CN106672660A - Metal pattern plate loading device and display panel preparation system - Google Patents
Metal pattern plate loading device and display panel preparation system Download PDFInfo
- Publication number
- CN106672660A CN106672660A CN201710138160.6A CN201710138160A CN106672660A CN 106672660 A CN106672660 A CN 106672660A CN 201710138160 A CN201710138160 A CN 201710138160A CN 106672660 A CN106672660 A CN 106672660A
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- Prior art keywords
- door
- bracket
- opening
- plate
- mask plate
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- 238000011068 loading method Methods 0.000 title claims abstract description 38
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 239000002184 metal Substances 0.000 title abstract 5
- 238000002955 isolation Methods 0.000 claims abstract description 21
- 230000001939 inductive effect Effects 0.000 claims description 19
- 238000004891 communication Methods 0.000 claims description 9
- 230000001960 triggered effect Effects 0.000 claims description 5
- 230000000873 masking effect Effects 0.000 claims description 4
- 230000004044 response Effects 0.000 claims description 4
- 238000013519 translation Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000032258 transport Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000002372 labelling Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G69/00—Auxiliary measures taken, or devices used, in connection with loading or unloading
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power-Operated Mechanisms For Wings (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
The invention provides a metal pattern plate loading device and a display panel preparation system. The metal pattern plate loading device comprises an opening, a holding frame, a first driving assembly, a door plate and a second driving assembly, and the opening is located on an isolation face. The holding frame is used for bearing a metal pattern plate. The first driving assembly is connected with the holding frame and used for driving the holding frame to move in a reciprocating mode relative to the isolation face so as to drive the metal pattern plate to penetrate out or retract from the opening. The door plate and the isolation face are arranged in parallel, and the area of the door plate is not smaller than that of the opening. The second driving assembly is used for driving the door plate to make reciprocating and translational movement relative to the opening, so that the opening is shielded or exposed.
Description
Technical field
It relates to display technology field, prepares in particular to a kind of mask plate loading attachment and display floater
System.
Background technology
At present, in quasiconductor and the manufacture field of display panels, photoetching process is essential core process, generally
Including techniques such as coating photoresist, exposure, development and etchings.Wherein, in exposure process, need to use mask plate, mask plate
Printing opacity and lighttight region are generally comprised, to form required figure on a photoresist.
As the raising of yield, the use of mask plate are very frequent, need to clean mask plate, carry.But it is existing
In technology, it usually needs artificial to take out mask plate from cleaning device or other devices, then transported by means of transports such as chassis
To specified location, so as to making mask plate convey between different station.But due to needing manually to carry out compared with multioperation so that work
It is less efficient, it is unfavorable for saving human resourcess, meanwhile, artificial operation excessively also easily causes damage of product, is unfavorable for reducing into
This.
It should be noted that information is only used for strengthening the reason of background of this disclosure disclosed in above-mentioned background section
Solution, therefore can include not constituting the information to prior art known to persons of ordinary skill in the art.
The content of the invention
The purpose of the disclosure is to provide a kind of mask plate loading attachment and display floater preparation system, and then at least one
Determine restriction and the defect due to correlation technique to be overcome in degree and caused one or more problem.
According to an aspect of this disclosure, there is provided a kind of mask plate loading attachment, including：
Opening, on an isolation face；
Bracket, for carrying mask plate；
First drive component, is connected with the bracket, for driving the relatively described isolation face of the bracket to move back and forth, with
The mask plate is driven to pass or retract from the opening；
Door-plate, with it is described isolate face be arranged in parallel and area be not less than the opening；
Second drive component, for driving the door-plate relative to the opening alternating translational, with cover the opening or
Expose the opening.
In a kind of illustrative embodiments of the disclosure, the door-plate is driven to include relative to the opening alternating translational
Drive the door-plate relative to the opening vertically or horizontal direction realizing linear reciprocating translation.
In a kind of illustrative embodiments of the disclosure, the mask plate loading attachment also includes：
Control assembly, the bracket is moved back and forth for responding the first enabling signal to control first drive component
Stop the bracket to control first drive component with the first stop signal of response；And, respond the second enabling signal
To control the second drive component the door-plate alternating translational and the second stop signal of response are made to control second drive component
Stop the door-plate.
