface, the second lens (102) comprises a third cylindrical surface and a fourth cylindrical surface, and the third lens (103) comprises a fifth cylindrical surface and a sixth cylindrical surface: the curvature radius ranges of the first cylindrical surface and the second cylindrical surface are respectively 90 mm-95 mm, -40 mm-45 mm; the curvature radius ranges of the third cylindrical surface and the fourth cylindrical surface are respectively-20 mm to-25 mm and-40 mm to-45 mm; the curvature radius ranges of the fifth cylindrical surface and the sixth cylindrical surface are respectively 25 mm-30 mm, -70 mm-75 mm;
in the mechanical structure: the first fixed seat (202) and the first adjusting seat (203) are connected with three groups of adjusting gaskets (209) through three groups of adjusting screws (208) to form a first adjusting assembly, and the pitching adjustment and the axial position compensation of the first lens (101) are realized through the elasticity of the adjusting gaskets (209); the second fixed seat (204) and the second adjusting seat (205) are connected with three groups of adjusting gaskets (209) through three groups of adjusting screws (208) to form a second adjusting assembly, and the pitching adjustment and the axial position compensation of the second lens (102) are realized through the elasticity of the adjusting gaskets (209); the third fixing seat (206) and the third adjusting seat (207) are connected with three groups of adjusting gaskets (209) through three groups of adjusting screws (208) to form a third adjusting assembly, and the bending-bending adjustment and the axial position compensation of the third lens (103) are realized through the elasticity of the adjusting gaskets (209).
2. The ultraviolet laser projection lens as set forth in claim 1, wherein: the first lens (101), the second lens (102) and the third lens (103) are all 100mm multiplied by 30mm in external dimension.
3. The ultraviolet laser projection lens as set forth in claim 1, wherein: in the optical structure: the central thickness range of the first lens (101) is 5 mm-10 mm; the central thickness range of the second lens (102) is 1 mm-6 mm; the central thickness range of the third lens (103) is 5 mm-10 mm.
4. The ultraviolet laser projection lens as set forth in claim 1, wherein: in the optical structure: the distance between the first lens (101) and the second lens (102) on the optical axis ranges from 3mm to 5 mm; the distance between the second lens (102) and the third lens (103) on the optical axis ranges from 0mm to 3 mm.
5. The ultraviolet laser projection lens as set forth in claim 1, wherein: in the optical structure: the refractive index ranges of the first lens (101), the second lens (102) and the third lens (103) are all 1.4-1.5.
6. The ultraviolet laser projection lens as set forth in claim 1, wherein: the first-stage positioning step (212) realizes axial positioning of the second fixing seat (204), and the second-stage positioning step realizes axial positioning of the third fixing seat (206).
7. The ultraviolet laser projection lens as set forth in claim 1, wherein: the two ends of the first adjusting seat (203) are provided with cylindrical surface structures, and the curvature of the cylindrical surface structures is equal to that of a first cylindrical surface of the first lens (101); two ends of the second adjusting seat (205) are provided with cylindrical structures, and the curvature of the cylindrical structures is equal to that of a third cylindrical surface of the second lens (102); the two ends of the third adjusting seat (207) are provided with cylindrical structures, and the curvature of the cylindrical structures is equal to that of a sixth cylindrical surface of the third lens (103).
8. The ultraviolet laser projection lens as set forth in claim 1, wherein: in the mechanical structure: the fixed frame is connected with four groups of adjusting gaskets (210) and a first adjusting assembly through four groups of adjusting screws (211), and the transverse positioning compensation and the roller positioning compensation of the first adjusting assembly are realized through the elasticity of the adjusting gaskets (210); the four groups of adjusting screws (211) and the four groups of adjusting gaskets (210) are connected with the second adjusting assembly, and the transverse positioning compensation and the roller positioning compensation of the second adjusting assembly are realized through the elasticity of the adjusting gaskets (210); the third adjusting assembly is positioned by four sets of adjusting screws (211).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611137768.9A CN106681093B (en) | 2016-12-12 | 2016-12-12 | Ultraviolet laser projection lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611137768.9A CN106681093B (en) | 2016-12-12 | 2016-12-12 | Ultraviolet laser projection lens |
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| Publication Number | Publication Date |
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| CN106681093A CN106681093A (en) | 2017-05-17 |
| CN106681093B true CN106681093B (en) | 2021-01-15 |
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| CN201611137768.9A Expired - Fee Related CN106681093B (en) | 2016-12-12 | 2016-12-12 | Ultraviolet laser projection lens |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US11137573B2 (en) | 2017-12-13 | 2021-10-05 | Zhejiang Sunny Optical Co., Ltd. | Projection lens assembly |
| CN109143594A (en) * | 2018-09-18 | 2019-01-04 | 深圳市深视智能科技有限公司 | A kind of line laser energy homogenising system of aberration control |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101866043B (en) * | 2010-05-27 | 2011-11-09 | 深圳市大族激光科技股份有限公司 | Optical lens for ultraviolet laser |
| CN102262283B (en) * | 2010-05-31 | 2013-05-15 | 深圳市大族激光科技股份有限公司 | Ultraviolet laser focusing lens, laser marking machine and laser ruling engine |
| CN103969030B (en) * | 2014-04-14 | 2016-11-09 | 上海大学 | Contact-type detection for the screening of laser gyro eyeglass |
| CN205571729U (en) * | 2015-12-23 | 2016-09-14 | 光越科技(深圳)有限公司 | Three -dimensional laser cutting head of adjusting of QBH collimation portion |
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