CN106611759A - 集成电力封装 - Google Patents
集成电力封装 Download PDFInfo
- Publication number
- CN106611759A CN106611759A CN201610941441.0A CN201610941441A CN106611759A CN 106611759 A CN106611759 A CN 106611759A CN 201610941441 A CN201610941441 A CN 201610941441A CN 106611759 A CN106611759 A CN 106611759A
- Authority
- CN
- China
- Prior art keywords
- conductor
- transistor
- dielectric medium
- medium structure
- coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims abstract description 71
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000005538 encapsulation Methods 0.000 claims description 48
- 238000010276 construction Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 14
- 230000005611 electricity Effects 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011469 building brick Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/043—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
- H01L23/051—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body another lead being formed by a cover plate parallel to the base plate, e.g. sandwich type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L24/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L24/80 - H01L24/90
- H01L24/92—Specific sequence of method steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0618—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/06181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
- H01L2224/331—Disposition
- H01L2224/3318—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/33181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/37147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/4005—Shape
- H01L2224/4009—Loop shape
- H01L2224/40095—Kinked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
- H01L2224/40139—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate with an intermediate bond, e.g. continuous strap daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/40235—Connecting the strap to a via metallisation of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/848—Bonding techniques
- H01L2224/84801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
本申请案涉及一种集成电力封装。集成电力封装包含具有第一表面的衬底及定位在所述衬底内的集成电路。至少一个电导体定位在所述第一表面与所述衬底上的另一点之间。至少一个晶体管电且机械耦合到所述至少一个第一导体。支撑结构电且机械耦合到所述至少一个晶体管,其中所述至少一个晶体管定位在所述衬底的所述第一表面与所述支撑结构之间。
Description
技术领域
本申请案涉及集成电力封装。
背景技术
集成电力封装传导高电流且需要在小占据面积中的良好的热性能以便被放置在小电子装置中。许多集成电力封装缺乏将集成电路(IC)放置在与高电流晶体管(例如MOSFET)的垂直堆叠中的能力,这是因为此类放置使热性能降级。
许多常规集成电力封装不具有在封装之上的暴露的金属,这降低了MOSFET及控制器的热性能。此外,常规封装使用相同过程步骤以使控制器与MOSFET互连,这导致降级的电性能。
发明内容
