CN106558263A - A kind of room temperature multistable balanced microcomputer tool system and its implementation - Google Patents
A kind of room temperature multistable balanced microcomputer tool system and its implementation Download PDFInfo
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- CN106558263A CN106558263A CN201610936122.0A CN201610936122A CN106558263A CN 106558263 A CN106558263 A CN 106558263A CN 201610936122 A CN201610936122 A CN 201610936122A CN 106558263 A CN106558263 A CN 106558263A
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Abstract
The present invention relates to a kind of room temperature multistable balanced microcomputer tool system and its implementation.The micro mechanical system includes a pair of spacing for the flat board 1 being parallel to each other and flat board 2 of micron dimension；Flat board 1 is electrical hyperbolic dispersion metamaterials, by metal material thin layer and thin layer of dielectric material in the alternately stacked One Dimension Periodic layer structure for constituting in z-axis direction；Flat board 2 is magnetic hyperbolic dispersion metamaterials, constitutes One Dimension Periodic layer structure z-axis direction is alternately stacked by thin layers of magnetic material and thin layer of dielectric material.During room temperature, due to the special electromagnetic property of hyperbolic dispersion metamaterials, multiple Casimir power can be formed and obeyed for the region of micron dimension in plate spacing and repel zero stable equilibrium point for attracting, caused by vacuum fluctuation under normal circumstances the adhesion between micro mechanical system components and parts to provide a kind of effective ways to overcome.
Description
Technical field
The present invention relates to a kind of micro mechanical system, more particularly to one kind have multiple stable stress balances under room temperature environment
The micro mechanical system of point.
Background technology
Two big foundation stones one of of the quantum theory as modern physics, the method that provide not only new cognitive nature,
Also considerable effect is served in the every aspect of social development simultaneously.At present the miniaturization of semiconductor device has connect
Near limit, the semiconductor fabrication process of 20nm are highly developed, develop towards less direction.In so small chi
Under degree, quantum effect is clearly.One of them is in recent years by people's extensive concern precisely due to vacuum fluctuation institute
The Casimir effects for causing.According to quantrm electrodynamics, vacuum is not vacancy, but is filled with virtual photon,
In the case of there is electromagnetic boundary, virtual photon density can be affected, so as to the effect for producing power between macro object.It is this
The size of power is relevant with the spacing between object, so being negligible in conventional macro-scale.But in micro-nano meter ruler
On degree, this power is very important.In recent years, people have experimentally been measured and this to have been caused due to vacuum fluctuation
Casimir power.As a rule, Casimir power is generally in the form of captivation, therefore can be very between micro nano structure device
Easily affected by Casimir captivations and adhesive attraction is occurred, cause thrashing, or even quit work.Therefore study
Research of the Casimir effects to micro mechanical system has important meaning.
Research in recent years is it has already been indicated that the polarity (attract or repel) of Casimir power is decided by the electromagnetic property on border
And geomery.For typically for the one-dimentional structure for being easiest to process, the Casimir power produced by repulsion must just be used
Two kinds of as far as possible contrary materials of electromagnetic property.For electrical material is shown as, present in nature, many metallicses are equal
Can meet.And for magnetic material, the magnetic material that nature is present relatively is difficult to meet.Additionally, current research approach is big
Majority is only limitted to study the Casimir power under zero temperature state, and pays close attention to more and how to realize from captivation to stress balance to row
The phase transformation of repulsion.Stress balance point in such mechanical process is unstable equilibrium point because the direction of motion of object and
Impact direction is consistent, once object is subject to small sample perturbations in stress balance point, system is just destroyed, and this is to developing increasingly
Micro mechanical system has very big obstruction.
The content of the invention
It is an object of the invention to provide under a kind of room temperature with multiple stable stress balance points micro mechanical system and
In multiple positions, its implementation, can realize that the polarity of the Casimir power caused by vacuum fluctuation is obeyed and repel-attract-row
The conversion scolded, realizes stable stress balance point, strengthens the stability of micro mechanical system.
The purpose of the present invention can be achieved through the following technical solutions：A kind of room temperature multistable balanced microcomputer tool system,
Characterized in that, the micro mechanical system includes spacing in two the first flat boards being parallel to each other of micro-nano magnitude and second flat
Plate；First flat board is electrical hyperbolic dispersion metamaterials, is handed in z-axis direction by metal material thin layer and thin layer of dielectric material
For the One Dimension Periodic layer structure for overlapping；Second flat board is magnetic hyperbolic dispersion metamaterials, by magnetic material
Thin layer and thin layer of dielectric material are in the alternately stacked composition One Dimension Periodic layer structure in z-axis direction.