In a kind of illustrative embodiments of the disclosure, the mask plate loading attachment also includes：
First inductive component, for sensing the position of the bracket, and for passing described opening in the bracket
One precalculated position is retracted and described triggers first stop signal when being open to the second precalculated position.
In a kind of illustrative embodiments of the disclosure, first inductive component includes：
First sensor, for sensing the bracket locations, and for being moved to first pre-determined bit in the bracket
First stop signal is sent when putting to the control assembly；
Second sensor, for sensing the bracket locations, and for being moved to second pre-determined bit in the bracket
First stop signal is sent when putting to the control assembly.
In a kind of illustrative embodiments of the disclosure, the mask plate loading attachment also includes：
Second inductive component, for sensing the position of the door-plate, and opens for moving in the door-plate described in masking
Mouthful or trigger second stop signal when exposing the position of the opening.
In a kind of illustrative embodiments of the disclosure, second inductive component also includes：
3rd sensor, for sensing the door-plate position, and for moving to the masking opening in the door-plate
Second stop signal is sent during position to the control assembly；
4th sensor, for sensing the door-plate position, and exposes the opening for moving in the door-plate
Second stop signal is sent during position to the control assembly.
In a kind of illustrative embodiments of the disclosure, the mask plate loading attachment also includes：
Communication component；
Tele-control system, for being communicated with the control assembly by the communication component, and to the control assembly
Send first enabling signal and second enabling signal.
In a kind of illustrative embodiments of the disclosure, first drive component includes first straight line motor, described
First straight line motor is connected with the bracket, and the bracket can be driven to move back and forth；
The mask plate loading attachment according to above-mentioned any one, second drive component includes second straight line motor,
The second straight line motor is connected with the door-plate, for driving the door-plate alternating translational.
According to another aspect of the disclosure, there is provided a kind of display floater preparation system, including described in above-mentioned any one
Mask plate loading attachment.
The mask plate loading attachment and display floater preparation system of the disclosure, can drive door-plate to hide by the second drive component
Opening is covered, action of closing the door is realized；Or driving door-plate expose opening, realize door opening action；Mask plate can be carried on bracket,
When door-plate exposes opening, bracket carrying mask plate is driven to pass to outside isolation face from opening by the first drive component, so as to
Chassis transport, or from opening retract, so as to by mask plate carrying to isolation face；Avoid mask plate using manual type
Take out or put back to, in isolation face, the work such as can be cleaned, be deposited.Thus, work efficiency can be improved, saves manpower money
Source；Advantageously reduce artificial operation and cause damage of product, reduce cost.
It should be appreciated that the general description of the above and detailed description hereinafter are only exemplary and explanatory, not
The disclosure can be limited.
Description of the drawings
Accompanying drawing herein is merged in description and constitutes the part of this specification, shows the enforcement for meeting the disclosure
Mode, and be used to explain the principle of the disclosure together with description.It should be evident that drawings in the following description are only this public affairs
Some embodiments opened, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 schematically shows the schematic diagram when opening of the embodiment of mask plate loading attachment one is opened.
Fig. 2 schematically shows the schematic diagram when bracket in Fig. 1 passes opening.
Fig. 3 schematically shows the schematic diagram when opening in Fig. 1 is closed.
Fig. 4 schematically shows the schematic diagram of another embodiment of mask plate loading attachment.
Fig. 5 schematically shows the schematic block circuit diagram of mask plate loading attachment.
Specific embodiment
Example embodiment is described more fully with referring now to accompanying drawing.However, example embodiment can be with various shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein；Conversely, thesing embodiments are provided so that the present invention will
Fully and completely, and by the design of example embodiment those skilled in the art is comprehensively conveyed to.Identical accompanying drawing in figure
Labelling represents same or similar structure, thus will omit their detailed description.
