CN106598084B - The assembly method and device of tested aspherical mirror based on zero compensation system - Google Patents
The assembly method and device of tested aspherical mirror based on zero compensation system Download PDFInfo
- Publication number
- CN106598084B CN106598084B CN201611137465.7A CN201611137465A CN106598084B CN 106598084 B CN106598084 B CN 106598084B CN 201611137465 A CN201611137465 A CN 201611137465A CN 106598084 B CN106598084 B CN 106598084B
- Authority
- CN
- China
- Prior art keywords
- aspherical mirror
- tested
- aspherical
- item
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The assembly method and relevant apparatus of tested aspherical mirror proposed by the present invention based on zero compensation system, wherein by precise measurement zero compensation system optics parameter, calculated using optical design software re-optimization by the ideal Z-direction position of microscopy；The aspherical optical axis of changing rule adjustment for tilting item and coma item in surface testing result to be detected aspherical mirror in 0 ° and 180 ° of positions is overlapped with turntable shaft.This method can be accurately positioned the translation position X/Y/Z and the pitching/beat posture of tested aspherical mirror, and realize that zero compensation system aspherical wavefront optical axis, tested aspherical mirror optical axis and turntable shaft are precisely coincident, to improve the detection accuracy of the face shape errors such as defocus, spherical aberration, the high-order coma of tested aspherical mirror.
Description
Technical field
The present invention relates to optical interferometry technical field, in particular to a kind of tested aspheric based on zero compensation system
The assembly method and relevant apparatus of face mirror.
Background technique
Modern lithographic technologies require plane in lithographic objective system, spherical surface, the optical elements such as aspherical face shape error
Root mean square reaches sub-nanometer magnitude.The optical manufacturing and detection technique in current forward position can be convenient ground support ball face mirror and plane
Mirror realizes sub-nanometer magnitude surface figure accuracy.However, the high-precision surface shape processing of tested aspherical mirror and detection technique still compare
It is difficult complicated, generally use different detection method and detection device for different tested aspherical mirrors, and null compensator testing
It is to realize that the high-precision of tested aspherical mirror face shape error detects most common technology.Tested aspheric is detected using null compensator testing
When the mirror surface-shaped error of face, being detected aspherical mirror must relative to the translation position X/Y/Z of zero compensation system and pitching/beat posture
It must accurately determine, to realize zero compensation system aspherical wavefront optical axis and tested aspherical mirror optical axis coincidence, otherwise be detected aspheric
The measurement error of the faces shapes such as defocus, spherical aberration, the high-order coma of face mirror is larger.When utilization rotary process Accurate Calibration is detected aspherical mirror
When asymmetrical surface of revolution shape error, it is also necessary to adjust tested aspherical mirror optical axis and turntable shaft is overlapped, otherwise be detected aspherical
The measurement error of the faces such as high-order coma of mirror shape is larger.
When detecting tested aspherical mirror face shape error using null compensator testing, tested aspherical mirror adjustment process can divide
Are as follows: the positioning of Z-direction position, X/Y are adjusted to position positioning, pitching/beat pose adjustment, tested aspherical mirror optical axis and turntable shaft
It is overlapped.In the prior art, the optical design parameters of zero compensation system are usually utilized to be detected by optical design software determination non-
The Z-direction position of spherical mirror, this method have ignored zero compensation system optics manufacturing and positioning errors to tested aspherical mirror
The influence of ideal Z-direction position, thus this method can not precise measurement be detected the defocus and the face shape errors such as spherical aberration of aspherical mirror.X
With Y-direction position positioning with pitching/beat pose adjustment usually according to be detected aspherical mirror shape interference testing result inclination and
Coma item is adjusted.When being detected aspherical mirror face shape error using rotary process Accurate Calibration, need tested aspherical mirror
Optical axis is accurately adjusted with turntable shaft and is overlapped, and conventional method is usually using tested aspherical mirror outer rim central axis instead of aspherical
Optical axis, rotates tested aspherical mirror by precise rotating platform, measures tested aspherical mirror outer rim jerk value using inductance instrument, passes through tune
The relative position (X/Y translation and pitching/beat posture) of whole tested aspherical mirror and turntable until inductance instrument jerk value minimum with
Realize that aspherical optical axis is overlapped with turntable shaft.However, this method has ignored tested aspherical mirror outer rim cylindricity mismachining tolerance
And the deviation of outer rim central axis and aspherical optical axis, above-mentioned error source will affect the faces such as high-order coma of tested aspherical mirror shape
Measuring accuracy.
Summary of the invention
In view of this, the embodiment of the invention provides a kind of assembly sides of tested aspherical mirror based on zero compensation system
Method and relevant apparatus can be improved when null compensator testing detects tested aspherical mirror face shape error by the position positioning accurate of microscopy
The adjustment precision of degree and zero compensation system aspherical wavefront optical axis, tested aspherical mirror optical axis and turntable shaft.
In a first aspect, the present invention provides a kind of assembly method of tested aspherical mirror based on zero compensation system, comprising:
The actual measurement parameter of all optical elements of zero compensation system is measured, wherein the actual measurement parameter includes surface curvature half
Airspace d0 between diameter R, center thickness d and optical material refractive index n and all optical elements；
According in the optical design model of actual measurement parameter input zero compensation system；
Using laser mirror surface position finder actual measurement tested aspherical mirror and zero compensation system terrestrial airspace be according to
According to tested aspherical mirror adjusted to ideal Z-direction position by five dimension adjustment platforms；
Tested aspherical mirror optical axis and the precision are turned when demarcating tested aspherical mirror face shape error using precise rotating platform
The turntable shaft of platform, which adjusts, to be overlapped；
The X/Y of tested aspherical mirror is adjusted according to the coma item and inclination item for being detected aspherical mirror shape testing result
Translate position positioning and pitching/beat posture；
When the translation position X/Y/Z of tested aspherical mirror and pitching/beat posture are in ideal detection position, adjustment institute
Zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable shaft are stated to being precisely coincident, with reality
It applies rotary process Accurate Calibration and is detected aspherical mirror face shape error.
