CN106646293A - High-precision large-range non-contact measurement apparatus and method for magnetoelastic strain - Google Patents
High-precision large-range non-contact measurement apparatus and method for magnetoelastic strain Download PDFInfo
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- CN106646293A CN106646293A CN201610895945.3A CN201610895945A CN106646293A CN 106646293 A CN106646293 A CN 106646293A CN 201610895945 A CN201610895945 A CN 201610895945A CN 106646293 A CN106646293 A CN 106646293A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/18—Measuring magnetostrictive properties
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Abstract
A high-precision large-range non-contact measurement apparatus and method for magnetoelastic strain are disclosed. The apparatus includes an electromagnet base, an electromagnet fixing bracket, a first electromagnet, a second electromagnet, a first supporting rod, a second supporting rod, a first knob, a second knob, a measurement fixing table, a sample stage, a first three-axis displacement table, a second three-axis displacement table, a first laser displacement sensor, a second laser displacement sensor, a first connection plate, a second connection plate, and a data processing device. In measuring the strain of a sample, the sample is fixed on the sample stage, the strain amount of the sample is calculated by the change of a reflection circuit generated on the surface of the sample by the laser light emitted from the first laser displacement sensor and the second laser displacement sensor, the process achieves non-contact measurement of the sample without the need for attaching a strain gauge on the surface of the sample, so the sample is not restricted by the maximum deformation of the strain gauge, the problem that the strain gauge hinders the deformation of the sample is also avoided, and the accuracy of the measurement is improved.
Description
Technical field
The present invention relates to field of measuring technique, more particularly to a kind of high precision and large measuring range non-contact measurement magneto-strain
Device and method.
Background technology
Ni-Mn-Ga ferromagnetic shape memory alloys not only have thermoelasticity of the conventional shape-memory alloy by Temperature Field Control
Shape memory effect, and with the magnetic shape memory effect by magnetic field control.Under conditions of externally-applied magnetic field, horse can be passed through
The reorientation of family name's body twin variant produces big magneto-strain, and magneto-strain amount can reach 6～12%.The ferromagnetic shapes of Ni-Mn-Ga
Shape memory alloys have in the field such as high-power underwater sonar, micro positioner, vibrations and noise control, linear motor, microwave device
Important application, it has also become a new generation after piezoelectric ceramics and magnetostriction materials drives and sensing material.Therefore it is accurate to survey
The magneto-strain performance of amount Ni-Mn-Ga ferromagnetic shape memory alloys has and its important meaning to it in the application of engineering field
Justice.
Ni-Mn-Ga ferromagnetic shape memory alloys include the martensite A and martensite B of twin relation each other, in externally-applied magnetic field
In the presence of, Ni-Mn-Ga ferromagnetic shape memory alloys produce the martensite that the mechanism of magneto-strain is two twin relations each other
The reorientation of variant, its magneto-strain shows as shear strain, makes the sample of Ni-Mn-Ga ferromagnetic shape memory alloys, sample
Be shaped as cuboid, when magnetic direction is parallel with the easy axis of the martensite A of sample, the size meeting of martensite A
Shorten, the size of martensite B will extend, conversely, when magnetic direction is parallel with the easy axis of the martensite B of sample
When, the size of martensite B can shorten, and the size of martensite A will extend, and show that i.e. sample can be in the effect in magnetic field on sample
Under, realize the elongation of length direction, the shortening of width or the shortening of length direction, the elongation of width, and sample
Be negligible the change in size of short transverse is less, thus can only the strain of measuring samples and magnetic field parallel direction or
Person's only measuring samples can characterize its magneto-strain performance with the strain of magnetic field vertical direction.
At present, the method for measuring Ni-Mn-Ga ferromagnetic shape memory alloys magneto-strains is entered by the way of patch foil gauge
Row measurement, also known as contact type measurement, the sample that will post foil gauge is placed in magnetic field, when sample under the influence of a magnetic field, produce
During raw magneto-strain, the size of foil gauge can simultaneously change with the size of sample, when the size of foil gauge changes, should
Becoming the resistance value of piece can change, and by data collecting card and acquisition software the voltage that foil gauge resistance change is produced is read
Signal, can calculate the strain value of sample.But find during being measured using foil gauge method, due to Ni-Mn-
The magneto-strain of Ga ferromagnetic shape memory alloys is very big, maximum strain amount 12%, if that is, sample length size is 10mm,
Its maximum strain amount can reach 1.2mm, but the deflection of foil gauge itself is limited, when the dependent variable of sample is more than foil gauge most
During aximal deformation value, even if sample continues to produce strain, the size of foil gauge will not continue to, as the size of sample changes simultaneously, make
The data that must the be measured deformation quantity actual less than sample, simultaneously as, foil gauge is to bond on the surface of the samples, works as sample
When the amount of being deformed is larger, being bonded in the foil gauge of sample surfaces can hinder the deformation of sample, therefore the method for contact type measurement
The precision of measurement result can be affected.
