CN106583757A - Processing device and processing method for high-accuracy ultra-thin metal foils - Google Patents

Processing device and processing method for high-accuracy ultra-thin metal foils Download PDF

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Publication number
CN106583757A
CN106583757A CN201611084403.4A CN201611084403A CN106583757A CN 106583757 A CN106583757 A CN 106583757A CN 201611084403 A CN201611084403 A CN 201611084403A CN 106583757 A CN106583757 A CN 106583757A
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China
Prior art keywords
tinsel
sucker body
processing
thin
clamping
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Pending
Application number
CN201611084403.4A
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Chinese (zh)
Inventor
铁贵鹏
戴帆
戴一帆
彭小强
关朝亮
范占斌
刘俊峰
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National University of Defense Technology
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National University of Defense Technology
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Priority to CN201611084403.4A priority Critical patent/CN106583757A/en
Publication of CN106583757A publication Critical patent/CN106583757A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B5/00Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B1/00Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/12Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for securing to a spindle in general
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00Work clamping
    • B23Q2703/02Work clamping means
    • B23Q2703/04Work clamping means using fluid means or a vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00Work clamping
    • B23Q2703/02Work clamping means
    • B23Q2703/10Devices for clamping workpieces of a particular form or made from a particular material

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Turning (AREA)

Abstract

The invention discloses a processing device and processing method for high-accuracy ultra-thin metal foils. The device comprises a lathe equipped with a main shaft and a turning tool. A vacuum chuck used for adsorption and clamping of to-be-processed metal foils is arranged on the main shaft and comprises a chuck body which is arranged on the main shaft and a porous adsorption pad body which is arranged in the center region of the chuck body. The chuck body is provided with a central air pore used for absorbing to-be-processed regions of the metal foils to the porous adsorption pad body in the axis. Multiple side air pores used for absorbing edges of the metal foils are uniformly arranged in the side part of the central air pore of the chuck body in the same direction. The method comprises following steps: S1: clamping; S2: processing of a datum plane; S3: overturning and clamping; S4: thining and processing; S5: dismantling. The processing device and processing method for high-accuracy ultra-thin metal foils have following advantages: the device is convenient to dismantle and install and capable of stably clamping; and therefore, production efficiency is raised and uniformly of submicron-level thicknesses of the metal foils is ensured.

Description

The processing unit (plant) and processing method of high-precision ultra-thin tinsel
Technical field
The invention mainly relates to the Ultra-precision Turning field of nonferrous materials, more particularly to a kind of high-precision ultra-thin metal The processing unit (plant) and processing method of paillon foil.
Background technology
In inertial confinement fusion test, the Rayleigh caused by pellet surface heterogeneity-Taylor's hydrodynamics is unstable Property is a major reason for causing loss of ignition.Precise treatment decomposition experiment is this hydrodynamic instability phenomenon of research Important means, by making experiment target of the surface with modulation pattern, simulates the surface heterogeneity of true pellet.Though experimental test target 1mm or so sectional dimensions are so only needed to, but thickness is generally several microns to tens microns, and require the thickness for having more than 90% Uniformity, manufacture difficulty is very big.
At present, experiment target mainly has two kinds of manufacture methods:Duplicating method and direct processing method.Duplicating method needs first to prepare base Plate, then the modulation pattern of substrate is transferred on pellet thin film.Directly processing method generally uses single point diamond cutting technology, will The materials such as copper, aluminum are directly thinned to micron dimension thickness, then carve modulation pattern on the surface.Compared to duplicating method, directly add Engineering method needs not move through the reproduction process of substrate, and the modulation pattern precision for obtaining is higher, and close materials theory density, with uniqueness Superiority.But, the main difficulty of single point diamond cutting technology processing experiment target is that the thinning and thickness of material is uniform The guarantee of property.The metallic films such as aluminum, the copper of less than tens microns thickness are easily deformed even rupture, and its clamping difficulty is very big. Current methods used is, using the means of viscose glue, metal material and substrate to be consolidated, equivalent to the thickness that increased material, It is thinned to again after target thickness and uses sol degumming.This method degumming is more difficult, and productivity ratio is low, and the thickness of rubberised layer Uniformity it is difficult to ensure that, the thickness evenness for causing thinning rear thin slice is difficult to meet use requirement.
The content of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, there is provided a kind of easy accessibility, clamping be stable, Can improve production efficiency, can guarantee that tinsel sub-micrometer scale thickness evenness high-precision ultra-thin tinsel plus frock Put and processing method.
To solve above-mentioned technical problem, the present invention is employed the following technical solutions:
A kind of processing unit (plant) of high-precision ultra-thin tinsel, including lathe, are equiped with main shaft and turning cutting tool on the lathe, The vacuum cup for adsorbing clamping tinsel to be processed is equiped with the main shaft, the vacuum cup includes sucker body With Porous absorbent pad, the sucker body is installed on main shaft, and the Porous absorbent pad is installed in sucker body Central area, sucker body is offered for the region to be processed of tinsel to be adsorbed in Porous absorbent pad in its axis On centre porosity, the sucker body uniformly offers multiple for adsorbing metal paper tinsel in the direction in the same direction of centre porosity sidepiece The sidepiece pore at piece edge.
As the further improvement of above-mentioned technical proposal:
The sucker body offers the annular gas tank that a circle is connected with sidepiece pore in adsorption plane.
The sucker body offers the air slot connected with centre porosity and sidepiece pore in mounting surface.
The air slot includes ring-shaped gas-guiding trench and straight line air slot, and the ring-shaped gas-guiding trench is connected with sidepiece pore, institute State straight line air slot to connect with straight line air slot and centre porosity.
In circumferentially direction offers multiple counter sinks at outer edge, the sucker body passes through the sucker body Bolt is fastenedly connected through counter sink with main shaft.
The Porous absorbent pad is glued with sucker body.
A kind of processing method of the processing unit (plant) based on above-mentioned high-precision ultra-thin tinsel, comprises the following steps:
S1:Clamping:By tinsel clamping to be processed on vacuum cup, the edge for making tinsel is inhaled by sidepiece pore Attached, the region to be processed for making tinsel is adsorbed by Porous absorbent pad;
S2:Datum level is processed:Starting lathe makes turning cutting tool carry out turnery processing to the region to be processed of tinsel, until cutting It is flat;
S3:Turn-over clamping:Vacuum is removed, tinsel is dismantled, by machined datum level according to clamping the step of S1;
S4:Thinning processing:Starting lathe makes turning cutting tool that turnery processing is carried out to the region to be processed of tinsel until target Thickness;
S5:Dismounting:Vacuum is removed, tinsel is dismantled.
As the further improvement of above-mentioned technical proposal:
In step s 4, turning cutting tool is inclined inside incision tinsel, then to the normal feed of tinsel axis direction, Constantly carry out with tinsel thinning process according to this, make the stepped diminution of cutting zone, until it reaches target thickness.
In step s 4, angle during turning cutting tool feed and between tinsel axis is between 45 ° and 90 °.
Compared with prior art, it is an advantage of the current invention that:
The processing unit (plant) of the high-precision ultra-thin tinsel of the present invention, vacuum cup adopts partitioned organization, and it includes sucker body With Porous absorbent pad.Sucker body provides tinsel effectively absorption clamping using sidepiece pore, to avoid cutting The effect of power and centrifugal force etc. causes tinsel displacement or comes off;And Porous absorbent pad can be to the thinning of tinsel Region provides effective support and certain absorption so that tinsel is fettered by porous material all the time in thinning process, is kept away Exempt from thinning rear damaged to a certain extent;Clamping structure is adsorbed by this piecemeal and substantially increases stablizing for tinsel clamping Property, also, disassembly process is very convenient, it is not necessary to and degumming process is carried out, production efficiency is on the one hand improve, another side is realized The processing of tinsel sub-micrometer scale thickness evenness.The processing method of the present invention, based on above-mentioned high-precision ultra-thin metal forming The processing unit (plant) of piece is carried out, therefore possesses the corresponding technique effect of processing unit (plant) of above-mentioned high-precision ultra-thin tinsel.
Description of the drawings
Fig. 1 is the structural representation of the processing unit (plant) of high-precision ultra-thin tinsel of the present invention.
Fig. 2 be high-precision ultra-thin tinsel of the present invention processing unit (plant) in vacuum cup main structure diagram.
Fig. 3 is the A-A cross section structure diagrams of Fig. 2.
Fig. 4 be high-precision ultra-thin tinsel of the present invention processing unit (plant) in vacuum cup backsight structural representation.
Fig. 5 is the row knife track schematic diagram of the processing unit (plant) of high-precision ultra-thin tinsel of the present invention.
Fig. 6 is the flow chart of the processing method of high-precision ultra-thin tinsel of the present invention.
Each label is represented in figure:
1st, lathe;11st, main shaft;12nd, turning cutting tool;2nd, tinsel;3rd, vacuum cup;31st, sucker body;311st, central gas Hole;312nd, sidepiece pore;313rd, annular gas tank;314th, air slot;3141st, ring-shaped gas-guiding trench;3142nd, straight line air slot;315、 Counter sink;32nd, Porous absorbent pad.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
Fig. 1 to Fig. 5 shows a kind of embodiment of the processing unit (plant) of high-precision ultra-thin tinsel of the present invention, including lathe 1, main shaft 11 and turning cutting tool 12 are equiped with lathe 1, it is equiped with main shaft 11 for adsorbing clamping tinsel 2 to be processed Vacuum cup 3, vacuum cup 3 includes sucker body 31 and Porous absorbent pad 32, and sucker body 31 is installed on main shaft 11, Porous absorbent pad 32 is installed in the central area of sucker body 31, and sucker body 31 is offered for by metal in its axis The centre porosity 311 on Porous absorbent pad 32 is adsorbed in the region to be processed of paillon foil 2, and sucker body 31 is in centre porosity The direction in the same direction of 311 sidepieces uniformly offers multiple sidepiece pores 312 for the edge of adsorbing metal paillon foil 2.In the structure, very Suction disk 3 adopts partitioned organization, and it includes sucker body 31 and Porous absorbent pad 32, and sucker body 31 is using copper, aluminum etc. The nonferrous materials that can be processed with diamond bit, Porous absorbent pad 32 adopts graphite-based Porous, cuprio The materials such as Porous, and select porosity to be advisable.Sucker body 31 is provided with using sidepiece pore 312 to tinsel 2 The absorption clamping of effect, causes the displacement of tinsel 2 or comes off with the effect for avoiding cutting force and centrifugal force etc.;And Porous are inhaled Attached pad 32 can provide effective support and certain absorption to the weakened region of tinsel 2 so that tinsel 2 is thinned Fettered by porous material all the time in journey, it is to avoid it is thinning to a certain extent after it is damaged;Clamping structure is adsorbed by this piecemeal big The stability of the clamping of tinsel 2 is improve greatly, also, disassembly process is very convenient, it is not necessary to degumming process is carried out, on the one hand Production efficiency is improve, another side realizes the processing of the sub-micrometer scale thickness evenness of tinsel 2.
In the present embodiment, sucker body 31 offers the annular gas tank that a circle is connected with sidepiece pore 312 in adsorption plane 313.The annular gas tank 313 is arranged on the adsorption plane of sucker body 31 and covers sidepiece pore 312 so that tinsel 2 is inhaled Uniform force when attached, and lifting surface area increase, further increase the clamping strength and stability of tinsel 2.
In the present embodiment, sucker body 31 is offered and leading that centre porosity 311 and sidepiece pore 312 are connected in mounting surface Air drain 314.The air slot 314 is connected with centre porosity 311 and sidepiece pore 312 simultaneously so that vacuum equipment is not required to arrange only Vertical trachea is connected respectively with centre porosity 311 and sidepiece pore 312, on the one hand reduces consumptive material, reduces cost;The opposing party Face, it is ensured that evacuation and go the homogeneity of vacuum, prevents the single-point stress of tinsel 2 and damaged.
In the present embodiment, air slot 314 includes ring-shaped gas-guiding trench 3141 and straight line air slot 3142, ring-shaped gas-guiding trench 3141 Connect with sidepiece pore 312, straight line air slot 3142 is connected with straight line air slot 3142 and centre porosity 311.In the structure, Vacuum equipment can be simultaneously to centre porosity 311 and sidepiece pore 312 by straight line air slot 3142 and ring-shaped gas-guiding trench 3141 Carry out evacuation and produce absorption affinity, its is simple and practical.
In the present embodiment, sucker body 31 is in circumferentially direction offers multiple counter sinks 315, sucker at outer edge Body 31 is fastenedly connected through counter sink 315 by bolt with main shaft 11.During installation, will be inhaled through counter sink 315 using bolt Disk body 31 is arranged on main shaft 11, it is ensured that the convenience of dismounting.
In the present embodiment, Porous absorbent pad 32 is glued with sucker body 31.In the structure, Porous absorbent pad 32 With the degumming of sucker body 31 easily, install, dismantle and change beneficial to Porous absorbent pad 32.
Fig. 1 to Fig. 6 shows processing method of the present invention based on the processing unit (plant) of above-mentioned high-precision ultra-thin tinsel A kind of embodiment, comprise the following steps:
S1:Clamping:By the clamping of tinsel 2 to be processed on vacuum cup 3, the edge of tinsel 2 is made by sidepiece pore 312 absorption, the region to be processed for making tinsel 2 is adsorbed by Porous absorbent pad 32;
S2:Datum level is processed:Starting lathe 1 makes turning cutting tool 12 carry out turnery processing to the region to be processed of tinsel 2, directly To cutting flat with;
S3:Turn-over clamping:Vacuum is removed, tinsel 2 is dismantled, machined datum level is filled according to the step of S1 Folder;
S4:Thinning processing:Start lathe 1 make turning cutting tool 12 region to be processed of tinsel 2 is carried out turnery processing until Target thickness;
S5:Dismounting:Vacuum is removed, tinsel 2 is dismantled.
Using the method, effectively absorption clamping is provided tinsel 2 using sidepiece pore 312, to avoid cutting force Cause the displacement of tinsel 2 with the effect of centrifugal force etc. or come off;And Porous absorbent pad 32 can subtracting to tinsel 2 Thin region provides effective support and certain absorption so that tinsel 2 is fettered by porous material all the time in thinning process, Avoid thinning rear damaged to a certain extent;The stability of the clamping of tinsel 2 is substantially increased, also, disassembly process is very square Just, it is not necessary to carry out degumming process, production efficiency is on the one hand improve, it is thick that another side realizes the sub-micrometer scale of tinsel 2 The processing of degree uniformity.
In the present embodiment, in step s 4, turning cutting tool 12 is inclined inside incision tinsel 2, then to metal forming The normal feed of the axis direction of piece 2, is constantly carried out according to this with the thinning process of tinsel 2, makes the stepped diminution of cutting zone, directly To reaching target thickness.1., 2., 3. the specific feed track, represent row knife track, from the inside of tinsel 2 in Fig. 5 Feed is inclined, and using notch cuttype feed track, it is to avoid the excessive material removal amount of point of penetration and the thin slice that may bring breaks The risk of damage, formation it is stepped just corresponding with the position of sidepiece pore 312, it is ensured that in the course of processing of tinsel 2 all the time The larger absorption affinity of sidepiece pore 312 can be born.
In the present embodiment, in step s 4, angle during 12 feed of turning cutting tool and between the axis of tinsel 2 is at 45 ° Between 90 °.In the present embodiment, angle during 12 feed of turning cutting tool and between the axis of tinsel 2 is set to 50 °, its behaviour Facilitate.
Although the present invention is disclosed as above with preferred embodiment, but is not limited to the present invention.It is any to be familiar with ability The technical staff in domain, in the case of without departing from technical solution of the present invention scope, all using the technology contents pair of the disclosure above Technical solution of the present invention makes many possible variations and modification, or the Equivalent embodiments for being revised as equivalent variations.Therefore, it is every Without departing from the content of technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments, Equivalent variations and modification, all should fall in the range of technical solution of the present invention protection.

Claims (9)

1. a kind of processing unit (plant) of high-precision ultra-thin tinsel, including lathe(1), the lathe(1)On be equiped with main shaft (11)And turning cutting tool(12), it is characterised in that:The main shaft(11)On be equiped with for adsorbing clamping tinsel to be processed (2)Vacuum cup(3), the vacuum cup(3)Including sucker body(31)With Porous absorbent pad(32), the sucker Body(31)It is installed in main shaft(11)On, the Porous absorbent pad(32)It is installed in sucker body(31)Central area, Sucker body(31)Offer for by tinsel in its axis(2)Region to be processed adsorb in Porous absorbent pad (32)On centre porosity(311), the sucker body(31)In centre porosity(311)The direction in the same direction of sidepiece uniformly offers It is multiple for adsorbing metal paillon foil(2)The sidepiece pore at edge(312).
2. the processing unit (plant) of high-precision ultra-thin tinsel according to claim 1, it is characterised in that:The sucker body (31)A circle and sidepiece pore are offered in adsorption plane(312)The annular gas tank of connection(313).
3. the processing unit (plant) of high-precision ultra-thin tinsel according to claim 2, it is characterised in that:The sucker body (31)Offer and centre porosity in mounting surface(311)With sidepiece pore(312)The air slot of connection(314).
4. the processing unit (plant) of high-precision ultra-thin tinsel according to claim 3, it is characterised in that:The air slot (314)Including ring-shaped gas-guiding trench(3141)With straight line air slot(3142), the ring-shaped gas-guiding trench(3141)With sidepiece pore (312)Connection, the straight line air slot(3142)With straight line air slot(3142)And centre porosity(311)Connection.
5. the processing unit (plant) of high-precision ultra-thin tinsel according to any one of claim 1 to 4, it is characterised in that: The sucker body(31)In circumferentially direction offers multiple counter sinks at outer edge(315), the sucker body (31)Counter sink is passed through by bolt(315)With main shaft(11)It is fastenedly connected.
6. the processing unit (plant) of high-precision ultra-thin tinsel according to any one of claim 1 to 4, it is characterised in that: The Porous absorbent pad(32)With sucker body(31)It is glued.
7. a kind of processing side of the processing unit (plant) of the high-precision ultra-thin tinsel based on any one of claim 1 to 6 Method, it is characterised in that:Comprise the following steps:
S1:Clamping:By tinsel to be processed(2)Clamping is in vacuum cup(3)On, make tinsel(2)Edge by side Portion's pore(312)Absorption, makes tinsel(2)Region to be processed by Porous absorbent pad(32)Absorption;
S2:Datum level is processed:Start lathe(1)Make turning cutting tool(12)To tinsel(2)Region to be processed carry out turning Processing, until cutting flat with;
S3:Turn-over clamping:Vacuum is removed, to tinsel(2)Dismantled, machined datum level is filled according to the step of S1 Folder;
S4:Thinning processing:Start lathe(1)Make turning cutting tool(12)To tinsel(2)Region to be processed carry out turning and add Work is until target thickness;
S5:Dismounting:Vacuum is removed, to tinsel(2)Dismantled.
8. the processing method of high-precision ultra-thin tinsel according to claim 7, it is characterised in that:In step s 4, By turning cutting tool(12)Incline incision tinsel(2)Inside, then to tinsel(2)The normal feed of axis direction, according to this With tinsel(2)Thinning process is constantly carried out, and makes the stepped diminution of cutting zone, until it reaches target thickness.
9. the processing method of high-precision ultra-thin tinsel according to claim 8, it is characterised in that:In step s 4, Turning cutting tool(12)During feed and tinsel(2)Angle between axis is between 45 ° and 90 °.
CN201611084403.4A 2016-11-30 2016-11-30 Processing device and processing method for high-accuracy ultra-thin metal foils Pending CN106583757A (en)

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CN107283180A (en) * 2017-08-25 2017-10-24 柳州市立丰刀片制造有限责任公司 A kind of blade processing vacuum fixture and its application
CN107478871A (en) * 2017-09-08 2017-12-15 武汉精测电子技术股份有限公司 It is a kind of to be used for flexible OLED panel and FPC automatic aligning lighting-up equipment
CN109968053A (en) * 2017-12-27 2019-07-05 航天海鹰(哈尔滨)钛业有限公司 A kind of process for machining method of be loaded tool component and titanium alloy paillon part
CN113751969A (en) * 2021-09-08 2021-12-07 苏州众芯联电子材料有限公司 Processing technology of large aluminum substrate for LCD and AMOLED equipment
CN115302554A (en) * 2022-08-23 2022-11-08 靖江佳仁半导体科技有限公司 Modularized device and process for machining special-shaped ultrathin parts
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CN109968053A (en) * 2017-12-27 2019-07-05 航天海鹰(哈尔滨)钛业有限公司 A kind of process for machining method of be loaded tool component and titanium alloy paillon part
CN113751969A (en) * 2021-09-08 2021-12-07 苏州众芯联电子材料有限公司 Processing technology of large aluminum substrate for LCD and AMOLED equipment
CN115302554A (en) * 2022-08-23 2022-11-08 靖江佳仁半导体科技有限公司 Modularized device and process for machining special-shaped ultrathin parts
CN115302554B (en) * 2022-08-23 2023-09-19 靖江佳仁半导体科技有限公司 Modularized device and technology for processing special-shaped ultrathin parts
CN117483851A (en) * 2023-12-29 2024-02-02 成都和鸿科技股份有限公司 Machining feed method for annular thin-wall part
CN117483851B (en) * 2023-12-29 2024-04-30 成都和鸿科技股份有限公司 Machining feed method for annular thin-wall part

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Application publication date: 20170426