CN106680328A - Gas sensor array and manufacturing method thereof - Google Patents
Gas sensor array and manufacturing method thereof Download PDFInfo
- Publication number
- CN106680328A CN106680328A CN201710004842.8A CN201710004842A CN106680328A CN 106680328 A CN106680328 A CN 106680328A CN 201710004842 A CN201710004842 A CN 201710004842A CN 106680328 A CN106680328 A CN 106680328A
- Authority
- CN
- China
- Prior art keywords
- gas sensor
- film
- graphene
- substrate
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Abstract
The invention discloses a gas sensor array and a manufacturing method thereof. The gas sensor array comprises a substrate and a group of resistive gas sensors formed on the substrate, wherein each gas sensor in the array comprises a gas sensing resistor formed by a graphic graphene film on the substrate and a polymer film with which the graphene film is covered; the substrate is provided with a graphic metal electrode array; the metal electrode array constructs a conductive lead for each gas sensing resistor; the film type and/or film thickness of the polymer film of each gas sensor is different. By adopting the gas sensor array, the sensitivity and selectivity of the gas sensors can be improved remarkably during detection of the presence of ppb-level VOCs (Volatile Organic Compounds).
Description
Technical field
The present invention relates to a kind of gas sensor array and preparation method thereof.
Background technology
The application demand of gas detection is increasing, either in environment gas pollutant detection, or for disease
The expiratory air detection of analysis, is required for the compact portable and easy-to-use high sensitivity gas sensor for using.Especially expiratory air inspection
Survey, wherein it is extremely low as the concentration of the volatile organic matter (VOC) of person health status bionidicator, generally at ppb grades.
And multigroup component is disturbed each other, sensitivity and selectivity to gas sensor are proposed requirement very high.
It is semiconductor resistance-type sensor using gas sensor the most ripe, generally using metal oxide as gas
Quick material, can realize quick response, the highly sensitive measurement to specific gas.This type sensor also is adapted for using MEMS skills
Art, can manufacture subminiature gas sensor with inexpensive high-volume.But its operating temperature is at 200~600 DEG C, one need to be included
Heater is heated to it so that the power consumption of sensor is larger, and increased potential safety hazard, unstable at high temperature or easy change
The polymeric material of property can not be used.
Graphene is that one kind is with sp by carbon atom2Hybridized orbit composition hexangle type is in the flat film of honeycomb lattice, only
There is a two-dimensional material for carbon atom thickness.The thermal conductivity factor of Graphene is up to 5300W/mK, higher than CNT and Buddha's warrior attendant
Stone, its electron mobility is more than 15000cm under normal temperature2/ Vs, but it is higher than CNT or silicon crystal, and resistivity about 10-6
Ω cm, it is lower than copper or silver, it is the minimum material of current world resistivity.When gas molecule absorption is in graphenic surface,
The work function of Graphene can be changed, the electrical property of Graphene is influenceed.Therefore Graphene can be used as high sensitivity gas sensor
Sensitive material.
Expiratory air detection often selects various biomarkers, therefore needs to distinguish various VOCs, and it is corresponding to determine its
Concentration.Measurement also will unavoidably face interfering for various VOCs and steam.Generally, this is accomplished by multiple selectivity difference
Different gas sensor forming array, and binding pattern knows the method for distinguishing various gases of differentiation.
Polymer is different to the selectivity of different VOCs, and this is tested in the gas sensor of mass sensitive
Card.The difference of variety classes VOCs solubility in the polymer, the difference of diffusion velocity, after causing to cover polymer film
The difference in response alienation of gas sensor, strengthens its selectivity to VOCs.
The content of the invention
It is a primary object of the present invention to overcome the deficiencies in the prior art, there is provided a kind of gas sensor array and its preparation
Method, solves the problems, such as that the sensitivity that existing gas sensor exists when ppb grades of VOCs is detected is inadequate with selectivity.
