CN106622891B - 一种紫外辐照辅助等离子体聚合表面涂层装置及方法 - Google Patents
一种紫外辐照辅助等离子体聚合表面涂层装置及方法 Download PDFInfo
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- CN106622891B CN106622891B CN201611076332.3A CN201611076332A CN106622891B CN 106622891 B CN106622891 B CN 106622891B CN 201611076332 A CN201611076332 A CN 201611076332A CN 106622891 B CN106622891 B CN 106622891B
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- plasma
- plasma source
- vacuum chamber
- ultraviolet light
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Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 46
- 238000000576 coating method Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000006116 polymerization reaction Methods 0.000 title claims description 15
- 239000000178 monomer Substances 0.000 claims abstract description 45
- 239000012159 carrier gas Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 230000009977 dual effect Effects 0.000 claims abstract description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 230000006698 induction Effects 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims 5
- 210000002381 plasma Anatomy 0.000 abstract description 87
- 230000000379 polymerizing effect Effects 0.000 abstract description 7
- 230000008021 deposition Effects 0.000 abstract description 4
- 229920000642 polymer Polymers 0.000 abstract description 4
- 239000002994 raw material Substances 0.000 abstract description 4
- 238000007599 discharging Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 7
- 238000007259 addition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 239000002103 nanocoating Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
- B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Polymerisation Methods In General (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2016107871869 | 2016-08-30 | ||
CN201610787186 | 2016-08-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106622891A CN106622891A (zh) | 2017-05-10 |
CN106622891B true CN106622891B (zh) | 2023-12-01 |
Family
ID=58814846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201611076332.3A Active CN106622891B (zh) | 2016-08-30 | 2016-11-30 | 一种紫外辐照辅助等离子体聚合表面涂层装置及方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106622891B (zh) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1272142A (zh) * | 1997-09-29 | 2000-11-01 | 巴特勒记忆研究所 | 低蒸汽压化合物的等离子体增强化学沉积方法 |
CN1646238A (zh) * | 2002-04-19 | 2005-07-27 | 杜尔***有限公司 | 处理涂层的方法和装置 |
CN103930472A (zh) * | 2011-07-29 | 2014-07-16 | 艾德昂有限责任公司 | 一种通过电子束辐射、并通过气体产生的等离子和紫外辐射进行固化组合物的方法 |
-
2016
- 2016-11-30 CN CN201611076332.3A patent/CN106622891B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1272142A (zh) * | 1997-09-29 | 2000-11-01 | 巴特勒记忆研究所 | 低蒸汽压化合物的等离子体增强化学沉积方法 |
CN1646238A (zh) * | 2002-04-19 | 2005-07-27 | 杜尔***有限公司 | 处理涂层的方法和装置 |
CN103930472A (zh) * | 2011-07-29 | 2014-07-16 | 艾德昂有限责任公司 | 一种通过电子束辐射、并通过气体产生的等离子和紫外辐射进行固化组合物的方法 |
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Publication number | Publication date |
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CN106622891A (zh) | 2017-05-10 |
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Effective date of registration: 20180111 Address after: Yuqi Industrial Park East Ring Road 214183 Jiangsu city of Wuxi Province Applicant after: JIANGSU FAVORED NANOTECHNOLOGY Co.,Ltd. Address before: Jiangsu province Wuxi city Huishan District Qi Zhen Yu Yuqi Industrial Park East Ring Road Applicant before: WUXI RJ INDUSTRIES Co.,Ltd. |
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Effective date of registration: 20201029 Address after: Yuqi Industrial Park East Ring Road 214183 Jiangsu city of Wuxi Province Applicant after: JIANGSU FAVORED NANOTECHNOLOGY Co.,Ltd. Address before: 214183 Jiangsu Province, Wuxi city Huishan District Qi Zhen Yu Yuqi Industrial Park East Ring Road Applicant before: WUXI RJ INDUSTRIES Co.,Ltd. |
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Address after: No.182, East Ring Road, Yuqi supporting area, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Applicant after: Jiangsu feiwotai nanotechnology Co.,Ltd. Address before: 214183 East Ring Road, Yuqi Industrial Park, Wuxi City, Jiangsu Province Applicant before: Jiangsu Favored Nanotechnology Co.,Ltd. |
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