The metal material thin layer, the thickness of thin layer of dielectric material and magnetic material thin layer in z-axis direction are little
In the 1/20 of the plasma wavelength of selected metal material；The metal material thin layer, thin layer of dielectric material and magnetic
Length of the material thin-layer in x-axis and y-axis direction is all higher than 10 times of the plasma wavelength of selected metal material.
The metal material includes gold, silver or copper.
The dielectric material includes aluminium oxide, silicon, resin or transparent plastic.
The magnetic material includes magneto-optic liquid crystal, Faraday Magneto-optical Glass Containing Rare-earth or magnesium ferrite.
Described electrical hyperbolic dispersion metamaterials flat board and magnetic hyperbolic dispersion metamaterials platen parallel are placed, between plate
Away from for micro-nano magnitude, room temperature multistable balanced microcomputer tool system is constituted.
As described above, a kind of room temperature multistable balanced microcomputer tool system of the present invention, has the advantages that：
The micro mechanical system that the present invention is provided, works at ambient temperature, as the special electromagnetism dispersion of hyperbolic material is closed
Impact of the system to vacuum fluctuation, can realize the balance that multiple Casimir power are 0 in the range of plate spacing is for micro-nano magnitude
Point, wherein the equilibrium point for having more than 1 is stable stress balance point, can be maintained system steady when system affects by perturbation
It is fixed.
Description of the drawings
Fig. 1 is the structural representation of micro mechanical system of the present invention；
Fig. 2 a and Fig. 2 b are the dispersion map of electrical and magnetic hyperbolic chromatic dispersion material of the present invention；
Fig. 3 is the change of the Casimir power with plate spacing of the present invention.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
As shown in figure 1, a kind of room temperature multistable balanced microcomputer tool system, the micro mechanical system includes spacing in micro-nano amount
Two first flat boards being parallel to each other and the second flat board of level.Wherein described first flat board is electrical hyperbolic dispersion metamaterials,
D is respectively by thicknessaAnd dbMetal material thin layer and thin layer of dielectric material z-axis direction it is alternately stacked constitute One Dimension Periodic
Layer structure.Second flat board is magnetic hyperbolic dispersion metamaterials, is respectively d by thicknesseAnd ddThin layers of magnetic material and
Thin layer of dielectric material is in the alternately stacked composition One Dimension Periodic layer structure in z-axis direction.The thickness d of each material thin-layera、db、
dcAnd ddThe 1/20 of the plasma wavelength of respectively less than selected metal material；The metal material thin layer, thin layers of magnetic material and
Length of the thin layer of dielectric material in x-axis and y-axis direction is all higher than 10 times of the plasma wavelength.
According to broad sense Maxwell Garnett EFFECTIVE MEDIUM THEORYs, the electromagnetic property of electrical hyperbolic dispersion metamaterials can
To be expressed asAnd μ1=1, wherein εxx=εyy=faεa+fbεb, εzz=(fa/εa+fb/εb)-1；fa=
da/(da+db)=0.5, fb=db/(da+db)=0.5 is respectively metal material and medium material in electrical hyperbolic dispersion metamaterials
The dutycycle of material；εaFor the dielectric constant of metal material；εbFor the dielectric constant of dielectric material.
According to broad sense Maxwell Garnett EFFECTIVE MEDIUM THEORYs, the electromagnetic property of magnetic hyperbolic dispersion metamaterials can
To be expressed asWherein μxx=μyy=fcμc+fdμd, μzz=(fc/μc+fd/μd)-1；fc=dc/(dc+
dd)=0.9, fd=dd/(dc+dd)=0.1 is respectively the dutycycle of magnetic material and dielectric material in magnetic hyperbolic material；μcFor
The pcrmeability of magnetic material；μd=1 is the pcrmeability of aluminium oxide；The dielectric constant of magnetic hyperbolic dispersion metamaterials is expressed as ε2
=fcεc+fdεd, εcFor the dielectric constant of magnetic material；εdFor the dielectric constant of dielectric material.
The computing formula of the Casimir power under non-absolute zero temperature can be expressed asWherein k is edge
The wave beam in x directions, ξmFor Songyuan City's frequency,WithThe reflection of respectively the first flat board and the second flat board under empty frequency to p-polarization field
Coefficient；A is the distance between the first flat board and the second flat board；Kelvins of the T for system local environment.Casimir power is had
Songyuan City's frequency range of contribution is decided by the size of plate spacing.For specific plate spacing, in contributive Songyuan City's frequency range
Interior, if the first flat board and the second flat board all show as electrically, Casimir power is just captivation；If the first flat board shows as
Electrically and the second flat board shows as magnetic, Casimir power may be repulsive force.
Shown in Fig. 2 a is a kind of change of dielectric constant and pcrmeability with frequency of electrical hyperbolic dispersion metamaterials, can
To see that the dielectric constant of electrical hyperbolic dispersion metamaterials, consistently greater than equal to its pcrmeability, is showed in whole frequency separation
For electrical.