To achieve the above object, the present invention uses following technical scheme：
A kind of gas sensor array, including substrate and formation one group of resistance-type gas sensor on the substrate,
Each gas sensor in array includes the air-sensitive electricity formed by the patterned graphene film for setting on the substrate
The thin polymer film on the graphene film is hindered and be covered in, there is patterned metal electrode array, institute in the substrate
The conductive lead wire that metal electrode array constitutes each gas sensitization resistance is stated, wherein the thin polymer film of each gas sensor is thin
Film species and/or film thickness are different.
Further：
The graphene film is single-layer graphene or multi-layer graphene.
The thin polymer film of each gas sensor is polyvinyl alcohol (PVA), polyvinylpyrrolidone (PVP), poly- methyl
Methyl acrylate (PMMA), polyethylene glycol (PEG), polypyrrole (PPy), dimethyl silicone polymer (PDMS), polystyrene (PS),
Any one or more in polyurethane (PU), Type B epoxy resin (AEB), R types epoxy resin (AER).
The polymer film thickness is not more than 10 microns.
The metal electrode is interdigital electrode or screw type electrode, and electrode material is gold, silver, platinum or aluminium.
A kind of preparation method for preparing described gas sensor array, comprises the following steps：
(1) patterned metal electrode array is processed in substrate, the conduction as each resistance-type gas sensor
Lead；
(2) graphene film is transferred in substrate, and makes graphene film graphical, form each air-sensitive in array
Resistance；
(3) thin polymer film, the wherein film of the thin polymer film of each gas sensor are covered on graphene film
Species and/or film thickness are different.
Further：
In step (1), patterned metal electrode battle array is processed in substrate by lithography stripping (lift-off) technique
Row.
In step (2), prepare graphene film and be then transferred in substrate by chemical vapor deposition (CVD) technique, and lead to
Crossing plasma etching makes the Graphene in substrate graphical.
In step (2), graphene film is formed on Copper Foil by chemical vapor deposition, in spin coating on graphene film
One layer of PMMA, then will be covered with graphene film and PMMA films Copper Foil be put into suitable corrosive liquid in erode Copper Foil,
Obtain swimming in the PMMA/ graphene films of solution surface, take out PMMA/ graphene films, after cleaning, paste substrate, then
Removal PMMA is dissolved with organic solvent.
In step (3), polymer is printed upon on the graphene film of each gas sensor by InkJet printing processes,
The polymer of different sensors printing is different, and printing times are not more than 20 times, and the solvent in printed material is evaporated after drying, and obtains
To thin polymer film.
Beneficial effects of the present invention：
The invention provides a kind of Graphene and composite membrane of polymer gas sensor array and preparation method thereof, the gas
Sensor array can the species containing target VOCs and concentration level in gas at normal temperatures, response resume speed is fast and sensitivity
Height, can produce in enormous quantities on existing Process ba- sis, and size is small, and measuring circuit is simple, can be loaded with the micro- of algorithm for pattern recognition
Processor constitutes electric nasus system, has a good application prospect.
Compared to the prior art, advantages of the present invention includes：
(1) two-dimension plane structure of Graphene makes it have great specific surface area, can accommodate substantial amounts of gas molecule and inhale
It is attached to graphenic surface.Graphene possesses the characteristic of low electrical noise simultaneously.Graphene can assign gas sensing as sensitive material
The high sensitivity of device.
(2) because of the state of its strand, the difference of side chain functional group has different dissolvings to polymer to gas with various molecule
Degree.Gas with various adsorption rate on polymer, infiltration rate in the polymer can all show otherness, this otherness
Assign gas sensor selectivity.
(3) processed based on MEMS technology, compact gas sensor array can be produced under small yardstick, be more suitable for
Detected in the gas of extremely low concentration, and sensor array can be integrated on a chips with peripheral circuit, sensor signal is easy to
Extract measurement.Large-scale gas sensor array processing is also possibly realized.
(4) inkjet printing mode can be realized implementing the sensitive layer of each sensor in array differentiation processing, print material
The species and print thickness of material are all adjustable.