Although the term of relative property used in this specification, for example " on " D score to be describing a component of icon for another
The relativeness of one component, but these terms are used in this specification merely for convenient, for example with reference to the accompanying drawings described in show
The direction of example.Be appreciated that, if making it turn upside down the upset of the device of icon, describe " on " component will
Become the component in D score.The term of other relative properties, such as " " height " " low " " top " " bottom " etc. also makees have similar meaning.When
Certain structure other structures " on " when, it is possible to refer to that certain structural integrity is formed in other structures, or refer to certain structure " direct "
It is arranged in other structures, or refers to that certain structure is arranged in other structures by another structure " indirect ".
Term " being somebody's turn to do " and " described " to represent exist one or more elements/ingredient/etc.；Term " including " and
" having " to represent the open meaning being included and in addition to referring to key element/ingredient except listing/wait also
There may be other key element/ingredient/etc.；Term " first ", " second " etc. are only used as labelling, are not to its object
Quantity is limited.
A kind of mask plate loading attachment, such as Fig. 1~Fig. 3, the mask plate loading attachment are provided in this example embodiment
Isolation face 1, opening 2, bracket 3, door-plate 4, the first drive component 5 and the second drive component 6 can be included, wherein：
Isolation face 1 can be the surface of a slab construction, and the slab construction can be used to being separated out at least two independent
Two regions, mask plate 12 can be moved between these two regions；Or, isolation face 1 can also be a hollow body structure
Surface, cleaning or storage to mask plate 12 etc. are can be used in the body structure, here does not do particular determination；And in this public affairs
In the other examples embodiment opened, isolation face 1 can also be a surface of other structures, as long as compartmentation can be played i.e.
Can.
Opening 2 can be opened on an isolation face, and the shape here of opening 2 is not particularly limited；
Bracket 3 can be a flat board or framework, and mask plate 12 is placed on the bracket 3, and certainly, bracket 3 can also be
Other structures, as long as mask plate 12 can be carried, here no longer enumerates its structure；Bracket 3 can be relatively isolated face 1 along level
Direction is slided or with respect to the horizontal plane oblique slip, and as a example by isolating face 1 for the surface of above-mentioned body structure, bracket 3 can be with this
The inwall of body structure is slidably connected by slide rail, and when bracket 3 is moved, can the movement simultaneously of carrying mask plate 12 thereon；
The position of bracket 3 can be relative with above-mentioned opening 2, and the overall dimensions of bracket 3 and mask plate 12 are less than opening 2 so that bracket 3
And mask plate 12 thereon can smoothly pass or retract opening 2；Realize that the slidable mode of bracket 3 can also be alternate manner,
As long as can realize that the carrying mask plate 12 of bracket 3 passes through or retract opening 2.
Door-plate 4 can be a flat board, can with isolate face 1 fit also or with isolate between face 1 have certain interval；Door-plate 4 can
The alternating translational of face 1 is relatively isolated, to cover or expose opening 2；The area of door-plate 4 is more than or less than (i.e. not less than) opening 2
Area, when the masking of door-plate 4 opening 2, opening 2 is closed, and stops that bracket 3 and mask plate 12 are passed from opening 2；When door-plate 4 exposes
Be open 2 when, opening 2 open, bracket 3 can carrying mask plate 12 pass opening 2；Wherein, the moving direction of door-plate 4 can be vertical
Direction can also be horizontally oriented, it is, of course, also possible to be other directions.
First drive component 5 can include first straight line motor, and the first straight line motor can be relatively isolated face 1 and keep fixing
And can be connected with bracket 3, so as to drive bracket 3 to move back and forth, realize that bracket 3 passes and retract opening 2；The disclosure its
In its example embodiment, the first drive component 5 can also be the drive that cylinder, hydraulic cylinder etc. can drive bracket 3 to move linearly
Moving part, or common electric rotating machine can be adopted to coordinate the transmission components such as feed screw nut to drive bracket 3 to move linearly, here is not right
First drive component 5 carries out particular determination.
Second drive component 6 can include second straight line motor, and the second straight line motor can be directly fixed on isolation face 1
Or otherwise with isolate face 1 keep fix；The outfan of the second straight line motor can be connected with door-plate 4, so as to drive
The alternating translational of dynamic door-plate 4, to cover the opening or expose the opening.In the other examples embodiment of the disclosure, the
Two drive components 6 can also be the actuator that cylinder, hydraulic cylinder etc. can drive door-plate 4 to move linearly, or can be using common
Electric rotating machine coordinate the transmission component such as feed screw nut to drive bracket door-plate 4 to move linearly, here is not entered to the second drive component 6
Row particular determination.