Shown in Fig. 2 b is a kind of change of dielectric constant and pcrmeability with frequency of magnetic hyperbolic dispersion metamaterials, can
It is complicated with the size variation for seeing the dielectric constant and pcrmeability of electrical hyperbolic dispersion metamaterials, it is electric in whole frequency separation
Property and magnetic alternate.
Shown in Fig. 3 is the above-mentioned electrical hyperbolic dispersion metamaterials when temperature is 300 Kelvins (26.85 degrees Celsius)
Change of the Casimir power between flat board and magnetic hyperbolic dispersion metamaterials flat board with plate spacing.As can be seen from the figure deposit
In the equilibrium point that 4 stress are 0.For equilibrium point 1 and 3, when system is subject to perturbation, and plate spacing reduces (increase), put down
What is existed between plate is captivation (repulsive force), and final result is that two plates bond (away from), therefore the two equilibrium points are unstable
Equilibrium point.For equilibrium point 2 and 4, direction and the plate of the power existed between flat board are subject to the phase all the time of the direction of motion after perturbation
It is instead, therefore plate will be moved back and forth in the equilibrium point left and right sides, under the influence of air drag, eventually stable in former equilibrium point,
So far, a kind of room temperature multistable balanced microcomputer tool system is achieved.
Claims (7)
1. a kind of room temperature multistable balanced microcomputer tool system, it is characterised in that the micro mechanical system includes spacing in micro-nano amount
Two first flat boards being parallel to each other and the second flat board of level；First flat board is electrical hyperbolic dispersion metamaterials, by gold
Belong to the One Dimension Periodic layer structure of material thin-layer and thin layer of dielectric material in the alternately stacked composition in z-axis direction；Described second is flat
Plate is magnetic hyperbolic dispersion metamaterials, constitutes one z-axis direction is alternately stacked by thin layers of magnetic material and thin layer of dielectric material
Dimension periodic layer structure.
2. a kind of room temperature multistable balanced microcomputer tool system according to claim 1, it is characterised in that the metal material
The thickness of thin layer, thin layer of dielectric material and magnetic material thin layer in z-axis direction is respectively less than selected metal material
The 1/20 of plasma wavelength；The metal material thin layer, thin layer of dielectric material and thin layers of magnetic material are in x-axis and y-axis side
To length be all higher than 10 times of plasma wavelength of selected metal material.
3. a kind of room temperature multistable balanced microcomputer tool system according to claim 1 and 2, it is characterised in that the metal
Material includes gold, silver or copper.
4. a kind of room temperature multistable balanced microcomputer tool system according to claim 1 and 2, it is characterised in that the medium
Material includes aluminium oxide, silicon, resin or transparent plastic.
5. a kind of room temperature multistable balanced microcomputer tool system according to claim 1 and 2, it is characterised in that the magnetic
Material includes magneto-optic liquid crystal, Faraday Magneto-optical Glass Containing Rare-earth or magnesium ferrite.
6. a kind of room temperature multistable balanced microcomputer tool network system realization, it is characterised in that comprise the following steps：
Step one, by metal material thin layer and thin layer of dielectric material alternately stacked in z-axis direction, makes One Dimension Periodic stratiform
First flat board of the electrical hyperbolic dispersion metamaterials of structure；
Step 2, by thin layers of magnetic material and thin layer of dielectric material alternately stacked in z-axis direction, makes One Dimension Periodic stratiform
Second flat board of the magnetic hyperbolic dispersion metamaterials of structure；
Step 3, the first flat board for obtaining and the second platen parallel are placed, and obtain having multiple steady state equilibrium points at room temperature
Micro mechanical system.
7. a kind of room temperature multistable balanced microcomputer tool network system realization according to claim 6, it is characterised in that described
Spacing between first flat board and the second flat board is in micro-nano magnitude.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328273A (en) * | 2017-05-27 | 2017-11-07 | 南京航空航天大学 | A kind of high performance non-contact formula hot-fluid adjuster |
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| WO2012125070A1 (en) * | 2011-03-14 | 2012-09-20 | Urmatskikh Anatolii Vasilievich | Micro- and nanodrive |
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Patent Citations (6)
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| US6650527B1 (en) * | 2000-07-11 | 2003-11-18 | Fabrizio Pinto | Article comprising a casimir force modulator and methods therefor |
| CN1696653A (en) * | 2005-06-09 | 2005-11-16 | 江苏大学 | Method for measuring Kashmir inside rectangular cavity |
| CN1718531A (en) * | 2005-06-09 | 2006-01-11 | 江苏大学 | Quantum minitype propeller using vacuum |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328273A (en) * | 2017-05-27 | 2017-11-07 | 南京航空航天大学 | A kind of high performance non-contact formula hot-fluid adjuster |
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