Brief description of the drawings
Fig. 1 is the spiral Graphene/polymer film resistive gas sensor array schematic diagram of the embodiment of the present invention 1；
Fig. 2 is the interdigital Graphene/polymer film resistive gas sensor array schematic diagram of the embodiment of the present invention 2；
Fig. 3 is the sensor sensing area schematic of the embodiment of the present invention.
Description of reference numerals：
1 is sensor lead bond pad, and 2 is electrode leads to client, and 3 is sensor sensing region, and 3-1 is Graphene, and 3-2 is
Thin polymer film.
Specific embodiment
Embodiments of the present invention are elaborated below.It is emphasized that what the description below was merely exemplary,
Rather than in order to limit the scope of the present invention and its application.
Refering to Fig. 1 to Fig. 3, in one embodiment, a kind of gas sensor array, including substrate and it is formed in the base
One group of resistance-type gas sensor on bottom, each gas sensor in array is included by setting figure on the substrate
The gas sensing resistance that the graphene film 3-1 of change is formed and the thin polymer film 3-2 being covered on the graphene film 3-1, institute
Stating has patterned metal electrode array in substrate, the conduction that the metal electrode array constitutes each gas sensitization resistance is drawn
The film species and/or film thickness of the thin polymer film 3-2 of line, wherein each gas sensor are different.
This MEMS gas sensor arrays can be extremely low as the induction element of Electronic Nose, the identification of binding pattern recognizer
The VOCs of concentration, with sensitivity it is high, to there is cross selectivity, easy to process, volume to various VOCs small, it is easy to it is integrated
The advantages of.
In a variety of embodiments, the graphene film 3-1 can be single-layer graphene or multi-layer graphene.
In a variety of embodiments, the thin polymer film 3-2 of each gas sensor is polyvinyl alcohol (PVA), gathers
Vinylpyrrolidone (PVP), polymethyl methacrylate (PMMA), polyethylene glycol (PEG), polypyrrole (PPy), poly dimethyl silicon
Any in oxygen alkane (PDMS), polystyrene (PS), polyurethane (PU), Type B epoxy resin (AEB), R types epoxy resin (AER)
Plant or various.
In a preferred embodiment, the thin polymer film 3-2 thickness is not more than 10 microns.
In a preferred embodiment, the metal electrode be interdigital electrode or screw type electrode, electrode material for gold,
Silver, platinum or aluminium.
In another embodiment, a kind of preparation method for preparing described gas sensor array is comprised the following steps：
(1) patterned metal electrode array is processed in substrate, the conduction as each resistance-type gas sensor
Lead；
(2) graphene film is transferred in substrate, and makes graphene film graphical, form each air-sensitive in array
Resistance；
(3) thin polymer film, the wherein film of the thin polymer film of each gas sensor are covered on graphene film
Species and/or film thickness are different.
In a preferred embodiment, in step (1), processed in substrate by lithography stripping (l ift-off) technique
Patterned metal electrode array.
In a preferred embodiment, in step (2), graphene film is prepared again by chemical vapor deposition (CVD) technique
It is transferred in substrate, and makes the Graphene in substrate graphical by plasma etching.
In a more preferred embodiment, in step (2), graphene film is formed on Copper Foil by chemical vapor deposition,
The spin coating last layer PMMA on graphene film, the Copper Foil that then will be covered with graphene film and PMMA films is put into suitably
Copper Foil is eroded in corrosive liquid, obtains swimming in the PMMA/ graphene films of solution surface, take out PMMA/ graphene films, clearly
After washing, substrate is pasted, then removal PMMA is dissolved with organic solvent.
In a preferred embodiment, in step (3), polymer is printed upon each gas sensing by InkJet printing processes
On the graphene film of device, the polymer of different sensors printing is different, and printing times are not more than 20 times, and printing material is made after drying
Solvent evaporation in material, obtains thin polymer film.
In a kind of specific embodiment, a kind of preparation method of gas sensor array comprises the following steps：
(1) patterned metal electrode array is processed in substrate by photoetching lift-off techniques, constitutes each gas
The conductive lead wire of body sensitive resistance.Metal electrode can be made interdigital, spiral, to increase the signal to noise ratio of sensor as far as possible.