Optionally, described to be demarcated the tested aspherical mirror light using precise rotating platform when being detected aspherical mirror face shape error
Axis is overlapped with the adjustment of the turntable shaft of the precise rotating platform, comprising:
The tested aspherical mirror optical axis is equivalent to across the straight of aspheric vertex of surface and the aspherical best fit spherical surface centre of sphere
Line；
The best fit ball centre of sphere is adjusted and is overlapped with turntable shaft；
Aspheric vertex of surface is adjusted and is overlapped with the turntable shaft；
Iteration is to realize that the tested aspherical mirror optical axis and the turntable shaft are precisely coincident.
Optionally, the foundation be detected aspherical mirror shape testing result coma item and inclination item be adjusted be detected it is non-
The X/Y translation position positioning of spherical mirror and pitching/beat posture, comprising:
Tested aspherical mirror is set to be in dry by adjusting the X/Y translation of the tested aspherical mirror and pitching/beat posture
Interference pattern inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
Interferometer is utilized to detect the face shape error of tested aspherical mirror, wherein when the inclination item in testing result is larger, then
Pitching/beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translation for adjusting the tested aspherical mirror reduces the coma item in the testing result, so that institute
The inclination item stated in testing result increases, then adjusts pitching/beat posture of tested aspherical mirror to reduce inclination item；
Set-up procedure is so that inclination item and coma Xiang Jun in aspherical interference testing result level off to zero, to complete repeatedly
The translation position X/Y of tested aspherical mirror and pitching/beat pose adjustment, realize zero compensation system aspherical wavefront optical axis and quilt
Aspherical mirror optical axis is examined to be precisely coincident.
Optionally, it is described when demarcating tested aspherical mirror face shape error using precise rotating platform by tested aspherical mirror optical axis with
The turntable shaft of the precise rotating platform, which adjusts, to be overlapped, comprising:
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Then tested aspherical mirror is rotated the aspheric that the tested aspherical mirror is recorded to 180 ° of positions using turntable 5 by Tx1 and Ty1
Inclination the item Tx2 and Ty2 of face testing result adjust tested aspherical mirror bowing relative to precise rotating platform using five dimension adjustment platforms
Face upward/beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
Above-mentioned adjustment process is repeated, so that Aspherical-surface testing when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspherical best fit spherical surface is overlapped with turntable shaft；
When tested aspherical mirror is in initial 0 ° of position, coma the item Cx1 and Cy1 of Aspherical-surface testing result are recorded；
Tested aspherical mirror is rotated to 180 ° of positions using precise rotating platform, records the coma item of Aspherical-surface testing result
Cx2 and Cy2；
Adjusting tested aspherical mirror using five dimension adjustment platforms makes Aspherical-surface testing relative to the direction the X/Y translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
Repetition is adjusted so that the intelligent of Aspherical-surface testing result when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
Poor item does not change, then aspheric vertex of surface is overlapped with turntable shaft；
The aspherical best fit ball centre of sphere deviates turntable shaft, needs iteration until tested aspherical mirror is in 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then are detected aspherical mirror optical axis
It is precisely coincident with turntable shaft.
Second aspect, a kind of assembly device of the tested aspherical mirror based on zero compensation system of the present invention, comprising:
Measuring unit, for measuring the actual measurement parameter of all optical elements of zero compensation system, wherein the actual measurement parameter
Including the airspace between surface curvature radius R, center thickness d and optical material refractive index n and all optical elements
d0；
Input unit, in the optical design model according to actual measurement parameter input zero compensation system；
The first adjustment unit, tested aspherical mirror and zero compensation system bottom for being surveyed using laser mirror surface position finder
The airspace in face is foundation, is adjusted tested aspherical mirror to ideal Z-direction position by five dimension adjustment platforms；
Second adjustment unit, by tested aspherical mirror when being detected aspherical mirror face shape error for demarcating using precise rotating platform
Optical axis is overlapped with the adjustment of the turntable shaft of the precise rotating platform；
Third adjustment unit, for being adjusted according to the coma item and inclination item that are detected aspherical mirror shape testing result
The X/Y translation position positioning of tested aspherical mirror and pitching/beat posture；
4th adjustment unit, for being in reason when the translation position X/Y/Z of tested aspherical mirror and pitching/beat posture
Want to detect position, adjusts the zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable and turn
Axis is detected aspherical mirror face shape error to being precisely coincident, to implement rotary process Accurate Calibration.
Optionally, the sharp second adjustment unit is also used to:
The tested aspherical mirror optical axis is equivalent to across the straight of aspheric vertex of surface and the aspherical best fit spherical surface centre of sphere
Line；
The best fit ball centre of sphere is adjusted and is overlapped with turntable shaft；
Aspheric vertex of surface is adjusted and is overlapped with the turntable shaft；
Iteration is to realize that the tested aspherical mirror optical axis and the turntable shaft are precisely coincident.
Optionally, institute's third adjustment unit is also used to:
Tested aspherical mirror is set to be in dry by adjusting the X/Y translation of the tested aspherical mirror and pitching/beat posture
Interference pattern inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
Interferometer is utilized to detect the face shape error of tested aspherical mirror, wherein when the inclination item in testing result is larger, then
Pitching/beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translation for adjusting the tested aspherical mirror reduces the coma item in the testing result, so that institute
The inclination item stated in testing result increases, then adjusts pitching/beat posture of tested aspherical mirror to reduce inclination item；
Set-up procedure is so that inclination item and coma Xiang Jun in aspherical interference testing result level off to zero, to complete repeatedly
The translation position X/Y of tested aspherical mirror and pitching/beat pose adjustment, realize zero compensation system aspherical wavefront optical axis and quilt
Aspherical mirror optical axis is examined to be precisely coincident.