一种集成电力封装包含具有第一表面的衬底及定位在所述衬底内的集成电路。至少一个电导体定位在所述第一表面与所述衬底上的另一点之间。至少一个晶体管电且机械耦合到所述至少一个第一导体。支撑结构电且机械耦合到所述至少一个晶体管,其中所述至少一个晶体管定位在所述衬底的所述第一表面与所述支撑结构之间。
附图说明
图1是高电流电路的示意图。
图2是用于图1电路的集成电力封装的实例的侧面剖视图。
图3是图2的集成电力封装的衬底的俯视平面图。
图4是图2的集成电力封装的俯视平面图。
图5是描述用于图2的集成电力封装的实例制造方法的流程图。
具体实施方式
本文揭示实现高电力晶体管接近可控制所述晶体管的操作的集成电路的放置的装置,其中晶体管并排定位。图1是高电流电路100的示意图,其中电流I流过第一FET Q1及第二FET Q2。尽管本文描述FET,但电路100可用其它类型的晶体管替代FET。电流I在第一电压V1与第二电压V2之间流动。定位在第一FET Q1与第二FET Q2之间的节点N1具有电压V3。第一及第二FET Q1及Q2的栅极耦合到IC控制器106,IC控制器106控制栅极电压及流过第一及第二FET Q1及Q2的电流。流过第一及第二FET Q1及Q2的电流I产生可干扰IC控制器106的操作的热量。此外,电流I可能太高以至于无法通过IC控制器106。因此,第一及第二FET Q1及Q2通常定位在IC控制器106外部。本文所描述的电路及结构使IC控制器106能够接近第一及第二FET Q1及Q2定位在提供散热的集成电力封装中。参考图1描述的晶体管为示范性的且可应用其它配置,例如不同的P沟道及N沟道装置。
图2是用于图1电路100的集成电力封装200的实例的侧面剖视图,且图3是封装200的俯视平面图。封装200包含电介质结构202,其中IC控制器106附接到电介质结构202。电介质结构202包含在下文描述的多个导体。在图2的实例中,IC控制器106定位在电介质结构202内,但在其它实例中,IC控制器106附接到电介质结构202的其它部分或表面。在其它实例中,IC控制器106定位在电介质结构202内的其它位置中。电介质结构202由大体上电绝缘的材料(例如通常用于IC封装的制造中的电介质材料)制成。电介质材料包含基于聚合物的材料。
电介质结构202包含顶表面204(其有时被称为第一表面)及底表面206(其有时被称为第二表面)。另外,电介质结构202包含前表面208及后表面210。第一栅极垫214及第二栅极垫216定位在电介质结构202的顶表面204上。本文所描述的垫经说明为具有定位在其上的接合材料。第一栅极垫214充当用于第一FET Q1(图1)的栅极的导体,且第二栅极垫216充当用于第二FET Q2的栅极的导体。第一栅极垫214及第二栅极垫216可为将电子组件电且机械耦合到衬底及其它结构的焊垫。第一源极垫220及第二漏极垫222也定位在电介质结构202的顶表面204上。在IC封装200的配置中,第一FET Q1源极向下放置在第一源极垫220上且第二FET Q2漏极向下放置在第二漏极垫222上。在其它实施例中,FET可具有相对于电介质结构202的其它配置。第一源极垫220及第二漏极垫222可为将电子组件电且机械连接到衬底的焊垫。第一源极垫220及第二漏极垫222可具有本文描述的热及电性质。
电介质结构202包含将垫电连接到外部接触件及IC控制器106的多个导体。图2及3中所展示的导体仅用于说明目的且其它导体配置可定位在电介质结构202内。第一栅极导体230将第一栅极垫214耦合到IC控制器106,且第二栅极导体232将第二栅极垫216耦合到IC控制器106。第一栅极导体230及第二栅极导体232传导第一及第二FET Q1及Q2与IC控制器106之间的栅极电流。因为第一及第二栅极导体230及232传导栅极电流,电流流动相对较低,所以第一及第二栅极导体230及232可相对较小。其它低电流导体(未图示)可定位在电介质结构202内以将外部连接器耦合到IC控制器106。
电介质结构202内的其它导体用以将电流I(图1中所展示)传导通过第一FET Q1及第二FET Q2。第一源极导体240在电介质结构202的外部的点与第一源极垫220之间传导电流。第二漏极导体242在电介质结构202的外部的点与第二漏极垫222之间传导电流。本文所描述的外部点经展示为处于电介质结构202的底表面206上;然而,外部点可定位在电介质结构202上的任何地方。导体240及242由低电阻材料制成且足够大以容纳电流I以便于最小化当电流I流过导体240及242时的损失。在一些实例中,电流I可在1.0到100Amp的范围中。在此类实施例中,导体240及242应小于10mΩ的电阻,且在一些实例中,电阻小于1.0mΩ。
第一FET Q1电且机械耦合到第一栅极垫214及第一源极垫220。更具体来说,第一FET Q1的栅极电且机械耦合到第一栅极垫214且源极电且机械耦合到第一源极垫220。第二FET Q2电且机械耦合到第二栅极垫216及第二漏极垫222。更具体来说,第二FET Q2的栅极电且机械耦合到第二栅极垫216且漏极电且机械耦合到第二漏极垫222。在一些实例中,将FET Q1及Q2接合到其相应垫的材料具有大于五瓦每米开尔文(W/mK)的热导率及小于500微欧姆厘米(uΩCm)的电阻率且具有介于10微米与100微米之间的厚度。
另外参考图4,导体250电且机械耦合到第一FET Q1及第二FET Q2两者。导体250有时被称为“支撑结构”。在图2的实施例中,导体250具有水平部分252及垂直部分254。由于电流I流过水平部分252,因此水平部分252的材料使得其能够容纳电流I且电且机械耦合到FET Q1及Q2两者。举例来说,导体250可由铜或类似材料制成且可具有0.025mm到0.5mm之间的厚度。水平部分252具有顶表面256(其有时被称为第一表面)及底表面258(其有时被称为第二表面)。底表面258具有将第一及第二FET Q1及Q2电且机械耦合到水平部分252的第一漏极垫260及第二源极垫262。水平部分252也可用于从封装200散热。举例来说,当从图4的俯视平面图观看时,水平部分252可比第一及第二FET Q1及Q2大0.5mm到5mm。因此,水平部分252可延伸超越第一及第二FET Q1及Q2的占据面积,这使热量能够从第一及第二FET Q1及Q2传递到水平部分252。热量接着可通过水平部分252传递远离封装200。选择支撑结构250的特定厚度、内容及尺寸以及电且机械互连件以便充分将由第一及第二FET Q1及Q2产生的热量传导掉。