The metal that electrode is used can make gold, silver, platinum and aluminium.
(2) Graphene is prepared by chemical vapor deposition (CVD) technique, is transferred in substrate, and use plasma etching
Make Graphene graphical, form each gas sensing resistance in array.The chemical vapor deposition of Graphene is carried out on Copper Foil,
The transfer of Graphene uses polymethyl methacrylate (PMMA) as transfer medium.The spin coating last layer PMMA on Graphene,
Then the Copper Foil that Graphene and PMMA will be covered is put into suitable corrosive liquid, erodes copper, obtains swimming in solution surface
PMMA/ graphene films.PMMA/ graphene films are taken out, after cleaning, target substrate is pasted, then dissolved with organic solvent
Removal PMMA.Before using plasma etching Graphene, sensitizing range is protected with photoresist, the figure of Graphene is realized with this
Change.
(3) different types of polymer is printed upon on each sensor sensing region by InkJet printing processes, is dried,
Obtain thin polymer film.The ink that will dissolve variety classes polymer by InkJet printing processes utilizes printing of inkjet printer
On the sensitizing range of each sensor, the polymer of different sensors printing is different.Printing times are not more than 20 times, printing time
Number is more, and the thin polymer film for printing is also thicker.After printing, dried in the baking oven being put into, evaporate the solvent in film.
The polymer of printing can be polyvinyl alcohol (PVA), polyvinylpyrrolidone (PVP), polymethyl methacrylate (PMMA), poly-
Ethylene glycol (PEG), polypyrrole (PPy), dimethyl silicone polymer (PDMS) etc..
The specific embodiment of the invention is further described below in conjunction with accompanying drawing and example.As shown in Figure 1, Figure 2, Figure 3 shows,
Metal electrode in substrate includes sensor lead bond pad 1 and electrode leads to client 2, the sensor sensing region of gas sensor
3 signal is drawn by electrode leads to client 2, and sensor sensing region 3 includes graphene film 3-1 and thin polymer film 3-2.It is all
Structure is all arranged in the substrate of insulation.
Example 1
Substrate is oxidized silicon chip, and metal electrode uses screw type aluminium electrode, and its structural representation is as shown in Figure 1.Pass through
Photoetching lift-off techniques process screw type electrode array in substrate, constitute the conductive lead wire of each gas sensitization resistance；
Graphene is prepared by chemical vapor deposition (CVD) technique, is transferred on electrode, and make Graphene figure with plasma etching
Change, form each gas sensing resistance in array；Different types of polymer is printed upon into each by InkJet printing processes to sense
On device sensitizing range, dry, form one layer of polymeric film.
Example 2
Substrate is oxidized silicon chip, and metal electrode uses the aluminium electrode of interdigital, and its structural representation is as shown in Figure 2.Pass through
Photoetching lift-off techniques process arrays of interdigitated electrodes in substrate, constitute the conductive lead wire of each gas sensitization resistance；
Graphene is prepared by chemical vapor deposition (CVD) technique, is transferred on electrode, and make Graphene figure with plasma etching
Change, form each gas sensing resistance in array；Different types of polymer is printed upon into each by InkJet printing processes to sense
On device sensitizing range, dry, form one layer of polymeric film.
Above content is to combine specific/preferred embodiment further description made for the present invention, it is impossible to recognized
Fixed specific implementation of the invention is confined to these explanations.For general technical staff of the technical field of the invention,
Without departing from the inventive concept of the premise, its implementation method that can also have been described to these makes some replacements or modification,
And these are substituted or variant should all be considered as belonging to protection scope of the present invention.
Claims (10)
1. a kind of gas sensor array, it is characterised in that including substrate and form one group of resistance-type gas on the substrate
Body sensor, each gas sensor in array includes being formed by the patterned graphene film for setting on the substrate
Gas sensing resistance and the thin polymer film that is covered on the graphene film, there is patterned metal electrode in the substrate
Array, the metal electrode array constitutes the conductive lead wire of each gas sensitization resistance, the wherein polymer of each gas sensor
The film species and/or film thickness of film are different.