In this example embodiment, the mask plate loading attachment can be with the first inductive component 7, first inductive component
7 sides that can be located at the moving direction of bracket 3, can detect the position of bracket 3, and first inductive component 7 can be passed including first
Sensor 71 and second sensor 72, wherein：
First sensor 71 and second sensor 72 can be using laser sensor, ultrasonic sensors or other are available
To detect the position sensor of bracket 3, and first sensor 71 and the biography of identical or different type can be adopted with second sensor 72
Sensor.
First sensor 71 and second sensor 72 can be located at the both sides of bracket 3 or the same sides, as shown in Fig. 2 working as bracket 3
When being moved to the first precalculated position, i.e., when bracket 3 passes opening 2, first sensor 71 detects bracket 3 and is triggered, and can produce
Raw first stop signal；In this position, the mask plate 12 being carried on bracket 3 can be removed；As shown in figure 3, when bracket 3 is moved
During to the second position, i.e., when bracket 3 is retracted and is open 2, first sensor 71 detects bracket 3 and is triggered, and can also produce first
Stop signal so that bracket 2 can be reset or transport back another mask plate.
In the other examples embodiment of the disclosure, first sensor 71 and second sensor 72 sense the position of bracket 3
Mode, can also be：As shown in figure 4, by first sensor 71 and second sensor 72 located at corresponding with the second precalculated position
Position, when bracket 3 is located at the second precalculated position, first sensor 71 and second sensor 72 can detect that bracket 3, work as support
When frame 3 is located at the first precalculated position, first sensor 71 and second sensor 72 are not detected by bracket 3；Can set this two
Above-mentioned first stop signal can be produced in the case of kind；This kind of embodiment equally can carry out spacing to bracket 3.Certainly, may be used also
To adopt alternate manner.
In this example embodiment, the mask plate loading attachment can also include the second inductive component 8, second sensing
Component 8 can be located at isolation face 1 near the side of door-plate 4, for sensing the position of door-plate 4.Second inductive component 8 can include
The sensor 82 of 3rd sensor 81 and the 4th, wherein：
The sensor 82 of 3rd sensor 81 and the 4th can be using laser sensor, ultrasonic sensor or other are available
To detect the position sensor of door-plate 4, and 3rd sensor 81 and the biography of identical or different type can be adopted with 3rd sensor 81
Sensor.
The sensor 82 of 3rd sensor 81 and the 4th can be fixed on isolation face 1 along the moving direction of door-plate 4, when door-plate 4
When moving to three precalculated positions, opening 2 is covered, 3rd sensor 81 is triggered and produces the second stop signal；When door-plate 4
When moving to four precalculated positions, expose opening 2 so that bracket 3 is passed through, the 4th sensor 82 is triggered and produces second and stops
Stop signal.Consequently facilitating the movement of end of door plate 4 carry out it is spacing.
In the other examples embodiment of the disclosure, 3rd sensor 81 and the 4th sensor 82 sense the position of door-plate 4
Mode, can also be：As shown in figure 4, by the sensor 82 of 3rd sensor 81 and the 4th located at corresponding with the 3rd precalculated position
Position, when door-plate 4 is located at four precalculated positions, the sensor 82 of 3rd sensor 81 and the 4th can detect that door-plate 4, work as door
When plate 4 is located at three precalculated positions, 3rd sensor 81 and second sensor 82 are not detected by door-plate 4；Can set this two
Above-mentioned second stop signal can be produced in the case of kind；This kind of embodiment equally can end of door plate 4 carry out it is spacing.Certainly, may be used also
To adopt alternate manner.
It should be noted that the first above-mentioned inductive component 7 and the second inductive component 8 can also using proximity switch etc. its
It can be used to determining the device of position door-plate 4 and the position of bracket 3, above-mentioned retouching to the first inductive component 7 and the second inductive component 8
State and be merely illustrative, do not constitute the restriction to the first inductive component 7 and the second inductive component 8.