The content of the invention
In order to solve present in prior art when the dependent variable of sample is more than the maximum deformation quantity of foil gauge, foil gauge
Size will not continue to as the size of sample changes simultaneously so that the data of the measurement deformation quantity actual less than sample, and
When the sample amount of being deformed is larger, being bonded in the foil gauge of sample surfaces can hinder the problem of deformation of sample, on the one hand, this
Inventive embodiments provide a kind of device of high precision and large measuring range non-contact measurement magneto-strain, and described device includes：Electromagnetism
Ferrum base, electric magnet fixed support, the first electric magnet, the second electric magnet, first support bar, second support bar, the first knob,
Two knobs, measurement fixed station, sample stage, the first three-shaft displacement platform, the second three-shaft displacement platform, first laser displacement transducer, the
Dual-laser displacement transducer, the first connecting plate, the second connecting plate and data processing equipment；
Electric magnet fixed support is inclined and is fixed on electric magnet base, and electric magnet fixed support is provided with mounting groove, and first is electric
Magnet and the second electric magnet are separately mounted to the both sides of mounting groove, and the side of close second electric magnet of the first electric magnet is welded with
One conical cartridge, the side of close first electric magnet of the second electric magnet is welded with the second conical cartridge, first support bar
Between the first electric magnet and electric magnet base, second support bar is supported between the second electric magnet and electric magnet base for support, the
One knob is connected through electric magnet fixed support with the first electric magnet, and the second knob is through electric magnet fixed support and the second electromagnetism
Ferrum connects；
Measurement fixed station includes horizontal plate, perpendicular plate, fixed block, the 3rd connecting plate and the 4th connecting plate, and horizontal plate is located at
Between first electric magnet and the second electric magnet, perpendicular plate is supported between the bottom surface of horizontal plate side and electric magnet base, fixed
Block be arranged on horizontal plate opposite side top surface and fixed block be connected with the side of the 3rd connecting plate, the opposite side of the 3rd connecting plate and
4th connecting plate connects, and the angle of inclination of the 4th connecting plate is identical with the support bracket fastened angle of inclination of electric magnet, and the 4th connection
Plate is arranged on electric magnet fixed support；
Sample stage is arranged on the center of measurement fixed station, and the first three-shaft displacement platform and the second three-shaft displacement platform are arranged on measurement
On fixed station, the first three-shaft displacement platform and the second three-shaft displacement platform are positioned at the both sides of sample stage, the center of the first three-shaft displacement platform
It is vertical with the line at the center of the first electric magnet and the center of the second electric magnet with the line at the center of the second three-shaft displacement platform；
First laser displacement transducer is arranged in the Z-direction adjustment block of the first three-shaft displacement platform by the first connecting plate,
Second laser displacement transducer is arranged in the Z-direction adjustment block of the second three-shaft displacement platform by the second connecting plate；
The first laser displacement transducer and the second laser displacement transducer are filled respectively with the data processing
Connection is put, first electric magnet and second electric magnet are connected respectively with the data processing equipment.
On the other hand, embodiments providing one kind should using the high precision and large measuring range non-contact measurement mangneto
The method of the measurement device magneto-strain of change, methods described includes：
Step 1：By sample fixed placement on the sample stage, the first laser displacement transducer and described the are opened
Dual-laser displacement transducer, adjusts the first three-shaft displacement platform, makes the laser that first laser displacement transducer sends be in sample
First face of product, adjusts the second three-shaft displacement platform, makes the laser that second laser displacement transducer sends be in the of sample
Two faces, the first face and the second face it is parallel to each other；
Step 2：Being set by data processing equipment needs the field value of measurement, under the influence of a magnetic field, the of sample
Simultaneously produce change in displacement respectively with the second face, the reflected light path for locating laser on the first face changes, and is in the second face
On the reflected light path of laser change, make first laser displacement transducer and second laser displacement transducer produce voltage letter
Number, when magnetic field size reaches setting value, data processing equipment reads the first voltage letter that first laser displacement transducer is produced
Number, read the second voltage signal that second laser displacement transducer is produced；
Step 3：First voltage signal and second voltage signal are changed into digital signal by data processing equipment, and according to electricity
Pressure and the linear corresponding relation of change in displacement value, calculate respectively the corresponding change in displacement value Δ L of first voltage signal1And the
The corresponding change in displacement value Δ L of two voltage signals2, and the dependent variable of sample is calculated according to equation below：
Wherein, ε is the dependent variable of sample, and L is the initial length or width of sample.
The device of the high precision and large measuring range non-contact measurement magneto-strain in the embodiment of the present invention, in measurement Ni-Mn-Ga
During the strain of ferromagnetic shape memory alloys sample, projected by first laser displacement transducer and second laser displacement transducer
The reflex circuit that laser is produced in sample surfaces change come calculate sample generation dependent variable, in the process without the need for and sample
Contacted, realized the non-contact measurement to sample, so without the need for pasting foil gauge on the surface of sample, therefore, sample exists
During straining will not strained maximum deformation quantity restriction, it also avoid being bonded in the foil gauge of sample surfaces
Hinder the problem of the deformation of sample so that the data of measurement accurately, improve the precision of measurement, wherein first laser displacement sensing
The maximum range of device and second laser displacement transducer is 2mm, therefore the maximum displacement changing value of the sample that can be measured is
4mm, and then allow that the range of dependent variable that the device measures is larger, the device in the present invention is easy to operate, and makes
Process is simple, can be promoted in experiment interior, is capable of the mangneto of effectively measuring Ni-Mn-Ga ferromagnetic shape memory alloys
Strain property, to Ni-Mn-Ga ferromagnetic shape memory alloys high-power underwater sonar, micro positioner, vibrations and it is noise control,
Significance is played in the research in the fields such as linear motor, microwave device.
Description of the drawings
Technical scheme in order to be illustrated more clearly that the embodiment of the present invention, below will be to making needed for embodiment description
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for
For those of ordinary skill in the art, on the premise of not paying creative work, can be obtaining other according to these accompanying drawings
Accompanying drawing.
Fig. 1 is the structure of the device of the high precision and large measuring range non-contact measurement magneto-strain that the embodiment of the present invention one is provided
Schematic diagram；
Fig. 2 is the section of the device of the high precision and large measuring range non-contact measurement magneto-strain that the embodiment of the present invention one is provided
Figure；
Fig. 3 is the local of the device of the high precision and large measuring range non-contact measurement magneto-strain that the embodiment of the present invention one is provided
Schematic diagram；
Fig. 4 is the measurement of the device of the high precision and large measuring range non-contact measurement magneto-strain that the embodiment of the present invention one is provided
Schematic diagram；
Fig. 5 is the flow chart that the data processing equipment that the embodiment of the present invention two is provided measures magneto-strain；
Fig. 6 is that the device of the high precision and large measuring range non-contact measurement magneto-strain that the embodiment of the present invention two is provided is fixed to certain
The strain curve obtained after measuring to solidification Ni-Mn-Ga ferromagnetic shape memory alloys samples.
Wherein,
1 electric magnet base；2 electric magnet fixed supports, 21 mounting grooves；3 first electric magnet；
4 second electric magnet, 41 electromagnet coils, 42 magnetic poles, 43 soft magnetic cores；5 first support bars；6 second support bars；7
One knob；8 second knobs；
9 measurement fixed stations, 91 horizontal plates, 92 perpendicular plates, 93 fixed blocks；
10 sample stages；
11 first three-shaft displacement platforms, 111Z directions adjustment block, 112Y directions upper setting block, adjustment block under 113Y directions,
114X directions upper setting block, adjustment block under 115X directions, the firm banking of 116 first three-shaft displacement platforms；
12 second three-shaft displacement platforms, 121Z directions adjustment block, 122Y directions upper setting block, adjustment block under 123Y directions,
124X directions upper setting block, adjustment block under 125X directions, 126 firm bankings；
13 first laser displacement transducers；14 second laser displacement transducers；15 first connecting plates；16 second connecting plates；
17 samples, the first face of 17A samples, the second face of 17B samples；
The conical cartridges of A first；The conical cartridges of B second.
Specific embodiment
In order to solve present in prior art when the dependent variable of sample is more than the maximum deformation quantity of foil gauge, foil gauge
Size will not continue to as the size of sample changes simultaneously so that the data of the measurement deformation quantity actual less than sample, and
When the sample amount of being deformed is larger, being bonded in the foil gauge of sample surfaces can hinder the problem of deformation of sample, and the present invention is real
Example is applied there is provided a kind of device of high precision and large measuring range non-contact measurement magneto-strain, as shown in figure 1, and referring to Fig. 2 and Tu
3, the device includes：Electric magnet base 1, electric magnet fixed support 2, the first electric magnet 3, the second electric magnet 4, first support bar 5,
Second support bar 6, the first knob 7, the second knob 8, measurement fixed station 9, sample stage 10, the first three-shaft displacement platform the 11, the 2nd 3
Axle position moving stage 12, first laser displacement transducer 13, second laser displacement transducer 14, the first connecting plate 15, the second connecting plate
16 and data processing equipment；
Electric magnet fixed support 2 is inclined and is fixed on electric magnet base 1, and electric magnet fixed support 2 is provided with mounting groove 21, the
One electric magnet 3 and the second electric magnet 4 are separately mounted to the both sides of mounting groove 21, and the one of close second electric magnet 4 of the first electric magnet 3
Side is welded with the first conical cartridge A, and the side of close first electric magnet 3 of the second electric magnet 4 is welded with the second conical cartridge
B, first support bar 5 is supported between the first electric magnet 3 and electric magnet base 1, and second support bar 6 is supported on the second electric magnet 4
And electric magnet base 1 between, the first knob 7 is connected through electric magnet fixed support 2 with the first electric magnet 3, and the second knob 8 is passed through
Electric magnet fixed support 2 is connected with the second electric magnet 4；
In embodiments of the present invention, the first conical cartridge A can be adjusted by rotating the first knob 7 and the second knob 8
The distance between cartridge B conical with second, the first electric magnet 3 and the second electric magnet 4 can adopt the model of certain company's production
For the electric magnet of EM7, as shown in Fig. 2 the second electric magnet 4 includes electromagnet coil 41, magnetic pole 42 and soft magnetic core 43, the first electromagnetism
Ferrum 3 is identical with the structure of the second electric magnet 4；
Measurement fixed station 9 includes horizontal plate 91, perpendicular plate 92, fixed block 93, the 3rd connecting plate 94 and the 4th connecting plate 95,
Horizontal plate 91 is located between the first electric magnet 3 and the second electric magnet 4, and perpendicular plate 92 is supported on the bottom surface of the side of horizontal plate 91 and electricity
Between Magnet base 1, fixed block 93 is arranged on the top surface of the opposite side of horizontal plate 91 and the one of the connecting plate 94 of fixed block 93 and the 3rd
Side connects, and the opposite side of the 3rd connecting plate 94 is connected with the 4th connecting plate 95, the angle of inclination of the 4th connecting plate 95 and electric magnet
The angle of inclination of fixed support 2 is identical, and the 4th connecting plate 95 is arranged on electric magnet fixed support 2；
In embodiments of the present invention, horizontal plate 91, perpendicular plate 92, fixed block 93, the 3rd connecting plate 94 and the 4th connecting plate
95 can be sheet metal, for example, can be high strength alumin ium alloy, and M6 × 20 can be adopted between perpendicular plate 92 and electric magnet base 1
Bolt connection, i.e. the diameter of thread is 6mm, reach for 20mm bolt, the bottom surface of perpendicular plate 92 and the side of horizontal plate 91
The bolt connection of M6 × 20 can be adopted, M10 × 30 can be adopted between fixed block 93 and the top surface of the opposite side of horizontal plate 91
Bolt connection, can adopt the bolt connection of M10 × 30, the 3rd connecting plate 94 and the between the connecting plate 94 of fixed block 93 and the 3rd
The bolt connection of M10 × 20 can be adopted between four connecting plates 95；
Sample stage 10 is arranged on the center of measurement fixed station 9, and the first three-shaft displacement platform 11 and the second three-shaft displacement platform 12 are pacified
It is mounted on measurement fixed station 9, the first three-shaft displacement platform 11 and the second three-shaft displacement platform 12 are located at the both sides of sample stage 10, the one or three
The center and the second electric magnet of the line at the center of the center of axle position moving stage 11 and the second three-shaft displacement platform 12 and the first electric magnet 3
The line at 4 center is vertical；
First laser displacement transducer 13 is adjusted by the Z-direction that the first connecting plate 15 is arranged on the first three-shaft displacement platform 11
On block 111, second laser displacement transducer 14 is adjusted by the Z-direction that the second connecting plate 16 is arranged on the second three-shaft displacement platform 12
On block 121；
In embodiments of the present invention, sample stage 10 may be mounted at the center of horizontal plate 91, be connected using the bolt of M4 × 20
Connect；
The first three-shaft displacement platform 11 and the second three-shaft displacement platform 12 in the present invention can adopt the model of certain company's production
For the xyz three-shaft displacement platforms of LV-612, as shown in Fig. 2 the first three-shaft displacement platform 11 can be adjusted in vertical Z-direction, enter
And driving first laser displacement transducer 13 to be moved up and down, the first three-shaft displacement platform 11 can also respectively in the X of horizontal plane
Direction and Y-direction are adjusted, and then drive first laser displacement transducer 13 to be moved in the horizontal plane, and the one or three
Axle position moving stage 11 includes Z-direction adjustment block 111, Y-direction upper setting block 112, adjustment block 113 under Y-direction, X-direction upper setting block
114th, adjustment block 115 and firm banking 116 under X-direction；Second three-shaft displacement platform 12 can be adjusted in vertical Z-direction, enter
And driving second laser displacement transducer 14 to be moved up and down, the second three-shaft displacement platform 12 can also respectively in the X of horizontal plane
Direction and Y-direction are adjusted, and then drive second laser displacement transducer 14 to be moved in the horizontal plane, and the two or three
Axle position moving stage 12 includes Z-direction adjustment block 121, Y-direction upper setting block 122, adjustment block 123 under Y-direction, X-direction upper setting block
124th, adjustment block 125 and firm banking 126 under X-direction；Each axle of first three-shaft displacement platform 11 and the second three-shaft displacement platform 12
Stroke be ± 21mm, wherein, the fixed bottom of the three-shaft displacement platform 12 of firm banking 116 and second of the first three-shaft displacement platform 11
Seat 126 being bolted on horizontal plate 91 using M4 × 20；
First laser displacement transducer 13 and second laser displacement transducer 14 in the embodiment of the present invention can adopt certain
The laser displacement sensor of the model MTI LTS-025-02 of company's production, the digital resolution of the laser displacement sensor is
0.038 micron, dynamic resolution is 0.12 micron, and measurement range can be measured for ± 1mm, i.e. each laser displacement sensor
The change in displacement value of sample in -1mm between+1mm, therefore, be total to by two laser displacement sensors in the embodiment of the present invention
Same to be inductively measured so that the maximum range that can be measured is 4mm, the displacement that each laser displacement sensor can be measured becomes
Between -1mm to+1mm, it is -0.9V to+0.9V that change in displacement be worth corresponding laser displacement sensor to produce voltage to change value,
The voltage that the laser displacement sensor is produced is worth linear with change in displacement.
The first connecting plate 15 and the second connecting plate 16 in the embodiment of the present invention can use sheet metal, such as high-strength aluminum
Sheet alloy is made, and the first connecting plate 15 can adopt the bolt of M4 × 10 to adjust with the Z-direction of the first three-shaft displacement platform 11 respectively
Monoblock 111 and first laser displacement transducer 13 connect, and the second connecting plate 16 can adopt the bolt of M4 × 10 respectively with second
The Z-direction adjustment block 121 and second laser displacement transducer 14 of three-shaft displacement platform 12 connects.
In prior art, the side of close second electric magnet 4 of the first electric magnet 3 is provided with a cartridge, and the second electric magnet 4 connects
The side of nearly first electric magnet 3 also is provided with a cartridge, and existing two cartridge sizes are larger, in the process of measurement magneto-strain
In, if wanting to obtain larger magnetic field, the cartridge on two blocks of electric magnet must from it is close, when the distance between cartridge is nearer,
Because the size of cartridge is larger, interference can be produced with the first displacement transducer and second displacement sensor, therefore, in order to both ensure
Magnetic field size prevents cartridge and two displacement transducers from producing interference again, and the embodiment of the present invention is on the cartridge of the first electric magnet 3
The conical cartridge A of welding first, the conical cartridge B of welding second on the cartridge of the second electric magnet 4, the first conical cartridge A
The shape of cartridge B conical with second is all the frustum of a cone, and the wherein bottom surface of the frustum of a cone welds together respectively with existing cartridge,
The diameter of the top surface of the frustum of a cone is set to 20mm, and basal diameter is set to 76mm, and the height of the frustum of a cone is set to 38mm, thus,
Normal mounting first laser displacement transducer 13 and second laser displacement transducer 14 are can ensure that, and when the larger magnetic field of needs
When, even if the distance between conical cartridge B of the first cone cartridge A and second very littles, also will not pass to first laser displacement
Sensor 13 and second laser displacement transducer 14 produce impact.
In the embodiment of the present invention, first laser displacement transducer 13 and second laser displacement transducer 14 are filled with data processing
Connection is put, wherein, data processing equipment can be computer, as shown in figure 4, the high precision and large measuring range for the present invention is contactless
The measuring principle figure of the device of measurement magneto-strain, test philosophy is as follows：When the magneto-strain of measuring samples 17 is needed, can be with
The sample 17 of rectangular structure is first made, sample 17 is fixed on sample stage 10, when the first electric magnet 3 and the second electric magnet 4
Between when there is no magnetic field, the length of sample is L；When being powered to the first electric magnet 3 and the second electric magnet 4, the He of the first electric magnet 3
Magnetic field is produced between second electric magnet 4, magnetic direction perpendicular to paper, under the influence of a magnetic field, if the now strain of sample 17
State is the length elongation of sample, and it is i.e. the first face of sample 17 shown in the dotted line in figure now to produce the sample 17 after strain
The displacement that 17A and the second face 17B are generated, therefore, the reflected light path of the laser now penetrated on the first face 17A becomes
Change, first laser displacement transducer 13 produces first voltage signal according to the laser being reflected back, and first voltage signal is passed through
Data line transfer is to data processing equipment, while the reflected light path of the laser penetrated on the second face 17B also changes, second swashs
Optical displacement sensor 14 produces second voltage signal according to the laser being reflected back, and second voltage signal is passed through into data line transfer
To data processing equipment, first voltage signal and second voltage signal are converted into digital signal, and root by data processing equipment
(exist between the voltage and change in displacement value of laser displacement sensor generation according to the linear relationship between voltage and change in displacement value
Linear relationship for known, when laser displacement sensor is bought, producer can provide the linear relationship), calculate first voltage
The corresponding Δ L of signal1And the corresponding Δ L of second voltage signal2, Δ L1The as change in displacement value in the first face of sample, Δ L2
The as change in displacement value in the second face of sample, and the dependent variable of sample is calculated according to formula (1)：
Wherein, ε is the dependent variable of sample, and L is the initial length or width of sample.
In embodiments of the present invention, data processing equipment is also connected with the first electric magnet 3 and the second electric magnet 4 respectively, and
One electric magnet 3 and the second electric magnet 4 are connected with power supply, and by data processing equipment control input the electric current of two electric magnet is given
Size further controls magnetic field intensity, can set the field value for needing measurement, data processing equipment by data processing equipment
According to the field value for setting respectively to the first electric magnet 3 and the input current of the second electric magnet 4, the first electric magnet 3 and second is made
The magnetic field that electric magnet 4 is produced reaches required numerical value, and the strain to sample 17 under the field value is measured.
The device of the high precision and large measuring range non-contact measurement magneto-strain in the embodiment of the present invention, in measurement Ni-Mn-Ga
During the strain of ferromagnetic shape memory alloys sample, penetrated by first laser displacement transducer 13 and second laser displacement transducer 14
The reflex circuit that the laser for going out is produced in sample surfaces change come calculate sample generation dependent variable, in the process without the need for
Sample is contacted, and realizes the non-contact measurement to sample, so without the need for pasting foil gauge on the surface of sample, therefore, sample
Product during straining will not strained maximum deformation quantity restriction, it also avoid being bonded in sample surfaces should
Become the problem that piece hinders the deformation of sample so that the data of measurement accurately, improve the precision of measurement, wherein first laser displacement
The maximum range of sensor 13 and second laser displacement transducer 14 is 2mm, therefore the maximum displacement of the sample that can be measured
Changing value is 4mm, and then allows the range of the dependent variable that the device measures larger, and the device in the present invention is easy to operate,
And manufacturing process is simple, can be promoted in experiment interior, being capable of effectively measuring Ni-Mn-Ga ferromagnetic shape memories conjunction
The magneto-strain performance of gold, to Ni-Mn-Ga ferromagnetic shape memory alloys in high-power underwater sonar, micro positioner, shake and make an uproar
Significance is played in the research in the fields such as acoustic control, linear motor, microwave device.
Embodiment two
The high precision and large measuring range non-contact measurement mangneto embodiments provided in a kind of use embodiment one should
The method of the measurement device magneto-strain of change, the method includes：
Step 1：By sample fixed placement on sample stage 10, first laser displacement transducer 13 and second laser position are opened
Displacement sensor 14, adjusts the first three-shaft displacement platform 11, makes the laser that first laser displacement transducer 13 sends be in the of sample
Simultaneously (17A), the second three-shaft displacement platform 12 is adjusted, makes the laser that second laser displacement transducer 14 sends be in the second of sample
Face (17B), the first face (17A) and the second face (17B) is parallel to each other；
Step 2：Being set by data processing equipment needs the field value of measurement, under the influence of a magnetic field, sample 17
First face 17A and the second face 17B produce respectively change in displacement, and the reflected light path of the laser being on the first face 17A changes,
The reflected light path of the laser being on the second face 17B changes, and makes first laser displacement transducer 13 and second laser displacement
Sensor 14 produces voltage signal, and when magnetic field size reaches setting value, data processing equipment reads first laser displacement sensing
The first voltage signal that device 13 is produced, reads the second voltage signal that second laser displacement transducer 14 is produced；
Step 3：First voltage signal and second voltage signal are changed into digital signal by data processing equipment, and according to electricity
Pressure and the linear corresponding relation of change in displacement value, calculate respectively the corresponding change in displacement value Δ L of first voltage signal1And the
The corresponding change in displacement value Δ L of two voltage signals2, and dependent variable ε of sample 17 is calculated according to formula (1).
In embodiments of the present invention, as shown in figure 5, the flow process for measuring magneto-strain for the data processing equipment in the present invention
Figure, can open first laser displacement transducer 13 and second laser displacement transducer 14 by data processing equipment, and first swashs
Optical displacement sensor 13 and second laser displacement transducer 14 can be connected by RS232 serial ports with data processing equipment.May be used also
To control the magnetic field that the first electric magnet 3 and the second electric magnet 4 are produced by data processing equipment, the first electric magnet 3 and second is electric
Magnet 4 can be connected by RS232 serial ports with data processing equipment, and being set by data processing equipment needs the magnetic field number of measurement
Value, in embodiments of the present invention, can draw the magnetic for needing measurement by setting maximum field numerical value E and sampling number S
Flow Field Numerical, wherein, E>0, S is the integer more than 0, wherein it is desired to the field value of measurement is respectively E/S, 2E/S, 3E/S, 4E/
S ... SE/S, during the intensity in magnetic field progressively increases to E from zero, when magnetic field reaches the numerical value for needing measurement, then
Data processing equipment reads first voltage signal and the reading second laser displacement biography that first laser displacement transducer 13 is produced
The second voltage signal that sensor 14 is produced, according to voltage signal and the linear relationship of change in displacement value, draws first voltage signal
Corresponding change in displacement value Δ L1And the corresponding change in displacement value Δ L of second voltage signal2, thus, can be according to formula (1)
Draw under the field value of each needs measurement, the dependent variable of sample 17；
For example, maximum field is set as 10000 oersteds, sampled point is 100 points, then magnetic field progressively increases to from 0
During 10000 oersteds, first voltage signal and second voltage signal are read when magnetic field intensity reaches 100 oersted,
And magnetic field intensity sample 17 in 100 oersted is calculated according to the linear relationship and formula (1) of voltage and change in displacement value
Dependent variable；Read first voltage signal and second voltage signal when magnetic field intensity reaches 200 oersted, and according to voltage and
The linear relationship and formula (1) of change in displacement value calculate the dependent variable of magnetic field intensity sample 17 in 200 oersted；So
Analogize, first voltage signal and second voltage signal are read when magnetic field intensity reaches 10000 oersted, and according to voltage and position
The linear relationship and formula (1) for moving changing value calculates the dependent variable of magnetic field intensity sample 17 in 10000 oersted, now
Test has been completed, and data processing equipment derives data, and the data that test is obtained are showed in the way of strain curve.I.e.
By magnetic field intensity as x-axis, the corresponding dependent variable of each magnetic field intensity is as y-axis, you can make magneto-strain curve.
As shown in fig. 6, being that certain is oriented using the high precision and large measuring range non-contact measurement magneto-strain device of the present invention
The strain curve that solidification Ni-Mn-Ga ferromagnetic shape memory alloys samples are obtained after measuring, wherein, curve C1With curve C2Point
The strain value of the sample, such as curve C during magnetic field Biao Shi not applied and magnetic field is removed1It is shown, it is strong when actual magnetic field
When degree is less, it is difficult to there is reorientation in the martensite variants for driving sample, therefore, the strain value of sample is less, works as magnetic field intensity
During more than 2500 oersted, the strain value of sample is significantly increased, and in embodiments of the present invention, strain value is negative value representative sample
Size there occurs under the influence of a magnetic field elongation, and when magnetic field intensity reaches 10000 oersted, the strain value of sample has reached satisfies
With that is, the magneto-strain of the alloy can reach the maximum strain amount of 5000ppm, the i.e. alloy and can reach 0.5%；Such as curve
C2It is shown, during magnetic field intensity is gradually lowered from 10000 oersteds, the strain value of the sample somewhat increase before this after again
It is gradually reduced, this is because during magnetic field intensity constantly increases, martensite variants have occurred that reorientation, in magnetic field
During intensity is ever-reduced, there occurs the martensite variants of reorientation can not recover to original state, therefore, sample should
Variate can not return to size during beginning and end any magnetic field of applying at the beginning of the size of zero, i.e. sample can not be returned to.
The device of the high precision and large measuring range non-contact measurement magneto-strain in the embodiment of the present invention, is mainly used to measure
The magneto-strain of Ni-Mn-Ga ferromagnetic shape memory alloys, additionally, the material for displacement variable more than 0.12 micron, also may be used
With using its strain under the action of a magnetic field of the measurement device of high precision and large measuring range non-contact measurement magneto-strain of the present invention
Size.
The device of the high precision and large measuring range non-contact measurement magneto-strain in the embodiment of the present invention, in measurement Ni-Mn-Ga
During the strain of ferromagnetic shape memory alloys sample 17, by first laser displacement transducer 13 and second laser displacement transducer 14
The reflex circuit that the laser of injection is produced on the surface of sample 17 change come calculate sample 17 generation dependent variable, in the process
Without the need for being contacted with sample 17, the non-contact measurement to sample 17 is realized, so need not make to be pasted on the surface of sample 17
Foil gauge, therefore, sample 17 during straining will not strained maximum deformation quantity restriction, it also avoid gluing
Tie the problem that the foil gauge on the surface of sample 17 hinders the deformation of sample 17 so that the data of measurement accurately, improve measurement
Precision, the maximum range of wherein first laser displacement transducer 13 and second laser displacement transducer 14 is 2mm, therefore can be with
The maximum displacement changing value of the sample 17 of measurement is 4mm, and then allows the range of the dependent variable that the device measures larger,
Device in invention is easy to operate, and manufacturing process is simple, can be promoted in experiment interior, can be effectively measuring
The magneto-strain performance of Ni-Mn-Ga ferromagnetic shape memory alloys, to Ni-Mn-Ga ferromagnetic shape memory alloys it is high-power under water
Significance is played in the research in the field such as sonar, micro positioner, vibrations and noise control, linear motor, microwave device.
The foregoing is only presently preferred embodiments of the present invention, not to limit the present invention, all spirit in the present invention and
Within principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (2)
1. a kind of device of high precision and large measuring range non-contact measurement magneto-strain, it is characterised in that described device includes：Electromagnetism
Ferrum base (1), electric magnet fixed support (2), the first electric magnet (3), the second electric magnet (4), first support bar (5), second
Strut (6), the first knob (7), the second knob (8), measurement fixed station (9), sample stage (10), the first three-shaft displacement platform (11),
Second three-shaft displacement platform (12), first laser displacement transducer (13), second laser displacement transducer (14), the first connecting plate
(15), the second connecting plate (16) and data processing equipment；
Electric magnet fixed support (2) is inclined and is fixed on electric magnet base (1), and electric magnet fixed support (2) is provided with mounting groove
(21), the first electric magnet (3) and the second electric magnet (4) are separately mounted to the both sides of mounting groove (21), and the first electric magnet (3) is close to
The side of the second electric magnet (4) is welded with the first conical cartridge (A), and the one of close first electric magnet (3) of the second electric magnet (4)
Side is welded with the second conical cartridge (B), first support bar (5) be supported on the first electric magnet (3) and electric magnet base (1) it
Between, second support bar (6) is supported between the second electric magnet (4) and electric magnet base (1), and the first knob (7) is through electric magnet
Fixed support (2) is connected with the first electric magnet (3), and the second knob (8) is through electric magnet fixed support (2) and the second electric magnet
(4) connect；
Measurement fixed station (9) connects including horizontal plate (91), perpendicular plate (92), fixed block (93), the 3rd connecting plate (94) and the 4th
Fishplate bar (95), between the first electric magnet (3) and the second electric magnet (4), perpendicular plate (92) is supported on level to horizontal plate (91)
Between the bottom surface of plate (91) side and electric magnet base (1), fixed block (93) installed in horizontal plate (91) opposite side top surface and
Fixed block (93) is connected with the side of the 3rd connecting plate (94), and the opposite side of the 3rd connecting plate (94) and the 4th connecting plate (95) are even
Connect, the angle of inclination of the 4th connecting plate (95) is identical with the angle of inclination of electric magnet fixed support (2), and the 4th connecting plate (95)
On electric magnet fixed support (2)；
Sample stage (10) is installed in the center of measurement fixed station (9), the first three-shaft displacement platform (11) and the second three-shaft displacement platform
(12) in measurement fixed station (9), the first three-shaft displacement platform (11) and the second three-shaft displacement platform (12) are positioned at sample stage
(10) line and the first electromagnetism at the center of both sides, the center of the first three-shaft displacement platform (11) and the second three-shaft displacement platform (12)
The center of ferrum (3) is vertical with the line at the center of the second electric magnet (4)；
Z-direction of the first laser displacement transducer (13) by the first connecting plate (15) installed in the first three-shaft displacement platform (11) is adjusted
In monoblock (111), second laser displacement transducer (14) is by the second connecting plate (16) installed in the second three-shaft displacement platform (12)
Z-direction adjustment block (121) on；
The first laser displacement transducer (13) and the second laser displacement transducer (14) respectively with the data at
Reason device connection, first electric magnet (3) and second electric magnet (4) are connected respectively with the data processing equipment.
2. a kind of usage right requires the measurement device magneto-strain of the high precision and large measuring range non-contact measurement magneto-strain in 1
Method, it is characterised in that methods described includes：
Step 1：By sample (17) fixed placement on the sample stage (10), the first laser displacement transducer (13) is opened
With the second laser displacement transducer (14), the first three-shaft displacement platform (11) is adjusted, make first laser displacement transducer
(13) laser for sending is in first face (17A) of sample (17), adjusts the second three-shaft displacement platform (12), makes second laser
The laser that displacement transducer (14) sends is in second face (17B) of sample (17), and the first face (17A) and the second face (17B) is mutual
It is parallel；
Step 2：Being set by data processing equipment needs the field value of measurement, under the influence of a magnetic field, the of sample (17)
Simultaneously (17A) and the second face (17B) produces respectively change in displacement, and the reflected light path of the laser being on the first face (17A) occurs
Change, the reflected light path of the laser being on the second face (17B) changes, and makes first laser displacement transducer (13) and second
Laser displacement sensor (14) produces voltage signal, and when magnetic field size reaches setting value, data processing equipment reads first and swashs
The first voltage signal that Optical displacement sensor (13) is produced, reads the second voltage letter that second laser displacement transducer (14) is produced
Number；
Step 3：First voltage signal and second voltage signal are changed into digital signal by data processing equipment, and according to voltage with
The linear corresponding relation of change in displacement value, calculates respectively the corresponding change in displacement value Δ L of first voltage signal1And second is electric
The corresponding change in displacement value Δ L of pressure signal2, and the dependent variable of sample (17) is calculated according to equation below：
Wherein, ε is the dependent variable of sample (17), and L is the initial length or width of sample (17).
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| CN109100067A (en) * | 2018-07-26 | 2018-12-28 | 温州大学 | A kind of cold-heading force measuring method |
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| CN106646293B (en) | 2019-02-26 |
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