2. gas sensor array as claimed in claim 1, it is characterised in that the graphene film be single-layer graphene or
Multi-layer graphene.
3. gas sensor array as claimed in claim 1, it is characterised in that the thin polymer film of each gas sensor is
Polyvinyl alcohol (PVA), polyvinylpyrrolidone (PVP), polymethyl methacrylate (PMMA), polyethylene glycol (PEG), polypyrrole
(PPy), dimethyl silicone polymer (PDMS), polystyrene (PS), polyurethane (PU), Type B epoxy resin (AEB), R type asphalt mixtures modified by epoxy resin
Any one or more in fat (AER).
4. the gas sensor array as described in any one of claims 1 to 3, it is characterised in that the polymer film thickness
No more than 10 microns.
5. the gas sensor array as described in any one of Claims 1-4, it is characterised in that the metal electrode is interdigital
Formula electrode or screw type electrode, electrode material are gold, silver, platinum or aluminium.
6. a kind of preparation method for preparing the gas sensor array as described in any one of claim 1 to 5, it is characterised in that
Comprise the following steps：
(1) patterned metal electrode array is processed in substrate, the conductive lead wire as each resistance-type gas sensor；
(2) graphene film is transferred in substrate, and makes graphene film graphical, form each air-sensitive electricity in array
Resistance；
(3) thin polymer film, wherein the film species of the thin polymer film of each gas sensor are covered on graphene film
And/or film thickness is different.
7. the preparation method of gas sensor array as claimed in claim 6, it is characterised in that in step (1), by photoetching
Stripping technology processes patterned metal electrode array in substrate.
8. the preparation method of gas sensor array as claimed in claim 6, it is characterised in that in step (2), by chemistry
Vapour deposition (CVD) technique prepares graphene film and is then transferred in substrate, and makes the stone in substrate by plasma etching
Black alkene is graphical.
9. the preparation method of the gas sensor array as described in any one of claim 6 to 8, it is characterised in that step (2)
In, graphene film is formed on Copper Foil by chemical vapor deposition, then the spin coating last layer PMMA on graphene film will
It is coated with during the Copper Foil of graphene film and PMMA films is put into suitable corrosive liquid and erodes Copper Foil, obtains swimming in solution table
The PMMA/ graphene films in face, take out PMMA/ graphene films, after cleaning, paste substrate, then gone with organic solvent dissolving
Except PMMA.
10. the preparation method of the gas sensor array as described in any one of claim 6 to 9, it is characterised in that step (3)
In, polymer is printed upon on the graphene film of each gas sensor by InkJet printing processes, different sensors printing
Polymer it is different, printing times are not more than 20 times, and the solvent in printed material is evaporated after drying, and obtain thin polymer film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710004842.8A CN106680328A (en) | 2017-01-04 | 2017-01-04 | Gas sensor array and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710004842.8A CN106680328A (en) | 2017-01-04 | 2017-01-04 | Gas sensor array and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106680328A true CN106680328A (en) | 2017-05-17 |
Family
ID=58848982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710004842.8A Pending CN106680328A (en) | 2017-01-04 | 2017-01-04 | Gas sensor array and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106680328A (en) |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884444A (en) * | 2017-11-06 | 2018-04-06 | 余帝乾 | A kind of flexible array gas sensor chip |
| CN108088955A (en) * | 2017-11-30 | 2018-05-29 | 苏州慧闻纳米科技有限公司 | A kind of anti-interference gas sensor |
| CN108195886A (en) * | 2018-04-20 | 2018-06-22 | 佛山市车品匠汽车用品有限公司 | A kind of flexible gas sensor |
| CN108298496A (en) * | 2018-03-13 | 2018-07-20 | 长春师范大学 | A kind of graphene mass assembly method based on light dielectrophoresis |
| CN108872318A (en) * | 2018-08-01 | 2018-11-23 | 电子科技大学 | A kind of self energizing respiration transducer and preparation method thereof based on bionic nasal cavity structure |
| CN109030574A (en) * | 2017-06-09 | 2018-12-18 | 天津大学 | A kind of acetone gas detector and its detection method based on electric charge transfer |
| CN109060892A (en) * | 2018-06-26 | 2018-12-21 | 西安交通大学 | SF based on graphene composite material sensor array6Decompose object detecting method |
| CN109142466A (en) * | 2018-07-20 | 2019-01-04 | 西安交通大学 | The pollution-free shifting process of CVD graphene obtains the air-sensitive film sensor and method of graphene oxide and graphene composite structure |
| CN109374688A (en) * | 2018-11-28 | 2019-02-22 | 宁波石墨烯创新中心有限公司 | Gas detection method, equipment and graphene gas sensor based on graphene |
| CN109632906A (en) * | 2019-01-17 | 2019-04-16 | 广西师范大学 | Based on graphene-metal hetero-junction gas sensor array and preparation method thereof |
| CN110398522A (en) * | 2019-08-28 | 2019-11-01 | 北京智芯微电子科技有限公司 | Integrated gas sensing unit based on graphene and preparation method thereof |
| CN110632128A (en) * | 2019-09-29 | 2019-12-31 | 浙江大学 | Preparation method and application method of graphene material resistance type gas sensing array |
| CN111380918A (en) * | 2020-04-07 | 2020-07-07 | 合肥微纳传感技术有限公司 | Cantilever beam gas sensor with multiple detection electrodes |
| WO2020165588A1 (en) * | 2019-02-13 | 2020-08-20 | Altered Carbon Limited | Ink compositions based on graphene and a stabilising agent and sensors fabricated from the ink |
| CN111796005A (en) * | 2019-12-24 | 2020-10-20 | 有研工程技术研究院有限公司 | Low-temperature miniature gas sensor and preparation method thereof |
| CN111791623A (en) * | 2020-07-21 | 2020-10-20 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by ink-jet printing |
| CN111912877A (en) * | 2019-05-09 | 2020-11-10 | 天津大学 | Sensor array-based organic gas detection and identification chip |
| CN112505097A (en) * | 2020-08-20 | 2021-03-16 | 江门市阳邦智能科技有限公司 | Cerium oxide sensor and preparation method thereof |
| CN112730529A (en) * | 2020-12-22 | 2021-04-30 | 杭州未名信科科技有限公司 | Resistance type hydrogen sensor and preparation method thereof |
| WO2023275084A1 (en) * | 2021-07-01 | 2023-01-05 | Universität Leipzig | Device and method for determining the penetration of a particle into a material |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011006677A1 (en) * | 2009-07-13 | 2011-01-20 | Hochschule Lausitz | Multi-electrode chemiresistor |
| EP2426487A1 (en) * | 2010-09-03 | 2012-03-07 | The Provost Fellows And Scholars Of The College Of The Holy and Undivided Trinity Of Queen Elizabeth Near Dublin | Nano-carbon sensor and method of making a sensor |
| CN102680527A (en) * | 2012-05-23 | 2012-09-19 | 哈尔滨工业大学 | Method for preparing graphene gas sensors in batches based on nano soft lithography |
| CN103675034A (en) * | 2013-11-29 | 2014-03-26 | 华中科技大学 | Semiconductor resistance-type gas sensor and preparation method thereof |
| CN104535635A (en) * | 2014-12-09 | 2015-04-22 | 湖北中医药大学 | Preparation method of graphene field-effect transistor biosensor |
-
2017
- 2017-01-04 CN CN201710004842.8A patent/CN106680328A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011006677A1 (en) * | 2009-07-13 | 2011-01-20 | Hochschule Lausitz | Multi-electrode chemiresistor |
| EP2426487A1 (en) * | 2010-09-03 | 2012-03-07 | The Provost Fellows And Scholars Of The College Of The Holy and Undivided Trinity Of Queen Elizabeth Near Dublin | Nano-carbon sensor and method of making a sensor |
| CN102680527A (en) * | 2012-05-23 | 2012-09-19 | 哈尔滨工业大学 | Method for preparing graphene gas sensors in batches based on nano soft lithography |
| CN103675034A (en) * | 2013-11-29 | 2014-03-26 | 华中科技大学 | Semiconductor resistance-type gas sensor and preparation method thereof |
| CN104535635A (en) * | 2014-12-09 | 2015-04-22 | 湖北中医药大学 | Preparation method of graphene field-effect transistor biosensor |
Non-Patent Citations (4)
| Title |
|---|
| 于军胜: "《显示器件技术》", 30 July 2010 * |
| 周泳: "基于MWCNTs 和RGO的电阻式气体传感器的基础研究", 《中国博士学位论文全文数据库 信息科技辑》 * |
| 李宇轩: "基于石墨烯的气体传感器阵列的制备及特性研究", 《万方学术期刊数据库》 * |
| 李少谦等: "《太赫兹通信技术导论》", 31 January 2016 * |
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109030574A (en) * | 2017-06-09 | 2018-12-18 | 天津大学 | A kind of acetone gas detector and its detection method based on electric charge transfer |
| CN107884444A (en) * | 2017-11-06 | 2018-04-06 | 余帝乾 | A kind of flexible array gas sensor chip |
| CN108088955A (en) * | 2017-11-30 | 2018-05-29 | 苏州慧闻纳米科技有限公司 | A kind of anti-interference gas sensor |
| CN108298496A (en) * | 2018-03-13 | 2018-07-20 | 长春师范大学 | A kind of graphene mass assembly method based on light dielectrophoresis |
| CN108195886B (en) * | 2018-04-20 | 2020-10-13 | 泰州市赛得机电设备有限公司 | Flexible gas sensor |
| CN108195886A (en) * | 2018-04-20 | 2018-06-22 | 佛山市车品匠汽车用品有限公司 | A kind of flexible gas sensor |
| CN109060892A (en) * | 2018-06-26 | 2018-12-21 | 西安交通大学 | SF based on graphene composite material sensor array6Decompose object detecting method |
| CN109142466A (en) * | 2018-07-20 | 2019-01-04 | 西安交通大学 | The pollution-free shifting process of CVD graphene obtains the air-sensitive film sensor and method of graphene oxide and graphene composite structure |
| CN109142466B (en) * | 2018-07-20 | 2022-05-20 | 西安交通大学 | Gas-sensitive thin film sensor and method for obtaining graphene oxide and graphene composite structure by CVD graphene pollution-free transfer process |
| CN108872318A (en) * | 2018-08-01 | 2018-11-23 | 电子科技大学 | A kind of self energizing respiration transducer and preparation method thereof based on bionic nasal cavity structure |
| CN108872318B (en) * | 2018-08-01 | 2020-09-29 | 电子科技大学 | Self-powered respiration sensor based on bionic nasal cavity structure and preparation method thereof |
| CN109374688A (en) * | 2018-11-28 | 2019-02-22 | 宁波石墨烯创新中心有限公司 | Gas detection method, equipment and graphene gas sensor based on graphene |
| CN109632906A (en) * | 2019-01-17 | 2019-04-16 | 广西师范大学 | Based on graphene-metal hetero-junction gas sensor array and preparation method thereof |
| CN109632906B (en) * | 2019-01-17 | 2024-01-30 | 广西师范大学 | Gas sensor array based on graphene-metal heterojunction and preparation method thereof |
| WO2020165588A1 (en) * | 2019-02-13 | 2020-08-20 | Altered Carbon Limited | Ink compositions based on graphene and a stabilising agent and sensors fabricated from the ink |
| CN111912877A (en) * | 2019-05-09 | 2020-11-10 | 天津大学 | Sensor array-based organic gas detection and identification chip |
| CN110398522A (en) * | 2019-08-28 | 2019-11-01 | 北京智芯微电子科技有限公司 | Integrated gas sensing unit based on graphene and preparation method thereof |
| WO2021057590A1 (en) * | 2019-09-29 | 2021-04-01 | 杭州汇健科技有限公司 | Method for preparing and method for using graphene material-based resistive gas sensor array |
| CN110632128A (en) * | 2019-09-29 | 2019-12-31 | 浙江大学 | Preparation method and application method of graphene material resistance type gas sensing array |
| JP7332797B2 (en) | 2019-09-29 | 2023-08-23 | 杭州匯健科技有限公司 | Methods of making and using graphene material resistive gas sensor arrays |
| CN111796005A (en) * | 2019-12-24 | 2020-10-20 | 有研工程技术研究院有限公司 | Low-temperature miniature gas sensor and preparation method thereof |
| CN111796005B (en) * | 2019-12-24 | 2023-12-19 | 有研工程技术研究院有限公司 | Low-temperature micro gas sensor and preparation method thereof |
| CN111380918A (en) * | 2020-04-07 | 2020-07-07 | 合肥微纳传感技术有限公司 | Cantilever beam gas sensor with multiple detection electrodes |
| CN111791623A (en) * | 2020-07-21 | 2020-10-20 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by ink-jet printing |
| CN112505097A (en) * | 2020-08-20 | 2021-03-16 | 江门市阳邦智能科技有限公司 | Cerium oxide sensor and preparation method thereof |
| CN112730529A (en) * | 2020-12-22 | 2021-04-30 | 杭州未名信科科技有限公司 | Resistance type hydrogen sensor and preparation method thereof |
| WO2023275084A1 (en) * | 2021-07-01 | 2023-01-05 | Universität Leipzig | Device and method for determining the penetration of a particle into a material |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106680328A (en) | Gas sensor array and manufacturing method thereof | |
| CN105758562B (en) | A kind of pliable pressure sensor and preparation method thereof | |
| CN106716152A (en) | Thin-film resistive-based sensor | |
| CN105866175B (en) | Printable flexible ammonia gas sensor of one kind and preparation method thereof | |
| CN104458835B (en) | A kind of humidity sensor and preparation method thereof | |
| CN102735712B (en) | Micro-well based gas sensor array and its making method | |
| Naama et al. | CO2 gas sensor based on silicon nanowires modified with metal nanoparticles | |
| CN104914138A (en) | Humidity sensor, humidity sensor array and preparation method thereof | |
| CN107589155A (en) | A kind of capacitance type sensor and preparation method thereof | |
| CN1343308A (en) | Absolute humidity sensor | |
| Kutzner et al. | Novel screen printed humidity sensor on textiles for smart textile applications | |
| CN106093138B (en) | Pass through the manufacturing method and sensor of the sensor of metal oxide detection gas | |
| CN108508062A (en) | One kind being based on MoO3The triethylamine sensor of nano sensitive material, preparation method and applications | |
| CN106124576B (en) | Integrated humidity sensor and multiple-unit gas sensor and its manufacturing method | |
| CN106525921B (en) | Electrochemical detector, manufacturing method thereof and method for detecting target substance | |
| Stankova et al. | Sputtered and screen-printed metal oxide-based integrated micro-sensor arrays for the quantitative analysis of gas mixtures | |
| CN106092203B (en) | A kind of multifunction sensor device and preparation method thereof | |
| WO2013175503A2 (en) | Nanostructure based mems preconcentrator | |
| CN106158743B (en) | Utilize the manufacturing method of the sensor of more inducing pixels detection multiple gases | |
| CN207516298U (en) | A kind of capacitance type sensor | |
| CN110702747B (en) | Diaminoanthraquinone squaramide polymer, humidity-sensitive sensor based on squaramide polymer and preparation method of humidity-sensitive sensor | |
| Cranny et al. | A comparison of thick-and thin-film gas-sensitive organic semiconductor compounds | |
| CN113511626A (en) | Multi-parameter gas sensing microchip and preparation method thereof, and gas sensor | |
| Filipovic et al. | Integration of Gas Sensors with CMOS Technology | |
| JPS6358249A (en) | Humidity detecting element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170517 |
|
| RJ01 | Rejection of invention patent application after publication |