In this example embodiment, as shown in figure 5, the mask plate loading attachment can also include control assembly 9, the control
Component processed 9 can be PLC (Programmable Logic Controller, programmable logic controller (PLC)), single-chip microcomputer, calculating
Machine etc., and the first enabling signal, the second enabling signal and the first above-mentioned stop signal and the second stop signal can be received；Should
Control assembly 9 can be connected with the first drive component 5 and the second drive component 6, for example, when the control assembly 9 is received
After stating the first enabling signal, can respond first enabling signal moves back and forth bracket 3 to control the first drive component 5；When this
Control assembly 9 receives above-mentioned first stop signal, and can respond first stop signal to control the first drive component 5 makes bracket
3 stop；After the control assembly 9 receives above-mentioned second enabling signal, the second enabling signal can be responded to control the second driving
Component 6 makes the alternating translational of door-plate 4；After the control assembly 9 receives above-mentioned second stop signal, response the second stop signal with
Controlling the second drive component 6 stops door-plate 4.
It should be noted that control assembly 9 can be by judging the first enabling signal from first sensor 71 or second
Sensor 72, controls the moving direction of bracket 3, it is ensured that bracket 3 is moved back and forth between the first precalculated position and the second precalculated position；
In the same manner, can be by judging that the second enabling signal, from the sensor 82 of 3rd sensor 81 or the 4th, controls the mobile side of door-plate 4
To, it is ensured that door-plate 4 is moved back and forth between the 3rd precalculated position and the 4th precalculated position.
In this example embodiment, as shown in figure 5, the mask plate loading attachment also includes communication component 10 and long-range control
System processed 11, wherein：
The communication component 10 can be the communication module for carrying out wired or wireless way transmission data, for example bluetooth mould
Block, WIFI module etc.；
Tele-control system 11 can be entered by above-mentioned communication component 10 with terminals such as computer, mobile phones with control assembly 9
Row communication, and can according to the operation of user or default program to the control assembly 9 send the first above-mentioned enabling signal and
Second enabling signal, so as to the startup of remote controlled bracket 3 and door-plate 4；Certainly, by sending the first stop signal and the
Two stop signals can also remotely control bracket 3 and door-plate 4 stop.
A kind of display floater preparation system is additionally provided in this example embodiment, the display floater preparation system can be wrapped
Include the mask plate loading attachment that any of the above-described example embodiment is provided.And other component parts of display floater preparation system
Have been known, will not be described here.
The mask plate loading attachment and display floater preparation system of the disclosure, can drive door-plate to hide by the second drive component
Opening is covered, action of closing the door is realized；Or driving door-plate expose opening, realize door opening action；Mask plate can be carried on bracket,
When door-plate exposes opening, bracket carrying mask plate is driven to pass to outside isolation face from opening by the first drive component, so as to
Chassis transport, or from opening retract, so as to by mask plate carrying to isolation face；Avoid mask plate using manual type
Take out or put back to, in isolation face, the work such as can be cleaned, be deposited.Thus, work efficiency can be improved, saves manpower money
Source；Advantageously reduce artificial operation and cause damage of product, reduce cost.
Those skilled in the art will readily occur to its of the disclosure after considering description and putting into practice invention disclosed herein
Its embodiment.The application is intended to any modification, purposes or the adaptations of the disclosure, these modifications, purposes or
Person's adaptations follow the general principle of the disclosure and including the undocumented common knowledge in the art of the disclosure
Or conventional techniques.Description and embodiment are considered only as exemplary, and the true scope of the disclosure and spirit are by appended
Claim point out.
Claims (10)
1. a kind of mask plate loading attachment, it is characterised in that include：
Opening, on an isolation face；
Bracket, for carrying mask plate；
First drive component, is connected with the bracket, for driving the relatively described isolation face of the bracket to move back and forth, to drive
The mask plate is passed or retracted from the opening；
Door-plate, with it is described isolate face be arranged in parallel and area be not less than the opening；
Second drive component, for driving the door-plate relative to the opening alternating translational, to cover the opening or expose
The opening.