Optionally, the second adjustment unit is also used to:
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Then tested aspherical mirror is rotated the aspheric that the tested aspherical mirror is recorded to 180 ° of positions using turntable 5 by Tx1 and Ty1
Inclination the item Tx2 and Ty2 of face testing result adjust tested aspherical mirror bowing relative to precise rotating platform using five dimension adjustment platforms
Face upward/beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
Above-mentioned adjustment process is repeated, so that Aspherical-surface testing when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspherical best fit spherical surface is overlapped with turntable shaft；
When tested aspherical mirror is in initial 0 ° of position, coma the item Cx1 and Cy1 of Aspherical-surface testing result are recorded；
Tested aspherical mirror is rotated to 180 ° of positions using precise rotating platform, records the coma item of Aspherical-surface testing result
Cx2 and Cy2；
Adjusting tested aspherical mirror using five dimension adjustment platforms makes Aspherical-surface testing relative to the direction the X/Y translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
Repetition is adjusted so that the intelligent of Aspherical-surface testing result when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
Poor item does not change, then aspheric vertex of surface is overlapped with turntable shaft；
The aspherical best fit ball centre of sphere deviates turntable shaft, needs iteration until tested aspherical mirror is in 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then are detected aspherical mirror optical axis
It is precisely coincident with turntable shaft.
The third aspect, a kind of null compensator testing of the present invention detect the detection device of tested aspherical mirror face shape error, comprising:
Interferometer, zero compensation system, the one or five dimension adjustment platform, precise rotating platform, the two or five dimension adjustment platform, the two or the five dimension adjustment platform
Horizontally disposed, on the two or the five dimension adjustment platform, the one or the five dimension adjustment platform is arranged described for the precise rotating platform setting
On precise rotating platform, tested aspherical mirror is set and is placed on the one or the five dimension adjustment platform, the interferometer passes through the zero-bit
Compensation system irradiates the tested aspherical mirror.
Optionally, the interferometer is conllinear with the zero compensation system centre.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
The assembly method and relevant apparatus of tested aspherical mirror proposed by the present invention based on zero compensation system, wherein
By precise measurement zero compensation system optics parameter, calculated using optical design software re-optimization by the ideal Z-direction of microscopy
Position；The changing rule adjustment of item and coma item is tilted in surface testing result to be detected aspherical mirror in 0 ° and 180 ° of positions
Aspherical optical axis is overlapped with turntable shaft.This method can be accurately positioned the X/Y/Z translation position and pitching of tested aspherical mirror/
Beat posture, and realize that zero compensation system aspherical wavefront optical axis, tested aspherical mirror optical axis and turntable shaft are precisely coincident, from
And improve the detection accuracy of the face shape errors such as defocus, spherical aberration, the high-order coma of tested aspherical mirror.
Detailed description of the invention
Fig. 1 is a kind of assembly method of the tested aspherical mirror based on zero compensation system provided in the embodiment of the present invention
Flow chart；
Fig. 2 is a kind of assembly device of the tested aspherical mirror based on zero compensation system provided in the embodiment of the present invention
Structural block diagram；
Fig. 3 is the detection that a kind of null compensator testing provided in the embodiment of the present invention detects tested aspherical mirror face shape error
The structural schematic diagram of device.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work
It encloses.
Description and claims of this specification and term " first ", " second ", " third " " in above-mentioned attached drawing
Four " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so that the embodiments described herein can be in addition to illustrating herein or describing
Sequence other than appearance is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that covering is non-exclusive
Include, for example, the process, method, system, product or equipment for containing a series of steps or units are not necessarily limited to clearly arrange
Those of out step or unit, but may include be not clearly listed or it is solid for these process, methods, product or equipment
The other step or units having.
As shown in connection with fig. 1, the present invention provides a kind of assembly method of tested aspherical mirror based on zero compensation system, packet
It includes:
S101, the actual measurement parameter for measuring all optical elements of zero compensation system, wherein the actual measurement parameter includes surface
Airspace d between radius of curvature R, center thickness d and optical material refractive index n and all optical elements0；
In S102, the optical design model according to actual measurement parameter input zero compensation system；
S103, the tested aspherical mirror of laser mirror surface position finder actual measurement and the airspace of zero compensation system terrestrial are utilized
For foundation, tested aspherical mirror is adjusted to ideal Z-direction position by five dimension adjustment platforms；
S104, it is demarcated tested aspherical mirror optical axis and the essence using precise rotating platform when being detected aspherical mirror face shape error
The turntable shaft of close turntable, which adjusts, to be overlapped；
S105, tested aspherical mirror is adjusted according to the coma item and inclination item for being detected aspherical mirror shape testing result
X/Y translation position positioning and pitching/beat posture；
S106, position is detected when the translation position X/Y/Z and pitching/beat posture that are detected aspherical mirror are in ideal,
The zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable shaft are adjusted to accurate weight
It closes, is detected aspherical mirror face shape error to implement rotary process Accurate Calibration.
Optionally, described to be demarcated the tested aspherical mirror light using precise rotating platform when being detected aspherical mirror face shape error
Axis is overlapped with the adjustment of the turntable shaft of the precise rotating platform, comprising:
The tested aspherical mirror optical axis is equivalent to across the straight of aspheric vertex of surface and the aspherical best fit spherical surface centre of sphere
Line；
The best fit ball centre of sphere is adjusted and is overlapped with turntable shaft；
Aspheric vertex of surface is adjusted and is overlapped with the turntable shaft；
Iteration is to realize that the tested aspherical mirror optical axis and the turntable shaft are precisely coincident.
Optionally, the foundation be detected aspherical mirror shape testing result coma item and inclination item be adjusted be detected it is non-
The X/Y translation position positioning of spherical mirror and pitching/beat posture, comprising:
Tested aspherical mirror is set to be in dry by adjusting the X/Y translation of the tested aspherical mirror and pitching/beat posture
Interference pattern inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
Interferometer is utilized to detect the face shape error of tested aspherical mirror, wherein when the inclination item in testing result is larger, then
Pitching/beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translation for adjusting the tested aspherical mirror reduces the coma item in the testing result, so that described
Inclination item in testing result increases, then adjusts pitching/beat posture of tested aspherical mirror to reduce inclination item；
Set-up procedure is so that inclination item and coma Xiang Jun in aspherical interference testing result level off to zero, to complete repeatedly
The translation position X/Y of tested aspherical mirror and pitching/beat posture tune are realized zero compensation system aspherical wavefront optical axis and are detected
Aspherical mirror optical axis is precisely coincident.
Optionally, it is described when demarcating tested aspherical mirror face shape error using precise rotating platform by tested aspherical mirror optical axis with
The turntable shaft of the precise rotating platform, which adjusts, to be overlapped, comprising:
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Tx1And Ty1, tested aspherical mirror is then rotated to the aspheric that the tested aspherical mirror is recorded to 180 ° of positions using turntable 5
The inclination item Tx of face testing result2And Ty2, using five dimension adjustment platforms adjust tested aspherical mirrors relative to precise rotating platform pitching/
Beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
Above-mentioned adjustment process is repeated, so that Aspherical-surface testing when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspherical best fit spherical surface is overlapped with turntable shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated to 180 ° of positions using precise rotating platform, records the coma item of Aspherical-surface testing result
Cx2And Cy2；
Adjusting tested aspherical mirror using five dimension adjustment platforms makes Aspherical-surface testing relative to the direction the X/Y translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
Repetition is adjusted so that the intelligent of Aspherical-surface testing result when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
Poor item does not change, then aspheric vertex of surface is overlapped with turntable shaft；
The aspherical best fit ball centre of sphere deviates turntable shaft, needs iteration until tested aspherical mirror is in 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then are detected aspherical mirror optical axis
It is precisely coincident with turntable shaft.
Specifically, the present invention provides a kind of another kind of the assembly method of tested aspherical mirror based on zero compensation system
Embodiment, comprising the following steps:
S1, before zero compensation system 2 is integrated, the surface curvature of all optical elements of precise measurement zero compensation system
Radius R, center thickness d and optical material refractive index n；After zero compensation system 2 is integrated, measured using optical non-contact
Airspace d between all optical elements of method (e.g., laser mirror surface position finder) accurate measurement zero compensation system0。
By above-mentioned actual measurement parameter (R, d, n, d0) input in the optical design model of zero compensation system, again using optical design software
Optimization obtains the ideal Z-direction position of tested aspherical mirror 3.The tested aspherical mirror 3 and zero surveyed using laser mirror surface position finder
The position last one side airspace of compensation system 2 is foundation, and tested aspherical mirror 3 is adjusted famous dictum by the two or five dimension adjustment platform 6
Think Z-direction position.
S2, when demarcating tested 3 face shape error of aspherical mirror using precise rotating platform 5 (rotary process), need tested aspheric
Catoptric light axis is accurately adjusted with precise rotating platform shaft and is overlapped.Tested aspherical mirror optical axis is equivalent to across aspheric vertex of surface and aspheric
The best fit ball centre of sphere is adjusted be overlapped with precise rotating platform shaft first by the straight line of the face best fit spherical surface centre of sphere, then will be non-
The adjustment of spherical surface vertex is overlapped with precise rotating platform shaft, and tested aspherical mirror light can be realized in the last above-mentioned adjustment process of iteration
Axis and precise rotating platform shaft are precisely coincident.
S2 step concrete methods of realizing is as follows:
S01, when tested aspherical mirror 3 is in initial 0 ° of position, aspheric surface result that chrono-interferometer 1 detects
Tilt item Tx1And Ty1, then tested aspherical mirror 3 is rotated to 180 ° of positions using precise rotating platform 5, records aspherical inspection at this time
Survey the inclination item Tx of result2And Ty2, tested the bowing relative to precise rotating platform 5 of aspherical mirror 3 is adjusted using the one or five dimension adjustment platform 4
Face upward/beat make Aspherical-surface testing result inclination item be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2.Repeat above-mentioned adjusted
Journey, when so that tested aspherical mirror 3 rotating between 0 ° and 180 ° of positions, the inclination item of Aspherical-surface testing result does not become
Change, the centre of sphere of aspherical best fit spherical surface is overlapped with precise rotating platform shaft at this time.
S02, when tested aspherical mirror 3 is in initial 0 ° of position, record Aspherical-surface testing result coma item Cx1With
Cy1, then tested aspherical mirror 3 is rotated to 180 ° of positions using precise rotating platform 5, record Aspherical-surface testing result at this time it is intelligent
Poor item Cx2And Cy2, tested aspherical mirror 3, which is adjusted, using the one or five dimension adjustment platform 4 translates relative to the direction X/Y of precise rotating platform 5
The coma item for making Aspherical-surface testing result is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2.Above-mentioned adjustment process is repeated, so that by
When inspection aspherical mirror 3 rotates between 0 ° and 180 ° of positions, the coma item of Aspherical-surface testing result does not change, at this time aspheric
Vertex of surface is overlapped with precise rotating platform shaft.
After S03, implementation steps S02, the aspherical best fit ball centre of sphere will be offset slightly from precise rotating platform shaft, therefore need
Iteration above-mentioned steps S01 and step S02, it is aspherical when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
The inclination item and coma Xiang Jun of testing result do not change, and are detected aspherical mirror optical axis at this time and accurately weigh with precise rotating platform shaft
It closes.
S3, X/Y translation position positioning and the pitching/beat pose adjustment usually foundation for being detected aspherical mirror 3 are detected aspheric
The coma item and inclination item of face mirror surface-shaped testing result are adjusted.
Firstly, adjust the X/Y translation of tested aspherical mirror 3 using the two or five dimension adjustment platform 6 and pitching/beat posture make by
Inspection aspherical mirror 3 is in the confocal detection position of interferometer 1 and zero compensation system 2, and interference pattern inclination striped is adjusted to
Zero striped；
Secondly, detect the face shape error of tested aspherical mirror using interferometer 1, if the inclination item in testing result compared with
Greatly, then make the inclination item in testing result as far as possible using pitching/beat that the two or five dimension adjustment platform 6 adjusts tested aspherical mirror 3
It is small；
Again, the coma in testing result is made using the X/Y translation that the two or five dimension adjustment platform 6 adjusts tested aspherical mirror 3
Item is small as far as possible, and the inclination item in testing result will will increase at this time, therefore the pitching/beat that need to adjust tested aspherical mirror 3 again is most
Amount reduces inclination item；
Finally, the above-mentioned set-up procedure of Reusability makes inclination item and coma Xiang Jun in Aspherical-surface testing result level off to
Zero, the translation position X/Y and pitching/beat pose adjustment for being detected aspherical mirror 3 at this time finish, that is, realize zero compensation system
Aspherical wavefront optical axis and tested aspherical mirror optical axis are precisely coincident.
S4, it (after the method adjustment of S1 to S3) is detected position and the posture of aspherical mirror 3, is detected according to above three step
The translation position X/Y/Z of aspherical mirror 3 and pitching/beat posture are in ideal detection position, and zero compensation system is non-
Spherical wave optical axis, tested aspherical mirror optical axis and precise rotating platform shaft have been precisely coincident, it is possible to implement rotary process Accurate Calibration quilt
Examine aspherical mirror face shape error.
As shown in connection with fig. 2, a kind of assembly device of the tested aspherical mirror based on zero compensation system of the present invention, comprising:
Measuring unit 201, for measuring the actual measurement parameter of all optical elements of zero compensation system, wherein the actual measurement is joined
Number includes the airspace between surface curvature radius R, center thickness d and optical material refractive index n and all optical elements
d0；
Input unit 202, in the optical design model according to actual measurement parameter input zero compensation system；
The first adjustment unit 203, tested aspherical mirror and zero compensation system for being surveyed using laser mirror surface position finder
The airspace of system bottom surface is foundation, is adjusted tested aspherical mirror to ideal Z-direction position by five dimension adjustment platforms；
Second adjustment unit 204, by tested aspheric when being detected aspherical mirror face shape error for demarcating using precise rotating platform
Catoptric light axis is overlapped with the adjustment of the turntable shaft of the precise rotating platform；
Third adjustment unit 205, for being carried out according to the coma item and inclination item that are detected aspherical mirror shape testing result
Adjust the X/Y translation position positioning and pitching/beat posture of tested aspherical mirror；
4th adjustment unit 206, for locating when the translation position X/Y/Z of tested aspherical mirror and pitching/beat posture
Position is detected in ideal, adjusts the zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and described turn
Platform shaft is detected aspherical mirror face shape error to being precisely coincident, to implement rotary process Accurate Calibration.
Optionally, the sharp second adjustment unit 204 is also used to:
The tested aspherical mirror optical axis is equivalent to across the straight of aspheric vertex of surface and the aspherical best fit spherical surface centre of sphere
Line；
The best fit ball centre of sphere is adjusted and is overlapped with turntable shaft；
Aspheric vertex of surface is adjusted and is overlapped with the turntable shaft；
Iteration is to realize that the tested aspherical mirror optical axis and the turntable shaft are precisely coincident.
Optionally, institute's third adjustment unit 205 is also used to:
Tested aspherical mirror is set to be in dry by adjusting the X/Y translation of the tested aspherical mirror and pitching/beat posture
Interference pattern inclination striped is adjusted to zero striped by the confocal detection position of interferometer and zero compensation system；
Interferometer is utilized to detect the face shape error of tested aspherical mirror, wherein when the inclination item in testing result is larger, then
Pitching/beat of tested aspherical mirror is adjusted so that the inclination item in testing result reduces；
The X/Y translation for adjusting the tested aspherical mirror reduces the coma item in the testing result, so that described
Inclination item in testing result increases, then adjusts pitching/beat posture of tested aspherical mirror to reduce inclination item；
Set-up procedure is so that inclination item and coma Xiang Jun in aspherical interference testing result level off to zero, to complete repeatedly
The translation position X/Y of tested aspherical mirror and pitching/beat posture tune are realized zero compensation system aspherical wavefront optical axis and are detected
Aspherical mirror optical axis is precisely coincident.
Optionally, the second adjustment unit 204 is also used to:
When tested aspherical mirror is in initial 0 ° of position, the inclination item of the aspheric surface result of chrono-interferometer detection
Tx1And Ty1, tested aspherical mirror is then rotated to the aspheric that the tested aspherical mirror is recorded to 180 ° of positions using turntable 5
The inclination item Tx of face testing result2And Ty2, using five dimension adjustment platforms adjust tested aspherical mirrors relative to precise rotating platform pitching/
Beat makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
Above-mentioned adjustment process is repeated, so that Aspherical-surface testing when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
As a result inclination item does not change, then the centre of sphere of aspherical best fit spherical surface is overlapped with turntable shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated to 180 ° of positions using precise rotating platform, records the coma item of Aspherical-surface testing result
Cx2And Cy2；
Adjusting tested aspherical mirror using five dimension adjustment platforms makes Aspherical-surface testing relative to the direction the X/Y translation of precise rotating platform
As a result coma item is respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
Repetition is adjusted so that the intelligent of Aspherical-surface testing result when tested aspherical mirror 3 rotates between 0 ° and 180 ° of positions
Poor item does not change, then aspheric vertex of surface is overlapped with turntable shaft；
The aspherical best fit ball centre of sphere deviates turntable shaft, needs iteration until tested aspherical mirror is in 0 ° and 180 °
When rotating between position, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then are detected aspherical mirror optical axis
It is precisely coincident with turntable shaft.
As shown in connection with fig. 3, a kind of null compensator testing of the present invention detects the detection device of tested aspherical mirror face shape error, packet
It includes: interferometer 1, the dimension adjustment of zero compensation system the 2, the 1st platform 4, the dimension adjustment platform 6 of precise rotating platform the 5, the 2nd 5, the described 2nd 5
Dimension adjustment platform 6 is horizontally disposed, and the setting of precise rotating platform 5 is on the two or the five dimension adjustment platform 6, the one or the five dimension adjustment platform
4 are arranged on the precise rotating platform 5, and tested aspherical mirror 3 is set and is placed on the one or the five dimension adjustment platform 4, the interference
Instrument 1 irradiates the tested aspherical mirror 3 by the zero compensation system 2.
Optionally, the interferometer 1 is conllinear with 2 center of zero compensation system.
Null compensator testing provided in an embodiment of the present invention detects the detection device of tested aspherical mirror face shape error for holding
The assembly method of the previously described tested aspherical mirror based on zero compensation system of row, does not repeat herein.
Null compensator testing proposed by the present invention detects the detection device of tested aspherical mirror face shape error, passes through precise measurement
Zero compensation system optics parameter is calculated using optical design software re-optimization by the ideal Z-direction position of microscopy；It is non-to be detected
Spherical mirror tilted in surface testing result in 0 ° and 180 ° of positions the aspherical optical axis of changing rule adjustment of item and coma item with
Turntable shaft is overlapped.This method can be accurately positioned the translation position X/Y/Z and the pitching/beat posture of tested aspherical mirror, and
Realize that zero compensation system aspherical wavefront optical axis, tested aspherical mirror optical axis and turntable shaft are precisely coincident, to improve tested
The detection accuracy of the face shape errors such as defocus, spherical aberration, the high-order coma of aspherical mirror.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
In several embodiments provided herein, it should be understood that disclosed system, device and method can be with
It realizes by another way.For example, the apparatus embodiments described above are merely exemplary, for example, the unit
It divides, only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple units or components
It can be combined or can be integrated into another system, or some features can be ignored or not executed.Another point, it is shown or
The mutual coupling, direct-coupling or communication connection discussed can be through some interfaces, the indirect coupling of device or unit
It closes or communicates to connect, can be electrical property, mechanical or other forms.
The unit as illustrated by the separation member may or may not be physically separated, aobvious as unit
The component shown may or may not be physical unit, it can and it is in one place, or may be distributed over multiple
In network unit.It can select some or all of unit therein according to the actual needs to realize the mesh of this embodiment scheme
's.
It, can also be in addition, the functional units in various embodiments of the present invention may be integrated into one processing unit
It is that each unit physically exists alone, can also be integrated in one unit with two or more units.Above-mentioned integrated list
Member both can take the form of hardware realization, can also realize in the form of software functional units.
Those of ordinary skill in the art will appreciate that all or part of the steps in the various methods of above-described embodiment is can
It is completed with instructing relevant hardware by program, which can be stored in a computer readable storage medium, storage
Medium may include: read-only memory (ROM, Read Only Memory), random access memory (RAM, Random
Access Memory), disk or CD etc..
Above to a kind of assembly method and phase of the tested aspherical mirror based on zero compensation system provided by the present invention
Device is closed to be described in detail, for those of ordinary skill in the art, thought according to an embodiment of the present invention, specific real
Apply in mode and application range that there will be changes, in conclusion the content of the present specification should not be construed as to limit of the invention
System.
Claims (6)
1. a kind of assembly method of the tested aspherical mirror based on zero compensation system characterized by comprising
Measure all optical elements of zero compensation system actual measurement parameter, wherein the actual measurement parameter include surface curvature radius R,
Airspace d between center thickness d and optical material refractive index n and all optical elements0；
According in the optical design model of actual measurement parameter input zero compensation system；
It is foundation using the tested aspherical mirror of laser mirror surface position finder actual measurement and the airspace of zero compensation system terrestrial, leads to
Five dimension adjustment platforms are crossed to adjust tested aspherical mirror to ideal Z-direction position；
It is demarcated tested aspherical mirror optical axis and the precise rotating platform using precise rotating platform when being detected aspherical mirror face shape error
The adjustment of turntable shaft is overlapped；
The X/Y translation of tested aspherical mirror is adjusted according to the coma item and inclination item for being detected aspherical mirror shape testing result
Position positioning and pitching/beat posture；
When the translation position X/Y/Z of tested aspherical mirror and pitching/beat posture are in ideal detection position, adjustment described zero
Position compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable shaft are to being precisely coincident, to implement to revolve
Robin Accurate Calibration is detected aspherical mirror face shape error；
Described demarcated using precise rotating platform is turned tested aspherical mirror optical axis and the precision when being detected aspherical mirror face shape error
The turntable shaft of platform, which adjusts, to be overlapped, comprising:
When tested aspherical mirror is in initial 0 ° of position, the inclination item Tx of the aspheric surface result of chrono-interferometer detection1With
Ty1, then tested aspherical mirror is rotated to 180 ° of positions using turntable (5), records the aspherical of the tested aspherical mirror
The inclination item Tx of testing result2And Ty2, using five dimension adjustment platforms adjust tested aspherical mirrors relative to precise rotating platform pitching/partially
Pendulum makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
Above-mentioned adjustment process is repeated, so that Aspherical-surface testing knot when tested aspherical mirror (3) rotate between 0 ° and 180 ° of positions
The inclination item of fruit does not change, then the centre of sphere of aspherical best fit spherical surface is overlapped with turntable shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated to 180 ° of positions using precise rotating platform, records the coma item Cx of Aspherical-surface testing result2With
Cy2；
Adjusting tested aspherical mirror using five dimension adjustment platforms makes Aspherical-surface testing result relative to the direction the X/Y translation of precise rotating platform
Coma item be respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
Repetition is adjusted so that the coma of Aspherical-surface testing result when tested aspherical mirror (3) rotates between 0 ° and 180 ° of positions
Item does not change, then aspheric vertex of surface is overlapped with turntable shaft；
The aspherical best fit ball centre of sphere deviates turntable shaft, needs iteration until tested aspherical mirror is in 0 ° and 180 ° of positions
Between when rotating, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then are detected aspherical mirror optical axis and turn
Platform shaft is precisely coincident.
2. the method according to claim 1, wherein described demarcate tested aspherical mirror shape using precise rotating platform
The tested aspherical mirror optical axis is overlapped with the adjustment of the turntable shaft of the precise rotating platform when error, comprising:
The tested aspherical mirror optical axis is equivalent to the straight line across aspheric vertex of surface and the aspherical best fit spherical surface centre of sphere；
The best fit ball centre of sphere is adjusted and is overlapped with turntable shaft；
Aspheric vertex of surface is adjusted and is overlapped with the turntable shaft；
Iteration is to realize that the tested aspherical mirror optical axis and the turntable shaft are precisely coincident.
3. the method according to claim 1, wherein the foundation is detected the intelligent of aspherical mirror shape testing result
Poor item and inclination item are adjusted the X/Y translation position positioning and pitching/beat posture of tested aspherical mirror, comprising:
Tested aspherical mirror is set to be in interferometer by adjusting the X/Y translation of the tested aspherical mirror and pitching/beat posture
With the confocal detection position of zero compensation system, interference pattern inclination striped is adjusted to zero striped；
Interferometer is utilized to detect the face shape error of tested aspherical mirror, wherein when the inclination item in testing result is larger, then to adjust
Pitching/beat of tested aspherical mirror is so that the inclination item in testing result reduces；
The X/Y translation for adjusting the tested aspherical mirror reduces the coma item in the testing result, so that the inspection
The inclination item surveyed in result increases, then adjusts pitching/beat posture of tested aspherical mirror to reduce inclination item；
Set-up procedure is tested to complete so that inclination item and coma Xiang Jun in aspherical interference testing result level off to zero repeatedly
The X/Y translation position and pitching/beat pose adjustment of aspherical mirror, realize zero compensation system aspherical wavefront optical axis be detected it is non-
Spherical mirror optical axis is precisely coincident.
4. a kind of assembly device of the tested aspherical mirror based on zero compensation system characterized by comprising
Measuring unit, for measuring the actual measurement parameter of all optical elements of zero compensation system, wherein the actual measurement parameter includes
Airspace d between surface curvature radius R, center thickness d and optical material refractive index n and all optical elements0；
Input unit, in the optical design model according to actual measurement parameter input zero compensation system；
The first adjustment unit, for the tested aspherical mirror and zero compensation system terrestrial using the actual measurement of laser mirror surface position finder
Airspace is foundation, is adjusted tested aspherical mirror to ideal Z-direction position by five dimension adjustment platforms；
Second adjustment unit, by tested aspherical mirror optical axis when being detected aspherical mirror face shape error for demarcating using precise rotating platform
It is overlapped with the adjustment of the turntable shaft of the precise rotating platform；
Third adjustment unit, it is tested for being adjusted according to the coma item and inclination item that are detected aspherical mirror shape testing result
The X/Y translation position positioning of aspherical mirror and pitching/beat posture；
4th adjustment unit, for being in ideal inspection when the translation position X/Y/Z of tested aspherical mirror and pitching/beat posture
Location is set, and adjusts the zero compensation system aspherical wavefront optical axis, the tested aspherical mirror optical axis and the turntable shaft extremely
It is precisely coincident, is detected aspherical mirror face shape error to implement rotary process Accurate Calibration；
The second adjustment unit is also used to:
When tested aspherical mirror is in initial 0 ° of position, the inclination item Tx of the aspheric surface result of chrono-interferometer detection1With
Ty1, then tested aspherical mirror is rotated to 180 ° of positions using turntable (5), records the aspherical of the tested aspherical mirror
The inclination item Tx of testing result2And Ty2, using five dimension adjustment platforms adjust tested aspherical mirrors relative to precise rotating platform pitching/partially
Pendulum makes the inclination item of Aspherical-surface testing result be respectively (Tx1+Tx2)/2 and (Ty1+Ty2)/2；
Above-mentioned adjustment process is repeated, so that Aspherical-surface testing knot when tested aspherical mirror (3) rotate between 0 ° and 180 ° of positions
The inclination item of fruit does not change, then the centre of sphere of aspherical best fit spherical surface is overlapped with turntable shaft；
When tested aspherical mirror is in initial 0 ° of position, the coma item Cx of Aspherical-surface testing result is recorded1And Cy1；
Tested aspherical mirror is rotated to 180 ° of positions using precise rotating platform, records the coma item Cx of Aspherical-surface testing result2With
Cy2；
Adjusting tested aspherical mirror using five dimension adjustment platforms makes Aspherical-surface testing result relative to the direction the X/Y translation of precise rotating platform
Coma item be respectively (Cx1+Cx2)/2 and (Cy1+Cy2)/2；
Repetition is adjusted so that the coma of Aspherical-surface testing result when tested aspherical mirror (3) rotates between 0 ° and 180 ° of positions
Item does not change, then aspheric vertex of surface is overlapped with turntable shaft；
The aspherical best fit ball centre of sphere deviates turntable shaft, needs iteration until tested aspherical mirror is in 0 ° and 180 ° of positions
Between when rotating, the inclination item and coma Xiang Jun of Aspherical-surface testing result do not change, then are detected aspherical mirror optical axis and turn
Platform shaft is precisely coincident.
5. device according to claim 4, which is characterized in that the second adjustment unit is also used to:
The tested aspherical mirror optical axis is equivalent to the straight line across aspheric vertex of surface and the aspherical best fit spherical surface centre of sphere；
The best fit ball centre of sphere is adjusted and is overlapped with turntable shaft；
Aspheric vertex of surface is adjusted and is overlapped with the turntable shaft；
Iteration is to realize that the tested aspherical mirror optical axis and the turntable shaft are precisely coincident.
6. device according to claim 4, which is characterized in that the third adjustment unit is also used to:
Tested aspherical mirror is set to be in interferometer by adjusting the X/Y translation of the tested aspherical mirror and pitching/beat posture
With the confocal detection position of zero compensation system, interference pattern inclination striped is adjusted to zero striped；
Interferometer is utilized to detect the face shape error of tested aspherical mirror, wherein when the inclination item in testing result is larger, then to adjust
Pitching/beat of tested aspherical mirror is so that the inclination item in testing result reduces；
The X/Y translation for adjusting the tested aspherical mirror reduces the coma item in the testing result, so that the inspection
The inclination item surveyed in result increases, then adjusts pitching/beat posture of tested aspherical mirror to reduce inclination item；
Set-up procedure is tested to complete so that inclination item and coma Xiang Jun in aspherical interference testing result level off to zero repeatedly
The X/Y translation position and pitching/beat pose adjustment of aspherical mirror, realize zero compensation system aspherical wavefront optical axis be detected it is non-
Spherical mirror optical axis is precisely coincident.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611137465.7A CN106598084B (en) | 2016-12-10 | 2016-12-10 | The assembly method and device of tested aspherical mirror based on zero compensation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611137465.7A CN106598084B (en) | 2016-12-10 | 2016-12-10 | The assembly method and device of tested aspherical mirror based on zero compensation system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106598084A CN106598084A (en) | 2017-04-26 |
| CN106598084B true CN106598084B (en) | 2019-11-22 |
Family
ID=58598341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611137465.7A Active CN106598084B (en) | 2016-12-10 | 2016-12-10 | The assembly method and device of tested aspherical mirror based on zero compensation system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106598084B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107505684B (en) * | 2017-08-25 | 2020-04-28 | 南京理工大学 | Method for assembling and adjusting lens group |
| CN108195309B (en) * | 2017-12-28 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring surface shape error of off-axis aspheric element |
| CN111076675B (en) * | 2019-12-31 | 2021-05-07 | 长光卫星技术有限公司 | Method and device for quickly adjusting plane wavefront zero compensation detection optical path of concave oblate sphere |
| CN112033302B (en) * | 2020-08-25 | 2021-11-23 | 长春长光智欧科技有限公司 | Optical system installation and adjustment equipment capable of compensating in real time and installation and adjustment method thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101275826A (en) * | 2007-03-29 | 2008-10-01 | 富士能株式会社 | Surface offset measuring method and device for non-spherical lens |
| CN101424521A (en) * | 2008-12-08 | 2009-05-06 | 中国科学院长春光学精密机械与物理研究所 | Device for demarcating relationship between aspherical mirror and spatial position of expansion cushions |
| CN203964879U (en) * | 2014-08-06 | 2014-11-26 | 哈尔滨理工大学 | Based on LCD space light modulator aspheric surface calculation holographic interference checking device |
| CN104976964A (en) * | 2015-06-09 | 2015-10-14 | 中国科学院长春光学精密机械与物理研究所 | Spherical mirror and plane mirror surface shape error absolute detection method |
| CN105547183A (en) * | 2015-12-21 | 2016-05-04 | 中国科学院长春光学精密机械与物理研究所 | Adjustment method for resetting spatial position of detected aspheric surface |
| CN105571514A (en) * | 2015-12-21 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Device and method for rapidly adjusting optical element in rotating translation absolute detection method |
| CN105627946A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Device and method of quickly adjusting aspheric space position |
| CN105627944A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Method of detecting surface figure of aspheric mirror based on null compensation optical system |
-
2016
- 2016-12-10 CN CN201611137465.7A patent/CN106598084B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101275826A (en) * | 2007-03-29 | 2008-10-01 | 富士能株式会社 | Surface offset measuring method and device for non-spherical lens |
| CN101424521A (en) * | 2008-12-08 | 2009-05-06 | 中国科学院长春光学精密机械与物理研究所 | Device for demarcating relationship between aspherical mirror and spatial position of expansion cushions |
| CN203964879U (en) * | 2014-08-06 | 2014-11-26 | 哈尔滨理工大学 | Based on LCD space light modulator aspheric surface calculation holographic interference checking device |
| CN104976964A (en) * | 2015-06-09 | 2015-10-14 | 中国科学院长春光学精密机械与物理研究所 | Spherical mirror and plane mirror surface shape error absolute detection method |
| CN105547183A (en) * | 2015-12-21 | 2016-05-04 | 中国科学院长春光学精密机械与物理研究所 | Adjustment method for resetting spatial position of detected aspheric surface |
| CN105571514A (en) * | 2015-12-21 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Device and method for rapidly adjusting optical element in rotating translation absolute detection method |
| CN105627946A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Device and method of quickly adjusting aspheric space position |
| CN105627944A (en) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Method of detecting surface figure of aspheric mirror based on null compensation optical system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106598084A (en) | 2017-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106598084B (en) | The assembly method and device of tested aspherical mirror based on zero compensation system | |
| CN105627947B (en) | A kind of measuring method and its measurement apparatus of the unknown aspheric surface error of rotational symmetry | |
| WO2017101557A1 (en) | Surface shape detection device and method | |
| CN101865670B (en) | Plane surface shape measurement method of optical fiber point-diffraction phase-shifting interferometer | |
| CN101949691A (en) | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile | |
| KR101930602B1 (en) | Method for measuring a spherical-astigmatic optical area by fizeau interferometry | |
| CN106767498B (en) | It is a kind of for spherical lens face shape absolute calibration by microscopy Method of Adjustment and device | |
| CN110554512B (en) | High-precision secondary off-axis ellipsoidal reflector optical axis leading-out method and optical system thereof | |
| CN102305596B (en) | Rotation error control device and method in spherical surface shape interference detection | |
| CN107505684B (en) | Method for assembling and adjusting lens group | |
| CN109855560B (en) | Convex aspheric reflector surface shape detection device and detection method | |
| CN108562240B (en) | Digital Moire phase-shifting interference measuring method based on two step carrier waves splicing method | |
| CN110487205A (en) | In conjunction with the aspherical parameter error interferometric method of the confocal positioning of dispersion | |
| CN107869965A (en) | Flat mirror shape detection method and device | |
| US20050179911A1 (en) | Aspheric diffractive reference for interferometric lens metrology | |
| TW201310002A (en) | Surface profile measurement apparatus and alignment method thereof and a full aperture data measuring acquisition method | |
| CN106595529B (en) | Larger radius of curvature nonzero digit interferometric method and device based on virtual Newton's ring | |
| CN115202061A (en) | Main optical system assembling, adjusting and aligning method of large-aperture telescope | |
| CN111076898B (en) | Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) | |
| CN109855561B (en) | Detection device and detection method for large-aperture reflector surface shape | |
| CN110966954A (en) | Large-caliber optical element surface shape splicing detection method and device | |
| CN106979857B (en) | Vertical spherical interference splicing measuring device and its method of adjustment | |
| KR20110065365A (en) | Method and apparatus for measuring aspherical body | |
| CN112629436A (en) | High-order aspheric surface detection method and system based on adaptive optical wavefront correction | |
| US11774236B2 (en) | Alignment of a measurement optical system and a sample under test |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |