CN106582915A - Automatic electrode probing device of super clean bench - Google Patents
Automatic electrode probing device of super clean bench Download PDFInfo
- Publication number
- CN106582915A CN106582915A CN201611268068.3A CN201611268068A CN106582915A CN 106582915 A CN106582915 A CN 106582915A CN 201611268068 A CN201611268068 A CN 201611268068A CN 106582915 A CN106582915 A CN 106582915A
- Authority
- CN
- China
- Prior art keywords
- flange
- electricity pole
- tension electricity
- clean bench
- table top
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 13
- 230000005611 electricity Effects 0.000 claims description 35
- 239000000523 sample Substances 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 4
- 208000031481 Pathologic Constriction Diseases 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 210000001215 vagina Anatomy 0.000 claims 1
- 230000006835 compression Effects 0.000 abstract description 2
- 238000007906 compression Methods 0.000 abstract description 2
- 238000000746 purification Methods 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229960000074 biopharmaceutical Drugs 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L9/00—Supporting devices; Holding devices
- B01L9/02—Laboratory benches or tables; Fittings therefor
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/08—Radiation
- A61L2/10—Ultraviolet radiation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/14—Plasma, i.e. ionised gases
Landscapes
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Clinical Laboratory Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention provides an automatic electrode probing device of a super clean bench. The automatic electrode probing device comprises a high-pressure electrode rod and a locking mechanism used for limiting the high-pressure electrode rod to a bench face; the locking mechanism comprises a fixing flange, a sealing flange, a lead screw, a guide rail and a driving motor, wherein the fixing flange and the sealing flange are arranged in parallel, the lead screw and the guide rail are located on the two sides, and the driving motor is used for driving the lead screw; a pair of compression corrugated pipe is arranged between the fixing flange and the sealing flange; and the high-pressure electrode rod sequentially penetrates the bench face, the fixing flange and the sealing flange. The high-pressure electrode rod of the automatic electrode probing device can stretch out and draw back in a manner of being vertical to the super clean bench; and the limiting mechanism is used for limiting, and therefore the space using rate of the super clean bench is effectively improved.
Description
Technical field
The present invention relates to biology,drug and chemical industry equipment technical field, and in particular to a kind of automatic electrode of super-clean bench probes into dress
Put.
Background technology
Super-clean bench is a kind of universal Local Purification equipment of confession one man operation, and airflow pattern is vertical laminar flow and horizontal laminar flow,
It can bring up local high cleanliness air ambient, be that the industries such as scientific research pharmacy, health care, electronic optical instrument are ideal
Special equipment.Clean bench is widely used in needing the region of Local Purification, laboratory, bio-pharmaceuticals, opto-electronics, micro- electricity
The fields such as son, hard disk manufacturing.
The sterilizing of super-clean bench realized by plasma sterilizer, table top, backboard, top board by the use of super-clean bench etc. as
Ground electrode, high-tension electricity pole bar is probeed in super-clean bench operating area, and low pressure discharge phenomenon is produced between two electrodes, that is, produce
Low pressure plasma, plasma sterilization is carried out using plasma to all regions in super-clean bench inside.But in prior art
High-tension electricity pole bar longer dimension, the space taken in super-clean bench is larger so that space availability ratio is relatively low.
The content of the invention
The present invention provides a kind of automatic electrode of super-clean bench and probes into device, can realize the telescopic adjustment of high-tension electricity pole bar, carries
The space availability ratio of high super-clean bench.
To solve above-mentioned technical problem, the present invention is adopted the following technical scheme that：
A kind of automatic electrode of super-clean bench probes into device, including high-tension electricity pole bar and for high-tension electricity pole bar is spacing in table top
Retaining mechanism, the retaining mechanism includes the mounting flange that is arranged in parallel and sealing flange, positioned at the leading screw and guide rail of both sides, with
And for driving one end of the motor of leading screw, the leading screw to be connected with mounting flange, the other end of leading screw by screw with
Sealing flange connects, and one end of the guide rail is connected with mounting flange, and the other end and the sealing flange of guide rail are slidably connected, described
Corrugated tube is provided between mounting flange and sealing flange, the high-tension electricity pole bar sequentially passes through table top, mounting flange and sealing
Flange, the lower end of high-tension electricity pole bar is provided with power connection end.
Connected by insulation assembly between the lower end and high-tension electricity pole bar and table top of the mounting flange and table top, this is exhausted
Edge component includes the felt pad being arranged between mounting flange and table top, and for contacting felt pad, mounting flange and high pressure
The L-type insulating supporting of electrode stem.
Ceramic seal is provided between the high-tension electricity pole bar and sealing flange, the high-tension electricity pole bar can be perpendicular to sealing
Flange is relatively moved.
The upper end of the high-tension electricity pole bar is provided with table top cover plate.
From above technical scheme, the high-tension electricity pole bar of the present invention can be stretched perpendicular to the table top of super-clean bench,
And carried out by retaining mechanism spacing, effectively increase the space availability ratio of super-clean bench.
Description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the partial enlarged drawing of insulation assembly in the present invention；
Fig. 3 is the structural representation of preferred embodiment in the present invention.
In figure：10th, high-tension electricity pole bar, 11, power connection end, 12, ceramic seal, 13, table top cover plate, 20, retaining mechanism, 20,
Retaining mechanism, 21, mounting flange, 22, sealing flange, 23, leading screw, 24, guide rail, 25, motor, 26, screw, 27, compression
Corrugated tube, 30, insulation assembly, 31, felt pad, 32, L-type insulating supporting, 33, sealing gasket, 40, table top.
Specific embodiment
A kind of preferred implementation of the present invention is described in detail below in conjunction with the accompanying drawings.
As shown in figure 1, the electrode probe into device including high-tension electricity pole bar 10 and for by high-tension electricity pole bar it is spacing
Retaining mechanism 20 on table top 40, the high-tension electricity pole bar can be stretched perpendicular to table top, and be locked by retaining mechanism
It is fixed.
The retaining mechanism 20 includes mounting flange 21, sealing flange 22, leading screw 23, guide rail 24, is arranged on mounting flange
Corrugated tube 27 between sealing flange, and for driving the motor 25 of leading screw, wherein mounting flange and sealing flange
It is arranged in parallel, leading screw and guide rail are located at both sides.One end of the leading screw 23 is connected with mounting flange, and the other end of leading screw passes through silk
Female 26 are connected with sealing flange, and one end of the guide rail 24 is connected with mounting flange, and the other end and the sealing flange of guide rail slide
Connection.Leading screw constitutes screw pair with the screw being set on leading screw, and the moment of torsion that motor is produced is changed into by leading screw
The translational motion of screw, screw drives move up and down be capable of achieving high-field electrode bar of sealing flange to probe into and withdrawal action.
The high-tension electricity pole bar 10 sequentially passes through table top, mounting flange and sealing flange, and the upper end of high-tension electricity pole bar is arranged
There is table top cover plate 13, table top cover plate is used for covering the hole on table top when high-field electrode withdraws, it is to avoid liquid when super-clean bench is operated
Flow into accidentally or penetrate into, affect the class of insulation.The lower end of high-tension electricity pole bar 10 is provided with power connection end 11.
As shown in Fig. 2 by exhausted between the lower end and high-tension electricity pole bar 10 and table top of the mounting flange 21 and table top
Edge component 30 connects, and the insulation assembly includes the felt pad 31 being arranged between mounting flange and table top, and for contacting absolutely
The L-type insulating supporting 32 of edge pad, mounting flange and high-tension electricity pole bar.In the present embodiment, felt pad 31 is also designed to L-type, its length
While being arranged between mounting flange and table top, minor face is placed between table top and high-tension electricity pole bar, and the top of the minor face is provided with close
Packing 33, when high-tension electricity pole bar is retracted sealing function is played.
Fig. 3 shows a kind of structural representation of preferred embodiment, in the embodiment, the lower end of high-tension electricity pole bar 10 with it is close
Ceramic seal 12 is provided between envelope flange 22 so that high-tension electricity pole bar can be relatively moved perpendicular to sealing flange, so
High-tension electricity pole bar can be increased and stretch into the indoor distance of operation, further shorten electric in the high-tension electricity pole bar and super-clean bench for probeing into
Spacing between pole, plasma discharge conditions are lower.This crunch seal electrode structure is more safe and reliable, and stress levels are more
Height, vacuum sealing degree is higher.
The above embodiment is only that the preferred embodiment of the present invention is described, not to the model of the present invention
Enclose and be defined, on the premise of without departing from design spirit of the present invention, technical side of the those of ordinary skill in the art to the present invention
Various modifications and improvement that case is made, all should fall in the protection domain of claims of the present invention determination.
Claims (5)
1. a kind of automatic electrode of super-clean bench probes into device, it is characterised in that including high-tension electricity pole bar (10) and for by high pressure
The spacing retaining mechanism (20) on table top of electrode stem, the retaining mechanism includes mounting flange (21) and the Sealing Method being arranged in parallel
Blue (22), positioned at the leading screw (23) and guide rail (24) of both sides, and for driving the motor (25) of leading screw, the leading screw
One end is connected with mounting flange, and the other end of leading screw is connected by screw (26) with sealing flange, one end of the guide rail with it is solid
Determine flange connection, the other end and the sealing flange of guide rail are slidably connected, and between the mounting flange and sealing flange ripple is provided with
Stricture of vagina pipe (27), the high-tension electricity pole bar (20) sequentially passes through table top, mounting flange and sealing flange, and the lower end of high-tension electricity pole bar sets
It is equipped with power connection end (11).
2. the automatic electrode of super-clean bench according to claim 1 probes into device, it is characterised in that the mounting flange (21) with
The lower end of table top and high-tension electricity pole bar (10) are connected between table top by insulation assembly (30).
3. the automatic electrode of super-clean bench according to claim 2 probes into device, it is characterised in that insulation assembly (30) bag
The felt pad (31) being arranged between mounting flange and table top is included, and for contacting felt pad, mounting flange and high-field electrode
The L-type insulating supporting (32) of bar.
4. the automatic electrode of super-clean bench according to claim 1 probes into device, it is characterised in that the high-tension electricity pole bar (10)
Ceramic seal (12) is provided between sealing flange (22), the high-tension electricity pole bar can do relative shifting perpendicular to sealing flange
It is dynamic.
5. the automatic electrode of super-clean bench according to claim 1 probes into device, it is characterised in that the high-tension electricity pole bar (10)
Upper end be provided with table top cover plate (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611268068.3A CN106582915A (en) | 2016-12-31 | 2016-12-31 | Automatic electrode probing device of super clean bench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611268068.3A CN106582915A (en) | 2016-12-31 | 2016-12-31 | Automatic electrode probing device of super clean bench |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106582915A true CN106582915A (en) | 2017-04-26 |
Family
ID=58581921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611268068.3A Pending CN106582915A (en) | 2016-12-31 | 2016-12-31 | Automatic electrode probing device of super clean bench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106582915A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1877806A (en) * | 2005-05-09 | 2006-12-13 | 爱德牌工程有限公司 | Lift pin module of FPD manufacturing machine |
| CN101082125A (en) * | 2005-11-18 | 2007-12-05 | 东京毅力科创株式会社 | Apparatus for thermal and plasma enhanced vapor deposition and method of operating |
| JP2008270721A (en) * | 2007-03-27 | 2008-11-06 | Tokyo Electron Ltd | Substrate mounting base and substrate processing device |
| CN101319313A (en) * | 2007-06-07 | 2008-12-10 | 财团法人工业技术研究院 | Power transport mechanism and plasma auxiliary chemical vapor deposition apparatus using the same |
| CN103065918A (en) * | 2012-11-21 | 2013-04-24 | 中国科学院微电子研究所 | Electrode introducing structure |
| CN203301843U (en) * | 2013-05-10 | 2013-11-20 | 合肥聚能电物理高技术开发有限公司 | Novel automatic plasma detector |
| CN103972014A (en) * | 2014-05-22 | 2014-08-06 | 中国地质大学（北京） | Plasma reaction chamber electrode gap adjusting device and plasma reaction chamber |
-
2016
- 2016-12-31 CN CN201611268068.3A patent/CN106582915A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1877806A (en) * | 2005-05-09 | 2006-12-13 | 爱德牌工程有限公司 | Lift pin module of FPD manufacturing machine |
| CN101082125A (en) * | 2005-11-18 | 2007-12-05 | 东京毅力科创株式会社 | Apparatus for thermal and plasma enhanced vapor deposition and method of operating |
| JP2008270721A (en) * | 2007-03-27 | 2008-11-06 | Tokyo Electron Ltd | Substrate mounting base and substrate processing device |
| CN101319313A (en) * | 2007-06-07 | 2008-12-10 | 财团法人工业技术研究院 | Power transport mechanism and plasma auxiliary chemical vapor deposition apparatus using the same |
| CN103065918A (en) * | 2012-11-21 | 2013-04-24 | 中国科学院微电子研究所 | Electrode introducing structure |
| CN203301843U (en) * | 2013-05-10 | 2013-11-20 | 合肥聚能电物理高技术开发有限公司 | Novel automatic plasma detector |
| CN103972014A (en) * | 2014-05-22 | 2014-08-06 | 中国地质大学（北京） | Plasma reaction chamber electrode gap adjusting device and plasma reaction chamber |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170426 |
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| RJ01 | Rejection of invention patent application after publication |