2. mask plate loading attachment according to claim 1, it is characterised in that drive the door-plate relative to it is described be open it is past
Multiple translation includes driving the door-plate to be open vertically or horizontal direction realizing linear reciprocating translation relative to described.
3. mask plate loading attachment according to claim 1 or claim 2, it is characterised in that the mask plate loading attachment also includes：
Control assembly, makes the bracket move back and forth and ring for responding the first enabling signal to control first drive component
Answer the first stop signal stops the bracket to control first drive component；And, respond the second enabling signal to control
Making the second drive component makes the door-plate alternating translational and the second stop signal of response make institute to control second drive component
State door-plate stopping.
4. mask plate loading attachment according to claim 3, it is characterised in that the mask plate loading attachment also includes：
First inductive component, for sensing the position of the bracket, and for passing described opening to first pre- in the bracket
Positioning triggers first stop signal when putting or retract described opening to the second precalculated position.
5. mask plate loading attachment according to claim 4, it is characterised in that first inductive component includes：
First sensor, for sensing the bracket locations, and for when the bracket is moved to first precalculated position
First stop signal is sent to the control assembly；
Second sensor, for sensing the bracket locations, and for when the bracket is moved to second precalculated position
First stop signal is sent to the control assembly.
6. mask plate loading attachment according to claim 3, it is characterised in that the mask plate loading attachment also includes：
Second inductive component, for sensing the position of the door-plate, and for the door-plate move to the masking opening or
Second stop signal is triggered during the position for exposing the opening.
7. mask plate loading attachment according to claim 6, it is characterised in that second inductive component also includes：
3rd sensor, for sensing the door-plate position, and for moving to the position for covering the opening in the door-plate
When send second stop signal to the control assembly；
4th sensor, for sensing the door-plate position, and for moving to the position for exposing the opening in the door-plate
When send second stop signal to the control assembly.
8. mask plate loading attachment according to claim 3, it is characterised in that the mask plate loading attachment also includes：
Communication component；
Tele-control system, for being communicated with the control assembly by the communication component, and is sent to the control assembly
First enabling signal and second enabling signal.
9. mask plate loading attachment according to claim 1, it is characterised in that first drive component includes first straight line
Motor, the first straight line motor is connected with the bracket, and the bracket can be driven to move back and forth；Second drive component
Including second straight line motor, the second straight line motor is connected with the door-plate, for driving the door-plate alternating translational.
10. a kind of display floater preparation system, it is characterised in that load including the mask plate described in any one of claim 1~9
Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710138160.6A CN106672660B (en) | 2017-03-09 | 2017-03-09 | Mask plate loading attachment and display panel preparation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710138160.6A CN106672660B (en) | 2017-03-09 | 2017-03-09 | Mask plate loading attachment and display panel preparation system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106672660A true CN106672660A (en) | 2017-05-17 |
| CN106672660B CN106672660B (en) | 2019-08-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710138160.6A Expired - Fee Related CN106672660B (en) | 2017-03-09 | 2017-03-09 | Mask plate loading attachment and display panel preparation system |
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| CN (1) | CN106672660B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109732204A (en) * | 2019-02-01 | 2019-05-10 | 大族激光科技产业集团股份有限公司 | Laser soldering device and method for laser welding |
| WO2022134500A1 (en) * | 2020-12-23 | 2022-06-30 | 长鑫存储技术有限公司 | Exposure machine |
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| JP2002164411A (en) * | 2000-09-14 | 2002-06-07 | Hirata Corp | Four opener |
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| CN105263642A (en) * | 2013-06-07 | 2016-01-20 | 迪芬巴赫机械工程有限公司 | Portal device for shielding the interior of a system housing |
| CN105044374A (en) * | 2015-07-22 | 2015-11-11 | 江西光明智能科技有限公司 | Online automatic moisture determination system |
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| CN109732204A (en) * | 2019-02-01 | 2019-05-10 | 大族激光科技产业集团股份有限公司 | Laser soldering device and method for laser welding |
| WO2022134500A1 (en) * | 2020-12-23 | 2022-06-30 | 长鑫存储技术有限公司 | Exposure machine |
| US11662667B2 (en) | 2020-12-23 | 2023-05-30 | Changxin Memory Technologies, Inc. | Exposure machine |
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