CN106594070A - Sub-nanometer precision driving workbench based on flexible structure - Google Patents
Sub-nanometer precision driving workbench based on flexible structure Download PDFInfo
- Publication number
- CN106594070A CN106594070A CN201611192773.XA CN201611192773A CN106594070A CN 106594070 A CN106594070 A CN 106594070A CN 201611192773 A CN201611192773 A CN 201611192773A CN 106594070 A CN106594070 A CN 106594070A
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- workbench
- flexible structure
- grating encoder
- precision
- slide
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B9/00—Housing or supporting of instruments or other apparatus
- G12B9/08—Supports; Devices for carrying
- G12B9/10—Instruments boards; Panels; Desks; Racks
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
The invention discloses a sub-nanometer precision driving workbench based on a flexible structure. The sub-nanometer precision driving workbench comprises a base and a workbench, wherein a linear guide rail, a linear motor, a supporting plate used for positioning and supporting the linear motor, and a side baffle plate are arranged on the base in sequence in parallel; two slide blocks are assembled on the linear guide rail; a flexible body is arranged between each slide block and the workbench; an optical grating encoder fixed scale is arranged on the side baffle plate; and an optical grating encoder slide scale matched with the optical grating encoder fixed scale is arranged on the workbench. The sub-nanometer precision driving workbench based on the flexible structure disclosed by the invention has the characteristics of low cost, high precision and high sensitivity, integrates the advantages of structural design optimization and intelligent material application, and can effectively solve the high-speed precise positioning problem of an existing rolling post or rolling ball type ultra-precision workbench.
Description
Technical field
The invention belongs to machine design and manufacture technical field, and in particular to a kind of secondary nanophase essence based on flexible structure
Close driving workbench.
Background technology
Ultra precise workbench is in the detections such as MEMS monitoring, micro-nano technology and micro increasing material manufacturing or the course of processing
Most important mechanical driving member.In recent years, Chinese scholars have carried out numerous studies with regard to high speed ultraprecise driving problems, adopt
It is high to realizing with including that flexible structure, hydrostatic slideway, magnetic suspended guide or ball, roller slide block etc. are oriented to parts
Fast, accurate shift position control, but up to the present, be not yet well solved.It is, in general, that flexible globe body working table tool
There are compact conformation, an advantage that is with low cost and there is no frictional force, but by flexible structure itself impulse stroke and bearing capacity
Limit so as to be difficult to apply to big stroke or middle and high load working condition, such as nano-photoetching machine.By comparison, electromagnetic levitation type work
Platform has higher bearing capacity, but because its manufacturing cost is too high and it is complicated to control, thus high-end equipment field is only applied to,
Such as semiconductor manufacturing.Additionally, hydrostatic slideway is also with precise positioning ability during larger stroke, but limited by operation principle
System so as to be difficult to meet the demand of ultra-clean room or vacuum environment.At present, roller, ball slider formula workbench are using the most
Extensive and effective drive form, it can realize more accurate running fix under various work condition environments, either clean
Room or vacuum environment (such as scanning electron microscope and focused ion beam system) and with relatively low manufacturing cost.However,
Due to the nonlinear characteristic of pre- sliding stage frictional force, substantial amounts of time arrival must be consumed under point-to-point nanoscale positioning mode
Specified location, thus greatly constrain the work efficiency and production throughput for driving platform.
As can be seen here, on the premise of efficient, inexpensive, roller, ball slider formula ultraprecise are solved and drives the pre- sliding rank of platform
The compensation problem of section frictional force, to promoting ultraprecise to drive the innovative development in field and development significant.
The content of the invention
It is an object of the invention to provide a kind of secondary nanophase precision actuation workbench based on flexible structure, solves existing
The problem of the position error that roller or the pre- sliding nonlinear normal modes of ball slider formula ultraprecise driving platform bring.
The technical solution adopted in the present invention is, based on the secondary nanophase precision actuation workbench of flexible structure, including bottom
Seat and workbench, the support for be arranged with line slideway, linear electric motors on base in parallel successively, supporting linear electric motors for positioning
Plate, side shield；Two slide blocks are equipped with line slideway, between each slide block and workbench flexible body is respectively arranged with；On side shield
Grating encoder scale is provided with, the grating encoder slide rule being engaged with grating encoder scale is provided with workbench.
Of the invention the characteristics of, also resides in：
Slide block is ball-type slide block or roller slide block.
Flexible body includes U-shaped framework and the rectangular block connected by cross-articulation plate, and bolt hole a, U are provided with U-shaped framework
Type framework, by the bolt connection through bolt hole a, is provided with bolt hole b with slide block on rectangular block, rectangular block passes through with workbench
Through the bolt connection of bolt hole b, piezo column is housed on cross-articulation plate.
Base two ends are symmetrically arranged with end face baffle, and buffer is provided with end face baffle.
Workbench is connected by connecting plate with drag chain, and the cable for connecting grating encoder slide rule is installed with drag chain.
The invention has the beneficial effects as follows：Secondary nanophase precision actuation workbench of the present invention based on flexible structure, with low
The characteristics of cost, high accuracy and high agility, the advantage of structural design optimization and intellectual material application is integrated with, is efficiently solved
The precise positioning problem of current roller ultra precise workbench.
Description of the drawings
Fig. 1 is the structural representation one of secondary nanophase precision actuation workbench of the present invention；
Fig. 2 is the structural representation two of secondary nanophase precision actuation workbench of the present invention；
Fig. 3 is the structural representation one of flexible body in secondary nanophase precision actuation workbench of the present invention；
Fig. 4 is the structural representation two of flexible body in secondary nanophase precision actuation workbench of the present invention.
In figure, 1. workbench, 2. connecting plate, 3. grating encoder slide rule, 4. flexible body, 5. end face baffle, 6. buffer,
7. slide block, 8. line slideway, 9. linear electric motors, 10. base, 11. gripper shoes, 12. side shields, 13. cables, 14. grating encodings
Device scale, 15. drag chains, 16. piezo columns, 17. bolt hole a, 18. bolt hole b, 19. cross-articulation plates.
Specific embodiment
With reference to the accompanying drawings and detailed description the present invention is described in detail.
Secondary nanophase precision actuation workbench of the present invention based on flexible structure, structure as shown in Figure 1, 2, including base 10
With workbench 1, it is arranged with line slideway 8, linear electric motors 9 on base 10 in parallel successively, propping up for linear electric motors 9 is supported for positioning
Fagging 11, side shield 12, linear electric motors 9 provide power for the motion of ultra precise workbench, while additionally providing a balancing force
The vibration or mechanical part abrasion institute that the external world not eliminated to offset stiffness variable cross-articulation plate is caused around power is caused
Positional precision declines.
Two slide blocks 7 are equipped with line slideway 8, slide block 7 provides guiding and positioning function, slide block 7 for the motion of workbench 1
Flexible body 4 can be respectively arranged with using ball-type slide block or roller slide block between each slide block 7 and workbench 1, flexible body 4 exists
Axially it is approximately flexible, vertical and be laterally approximately rigidly, as shown in Figure 3,4, flexible body 4 is included by cross-articulation plate 19
The U-shaped framework and rectangular block of connection, is provided with bolt hole a17 in U-shaped framework, U-shaped framework is with slide block 7 by passing through bolt hole a17
Bolt connection, be provided with bolt hole b18 on rectangular block, rectangular block with workbench 1 by the bolt connection through bolt hole b18,
Piezo column 16 is housed on cross-articulation plate 19.
Cross-articulation plate 19 under normal circumstances, Motor drive force direction have approximate zero stiffness and it is flexible and at other
Directional stiffness is larger.
Piezo column 16 (intelligent piezo post) is housed on cross-articulation plate 19, just can be with by adjusting the power output of piezo column 16
Amendment cross-articulation plate 19 is driving the rigidity on force direction, thus can be according to pre- cunning or normal sliding-modes adjustment cross-articulation
Plate 19 is driving the rigidity on force direction, it is to avoid impact of the nonlinear normal modes to the positioning precision of workbench 1, i.e., in workbench 1
In the pre- sliding stage, the power output of piezo column 16 is adjusted to into zero so that cross-articulation plate 19 is approximately zero in the rigidity of driving direction,
And then avoid pre- sliding stage nonlinear normal modes from directly affecting the positioning of workbench 1, and in the normal sliding phase of workbench 1, can
The power output of piezo column 16 is adjusted according to the feature of sliding state so that cross-articulation plate 19 is obtained in the driven direction
Appropriate rigidity, it is to avoid the vibration that external disturbance power is caused is directly affected to the positioning precision of workbench 1, realizes workbench 1
Ultraprecise quickly position.Piezo column 16 provides variable rigidity for cross-articulation plate 19, effectively reduces the pre- sliding stage and rubs
Impact of the vibration that wiping power and coast period external disturbance power are caused to the positioning precision of workbench 1, while reducing positioning time
Realize quick positioning.
Grating encoder scale 14 is provided with side shield 12, is provided with workbench 1 and the phase of grating encoder scale 14
The grating encoder slide rule 3 of cooperation, grating encoder slide rule 3 is assemblied on workbench 1 and moves with it, fixed with grating encoder
Chi 14 coordinates can realize that the movement position of workbench 1 is measured, and facilitate implementation the high speed of ultra precise workbench, be accurately positioned.
The two ends of base 10 are symmetrically arranged with end face baffle 5, and buffer 6, the end face baffle at two ends are provided with end face baffle 5
5 and buffer 6 provide protective effect for the motion of ultra precise workbench, prevent its during high speed operation exceed work model
Enclose, there is provided buffer protection function.
Workbench 1 is connected by connecting plate 2 with drag chain 15, is installed with for connecting grating encoder slide rule 3 in drag chain 15
Cable 13, drag chain 15 protects the cable 13 will not under tension in the motor process of workbench 1, it is to avoid the damage of cable 13 occur.
There are outer force-disturbance, heat or wear effects in reality processing or operating process, the benefit that linear electric motors 9 are provided can be passed through
The impact that repaying power makes it to table positions precision and operational efficiency is minimized.
Secondary nanophase precision actuation workbench of the present invention based on flexible structure, when using, linear electric motors 9 are powered, work
Platform 1 starts linear motion under the support of slide block 7 on line slideway 8, and grating encoder slide rule 3 is synchronized with the movement with workbench 1,
By the position letter for measuring simultaneously feedback operation platform 1 in real time with the collective effect of grating encoder scale 14 being fixed on side shield 12
Breath；When workbench 1 starts or will reach specified location, piezo column 16 starts simultaneously at work in the flexible body 4 at its two ends,
Direction directly reduces output support force, and then reduces the rigidity of cross-articulation plate 19, offset with this line slideway 8 with
Pre- sliding nonlinear normal modes between slide block 7 are to disturbance during 1 start-stop of workbench；According to the running status of workbench 1, using pressure
Electric post 16 reasonably regulates and controls the output rigidity of flexible body 4, the positioning precision of ultra precise workbench will be greatly lifted, while relatively
In traditional workbench, its positioning time is also reduced to a great extent, substantially increases the effect of Ultra-precision Turning
Rate.
Secondary nanophase precision actuation workbench of the present invention based on flexible structure, is intersected using stiffness variable flexible structure and is cut with scissors
Fishplate bar 19 reduces the adverse effect of pre- sliding/friction power between line slideway 8 and slide block 7, so as to realize the fast of ultra precise workbench
Speed, accurately position.Couple workbench 1 and slide block 7 using stiffness variable flexible body 4, and by the intelligence pressure on flexible body 4
Electric post 16 is changing flexible body rigidity so as to directly acts on direction, greatly reduces pre- sliding/friction power to superfinishing
The harmful effect of close table positions, while turn avoid interference of the external disturbance power to table positions using linear electric motors 9
Effect.In the presence of variation rigidity intersects flexible board, the positioning precision of ultra precise workbench is greatly lifted.Compare biography
For the workbench of system, ultraprecise of the present invention drives workbench also to be reduced in terms of positioning time, greatly improves super
Precision machined efficiency.
Secondary nanophase precision actuation workbench of the present invention based on flexible structure, it is quick with low cost, high accuracy and height
The characteristics of spending, is integrated with the advantage of structural design optimization and intellectual material application, can the current roller of effectively solving or ball-type it is super
The high speed precise positioning problem of precision stage.
Claims (5)
1. the secondary nanophase precision actuation workbench of flexible structure is based on, it is characterised in that including base (10) and workbench
(1) line slideway (8), linear electric motors (9), are arranged with base (10) in parallel successively, linear electric motors (9) is supported for positioning
Gripper shoe (11), side shield (12)；
Two slide blocks (7) are equipped with line slideway (8), between each slide block (7) and workbench (1) flexible body (4) is respectively arranged with；
Grating encoder scale (14) is provided with side shield (12), is provided with workbench (1) and grating encoder scale
(14) the grating encoder slide rule (3) being engaged.
2. the secondary nanophase precision actuation workbench of flexible structure is based on according to claim 1, it is characterised in that the cunning
Block (7) is ball-type slide block or roller slide block.
3. the secondary nanophase precision actuation workbench of flexible structure is based on according to claim 1, it is characterised in that described soft
Gonosome (4) includes U-shaped framework and the rectangular block connected by cross-articulation plate (19), and bolt hole a (17), U are provided with U-shaped framework
Type framework, by the bolt connection through bolt hole a (17), is provided with bolt hole b (18), rectangle with the slide block (7) on rectangular block
Block, by the bolt connection through bolt hole b (18), is equipped with piezo column with the workbench (1) on cross-articulation plate (19)
(16)。
4. the secondary nanophase precision actuation workbench of flexible structure is based on according to claim 1, it is characterised in that the bottom
Seat (10) two ends are symmetrically arranged with end face baffle (5), and buffer (6) is provided with end face baffle (5).
5. the secondary nanophase precision actuation workbench of flexible structure is based on according to claim 1, it is characterised in that the work
Make platform (1) to be connected with drag chain (15) by connecting plate (2), be installed with for connecting grating encoder slide rule (3) in drag chain (15)
Cable (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611192773.XA CN106594070B (en) | 2016-12-21 | 2016-12-21 | Secondary nanophase precision actuation workbench based on flexible structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611192773.XA CN106594070B (en) | 2016-12-21 | 2016-12-21 | Secondary nanophase precision actuation workbench based on flexible structure |
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| Publication Number | Publication Date |
|---|---|
| CN106594070A true CN106594070A (en) | 2017-04-26 |
| CN106594070B CN106594070B (en) | 2019-09-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201611192773.XA Active CN106594070B (en) | 2016-12-21 | 2016-12-21 | Secondary nanophase precision actuation workbench based on flexible structure |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015564A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of ultrasonic wave added overcomes friction linear motion platform |
| CN110202472A (en) * | 2019-05-31 | 2019-09-06 | 西安理工大学 | The piezoelectricity regulation device and piezoelectricity of closed hydrostatic slideway kinematic accuracy regulate and control method |
| CN111503135A (en) * | 2019-01-28 | 2020-08-07 | 曼恩能源方案有限公司 | Sliding bearing with an additively manufactured structure |
| CN112879427A (en) * | 2021-03-01 | 2021-06-01 | 东台超德机械有限公司 | Low group linear guide with be convenient for dismouting slider |
| TWI735295B (en) * | 2020-07-24 | 2021-08-01 | 潤達精密股份有限公司 | Linear actuator |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015564A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of ultrasonic wave added overcomes friction linear motion platform |
| CN111503135A (en) * | 2019-01-28 | 2020-08-07 | 曼恩能源方案有限公司 | Sliding bearing with an additively manufactured structure |
| CN111503135B (en) * | 2019-01-28 | 2023-11-28 | 曼恩能源方案有限公司 | Sliding bearing with additively manufactured structure |
| CN110202472A (en) * | 2019-05-31 | 2019-09-06 | 西安理工大学 | The piezoelectricity regulation device and piezoelectricity of closed hydrostatic slideway kinematic accuracy regulate and control method |
| TWI735295B (en) * | 2020-07-24 | 2021-08-01 | 潤達精密股份有限公司 | Linear actuator |
| CN112879427A (en) * | 2021-03-01 | 2021-06-01 | 东台超德机械有限公司 | Low group linear guide with be convenient for dismouting slider |
| CN112879427B (en) * | 2021-03-01 | 2022-03-29 | 东台超德机械有限公司 | Low-resistance linear guide rail with conveniently-disassembled and-assembled sliding block |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106594070B (en) | 2019-09-27 |
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Effective date of registration: 20210520 Address after: No.70, Jinye 1st Road, high tech Zone, Xi'an, Shaanxi 710000 Patentee after: SHAANXI OBOTR AUTOMATION TECHNOLOGY Co.,Ltd. Address before: 710048 No. 5 Jinhua South Road, Shaanxi, Xi'an Patentee before: XI'AN University OF TECHNOLOGY |
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Address after: 710000 No. 16, Shanglinyuan Third Road, high tech Zone, Xi'an, Shaanxi Patentee after: Shaanxi nobet Automation Technology Co.,Ltd. Address before: No.70, Jinye 1st Road, high tech Zone, Xi'an, Shaanxi 710000 Patentee before: SHAANXI OBOTR AUTOMATION TECHNOLOGY CO.,LTD. |