在一些实例中,垂直部分254将导体250固定到电介质结构202且将电压V3耦合到电介质结构202。导体250的电势是图1的电压V3。在图2的实例中,电势通过导体268传导到电介质结构202的底表面206。在图1的电路100的一些实例中,由于电流I流过导体268,因此可以在损失最小的情况下容纳电流I的方式来制造导体268。将第一及第二FET Q1及Q2耦合到导体250的材料可与将第一及第二FET Q1及Q2耦合到垫220及222的材料相同或与其具有相同电及/或热特性。
如图4中所展示,导体250的水平部分252以覆盖FET Q1及Q2两者的方式延伸以便于提供有效的热传递且容纳电流I(图1)。举例来说,水平部分252可为传导热量的金属装置且其可暴露到封装200的外部。当使用封装202时,用于从水平部分252传递热量的散热器或其它装置或方法可最接近水平部分252放置。
封装200具有较之常规封装的许多优点。举例来说,封装200具有定位在IC控制器106之上的第一及第二FET Q1及Q2,这减小了封装200的尺寸。另外,封装200可使导体250的水平部分252暴露,这增强了封装200的热性能。
针对封装200的制造技术提供较之常规封装的进一步增强。电介质结构202与IC控制器106一起制造且导体定位在其中。第一FET Q1及第二FET Q2电且机械耦合到水平部分252的底表面258。在一些实例中,具有上文所描述的电及热性质的焊料或环氧树脂用于耦合FET Q1及Q2。接着,将导体250与FET Q1及Q2的组合放置到衬底202的顶表面204使得FETQ1及Q2接触其在电介质结构202的顶表面204上的适当垫。在其它实例中,FET Q1及Q2耦合到电介质结构202的顶表面204且导体250随后耦合到FET Q1及Q2及电介质结构202。
图5的流程图500描述制造封装200的实例。步骤502包含将集成电路定位在电介质结构内,其中电介质结构具有表面。步骤504包含将第一导体定位在所述表面与所述电介质结构上的另一点之间。步骤506包含将第二导体定位在所述表面与所述电介质结构上的另一点之间。步骤508包含将第一晶体管耦合到导电支撑结构。步骤510包含将第二晶体管耦合到所述支撑结构。步骤512包含将所述支撑结构、所述第一晶体管及所述第二晶体管的组合耦合到所述电介质结构,其中所述第一晶体管耦合到所述第一导体且所述第二晶体管耦合到所述第二导体。
本文已明确地详细描述集成电力封装及制造方法的某些实施例。所属领域的技术人员在阅读本发明之后将想到替代实施例。除了如由现有技术限制,权利要求书希望被广泛解释以涵盖所有此类替代实施例。
Claims (23)
1.一种集成电力封装,其包括:
电介质结构,其具有第一表面;
集成电路,其定位在所述电介质结构内;
至少一个导体,其定位在所述第一表面与所述电介质结构上的另一点之间;
至少一个晶体管,其电且机械耦合到所述至少一个第一导体;及
支撑结构,其电且机械耦合到所述至少一个晶体管,其中所述至少一个晶体管定位在所述电介质结构的所述第一表面与所述支撑结构之间。
2.根据权利要求1所述的封装,其中所述支撑结构具有介于0.025mm与0.5mm之间的厚度。
3.根据权利要求1所述的封装,其进一步包括将所述至少一个晶体管电且机械耦合到所述至少一个第一导体的材料,其中所述材料具有大于五瓦每米开尔文(W/mK)的热导率。
4.根据权利要求1所述的封装,其进一步包括将所述至少一个晶体管电且机械耦合到所述至少一个第一导体的材料,其中所述材料具有小于500微欧姆厘米(uΩCm)的电阻率。
5.根据权利要求1所述的封装,其中所述至少一个电导体包含定位在所述至少一个第一晶体管的栅极与所述集成电路之间的第一导体,及定位在所述电介质结构的外表面上的点与所述至少一个晶体管的漏极或源极中的一者之间的第二导体。
6.根据权利要求1所述的封装,其中所述至少一个晶体管的所述漏极或源极中的一者电且机械耦合到所述第一导体,且其中所述漏极或源极中的另一者电且机械耦合到所述支撑结构。
7.根据权利要求1所述的封装,其中所述电介质结构具有第二表面且其中所述第一导体在所述第一表面与所述第二表面之间延伸。
8.根据权利要求7所述的封装,其中所述第二表面相对于所述第一表面而定位。
9.根据权利要求1所述的封装,其中所述至少一个晶体管包含多个晶体管,所述多个晶体管中的每一者定位在所述电介质结构的所述第一表面与所述支撑结构之间。
10.根据权利要求9所述的封装,其中所述多个晶体管包含:
第一晶体管,其具有电且机械耦合到所述电介质结构的所述第一导体的源极及电且机械耦合到所述支撑结构的漏极;及
第二晶体管,其具有电且机械耦合到所述电介质结构的第二导体的漏极及电且机械耦合到所述支撑结构的源极。
11.根据权利要求10所述的封装,其中所述第二导体延伸到所述电介质结构的第二表面。
12.根据权利要求9所述的封装,其中所述支撑结构在所述多个晶体管之间传导电流。
13.根据权利要求1所述的封装,其中所述支撑结构的占据面积大于所述至少一个晶体管的占据面积。
14.根据权利要求1所述的封装,其中所述支撑结构的所述占据面积比所述至少一个晶体管的所述占据面积大至少0.5mm。
15.根据权利要求1所述的封装,其中所述支撑结构完全覆盖所述至少一个晶体管。
16.根据权利要求1所述的封装,其中所述支撑结构电耦合到延伸通过所述电介质结构的第二导体。
17.根据权利要求1所述的封装,其中所述支撑结构电且机械耦合到延伸通过衬底的第二导体。
18.根据权利要求1所述的封装,其进一步包括将所述支撑结构电且机械耦合到所述电介质结构的材料,所述材料具有大于5瓦每米开尔文(W/mK)的热导率及小于500微欧姆厘米(uOhmCm)的电阻率。
19.一种集成电力封装,其包括:
电介质结构,其具有第一表面;
集成电路,其定位在所述电介质结构内;
第一导体,其在所述第一表面与所述电介质结构上的另一点之间延伸;
第二导体,其在所述第一表面与所述电介质结构上的另一点之间延伸;
第三导体,其在所述第一表面与所述电介质结构上的另一点之间延伸;
第一晶体管,其中源极或漏极耦合到所述第一导体;
第二晶体管,其中源极或漏极耦合到所述第二导体;及
导电支撑结构,其耦合到所述第一晶体管的所述源极或漏极中的另一者、所述第二晶体管的所述源极或漏极中的另一者及所述第三导体。
20.根据权利要求19所述的封装,其中所述第一导体、所述第二导体及所述第三导体在所述电介质结构的所述第一表面与所述电介质结构的至少一个其它表面之间延伸。
21.根据权利要求19所述的封装,其中所述支撑结构完全覆盖所述第一晶体管及所述第二晶体管。
22.一种制造集成电力封装的方法,所述方法包括:
将集成电路定位在电介质结构内,所述衬底具有表面;
将第一导体定位在所述表面与所述电介质结构上的另一点之间;
将第二导体定位在所述表面与所述电介质结构上的另一点之间;
将第一晶体管耦合到导电支撑结构;
将第二晶体管耦合到所述支撑结构;
将所述支撑结构、所述第一晶体管与所述第二晶体管的组合耦合到所述电介质结构,其中所述第一晶体管耦合到所述第一导体且所述第二晶体管耦合到所述第二导体。
23.一种制造集成电力封装的方法,所述方法包括:
将集成电路定位在电介质结构内,所述衬底具有表面;
将第一导体定位在所述表面与所述电介质结构上的另一点之间;
将第二导体定位在所述表面与所述电介质结构上的另一点之间;
将第一晶体管耦合到所述第一导体;
将第二晶体管耦合到所述第二导体;
将所述电介质结构、所述第一晶体管与所述第二晶体管的组合耦合到导电支撑结构。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/923,123 US9768130B2 (en) | 2015-10-26 | 2015-10-26 | Integrated power package |
US14/923,123 | 2015-10-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106611759A true CN106611759A (zh) | 2017-05-03 |
CN106611759B CN106611759B (zh) | 2021-09-07 |
Family
ID=58558914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610941441.0A Active CN106611759B (zh) | 2015-10-26 | 2016-10-25 | 集成电力封装 |
Country Status (2)
Country | Link |
---|---|
US (1) | US9768130B2 (zh) |
CN (1) | CN106611759B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101816357B1 (ko) * | 2015-12-03 | 2018-01-08 | 현대자동차주식회사 | 역접속 방지가 가능한 전력스위치 |
US10796956B2 (en) | 2018-06-29 | 2020-10-06 | Texas Instruments Incorporated | Contact fabrication to mitigate undercut |
EP3975225A1 (en) * | 2020-09-24 | 2022-03-30 | Infineon Technologies Austria AG | Semiconductor module |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5920121A (en) * | 1998-02-25 | 1999-07-06 | Micron Technology, Inc. | Methods and structures for gold interconnections in integrated circuits |
US20020105032A1 (en) * | 2001-02-07 | 2002-08-08 | Samsung Elecronics Co., Ltd. | SOI semiconductor integrated circuit for eliminating floating body effects in SOI MOSFETs and method of fabricating the same |
CN101283449A (zh) * | 2005-07-01 | 2008-10-08 | 金·沃扬 | 以单个贴装封装实现的完整功率管理*** |
CN101536176A (zh) * | 2006-08-31 | 2009-09-16 | 先进微装置公司 | 具有在接触区域中的局部设置金属硅化物区的晶体管以及形成该晶体管的方法 |
US7800208B2 (en) * | 2007-10-26 | 2010-09-21 | Infineon Technologies Ag | Device with a plurality of semiconductor chips |
US20120292753A1 (en) * | 2011-05-19 | 2012-11-22 | International Rectifier Corporation | Multi-transistor exposed conductive clip for high power semiconductor packages |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7514780B2 (en) * | 2006-03-15 | 2009-04-07 | Hitachi, Ltd. | Power semiconductor device |
-
2015
- 2015-10-26 US US14/923,123 patent/US9768130B2/en active Active
-
2016
- 2016-10-25 CN CN201610941441.0A patent/CN106611759B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5920121A (en) * | 1998-02-25 | 1999-07-06 | Micron Technology, Inc. | Methods and structures for gold interconnections in integrated circuits |
US20020105032A1 (en) * | 2001-02-07 | 2002-08-08 | Samsung Elecronics Co., Ltd. | SOI semiconductor integrated circuit for eliminating floating body effects in SOI MOSFETs and method of fabricating the same |
CN101283449A (zh) * | 2005-07-01 | 2008-10-08 | 金·沃扬 | 以单个贴装封装实现的完整功率管理*** |
CN101536176A (zh) * | 2006-08-31 | 2009-09-16 | 先进微装置公司 | 具有在接触区域中的局部设置金属硅化物区的晶体管以及形成该晶体管的方法 |
US7800208B2 (en) * | 2007-10-26 | 2010-09-21 | Infineon Technologies Ag | Device with a plurality of semiconductor chips |
US20120292753A1 (en) * | 2011-05-19 | 2012-11-22 | International Rectifier Corporation | Multi-transistor exposed conductive clip for high power semiconductor packages |
Also Published As
Publication number | Publication date |
---|---|
US20170117238A1 (en) | 2017-04-27 |
CN106611759B (zh) | 2021-09-07 |
US9768130B2 (en) | 2017-09-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105981274B (zh) | 电力用半导体模块 | |
CN106536916B (zh) | 用于机动车辆的电路装置和电路装置的应用 | |
DE102008048005B3 (de) | Leistungshalbleitermodulanordnung und Verfahren zur Herstellung einer Leistungshalbleitermodulanordnung | |
CN104752368B (zh) | 电子控制装置 | |
CN103996667B (zh) | 具有旁路功能的半导体器件及其方法 | |
CN105518865A (zh) | 半导体装置 | |
JP2006286996A (ja) | 太陽電池パネル用端子ボックス | |
CN106611759A (zh) | 集成电力封装 | |
US20080054373A1 (en) | Power semiconduction device and circuit module having such power semiconduction device | |
CN105163485A (zh) | 发热装置和发热器件的导热基板及其制作方法 | |
CN106783753A (zh) | 半导体器件 | |
JP2005142189A (ja) | 半導体装置 | |
KR20190037266A (ko) | 통합된 리셋 가능한 온도 퓨즈를 구비한 커넥터 | |
CN107078126B (zh) | 半导体模块以及半导体模块用的导电构件 | |
US11652091B2 (en) | Solid state switching device including nested control electronics | |
CN107808858A (zh) | 功率器件及其功率组件 | |
TWI668812B (zh) | 功率模組組裝結構 | |
US10804189B2 (en) | Power device package structure | |
WO2015124036A1 (zh) | 基于印刷电路板的开关电路结构 | |
CN101140917A (zh) | 功率半导体装置及使用该装置的电路模块 | |
CN108630677B (zh) | 一种功率器件版图结构及制作方法 | |
CN107078106A (zh) | 散热结构 | |
CN204558445U (zh) | 半导体封装结构 | |
US10103096B2 (en) | Semiconductor device | |
CN205142648U (zh) | 发热器件的导热基板和发热装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |